JP2010100506A5 - - Google Patents

Download PDF

Info

Publication number
JP2010100506A5
JP2010100506A5 JP2008275999A JP2008275999A JP2010100506A5 JP 2010100506 A5 JP2010100506 A5 JP 2010100506A5 JP 2008275999 A JP2008275999 A JP 2008275999A JP 2008275999 A JP2008275999 A JP 2008275999A JP 2010100506 A5 JP2010100506 A5 JP 2010100506A5
Authority
JP
Japan
Prior art keywords
gas
supply pipe
compression chamber
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008275999A
Other languages
English (en)
Japanese (ja)
Other versions
JP5388538B2 (ja
JP2010100506A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008275999A priority Critical patent/JP5388538B2/ja
Priority claimed from JP2008275999A external-priority patent/JP5388538B2/ja
Publication of JP2010100506A publication Critical patent/JP2010100506A/ja
Publication of JP2010100506A5 publication Critical patent/JP2010100506A5/ja
Application granted granted Critical
Publication of JP5388538B2 publication Critical patent/JP5388538B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008275999A 2008-10-27 2008-10-27 気体発生装置 Active JP5388538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008275999A JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008275999A JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Publications (3)

Publication Number Publication Date
JP2010100506A JP2010100506A (ja) 2010-05-06
JP2010100506A5 true JP2010100506A5 (cg-RX-API-DMAC7.html) 2011-05-26
JP5388538B2 JP5388538B2 (ja) 2014-01-15

Family

ID=42291501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008275999A Active JP5388538B2 (ja) 2008-10-27 2008-10-27 気体発生装置

Country Status (1)

Country Link
JP (1) JP5388538B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5906742B2 (ja) * 2012-01-05 2016-04-20 セントラル硝子株式会社 フッ素ガス生成装置
JP6283551B2 (ja) * 2014-01-20 2018-02-21 高砂熱学工業株式会社 二酸化塩素ガスの発生装置および発生方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238102B2 (ja) * 1997-07-04 2001-12-10 川崎重工業株式会社 粘性流体の供給制御装置および方法
JP2000185908A (ja) * 1998-12-24 2000-07-04 Chisso Corp 二酸化塩素水の製造方法
JP3975312B2 (ja) * 1999-03-30 2007-09-12 大阪瓦斯株式会社 廃塩酸の処理方法
JP2003190762A (ja) * 2001-12-27 2003-07-08 L'air Liquide Sa Pour L'etude & L'exploitation Des Procedes Georges Claude フッ化水素を含むフッ素ガスの生成装置
JP3617835B2 (ja) * 2002-09-20 2005-02-09 東洋炭素株式会社 フッ素ガス発生装置
JP2005061636A (ja) * 2004-09-10 2005-03-10 Toyo Tanso Kk ハロゲンガス又はハロゲン含有ガスの供給方法、半導体製造装置のクリーニングルームのクリーニング方法、ハロゲンガス又はハロゲン含有ガスを用いる表面処理方法、半導体製造装置、及び表面処理装置

Similar Documents

Publication Publication Date Title
JP2011052955A5 (cg-RX-API-DMAC7.html)
JP2013523341A5 (cg-RX-API-DMAC7.html)
WO2010017095A3 (en) Fluid preheater
WO2012145395A3 (en) Fluid pump and method of pumping a fluid
WO2007080318A3 (fr) Systeme et procede de sechage de bois
EA201290733A1 (ru) Держатель разгрузочной насадки и циклон
JP2015500944A5 (cg-RX-API-DMAC7.html)
BRPI0514118A (pt) método para secar um gás e dispositivo empregado em conformidade com o mesmo
ATE484326T1 (de) Mikroverdampfer
GB2444736B (en) Combustion Chamber Air Inlet
WO2009136726A3 (en) Heat exchange system
JP2012097986A5 (cg-RX-API-DMAC7.html)
JP2010100506A5 (cg-RX-API-DMAC7.html)
JP2012076309A5 (cg-RX-API-DMAC7.html)
JP2018502424A5 (cg-RX-API-DMAC7.html)
WO2011149842A3 (en) Multiphase pump flow recirculation system
TR201005158T1 (tr) Baca gazı arıtması için püskürtme kolonu ve püskürtme kolonunda kullanılan gaz toplama bileziği.
WO2011092317A3 (en) A steam generation unit
JP2010249730A5 (cg-RX-API-DMAC7.html)
IN2012DN01546A (cg-RX-API-DMAC7.html)
TWM487770U (zh) 淨水器
JP2007261957A5 (cg-RX-API-DMAC7.html)
JP2013019603A5 (cg-RX-API-DMAC7.html)
WO2010105911A8 (en) Tube for conveying exhaust gases in heat exchange devices, particularly boilers for generating hot water or steam
JP2014035104A5 (cg-RX-API-DMAC7.html)