JP2010077467A - Electroless plating method of polyimide resin - Google Patents

Electroless plating method of polyimide resin Download PDF

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JP2010077467A
JP2010077467A JP2008244516A JP2008244516A JP2010077467A JP 2010077467 A JP2010077467 A JP 2010077467A JP 2008244516 A JP2008244516 A JP 2008244516A JP 2008244516 A JP2008244516 A JP 2008244516A JP 2010077467 A JP2010077467 A JP 2010077467A
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polyimide resin
electroless plating
metal
electroless
aqueous solution
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Hiroshi Matsubara
浩 松原
Kazunori Hodouchi
和範 程内
Keisuke Osawa
圭祐 大澤
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Nagaoka University of Technology NUC
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Abstract

<P>PROBLEM TO BE SOLVED: To provide the electroless plating method of a polyimide resin by which an electroless metal plated film is formed on the polyimide resin with excellent adhesiveness, expensive Pd or Sn exhibiting large environmental load is not needed for a pretreatment and remarkable productivity and practical performance are attained since an independent reducing step is not needed. <P>SOLUTION: The method of electroless plating the polyimide resin by which the metal plated film is formed on the surface of the polyimide resin includes: immersing the polyimide resin into an alkaline aqueous solution; successively immersing the polyimide resin into a solution containing metal ion; drying the polyimide resin; and next, immersing the polyimide resin into an electroless plating bath. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ポリイミド樹脂の無電解めっき方法に関するものである。   The present invention relates to a method for electroless plating of a polyimide resin.

ポリイミド樹脂は代表的なエンジニアプラスチックスとして重要な電子デバイス構成材料であり、その表面の金属化に対してはフレキシブルプリント配線板や電磁波シールド材料などの大きなニーズがあるが、中でも無電解めっき法は生産性に秀れた有効な表面金属化方法である。   Polyimide resin is an important electronic device component material as a typical engineer plastic, and there is a great need for flexible printed wiring boards and electromagnetic shielding materials for metallization of its surface. It is an effective surface metallization method with excellent productivity.

ところで、これまでポリイミド樹脂に密着性の高いめっきを行うことは困難とされていたが、近年、例えば特許文献1に開示されるような無電解めっき法が提案されている。この無電解めっき法は、ポリイミド樹脂をアルカリ水溶液に浸漬して表面を改質し、このポリイミド樹脂を金属イオンを含む溶液に浸漬してポリイミド樹脂の表面に触媒となる金属イオン(金属塩)を担持させ、無電解めっき反応が自発的に起こらない還元性の溶液(例えば水酸化ホウ素ナトリウムを含有する溶液)に浸漬して還元処理を行った後、無電解めっき反応が起こる無電解めっき浴に浸漬することにより、密着性の高いめっき膜をポリイミド表面に形成するものである。   By the way, although it has been difficult to perform highly adhesive plating on a polyimide resin so far, in recent years, for example, an electroless plating method as disclosed in Patent Document 1 has been proposed. In this electroless plating method, a polyimide resin is immersed in an alkaline aqueous solution to modify the surface, and this polyimide resin is immersed in a solution containing metal ions to form metal ions (metal salts) that serve as catalysts on the surface of the polyimide resin. After carrying out the reduction treatment by dipping in a reducing solution (for example, a solution containing sodium borohydride) that does not spontaneously cause electroless plating reaction, the electroless plating bath in which electroless plating reaction occurs By dipping, a plating film with high adhesion is formed on the polyimide surface.

特開2002−256443号公報JP 2002-256443 A

本発明は、上述のような現状に鑑み、更なるめっき膜の密着性の向上及び処理工程の単純化を図るべく、種々の実験の結果完成したものであり、ポリイミド樹脂上に密着性良く無電解金属めっき膜を形成でき、また、前処理に高価なPdや環境負荷の高いSnを必要とせず、しかも、還元工程を独立して必要としないため極めて生産性に秀れる実用性に秀れたポリイミド樹脂の無電解めっき方法を提供するものである。   In view of the present situation as described above, the present invention has been completed as a result of various experiments in order to further improve the adhesion of the plating film and simplify the treatment process. Electrolytic metal plating film can be formed, and pre-treatment does not require expensive Pd or environmentally high Sn, and because it does not require a reduction process independently, it has excellent practicality with excellent productivity. An electroless plating method for a polyimide resin is provided.

添付図面を参照して本発明の要旨を説明する。   The gist of the present invention will be described with reference to the accompanying drawings.

ポリイミド樹脂の表面に金属めっき膜を形成するポリイミド樹脂の無電解めっき方法であって、前記ポリイミド樹脂をアルカリ性水溶液に浸漬し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬し、続いて、このポリイミド樹脂を乾燥させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬することを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   A method of electroless plating of a polyimide resin that forms a metal plating film on the surface of the polyimide resin, wherein the polyimide resin is immersed in an alkaline aqueous solution, and then this polyimide resin is immersed in a solution containing metal ions, The polyimide resin is dried, and then the polyimide resin is immersed in an electroless plating bath.

また、ポリイミド樹脂の表面に金属めっき膜を形成するポリイミド樹脂の無電解めっき方法であって、前記ポリイミド樹脂をアルカリ性水溶液に浸漬し該ポリイミド樹脂の表面のイミド環を開環させてカルボキシル基を生成し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬して前記カルボキシル基に金属イオンを吸着せしめ、続いて、このポリイミド樹脂を乾燥させて前記カルボキシル基により金属塩を形成し該金属塩を前記ポリイミド樹脂の表面に定着させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬することで前記金属塩を還元して金属核を生成すると共に該金属核を触媒として無電解めっき反応を行わしめることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   Also, a method for electroless plating of a polyimide resin that forms a metal plating film on the surface of the polyimide resin, wherein the polyimide resin is immersed in an alkaline aqueous solution to open a imide ring on the surface of the polyimide resin to generate a carboxyl group Subsequently, the polyimide resin is immersed in a solution containing metal ions so that the metal ions are adsorbed on the carboxyl groups, and then the polyimide resin is dried to form a metal salt with the carboxyl groups. Is then fixed to the surface of the polyimide resin, and then the polyimide resin is immersed in an electroless plating bath to reduce the metal salt to form a metal nucleus and to perform an electroless plating reaction using the metal nucleus as a catalyst. The present invention relates to a method for electroless plating of a polyimide resin, which is performed.

また、請求項1,2いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記ポリイミド樹脂の表面の自由水が無くなるまで該表面の水分を除去することで、このポリイミド樹脂を乾燥させることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   Moreover, in the electroless plating method of the polyimide resin according to any one of claims 1 and 2, the polyimide resin is dried by removing moisture on the surface of the polyimide resin until there is no free water on the surface. The present invention relates to a method for electroless plating of polyimide resin.

また、請求項3記載のポリイミド樹脂の無電解めっき方法において、前記ポリイミド樹脂の表面の水分を30%以上除去することで、このポリイミド樹脂を乾燥させることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   4. The method for electroless plating of polyimide resin according to claim 3, wherein the polyimide resin is dried by removing water of 30% or more on the surface of the polyimide resin. It is related to.

また、請求項1〜4いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記無電解めっき浴は、無電解銅めっき浴若しくは無電解ニッケルめっき浴であることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   5. The polyimide resin electroless plating method according to claim 1, wherein the electroless plating bath is an electroless copper plating bath or an electroless nickel plating bath. This relates to the electroless plating method.

また、請求項1〜5いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記アルカリ性水溶液は、水酸化カリウム水溶液若しくは水酸化ナトリウム水溶液であることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   The method for electroless plating of a polyimide resin according to any one of claims 1 to 5, wherein the alkaline aqueous solution is a potassium hydroxide aqueous solution or a sodium hydroxide aqueous solution. It concerns the method.

また、請求項1〜6いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記金属イオンは、銀、銅、パラジウム、ニッケル、コバルト、金若しくは白金であることを特徴とするポリイミド樹脂の無電解めっき方法に係るものである。   The polyimide resin electroless plating method according to any one of claims 1 to 6, wherein the metal ions are silver, copper, palladium, nickel, cobalt, gold, or platinum. This relates to the electroless plating method.

本発明は上述のようにしたから、ポリイミド樹脂上に密着性良く無電解めっき膜を形成でき、また、前処理に高価なPdや環境負荷の高いSnを必要とせず、しかも、還元工程を独立して必要としないため極めて生産性に秀れる実用性に秀れたポリイミド樹脂の無電解めっき方法となる。   Since the present invention has been described above, an electroless plating film can be formed on a polyimide resin with good adhesion, and pretreatment does not require expensive Pd or environmentally high Sn, and the reduction process is independent. Therefore, it is an electroless plating method of a polyimide resin that is extremely practical and excellent in productivity because it is not necessary.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。   An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

ポリイミド樹脂をアルカリ性水溶液に浸漬して該ポリイミド樹脂の表面のイミド環を開環させてカルボキシル基を生成し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬して前記カルボキシル基に金属イオンを吸着せしめ、続いて、このポリイミド樹脂を乾燥させて前記カルボキシル基により金属塩を形成し該金属塩を前記ポリイミド樹脂の表面に定着させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬することで金属塩を還元して金属核を生成すると共に金属核を触媒(開始点)として無電解めっき反応を継続的に行う。   The polyimide resin is immersed in an alkaline aqueous solution to open the imide ring on the surface of the polyimide resin to generate a carboxyl group, and then the polyimide resin is immersed in a solution containing metal ions to add metal ions to the carboxyl groups. Next, the polyimide resin is dried to form a metal salt by the carboxyl group, the metal salt is fixed on the surface of the polyimide resin, and then the polyimide resin is immersed in an electroless plating bath. Thus, the metal salt is reduced to generate a metal nucleus, and the electroless plating reaction is continuously performed using the metal nucleus as a catalyst (starting point).

この際、乾燥処理を行うことにより金属塩をポリイミド樹脂の表面に強固に定着させることができ、無電解めっき処理に際して金属イオンのポリイミド樹脂表面からめっき浴への浸出が阻止され、その結果、ポリイミド樹脂表面における金属イオンの定着量が増加し、この金属イオンから生成される金属核を触媒として無電解めっき膜が極めて密着性良く形成される。   At this time, the metal salt can be firmly fixed on the surface of the polyimide resin by performing a drying treatment, and the leaching of metal ions from the polyimide resin surface to the plating bath is prevented during the electroless plating treatment. The fixing amount of metal ions on the resin surface increases, and an electroless plating film is formed with extremely good adhesion using a metal nucleus generated from the metal ions as a catalyst.

また、金属イオンの定着量が増加する分だけ、アルカリ性水溶液に浸漬することによる改質処理時間を短くでき、ポリイミド樹脂が痛み難く、それだけ膨潤が少なくなり、ポリイミド樹脂の寸法安定性が良好となる。   Also, the amount of fixing of metal ions increases, so that the modification treatment time by immersing in an alkaline aqueous solution can be shortened, the polyimide resin is less painful, the swelling is reduced, and the dimensional stability of the polyimide resin is improved. .

更に、表面の水分を除去することにより、(1)アルカリ水溶液への浸漬により膨潤していた樹脂表面に吸着金属イオンが強く定着するため、無電解めっき浴浸漬時にめっき浴の分解を引き起こすめっき浴中への吸着金属イオンの再溶解を防止でき、更に、(2)金属膜を成膜したのちに、残留水分により金属膜の一部が酸化し残留水分に溶解して膜厚が減少する現象を防止できることになり、従って、表面の水分を除去することによって従来のように還元工程を独立して行う必要がなく、単にめっき浴に浸漬するだけでめっき工程と共に行うことが可能となり、それだけ少ない工程数で効率良く処理を行うことが可能となる。   Furthermore, by removing the water on the surface, (1) a plating bath that causes the adsorbed metal ions to be firmly fixed on the surface of the resin that has been swollen by immersion in an alkaline aqueous solution, which causes decomposition of the plating bath when immersed in an electroless plating bath (2) Phenomenon in which a part of the metal film is oxidized by the residual moisture and dissolved in the residual moisture after the metal film is formed. Therefore, by removing the moisture on the surface, it is not necessary to perform the reduction process independently as in the prior art. It becomes possible to perform processing efficiently with the number of steps.

本発明の具体的な実施例について図面に基づいて説明する。   Specific embodiments of the present invention will be described with reference to the drawings.

本実施例は、ポリイミド樹脂の表面に金属めっき膜を形成するポリイミド樹脂の無電解めっき方法であって、前記ポリイミド樹脂をアルカリ性水溶液に浸漬し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬し、続いて、このポリイミド樹脂を乾燥させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬するものである。   This example is a method for electroless plating of a polyimide resin that forms a metal plating film on the surface of the polyimide resin. The polyimide resin is immersed in an alkaline aqueous solution, and then the polyimide resin is immersed in a solution containing metal ions. Immersion is followed by drying the polyimide resin, and then dipping the polyimide resin in an electroless plating bath.

具体的には、図1に図示したように、改質処理工程、イオン交換処理工程、乾燥処理工程及び還元・めっき処理工程の4工程を順次行うことで、フィルム状のポリイミド樹脂(厚さ12〜100μm程度)の表面に無電解めっき膜を形成する。   Specifically, as illustrated in FIG. 1, a film-like polyimide resin (thickness 12) is obtained by sequentially performing four steps of a reforming treatment step, an ion exchange treatment step, a drying treatment step, and a reduction / plating treatment step. An electroless plating film is formed on the surface of about 100 μm.

先ず、ポリイミド樹脂(東レデュポン株式会社製Kapton 200H)を水酸化カリウム(KOH)水溶液に浸漬して該ポリイミド樹脂の表面のイミド環を開環させてカルボキシル基(−COOH)を生成する。また、酸性を示すカルボキシル基(−COOH)と塩基性を示す水酸化カリウムとの中和反応により、−COOHのHは、Kに置換される。   First, a polyimide resin (Kapton 200H manufactured by Toray DuPont Co., Ltd.) is immersed in an aqueous potassium hydroxide (KOH) solution to open the imide ring on the surface of the polyimide resin to generate a carboxyl group (—COOH). In addition, H in —COOH is replaced by K by a neutralization reaction between an acidic carboxyl group (—COOH) and basic potassium hydroxide.

本実施例においては、5M(体積モル濃度)で40℃の水酸化カリウム水溶液に1分浸漬した後、純水で洗浄した。   In this example, the sample was immersed in an aqueous potassium hydroxide solution at 5M (volume molar concentration) at 40 ° C. for 1 minute and then washed with pure water.

尚、本実施例においては、アルカリ性水溶液として水酸化カリウム水溶液を採用しているが、例えば水酸化ナトリウム(NaOH)水溶液等、他の水溶液を採用しても良い。   In this embodiment, a potassium hydroxide aqueous solution is employed as the alkaline aqueous solution, but other aqueous solutions such as a sodium hydroxide (NaOH) aqueous solution may be employed.

続いて、このポリイミド樹脂を銀(Ag)イオンを含む硝酸銀(AgNO)水溶液に浸漬して前記カルボキシル基に銀イオンを吸着せしめる(−COOKのKをAgと置換せしめる)。 Subsequently, (allowed to replace the K of -COOK and Ag) of the polyimide resin silver (Ag) nitrate containing ions (AgNO 3) was immersed in an aqueous solution allowed to adsorb silver ions to the carboxyl group.

本実施例においては、0.05Mで40℃の硝酸銀水溶液に1分浸漬した後、純水で洗浄した。   In this example, the film was immersed in an aqueous solution of silver nitrate at 0.05 M and 40 ° C. for 1 minute, and then washed with pure water.

尚、本実施例においては、金属イオンとして銀イオンを採用しているが、銅(Cu)、パラジウム(Pd)、ニッケル(Ni)、コバルト(Co)、金(Au)若しくは白金(Pt)イオンを採用しても良く、同様に硝酸銀水溶液に限らず、他の水溶液を採用しても良い。   In this embodiment, silver ions are used as metal ions, but copper (Cu), palladium (Pd), nickel (Ni), cobalt (Co), gold (Au) or platinum (Pt) ions. Similarly, not only the aqueous silver nitrate solution but also other aqueous solutions may be adopted.

続いて、このポリイミド樹脂を乾燥させて前記カルボキシル基により金属塩(−COOAg)を形成し該金属塩を前記ポリイミド樹脂の表面に定着させる。   Subsequently, the polyimide resin is dried to form a metal salt (—COOAg) by the carboxyl group, and the metal salt is fixed to the surface of the polyimide resin.

具体的には、乾燥処理は、ポリイミド樹脂の表面の自由水(自由に動ける水)が無くなるまで該表面(めっき膜を形成する面)に付着した水分を少なくとも30%以上除去する処理であり、本実施例においては、前記ポリイミド樹脂の表面の水分除去処理を、水滴をはね飛ばす強風(圧縮空気によるエアブロー)を用い室温で10秒以上行うことで、このポリイミド樹脂を乾燥させている。   Specifically, the drying treatment is a treatment for removing at least 30% or more of water adhering to the surface (surface on which the plating film is formed) until there is no free water (water that can move freely) on the surface of the polyimide resin. In the present embodiment, the polyimide resin is dried by performing the moisture removal treatment on the surface of the polyimide resin for 10 seconds or more at room temperature using a strong wind (air blow by compressed air) that splashes water droplets.

尚、本実施例においては、ポリイミド樹脂の表面の水分を除去する際、このポリイミド樹脂を約0.2Torrの真空中で1時間以上置くことによってめっき膜を形成する面から除去される水分量を100%とした場合に30%以上除去するようにしている。   In this embodiment, when removing moisture on the surface of the polyimide resin, the amount of moisture removed from the surface on which the plating film is formed is set by placing the polyimide resin in a vacuum of about 0.2 Torr for 1 hour or more. When it is 100%, 30% or more is removed.

また、乾燥処理は上記方法に限らず無風状態で、25℃で5分以上、50℃で3分以上若しくは75℃で2分以上放置(加熱)して蒸発させるなど他の方法としても良い。   The drying treatment is not limited to the above method, and may be other methods such as evaporating by leaving (heating) at 25 ° C. for 5 minutes or more, at 50 ° C. for 3 minutes or more, or at 75 ° C. for 2 minutes or more.

また、ポリイミド樹脂の表面の水分を30%以上除去することで、無電解めっき浴浸漬時にめっき浴の分解を引き起こすめっき浴中への吸着金属イオンの再溶解を防止でき、更に、金属膜を成膜したのちに、残留水分により金属膜の一部が酸化し残留水分に溶解して膜厚が減少する現象を防止でき、密着性の良好なめっき膜を形成できることを確認しているが、ポリイミド樹脂表面の自由水を完全に無くすために、特に40%以上(40〜100%)除去するのが好ましい。本実施例では、約40%の水分を除去するようにしている。   Moreover, by removing 30% or more of the moisture on the surface of the polyimide resin, it is possible to prevent re-dissolution of adsorbed metal ions in the plating bath that causes decomposition of the plating bath when immersed in the electroless plating bath, and further, a metal film is formed. After film formation, it has been confirmed that it is possible to prevent the phenomenon that part of the metal film is oxidized by residual moisture and dissolved in the residual moisture and the film thickness is reduced, and a plating film with good adhesion can be formed. In order to completely eliminate free water on the resin surface, it is particularly preferable to remove 40% or more (40 to 100%). In this embodiment, about 40% of water is removed.

続いて、このポリイミド樹脂をホルムアルデヒド(HCHO)を還元剤として含む無電解銅めっき浴に浸漬することで、前記還元剤により金属塩を還元して金属核を生成すると共に該金属核を触媒として無電解銅めっき反応を継続的に行わしめ、所望の厚さの無電解銅めっき膜を形成する。   Subsequently, the polyimide resin is immersed in an electroless copper plating bath containing formaldehyde (HCHO) as a reducing agent, thereby reducing a metal salt with the reducing agent to form a metal nucleus and using the metal nucleus as a catalyst. The electrolytic copper plating reaction is continuously performed to form an electroless copper plating film having a desired thickness.

尚、無電解銅めっき浴に限らず、ジメチルアミンボランを還元剤として含む無電解ニッケル(Ni)めっき浴等の他のめっき浴を採用しても良いし、ホルムアルデヒドやジメチルアミンボランに限らず、ホスフィン酸塩等の他の還元剤を採用しても良い。   The electroless copper plating bath is not limited to other plating baths such as electroless nickel (Ni) plating bath containing dimethylamine borane as a reducing agent, and is not limited to formaldehyde or dimethylamine borane. Other reducing agents such as phosphinates may be employed.

以上のようにして得られたポリイミド樹脂の表面には、厚さ数百nm(100〜500nm)で膨れや剥がれやめっきムラのない良好な状態の無電解銅めっき膜が形成されることを確認した。   Confirmed that the surface of the polyimide resin obtained as described above has an electroless copper plating film having a thickness of several hundreds of nanometers (100 to 500 nm) and free from swelling, peeling or uneven plating. did.

図2は、本実施例により得られるめっき膜(右側)と特許文献1に開示されるような乾燥工程を含まず還元工程とめっき工程とを分けた従来例により得られるめっき膜(左側)との比較写真であり、図2より、本実施例により得られためっき膜は、従来例により得られためっき膜に比し、ムラのない均一なめっき膜であることを確認できる。   FIG. 2 shows a plating film (left side) obtained by the present embodiment and a plating film (left side) obtained by a conventional example in which the reduction process and the plating process are separated without including the drying process as disclosed in Patent Document 1. From FIG. 2, it can be confirmed from FIG. 2 that the plating film obtained by this example is a uniform plating film without unevenness as compared with the plating film obtained by the conventional example.

更に、従来例のポリイミド樹脂には変形が見られるが、本実施例のポリイミド樹脂には変形は見られず(図2及び図3参照)、本実施例は寸法安定性に秀れ均一なめっき膜を得られる方法であることが確認できる。   Further, although deformation is seen in the conventional polyimide resin, no deformation is seen in the polyimide resin of this embodiment (see FIGS. 2 and 3), and this embodiment has excellent dimensional stability and uniform plating. It can be confirmed that this is a method for obtaining a film.

また、図4は、JIS H8504テープ試験方法による剥離試験の結果を示す写真であり、切り込みを入れためっき膜にテープ試験を行っても全く剥離が見られないことから、図4より極めて密着性に秀れためっき膜であることが確認できる。   Further, FIG. 4 is a photograph showing the result of a peel test by the JIS H8504 tape test method, and no peeling is seen even when a tape test is performed on a notched plating film. It can be confirmed that the plating film is excellent.

本実施例は上述のようにするから、乾燥処理を行うことにより金属塩をポリイミド樹脂の表面に強固に定着させることができ、無電解めっき処理に際して金属イオンのポリイミド樹脂表面からめっき浴への浸出が阻止され、その結果、ポリイミド樹脂表面における金属イオンの定着量が増加し、この金属イオンから形成される金属核を触媒として無電解めっき膜が極めて密着性良く形成される。   Since the present embodiment is as described above, the metal salt can be firmly fixed on the surface of the polyimide resin by performing the drying process, and the leaching of metal ions from the polyimide resin surface to the plating bath during the electroless plating process. As a result, the fixed amount of metal ions on the surface of the polyimide resin is increased, and an electroless plating film is formed with extremely good adhesion using a metal nucleus formed from the metal ions as a catalyst.

また、金属イオンの定着量が増加する分だけ、アルカリ性水溶液に浸漬することによる改質処理時間を短くでき、ポリイミド樹脂が痛み難く、それだけ膨潤が少なくなり、ポリイミド樹脂の寸法安定性が良好となる。   Also, the amount of fixing of metal ions increases, so that the modification treatment time by immersing in an alkaline aqueous solution can be shortened, the polyimide resin is less painful, the swelling is reduced, and the dimensional stability of the polyimide resin is improved. .

更に、表面の水分を除去することにより、(1)アルカリ水溶液への浸漬により膨潤していた樹脂表面に吸着金属イオンが強く定着するため、無電解めっき浴浸漬時にめっき浴の分解を引き起こすめっき浴中への吸着金属イオンの再溶解を防止でき、更に、(2)金属膜を成膜したのちに、残留水分により金属膜の一部が酸化し残留水分に溶解して膜厚が減少する現象を防止できることになり、従って、表面の水分を除去することによって従来のように還元工程を独立して行う必要がなく、単にめっき浴に浸漬するだけでめっき工程と共に行うことが可能となり、それだけ少ない工程数で効率良く処理を行うことが可能となる。   Furthermore, by removing the water on the surface, (1) a plating bath that causes the adsorbed metal ions to be firmly fixed on the surface of the resin that has been swollen by immersion in an alkaline aqueous solution, which causes decomposition of the plating bath when immersed in an electroless plating bath (2) Phenomenon in which a part of the metal film is oxidized by the residual moisture and dissolved in the residual moisture after the metal film is formed. Therefore, by removing the moisture on the surface, it is not necessary to perform the reduction process independently as in the prior art. It becomes possible to perform processing efficiently with the number of steps.

よって、本実施例は、ポリイミド樹脂上に密着性良く無電解めっき膜を形成でき、また、前処理に高価なPdや環境負荷の高いSnを必要とせず、しかも、還元工程を独立して必要としないため極めて生産性に秀れる実用性に秀れたポリイミド樹脂の無電解めっき方法となる。   Therefore, in this example, an electroless plating film can be formed on polyimide resin with good adhesion, and pretreatment does not require expensive Pd and environmentally high Sn, and a reduction process is required independently. Therefore, it is an electroless plating method of polyimide resin with excellent practicality and excellent productivity.

本実施例の概略説明図である。It is a schematic explanatory drawing of a present Example. 本実施例に係るめっき膜付きポリイミド樹脂と従来例に係るめっき膜付きポリイミド樹脂との比較写真である。It is a comparative photograph with the polyimide resin with a plating film which concerns on a present Example, and the polyimide resin with a plating film which concerns on a prior art example. 図2の本実施例に係るめっき膜付きポリイミド樹脂の一部の拡大写真である。It is a one part enlarged photograph of the polyimide resin with a plating film which concerns on the present Example of FIG. 剥離試験の結果を示す写真である。It is a photograph which shows the result of a peeling test.

Claims (7)

ポリイミド樹脂の表面に金属めっき膜を形成するポリイミド樹脂の無電解めっき方法であって、前記ポリイミド樹脂をアルカリ性水溶液に浸漬し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬し、続いて、このポリイミド樹脂を乾燥させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬することを特徴とするポリイミド樹脂の無電解めっき方法。   A method of electroless plating of a polyimide resin that forms a metal plating film on the surface of the polyimide resin, wherein the polyimide resin is immersed in an alkaline aqueous solution, and then this polyimide resin is immersed in a solution containing metal ions, A method of electroless plating of a polyimide resin, comprising drying the polyimide resin and then immersing the polyimide resin in an electroless plating bath. ポリイミド樹脂の表面に金属めっき膜を形成するポリイミド樹脂の無電解めっき方法であって、前記ポリイミド樹脂をアルカリ性水溶液に浸漬し該ポリイミド樹脂の表面のイミド環を開環させてカルボキシル基を生成し、続いて、このポリイミド樹脂を金属イオンを含む溶液に浸漬して前記カルボキシル基に金属イオンを吸着せしめ、続いて、このポリイミド樹脂を乾燥させて前記カルボキシル基により金属塩を形成し該金属塩を前記ポリイミド樹脂の表面に定着させ、続いて、このポリイミド樹脂を無電解めっき浴に浸漬することで前記金属塩を還元して金属核を生成すると共に該金属核を触媒として無電解めっき反応を行わしめることを特徴とするポリイミド樹脂の無電解めっき方法。   A method for electroless plating of a polyimide resin that forms a metal plating film on the surface of the polyimide resin, wherein the polyimide resin is immersed in an alkaline aqueous solution to open a imide ring on the surface of the polyimide resin to generate a carboxyl group, Subsequently, the polyimide resin is immersed in a solution containing metal ions so that the metal ions are adsorbed to the carboxyl groups. Subsequently, the polyimide resin is dried to form metal salts with the carboxyl groups, and the metal salts are Fixing on the surface of the polyimide resin, and subsequently immersing the polyimide resin in an electroless plating bath to reduce the metal salt to form a metal nucleus and to perform an electroless plating reaction using the metal nucleus as a catalyst. A method for electroless plating of a polyimide resin. 請求項1,2いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記ポリイミド樹脂の表面の自由水が無くなるまで該表面の水分を除去することで、このポリイミド樹脂を乾燥させることを特徴とするポリイミド樹脂の無電解めっき方法。   The method for electroless plating of a polyimide resin according to any one of claims 1 and 2, wherein the polyimide resin is dried by removing moisture on the surface of the polyimide resin until free water is eliminated. A method for electroless plating of a polyimide resin. 請求項3記載のポリイミド樹脂の無電解めっき方法において、前記ポリイミド樹脂の表面の水分を30%以上除去することで、このポリイミド樹脂を乾燥させることを特徴とするポリイミド樹脂の無電解めっき方法。   4. The method for electroless plating of polyimide resin according to claim 3, wherein the polyimide resin is dried by removing moisture of 30% or more on the surface of the polyimide resin. 請求項1〜4いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記無電解めっき浴は、無電解銅めっき浴若しくは無電解ニッケルめっき浴であることを特徴とするポリイミド樹脂の無電解めっき方法。   5. The method for electroless plating of a polyimide resin according to claim 1, wherein the electroless plating bath is an electroless copper plating bath or an electroless nickel plating bath. Electroplating method. 請求項1〜5いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記アルカリ性水溶液は、水酸化カリウム水溶液若しくは水酸化ナトリウム水溶液であることを特徴とするポリイミド樹脂の無電解めっき方法。   6. The method for electroless plating of a polyimide resin according to claim 1, wherein the alkaline aqueous solution is a potassium hydroxide aqueous solution or a sodium hydroxide aqueous solution. 請求項1〜6いずれか1項に記載のポリイミド樹脂の無電解めっき方法において、前記金属イオンは、銀、銅、パラジウム、ニッケル、コバルト、金若しくは白金であることを特徴とするポリイミド樹脂の無電解めっき方法。   The method for electroless plating of a polyimide resin according to any one of claims 1 to 6, wherein the metal ion is silver, copper, palladium, nickel, cobalt, gold, or platinum. Electroplating method.
JP2008244516A 2008-09-24 2008-09-24 Electroless plating method of polyimide resin Pending JP2010077467A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8550877B2 (en) 2010-09-24 2013-10-08 Fuji Xerox Co., Ltd. Method of manufacturing annular body
CN110918980A (en) * 2019-12-16 2020-03-27 北京工商大学 Electromagnetic shielding composite material and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8550877B2 (en) 2010-09-24 2013-10-08 Fuji Xerox Co., Ltd. Method of manufacturing annular body
CN110918980A (en) * 2019-12-16 2020-03-27 北京工商大学 Electromagnetic shielding composite material and preparation method thereof

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