JP2010087237A - Conductive paste, and method of manufacturing electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conductive paste improving a breakdown voltage and high-temperature acceleration life of an electronic component after baking even when an electrode layer is particularly converted into a thin layer or a multi-layer. <P>SOLUTION: This conductive paste contains a conductive powder, a metal organic compound having a cyclic structure, coexistent material particles, an organic solvent and a resin. The metal organic compound having the cyclic structure has a metal element included in a dielectric material constituting a dielectric layer as a metal element. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for producing a conductive paste and an electronic component, and more specifically, even when the electrode layer is thinned and multilayered, by suppressing aggregation and segregation of the additive as a subcomponent, The present invention relates to a conductive paste used in a manufacturing process of an electronic component such as a multilayer ceramic capacitor exhibiting a good breakdown voltage and a high temperature accelerated life.

  A multilayer ceramic capacitor as an example of an electronic component has an element body having a multilayer structure in which a plurality of dielectric layers and internal electrode layers are alternately arranged. A pair of external terminal electrodes is formed at both ends of the element body. This multilayer ceramic capacitor is manufactured by first laminating a plurality of pre-firing dielectric layers and pre-firing internal electrode layers alternately in a necessary number to produce a pre-firing element body, and then firing the pre-firing element body. It is manufactured by forming a pair of external terminal electrodes at both ends.

  A ceramic green sheet is used as the dielectric layer before firing, and an internal electrode paste film or a metal thin film having a predetermined pattern is used as the internal electrode layer before firing.

  The ceramic green sheet can be manufactured by a sheet method or a stretching method. The sheet method is a method in which a dielectric coating containing a dielectric powder, a binder, a plasticizer, an organic solvent, and the like is applied on a carrier sheet such as PET using a doctor blade method, and dried by heating. . The stretching method is a method in which a film-like molded body obtained by extrusion molding a dielectric suspension in which a dielectric powder and a binder are mixed in a solvent is produced by biaxial stretching.

  The internal electrode paste film having a predetermined pattern is manufactured by a printing method. The printing method is a method in which a conductive material containing a metal such as Pd, Ag-Pd, or Ni and a conductive paste containing a binder and an organic solvent are applied and formed in a predetermined pattern on a ceramic green sheet. The metal thin film having a predetermined pattern is manufactured by a thin film method such as sputtering.

  In manufacturing such a multilayer ceramic capacitor, the pre-fired dielectric layer and the pre-fired internal electrode layer are fired simultaneously. For this reason, it is required to approximate the thermal contraction behavior of the dielectric layer and the internal electrode layer to prevent the occurrence of delamination and cracks. In response to this requirement, dielectric particles with a particle size smaller than that of the dielectric particles contained in the dielectric layer are used as a co-material and included in the internal electrode paste to approximate the thermal contraction behavior of the dielectric layer and the internal electrode layer. I am letting.

  By the way, in recent years, with the miniaturization of various electronic devices, miniaturization and large capacity of the multilayer ceramic capacitor mounted inside the electronic device are progressing. In order to reduce the size and increase the capacity of the multilayer ceramic capacitor, it is necessary to make the dielectric layer and the internal electrode layer as thin as possible (thinning) and as many as possible (multi-layering). Therefore, attempts have been made to reduce the particle size of the conductive powder contained in the internal electrode layer before firing and the dielectric powder contained in the dielectric layer before firing.

  However, when the particle size of such conductive powder and dielectric powder is reduced, the particle size of the oxide particles added as the co-material particles needs to be reduced, but the particle size is limited. Further, the dispersibility of the co-material particles in the paste is deteriorated, and as a result, the line property of the electrode tends to be deteriorated.

  Further, when the multilayer of the dielectric layer is advanced, the composition of the additive in the dielectric layer is diluted by the diffusion of the dielectric particles as the co-material particles contained in the internal electrode paste. Therefore, in the vicinity of the central part of the electronic component after firing, the dielectric particles of the dielectric layer grow abnormally, and delamination tends to occur.

  In order to solve the above problem, for example, Patent Document 1 includes a metal hydroxide that coats Ni in a conductive paste and an organometallic compound. And it describes that the filling property of Ni can be improved and a continuous internal electrode layer can be formed.

However, in Patent Document 1, the effect of improving the structural defect is not obtained unless the metal hydroxide covering Ni and the organometallic compound are included at the same time, and no electrical characteristics are described. Absent. Moreover, when the addition amount of a hydroxide is increased too much, it tends to gel. Furthermore, when a metal stearate or the like of the additive material is used, it melts in the binder removal step of the electronic component, and thus the aggregation and segregation of the additive material are observed in the subsequent manufacturing process, and the above-mentioned problems Could not be resolved.
JP 2003-281939 A

  The present invention has been made in view of such a situation, and the object thereof is to improve breakdown voltage and high temperature accelerated life in an electronic component after firing even when the electrode layer is thinned and multilayered. It is providing the electrically conductive paste which can be performed. Another object of the present invention is to provide a method of manufacturing an electronic component using this conductive paste.

In order to achieve the above object, the conductive paste according to the present invention comprises:
It has conductive powder, a metal organic compound having a cyclic structure, co-material particles, an organic solvent, and a resin.

  In the present invention, the metal organic compound having a cyclic structure has a metal element contained in a dielectric material constituting the dielectric layer as a metal element. Such a metal organic compound dissolves well in an organic solvent and can exhibit good dispersibility in the paste. In addition, since the organic chain of the metal organic compound has a cyclic structure, the metal organic compound is not easily decomposed even in the binder removal step of the laminate in which the dielectric layer before firing and the electrode layer before firing are laminated. . Therefore, a good dispersion state can be maintained, and aggregation and segregation of the metal element of the additive can be effectively prevented in the firing step. As a result, the metal element of the additive material can be present uniformly around the co-material particles, and the characteristics improvement effect of the metal element of the additive material can be sufficiently exhibited while suppressing the grain growth of the co-material particles. it can.

  Preferably, the decomposition temperature of the metal organic compound is 350 ° C. or higher. By using such a metal organic compound, decomposition of the metal organic compound is suppressed in the binder removal step. As a result, since the aggregation and segregation of the additive metal element in the firing step can be prevented, the above effect can be further enhanced.

  Preferably, the metal element contained in the metal organic compound is at least one selected from Mg, Y, Gd, Dy, Ho, and Tb. By setting the metal element contained in the metal organic compound as described above, it is possible to improve the breakdown voltage and high-temperature accelerated life of an electronic component manufactured using the conductive paste of the present invention.

An electronic component manufacturing method according to the present invention includes:
A method of manufacturing an electronic component having an electrode layer and a dielectric layer,
Using the conductive paste according to any one of the above, forming an electrode paste film that becomes the electrode layer after firing;
Laminating the electrode paste film with a green sheet that becomes a dielectric layer after firing;
Firing a laminate of the green sheet and the electrode paste film.

  In addition, the material of the green sheet which can be used by this invention, a manufacturing method, etc. are not specifically limited, The ceramic green sheet etc. which are shape | molded by the doctor blade method may be sufficient.

  In the present invention, the electronic component is not particularly limited, and examples thereof include multilayer ceramic capacitors, piezoelectric elements, chip inductors, chip varistors, chip thermistors, chip resistors, and other surface mount (SMD) chip type electronic components. .

  In the present invention, the metal element contained as the additive is included in the conductive paste in the form of a metal organic compound having a cyclic structure. Since the metal organic compound is dissolved in the organic solvent, the dispersibility in the paste can be improved by including the additive in such a form. Furthermore, since the metal organic compound has a cyclic structure, the metal organic compound is not easily decomposed even in the binder removal step. Therefore, even after the binder removal step, a good dispersion state of the metal element of the additive can be maintained, and aggregation and segregation of the metal element of the additive can be effectively prevented in the firing step. As a result, even during firing, the additive material is uniformly present around the co-material particles, so that the grain growth of the co-material particles is suppressed and the characteristic improvement effect of the additive metal element is sufficiently obtained It can be demonstrated.

  Moreover, said effect can further be heightened by making decomposition temperature of a metal organic compound into said range. Furthermore, by setting the metal element contained in the metal organic compound as described above, the breakdown voltage and the high-temperature accelerated life can be improved as a characteristic improvement effect.

  Such a conductive paste can be suitably used in the manufacturing process of the above electronic component in which the dielectric layer and the electrode layer are thinned and multilayered.

Hereinafter, the present invention will be described based on embodiments shown in the drawings. put it here,
FIG. 1 is a schematic cross-sectional view of a multilayer ceramic capacitor according to an embodiment of the present invention.
2 (A), 2 (B), 3 (A), and 3 (B) are cross-sectional views showing the main part of the manufacturing process of the multilayer ceramic capacitor shown in FIG.

  First, an overall configuration of a multilayer ceramic capacitor will be described as an embodiment of an electronic component manufactured by using the conductive paste according to the present invention.

Multilayer ceramic capacitor 2
As shown in FIG. 1, the multilayer ceramic capacitor 2 according to this embodiment includes a capacitor element 4, a first terminal electrode 6, and a second terminal electrode 8. The capacitor element 4 includes dielectric layers 10 and internal electrode layers 12, and the internal electrode layers 12 are alternately stacked between the dielectric layers 10. One of the internal electrode layers 12 stacked alternately is electrically connected to the inside of the first terminal electrode 6 formed outside the first end 4 a of the capacitor element 4. The other internal electrode layer 12 that is alternately stacked is electrically connected to the inside of the second terminal electrode 8 that is formed outside the second end 4 b of the capacitor element 4.

  In this embodiment, the internal electrode layer 12 will be described later, but the internal electrode layer 12 is formed after firing by using the conductive paste according to the present invention on a green sheet that will form the dielectric layer 10 after firing. The internal electrode paste film to be formed is formed in a predetermined pattern.

  The material of dielectric layer 10 is not particularly limited, and includes, for example, main components such as calcium titanate, strontium titanate, and barium titanate, and further includes subcomponents (additives) that are included for improving characteristics. Consists of dielectric material. What is necessary is just to determine suitably a composition and content of a main component and a subcomponent according to a desired characteristic.

  In this embodiment, when Mg oxide is included as a subcomponent, the content of Mg oxide is 0.50 to 2.00 in terms of oxide with respect to 100 mol of the main component. Mole is preferred. Further, when at least one oxide selected from Y, Gd, Dy, Ho, and Tb is included as a subcomponent, the content of these oxides is equivalent to oxide with respect to 100 mol of the main component. And preferably 0.80 to 4.00 moles.

  In the present embodiment, the thickness of each dielectric layer 10 is preferably 1.5 μm or less, more preferably 1.0 μm or less.

  Although it does not restrict | limit especially as a electrically conductive material which comprises the internal electrode layer 12, For example, it is preferable that they are nickel or a nickel alloy, copper or a copper alloy, silver, palladium, or a silver palladium alloy. More preferably, it is nickel or nickel alloy, copper or copper alloy.

  The material of the terminal electrodes 6 and 8 is not particularly limited, but usually copper, copper alloy, nickel, nickel alloy or the like can be used, and silver or silver-palladium alloy can also be used. The thickness of the terminal electrodes 6 and 8 is not particularly limited, but is usually about 10 to 50 μm.

  The shape and size of the multilayer ceramic capacitor 2 may be appropriately determined according to the purpose and application.

  Next, an example of a method for manufacturing the multilayer ceramic capacitor 2 according to the present embodiment will be described.

  First, in order to form a ceramic green sheet that will constitute the dielectric layer 10 shown in FIG. 1 after firing, a dielectric layer paste is prepared.

  The dielectric layer paste is usually composed of an organic solvent-based paste or an aqueous paste obtained by kneading a dielectric material raw material and an organic vehicle.

  As a raw material of the dielectric material, various compounds that become composite oxides and oxides as described above, for example, carbonates, nitrates, hydroxides, organometallic compounds, and the like can be appropriately selected and mixed for use. The raw material of the dielectric material is usually used as a powder having an average particle size of 0.5 μm or less, preferably 0.3 μm or less. In order to form a very thin green sheet, it is desirable to use a powder finer than the thickness of the green sheet.

  An organic vehicle is obtained by dissolving a binder in an organic solvent. The binder used for the organic vehicle is not particularly limited, and examples thereof include various usual binders such as ethyl cellulose, polyvinyl butyral, and acrylic resin.

  Also, the organic solvent used in the organic vehicle is not particularly limited, and usual organic solvents such as alcohol, acetone, methyl ethyl ketone (MEK), toluene, xylene, ethyl acetate, butyl stearate, terpineol, butyl carbitol, isobornyl acetate, etc. Is exemplified.

  Then, as shown in FIG. 2 (A), using this dielectric layer paste, it is preferably 2.0 μm or less, more preferably on the carrier sheet 20 as a support, by a die coating method, a doctor blade method or the like. Forms a green sheet 10a with a thickness of 1.3 μm or less. By forming the green sheet 10a with such a thickness, the thickness of the dielectric layer 10 after firing can be reduced to preferably 1.5 μm or less, more preferably 1.0 μm or less.

  Next, an internal electrode paste film that forms the internal electrode layer 12 shown in FIG. 1 after firing is formed. In the present embodiment, the internal electrode paste film is formed on the surface of the green sheet 10a by using a conductive paste and a thick film forming method such as a printing method.

  The thickness of the internal electrode paste film is preferably 1.5 μm or less. By forming the internal electrode paste film with such a thickness, the thickness of the internal electrode layer 12 after firing can be set to a desired thickness.

  When the internal electrode paste film is formed on the surface of the green sheet 10a by the screen printing method or the gravure printing method, it is performed as follows.

  First, a conductive paste is prepared. The conductive paste according to this embodiment is prepared by kneading conductive powder, a metal organic compound having a cyclic structure, co-material particles, and an organic vehicle.

  The conductive powder is not particularly limited as long as it is a powder of the above-described conductive material. The average particle size of the conductive powder is preferably 0.1 to 0.2 μm, and the particle size distribution is preferably sharp. If the average particle size is too small, the sintering temperature is too low and the characteristics as a capacitor tend not to be satisfied. Conversely, if the average particle size is too large, it is difficult to make the electrode thinner, and the capacitance tends to decrease.

  The conductive powder is preferably contained in an amount of 40 to 60 parts by weight with respect to the entire conductive paste.

  In the present embodiment, the conductive powder contains Ni as a main component, and is preferably composed of Ni or a Ni alloy, or a mixture thereof. Ni or an Ni alloy is preferably an alloy of Ni and at least one element selected from Mn, Cr, Co, Al, Re, Ir, Pt, Os, Ru, and Rh, and the Ni content in the alloy is It is preferably 95% by weight or more. In addition, in Ni or Ni alloy, various trace components, such as P, Fe, Mg, and S, may be contained about 0.1 wt% or less.

  The conductive paste according to the present invention includes a metal organic compound having a cyclic structure. This metal organic compound contains a metal element as a subcomponent (additive) contained for improving characteristics.

  The metal organic compound is dissolved in an organic solvent. That is, in the conductive paste according to the present invention, the metal organic compound is uniformly dispersed in the organic solvent. Therefore, aggregation and segregation of the additive in the paste can be effectively prevented.

  Moreover, in the present invention, the metal organic compound has a cyclic structure. By having such an annular structure, for example, even in the binder removal step of the pre-firing laminate in which the green sheet and the internal electrode paste film are laminated, the metal organic compound is not easily decomposed and is excellent. The dispersed state can be maintained, and aggregation and segregation of the additive can be prevented in the firing step. As a result, even during firing, since the additive is uniformly present around the co-material particles, it is possible to suppress the grain growth of the co-material particles and sufficiently exhibit the characteristics improving effect of the additive. This may be because the metal organic compound is stably present in the paste or due to the presence of a steric barrier of an organic functional group having a cyclic structure.

  The metal organic compound having a cyclic structure is not particularly limited as long as it has a cyclic structure, but in the present embodiment, preferably, a metal carboxylate and a derivative thereof, an organometallic compound, an organometallic complex, More preferred is a metal carboxylate. Although it does not restrict | limit especially as a cyclic structure, Specifically, an aromatic ring, a polycyclic structure, etc. are mentioned.

The metal carboxylate can be expressed as (R—COO) _n M ^{n +} (M is a metal element) using a general formula. In the metal carboxylate, various functional groups can be selected as R (alkyl group), and a suitable organic solvent can be selected accordingly.

  Furthermore, the decomposition temperature or the like can be controlled by selecting an aromatic ring, a polycyclic structure or the like as R. Therefore, the aggregation and segregation of the additive can be effectively prevented according to the binder removal temperature.

  Examples of the metal carboxylate include abietic acid salt, cholate salt, glycocholate salt, and deoxycholate salt in this embodiment. Chemical formula 1 below shows abietic acid salt, and chemical formula 2 shows cholate salt. As is clear from the chemical formula, both abietic acid salt and cholate salt are carboxylates having a cyclic structure.

Ｍは金属元素を表す

M represents a metal element

Ｍは金属元素を表す

M represents a metal element

  The decomposition temperature of the metal organic compound is preferably 350 ° C. or higher, more preferably 400 ° C. or higher. If the decomposition temperature is too low, for example, in the binder removal step, the metal organic compound tends to decompose, and the effects of the present invention tend not to be obtained. In addition, the decomposition temperature in this invention can be calculated | required by thermogravimetric analysis (TG analysis).

  As described above, the metal element contained in the metal organic compound is a sub-component (additive) metal element contained in the dielectric material. Specifically, at least one selected from Mg, Y, Gd, Dy, Ho and Tb is preferable. Furthermore, it is preferable to use Mg in combination with at least one selected from Y, Gd, Dy, Ho and Tb. When the metal organic compound contains the above metal element, the breakdown voltage and the high temperature accelerated life of the dielectric ceramic composition can be improved.

  The type (composition) of the metal element contained in the metal organic compound is not particularly limited, and may not coincide with the composition of the dielectric material constituting the dielectric layer. For example, when the dielectric material constituting the dielectric layer contains Mg and Y, the paste may contain a metal organic compound of Mg and a metal organic compound of Y, or a metal organic compound of Mg A compound and a metal organic compound of Gd may be contained. If the conductive paste of the present invention is used, the effects of the present invention can be achieved regardless of the composition and content of the dielectric material contained in the dielectric layer.

  The content of the metal organic compound is not particularly limited, but is preferably 0.01 to 4.00 mol in terms of metal element for each metal contained as an additive with respect to 100 mol of co-material particles described below. More preferably, it is 0.10 to 2.00 mol.

  The conductive paste according to the present invention includes co-material particles. The common material may have the same composition as the raw material of the dielectric material contained in the green sheet described above, or may be different. Usually, the raw material powder of the main component constituting the dielectric material is used as the co-material particles. Specific examples include raw powders of barium titanate, calcium titanate, strontium titanate, and composite oxides thereof. Among these, it is preferable to use raw material powder of barium titanate as the co-material particles. The co-material particles have an effect of suppressing the sintering of the conductive powder in the firing process. As the inorganic oxide powder used as the co-material particles, those having an average particle diameter of preferably 150 nm or less, more preferably 20 to 100 nm are used, and the particle size distribution is preferably sharp. Further, the content in the paste is preferably 5 to 40 parts by weight, more preferably 5 to 30 parts by weight with respect to 100 parts by weight of the conductive powder.

The organic solvent contained in the conductive paste is not particularly limited as long as it dissolves the metal organic compound. Specific examples of preferable organic solvents include alcohol solvents such as ethanol, isopropyl alcohol, normal propyl alcohol, and terpineol, and diol solvents such as ethylene glycol, propylene glycol, and hexylene glycol.
Even if it is other than these solvents, it can melt | dissolve favorably by producing the derivative | guide_body of the metal organic compound mentioned above by adjusting the amount of OH groups etc. according to the selected solvent, for example. The organic vehicle may be the same as the organic vehicle contained in the above-described dielectric layer paste. Further, it may further contain a plasticizer or a pressure-sensitive adhesive for the purpose of improving the adhesion to the green sheet, and the dispersant for the purpose of improving the dispersibility of the conductive particles and the co-material and improving the stability of the paste. May further be included.

  The conductive paste can be produced by mixing each of the above components with a ball mill, a three-roll mill, or the like to form a slurry.

  Then, as shown in FIG. 2B, by using this conductive paste, an internal electrode paste film 12a having a predetermined pattern is formed on the green sheet 10a by a printing method, and then dried to form an internal electrode paste film. 12a is obtained. Drying is performed to remove volatile components such as a solvent contained in the internal electrode paste film 12a.

  Next, as shown in FIG. 3A, the green sheet 10a on which the internal electrode paste film 12a is formed is laminated on the green sheet 10a (the outer layer green sheet) on which the internal electrode paste film 12a is not formed. Before or after that, the carrier sheet 20 is peeled off. As shown in FIG. 3B, this operation is repeated, and a plurality of green sheets 10a on which the internal electrode paste film 12a is formed are stacked up to a desired number of layers. And finally, the green sheet for outer layers is laminated | stacked, and the laminated body before baking is obtained. The laminate is cut into a predetermined size and subjected to a binder removal process.

Specific binder removal treatment conditions include a temperature rising rate: 5 to 300 ° C./hour, a holding temperature: 260 to 900 ° C., a holding time: 0.5 to 20 hours, an atmosphere: air or humidified N ₂ and H ₂ is preferable.

  Next, the laminate subjected to the binder removal treatment is subjected to firing and heat treatment.

Firing is performed at a heating rate of 200 to 4000 ° C./hour, a holding temperature of 1050 to 1350 ° C., a holding time of 0.5 to 8 hours, a cooling rate of 200 to 4000 ° C./hour, an atmospheric gas of humidified N ₂ and It is preferable to use conditions such as a mixed gas with H ₂ .

However, the oxygen partial pressure in the atmosphere during firing is preferably 10 ⁻² Pa or less. If the above range is exceeded, the internal electrode layer tends to oxidize, and if the oxygen partial pressure is too low, the electrode material of the internal electrode layer tends to abnormally sinter and tend to break.

The heat treatment (annealing) after such firing is preferably performed at a holding temperature or a maximum temperature of preferably 900 ° C. or higher. If the holding temperature or maximum temperature during heat treatment is less than the above range, the dielectric material is insufficiently oxidized and the insulation resistance life tends to be shortened. In addition to a decrease, it tends to react with the dielectric substrate and shorten its lifetime. The oxygen partial pressure during the heat treatment is an oxygen partial pressure higher than that of the reducing atmosphere during firing, and is preferably 10 ⁻³ Pa to 1 Pa. Below the range, it is difficult to re-oxidize the dielectric layer 10, and when the range is exceeded, the internal electrode layer 12 tends to oxidize.

  Further, the binder removal treatment, firing and heat treatment may be performed continuously or independently.

  The sintered body (element body 4) thus obtained is subjected to end face polishing by, for example, barrel polishing, sand blasting, etc., and terminal electrode paste is baked to form terminal electrodes 6 and 8.

  The multilayer ceramic capacitor of the present invention thus manufactured is mounted on a printed circuit board by soldering or the like and used for various electronic devices.

  The present invention is not limited to the above-described embodiment, and can be variously modified within the scope of the present invention.

  For example, the conductor paste of the present invention can be applied not only to a multilayer ceramic capacitor but also to other electronic components.

  In the above-described embodiment, the internal electrode paste film is directly formed on the green sheet by a printing method, but may be formed by, for example, a transfer method.

  Hereinafter, the present invention will be described based on further detailed examples, but the present invention is not limited to these examples.

Example 1
Preparation of conductive paste First, 20 parts by weight of BaTiO ₃ powder having an average particle diameter of 100 nm as co-material particles is added to 100 parts by weight of Ni powder having an average particle diameter of 200 nm, and further, ethanol as a dispersant and an organic solvent. , Methanol and α-terpineol, and ethyl cellulose as a binder were added. The mixture was stirred with a homogenizer and then kneaded with three rolls to form a paste. To this, the metal abietate (metal organic compound) shown in Table 2 was added to the BaTiO ₃ powder as co-material particles in the amount shown in Table 2, and further kneaded with three rolls to prepare a conductive paste. did. The Ni powder as the conductive powder with respect to the total weight of the paste is contained by 50% by weight. The decomposition temperature of abietic acid salt was 400 to 480 ° C.

Preparation of Dielectric Layer Paste BaTiO ₃ powder (main component) and raw materials of MgO, Y ₂ O ₃ and other subcomponents were wet mixed for 16 hours with a ball mill and dried to obtain a dielectric material. . MgO was contained at 2.00 mol with respect to BaTiO ₃ , and Y ₂ O ₃ was contained at 1.00 mol with respect to BaTiO ₃ . That is, Mg and Y are included in the dielectric layer as additives.

  In order to paste the obtained dielectric material, an organic vehicle was added to the dielectric material and mixed by a ball mill to obtain a dielectric layer paste.

Formation of Green Sheet First, using the above dielectric layer paste, a green sheet having a thickness of 1.4 μm was formed on a PET film using a wire bar coater.

Formation of Internal Electrode Paste Film Using the conductive paste prepared above, an internal electrode paste film 12a having a predetermined pattern was formed on the surface of the green sheet by screen printing.

Formation of final laminated body (element body before firing) Next, the internal electrode paste film 12a and the green sheet 10a are laminated one after another to finally obtain a final laminated body in which 50 layers of the internal electrode paste film 12a are laminated. It was.

Production of sintered body Next, the final laminate was cut into a predetermined size and subjected to binder removal processing, firing and annealing (heat treatment) to produce a chip-shaped sintered body.

The binder removal is performed under the conditions of a temperature rising rate: 5 to 300 ° C./hour, a holding temperature: 260 to 900 ° C., a holding time: 0.5 to 20 hours, and an atmosphere gas: a humidified mixed gas of N ₂ and H _2. went.

Firing is performed at a temperature rising rate of 200 to 4000 ° C./hour, a holding temperature of 1000 to 1300 ° C., a holding time of 0.5 to 8 hours, a cooling rate of 200 to 4000 ° C./hour, an atmospheric gas: humidified N ₂ and This was performed under the conditions of a mixed gas of H ₂ and an oxygen partial pressure of 10 ⁻⁷ Pa.

Annealing (reoxidation) is performed at a heating rate of 200 to 300 ° C./hour, a holding temperature of 1050 ° C., a holding time of 2 hours, a cooling rate of 300 ° C./hour, an atmosphere gas: humidified N ₂ gas, and an oxygen partial pressure. : 10 ⁻¹ Pa. Note that a wetter was used for humidifying the atmospheric gas, and the water temperature was set to 0 to 75 ° C.

Next, after polishing the end face of the chip-shaped sintered body by sand blasting, the terminal electrode paste is transferred to the end face and baked at 800 ° C. for 10 minutes in a humidified N ₂ + H ₂ atmosphere. A multilayer ceramic capacitor sample having the structure shown in FIG. 1 was obtained.

  The size of each sample thus obtained is 2.0 mm × 1.2 mm × 0.6 mm, the number of dielectric layers sandwiched between internal electrode layers is 50, and the thickness is 1.2 μm. The internal electrode layer 12 had a thickness of 0.9 μm.

  Furthermore, the electrical characteristics (capacitance, breakdown voltage, high temperature accelerated life) of each sample were evaluated as follows.

Capacitance capacitance C (unit is .mu.F), compared samples by a digital LCR meter at a reference temperature 25 ° C. (YHP Co. 4284A), frequency 1 kHz, under the conditions of the input signal level (measured voltage) 1 Vrms It was measured. In addition, this capacitance measurement was performed on 20 capacitor samples, and the average value was taken as the capacitance. The results are shown in Table 1.

A voltage value (unit: V / μm) with respect to the dielectric layer thickness when a DC voltage was applied to a breakdown voltage capacitor sample at a temperature of 25 ° C. under a condition of 10 V / sec and a current of 10 mA flowed was defined as a breakdown voltage. did. The breakdown voltage of the capacitor sample was evaluated by measuring the breakdown voltage. The breakdown voltage was measured for 20 capacitor samples, and the average value was taken as the breakdown voltage. The results are shown in Table 1.

High temperature accelerated life (HALT)
The capacitor sample was maintained at 160 ° C. under an electric field of 8 V / μm and applied with a DC voltage, and the lifetime was measured to evaluate the high temperature accelerated lifetime (HALT). In this example, the time from the start of application until the insulation resistance drops by an order of magnitude was defined as the lifetime. The high temperature accelerated life was measured for 20 capacitor samples, and the average value was defined as the high temperature accelerated life. The results are shown in Table 1.

Examples 2-29
A conductive paste was prepared in the same manner as in Example 1 except that the content of abietic acid salt with respect to the metal and co-material particles (BaTiO ₃ ) was changed as shown in Table 1, and a capacitor sample was prepared using this. Were prepared and characterized. The results are shown in Table 1.

Comparative Examples 1-7
In Comparative Example 1, a conductive paste was prepared in the same manner as in Example 1 except that the metal organic compound having a cyclic structure was not added, and a capacitor sample was produced using this to evaluate the characteristics. . The results are shown in Table 1.
In Comparative Examples 2 and 5, metal nanoparticles (that is, Mg and Y) shown in Table 1 were added to the conductive paste instead of the metal organic compound having a cyclic structure (particle diameter: 50 to 100 nm). In the same manner as in Example 3, a capacitor sample was produced and evaluated for characteristics. The results are shown in Table 1.
In Comparative Examples 3 and 6, a capacitor sample was prepared in the same manner as in Example 3 except that the metal organic compound having a cyclic structure was not added to the conductive paste, but was added to the dielectric layer paste. The characteristics were evaluated. The results are shown in Table 1.
In Comparative Examples 4 and 7, stearates of the metals (ie, Mg and Y) shown in Table 1 were added to the conductive paste instead of the metal organic compound having a cyclic structure, and the same as in Example 3 was performed. Thus, capacitor samples were prepared and evaluated for characteristics. The results are shown in Table 1.

  From Table 1, it can be confirmed that by adding a metal organic compound having a cyclic structure to the conductive paste, the breakdown voltage and the high temperature accelerated life can be improved without relatively reducing the capacitance.

  On the other hand, even if metal oxide nanoparticles or stearates are added to the conductive paste, the characteristics cannot be improved, and particularly, the high temperature accelerated life cannot be improved. This is thought to be because the oxide nanoparticles have low dispersibility, and thus aggregate and segregate in the paste or in the binder removal process. In addition, since stearates have a low melting temperature, it is considered that a good dispersion state cannot be maintained in the binder removal step, and the additive is aggregated and segregated in the firing step.

  Further, it can be confirmed that the effect of the present invention cannot be obtained even when a metal organic compound having a cyclic structure is added to the dielectric layer paste. This is thought to be because segregation occurs in large quantities due to the combination of metal elements that are easily segregated in the composite oxide because the metal organic compound after decomposition is very active.

Examples 30-58
In Examples 30 to 58, as the composition of the dielectric material constituting the dielectric layer, the content of MgO is 1.70 mol and the content of Y ₂ O ₃ with respect to 100 mol of the co-material particles BaTiO _3. Was prepared in the same manner as in Examples 1 to 29, except that the amount was 0.80 mol with respect to 100 mol of the co-material particles BaTiO ₃ , and a capacitor sample was prepared using the conductive paste. The characteristics were evaluated. The results are shown in Table 2.

Comparative Examples 8-14
In Comparative Examples 8 to 14, as a composition of the dielectric material constituting the dielectric layer, the content of MgO is 1.70 mol with respect to 100 mol of BaTiO ₃ , and the content of Y ₂ O ₃ is BaTiO 3. _{3 A} conductive paste was prepared in the same manner as in Comparative Examples 1 to 7 except that 0.80 mol was used with respect to 100 mol, and a capacitor sample was prepared and evaluated. . The results are shown in Table 2.

  From Table 2, even when the composition of the dielectric material is changed, the same effect as in Table 1 can be obtained, and the effect of the present invention can be obtained regardless of the composition of the dielectric material.

Examples 59-87
In Examples 59 to 87, cholate is used instead of abietic acid as a carboxylate having a cyclic structure, and the content of MgO is set to 100 mol of co-material particles BaTiO ₃ as the composition of the dielectric material. On the other hand, in the same manner as in Examples 1 to 29 except that the content of 0.50 mol and the content of Y ₂ O ₃ was 4.00 mol with respect to 100 mol of the co-material particles BaTiO ₃ , A conductive paste was prepared, and a capacitor sample was prepared using the paste, and the characteristics were evaluated. The decomposition temperature of cholate was 350 to 420 ° C. The results are shown in Table 3.

Comparative Examples 15-21
In Comparative Examples 15 to 21, as the metal organic compound having a cyclic structure, cholate was used instead of abietic acid which is a carboxylate, and the content of MgO as the composition of the dielectric material was set to BaTiO ₃ 100. In the same manner as in Comparative Examples 1 to 7, except that the content of 0.50 mol with respect to mol and the content of Y ₂ O ₃ was 4.00 mol with respect to 100 mol of BaTiO ₃ , respectively. A paste was prepared, a capacitor sample was prepared using the paste, and the characteristics were evaluated. The results are shown in Table 3.

  From Table 3, the effect of the present invention can be obtained even when cholate is used instead of abietic acid, and the effect of the present invention can be obtained regardless of the composition of the dielectric material. I can confirm that I can do it.

Examples 88-116
In Examples 88 to 116, the metal organic compound having a cyclic structure was used in the same manner as in Examples 1 to 29 except that cholate was used instead of abietic acid which was a carboxylate. A conductive paste was prepared, and a capacitor sample was prepared using the paste, and the characteristics were evaluated. The results are shown in Table 4.

  From Table 4, it can be confirmed that even when the composition of the dielectric material is changed, the effect of the present invention can be obtained, and the effect of the present invention can be obtained regardless of the composition of the dielectric material. .

Examples 117-134
Examples 117 to 125 are the same as Examples 3 to 11 except that Mg abietic acid salt and Y cholate salt are used as the metal organic compounds having a cyclic structure and the contents shown in Table 5 are used. Then, a conductive paste was prepared, and a capacitor sample was prepared using the conductive paste, and the characteristics were evaluated. The results are shown in Table 5.
In Examples 126 to 134, the same as in Examples 3 to 11 except that Mg cholate and Y abietate were used as the metal organic compounds having a cyclic structure and the contents shown in Table 6 were used. Then, a conductive paste was prepared, and a capacitor sample was prepared using the conductive paste, and the characteristics were evaluated. The results are shown in Table 6.

  From Tables 5 and 6, it can be confirmed that the effects of the present invention can be obtained even if used in combination as long as it is a metal organic compound having a cyclic structure. It can also be confirmed that this effect does not depend on the composition of the dielectric material.

Examples 135-157
In Examples 135 to 157, Cu powder having an average particle diameter of 200 nm was used instead of Ni as the conductive powder, and the content of MgO was set to 0 with respect to 100 mol of BaTiO ₃ as the composition of the dielectric material. .50 mol, and the content of Y ₂ O ₃ was 0.80 mol with respect to 100 mol of BaTiO ₃ , respectively, in the same manner as in Examples 3 to 15 and 20 to 29, respectively. The capacitor sample was prepared using this, and the characteristic evaluation was performed. The results are shown in Table 7.

Comparative Examples 22-25
In Comparative Examples 22 to 25, Cu powder having an average particle diameter of 200 nm was used instead of Ni as the conductive powder, and the content of MgO was set to 0 with respect to 100 mol of BaTiO ₃ as the composition of the dielectric material. .50 _mol, the content of Y 2 _{O 3,} with respect to BaTiO ₃ 100 moles, except for using 0.80 mol, respectively, in the same manner as in Comparative example 1-4, a conductive paste was prepared, which A capacitor sample was prepared using and evaluated for characteristics. The results are shown in Table 7.

  From Table 7, it can be confirmed that even when Cu is used as the conductive powder, the same tendency as when Ni is used is observed.

FIG. 1 is a schematic cross-sectional view of a multilayer ceramic capacitor according to an embodiment of the present invention. 2 (A) and 2 (B) are cross-sectional views of relevant parts showing the manufacturing process of the multilayer ceramic capacitor shown in FIG. FIGS. 3A and 3B are cross-sectional views illustrating the main part of the process subsequent to FIGS. 2A and 2B.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 ... Multilayer ceramic capacitor 4 ... Capacitor body 4a ... 1st edge part 4b ... 2nd edge part 6, 8 ... Terminal electrode 10 ... Dielectric layer 10a ... Green sheet 12 ... Internal electrode layer 12a ... Internal electrode pattern film 20 ... Carrier sheet

Claims (4)

  A conductive paste comprising conductive powder, a metal organic compound having a cyclic structure, co-material particles, an organic solvent, and a resin.   The conductive paste according to claim 1, wherein a decomposition temperature of the metal organic compound is 350 ° C. or higher.   The conductive paste according to claim 1, wherein the metal element contained in the metal organic compound is at least one selected from Mg, Y, Gd, Dy, Ho, and Tb. A method of manufacturing an electronic component having an electrode layer and a dielectric layer,
A step of forming an electrode paste film that becomes the electrode layer after firing using the conductive paste according to claim 1;
Laminating the electrode paste film with a green sheet that becomes a dielectric layer after firing;
The manufacturing method of an electronic component which has the process of baking the laminated body of the said green sheet and the said electrode paste film | membrane.

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