JP2010100506A5 - - Google Patents

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Publication number
JP2010100506A5
JP2010100506A5 JP2008275999A JP2008275999A JP2010100506A5 JP 2010100506 A5 JP2010100506 A5 JP 2010100506A5 JP 2008275999 A JP2008275999 A JP 2008275999A JP 2008275999 A JP2008275999 A JP 2008275999A JP 2010100506 A5 JP2010100506 A5 JP 2010100506A5
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JP
Japan
Prior art keywords
gas
supply pipe
compression chamber
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008275999A
Other languages
English (en)
Japanese (ja)
Other versions
JP5388538B2 (ja
JP2010100506A (ja
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Priority to JP2008275999A priority Critical patent/JP5388538B2/ja
Priority claimed from JP2008275999A external-priority patent/JP5388538B2/ja
Publication of JP2010100506A publication Critical patent/JP2010100506A/ja
Publication of JP2010100506A5 publication Critical patent/JP2010100506A5/ja
Application granted granted Critical
Publication of JP5388538B2 publication Critical patent/JP5388538B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008275999A 2008-10-27 2008-10-27 気体発生装置 Active JP5388538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008275999A JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008275999A JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Publications (3)

Publication Number Publication Date
JP2010100506A JP2010100506A (ja) 2010-05-06
JP2010100506A5 true JP2010100506A5 (cg-RX-API-DMAC7.html) 2011-05-26
JP5388538B2 JP5388538B2 (ja) 2014-01-15

Family

ID=42291501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008275999A Active JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Country Status (1)

Country Link
JP (1) JP5388538B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5906742B2 (ja) * 2012-01-05 2016-04-20 セントラル硝子株式会社 フッ素ガス生成装置
JP6283551B2 (ja) * 2014-01-20 2018-02-21 高砂熱学工業株式会社 二酸化塩素ガスの発生装置および発生方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238102B2 (ja) * 1997-07-04 2001-12-10 川崎重工業株式会社 粘性流体の供給制御装置および方法
JP2000185908A (ja) * 1998-12-24 2000-07-04 Chisso Corp 二酸化塩素水の製造方法
JP3975312B2 (ja) * 1999-03-30 2007-09-12 大阪瓦斯株式会社 廃塩酸の処理方法
JP2003190762A (ja) * 2001-12-27 2003-07-08 L'air Liquide Sa Pour L'etude & L'exploitation Des Procedes Georges Claude フッ化水素を含むフッ素ガスの生成装置
JP3617835B2 (ja) * 2002-09-20 2005-02-09 東洋炭素株式会社 フッ素ガス発生装置
JP2005061636A (ja) * 2004-09-10 2005-03-10 Toyo Tanso Kk ハロゲンガス又はハロゲン含有ガスの供給方法、半導体製造装置のクリーニングルームのクリーニング方法、ハロゲンガス又はハロゲン含有ガスを用いる表面処理方法、半導体製造装置、及び表面処理装置

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