JP2010115663A - Method and apparatus for joining base material - Google Patents

Method and apparatus for joining base material Download PDF

Info

Publication number
JP2010115663A
JP2010115663A JP2008288619A JP2008288619A JP2010115663A JP 2010115663 A JP2010115663 A JP 2010115663A JP 2008288619 A JP2008288619 A JP 2008288619A JP 2008288619 A JP2008288619 A JP 2008288619A JP 2010115663 A JP2010115663 A JP 2010115663A
Authority
JP
Japan
Prior art keywords
base material
pair
base
vacuum
vacuum suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008288619A
Other languages
Japanese (ja)
Inventor
Noriyuki Matsukaze
紀之 松風
Yuji Sakagami
祐治 阪上
Masaaki Iwatani
政昭 岩谷
Kiyoshi Ichinose
浄 一瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP2008288619A priority Critical patent/JP2010115663A/en
Publication of JP2010115663A publication Critical patent/JP2010115663A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Fuel Cell (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To suppress the apparatus cost by simplifying an apparatus, and to allow thin plates to be joined with each other as base materials. <P>SOLUTION: An electrolyte membrane 1 and a gasket 3 to be joined with each other are sucked and held by suction plates 11, 41 through the vacuum suction. A closed space 15 surrounded by a seal member 13 between a fixed base 9 and a movable base 39 is evacuated so as to attain the degree of vacuum lower than the vacuum suction to the suction plates 11, 41. In this condition, the electrolyte membrane 1 and the gasket 3 are separated from each other. From this condition, an electrolyte membrane holder 5 is pressed against a gasket holder 7 by a hydraulic press machine 49 to apply the load, the seal member 13 is compressed thereby to allow the electrolyte membrane 1 and the gasket 3 to be pressed against, brought into contact with, and joined with each other. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、一対の基材を互いに接合する基材の接合方法及び基材の接合装置に関する。   The present invention relates to a substrate bonding method and a substrate bonding apparatus for bonding a pair of substrates to each other.

従来、一対の基材相互を接合する際に、基材相互間の接合面における気泡を排除するために、基材を保持する保持部全体を収容部によって基材とともに密閉空間内に収容し、該密閉空間を真空吸引するものが知られている(下記特許文献１参照)。   Conventionally, when joining a pair of base materials, in order to eliminate air bubbles at the joint surface between the base materials, the entire holding portion holding the base material is accommodated in the sealed space together with the base material by the accommodating portion, One that vacuums the sealed space is known (see Patent Document 1 below).

一方、下記特許文献２には、基材を上下から加圧する一対のプレス加熱板を設け、この一対のプレス加熱板相互間における基材の外周縁の外側位置にシール部材を設けることで、シール部材の内側の基材の設置領域のみ真空吸引するものが開示されている。
特開２００６−４８８５５号公報 特開２０００−３２５７７３号公報 On the other hand, in the following Patent Document 2, a pair of press heating plates that pressurize the base material from above and below are provided, and a seal member is provided at an outer position of the outer peripheral edge of the base material between the pair of press heating plates. The thing which vacuum-sucks only the installation region of the base material inside a member is disclosed.
JP 2006-48855 A JP 2000-325773 A


ところで、上記した特許文献１に記載のものは、基材を保持する保持部全体を基材とともに密閉空間内に収容しているので、設備全体が大掛かりとなって設備コストが高くなる。
By the way, since the thing of above-mentioned patent document 1 has accommodated the whole holding | maintenance part holding a base material in sealed space with a base material, the whole equipment becomes large and equipment cost becomes high.

一方、特許文献２に記載のものは、シール部材の内側の基材の設置領域のみ真空吸引するので、特許文献１に記載のものに比較して設備が簡素化でき設備コストを抑えることができる。   On the other hand, since the thing of patent document 2 vacuum-sucks only the installation area | region of the base material inside a sealing member, compared with the thing of patent document 1, an installation can be simplified and equipment cost can be held down. .

ところが、特許文献２に記載のものは、一方のプレス加熱板に設けた金属フランジの内側に、他方のプレス加熱板に設けた金属フランジの貫入部を貫入してその内側に密閉空間を形成する構造であることから、基材として板状の薄物を互いに接合することが困難である。すなわち、一対の薄物基材を、上下の各プレス加熱板を保持部としてそれぞれ保持し接合する際には、各保持部（プレス加熱板）に金属フランジが対向配置されているので、該金属フランジが邪魔となって、一対の薄物基材相互を接触させることが困難である。   However, the thing of patent document 2 penetrates the penetration part of the metal flange provided in the other press heating plate inside the metal flange provided in one press heating plate, and forms sealed space in the inside. Since it is a structure, it is difficult to mutually join plate-like thin objects as substrates. That is, when holding and joining a pair of thin base materials using the upper and lower press heating plates as holding portions, metal flanges are disposed opposite to the holding portions (press heating plates). It becomes difficult to make a pair of thin base materials contact each other.

そこで、本発明は、設備を簡素化して設備コストを抑えるとともに、板状の薄物を基材として互いに接合できるようにすることを目的としている。   Therefore, an object of the present invention is to simplify equipment and reduce equipment costs, and to join plate-like thin objects to each other as a base material.

本発明は、一対の基材をそれぞれ対応する基材保持部に背後から真空吸引により吸着保持させた後、これら一対の基材が互いに離間した状態となるよう基材保持部相互を互いに接近させ、かつ、一対の基材の外側に位置するシール部材によってその内側の密閉空間を真空吸引して減圧させ、シール材を圧縮させつつ各基材保持部を互いに接近移動させ、一対の基材を互い加圧接触させて接合することを特徴とする。   In the present invention, after a pair of base materials are sucked and held by the corresponding base material holding portions from behind by vacuum suction, the base material holding portions are brought close to each other so that the pair of base materials are separated from each other. In addition, the sealed space inside the pair of base materials is vacuum-sucked and depressurized by the seal member, and the base material holding portions are moved closer to each other while compressing the seal material. It is characterized in that they are joined in pressure contact with each other.

本発明によれば、一対の基材の外側に位置するシール部材によってその内側の基材が位置する側に密閉空間を形成しているので、基材を保持する保持部全体を基材とともに密閉空間内に収容する場合に比較して、設備を簡素化して設備コストを抑えることができる。また、一対の基材を、基材保持部により背後から真空吸引により吸着保持し、かつ、一対の基材の外側に位置するシール部材によってその内側の基材が位置する側に密閉空間を形成しているので、一対の基材相互を接合する際には、シール部材を圧縮させるようにして基材保持部相互を接近させればよく、したがって板状の薄物を基材として互いに接合することが容易にできる。   According to the present invention, since the sealed space is formed on the side where the inner base material is located by the seal member located on the outer side of the pair of base materials, the entire holding portion for holding the base material is sealed together with the base material. Compared to the case of accommodating in the space, the equipment can be simplified and the equipment cost can be reduced. In addition, a pair of base materials are sucked and held by vacuum suction from behind by the base material holding part, and a sealed space is formed on the side where the inner base material is located by a seal member located outside the pair of base materials Therefore, when joining a pair of base materials, it is only necessary to bring the base material holding parts closer to each other by compressing the sealing member, and therefore joining the thin plate-like materials together as a base material. Can be easily done.

以下、本発明の実施の形態を図面に基づき説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の第１の実施形態に係わる基材の接合装置を示す断面図で、ここでの一対の基材は、燃料電池で使用される固体高分子電解質膜（以下、単に電解質膜と呼ぶ）１とガスケット３とで構成している。電解質膜１は、厚さ１２５μｍの例えば矩形状にカットしたもので、ガスケット３は、電解質膜１と外形がほぼ同じ矩形状でかつ電解質膜１の周縁に沿って接合するように中央部分を削除した枠形状とし、厚さ１５０μｍとしている。   FIG. 1 is a cross-sectional view showing a base material joining apparatus according to a first embodiment of the present invention. A pair of base materials here is a solid polymer electrolyte membrane (hereinafter simply referred to as an electrolyte) used in a fuel cell. (Referred to as a membrane) 1 and a gasket 3. The electrolyte membrane 1 is cut into a rectangular shape having a thickness of 125 μm, for example, and the gasket 3 has a rectangular shape that is substantially the same as the electrolyte membrane 1 and has a central portion removed so as to be joined along the periphery of the electrolyte membrane 1. The frame has a thickness of 150 μm.

このガスケット３の枠形状の内側に対応する電解質膜１の領域が、燃料電池として組み付けたときの電極（発電領域）を構成することになる。   The region of the electrolyte membrane 1 corresponding to the inside of the frame shape of the gasket 3 constitutes an electrode (power generation region) when assembled as a fuel cell.

電解質膜１は、図１中で下部に位置する基材保持部としての電解質膜保持具５に保持され、ガスケット３は、図１中で上部に位置する基材保持部としてのガスケット保持具７に保持される。これら電解質膜保持具５及びガスケット保持具７は、回動連結具８によって互いに回動可能に連結され、ここではガスケット保持具７が、図１に示す互いに対向する状態と、後述する図２に示す離反した状態との間を変位可能なように回動可能となっている。   The electrolyte membrane 1 is held by an electrolyte membrane holder 5 as a base material holder located at the bottom in FIG. 1, and the gasket 3 is a gasket holder 7 as a base material holder located at the top in FIG. Retained. The electrolyte membrane holder 5 and the gasket holder 7 are rotatably connected to each other by a rotary connector 8. Here, the gasket holder 7 is opposed to each other as shown in FIG. It can turn so that it can be displaced between the separated states shown.

電解質膜保持具５は、固定基台９の表面の中央に凹部９ａを形成し、この凹部９ａに多孔質体としての吸着板１１を収容固定する。このとき、固定基台９の表面と吸着板１１の表面とはほぼ同一面を形成している。吸着板１１としては、金属多孔質体であれば、例えば、金属メッシュ、金属繊維を編み合わせたもの、金属粉末を接着剤によって固形化したものでよく、セラミックス多孔質体であれば、多孔質カーボン，酸化物系（アルミナ）多孔質板でよい。   The electrolyte membrane holder 5 forms a recess 9a in the center of the surface of the fixed base 9, and accommodates and fixes the adsorption plate 11 as a porous body in the recess 9a. At this time, the surface of the fixed base 9 and the surface of the suction plate 11 form substantially the same surface. The adsorbing plate 11 may be, for example, a metal porous body, a metal mesh, a metal fiber knitted fabric, a metal powder solidified with an adhesive, or a ceramic porous body. Carbon and oxide (alumina) porous plates may be used.

電解質膜１及びガスケット３の外周縁のさらに外側における固定基台９上には、これら電解質膜１及びガスケット３の周囲を囲むようにシール部材１３を配置して、このシール部材１３の内側の電解質膜１及びガスケット３を設けた領域に密閉空間１５を形成する。   On the fixed base 9 further outside the outer peripheral edges of the electrolyte membrane 1 and the gasket 3, a seal member 13 is disposed so as to surround the electrolyte membrane 1 and the gasket 3, and the electrolyte inside the seal member 13 is arranged. A sealed space 15 is formed in the region where the membrane 1 and the gasket 3 are provided.

そして、この密閉空間１５内に対し、空気を吸引して圧力を低下させる密閉空間吸引部としての真空吸引ポンプ１７を設けている。すなわち、密閉空間１５に対応する位置の固定基台９には、一端が密閉空間１５に開口する排気通路１９を複数形成し、これら複数の排気通路１９のそれぞれの他端を、固定基台９内に設けてある環状の連通路２１によって互いに連通する。   A vacuum suction pump 17 is provided as a sealed space suction unit that sucks air and reduces the pressure in the sealed space 15. That is, the fixed base 9 at a position corresponding to the sealed space 15 is formed with a plurality of exhaust passages 19 whose one ends open into the sealed space 15, and the other ends of the plurality of exhaust passages 19 are connected to the fixed base 9. They communicate with each other by an annular communication passage 21 provided in the inside.

この環状の連通路２１の一部位に対応する位置の固定基台９には、下部に突出する突出部２３を形成し、この突出部２３に、連通路２１に一端が連通する排気通路２５を形成し、排気通路２５の他端に、前記した真空吸引ポンプ１７を配管２７を介して接続する。また、突出部２３には、排気通路２５を開閉する開閉弁２９を設けている。   The fixed base 9 at a position corresponding to one part of the annular communication passage 21 is formed with a protrusion 23 protruding downward, and an exhaust passage 25 having one end communicating with the communication passage 21 is formed in the protrusion 23. The vacuum suction pump 17 is connected to the other end of the exhaust passage 25 through a pipe 27. The protrusion 23 is provided with an opening / closing valve 29 for opening and closing the exhaust passage 25.

さらに、固定基台９内には、吸着板１１の多孔質部に一端が連通する排気通路３１を形成し、排気通路３１の他端は配管３３の一端に接続してその途中部位には、開閉弁３５を取り付けるとともに、配管３３の他端には基材吸引部としての真空吸引ポンプ３７を接続する。   Further, in the fixed base 9, an exhaust passage 31 having one end communicating with the porous portion of the adsorption plate 11 is formed, and the other end of the exhaust passage 31 is connected to one end of the pipe 33. An on-off valve 35 is attached, and a vacuum suction pump 37 as a base material suction unit is connected to the other end of the pipe 33.

一方、ガスケット保持具７は、可動基台３９の表面に、前記ガスケット３の枠形状に対応する凹部３９ａを形成し、この凹部３９ａに凹部３９ａとほぼ同形状の多孔質体としての吸着板４１を収容固定する。このとき、可動基台３９の表面と吸着板４１の表面とはほぼ同一面を形成している。吸着板４１は、前記した吸着板１１と同様のものを使用する。   On the other hand, the gasket holder 7 is formed with a recess 39a corresponding to the frame shape of the gasket 3 on the surface of the movable base 39, and the suction plate 41 as a porous body having substantially the same shape as the recess 39a. The housing is fixed. At this time, the surface of the movable base 39 and the surface of the suction plate 41 form substantially the same surface. The suction plate 41 is the same as the suction plate 11 described above.

また、可動基台３９内には、吸着板４１の多孔質部に一端が連通する排気通路４３を形成し、排気通路４３の他端は配管４５の一端に接続してその他端に開閉弁４７を取り付ける。この配管４５の他端は、図示しない接続用配管を介して前記した真空吸引ポンプ３７に着脱可能に接続する。   Further, an exhaust passage 43 having one end communicating with the porous portion of the adsorption plate 41 is formed in the movable base 39, the other end of the exhaust passage 43 is connected to one end of the pipe 45, and the open / close valve 47 is connected to the other end. Install. The other end of the pipe 45 is detachably connected to the vacuum suction pump 37 described above via a connection pipe (not shown).

次に、上記した接合装置による接合方法を説明する。図２（ａ）に示すように、ガスケット保持具７を電解質膜保持具５に対して離反させてこれら各保持具５，７をその表面が互いにほぼ同一平面上となるようにする。上記図２（ａ）の状態で、図２（ｂ）に示すように、電解質膜保持具５側の吸着板１１上に、電解質膜１を載置してセットする。この際、電解質膜１は、その外周縁全周が吸着板１１の外周縁全周よりも外側に位置し、吸着板１１の全域を覆う状態となる。   Next, a bonding method using the above-described bonding apparatus will be described. As shown in FIG. 2A, the gasket holder 7 is separated from the electrolyte membrane holder 5 so that the surfaces of the holders 5 and 7 are substantially flush with each other. 2A, the electrolyte membrane 1 is placed and set on the adsorption plate 11 on the electrolyte membrane holder 5 side as shown in FIG. 2B. At this time, the entire outer peripheral edge of the electrolyte membrane 1 is located outside the entire outer peripheral edge of the adsorption plate 11 and covers the entire area of the adsorption plate 11.

一方、ガスケット保持具７の吸着板４１上には、ガスケット３を載置してセットする。この際、枠形状のガスケット３は、その外周縁全周が吸着板４１の外周縁全周よりも外側に位置するとともに、内周縁全周が吸着板４１の内周縁全周よりも内側に位置し、これによりガスケット３は吸着板４１の全域を覆うことになる。   On the other hand, the gasket 3 is placed and set on the suction plate 41 of the gasket holder 7. At this time, the outer periphery of the frame-shaped gasket 3 is located on the outer side of the entire outer periphery of the suction plate 41 and the inner periphery of the gasket 3 is positioned on the inner side of the inner periphery of the suction plate 41. Thus, the gasket 3 covers the entire area of the suction plate 41.

そして、この状態で、開閉弁３５，４７を開放させ、真空吸引ポンプ３７を作動させることで、真空吸引によって電解質膜１を吸着板１１に吸着保持させるとともに、ガスケット３を吸着板４１に吸着保持される。なお、このとき真空吸引ポンプ３７は、図１に示すように配管３３に接続されるとともに、図示しない接続用配管によって配管４５にも接続されている。   In this state, the on-off valves 35 and 47 are opened and the vacuum suction pump 37 is operated, so that the electrolyte membrane 1 is adsorbed and held on the adsorption plate 11 by vacuum suction and the gasket 3 is adsorbed and held on the adsorption plate 41. Is done. At this time, the vacuum suction pump 37 is connected to the pipe 33 as shown in FIG. 1 and is also connected to the pipe 45 by a connection pipe (not shown).

また、このときの真空吸引ポンプ３７による真空吸引系統の真空度は５ｈＰａ以下とし、吸着保持後は開閉弁３５，４７を閉じることで、５ｈＰａ以下の真空度を確保しておく。   Further, the degree of vacuum of the vacuum suction system by the vacuum suction pump 37 at this time is set to 5 hPa or less, and the vacuum degree of 5 hPa or less is secured by closing the on-off valves 35 and 47 after the adsorption holding.

電解質膜１及びガスケット３を吸着板１１及び４１にそれぞれ吸着保持させたら、図３（ａ）に示すように、ガスケット保持具７を、回動連結具８を支点として回動させて電解質膜保持具５に接近させ、これら各保持具５，７相互を対向させた状態とする。このとき、図１に示してある真空吸引ポンプ３７と配管４５とを接続する図示しない接続用配管は、例えば可撓性を有する部材で構成して上記したガスケット保持具７の回動変位に追従可能とする。   When the electrolyte membrane 1 and the gasket 3 are adsorbed and held on the adsorption plates 11 and 41, respectively, as shown in FIG. 3 (a), the gasket holder 7 is rotated with the rotary coupling 8 as a fulcrum to hold the electrolyte membrane. The tool 5 is brought close to the holders 5 and 7 so as to face each other. At this time, a connection pipe (not shown) for connecting the vacuum suction pump 37 and the pipe 45 shown in FIG. 1 is made of, for example, a flexible member and follows the rotational displacement of the gasket holder 7 described above. Make it possible.

上記図３（ａ）の状態では、シール部材１３は対向する可動基台３９に接触することで前記した密閉空間１５を形成するが、電解質膜１とガスケット３とは互いに離間した状態となっている。   In the state shown in FIG. 3A, the sealing member 13 forms the sealed space 15 by contacting the opposing movable base 39, but the electrolyte membrane 1 and the gasket 3 are separated from each other. Yes.

そして、図３（ａ）の状態で開閉弁２９を開放させてから、図３（ｂ）に示すように、真空吸引ポンプ１７を作動させることで、密閉空間１５内を真空吸引して１０ｈＰａ以下まで減圧する。このときの真空吸引動作に伴ってシール材１３は徐々に圧縮され、規定の圧力まで減圧した時点での吸着板１１，４１相互間の距離は、３００μｍ以上とする。したがって、このとき電解質膜１とガスケット３とは、依然として互いに離間状態であり、その後は、開閉弁２９を閉じておく。   And after opening the on-off valve 29 in the state of Fig.3 (a), as shown in FIG.3 (b), by operating the vacuum suction pump 17, the inside of the sealed space 15 is vacuum-sucked and 10 hPa or less Depressurize until. The sealing material 13 is gradually compressed with the vacuum suction operation at this time, and the distance between the suction plates 11 and 41 at the time when the pressure is reduced to a predetermined pressure is set to 300 μm or more. Therefore, at this time, the electrolyte membrane 1 and the gasket 3 are still separated from each other, and thereafter, the on-off valve 29 is closed.

上記した密閉空間１５内に対する真空吸引作業においては、図示しない電磁弁などの駆動機構によって、もしくは手動によって、開閉弁２９の開度を制御することで、規定の圧力（１０ｈＰａ以下）まで減圧する。   In the vacuum suction operation for the above-described sealed space 15, the pressure is reduced to a specified pressure (10 hPa or less) by controlling the opening degree of the on-off valve 29 by a driving mechanism such as an electromagnetic valve (not shown) or manually.

次に、前記図１に示すように、加圧部としての油圧プレス機械４９により、ガスケット保持具７を電解質膜保持具５に向けて加圧して荷重を付与し、シール部材１３をさらに圧縮させて電解質膜１とガスケット３とを互いに加圧接触させて接合する。   Next, as shown in FIG. 1, the gasket holder 7 is pressed toward the electrolyte membrane holder 5 by a hydraulic press machine 49 as a pressurizing unit to apply a load, and the seal member 13 is further compressed. Then, the electrolyte membrane 1 and the gasket 3 are joined in pressure contact with each other.

なお、加圧部としては油圧プレス機械４９に限ることはなく、空圧や電動モータを利用するなど他の機構を用いてもよい。   The pressurizing unit is not limited to the hydraulic press machine 49, and other mechanisms such as using air pressure or an electric motor may be used.

そして、上記した加圧状態を所定時間継続させた後、油圧プレス機械４９による荷重付与を解除し、さらに各真空吸引ポンプ１７，３７の動作を停止させるか、あるいは真空ポンプ１７，３７の接続を解除するなどすることで、これらの真空吸引系統を大気圧に戻し、さらに可動基台３９を前記図２に示す状態となるように、固定基台９に対し回動連結具８を支点として回動させて離間させる。その後、電解質膜１とガスケット３との接合体を固定基台９上から取り出す。   Then, after the pressurization state described above is continued for a predetermined time, the load application by the hydraulic press machine 49 is released, and the operation of the vacuum suction pumps 17 and 37 is further stopped, or the vacuum pumps 17 and 37 are connected. By releasing the vacuum suction system, the vacuum suction system is returned to the atmospheric pressure, and the movable base 39 is rotated with respect to the fixed base 9 as a fulcrum so as to be in the state shown in FIG. Move them apart. Thereafter, the joined body of the electrolyte membrane 1 and the gasket 3 is taken out from the fixed base 9.

このようにして製造した電解質膜１とガスケット３とからなる接合体においては、真空吸引する際に、前記図３（ｂ）に示すように、電解質膜１とガスケット３とが互いに離間した状態を維持することで、接合面での気泡発生を抑えることができ、これらを燃料電池に組み込んだ際の製品としての信頼性を高めることができる。   In the joined body composed of the electrolyte membrane 1 and the gasket 3 manufactured as described above, when vacuum suction is performed, the electrolyte membrane 1 and the gasket 3 are separated from each other as shown in FIG. By maintaining, it is possible to suppress the generation of bubbles at the joint surface, and it is possible to improve the reliability as a product when these are incorporated into a fuel cell.

そして、このようにして製造した接合体は、一対の基材である電解質膜１及びガスケット３の外側に位置するシール部材１３によってその内側の電解質膜１及びガスケット３が位置する側に密閉空間１５を形成しているので、電解質膜１及びガスケット３を保持する保持部全体を電解質膜１及びガスケット３とともに密閉空間内に収容する場合に比較して、設備を簡素化して設備コストを抑えることができる。   And the joined body manufactured in this way is sealed space 15 on the side where the inner electrolyte membrane 1 and gasket 3 are located by the seal member 13 located outside the electrolyte membrane 1 and gasket 3 as a pair of base materials. Compared to the case where the entire holding part for holding the electrolyte membrane 1 and the gasket 3 is accommodated in the sealed space together with the electrolyte membrane 1 and the gasket 3, the equipment can be simplified and the equipment cost can be reduced. it can.

また、本実施形態では、電解質膜１及びガスケット３を、吸着板１１及び４１を介して背後から真空吸引により吸着保持し、かつ、電解質膜１及びガスケット３の外側に位置するシール部材１３によってその内側の電解質膜１及びガスケット３が位置する側に密閉空間１５を形成している。このため、電解質膜１及びガスケット３相互を接合する際には、シール部材１３を圧縮させるように固定基台９と可動基台３９とを互いに接近させればよく、したがって基材として板状の薄物である電解質膜１とガスケット３とを互いに接合することが容易にできる。   Further, in the present embodiment, the electrolyte membrane 1 and the gasket 3 are adsorbed and held by vacuum suction from behind via the adsorption plates 11 and 41, and the sealing member 13 positioned outside the electrolyte membrane 1 and gasket 3 A sealed space 15 is formed on the side where the inner electrolyte membrane 1 and the gasket 3 are located. For this reason, when the electrolyte membrane 1 and the gasket 3 are joined to each other, the fixed base 9 and the movable base 39 may be brought close to each other so as to compress the seal member 13, and accordingly, a plate-like shape is used as the base material. The thin electrolyte membrane 1 and gasket 3 can be easily joined to each other.

また、本実施形態では、電解質膜保持具５及びガスケット保持具７により電解質膜１及びガスケット３をそれぞれ保持させるための真空吸引による真空度を、密閉空間１５の真空度よりも高く設定している。これにより、電解質膜１及びガスケット３を電解質膜保持具５及びガスケット保持具７に、より確実に保持させることができ、もって電解質膜１とガスケット３との互いの離間状態をより確実に維持できて気泡発生をより確実に抑えることが可能となる。   Further, in this embodiment, the degree of vacuum by vacuum suction for holding the electrolyte membrane 1 and the gasket 3 by the electrolyte membrane holder 5 and the gasket holder 7 is set higher than the vacuum degree of the sealed space 15. . As a result, the electrolyte membrane 1 and the gasket 3 can be more reliably held by the electrolyte membrane holder 5 and the gasket holder 7, so that the separated state of the electrolyte membrane 1 and the gasket 3 can be more reliably maintained. Therefore, it is possible to more reliably suppress the generation of bubbles.

また、本実施形態では、電解質膜保持具５及びガスケット保持具７の電解質膜１及びガスケット３を保持させるための真空吸引系統と、密閉空間１５を真空吸引するための真空吸引系統とを互いに別系統としているが、この際、密閉空間１５側の真空吸引系統に調整機構を設けて真空吸引の際の真空度を調整してもよい。   In this embodiment, the vacuum suction system for holding the electrolyte membrane 1 and gasket 3 of the electrolyte membrane holder 5 and gasket holder 7 and the vacuum suction system for vacuum suction of the sealed space 15 are separated from each other. In this case, an adjustment mechanism may be provided in the vacuum suction system on the sealed space 15 side to adjust the degree of vacuum during vacuum suction.

電解質膜１は、水分を吸湿しているので、この吸湿状態を確保するために、真空中に晒される時間を可能な限り短くかつより低真空の状態で接合することや、品質安定化のために真空度がより安定する状況下で接合することが望まれる。これらの条件を満たすために、以下のような調整機構によって真空度を調整する。   Since the electrolyte membrane 1 absorbs moisture, in order to ensure this moisture absorption state, the time of exposure to vacuum is as short as possible and bonded in a lower vacuum state, or for stabilization of quality. In addition, it is desirable to perform bonding under a situation where the degree of vacuum is more stable. In order to satisfy these conditions, the degree of vacuum is adjusted by the following adjustment mechanism.

例えば図４（ａ）に示すように、固定基台９に、一端が密閉空間１５に連通するリーク弁通路５１を設け、このリーク弁通路５１の他端を外部に設けたリーク弁５３に接続する。密閉空間１５に対し真空吸引している際に、リーク弁５３を適宜開放することで、規定の真空度までの到達速度を遅らせる。   For example, as shown in FIG. 4A, the fixed base 9 is provided with a leak valve passage 51 having one end communicating with the sealed space 15, and the other end of the leak valve passage 51 is connected to a leak valve 53 provided outside. To do. When the vacuum is sucked into the sealed space 15, the leak valve 53 is appropriately opened to delay the arrival speed to the specified vacuum level.

また、図４（ｂ）に示すように、固定基台９の突出部２３に、一端が排気通路２５に連通するレデューサ通路５５を設け、このレデューサ通路５５の他端を外部に設けたレデューサ５７に接続する。レデューサ５７は、例えば排気通路２５を絞るなどして排気流量を少なくするもので、密閉空間１５に対し真空吸引している際に、レデューサ５７を適宜調整することで、規定の真空度までの到達速度を遅らせる。   Further, as shown in FIG. 4B, a reducer passage 55 having one end communicating with the exhaust passage 25 is provided in the protruding portion 23 of the fixed base 9, and the other end of the reducer passage 55 is provided outside. Connect to. The reducer 57 reduces the exhaust flow rate by, for example, constricting the exhaust passage 25. When the vacuum is sucked into the sealed space 15, the reducer 57 is appropriately adjusted to reach a specified degree of vacuum. Slow down the speed.

図５は、真空吸引する際の真空度と時間との相関図である。例えば曲線ＣやＢの場合は、曲線Ａに比較して真空度が急激に変化しかつ高真空となっているが、このような急激な真空度の変化や高真空状態は、電解質膜１が破損するなどの悪影響を及ぼす。このため、曲線Ａのように規定の真空度までの到達速度を緩やかして遅くしかつ、到達真空度をより低くすることで、電解質膜１を保護することができる。   FIG. 5 is a correlation diagram between the degree of vacuum and time during vacuum suction. For example, in the case of the curves C and B, the degree of vacuum changes abruptly and becomes a high vacuum as compared with the curve A, but such a sudden change in the degree of vacuum or a high vacuum state is caused by the electrolyte membrane 1. It has an adverse effect such as damage. For this reason, the electrolyte membrane 1 can be protected by slowing down and slowing down the reaching speed to the specified degree of vacuum as shown by the curve A and lowering the degree of reaching vacuum.

また、本実施形態では、電解質膜保持具５及びガスケット保持具７は、電解質膜１及びガスケット３が接触する吸着板１１及び４１を固定基台９及び可動基台３９の表面にそれぞれ備え、これら各吸着板１１及び４１に、固定基台９及び可動基台３９に設けた排気通路３１及び４３の一端を連通させ、排気通路３１及び４３の他端を外部に設けた真空吸引ポンプ３７に連通させている。   Further, in the present embodiment, the electrolyte membrane holder 5 and the gasket holder 7 are provided with adsorption plates 11 and 41 that are in contact with the electrolyte membrane 1 and the gasket 3 on the surfaces of the fixed base 9 and the movable base 39, respectively. One end of exhaust passages 31 and 43 provided in the fixed base 9 and the movable base 39 is communicated with each suction plate 11 and 41, and the other end of the exhaust passages 31 and 43 is communicated with a vacuum suction pump 37 provided outside. I am letting.

これにより、真空吸引ポンプ３７を作動させることにより、吸着板１１及び４１を介して電解質膜１及びガスケット３を電解質膜保持具５及びガスケット保持具７に、より確実に保持させることができ、気泡発生を抑制する上で有効である。   Thereby, by operating the vacuum suction pump 37, the electrolyte membrane 1 and the gasket 3 can be more reliably held by the electrolyte membrane holder 5 and the gasket holder 7 via the adsorption plates 11 and 41, It is effective in suppressing the occurrence.

図６（ａ）は、本発明の第２の実施形態に係わる基材の接合装置を示す断面図である。この実施形態は、固定基台９を台座５９上に設置し、可動基台３９を固定基台９よりも外形寸法を大きくして固定基台９の周縁に対して外側に突出した突出部３９ａと台座５９との間に、規制ピン６１を介在させている。   Fig.6 (a) is sectional drawing which shows the joining apparatus of the base material concerning the 2nd Embodiment of this invention. In this embodiment, the fixed base 9 is installed on a pedestal 59, the movable base 39 has a larger outer dimension than the fixed base 9, and protrudes outwardly from the periphery of the fixed base 9. A restriction pin 61 is interposed between the pedestal 59 and the pedestal 59.

規制ピン６１は、上端を可動基台３９の下面に接触させる一方、下端を台座５９の上面に設けたピン挿入穴５９ａ内に移動可能に挿入し、ピン挿入穴５９ａの下部の台座５９内に設けた油圧機構６３によって支持させてある。したがって、可動基台３９は固定基台９に対し規制ピン６１を介して接近離反移動可能である。上記した規制ピン６１と油圧機構６３とにより規制手段を構成している。   The restriction pin 61 has its upper end in contact with the lower surface of the movable base 39, and its lower end is movably inserted into a pin insertion hole 59a provided on the upper surface of the pedestal 59, and into the pedestal 59 below the pin insertion hole 59a. It is supported by a hydraulic mechanism 63 provided. Therefore, the movable base 39 can move toward and away from the fixed base 9 via the restriction pin 61. The restriction pin 61 and the hydraulic mechanism 63 described above constitute restriction means.

なお、図６では前記図１に示してある排気通路３１，４３や真空吸引ポンプ１７，３７などの真空吸引系統は省略してあり、これらの構成については、図１に示した第１の実施形態と同様であり、また図１のものと同一構成要素には同一符号を付してある。   In FIG. 6, the vacuum suction systems such as the exhaust passages 31 and 43 and the vacuum suction pumps 17 and 37 shown in FIG. 1 are omitted, and the configuration thereof is the first embodiment shown in FIG. The same components as those in FIG. 1 are denoted by the same reference numerals.

油圧機構６３は、シール部材１３が可動基台３９にほぼ接触し、かつ、電解質膜１とガスケット３とが互いに離間した状態となるように、油圧力を調整しておく。すなわち、油圧機構６３による油圧力が、可動基台３９や規制ピン６１の自重よりも大きくなるよう調整する。   The hydraulic mechanism 63 adjusts the oil pressure so that the seal member 13 is substantially in contact with the movable base 39 and the electrolyte membrane 1 and the gasket 3 are separated from each other. That is, the hydraulic pressure by the hydraulic mechanism 63 is adjusted to be larger than the weight of the movable base 39 and the regulation pin 61.

なお、本実施形態での電解質膜１及びガスケット３のセット作業としては、可動基台３９を上記図６（ａ）の位置から上昇させて固定基台９との間隔を広くした状態で行う。この際、ガスケット３については、外周縁を可動基台３９の下面に対し、容易に離脱可能なように例えば接着剤などにより仮止めしておく。   In addition, the setting operation of the electrolyte membrane 1 and the gasket 3 in the present embodiment is performed in a state where the movable base 39 is lifted from the position of FIG. At this time, the outer periphery of the gasket 3 is temporarily fixed to the lower surface of the movable base 39 with an adhesive or the like so that it can be easily detached.

そして、各開閉弁３５，４７を開放させて真空吸引ポンプ３７を作動させることで、前記第１の実施形態と同様に、電解質膜１及びガスケット３を吸着板１１及び４１にそれぞれ吸着保持させる。その後、真空吸引ポンプ１７を作動させることで、可動基台３９が下降してシール材１３は徐々に圧縮されて図６（ａ）の状態となる。この状態では、電解質膜１とガスケット３とは互いに離間した状態を維持している。   Then, by opening the on-off valves 35 and 47 and operating the vacuum suction pump 37, the electrolyte membrane 1 and the gasket 3 are adsorbed and held on the adsorption plates 11 and 41, respectively, as in the first embodiment. Thereafter, by operating the vacuum suction pump 17, the movable base 39 is lowered and the sealing material 13 is gradually compressed to be in the state of FIG. In this state, the electrolyte membrane 1 and the gasket 3 are kept separated from each other.

その後、図６（ｂ）に示すように、油圧プレス機械４９により、電解質膜保持具５をガスケット保持具７に向けて加圧して荷重を付与し、シール部材１３をさらに圧縮させて電解質膜１とガスケット３とを互いに加圧接触させて接合する。   Thereafter, as shown in FIG. 6 (b), the electrolyte membrane holder 5 is pressed against the gasket holder 7 by a hydraulic press machine 49 to apply a load, and the seal member 13 is further compressed to cause the electrolyte membrane 1 to be compressed. And the gasket 3 are brought into pressure contact with each other and joined.

その後、上記した加圧状態を所定時間継続させた後、荷重付与を解除し、さらに各真空吸引ポンプ１７，３７の動作を停止させるなどすることで、これらの真空吸引系統を大気圧に戻してから、油圧プレス機械４９を上昇させるとともに、可動基台３９を固定基台９から離反する方向に油圧機構６３によって上昇させる。そして、回転電解質膜１とガスケット３との接合体を固定基台９上から取り出す。   Then, after the above-mentioned pressurization state is continued for a predetermined time, the load application is released, and further, the operation of each vacuum suction pump 17, 37 is stopped, thereby returning these vacuum suction systems to atmospheric pressure. Then, the hydraulic press machine 49 is raised, and the movable base 39 is raised by the hydraulic mechanism 63 in a direction away from the fixed base 9. Then, the joined body of the rotary electrolyte membrane 1 and the gasket 3 is taken out from the fixed base 9.

なお、油圧プレス機械４９による可動基台３９の移動距離は、最大で１ｍｍ程度とする。   The moving distance of the movable base 39 by the hydraulic press machine 49 is about 1 mm at the maximum.

このように、第２の実施形態では、規制手段である規制ピン６１及び油圧機構６３によって、図６（ａ）の状態で固定基台９と可動基台３９との間隔、換言すれば、電解質膜１とガスケット３との間隔をより確実に維持できる。このため、密閉空間１５を真空吸引する際の接合面での気泡発生をより確実に抑えることが可能となる。   As described above, in the second embodiment, the distance between the fixed base 9 and the movable base 39 in the state shown in FIG. 6A, in other words, the electrolyte by the restriction pin 61 and the hydraulic mechanism 63 which are restriction means. The distance between the membrane 1 and the gasket 3 can be maintained more reliably. For this reason, it becomes possible to suppress more reliably the bubble generation | occurrence | production in the joint surface at the time of vacuum-sucking the sealed space 15.

なお、上記第２の実施形態において、油圧機構６３に代えてコイルスプリングを用いてもよい。この場合には、コイルスプリングを固定基台９の上面に形成した縦穴内に収容配置し、規制ピン６１をこの縦穴内に上端が位置するコイルスプリングに下端が接触した状態とする。   In the second embodiment, a coil spring may be used instead of the hydraulic mechanism 63. In this case, the coil spring is accommodated in a vertical hole formed in the upper surface of the fixed base 9, and the regulation pin 61 is in a state where the lower end is in contact with the coil spring whose upper end is located in the vertical hole.

すなわち、コイルスプリングによって可動基台３９を、規制ピン６１を介して弾性支持することで、電解質膜１とガスケット３とが離間した状態を確保する。その後、密閉空間１５を真空吸引する際にコイルスプリングが撓んで可動基台３９が下降するが、このとき電解質膜１とガスケット３とは離間した状態を維持している。続いて、油圧プレス機械４９により可動基台３９に荷重を付与する際には、コイルスプリングがさらに撓み、電解質膜１とガスケット３とが互いに加圧接触して接合される。   That is, the movable base 39 is elastically supported by the coil spring via the restriction pin 61, thereby ensuring a state where the electrolyte membrane 1 and the gasket 3 are separated from each other. Thereafter, when the sealed space 15 is vacuumed, the coil spring is bent and the movable base 39 is lowered. At this time, the electrolyte membrane 1 and the gasket 3 are kept apart. Subsequently, when a load is applied to the movable base 39 by the hydraulic press machine 49, the coil spring is further bent, and the electrolyte membrane 1 and the gasket 3 are pressed and joined to each other.

上記したコイルスプリングを使用する場合には、図６に示す油圧機構６５を使用した場合に比較して簡素な構造で設備コストを低く抑えることができる。   When the above coil spring is used, the equipment cost can be kept low with a simple structure as compared with the case where the hydraulic mechanism 65 shown in FIG. 6 is used.

上述したように、本発明では、第１，第２の各実施形態のいずれにおいても、密閉空間１５内を真空吸引する際には、図３（ｂ）や図６（ａ）に示すように、電解質膜１とガスケット３とが互いに離間した状態とすることで、接合面相互間の気泡発生を抑えている。   As described above, in the present invention, as shown in FIGS. 3B and 6A, in the first and second embodiments, when the inside of the sealed space 15 is vacuum-sucked, as shown in FIG. In addition, the electrolyte membrane 1 and the gasket 3 are separated from each other, thereby suppressing the generation of bubbles between the joint surfaces.

これに対し、比較例として、密閉空間１５内を真空吸引する際に、電解質膜１とガスケット３とが互いに離間せずに接触した状態として接合作業を行った場合には、接合面相互間に気泡が残留した。   On the other hand, as a comparative example, when vacuuming the inside of the sealed space 15, when the joining operation was performed with the electrolyte membrane 1 and the gasket 3 being in contact with each other without being separated from each other, Bubbles remained.

本発明の第１の実施形態に係わる基材の接合装置を示す断面図である。It is sectional drawing which shows the joining apparatus of the base material concerning the 1st Embodiment of this invention. （ａ）は図１の接合装置におけるガスケット保持具を電解質膜保持具に対して離反させた状態を示す動作説明図、（ｂ）は（ａ）の状態からガスケット保持具及び電解質膜保持具に電解質膜及びガスケットをそれぞれセットした状態を示す動作説明図である。(A) is operation | movement explanatory drawing which shows the state which separated the gasket holder in the joining apparatus of FIG. 1 with respect to the electrolyte membrane holder, (b) is a gasket holder and an electrolyte membrane holder from the state of (a). It is operation | movement explanatory drawing which shows the state which each set the electrolyte membrane and the gasket. （ａ）はガスケット保持具を電解質膜保持具に接近させ、これら各保持具，相互を対向させた状態を示す動作説明図、（ｂ）は（ａ）の状態から密閉空間に対して真空吸引している状態を示す動作説明図である。(A) is an operation explanatory view showing a state in which the gasket holder is brought close to the electrolyte membrane holder and these holders are opposed to each other, and (b) is a vacuum suction from the state of (a) to the sealed space. It is operation | movement explanatory drawing which shows the state which is carrying out. （ａ）は調整機構としてリーク弁を設けた例を示す、図１に対応する断面図、（ｂ）は調整機構としてレデューサを設けた例を示す、図１に対応する断面図である。(A) is a sectional view corresponding to FIG. 1 showing an example in which a leak valve is provided as an adjusting mechanism, and (b) is a sectional view corresponding to FIG. 1 showing an example in which a reducer is provided as an adjusting mechanism. 密閉空間を真空吸引する際の真空度と時間との相関図である。It is a correlation diagram of the vacuum degree at the time of vacuum-sucking sealed space, and time. （ａ）は、本発明の第２の実施形態に係わる基材の接合装置を示す断面図、（ｂ）は（ａ）の接合装置によって電解質膜とガスケットとを接合している状態を示す動作説明図である。(A) is sectional drawing which shows the joining apparatus of the base material concerning the 2nd Embodiment of this invention, (b) is the operation | movement which shows the state which has joined the electrolyte membrane and the gasket with the joining apparatus of (a). It is explanatory drawing.

符号の説明Explanation of symbols

１ 電解質膜（基材）
３ ガスケット（基材）
５ 電解質膜保持具（基材保持部）
７ ガスケット保持具（基材保持部）
９ 固定基台（基台）
１１，４１ 吸着板（多孔質体）
１３ シール部材
１５ 密閉空間
１７ 真空吸引ポンプ（真空吸引系統，密閉空間吸引部）
１９，２５ 排気通路（真空吸引系統）
２１ 連通路（真空吸引系統）
２７ 配管（真空吸引系統）
２９ 開閉弁（真空吸引系統）
３１，４３ 排気通路（真空吸引系統）
３３，４５ 配管（真空吸引系統）
３５，４７ 開閉弁（真空吸引系統）
３７ 真空吸引ポンプ（真空吸引系統，基材吸引部）
３９ 可動基台（基台）
４９ 油圧プレス機械（加圧部）
５３ リーク弁（調整機構）
５７ レデューサ（調整機構）
６１ 規制ピン（規制手段）
６３ 油圧機構（規制手段） 1 Electrolyte membrane (base material)
3 Gasket (base material)
5 Electrolyte membrane holder (base material holder)
7 Gasket holder (base material holder)
9 Fixed base (base)
11, 41 Adsorption plate (porous body)
13 Seal member 15 Sealed space 17 Vacuum suction pump (vacuum suction system, sealed space suction part)
19, 25 Exhaust passage (vacuum suction system)
21 Communication path (vacuum suction system)
27 Piping (vacuum suction system)
29 On-off valve (vacuum suction system)
31, 43 Exhaust passage (vacuum suction system)
33, 45 Piping (vacuum suction system)
35, 47 On-off valve (vacuum suction system)
37 Vacuum suction pump (vacuum suction system, base material suction part)
39 Movable base (base)
49 Hydraulic press machine (pressurizing part)
53 Leak valve (adjustment mechanism)
57 Reducer (Adjustment mechanism)
61 Restriction pin (regulation means)
63 Hydraulic mechanism (regulation means)

Claims (6)

互いに接合する一対の基材を、それぞれ対応する基材保持部に背後から真空吸引により吸着保持させた後、前記各基材保持部を、前記一対の基材が互いに離間した状態で対向するよう互いに接近させ、かつ、前記各基材保持部相互間に位置して前記一対の基材の外側に位置するシール部材によってその内側の基材が位置する側に密閉空間を形成し、この密閉空間を、前記一対の基材が互いに離間した状態を維持しつつ真空吸引して減圧させて、前記シール材を圧縮させつつ前記各基材保持部を互いに接近移動させ、前記一対の基材を互い加圧接触させて接合することを特徴とする基材の接合方法。   After a pair of base materials to be joined to each other are sucked and held by the corresponding base material holding portions from behind by vacuum suction, the base material holding portions are opposed to each other with the pair of base materials being separated from each other. A sealed space is formed on the side where the inner substrate is located by a seal member that is close to each other and is located between the respective substrate holding portions and located outside the pair of substrates. While maintaining the state where the pair of base materials are separated from each other, vacuum suction is performed to reduce the pressure, and the base material holding portions are moved closer to each other while compressing the sealing material. A method for joining base materials, characterized by joining under pressure. 前記各基材保持部の前記一対の基材を保持させるための真空度を、前記密閉空間の真空度よりも高く設定することを特徴とする請求項１に記載の基材の接合方法。   The method for bonding substrates according to claim 1, wherein a degree of vacuum for holding the pair of substrates in each of the substrate holders is set higher than a degree of vacuum of the sealed space. 前記各基材保持部の前記一対の基材を保持させるための真空吸引系統と、前記密閉空間を真空吸引するための真空吸引系統とを互いに別系統とし、かつ、前記密閉空間側の真空吸引系統に設けた調整機構によって真空吸引の際の真空度を調整することを特徴とする請求項１または２に記載の基材の接合方法。   A vacuum suction system for holding the pair of base materials of each base material holding part and a vacuum suction system for vacuum suction of the sealed space are separate systems, and vacuum suction on the sealed space side The base material joining method according to claim 1 or 2, wherein the degree of vacuum at the time of vacuum suction is adjusted by an adjusting mechanism provided in the system. 互いに接合する一対の基材を、それぞれ背後から真空吸引により保持する一対の基材保持部と、前記真空吸引を行う基材吸引部と、前記各基材保持部相互間の前記一対の基材の外側に位置し、かつ、前記各基材保持部を、前記一対の基材が互いに離間した状態で対向するよう互いに接近させた状態でその内側の基材が位置する側に密閉空間を形成するシール部材と、前記密閉空間を真空吸引する密閉空間吸引部と、前記シール材を圧縮させつつ前記各基材保持部相互を接近移動させ、前記一対の基材相互を加圧接触させて接合する加圧部、とを有することを特徴とする基材の接合装置。   A pair of base material holding parts for holding a pair of base materials to be joined to each other by vacuum suction, a base material suction part for performing the vacuum suction, and the pair of base materials between the base material holding parts. A closed space is formed on the side where the inner base material is located in a state where the base material holding portions are close to each other so that the pair of base materials face each other in a state of being separated from each other. A sealing member for vacuuming, a sealed space suction part for vacuum-sucking the sealed space, and the base material holding parts are moved closer to each other while compressing the sealing material, and the pair of base materials are brought into pressure contact with each other. And a pressurizing part that performs the bonding. 前記基材保持部は、前記基材が接触する多孔質体を基台の表面に備え、この多孔質体に、前記基台に設けた排気通路の一端を連通させ、前記排気通路の他端を外部に設けた前記基材吸引部に接続したことを特徴とする請求項４に記載の基材の接合装置。   The base material holding portion includes a porous body in contact with the base material on a surface of a base, and communicates one end of an exhaust passage provided in the base with the porous body, and the other end of the exhaust passage The base material joining apparatus according to claim 4, wherein the base material suction unit is connected to the base material suction portion provided outside. 前記各基材保持部を互いに接近移動させて前記一対の基材が互いに離間した状態を維持するための、前記接近移動を規制する規制手段を、前記一対の基材保持部相互間に設けたことを特徴とする請求項４または５に記載の基材の接合装置。   A restricting means for restricting the approaching movement is provided between the pair of base material holders for moving the base material holders close to each other to maintain the pair of base materials spaced apart from each other. The base material joining apparatus according to claim 4 or 5, wherein
JP2008288619A 2008-11-11 2008-11-11 Method and apparatus for joining base material Pending JP2010115663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008288619A JP2010115663A (en) 2008-11-11 2008-11-11 Method and apparatus for joining base material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008288619A JP2010115663A (en) 2008-11-11 2008-11-11 Method and apparatus for joining base material

Publications (1)

Publication Number Publication Date
JP2010115663A true JP2010115663A (en) 2010-05-27

Family

ID=42303645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008288619A Pending JP2010115663A (en) 2008-11-11 2008-11-11 Method and apparatus for joining base material

Country Status (1)

Country Link
JP (1) JP2010115663A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010198948A (en) * 2009-02-26 2010-09-09 Toppan Printing Co Ltd Membrane-electrode assembly and method of manufacturing the same, and polymer electrolyte fuel cell
WO2014010399A1 (en) * 2012-07-10 2014-01-16 日産自動車株式会社 Membrane electrode assembly
KR20160075226A (en) * 2014-12-19 2016-06-29 강원대학교산학협력단 Insulating galss vacuum method using a vacuum equipment
CN110828850A (en) * 2019-11-20 2020-02-21 浙江锋源氢能科技有限公司 Seven-in-one membrane electrode packaging clamp and proton exchange membrane fuel cell
CN110880418A (en) * 2019-10-11 2020-03-13 深圳市兴创嘉技术有限公司 Energy storage device negative pressure packaging hardware
JP2021064528A (en) * 2019-10-15 2021-04-22 本田技研工業株式会社 Method for manufacturing electrolyte/electrode structure
CN114725485A (en) * 2022-04-13 2022-07-08 中汽创智科技有限公司 All-solid-state battery and preparation method thereof

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010198948A (en) * 2009-02-26 2010-09-09 Toppan Printing Co Ltd Membrane-electrode assembly and method of manufacturing the same, and polymer electrolyte fuel cell
WO2014010399A1 (en) * 2012-07-10 2014-01-16 日産自動車株式会社 Membrane electrode assembly
CN104428932A (en) * 2012-07-10 2015-03-18 日产自动车株式会社 Membrane electrode assembly
US9219282B2 (en) 2012-07-10 2015-12-22 Nissan Motor Co., Ltd. Membrane electrode assembly
JP5854139B2 (en) * 2012-07-10 2016-02-09 日産自動車株式会社 Membrane electrode assembly
KR101711709B1 (en) * 2014-12-19 2017-03-13 강원대학교산학협력단 Insulating galss vacuum equipment
KR20160075226A (en) * 2014-12-19 2016-06-29 강원대학교산학협력단 Insulating galss vacuum method using a vacuum equipment
CN110880418A (en) * 2019-10-11 2020-03-13 深圳市兴创嘉技术有限公司 Energy storage device negative pressure packaging hardware
CN110880418B (en) * 2019-10-11 2024-05-07 深圳市兴创嘉科技有限公司 Negative pressure packaging device for energy storage device
JP2021064528A (en) * 2019-10-15 2021-04-22 本田技研工業株式会社 Method for manufacturing electrolyte/electrode structure
JP7041655B2 (en) 2019-10-15 2022-03-24 本田技研工業株式会社 Manufacturing method of electrolyte / electrode structure
CN110828850A (en) * 2019-11-20 2020-02-21 浙江锋源氢能科技有限公司 Seven-in-one membrane electrode packaging clamp and proton exchange membrane fuel cell
CN114725485A (en) * 2022-04-13 2022-07-08 中汽创智科技有限公司 All-solid-state battery and preparation method thereof

Similar Documents

Publication Publication Date Title
JP2010115663A (en) Method and apparatus for joining base material
JP3917651B2 (en) Adhesive chuck device
JP6592567B2 (en) Peeling device
JP2009010072A (en) Substrate-sticking device
JP2013544747A (en) Vacuum glass sealing device
CN102138199B (en) Slit valve control
JP2012146783A (en) Substrate sucking device
JP4221271B2 (en) Tape applicator
JP6627243B2 (en) Substrate processing method and substrate film forming method
JP5886504B2 (en) Manufacturing method and manufacturing apparatus of composite material
JPWO2009060855A1 (en) Bonded substrate manufacturing apparatus and bonded substrate manufacturing method
JP2011022403A (en) Method and device for laminating workpiece
JP5506511B2 (en) Film laminating device
JP2015216223A (en) Adsorption/desorption device
JP5797863B1 (en) Joining member manufacturing apparatus and joining member manufacturing method
JP5660821B2 (en) Sheet sticking device and sticking method
JP2017127929A (en) Adsorber
CN218878691U (en) Adsorption mechanism
JP2003205510A (en) Method and apparatus for laminating green sheet
CN216548477U (en) Adsorption device
CN220934022U (en) Board bonding machine
CN117594514B (en) Wafer clamp, wafer clamping method and wafer cleaning equipment
JPS6110939Y2 (en)
CN112499944B (en) Quartz product vacuumizing equipment
CN115196081B (en) High vacuum packaging equipment