JP2010057038A - Camera mounting assembly apparatus and assembly method of camera mounting - Google Patents

Camera mounting assembly apparatus and assembly method of camera mounting Download PDF

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JP2010057038A
JP2010057038A JP2008221518A JP2008221518A JP2010057038A JP 2010057038 A JP2010057038 A JP 2010057038A JP 2008221518 A JP2008221518 A JP 2008221518A JP 2008221518 A JP2008221518 A JP 2008221518A JP 2010057038 A JP2010057038 A JP 2010057038A
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axis
imaging surface
tilt
stage
moving stage
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JP4862024B2 (en
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Katsunori Iguchi
克紀 井口
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Toshiba Teli Corp
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Toshiba Teli Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a camera mounting assembly apparatus which can carry out assembly operation of camera mounting easily and efficiently with optical precision required by a machine vision. <P>SOLUTION: The camera mounting assembly apparatus includes: an XY axial movable table 6 which fixedly-supports a sensor holder 10 by turning up an imaging surface so as to be exposed; a three-dimensional measurement instrument 1 for optically measuring the tilt adjustment of the imaging surface and the deviation in X, Y directions with respect to an optical axis; an X and Y2 axial direction tilt moving stage for combining a Y axial tilt stage 4 and an X axial tilt stage 5 where the table 6 is moved in the X, Y directions based on the value measured by the three-dimensional measurement instrument 1 and is positioned to the optical axis so as to perform tilt adjustment of the imaging surface; and a Z axial movement stage 7 for carrying out adhesion fixing of a CCD holder 10 to a mount base 20 by lowering the mount base 20 till the point to maintain a flange back between the imaging surfaces. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、エリアイメージセンサを実装したセンサホルダとレンズマウントを有するマウントベースとにより構成されるカメラマウントの製造時に適用されるカメラマウント組立装置およびカメラマウントの組立方法に関する。   The present invention relates to a camera mount assembling apparatus and a camera mount assembling method applied when manufacturing a camera mount including a sensor holder on which an area image sensor is mounted and a mount base having a lens mount.

マシンビジョンシステムにおいては、工業用の電子撮像カメラとして、撮像素子となるエリアイメージセンサに、CCD(Charge Coupled Device)やCMOSイメージセンサ(Charge Coupled Device Image Sensor)を用いた固体撮像素子カメラが広く用いられている。   In machine vision systems, solid-state image sensor cameras using CCD (Charge Coupled Device) or CMOS image sensor (Charge Coupled Device Image Sensor) as an area image sensor serving as an image sensor are widely used as industrial electronic imaging cameras. It has been.

この種、マシンビジョンシステムに適用される固体撮像素子カメラは、例えば検出位置精度等に関して高精度の位置検出が可能な撮像出力が要求される。   A solid-state imaging device camera applied to this type of machine vision system is required to have an imaging output capable of highly accurate position detection with respect to, for example, detection position accuracy.

このため、カメラレンズ取付部(フランジ)およびレンズ光軸に平行な基準取付面を有するマウントベースに、エリアイメージセンサを取り付ける製造工程においては、マウントベースに対するセンサ撮像面の微細な位置調整が必要となる。   For this reason, in the manufacturing process of attaching an area image sensor to a mount base having a camera lens mounting portion (flange) and a reference mounting surface parallel to the lens optical axis, fine position adjustment of the sensor imaging surface with respect to the mount base is required. Become.

とくに、この種のカメラ組立においては、カメラレンズ取付面(フランジ面)とセンサ撮像面との距離(フランジバック)の管理は非常に重要である。例えばCマウントレンズの場合、フランジバック(FB)を17.526mmに設定する必要がある。   In particular, in this type of camera assembly, the management of the distance (flange back) between the camera lens mounting surface (flange surface) and the sensor imaging surface is very important. For example, in the case of a C mount lens, it is necessary to set the flange back (FB) to 17.526 mm.

通常、フランジバックは、フランジ中心部とセンサ撮像面中心部の1点間距離の測定によって管理される場合が多く、フランジ面とセンサ撮像面の平行度に関しては部品加工寸法公差に依存している。この場合、加工精度が出ていなければフランジ面と撮像面が傾いた状態で組立てられ、厳密には上記面上の位置によってフランジバックが異なる(アオリが発生する)ことになる。従来の汎用カメラ製造では、このアオリに対する調整機構を有していない場合が多く、また、アオリ調整機構を設けた場合であっても、アオリ調整は、例えば光軸位置合わせ調整等の他の光学調整と別工程で行われていた。従って、従来では、アオリを含めた光学系全体の組立精度に問題があった。   Normally, the flange back is often managed by measuring the distance between one point between the center of the flange and the center of the sensor imaging surface, and the parallelism between the flange surface and the sensor imaging surface depends on the tolerance of part machining dimensions. . In this case, if the processing accuracy is not high, the flange surface and the imaging surface are assembled in an inclined state. Strictly speaking, the flange back varies depending on the position on the surface (the tilt is generated). Conventional general-purpose camera manufacture often does not have an adjustment mechanism for the tilt, and even when the tilt adjustment mechanism is provided, the tilt adjustment is performed by other optical systems such as optical axis alignment adjustment. It was done in a separate process from the adjustment. Therefore, there has been a problem in the assembly accuracy of the entire optical system including the tilt.

この種のアオリ調整技術として、従来では、撮像素子を取り付ける固定板の板面と、この固定板に取り付けられる撮像素子の撮像面とを三次元計測により平行にした状態で、固定板に撮像素子を取り付ける技術が存在した。
特開2007−259166号公報
Conventionally, as this type of tilt adjustment technology, the plate surface of the fixed plate to which the image pickup device is attached and the image pickup surface of the image pickup device to be attached to the fixed plate are parallel to each other by three-dimensional measurement. There was a technology to attach.
JP 2007-259166 A

しかしながら、上記した従来技術においては、固定板の板面と撮像面との平行度を保つことができても、固定板取付工程等、後の組立工程において光学的なずれの生じる虞があるという問題があった。   However, in the above-described conventional technology, even if the parallelism between the plate surface of the fixed plate and the imaging surface can be maintained, there is a possibility that an optical shift may occur in a subsequent assembly process such as the fixed plate mounting step. There was a problem.

本発明は、エリアイメージセンサを実装したセンサホルダとレンズマウントを有するマウントベースとにより構成されるカメラマウントの組立作業をマシンビジョンで要求される光学精度で効率よく容易に実施できるカメラマウント組立装置およびカメラマウントの組立方法を提供することを目的とする。   The present invention relates to a camera mount assembling apparatus capable of efficiently and easily performing assembly work of a camera mount constituted by a sensor holder on which an area image sensor is mounted and a mount base having a lens mount with optical accuracy required in machine vision. An object is to provide a method for assembling a camera mount.

本発明は、矩形状の撮像面を有するイメージセンサを取付けたセンサホルダをマウントベースにマウントするカメラマウント組立装置であって、前記センサホルダを前記撮像面を上方に向け露出させて固定支持するテーブルと、前記撮像面のアオリおよび光軸位置に対するX、Y方向のずれを光学的に計測する三次元測定器と、前記三次元測定器の計測値をもとに前記テーブルをX、Y方向に移動させて前記撮像面の光軸位置合わせ調整を行うX、Y方向2軸直交移動ステージと、前記X、Y方向2軸直交移動ステージに搭載され、前記三次元測定器の計測値をもとに前記テーブルをX、Y方向に傾斜させて前記撮像面のアオリを調整するX、Y2軸方向傾斜移動ステージと、前記テーブルの上方において前記マウントベースを保持し、前記マウントベースを前記撮像面との間にフランジバックを保つ位置まで下降させて、前記センサホルダを前記マウントベースに接着固定するZ軸移動ステージとを具備したことを特徴とする。   The present invention is a camera mount assembly device for mounting on a mount base a sensor holder to which an image sensor having a rectangular imaging surface is attached, and a table for fixing and supporting the sensor holder with the imaging surface exposed upward. And a three-dimensional measuring device for optically measuring deviations in the X and Y directions with respect to the tilt of the imaging surface and the optical axis position, and the table in the X and Y directions based on the measurement values of the three-dimensional measuring device. It is mounted on an X and Y direction 2-axis orthogonal movement stage that moves and adjusts the optical axis alignment of the imaging surface, and is mounted on the X and Y direction 2-axis orthogonal movement stage, based on the measurement values of the three-dimensional measuring device. Tilting the table in the X and Y directions to adjust the tilt of the imaging surface, and an X and Y biaxial tilt movement stage, holding the mount base above the table, The und base is lowered position to keep the flange back between said imaging surface, characterized in that the sensor holder has and a Z-axis moving stage for bonded and fixed to the mounting base.

また、本発明は、X、Y2軸方向傾斜移動ステージとX、Y方向2軸直交移動ステージとを組み合わせたXY軸移動ステージ、およびこのXY軸移動ステージにより移動制御されるXY軸移動テーブルと、Z軸移動ステージおよびこのZ軸移動ステージにより昇降制御されるZ軸移動テーブルとを具備した三次元測定器を用いて、矩形状の撮像面を有するイメージセンサを取り付けたセンサホルダをマウントベースにマウントするカメラマウントの組立方法であって、前記センサホルダを前記撮像面を上方に向け露出させて前記XY軸移動テーブルに固定支持する第1工程と、前記三次元測定器により、前記撮像面のアオリを計測する第2工程と、前記第2工程における三次元測定器の計測値をもとに、前記X、Y2軸方向傾斜移動ステージにより、前記XY軸移動テーブルをX、Y方向に傾斜させて、前記撮像面のアオリを調整する第3工程と、前記三次元測定器により、前記撮像面の光軸位置に対するX、Y方向のずれを計測する第4工程と、
前記第4工程における前記三次元測定器の計測値をもとに、前記X、Y方向2軸直交移動ステージにより、前記XY軸移動テーブルをX、Y方向に移動させて前記撮像面の光軸位置合わせ調整を行う第5工程と、前記XY軸移動テーブルの上方において前記マウントベースを前記Z軸移動テーブルに固定支持した後、前記Z軸移動ステージにより、前記Z軸移動テーブルを前記マウントベースを前記撮像面との間にフランジバックを保つ位置まで下降させて、前記センサホルダを前記マウントベースに接着固定する第6工程とを具備したことを特徴とする。
In addition, the present invention provides an XY axis moving stage that combines an X, Y 2 axis direction tilt moving stage and an X, Y direction 2 axis orthogonal moving stage, an XY axis moving table that is controlled to move by the XY axis moving stage, Using a three-dimensional measuring instrument equipped with a Z-axis moving stage and a Z-axis moving table controlled up and down by the Z-axis moving stage, a sensor holder mounted with an image sensor having a rectangular imaging surface is mounted on a mount base. A first step of exposing the sensor holder with the imaging surface facing upward and fixing and supporting the sensor holder on the XY-axis moving table; and an orientation of the imaging surface by the three-dimensional measuring instrument. Based on the measurement value of the CMM in the second step and the X, Y2 axis direction tilt moving stage Accordingly, the third step of adjusting the tilt of the imaging surface by tilting the XY axis moving table in the X and Y directions, and the three-dimensional measuring device in the X and Y directions with respect to the optical axis position of the imaging surface. A fourth step of measuring the deviation;
Based on the measurement value of the three-dimensional measuring instrument in the fourth step, the X- and Y-direction biaxial orthogonal movement stage moves the XY-axis movement table in the X and Y directions, and the optical axis of the imaging surface A fifth step of adjusting the alignment; and after the mount base is fixedly supported on the Z-axis movement table above the XY-axis movement table, the Z-axis movement table is attached to the mount base by the Z-axis movement stage. And a sixth step of lowering the sensor holder to the mount base by lowering the flange back to a position maintaining the flange back with the imaging surface.

本発明によれば、カメラマウントの組立作業をマシンビジョンで要求される光学精度で効率よく容易に実施することができる。   According to the present invention, the assembly work of the camera mount can be performed efficiently and easily with the optical accuracy required in machine vision.

以下図面を参照して本発明の実施形態を説明する。本発明では、エリアイメージセンサを実装したマウントベースをカメラマウントと称している。この実施形態ではエリアイメージセンサとしてCCDを実装対象とするが、CMOSイメージセンサを実装対象としてもよい。   Embodiments of the present invention will be described below with reference to the drawings. In the present invention, a mount base on which an area image sensor is mounted is referred to as a camera mount. In this embodiment, a CCD is targeted for mounting as an area image sensor, but a CMOS image sensor may be targeted for mounting.

本発明の実施形態に係るカメラマウント組立装置は、図1および図2に示すように、矩形状の撮像面を有するイメージセンサ(以下CCDと称す)を取付けたセンサホルダ(以下CCDホルダと称す)10を撮像面を上方に向け露出させて固定支持するXY軸移動テーブル(以下、単にテーブルと称す)6と、上記撮像面のアオリおよび光軸位置に対するX、Y方向のずれを光学的に計測する三次元測定器1と、この三次元測定器1の計測値をもとに上記テーブル6をX、Y方向に移動させて上記撮像面の光軸位置合わせ調整を行う、X軸移動ステージ2およびY軸移動ステージ3を組み合わせたX、Y方向2軸直交移動ステージと、このX、Y方向2軸直交移動ステージに搭載され、上記三次元測定器1の計測値をもとに上記テーブル6をX、Y方向に傾斜させて上記撮像面のアオリを調整する、X軸傾斜ステージ5およびY軸傾斜ステージ4を組み合わせたX、Y2軸方向傾斜移動ステージと、上記テーブル6の上方においてマウントベース20を保持し、このマウントベース20を上記撮像面との間にフランジバックを保つ位置まで下降させて上記CCDホルダ10を上記マウントベース20に接着固定するZ軸移動ステージ7とを具備して構成される。   As shown in FIGS. 1 and 2, a camera mount assembling apparatus according to an embodiment of the present invention has a sensor holder (hereinafter referred to as a CCD holder) to which an image sensor (hereinafter referred to as CCD) having a rectangular imaging surface is attached. An XY axis moving table (hereinafter simply referred to as a table) 6 that is fixedly supported with the imaging surface 10 exposed upward, and an optical measurement of the tilt of the imaging surface and the deviation in the X and Y directions with respect to the optical axis position. And the X-axis moving stage 2 that adjusts the optical axis alignment of the imaging surface by moving the table 6 in the X and Y directions based on the measurement values of the three-dimensional measuring instrument 1. The X- and Y-direction two-axis orthogonal movement stage combined with the Y-axis movement stage 3 and the X- and Y-direction two-axis orthogonal movement stage are mounted on the table 6 based on the measurement values of the three-dimensional measuring instrument 1. The The X- and Y2-axis direction tilt moving stages, which combine the X-axis tilt stage 5 and the Y-axis tilt stage 4 to adjust the tilt of the imaging surface by tilting in the Y direction, and the mount base 20 above the table 6 And a Z-axis moving stage 7 for lowering the mount base 20 to a position to keep the flange back between the mount surface 20 and the imaging surface, and fixing the CCD holder 10 to the mount base 20. .

上記X、Y方向2軸直交移動ステージを構成するX軸移動ステージ2およびY軸移動ステージ3と、上記X、Y2軸方向傾斜移動ステージを構成するX軸傾斜ステージ5およびY軸傾斜ステージ4と、Z軸移動ステージ7は、それぞれ三次元測定器1の基台1a上に、三次元測定器1と一体に設けられ、X軸傾斜ステージ5に上記テーブル6が設けられている。このテーブル6は、上記撮像面のアオリおよび光軸位置に対するX、Y方向のずれを計測する三次元測定工程、三次元測定に基づくアオリ並びに光軸位置合わせ調整を行う工程、CCDホルダ10をマウントベース20に接着固定する工程の各作業に共通のワーク支持テーブルを構成している。   X-axis moving stage 2 and Y-axis moving stage 3 constituting the X- and Y-direction two-axis orthogonal moving stage, X-axis tilting stage 5 and Y-axis tilting stage 4 constituting the X and Y2-axis direction tilt moving stage, The Z-axis moving stage 7 is provided integrally with the three-dimensional measuring device 1 on the base 1 a of the three-dimensional measuring device 1, and the table 6 is provided on the X-axis tilting stage 5. This table 6 is a three-dimensional measurement process for measuring the tilt of the imaging surface and the X- and Y-direction deviations relative to the optical axis position, a process of adjusting the tilt and optical axis alignment based on the three-dimensional measurement, and mounting the CCD holder 10 A work support table common to each operation in the process of bonding and fixing to the base 20 is configured.

上記X軸移動ステージ2およびY軸移動ステージ3と、Y軸傾斜ステージ4およびX軸傾斜ステージ5は、それぞれ、下側に固定部、上側に可動部を有して構成される。X軸移動ステージ2の固定部と可動部との間には直動ガイド2aが介在し、可動部を矢印aで示すX軸方向に所定量移動可能にしている。同様に、Y軸移動ステージ3の固定部と可動部との間には直動ガイド3aが介在し、可動部を矢印bで示すY軸方向に所定量移動可能にしている。直動ガイド2a,3aは、例えば固定部の軌道台と可動部の軌道台との間にころ入りリテーナを介在して構成される。X軸傾斜ステージ5の固定部と可動部との間には可動部を矢印cで示す傾斜方向に所定量移動可能にする揺動機構(図示せず)が設けられ、Y軸傾斜ステージ4の固定部と可動部との間には可動部を矢印dで示す傾斜方向に所定量移動可能にする揺動機構(図示せず)が設けられている。Z軸移動ステージ7は、X軸、Y軸方向と直交するZ軸方向に昇降移動するテーブル7aを有し、該昇降テーブル7aに、マウントベース20を固定支持するブラケット8が固定して設けられている。上記X軸移動ステージ2およびY軸移動ステージ3と、Y軸傾斜ステージ4およびX軸傾斜ステージ5は、それぞれモータおよびエンコーダによる駆動制御機構を備え、微動調整を可能にしている。   The X-axis moving stage 2 and Y-axis moving stage 3, the Y-axis tilting stage 4 and the X-axis tilting stage 5 are each configured with a fixed part on the lower side and a movable part on the upper side. A linear motion guide 2a is interposed between the fixed portion and the movable portion of the X-axis moving stage 2, and the movable portion can be moved by a predetermined amount in the X-axis direction indicated by an arrow a. Similarly, a linear motion guide 3a is interposed between the fixed portion and the movable portion of the Y-axis moving stage 3, and the movable portion can be moved by a predetermined amount in the Y-axis direction indicated by an arrow b. The linear motion guides 2a and 3a are configured, for example, by interposing a roller-type retainer between the fixed part raceway and the movable part raceway. A swing mechanism (not shown) is provided between the fixed portion and the movable portion of the X-axis tilt stage 5 to allow the movable portion to move a predetermined amount in the tilt direction indicated by the arrow c. A swinging mechanism (not shown) is provided between the fixed part and the movable part to enable the movable part to move by a predetermined amount in the tilt direction indicated by the arrow d. The Z-axis moving stage 7 has a table 7a that moves up and down in the Z-axis direction orthogonal to the X-axis and Y-axis directions, and a bracket 8 that fixes and supports the mount base 20 is fixed to the lifting table 7a. ing. The X-axis moving stage 2 and the Y-axis moving stage 3, the Y-axis tilting stage 4 and the X-axis tilting stage 5 are each provided with a drive control mechanism using a motor and an encoder, and fine adjustment is possible.

CCDホルダ10は、図3に示すように、中空の防塵用筒状部13と、接着剤(図5に示す符号Pa参照)が塗布される接着面15と、CCD実装基板11とを具備して構成される。CCDホルダ10は、レンズ装着側(フランジ側)の一方面に、後述するマウントベース20の基体開口部(図9に示す符号21a参照)に緩挿される防塵用筒状部13の取付部と、接着剤の塗布面を形成する接着面15とを有し、他方面に基板取付面を有して、この基板取付面に、CCD12を実装したCCD実装基板11が締め付けねじ(図示せず)によりねじ止め固定され、防塵用筒状部13の取付部に防塵用筒状部13が締め付けねじ14によりねじ止め固定される。この防塵用筒状部13はマウントベース20に緩挿する嵌め込み環を兼ねている。CCD実装基板11は、CCD12の撮像面12aが防塵用筒状部13の中央部に露出する予め定められた取付位置にねじ止め固定される。防塵用筒状部13は光軸と平行な軸線上で撮像面12aと重心が一致するように取り付けられる。さらにCCDホルダ10の一側面部には、後述する固定支持用の圧し当てねじ(図4、図5に示す符号9a参照)が当接する圧し当て面10pが形成されている。この圧し当てねじにより圧し当て面10pを圧しつけることで、CCDホルダ10がホルダ支持パレット(図4、図5に示す符号9参照)に固定支持され、圧し当てねじによる圧しつけを解除することでCCDホルダ10をホルダ支持パレットから解放することができる。   As shown in FIG. 3, the CCD holder 10 includes a hollow dust-proof cylindrical portion 13, an adhesive surface 15 to which an adhesive (see symbol Pa shown in FIG. 5) is applied, and a CCD mounting substrate 11. Configured. The CCD holder 10 has, on one surface on the lens mounting side (flange side), a mounting portion for a dust-proof cylindrical portion 13 that is loosely inserted into a base body opening portion (see reference numeral 21a shown in FIG. 9) of the mount base 20 described later. A bonding surface 15 for forming an adhesive application surface, a substrate mounting surface on the other surface, and a CCD mounting substrate 11 on which the CCD 12 is mounted on the substrate mounting surface by a fastening screw (not shown). The dust-proof cylindrical portion 13 is screwed and fixed to the attachment portion of the dust-proof cylindrical portion 13 with a fastening screw 14. The dust-proof cylindrical portion 13 also serves as a fitting ring that is loosely inserted into the mount base 20. The CCD mounting substrate 11 is screwed and fixed at a predetermined mounting position where the imaging surface 12a of the CCD 12 is exposed at the center of the dust-proof cylindrical portion 13. The dust-proof cylindrical portion 13 is attached so that the center of gravity coincides with the imaging surface 12a on an axis parallel to the optical axis. Furthermore, a pressing surface 10p is formed on one side surface of the CCD holder 10 so that a fixing support pressing screw (see reference numeral 9a shown in FIGS. 4 and 5), which will be described later, comes into contact therewith. By pressing the pressing surface 10p with the pressing screw, the CCD holder 10 is fixedly supported on the holder support pallet (see reference numeral 9 shown in FIGS. 4 and 5), and the pressing by the pressing screw is released. The CCD holder 10 can be released from the holder support pallet.

CCDホルダ10は、テーブル6上に於いて、図4および図5に示すホルダ支持パレット9に固定支持される。ホルダ支持パレット9は、図4および図5に示すように、CCDホルダ10の両側部に係合して、CCDホルダ10をホルダ支持パレット9の予め定められた固定位置にセットする係合保持部B1,B2と、ホルダ支持パレット9を光軸O1と平行な垂直軸回りの傾きθ(図7参照)を調整可能に、テーブル6に固定する固定用螺子の貫通孔9bと、係合保持部B1に螺合して、先端がホルダ支持パレット9にセットしたCCDホルダ10の圧し当て面10pに当接する固定用の圧し当てねじ9aとを具備して構成されている。なお、貫通孔9bを貫通してテーブル6に螺合される固定用螺子については図示していない。   The CCD holder 10 is fixedly supported on the table 6 by a holder support pallet 9 shown in FIGS. As shown in FIGS. 4 and 5, the holder support pallet 9 engages with both side portions of the CCD holder 10 and sets the CCD holder 10 at a predetermined fixed position of the holder support pallet 9. B1, B2, a through hole 9b of a fixing screw for fixing the holder support pallet 9 to the table 6 so that the inclination θ around the vertical axis parallel to the optical axis O1 (see FIG. 7) can be adjusted, and an engagement holding portion A fixing presser screw 9 a that is screwed into B <b> 1 and has a tip abutting on the pressering surface 10 p of the CCD holder 10 set on the holder support pallet 9 is provided. Note that a fixing screw that passes through the through hole 9b and is screwed to the table 6 is not shown.

Z軸移動ステージ7の昇降テーブル7aに固定されたブラケット8にはマウントベース20が固定支持される。このマウントベース20は、図9に示すように、断面L状の基体部21とフランジ部22とにより構成される。基体部21は、CCDホルダ10に設けられた防塵用筒状部13が緩挿される、防塵用筒状部13の外径より大きい孔径の開口部21aと、光軸に平行な基準取付面21fを有する。フランジ部22はレンズマウントを構成し、先端にフランジ面を形成する。マウントベース20は、テーブル6上のホルダ支持パレット9に固定支持されたCCDホルダ10の上方に、フランジ面を上方に向けた状態でブラケット8に固定支持され、Z軸移動ステージ7の昇降テーブル7aが、フランジ面と撮像面12aとの間のフランジバックを保つ位置まで下降(図10に示す符号ed参照)することによって、マウントベース20の基体部21に設けられた開口部21aにCCDホルダ10に取り付けられた防塵用筒状部13が緩挿され、後述する接着工程において、マウントベース20にCCDホルダ10が接着固定される。   A mount base 20 is fixedly supported on the bracket 8 fixed to the lifting table 7 a of the Z-axis moving stage 7. As shown in FIG. 9, the mount base 20 includes a base portion 21 having a L-shaped cross section and a flange portion 22. The base 21 has an opening 21a having a hole diameter larger than the outer diameter of the dust-proof cylindrical portion 13 into which the dust-proof cylindrical portion 13 provided in the CCD holder 10 is loosely inserted, and a reference mounting surface 21f parallel to the optical axis. Have The flange portion 22 constitutes a lens mount and forms a flange surface at the tip. The mount base 20 is fixedly supported on the bracket 8 with the flange surface facing upward above the CCD holder 10 fixedly supported on the holder support pallet 9 on the table 6, and the lifting table 7 a of the Z-axis moving stage 7. Is lowered to a position that keeps the flange back between the flange surface and the imaging surface 12a (see reference numeral ed shown in FIG. 10), whereby the CCD holder 10 is placed in the opening 21a provided in the base portion 21 of the mount base 20. The dust-proof cylindrical portion 13 attached to the mounting base 20 is loosely inserted, and the CCD holder 10 is bonded and fixed to the mount base 20 in the bonding step described later.

上記した構成のカメラマウント組立装置によるカメラマウントの組立工程について、図6乃至図11を参照して説明する。なお、以下の測定並びに測定内容に従う調整の各工程について、プログラム制御による自動組立も可能であるが、ここでは、マシンビジョンに適用される限られた少数単位の工業用カメラの製造工程に適用されるものであることから、測定並びに測定に伴う調整作業を人手作業により行うものとする。   A camera mount assembling process by the camera mount assembling apparatus having the above-described configuration will be described with reference to FIGS. The following measurement and adjustment processes according to the measurement contents can be automatically assembled by program control, but here it is applied to the manufacturing process of a limited number of industrial cameras applied to machine vision. Therefore, the measurement and adjustment work accompanying the measurement shall be performed manually.

工程1;CCD12が実装されたCCDホルダ10を撮像面12aを上方に向け露出させて、テーブル6に固定支持する。ここでは、テーブル6に固定したホルダ支持パレット9に、CCDホルダ10を取り付け、CCDホルダ10をテーブル6に固定支持する。   Step 1: The CCD holder 10 on which the CCD 12 is mounted is fixedly supported on the table 6 with the imaging surface 12a exposed upward. Here, a CCD holder 10 is attached to a holder support pallet 9 fixed to the table 6, and the CCD holder 10 is fixedly supported to the table 6.

工程2;三次元測定器1の光学測定部1bにより、CCDホルダ10に実装されたCCD12の撮像面12aのアオリを測定する。このアオリ測定は、図6に示すように、撮像面12aのX軸方向中心線上の両端付近の二点と前記撮像面のY軸方向中心線上の両端付近の二点をそれぞれ計測ポイントとして、距離を測定し、フランジ面に平行する基準面に対してのX軸、Y軸方向の傾きを三次元測定する。なお図6において、符号O3は撮像面12aの重心位置を示している。   Step 2: The tilt of the imaging surface 12a of the CCD 12 mounted on the CCD holder 10 is measured by the optical measuring unit 1b of the three-dimensional measuring device 1. As shown in FIG. 6, this tilt measurement is performed by measuring two points near both ends on the X-axis direction center line of the imaging surface 12a and two points near both ends on the Y-axis direction center line of the imaging surface, respectively. Are measured, and the inclinations in the X-axis and Y-axis directions with respect to the reference plane parallel to the flange surface are measured three-dimensionally. In FIG. 6, the symbol O3 indicates the position of the center of gravity of the imaging surface 12a.

工程3;上記工程2における三次元測定器1の計測値をもとに、X軸傾斜ステージ5およびY軸傾斜ステージ4を組み合わせたX、Y2軸方向傾斜移動ステージにより、テーブル6をX軸、Y軸方向に傾斜させて、撮像面12aのアオリを調整する。すなわち、撮像面12aがフランジ面と平行になるようにテーブル6の傾きを調整する。   Step 3: Based on the measurement value of the three-dimensional measuring instrument 1 in the above step 2, the table 6 is moved to the X axis by the X, Y2 axis direction tilt moving stage in which the X axis tilt stage 5 and the Y axis tilt stage 4 are combined. The tilt of the imaging surface 12a is adjusted by inclining in the Y-axis direction. That is, the inclination of the table 6 is adjusted so that the imaging surface 12a is parallel to the flange surface.

工程4;三次元測定器1の光学測定部1bにより、図7に示す、基準取付面21fと平行する基準面O2に対する、光軸と平行な垂直軸回りの傾きθ、および図8に示す、撮像面12aの光軸位置O1に対するX、Y方向のずれを計測する。   Step 4: By the optical measuring unit 1b of the three-dimensional measuring instrument 1, the inclination θ around the vertical axis parallel to the optical axis with respect to the reference surface O2 parallel to the reference mounting surface 21f shown in FIG. 7 and shown in FIG. A deviation in the X and Y directions with respect to the optical axis position O1 of the imaging surface 12a is measured.

工程5;上記工程4における三次元測定器1の計測値をもとに、撮像面12aの傾きθ、および光軸位置O1に対するX、Y方向のずれを調整する。ここで、傾きθに規定角以上のずれがあるときは、ホルダ支持パレット9のテーブル6への固定状態を一旦解除して傾きθに規定角以内に収め、ホルダ支持パレット9を再びテーブル6に固定する。なお、ここでは、傾きθの規定角以上のずれの発生頻度が低いことを前提に上記パレットの再固定による調整手段を適用しているが、実機では、X軸傾斜ステージ5とテーブル6の間にθ角調整ステージを設け、このθ角調整ステージによりθ角の調整を行っている。また、X軸移動ステージ2およびY軸移動ステージ3を組み合わせたX、Y方向2軸直交移動ステージにより、光軸位置O1に対するX、Y方向の調整する。   Step 5: Based on the measurement value of the three-dimensional measuring instrument 1 in the above step 4, the inclination θ of the imaging surface 12a and the deviation in the X and Y directions with respect to the optical axis position O1 are adjusted. Here, when the inclination θ has a deviation of a specified angle or more, the fixed state of the holder support pallet 9 to the table 6 is once released, and the holder support pallet 9 is placed on the table 6 again. Fix it. Here, the adjustment means by re-fixing the pallet is applied on the premise that the occurrence frequency of the deviation more than the specified angle of the inclination θ is low, but in the actual machine, between the X-axis inclination stage 5 and the table 6 is applied. Is provided with a θ angle adjustment stage, and the θ angle is adjusted by the θ angle adjustment stage. Further, the X- and Y-direction two-axis orthogonal movement stages that combine the X-axis movement stage 2 and the Y-axis movement stage 3 adjust the X and Y directions with respect to the optical axis position O1.

工程6;テーブル6上において、該テーブル6にホルダ支持パレット9を介在して固定支持された上記調整後のCCDホルダ10をマウントベース20に接着固定する。この工程では、図5(b)および図9に示すように、テーブル6上のホルダ支持パレット9に固定支持されたCCDホルダ10の接着面15に、接着剤(例えば紫外線硬化型接着剤)Paを塗布する。また、Z軸移動ステージ7の上昇位置にある昇降テーブル7aに固定されたブラケット8に、マウントベース20を取り付け、マウントベース20をブラケット8に固定支持する。その後、図10に示すように、マウントベース20を撮像面12aとの間にフランジバック(FB)を保つ位置まで矢印ed方向に下降させて、接着剤Paを硬化(af)させ、CCDホルダ10をマウントベース20に接着固定する。   Step 6: On the table 6, the adjusted CCD holder 10 fixedly supported on the table 6 with the holder support pallet 9 interposed therebetween is bonded and fixed to the mount base 20. In this step, as shown in FIGS. 5B and 9, an adhesive (for example, an ultraviolet curable adhesive) Pa is applied to the adhesive surface 15 of the CCD holder 10 fixedly supported on the holder support pallet 9 on the table 6. Apply. Further, the mount base 20 is attached to the bracket 8 fixed to the lifting table 7 a at the ascending position of the Z-axis moving stage 7, and the mount base 20 is fixedly supported to the bracket 8. Thereafter, as shown in FIG. 10, the mount base 20 is lowered in the direction of the arrow ed to the position where the flange back (FB) is maintained between the imaging surface 12 a and the adhesive Pa is cured (af), and the CCD holder 10. Is fixed to the mount base 20 by adhesion.

これにより、図11に示すように、撮像面12aが、フランジ面と重心を一にして、フランジバック(FB)を保ち、フランジ面に対して傾き(アオリ)がない状態で、CCDホルダ10をマウントベース20にマウントできる。   As a result, as shown in FIG. 11, the imaging surface 12a has the same center of gravity as the flange surface, maintains the flange back (FB), and does not tilt (tilt) with respect to the flange surface. It can be mounted on the mount base 20.

上記したカメラマウントの組立工程においては、工程2において撮像面12aのアオリを測定し、工程3においてアオリ調整を行い、工程4において光軸位置に対するX、Y方向のずれを計測し、工程5において光軸位置合わせ調整を行っているが、アオリ測定およびアオリ調整の工程と、光軸位置に対するずれの計測および光軸位置合わせ調整の工程とを入れ替えることも可能である。   In the camera mount assembly process described above, the tilt of the imaging surface 12a is measured in the process 2, the tilt adjustment is performed in the process 3, the deviation in the X and Y directions with respect to the optical axis position is measured in the process 4, and the process 5 is performed. Although the optical axis alignment adjustment is performed, the tilt measurement and tilt adjustment steps may be interchanged with the measurement of deviation relative to the optical axis position and the optical axis alignment adjustment steps.

なお、この発明は、上述した実施の形態そのままに限定されるものではなく、実施段階では本発明の要旨を逸脱しない範囲で装置の構成並びに構成要素を変更可能である。   Note that the present invention is not limited to the above-described embodiments as they are, and the configuration and components of the apparatus can be changed without departing from the gist of the present invention in the implementation stage.

本発明の実施形態に係るカメラマウント組立装置の構成を示す側面図。The side view which shows the structure of the camera mount assembly apparatus which concerns on embodiment of this invention. 上記実施形態に係るカメラマウント組立装置の構成を示す正面図。The front view which shows the structure of the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置で扱うCCDホルダ10の構成を示す平面図(a)および側面図(b)。The top view (a) and side view (b) which show the structure of the CCD holder 10 handled with the camera mount assembly apparatus based on the said embodiment. 上記実施形態に係るカメラマウント組立装置で扱うホルダ支持パレット9およびCCDホルダ10の構成を示す斜視図。The perspective view which shows the structure of the holder support pallet 9 and CCD holder 10 which are handled with the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置で扱うホルダ支持パレット9およびCCDホルダ10の構成を示す平面図(a)および側面図(b)。The top view (a) and side view (b) which show the structure of the holder support pallet 9 and CCD holder 10 which are handled with the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment. . 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment. 上記実施形態に係るカメラマウント組立装置の組立工程を説明するための図。The figure for demonstrating the assembly process of the camera mount assembly apparatus which concerns on the said embodiment.

符号の説明Explanation of symbols

1…三次元測定器、2…X軸移動ステージ、3…Y軸移動ステージ、4…Y軸傾斜ステージ、5…X軸傾斜ステージ、6…テーブル(XY軸移動テーブル)、7…Z軸移動ステージ、8…ブラケット、9…ホルダ支持パレット、10…CCDホルダ、11…CCD実装基板、12…CCD、12a…撮像面、13…防塵用筒状部(嵌め込み環)、15…接着面、20…マウントベース、21…基体部、21a…開口部、21f…基準取付面、22…フランジ部。   DESCRIPTION OF SYMBOLS 1 ... Three-dimensional measuring device, 2 ... X-axis movement stage, 3 ... Y-axis movement stage, 4 ... Y-axis inclination stage, 5 ... X-axis inclination stage, 6 ... Table (XY-axis movement table), 7 ... Z-axis movement Stage, 8 ... Bracket, 9 ... Holder support pallet, 10 ... CCD holder, 11 ... CCD mounting substrate, 12 ... CCD, 12a ... Imaging surface, 13 ... Dust-proof cylindrical part (fit ring), 15 ... Adhesive surface, 20 ... mount base, 21 ... base part, 21a ... opening, 21f ... reference mounting surface, 22 ... flange part.

Claims (6)

矩形状の撮像面を有するイメージセンサを取付けたセンサホルダをマウントベースにマウントするカメラマウント組立装置であって、
前記センサホルダを前記撮像面を上方に向け露出させて固定支持するテーブルと、
前記撮像面のアオリおよび光軸位置に対するX、Y方向のずれを光学的に計測する三次元測定器と、
前記三次元測定器の計測値をもとに前記テーブルをX、Y方向に移動させて前記撮像面の光軸位置合わせ調整を行うX、Y方向2軸直交移動ステージと、
前記X、Y方向2軸直交移動ステージに搭載され、前記三次元測定器の計測値をもとに前記テーブルをX、Y方向に傾斜させて前記撮像面のアオリを調整するX、Y2軸方向傾斜移動ステージと、
前記テーブルの上方において前記マウントベースを保持し、前記マウントベースを前記撮像面との間にフランジバックを保つ位置まで下降させて、前記センサホルダを前記マウントベースに接着固定するZ軸移動ステージと
を具備したことを特徴とするカメラマウント組立装置。
A camera mount assembly device for mounting a sensor holder to which an image sensor having a rectangular imaging surface is mounted on a mount base,
A table for fixing and supporting the sensor holder with the imaging surface exposed upward;
A three-dimensional measuring instrument for optically measuring the deviation in the X and Y directions with respect to the tilt of the imaging surface and the optical axis position;
An X, Y direction biaxial orthogonal moving stage for adjusting the optical axis alignment of the imaging surface by moving the table in the X, Y directions based on the measurement values of the three-dimensional measuring instrument;
X, Y2 axis direction mounted on the X, Y direction two-axis orthogonal moving stage and tilting the table in the X, Y direction based on the measurement value of the three-dimensional measuring device to adjust the tilt of the imaging surface An inclined moving stage;
A Z-axis moving stage that holds the mount base above the table, lowers the mount base to a position that maintains a flange back with the imaging surface, and adheres and fixes the sensor holder to the mount base; A camera mount assembling apparatus comprising:
前記X、Y2軸方向傾斜移動ステージおよび前記X、Y方向2軸直交移動ステージと、前記Z軸移動ステージは、前記三次元測定器に一体に設けられ、前記テーブルは前記X、Y2軸方向傾斜移動ステージに設けられていることを特徴とする請求項1に記載のカメラマウント組立装置。   The X, Y2 axis direction tilt movement stage, the X, Y direction 2 axis orthogonal movement stage, and the Z axis movement stage are integrally provided in the three-dimensional measuring instrument, and the table is tilted in the X, Y2 direction. The camera mount assembling apparatus according to claim 1, wherein the camera mount assembling apparatus is provided on a moving stage. 前記センサホルダは、光軸と平行な垂直軸回りの傾きθを調整可能に前記テーブルに固定されたホルダ支持パレットに固定支持される請求項1に記載のカメラマウント組立装置。   The camera mount assembly apparatus according to claim 1, wherein the sensor holder is fixedly supported on a holder support pallet fixed to the table so that an inclination θ around a vertical axis parallel to the optical axis can be adjusted. 前記三次元測定器は、前記撮像面のX軸方向中心線上の両端付近の二点と前記撮像面のY軸方向中心線上の両端付近の二点をそれぞれ計測ポイントとして前記撮像面のアオリを計測することを特徴とする請求項1に記載のカメラマウント組立装置。   The three-dimensional measuring instrument measures the tilt of the imaging surface using two points near both ends on the center line in the X-axis direction of the imaging surface and two points near both ends on the center line in the Y-axis direction of the imaging surface. The camera mount assembling apparatus according to claim 1, wherein: X、Y2軸方向傾斜移動ステージとX、Y方向2軸直交移動ステージとを組み合わせたXY軸移動ステージ、およびこのXY軸移動ステージにより移動制御されるXY軸移動テーブルと、Z軸移動ステージおよびこのZ軸移動ステージにより昇降制御されるZ軸移動テーブルとを具備した三次元測定器を用いて、矩形状の撮像面を有するイメージセンサを取り付けたセンサホルダをマウントベースにマウントするカメラマウントの組立方法であって、
前記センサホルダを前記撮像面を上方に向け露出させて前記XY軸移動テーブルに固定支持する第1工程と、
前記三次元測定器により、前記撮像面のアオリを計測する第2工程と、
前記第2工程における三次元測定器の計測値をもとに、前記X、Y2軸方向傾斜移動ステージにより、前記XY軸移動テーブルをX、Y方向に傾斜させて、前記撮像面のアオリを調整する第3工程と、
前記三次元測定器により、前記撮像面の光軸位置に対するX、Y方向のずれを計測する第4工程と、
前記第4工程における前記三次元測定器の計測値をもとに、前記X、Y方向2軸直交移動ステージにより、前記XY軸移動テーブルをX、Y方向に移動させて前記撮像面の光軸位置合わせ調整を行う第5工程と、
前記XY軸移動テーブルの上方において前記マウントベースを前記Z軸移動テーブルに固定支持した後、前記Z軸移動ステージにより、前記Z軸移動テーブルを前記マウントベースを前記撮像面との間にフランジバックを保つ位置まで下降させて、前記センサホルダを前記マウントベースに接着固定する第6工程と
を具備したことを特徴とするカメラマウントの組立方法。
XY axis moving stage combining X, Y 2 axis direction tilt moving stage and X, Y direction 2 axis orthogonal moving stage, XY axis moving table controlled by this XY axis moving stage, Z axis moving stage, and this Method of assembling a camera mount for mounting a sensor holder having an image sensor having a rectangular imaging surface on a mount base using a three-dimensional measuring instrument having a Z-axis moving table that is controlled to move up and down by a Z-axis moving stage Because
A first step of exposing the sensor holder with the imaging surface facing upward and fixing and supporting the sensor holder on the XY axis moving table;
A second step of measuring the tilt of the imaging surface by the three-dimensional measuring device;
Based on the measurement value of the CMM in the second step, the tilt of the imaging surface is adjusted by tilting the XY-axis moving table in the X and Y directions by the X and Y 2-axis tilt moving stage. A third step to perform,
A fourth step of measuring deviations in the X and Y directions with respect to the optical axis position of the imaging surface by the three-dimensional measuring device;
Based on the measurement value of the three-dimensional measuring instrument in the fourth step, the X- and Y-direction biaxial orthogonal movement stage moves the XY-axis movement table in the X and Y directions, and the optical axis of the imaging surface A fifth step of adjusting the alignment;
After the mount base is fixedly supported on the Z-axis movement table above the XY-axis movement table, the Z-axis movement stage causes the Z-axis movement table to place a flange back between the mount base and the imaging surface. A camera mount assembling method, comprising: a sixth step of lowering the sensor holder to a position to be held and bonding and fixing the sensor holder to the mount base.
X、Y2軸方向傾斜移動ステージとX、Y方向2軸直交移動ステージとを組み合わせたXY軸移動ステージ、およびこのXY軸移動ステージにより移動制御されるXY軸移動テーブルと、Z軸移動ステージおよびこのZ軸移動ステージにより昇降制御されるZ軸移動テーブルとを具備した三次元測定器を用いて、矩形状の撮像面を有するイメージセンサを取り付けたセンサホルダをマウントベースにマウントするカメラマウントの組立方法であって、
前記センサホルダを前記撮像面を上方に向け露出させて前記XY軸移動テーブルに固定支持する第1工程と、
前記三次元測定器により、前記撮像面の光軸位置に対するX、Y方向のずれを計測する第2工程と、
前記第2工程における前記三次元測定器の計測値をもとに、前記X、Y方向2軸直交移動ステージにより、前記XY軸移動テーブルをX、Y方向に移動させて前記撮像面の光軸位置合わせ調整を行う第3工程と、
前記三次元測定器により、前記撮像面のアオリを計測する第4工程と、
前記第4工程における三次元測定器の計測値をもとに、前記X、Y2軸方向傾斜移動ステージにより、前記XY軸移動テーブルをX、Y方向に傾斜させて、前記撮像面のアオリを調整する第5工程と、
前記XY軸移動テーブルの上方において前記マウントベースを前記Z軸移動テーブルに固定支持した後、前記Z軸移動テーブルにより、前記Z軸移動テーブルを前記マウントベースを前記撮像面との間にフランジバックを保つ位置まで下降させて、前記センサホルダを前記マウントベースに接着固定する第6工程と
を具備したことを特徴とするカメラマウントの組立方法。
XY axis moving stage combining X, Y 2 axis direction tilt moving stage and X, Y direction 2 axis orthogonal moving stage, XY axis moving table controlled by this XY axis moving stage, Z axis moving stage, and this Method of assembling a camera mount for mounting a sensor holder having an image sensor having a rectangular imaging surface on a mount base using a three-dimensional measuring instrument having a Z-axis moving table that is controlled to move up and down by a Z-axis moving stage Because
A first step of exposing the sensor holder with the imaging surface facing upward and fixing and supporting the sensor holder on the XY axis moving table;
A second step of measuring a deviation in the X and Y directions with respect to the optical axis position of the imaging surface by the three-dimensional measuring device;
Based on the measurement value of the three-dimensional measuring device in the second step, the X and Y direction biaxial orthogonal movement stage moves the XY axis movement table in the X and Y directions to thereby optical axis of the imaging surface. A third step of adjusting the alignment;
A fourth step of measuring the tilt of the imaging surface by the three-dimensional measuring device;
The tilt of the imaging surface is adjusted by tilting the XY axis moving table in the X and Y directions by the X and Y 2 axis direction tilt moving stage based on the measurement value of the CMM in the fourth step. And a fifth step to
After the mount base is fixedly supported on the Z-axis movement table above the XY-axis movement table, the Z-axis movement table causes the Z-axis movement table to have a flange back between the mount base and the imaging surface. A camera mount assembling method, comprising: a sixth step of lowering the sensor holder to a position to be held and bonding and fixing the sensor holder to the mount base.
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JP2006205303A (en) * 2005-01-28 2006-08-10 Seiko Epson Corp Method of manufacturing mold and forming mold
JP2007259166A (en) * 2006-03-24 2007-10-04 Sanyo Electric Co Ltd Tilt adjusting method for imaging device and camera apparatus including imaging device adjusted by the same method
JP2008046630A (en) * 2006-08-17 2008-02-28 Samsung Electro Mech Co Ltd Apparatus and method for assembling camera module

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614233A (en) * 1992-06-25 1994-01-21 Victor Co Of Japan Ltd Fine adjusting device and holding member for sold state image pickup element
JP2005300169A (en) * 2004-04-06 2005-10-27 Matsushita Electric Ind Co Ltd Three-dimensional measuring device
JP2006030256A (en) * 2004-07-12 2006-02-02 Mitsubishi Electric Corp Focusing adjustment method and focusing adjustment device for imaging apparatus
JP2006205303A (en) * 2005-01-28 2006-08-10 Seiko Epson Corp Method of manufacturing mold and forming mold
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