JP2010106327A5 - - Google Patents

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Publication number
JP2010106327A5
JP2010106327A5 JP2008280723A JP2008280723A JP2010106327A5 JP 2010106327 A5 JP2010106327 A5 JP 2010106327A5 JP 2008280723 A JP2008280723 A JP 2008280723A JP 2008280723 A JP2008280723 A JP 2008280723A JP 2010106327 A5 JP2010106327 A5 JP 2010106327A5
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JP
Japan
Prior art keywords
halogen
gadolinium oxide
blocked
samples
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2008280723A
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English (en)
Japanese (ja)
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JP2010106327A (ja
JP5545792B2 (ja
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Priority to JP2008280723A priority Critical patent/JP5545792B2/ja
Priority claimed from JP2008280723A external-priority patent/JP5545792B2/ja
Publication of JP2010106327A publication Critical patent/JP2010106327A/ja
Publication of JP2010106327A5 publication Critical patent/JP2010106327A5/ja
Application granted granted Critical
Publication of JP5545792B2 publication Critical patent/JP5545792B2/ja
Active legal-status Critical Current
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JP2008280723A 2008-10-31 2008-10-31 耐食性部材 Active JP5545792B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008280723A JP5545792B2 (ja) 2008-10-31 2008-10-31 耐食性部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008280723A JP5545792B2 (ja) 2008-10-31 2008-10-31 耐食性部材

Publications (3)

Publication Number Publication Date
JP2010106327A JP2010106327A (ja) 2010-05-13
JP2010106327A5 true JP2010106327A5 (zh) 2011-12-01
JP5545792B2 JP5545792B2 (ja) 2014-07-09

Family

ID=42296064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008280723A Active JP5545792B2 (ja) 2008-10-31 2008-10-31 耐食性部材

Country Status (1)

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JP (1) JP5545792B2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9090046B2 (en) 2012-04-16 2015-07-28 Applied Materials, Inc. Ceramic coated article and process for applying ceramic coating
US9604249B2 (en) 2012-07-26 2017-03-28 Applied Materials, Inc. Innovative top-coat approach for advanced device on-wafer particle performance
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004190056A (ja) * 2002-12-09 2004-07-08 Shin Etsu Chem Co Ltd 耐熱性被覆部材
JP4985928B2 (ja) * 2005-10-21 2012-07-25 信越化学工業株式会社 多層コート耐食性部材
JP5390166B2 (ja) * 2008-10-30 2014-01-15 株式会社日本セラテック 耐食性部材
JP5390167B2 (ja) * 2008-10-30 2014-01-15 株式会社日本セラテック 耐食性部材

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics

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