WO2015060188A1

WO2015060188A1 - Image pickup module manufacturing method and image pickup module manufacturing apparatus

Info

Publication number: WO2015060188A1
Application number: PCT/JP2014/077534
Authority: WO
Inventors: 卓郎浅岡; 達也藤浪
Original assignee: 富士フイルム株式会社
Priority date: 2013-10-22
Filing date: 2014-10-16
Publication date: 2015-04-30
Also published as: TW201521439A

Abstract

Provided are an image pickup module manufacturing apparatus and an image pickup module manufacturing method, whereby alignment between an image pickup element unit and a lens unit can be highly accurately performed. A manufacturing apparatus (200) presses a probe (113a) to each of terminals exposed from a side surface (11f) of a housing (11) of a lens unit (10) held by means of a lens unit holding section (75), presses a probe (113b) to each of terminals exposed from a side surface (11e) of the housing (11) of the lens unit (10), and carries a current to a lens drive apparatus (16) in the lens unit (10). In such state, an image of a measurement chart (89) is picked up by means of an image pickup element (27) through the lens unit (10), and on the basis of the picked up image, alignment between the lens unit (10) and an image pickup element unit (20) is performed.

Description

Imaging module manufacturing method and imaging module manufacturing apparatus

The present invention relates to an imaging module manufacturing method and an imaging module manufacturing apparatus.

In portable electronic devices such as a mobile phone having a photographing function, a small and thin imaging module is mounted. This imaging module has a structure in which a lens unit in which a photographing lens is incorporated and an imaging element unit in which an imaging element such as a CCD image sensor or a CMOS image sensor is incorporated are integrated.

The imaging module has an auto-focus (AF) mechanism for adjusting the focus by moving the lens in the lens unit, and the lens unit and the image sensor unit are moved relative to each other in the direction perpendicular to the optical axis to capture an image. Some have an optical image blur correction mechanism for optically correcting image blur.

For example, Patent Documents 1 and 2 describe an imaging module having an AF mechanism.

In recent years, image sensors used in image pickup modules have been widely used having a low pixel number of about 1 million to 2 million pixels to a high number of pixels of 3 million to 10 million pixels or more. ing.

When using an image sensor with a low number of pixels, high accuracy was not required for alignment between the lens unit and the image sensor unit. However, when using an image sensor with a high number of pixels, alignment with high accuracy was not required. Necessary.

Patent Document 1 describes a technique for fixing a lens unit and an image sensor unit after aligning the lens unit and the image sensor unit.

Japanese Unexamined Patent Publication No. 2010-88088 Japanese Unexamined Patent Publication No. 2005-86659

In the camera module manufacturing apparatus described in Patent Document 1, when the lens unit is held in the manufacturing apparatus, two opposing side surfaces of the lens unit casing are held between support plates. A probe is provided on one of the support plates that contact the two side surfaces, and the probe contacts a terminal exposed from the housing of the lens unit. If the pressing force of this probe breaks the balance of the gripping force of the housing by the two support plates, the optical axis of the lens unit will be held by the device in an inclined state, and positioning will be performed with high accuracy. Can not be.

The present invention has been made in view of the above circumstances, and an imaging module manufacturing method capable of accurately determining the position of a lens unit at the time of alignment between an imaging element unit and a lens unit and improving imaging quality, and An object is to provide a manufacturing apparatus.

The manufacturing method of an imaging module of the present invention is a manufacturing method of an imaging module having a lens unit having a lens group, and an imaging element unit having an imaging element fixed to the lens unit and imaging a subject through the lens group. The lens unit includes a lens driving device including a lens driving unit that moves at least a part of the lenses of the lens group, and the imaging element unit and the lens unit are on an axis orthogonal to the measurement chart. And at least one of the measurement charts, the relative position in the axial direction is changed, and at each relative position, the imaging element is driven and the imaging chart is imaged through the lens group by the imaging element. Process and an imaging signal obtained by imaging the measurement chart with the imaging element. A second step of adjusting at least one of the axial position and the inclination of the image sensor unit with respect to the lens unit, and fixing the image sensor unit to the lens unit. In the first step, The lens unit is held on the shaft, the first probe is pressed against an electrical connection portion provided in the lens unit and electrically connected to the lens driving device, and the lens driving device is energized, In the state where a force in a direction opposite to the direction perpendicular to the optical axis of the lens group applied to the electrical connection portion by pressing the first probe is applied to the lens unit, the measurement chart is displayed by the imaging device. The image is taken.

An imaging module manufacturing apparatus according to the present invention includes a measurement chart installation unit for installing a measurement chart, and a subject through a lens unit having a lens group on an axis orthogonal to the measurement chart installed in the measurement chart installation unit. An image sensor unit holding unit for holding an image sensor unit having an image sensor for imaging, and a lens unit for holding the lens unit on the axis between the measurement chart setting unit and the image sensor unit holding unit. A lens unit holding portion; a probe pressing portion that presses the first probe against the lens unit held by the lens unit holding portion; and the first probe is pressed against the lens unit by the probe pressing portion. Force in a direction perpendicular to the optical axis of the lens group applied to the lens unit in the The member pressing portion that applies a force in the opposite direction by pressing a member against the lens unit, the measurement chart setting portion, the lens unit holding portion, and the imaging element unit holding portion at least one of the above A control unit that changes the relative position in the axial direction, drives the image sensor of the image sensor unit at each relative position, and images the measurement chart through the lens unit by the image sensor, and the image sensor by the image sensor. An adjustment unit that adjusts at least one of the axial position and inclination of the image sensor unit with respect to the lens unit based on an image signal obtained by imaging the measurement chart, and the image sensor unit that has been adjusted by the adjustment unit And a unit fixing portion that fixes the lens unit to the lens unit.

According to the present invention, it is possible to provide a method and an apparatus for manufacturing an imaging module capable of improving the imaging quality by accurately determining the position of the lens unit when aligning the imaging element unit and the lens unit.

1 is an external perspective view of an imaging module 100. FIG. 1 is an external perspective view of an imaging module 100. FIG. FIG. 2 is an external perspective view of an image sensor unit 20 in a state where a lens unit 10 is omitted in the image pickup module 100 shown in FIG. 1. FIG. 2 is a cross-sectional view of the imaging module 100 shown in FIG. The figure which shows the electrical connection structure in the lens unit 10 shown in FIG. 2 is a side view illustrating a schematic configuration of a manufacturing apparatus 200 of the imaging module 100. It is a front view of a measurement chart. 6 is an explanatory diagram illustrating a holding state of the lens unit 10 and the imaging element unit 20 by the imaging module manufacturing apparatus 200. FIG. 4 is a diagram illustrating a relationship between an opening 75c formed in the suction head 75a of the lens unit holding unit 75 and an opening 11b formed in the top surface 11a of the housing 11 of the lens unit 10. FIG. It is a figure for demonstrating the flow of air when the lens unit 10 is adsorbed-held by the lens unit holding part 75. In FIG. 10, it is a figure for demonstrating the flow of air when the area of the opening 75c is smaller than the area of the opening 11a. It is the figure which looked at the probe unit 113 from the image pick-up element unit holding part 79 side. 2 is a block diagram illustrating an internal configuration of an imaging module manufacturing apparatus 200. FIG. 4 is a flowchart for explaining a manufacturing process of an imaging module by the imaging module manufacturing apparatus 200. It is a figure which shows the modification of the probe unit. It is a figure which shows the modification of the probe unit.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 and 2 are external perspective views of the imaging module 100. FIG.

The imaging module 100 includes a lens unit 10 having a lens group 12 and an imaging element unit 20 having an imaging element (not shown in FIG. 1) that is fixed to the lens unit 10 and images a subject through the lens group 12.

1 and 2, the direction along the optical axis Ax of the lens group 12 is defined as the z direction, and the two directions orthogonal to the z direction and orthogonal to each other are defined as the x direction and the y direction, respectively. 1 and 2 are perspective views when viewed from one direction in the y direction and the direction opposite to the one direction.

The lens unit 10 includes, for example, a metal housing 11 that accommodates each component described later. The housing 11 has a cubic shape, and the top surface 11 a of the housing 11 is a surface perpendicular to the optical axis Ax of the lens group 12. Of the four

side surfaces

11c, 11d, 11e, and 11f of the housing 11, the side surface 11c and the side surface 11d are opposed to each other across the optical axis Ax, and the side surface 11e and the side surface 11f are opposed to each other across the optical axis Ax. It is a surface to do.

In the top surface 11a, an opening 11b centered on the optical axis Ax of the lens group 12 is formed. The imaging module 100 captures subject light from the opening 11b into the lens group 12 for imaging.

A part of the flexible substrate 13 accommodated in the housing 11 is exposed from the side surface 11e and the side surface 11f of the housing 11. A lens unit terminal portion 14 including terminals 14A to 14F and terminals 14a to 14l as electrical connection portions is connected to the tip of the exposed portion of the flexible substrate 13. An exposed surface of each terminal included in the lens unit terminal portion 14 from the housing 11 is perpendicular to the y direction.

The center of the exposed surface of each terminal exposed from the side surface 11e of the housing 11 and the center of the exposed surface of each terminal exposed from the side surface 11f of the housing 11 are on a plane orthogonal to the optical axis Ax. Each terminal exposed from the side surface 11e of the housing 11 corresponds to any terminal exposed from the side surface 11f of the housing 11, and a straight line connecting the centers of the exposed surfaces of the corresponding two terminals is , And parallel to the y direction orthogonal to the optical axis Ax.

FIG. 3 is an external perspective view of the imaging module 100 shown in FIGS. 1 and 2 with the lens unit 10 omitted.

As shown in FIG. 3, the image sensor unit 20 includes a substrate 21 on which an image sensor 27 such as a CCD image sensor or a CMOS image sensor is formed, and a flexible substrate 22 that is electrically connected to the substrate 21.

The pixel pitch of the image sensor 27 is not particularly limited, but a pixel pitch of 1.0 μm or less is used. Here, the pixel pitch refers to the smallest distance among the distances between the centers of the photoelectric conversion regions included in the pixels included in the image sensor 27.

In recent years, with the increase in the number of pixels, the pixel pitch of the image sensor has become narrower, but when the pixel pitch becomes narrower, the area per pixel becomes smaller. As a result, the radius of the allowable circle of confusion is reduced and the depth of focus is reduced. Furthermore, since it is necessary to increase the amount of light collected per pixel, the F number of the lens tends to be small.

For these reasons, recent imaging modules are required to have a very small depth of focus and high alignment accuracy between the lens unit and the imaging element unit. When the pixel pitch is 1 μm or less, particularly high alignment accuracy is required.

A cylindrical cover holder 25 is formed on the substrate 21, and an image sensor 27 is disposed inside the cover holder 25. A cover glass (not shown) is fitted in the hollow portion of the cover holder 25 above the image sensor 27.

On the surface of the substrate 21 outside the cover holder 25, an image sensor unit terminal portion 24 including a plurality of terminals for electrical connection with the lens unit 10 is provided. The image sensor unit terminal portion 24 is also provided on the surface of the substrate 21 on the opposite side across the image sensor 27.

The substrate 21 is provided with an image sensor wiring connected to a data output terminal and a drive terminal of the image sensor 27. The imaging element wiring is connected to the external connection terminal portion 23 provided at the end of the flexible substrate 22 via the wiring provided on the flexible substrate 22. The external connection terminal portion 23 functions as an electrical connection portion that is electrically connected to the image sensor 27.

In addition, the substrate 21 is provided with a lens unit wiring connected to each terminal included in the image sensor unit terminal portion. The lens unit wiring is connected to the external connection terminal portion 23 provided at the end of the flexible substrate 22 via the wiring provided on the flexible substrate 22.

In a state where the lens unit 10 and the image sensor unit 20 are fixed, each terminal of the lens unit terminal unit 14 and each terminal of the image sensor unit terminal unit 24 corresponding thereto are electrically connected.

FIG. 4 is a cross-sectional view of the imaging module 100 shown in FIGS.

As shown in FIG. 4, the image sensor 27 is arranged in a recess provided in the substrate 21 and is sealed by a cover holder 25 provided on the substrate 21 and a cover glass 26 fitted in the cover holder 25. ing.

As shown in FIG. 4, the lens unit 10 includes a lens group 12 including a plurality of lenses (four lenses 12A to 12D in the example of FIG. 4) disposed above the cover glass 26, and supports the lens group 12. A cylindrical lens barrel 15, a bottom block 19 placed on the upper surface of the cover holder 25 of the image sensor unit 20, a flexible substrate 13 fixed on the bottom block 19, and a lens connected to the flexible substrate 13 A unit terminal portion (only

terminals

14c and 14F are shown in FIG. 4 because of the cross section) and a lens driving device 16 formed above the flexible substrate 13 are provided.

The lens group 12, the lens barrel 15, the bottom block 19, the flexible substrate 13, and the lens driving device 16 are accommodated in the housing 11.

The lens driving device 16 includes a first lens driving unit, a second lens driving unit, a third lens driving unit, and a Hall element as a position detection element that detects the position of the lens.

The first lens driving unit sets at least a part of the lenses in the lens group 12 (all the lenses in the lens group 12 in the example of FIG. 4) in a first direction along the optical axis Ax of the lens group 12 ( It is a drive unit for performing focus adjustment by moving in the z direction in FIG.

The second lens driving unit and the third lens driving unit use at least a part of the lenses in the lens group 12 (all the lenses in the lens group 12 in the example of FIG. 4) as the optical axis Ax of the lens group 12. It is a drive unit for correcting blurring of an image picked up by the image sensor 27 by moving in a second direction (x direction in FIG. 1) and a third direction (y direction in FIG. 1) orthogonal to each other.

The first lens driving unit, the second lens driving unit, and the third lens driving unit are actuators for moving the lens, respectively. In this embodiment, a voice coil motor (VCM) is used. Other known means may be employed.

FIG. 5 is a block diagram showing an electrical connection configuration of the lens unit 10 shown in FIG.

As shown in FIG. 5, the lens driving device 16 detects the x-direction VCM 16A (the second lens driving unit) for moving the lens group 12 in the x-direction and the x-direction position of the lens group 12. an x-direction hall element 16B, a y-direction VCM 16C (the third lens driving unit) for moving the lens group 12 in the y-direction, and a y-direction hall element 16D for detecting the y-direction position of the lens group 12; The z-direction VCM 16E (the first lens driving unit) for moving the lens group 12 in the z-direction and the z-direction hall element 16F for detecting the z-direction position of the lens group 12 are provided.

The x-direction VCM 16A has two terminals, and each of the two terminals is electrically connected to the terminal 14A and the terminal 14B via a wiring formed on the flexible substrate 13.

The x-direction hall element 16B has four terminals, and each of the four terminals is electrically connected to the terminal 14a, the terminal 14b, the terminal 14c, and the terminal 14d through a wiring formed on the flexible substrate 13. ing.

The y-direction VCM 16C has two terminals, and each of the two terminals is electrically connected to the terminal 14C and the terminal 14D through wiring formed on the flexible substrate 13.

The y-direction hall element 16D has four terminals, and each of the four terminals is electrically connected to the terminal 14e, the terminal 14f, the terminal 14g, and the terminal 14h via wiring formed on the flexible substrate 13. ing.

There are two terminals in the z-direction VCM 16E, and each of the two terminals is electrically connected to the terminal 14E and the terminal 14F via a wiring formed on the flexible substrate 13.

The z-direction hall element 16F has four terminals, and each of the four terminals is electrically connected to the terminal 14i, the terminal 14j, the terminal 14k, and the terminal 14l through the wiring formed on the flexible substrate 13. ing.

The number of terminals required for each lens driving unit and each Hall element is an example, and is not limited to the above.

In the imaging module 100 having the above configuration, first, the lens unit 10 and the imaging element unit 20 are separately manufactured. Then, an adjustment process for aligning the lens unit 10 and the image sensor unit 20 is performed so that the imaging surface of the subject imaged by the lens group 12 coincides with the image pickup surface of the image sensor 27, and then the lens. The unit 10 and the image sensor unit 20 are bonded and fixed.

The above adjustment process is performed by moving the image sensor unit 20 in a state where the lens unit 10 is held in a predetermined posture by the manufacturing apparatus.

FIG. 6 is a side view showing a schematic configuration of the manufacturing apparatus 200 for the imaging module 100.

The imaging module manufacturing apparatus 200 adjusts the position and inclination of the imaging element unit 20 with respect to the lens unit 10, and after the adjustment, fixes the imaging element unit 20 to the lens unit 10 to complete the imaging module 100.

The imaging module manufacturing apparatus 200 includes a chart unit 71, a collimator unit 73, a lens unit holding unit 75, an energization mechanism 77, an imaging element unit holding unit 79, an adhesive supply unit 81, and an ultraviolet lamp 83a as a light source. 83b and a control unit 85 for controlling them. The chart unit 71, the collimator unit 73, the lens unit holding unit 75, the energization mechanism 77, and the image sensor unit holding unit 79 are supported by a surface 87 parallel to the gravitational direction, and are arranged side by side on the surface 87. .

The chart unit 71 includes a box-shaped casing 71a, a measurement chart 89 fitted in the casing 71a, and a light source 91 that is incorporated in the casing 71a and illuminates the measurement chart 89 from the back with parallel light. It is configured. The measurement chart 89 is formed of, for example, a plastic plate having light diffusibility. The chart surface of the measurement chart 89 is perpendicular to the direction of gravity. The measurement chart 89 may be removable and replaceable with another one. The chart unit 71 functions as a measurement chart installation unit for installing the measurement chart 89 on the Z axis, which is a perpendicular to the chart surface of the measurement chart 89 and passes through the chart surface center 89a.

FIG. 7 is a diagram showing a chart surface of the measurement chart 89. The measurement chart 89 has a rectangular shape, and a plurality of chart images CH1, CH2, CH3, CH4, and CH5 are printed on the chart surface on which the chart pattern is provided.

The plurality of chart images are all the same image, and are so-called ladder-like chart patterns in which black lines are arranged at predetermined intervals. Each chart image is composed of a horizontal chart image Px arranged in the horizontal direction of the image and a vertical chart image Py arranged in the vertical direction of the image.

The collimator unit 73 is arranged to face the chart unit 71 on the Z axis which is a perpendicular to the chart surface of the measurement chart 89 and passes through the chart surface center 89a.

The collimator unit 73 includes a bracket 73a fixed to a work table 87 and a collimator lens 73b.

The collimator lens 73b condenses the light emitted from the chart unit 71, and causes the collected light to enter the lens unit holding portion 75 through the opening 73c formed in the bracket 73a. By adjusting the distance between the chart unit 71 and the collimator unit 73, the virtual image position of the measurement chart 89 imaged by the lens unit 10 can be set to an arbitrary distance (for example, a standard suitable for an infinite position or imaging assumed by the lens unit 10). The subject distance).

FIG. 8 is an explanatory diagram showing a holding state of the lens unit 10 and the imaging element unit 20 by the imaging module manufacturing apparatus 200.

The lens unit holding part 75 is for holding the lens unit 10 on the Z axis between the chart unit 71 and the image sensor unit holding part 79.

As shown in FIG. 8, the lens unit holding part 75 includes a suction head 75a having a suction surface 75d for sucking the lens unit 10, and suction holes 75b formed in the suction surface 75d (four in the example of FIG. 8). A suction hole) and a suction part 75e (see FIG. 13, not shown in FIGS. 6 and 8) for sucking air from the suction hole 75b.

The suction head 75a is formed to be rigid with metal, for example, and is provided with an opening 75c through which the light collected by the collimator unit 73 passes. The suction head 75a is arranged to face the collimator unit 73 on the Z axis, and the center of the opening 75c coincides with the Z axis.

The suction surface 75d of the suction head 75a is a surface perpendicular to the Z axis. The suction head 75 a is disposed with the suction surface 75 d facing away from the measurement chart 89.

The four suction holes 75b formed in the suction surface 75d of the suction head 75a are connected to the suction part 75e via a pipe (not shown).

The suction part 75e is composed of a vacuum source that applies a negative pressure to the suction hole 75b. When the suction part 75e applies a negative pressure to the suction hole 75b, air is sucked from the suction hole 75b, and an object in contact with the suction surface 75d is attracted to the suction surface 75d by the suction force. The suction unit 75e is controlled by the control unit 85.

A frame indicated by reference numeral 75f on the suction surface 75d in FIG. 8 indicates a range where the outer edge of the top surface 11a of the casing 11 of the lens unit 10 contacts. By bringing the lens unit 10 into contact with the suction surface 75d so that the frame 75f and the outer edge of the top surface 11a of the lens unit 10 coincide with each other, the optical axis Ax and the Z axis of the lens unit 10 coincide with each other. Yes.

When the lens unit 10 is in contact with the suction surface 75d so that the frame 75f and the outer edge of the top surface 11a of the lens unit 10 coincide with each other, the top surface 11a of the housing 11 blocks all four suction holes. Thereby, when air is sucked from the suction hole 75b, the lens unit 10 can be stably sucked to the suction surface 75d.

FIG. 9 is a diagram showing the relationship between the opening 75c formed in the suction head 75a of the lens unit holding portion 75 and the opening 11b formed in the top surface 11a of the housing 11 of the lens unit 10.

FIG. 9 is a view of the state in which the lens unit 10 is brought into contact with the suction surface 75d as seen from the image sensor unit holding unit 79 side. As for the lens unit 10, only the outer edge of the top surface 11a of the housing 11 and the opening 11b are provided. It is indicated by a broken line.

In FIG. 9, the positions of the

ultraviolet lamps

83a and 83b are also shown for use in later explanation.

As shown in FIG. 9, the area when the opening 75c is viewed in the Z-axis direction is larger than the area when the opening 11b is viewed in the Z-axis direction. In the state shown in FIG. 9, when viewed in the Z-axis direction, the entire region of the opening 11b overlaps the opening 75c.

FIG. 10 is a diagram for explaining the flow of air when the lens unit 10 is held by suction by the lens unit holding portion 75. FIG. 10 also illustrates a state in which a lens unit terminal portion 14 exposed from the housing 11 is in contact with

probes

113a and 113b described later.

FIG. 11 is a diagram for explaining the air flow when the area of the opening 75c when viewed in the Z-axis direction in FIG. 10 is smaller than the area of the opening 11a when viewed in the Z-axis direction.

10 and 11 schematically indicate members accommodated in the casing 11 of the lens unit 10.

As shown in FIG. 10, if the area of the opening 75c is larger than the area of the opening 11b, even when air is sucked from the suction hole 75b, an air flow is generated as shown by the black arrow, and thus the housing 11 Air flow can be prevented from occurring inside.

On the other hand, as shown in FIG. 11, when the area of the opening 75c is smaller than the area of the opening 11b, when air is sucked from the suction hole 75b, an air flow is generated as indicated by the black arrow. An air flow is generated inside the housing 11.

At least some of the lenses in the lens group 12 are movable in the x, y, and z directions, respectively. For this reason, when an air flow is generated inside the housing 11, the lens moves in an unintended direction, and it is difficult to accurately align the lens unit 10 and the image sensor unit 20. Therefore, as shown in FIG. 10, it is preferable to make the area of the opening 75c larger than the area of the opening 11b.

Even if the area of the opening 75c is smaller than the area of the opening 11b as shown in FIG. 11, if the suction surface 75d of the suction head 75a of the lens unit holding portion 75 is made of an elastic body such as rubber, the suction is performed. Since the air flow in the gap between the surface 75d and the top surface 11a of the housing 11 can be reduced, the generation of air flow in the housing 11 can be suppressed.

Returning to the description of FIG. 6, the energization mechanism 77 is fixed to the first slide stage 99 and the stage portion 99a of the first slide stage 99, and includes nine probes 113a (only one is shown in FIG. 6) and nine probes 113b. And a probe unit 113 (only one is shown in FIG. 6).

The first slide stage 99 is an electric precision stage that rotates a ball screw by rotation of a motor (not shown) and moves a stage portion 99a meshed with the ball screw in the Z-axis direction. The movement of the stage unit 99a is controlled by the control unit 85.

12 is a view of the probe unit 113 of FIG. 6 as viewed in the Z-axis direction from the chart unit 71 side. FIG. 12 shows a state in which the lens unit 10 is held by the lens unit holding portion 75.

As shown in FIG. 12, the probe unit 113 includes

stage portions

113A and 113B supported by the stage portion 99a. The stage portion 113A is provided with nine probes 113a extending in one direction in the y direction (right to left in FIG. 12), and the stage portion 113B is provided in a direction opposite to the one direction in the y direction (from the left in FIG. 12). Nine probes 113b extending in the right direction) are provided.

The

stage portions

113A and 113B are supported so as to be movable in the y direction on the stage portion 99a. The movement of the

stage units

113A and 113B is controlled by the control unit 85.

The stage portion 113A and the nine probes 113a provided on the stage portion 113A have probes 113a on the exposed surfaces of the terminals 14A to 14D and 14a to 14e exposed from the side surface 11f of the lens unit 10 held by the lens unit holding portion 75. It functions as a probe pressing part that presses. When the probe 113a comes into contact with each of the terminals 14A to 14D and 14a to 14e, the terminals can be energized.

When the probe 113a is pressed against each of the terminals 14A to 14D and 14a to 14e, a force in one direction in the y direction (from left to right in FIG. 12) is applied to the terminals 14A to 14D and 14a to 14e. At least join.

The stage portion 113B and the nine probes 113b provided on the stage portion 113B have the probes 113b on the exposed surfaces of the terminals 14f to 14l, 14E, and 14F exposed from the side surface 11e of the lens unit 10 held by the lens unit holding portion 75. Press. When the probe 113b comes into contact with each of the terminals 14f to 14l, 14E, and 14F, the terminals can be energized.

When the probe 113b is pressed against each of the terminals 14f to 14l, 14E, and 14F, the direction opposite to the one direction in the y direction with respect to the terminals 14f to 14l, 14E, and 14F (from left to right in FIG. 12) At least the power to add.

Accordingly, the stage unit 113B and the nine probes 113b provided on the stage unit 113B apply a force in a direction opposite to the force in one direction y applied to the terminals 14A to 14D and 14a to 14e by the probe 113a. It functions as a member pressing part to be added.

As described above, the

probes

113a and 113b are brought into contact with the respective terminals constituting the lens unit terminal portion 14, so that the first lens driving portion (z-direction VCM 16E) and the second lens driving portion (x It is possible to drive the lens driving device 16 including the direction VCM 16A) and the third lens driving unit (y direction VCM 16C).

In the state where the

probes

113a and 113b are in contact with the center of the exposed surface of each terminal, the contact point between each terminal exposed from the side surface 11f of the housing 11 of the lens unit 10 and the probe 113a, and the housing of the lens unit 10. A contact point between each terminal exposed from the side surface 11e of the body 11 and the probe 113b is included on a plane perpendicular to the optical axis Ax.

The image sensor unit holding unit 79 is for holding the image sensor unit 20 on the Z axis. Further, the image sensor unit holding unit 79 can change the position and inclination of the image sensor unit 20 in the Z-axis direction under the control of the control unit 85.

Here, the inclination of the imaging element unit 20 means the inclination of the imaging surface 27a of the imaging element 27 with respect to a plane orthogonal to the Z-axis.

The imaging element unit holding unit 79 holds a chuck hand 115 that holds the imaging element unit 20 so that the imaging surface 27a faces the chart unit 71 on the Z axis, and a substantially crank-shaped bracket 117 to which the chuck hand 115 is attached. The two-axis rotary stage 119 that adjusts the inclination around two axes orthogonal to the Z-axis (horizontal X-axis and vertical Y-axis) and the bracket 121 to which the two-axis rotary stage 119 is attached are held in the Z-axis direction. And a second slide stage 123 to be moved.

As shown in FIG. 8, the chuck hand 115 includes a pair of sandwiching members 115a bent in a substantially crank shape, and an actuator 115b that moves these sandwiching members 115a in the X-axis direction orthogonal to the Z-axis (see FIG. 6). It consists of and. The sandwiching member 115 a sandwiches the outer frame of the image sensor unit 20 and holds the image sensor unit 20.

Further, the chuck hand 115 holds the image sensor unit 20 held by the holding member 115a so that the optical axis Ax of the lens unit 10 held by the lens unit holding unit 75 and the center position of the image pickup surface 27a substantially coincide with each other. Position.

Further, when viewed in the Z-axis direction, the chuck hand 115 overlaps each terminal of the image sensor unit terminal portion 24 of the image sensor unit 20 with each terminal of the lens unit terminal portion 14 of the held lens unit 10. In addition, the image sensor unit 20 held between the holding members 115a is positioned.

The two-axis rotary stage 119 is an electric two-axis goniometer stage, and the rotation of two motors (not shown) causes the image sensor unit 20 to move around the X axis about the center position of the image pickup surface 27a. It is inclined in the θx direction and the θy direction around the Y axis perpendicular to the Z axis and the X axis. Thereby, when the imaging element unit 20 is tilted in each direction, the positional relationship between the center position of the imaging surface 27a and the Z axis does not shift.

The second slide stage 123 is an electric precision stage that rotates a ball screw by rotation of a motor (not shown) and moves a stage portion 123a engaged with the ball screw in the Z-axis direction. A bracket 121 is fixed to the stage portion 123a.

The connector cable 127 connected to the external connection terminal portion 23 provided at the tip of the flexible substrate 22 of the image sensor unit 20 is attached to the biaxial rotation stage 119. The connector cable 127 inputs a drive signal for the image sensor 27 and outputs a captured image signal output from the image sensor 27.

The adhesive supply unit 81 and the

ultraviolet lamps

83a and 83b constitute a unit fixing unit that fixes the lens unit 10 and the imaging element unit 20.

After the adjustment of the position and inclination of the image sensor unit 20 with respect to the lens unit 10 is finished, the adhesive supply unit 81 is an adhesive that cures by light in the gap between the lens unit 10 and the image sensor unit 20 (here as an example) Supply UV curable adhesive.

The

ultraviolet lamps

83a and 83b cure the adhesive by irradiating the ultraviolet curable adhesive supplied to the gap with ultraviolet rays. As the adhesive, in addition to the ultraviolet curable adhesive, an instantaneous adhesive, a thermosetting adhesive, a natural curable adhesive, and the like can be used.

As shown in FIG. 9, when the lens unit 10 is divided into two by a straight line L2 that passes through the optical axis Ax of the lens group 12 and is orthogonal to the optical axis Ax when viewed in the Z-axis direction, ultraviolet light is present on one divided area side. A lamp 83a is disposed, and an ultraviolet lamp 83b is disposed on the other divided area side.

That is, the

ultraviolet lamps

83a and 83b cure the ultraviolet curable adhesive supplied to the gap by irradiating light from two directions. Thereby, compared with the case of irradiating ultraviolet rays from one direction, the ultraviolet curable adhesive can be cured more uniformly in the entire module, and the lens unit 10 and the imaging element unit 20 can be stably fixed. be able to.

As shown in FIG. 9, the lens unit 10 is divided into four by a straight line L1 and a straight line L2 that pass through the optical axis Ax of the lens group 12 and are orthogonal to the optical axis Ax as viewed in the Z-axis direction. And it is good also as a structure which arrange | positions an ultraviolet lamp in each division area side, and irradiates an ultraviolet-ray from four directions. According to this configuration, the lens unit 10 and the image sensor unit 20 can be more stably fixed.

FIG. 13 is a block diagram showing an internal configuration of the imaging module manufacturing apparatus 200. As shown in FIG.

As shown in FIG. 13, each unit described above is connected to the control unit 85. The control unit 85 is, for example, a microcomputer including a CPU, a ROM, a RAM, and the like, and controls each unit based on a control program stored in the ROM. The control unit 85 is connected to an input unit 131 such as a keyboard and a mouse for performing various settings, and a display unit 133 that displays setting contents, work contents, work results, and the like.

The lens driving driver 145 is a driving circuit for driving the lens driving device 16, and the first lens driving unit, the second lens driving unit, the third lens driving unit, and the x direction via the probe unit 113. A drive current is supplied to each of the hall element 16B, the y-direction hall element 16D, and the z-direction hall element 16F.

The image sensor driver 147 is a drive circuit for driving the image sensor 27, and inputs a drive signal to the image sensor 27 via the connector cable 127.

The in-focus coordinate value acquisition circuit 149 performs Z for a plurality of imaging positions (positions corresponding to the chart images CH1, CH2, CH3, CH4, and CH5 of the measurement chart 89) set on the imaging surface 27a of the imaging element 27. In-focus coordinate values that are positions with a high degree of focus in the axial direction are acquired.

The control unit 85 controls the second slide stage 123 when acquiring the in-focus coordinate values of a plurality of imaging positions, and a plurality of measurement positions (Z0, Z1, Z2) discretely set in advance on the Z axis. ,... Are sequentially moved.

Further, the control unit 85 controls the image sensor driver 147 to display chart images of a plurality of chart images CH1, CH2, CH3, CH4, and CH5 of the measurement chart 89 formed by the lens group 12 at each measurement position. Let's take an image.

The focused coordinate value acquisition circuit 149 extracts pixel signals corresponding to the plurality of imaging positions from the imaging signal input via the connector cable 127, and individually focuses evaluation on the plurality of imaging positions from the pixel signals. Each value is calculated. The measurement position when a predetermined focus evaluation value is obtained for each imaging position is set as a focus coordinate value on the Z axis.

As the focus evaluation value, for example, a contrast transfer function value (hereinafter referred to as CTF value) can be used. The CTF value is a value representing the contrast of the image with respect to the spatial frequency, and when the CTF value is high, the degree of focus is considered high.

The in-focus coordinate value acquisition circuit 149 has a plurality of directions set on the XY coordinate plane for each of a plurality of measurement positions (Z0, Z1, Z2,...) Set on the Z axis for each of a plurality of imaging positions. CTF values are calculated for each.

The direction in which the CTF value is calculated is, for example, a horizontal direction (X-axis direction) that is the horizontal direction of the imaging surface 27a and a vertical direction (Y-axis direction) orthogonal thereto, and the CTF value in each direction is X -CTF value and Y-CTF value are calculated respectively.

The in-focus coordinate value acquisition circuit 149, for a plurality of imaging positions corresponding to each chart image CH1, CH2, CH3, CH4, CH5, coordinates on the Z axis (Zp1, Zp2) of the measurement position where the X-CTF value is maximum , Zp3, Zp4, Zp5) are acquired as the horizontal in-focus coordinate values. Similarly, the coordinate on the Z axis of the measurement position where the Y-CTF value is maximized is acquired as the vertical focus coordinate value.

The image plane calculation circuit 151 receives the horizontal focus coordinate value and the vertical focus coordinate value of each imaging position from the focus coordinate value acquisition circuit 149.

The imaging plane calculation circuit 151 includes the XY coordinate value of each imaging position when the imaging surface 27a is made to correspond to the XY coordinate plane, the horizontal in-focus coordinate value on the Z axis and the vertical value obtained for each imaging position. A plurality of evaluation points expressed in combination with the in-focus coordinate values are expanded into a three-dimensional coordinate system combining the XY coordinate plane and the Z axis, and the three-dimensional coordinate system is based on the relative positions of these evaluation points. An approximate imaging plane expressed as one plane is calculated.

Approximate image plane information is input from the image plane calculation circuit 151 to the adjustment value calculation circuit 153.

The adjustment value calculation circuit 153 has an imaging plane coordinate value F1 on the Z axis that is an intersection of the approximate imaging plane and the Z axis, and an inclination about the X axis and the Y axis of the approximate imaging plane with respect to the XY coordinate plane. A certain XY direction rotation angle is calculated and input to the control unit 85.

The control unit 85 drives the image sensor unit holding unit 79 based on the imaging plane coordinate value and the XY direction rotation angle input from the adjustment value calculation circuit 153, and adjusts the Z-axis direction position and inclination of the image sensor unit 20. Then, the imaging surface 27a is made to coincide with the approximate imaging surface. The control unit 85 functions as an adjustment unit that adjusts the Z-axis direction position and inclination of the image sensor unit 20 with respect to the lens unit 10 based on an image signal obtained by imaging the measurement chart 89 by the image sensor 27.

The imaging module manufacturing apparatus 200 described above generally performs the following steps.
(1) Step of holding the lens unit 10 and the image sensor unit 20 on the Z axis orthogonal to the chart surface of the measurement chart 89 (2) Changing the position of the image sensor unit 20 held on the Z axis in the Z axis direction In each position, the image pickup device 27 is driven while the lens drive device 16 of the lens unit 10 held on the Z-axis is energized, and the measurement chart 89 is picked up by the image pickup device 27. (3) The image pickup device 27 A step of adjusting the position and inclination of the image pickup device unit 20 with respect to the lens unit 10 based on the image pickup signal obtained by picking up the image of the measurement chart 89 and fixing the image pickup device unit 20 to the lens unit 10.

Hereinafter, details of the manufacturing process of the imaging module 100 by the imaging module manufacturing apparatus 200 will be described with reference to the flowchart of FIG.

First, the suction holding (S1) of the lens unit 10 by the lens holding mechanism 77 will be described.

A robot (transport unit) (not shown) transports the lens unit 10 and brings the top surface 11a of the lens unit 10 into contact with the suction surface 75d of the lens unit holding unit 75. In this state, the frame 75f and the outer edge of the top surface 11a of the housing 11 coincide.

When the top surface 11a of the lens unit 10 comes into contact with the suction surface 75d of the lens unit holding unit 75, the control unit 85 performs air suction by the suction unit 75e. Thereby, air is sucked from the suction hole 75b, the top surface 11a of the lens unit 10 is sucked to the suction surface 75d, and the lens unit 10 is held.

Next, the control unit 85 moves the stage unit 99a of the first slide stage 99 in a direction to approach the lens unit holding unit 75. Further, the control unit 85 brings the stage unit 113A and the stage unit 113B close to the lens unit holding unit 75, presses the probe 113a against each of the terminals 14A to 14D and 14a to 14e of the lens unit 10, and The probe 113b is pressed against each of the terminals 14E to 14F and 14f to 14l (S2). Thereby, the lens driving device 16 and the lens driving driver 145 are electrically connected.

Next, the holding (S3) of the image sensor unit 20 by the image sensor unit holding unit 79 will be described.

The control unit 85 controls the second slide stage 123 to move the biaxial rotary stage 119 along the Z-axis direction, so that the image sensor unit 20 is interposed between the lens unit holding unit 75 and the biaxial rotary stage 119. Forms an insertable space. The image sensor unit 20 is held by a robot (not shown) and transferred between the lens unit holding unit 75 and the biaxial rotary stage 119.

The control unit 85 detects the movement of the image sensor unit 20 with an optical sensor or the like, and moves the stage unit 123a of the second slide stage 123 in a direction to approach the lens unit holding unit 75. Then, the operator holds the image sensor unit 20 using the clamping member 115 a of the chuck hand 115. The connector cable 127 is connected to the external connection terminal portion 23 of the image sensor unit 20. Thereby, the image sensor 27 and the control unit 85 are electrically connected. Thereafter, the holding of the image sensor unit 20 by a robot (not shown) is released.

After the lens unit 10 and the image sensor unit 20 are held on the Z axis in this way, the focus coordinate value acquisition circuit 149 causes the horizontal focus coordinate value and the vertical focus coordinate value of each image pickup position on the image pickup surface 27a. Is acquired (S4).

Specifically, the control unit 85 controls the second slide stage 123 to move the biaxial rotation stage 119 in a direction approaching the lens unit holding unit 75, and the first imaging device 27 is closest to the lens unit 10. The image sensor unit 20 is moved to the measurement position.

Control unit 85 causes light source 91 of chart unit 71 to emit light. In addition, the control unit 85 inputs a drive signal from the lens drive driver 145 to the terminals 14A to 14F and drives the first to third lens drive units to position the optical axis Ax of the lens group 12 in the x direction, The y-direction position and the z-direction position are held at a reference position (for example, an initial position during actual use).

At this time, the control unit 85 acquires the output signals of the x-direction hall element 16B, the y-direction hall element 16D, and the z-direction hall element 16F from the lens driving driver 145, and uses the output signals to Control of the x-direction position, the y-direction position, and the z-direction position of the optical axis Ax is performed.

Next, the control unit 85 controls the image sensor driver 147 to cause the image sensor 27 to capture the chart images CH1, CH2, CH3, CH4, and CH5 formed by the lens unit 10. The image sensor 27 inputs the captured image signal to the focused coordinate value acquisition circuit 149 via the connector cable 127.

The in-focus coordinate value acquisition circuit 149 extracts the pixel signal at the imaging position corresponding to each chart image CH1, CH2, CH3, CH4, and CH5 from the input imaging signal, and X for each imaging position from the pixel signal. -Calculate CTF and Y-CTF values. The control unit 85 stores information on the X-CTF value and the Y-CTF value in, for example, a RAM in the control unit 85.

The control unit 85 sequentially moves the image sensor unit 20 to a plurality of measurement positions (Z0, Z1, Z2,...) Set along the Z-axis direction, and drives the lens driving device 16 at each measurement position. Thus, the image sensor 27 is caused to capture the chart image of the measurement chart 89 while maintaining the x-direction position, the y-direction position, and the z-direction position of the optical axis Ax of the lens group 12 at the reference position. The focused coordinate value acquisition circuit 149 calculates an X-CTF value and a Y-CTF value at each imaging position at each measurement position.

The focused coordinate value acquisition circuit 149 selects the maximum value from among the plurality of calculated X-CTF values and Y-CTF values for each of the imaging positions, and the Z-axis of the measurement position where the maximum value is obtained. The coordinates are acquired as the horizontal focus coordinate value and the vertical focus coordinate value of the imaging position.

The horizontal focus coordinate value and the vertical focus coordinate value acquired by the focus coordinate value acquisition circuit 149 are input to the imaging plane calculation circuit 151. The imaging plane calculation circuit 151 calculates an approximate imaging plane F that is approximated in a plane by, for example, the least square method (S6).

Information on the approximate image plane F calculated by the image plane calculation circuit 151 is input to the adjustment value calculation circuit 153. The adjustment value calculation circuit 153 includes an imaging plane coordinate value F1 that is an intersection of the approximate imaging plane F and the Z axis, and an XY direction that is an inclination around the X axis and the Y axis of the approximate imaging plane with respect to the XY coordinate plane. The rotation angle is calculated and input to the control unit 85 (S7).

The control unit 85 controls the biaxial rotation stage 119 and the second slide stage 123 based on the imaging plane coordinate value F1 and the rotation angle in the XY direction, and the center position of the imaging plane 27a of the imaging element 27 is the imaging plane coordinate. The image sensor unit 20 is moved in the Z-axis direction so as to coincide with the value F1, and the angles of the θx direction and θy direction of the image sensor unit 20 are adjusted so that the inclination of the image sensing surface 27a coincides with the approximate imaging plane F. Adjust (S8).

The control unit 85 performs a confirmation step of confirming the in-focus position of each imaging position after adjusting the position and inclination of the imaging element unit 20 (S9).

In this confirmation step, the above-described step S4 is executed again. After the adjustment of the position and inclination of the image sensor unit 20, the variation in the evaluation value corresponding to the horizontal direction and the vertical direction becomes small for each of the image pickup positions.

The control unit 85 moves the imaging element unit 20 in the Z-axis direction so that the center position of the imaging surface 27a coincides with the imaging plane coordinate value F1 after the confirmation step (S5: YES) (S10).

Further, the control unit 85 supplies ultraviolet curing adhesive from the adhesive supply unit 81 to the gap between the lens unit 10 and the imaging element unit 20 (S11), and turns on the

ultraviolet lamps

83a and 83b, thereby curing the ultraviolet curing. The mold adhesive is cured (S12).

After the adhesive is cured and the lens unit 10 and the imaging element unit 20 are fixed, when the imaging module is gripped by a robot (not shown), the control unit 85 stops the suction of air by the suction unit 75e, The

stage portions

113A and 113B are moved away from the lens unit 10. Thereby, the adsorption | suction of the top | upper surface 11a of the lens unit 10 is cancelled | released, and the contact with each probe of the probe unit 113 and each terminal of the lens unit 10 is cancelled | released (S13). The completed imaging module 100 is taken out from the imaging module manufacturing apparatus 200 by a robot (not shown) (S14).

The lens unit 10 and the image sensor unit 20 can be fixed with an ultraviolet curable adhesive, but curing with the ultraviolet curable adhesive may be used as temporary fixing between the lens unit 10 and the image sensor unit 20.

For example, the imaging module 100 is removed from the imaging module manufacturing apparatus 200 in a state where the lens unit 10 and the imaging element unit 20 are temporarily fixed, and after performing a desired process such as a cleaning process, the lens unit 10 and the imaging element unit 20 May be completely fixed by a thermosetting adhesive or the like.

The manufacturing apparatus 200 described above pushes the probe 113a to the nine terminals exposed from the side surface 11f of the housing 11 of the lens unit 10 to energize the lens driving device 16 of the lens unit 10 held by the lens unit holding part 75. The probe 113b is pressed against nine terminals exposed from the side surface 11e of the housing 11 facing the side surface 11f.

The unidirectional force in the y direction applied to the lens unit 10 by the pressing of the probe 113a is canceled by pressing the probe 113b against the nine terminals exposed from the side surface 11e of the housing 11. For this reason, it is possible to prevent the optical axis Ax of the lens unit 10 from being inclined with respect to the Z axis due to the force when the probe is pressed against the lens unit 10, and the alignment of the lens unit 10 and the image sensor unit 20 is achieved. Can be performed with high accuracy.

Up to this point, the focus evaluation value is obtained by imaging the measurement chart 89 while energizing each lens driving unit and each Hall element included in the lens driving device. However, the components in the lens driving device 16 to be energized do not need to be the lens driving units and the hall elements, and only energize those necessary according to the alignment accuracy. Also good.

For example, the first to third lens driving may be energized, and the x-direction hall element 16B, the y-direction hall element 16D, and the z-direction hall element 16F may not be energized. Alternatively, the x-direction VCM 16A, the x-direction hall element 16B, the y-direction VCM 16C, and the y-direction hall element 16D may be energized, and the z-direction VCM 16E and the z-direction hall element 16F may not be energized.

The arrangement of the terminals electrically connected to the components of the lens driving device 16 to be energized at the time of manufacture is such that the force in the y direction applied to the lens unit 10 by the pressing of the probe 113a and the lens unit by the pressing of the probe 113b. It is only necessary to be able to counteract even a little by the force in the y direction applied to.

For example, when there are two terminals to be energized, one of the two terminals is provided at a position exposed from the side surface 11e of the housing 11, and the other of the two terminals is exposed from the side surface 11f of the housing 11. The lens unit 10 provided at the position to be manufactured is manufactured. The probe unit 113 of the manufacturing apparatus 200 presses one probe 113b against the exposed surface of one of the two terminals, and places one probe 113b on the exposed surface of the other of the two terminals. Press. Even when the straight line connecting the centers of the exposed surfaces of the two terminals is not parallel to the y direction, a force in the y direction applied to the lens unit 10 by pressing the probe 113a is applied to the lens unit 10 by pressing the probe 113b. You can counteract even a little by the force of direction.

In addition, by arranging the two terminals so that the straight line connecting the centers of the exposed surfaces of the two terminals is parallel to the y direction, the moment acting on the lens unit 10 when the

probes

113a and 113b are pressed is zero. It is possible to prevent the positional deviation of the optical axis Ax.

In the probe unit 113, the probe 113 b is not electrically connected to the lens driving driver 145, or is connected to the lens driving driver 145, but is a dummy that is not supplied with electricity when the imaging module 100 is manufactured. A probe may be used.

For example, in the lens unit 10, when only the x direction VCM 16A and the y direction VCM 16C are to be energized, the probe unit 113 is configured as shown in FIG.

In the probe unit 113 shown in FIG. 15, four probes 113a are provided on the stage portion 113A, and four dummy probes 113b are provided on the stage portion 113B.

The four probes 113a are pressed against the terminal 14D, the terminal 14C, the terminal 14B, and the terminal 14A, respectively.

The uppermost probe among the four dummy probes 113b is pressed against the terminal 14g having the exposed surface center on a straight line extending in the y direction from the exposed surface center of the terminal 14D.

Of the four dummy probes 113b, the second probe from the top is pressed against the terminal 14h having the exposed surface center on a straight line extending in the y direction from the center of the exposed surface of the terminal 14C.

Of the four dummy probes 113b, the third probe from the top is pressed against the terminal 14k having the exposed surface center on a straight line extending in the y direction from the exposed surface center of the terminal 14B.

Of the four dummy probes 113b, the bottom probe is pressed against the terminal 14l having the exposed surface center on a straight line extending in the y direction from the center of the exposed surface of the terminal 14A.

In this way, the y-direction force applied to the terminal to be energized by the probe 113a is canceled by the y-direction force applied to the terminal by the dummy probe 113b that is not used for driving the lens driving device 16, thereby the lens unit. The positional deviation of the ten optical axes Ax can be prevented.

In FIG. 15, the number of dummy probes 113b provided on the stage portion 113B and the position of the dummy probes 113b are determined by the force in the y direction applied to the lens unit 10 by the pressing of the probes 113a. It only needs to be able to cancel even a little by the force in the y direction applied to the lens unit 10 by the contact, and can be changed as appropriate.

Further, although the dummy probe 113b is shown in FIG. 15, since the dummy probe 113b does not need to be electrically connected to the lens driving device 16, a member of any material and shape may be used. That is, it is not necessary to be a probe, and it may be constituted by some member that can apply a force to the terminal of the lens unit 10.

In FIG. 15, the dummy probe 113b (or other member) is pressed against the terminal provided in the lens unit 10, but the pressing portion of the dummy probe 113b may be a portion other than the terminal. For example, pressing the four dummy probes 113b against the side surface 11e of the casing 11 can also cancel the force in the y direction applied from the probe 113a to the terminal to be energized.

For example, in a manufacturing apparatus that manufactures an imaging module in which the lens unit 10 in which only the z-direction VCM 16E and the z-direction hall element 16F are mounted on the lens driving device 16 is provided, the probe unit 113 has a housing as shown in FIG. The probe 113a is pressed against each of the

terminals

14E, 14F, 14i to 14l exposed from the side surface 11f of the eleventh side.

The probe unit 113 is a dummy probe 113b with respect to the intersection of the straight line extending in the y direction from the center of the exposed surface of each terminal on the side surface 11f and the side surface 11e of the housing 11 when viewed from the optical axis Ax direction. Press down. With such a configuration, the force in the y direction applied by the probe 113a to the terminal to be energized can be canceled by the pressing force against the side surface 11e of the dummy probe 113b. As described above, the number of dummy probes 113b and the positions where they are pressed can be changed as appropriate.

According to the manufacturing apparatus 200, in order to hold the lens unit 10 by suction, means for holding the lens unit 10 (such as a holding arm in the prior art) around the side surface of the housing 11 of the lens unit 10 is provided. There is no need to place them.

As a result, a device for fixing the lens unit 10 and the image sensor unit 20 (adhesive supply unit 81,

ultraviolet lamps

83a and 83b), a device for energizing the lens unit 10 (energization mechanism 77), and the like can be freely arranged. Thus, the design cost of the manufacturing apparatus 200 can be reduced and the maintainability can be improved.

In a model in which the lens unit 10 is equipped with the second lens driving unit and the third lens driving unit like the imaging module 100, the lens group 12 is easily moved in the x direction and the y direction. In such a model, the mechanism inside the housing 11 of the lens unit 10 becomes complicated, and the rigidity of the housing 11 tends to decrease. For this reason, if the case side surface of the lens unit 10 is held by an arm by a conventional method, the inclination of the optical axis Ax is likely to occur. Accordingly, in such a model, it is effective to employ a method of holding the lens unit 10 by suction of the top surface 11a.

Further, in such a model, the number of terminals provided in the lens unit 10 is 18 at the maximum as illustrated in FIG. For this reason, there is a tendency that the number of terminals to be energized is larger than that of a model having few terminals. As the number of terminals to be energized increases, when the probe is pressed against the lens unit in one direction in the conventional method, the force applied to the lens unit 10 increases, and the position of the optical axis Ax of the lens unit 10 tends to shift. Become. In particular, in the case where there are four or more terminals to be energized on one side surface 11f as in the lens unit 10 shown in FIG. For this reason, the method described in this embodiment is effective.

In the manufacturing apparatus 200, the lens unit holding unit 75 holds the lens unit 10 by suction. However, as described in Patent Document 1, the lens unit 10 may be held by holding the side surface. Alternatively, the lens unit 10 may be held by sandwiching the top surface 11a and the bottom block 19 of the lens unit 10 with some member.

In the configuration in which the lens unit 10 is held by suction as in the manufacturing apparatus 200, since the holding is performed only by air suction as compared with holding by gripping or the like, the lens unit 10 is displaced with respect to the pressing force of the probe. Is likely to occur. For this reason, it is effective to adopt the configuration of the energization mechanism 77.

In step S4 in FIG. 14, the in-focus coordinate value is acquired by moving the image sensor unit 20 while the Z-axis direction position of the lens unit 10 is fixed. However, the lens unit holding part 75 can be moved in the Z-axis direction, the lens unit holding part 75 can be moved in the Z-axis direction while the position of the image sensor unit holding part 79 is fixed, or the lens unit holding part can be held. The coordinate position may be acquired at each measurement position by changing the measurement position by moving the unit 75 and the image sensor unit holding unit 79 in the Z-axis direction.

Further, even if the lens unit holding unit 75 and the image sensor unit holding unit 79 are fixed in the Z-axis direction position, the chart unit 71 is moved in the Z-axis direction to change the measurement position and acquire the in-focus coordinate value. Good. Further, the focus coordinate value may be acquired by changing the measurement position by changing the Z-axis direction position of each of the lens unit holding unit 75, the imaging element unit holding unit 79, and the chart unit 71.

That is, the measurement position is changed by changing the relative position in the Z-axis direction of the lens unit 10, the image sensor unit 20, and the measurement chart 89, and the measurement chart 89 is imaged by the image sensor 27 at each relative position to be focused. Any configuration that acquires coordinate values may be used.

Further, in the description of FIG. 14, a plurality of measurement positions are realized by changing the relative position, and the measurement chart is imaged when each measurement position is reached, but the measurement chart is continuously imaged. (I.e., taking a moving image), and the relative position may be changed so that each measurement position is reached during the imaging.

In step S8 in FIG. 14, the Z-axis direction position of the image sensor unit 20 relative to the lens unit 10 is adjusted by moving the image sensor unit 20 while the Z-axis direction position of the lens unit 10 is fixed. However, the lens unit holding part 75 is movable in the Z-axis direction, and the image sensor unit holding part 79 moves the lens unit holding part 75 while the position is fixed, or the lens unit holding part 75 and the image sensor unit. The position adjustment may be performed by moving each of the holding portions 79.

Further, in the process of S8 in FIG. 14, not only the position of the image sensor unit 20 with respect to the lens unit 10 in the Z-axis direction but also the inclination is adjusted, but this adjustment of the inclination may be omitted. For example, when the number of pixels of the image sensor 27 is small, the image quality can be maintained without adjusting the inclination. Further, the Z-axis direction position may be adjusted in advance by a known method, and the manufacturing apparatus 200 may adjust only the inclination.

Further, if only the position in the Z-axis direction of the image sensor unit 20 with respect to the lens unit 10 is adjusted in the process of S8 in FIG. 14, there may be at least one chart image provided on the chart surface of the measurement chart 89.

Further, in the process of S8 in FIG. 14, if the Z-axis direction position and inclination of the image sensor unit 20 with respect to the lens unit 10 are adjusted, it is sufficient that at least three chart images are provided on the chart surface of the measurement chart 89.

As described above, when four or more chart images are used, the tilt adjustment of the image sensor unit 20 with respect to the lens unit 10 can be performed with higher accuracy.

In addition, it is preferable to provide a positioning portion for matching the center of the opening 75c with the center of the opening 11b of the lens unit 10 on the suction surface 75d of the lens unit holding portion 75.

Up to this point, the top surface 11a of the housing 11 of the lens unit 10 has been described as a surface perpendicular to the optical axis Ax of the lens group 12. The term “perpendicular” does not need to be strictly vertical, and if the manufacturing apparatus has a mechanism for adjusting the tilt of the image sensor unit 20 with respect to the lens unit 10, it may be within the stroke of tilt adjustment. When there is no tilt adjustment mechanism, a deviation of about 1 ° is allowed.

As described above, the following items are disclosed in this specification.

The disclosed method of manufacturing an imaging module is a method of manufacturing an imaging module having a lens unit having a lens group, and an image sensor unit that is fixed to the lens unit and has an image sensor that images a subject through the lens group. The lens unit includes a lens driving device including a lens driving unit that moves at least a part of the lenses of the lens group, and the imaging element unit and the lens unit are on an axis orthogonal to the measurement chart. And at least one of the measurement charts, the relative position in the axial direction is changed, and at each relative position, the imaging element is driven and the imaging chart is imaged through the lens group by the imaging element. Imaging obtained by imaging the measurement chart with the imaging device A second step of adjusting at least one of the axial position and the inclination of the image sensor unit with respect to the lens unit based on the number, and fixing the image sensor unit to the lens unit, the first step Then, the lens unit is held on the shaft, the first probe is pressed against an electrical connection portion provided in the lens unit and electrically connected to the lens driving device, and the lens driving device is energized, In the state where a force in a direction opposite to the direction perpendicular to the optical axis of the lens group applied to the electrical connection portion by pressing the first probe is applied to the lens unit, the measurement chart is used by the imaging device. Is taken.

According to this method, the pressing force of the first probe for energizing the lens driving device can be canceled by the force in the direction opposite to the pressing force of the first probe, and the holding posture of the lens unit Can be maintained in a desired state. As a result, the lens unit and the image sensor unit can be accurately aligned.

In the disclosed method for manufacturing an imaging module, the housing of the lens unit has two surfaces facing each other across the optical axis of the lens group, and the electrical connection portion is exposed from each of the two surfaces. In the first step, the lens unit is held on the shaft, and the first probe is pressed against the electrical connection portion exposed from one of the two surfaces to drive the lens. The measurement chart is displayed by the imaging element in a state where the second probe is pressed against the electrical connection portion exposed from the other surface of the two surfaces and the lens driving device is energized. The image is taken.

According to this method, the pressing force of the first probe for energizing the lens driving unit can be offset by the pressing force of the second probe for energizing the lens driving unit. The holding posture can be maintained in a desired state. As a result, the lens unit and the image sensor unit can be accurately aligned.

In the disclosed imaging module manufacturing method, in the first step, four or more first probes are pressed against the electrical connection portion exposed from one of the two surfaces.

When four or more first probes are pressed against the electrical connection portion, the pressing force increases, so it is particularly effective to apply the force in the opposite direction to the lens unit.

In the disclosed imaging module manufacturing method, the lens unit includes a housing that houses the lens group and has a surface on the subject side that is perpendicular to the optical axis of the lens group. Air is sucked from a suction hole provided in the suction surface of the suction head having a suction surface perpendicular to the suction head, and the surface of the housing is sucked by the suction surface to hold the lens unit.

According to this method, the surface of the lens unit housing on the subject side is attracted by the suction head and the lens unit is held, so that the optical axis of the lens group in the lens unit is relative to the axis orthogonal to the measurement chart. It is possible to prevent the camera from tilting, and it is possible to accurately determine the position of the lens unit when aligning the imaging element unit and the lens unit, thereby improving the imaging quality.

In addition, according to this method, it is not necessary to arrange a means for holding the lens unit around the side surface of the housing of the lens unit, so that it is easy to secure a space around the lens unit. As a result, for example, an apparatus for fixing the lens unit and the image pickup element unit, an apparatus for energizing the lens unit, and the like can be easily arranged, and the design cost of the manufacturing apparatus can be reduced and the maintainability can be improved. be able to.

In this method, the lens unit is attracted and held on the surface of the lens unit housing on the subject side, and thus the tilt of the housing is likely to occur when the first probe is applied. It is particularly effective to apply a directional force.

According to the disclosed imaging module manufacturing method, in the second step, one of the lens units divided into two by a straight line passing through the optical axis of the lens group and orthogonal to the optical axis when viewed in the axial direction. Light is irradiated from each of the divided area side and the other divided area side, the photocurable adhesive supplied to the gap between the lens unit and the imaging element unit is cured, and the lens unit and the imaging element unit are It is to be fixed.

According to this method, since light is irradiated from at least two directions between the lens unit and the image sensor unit, it is possible to uniformly cure the applied adhesive throughout the module, and the lens unit and the image sensor unit. Can be stably fixed. In this method, it is necessary to arrange at least two light sources around the side surface of the housing of the lens unit. However, since the top surface of the object side is held by suction, the lens unit is held by the housing of the lens unit. This light source or the like can be easily arranged around the side of the body.

In the disclosed method for manufacturing an imaging module, the lens driving device includes a first lens driving unit that moves at least a part of the lenses in the first direction along the optical axis of the lens group; A second lens driving unit and a third lens driving unit for moving at least some of the lenses in a second direction and a third direction orthogonal to the optical axis of the lens group, respectively; It is.

If such a lens unit is used, the number of lens drive parts to be energized increases and the number of electrical connection parts to which the probe is applied increases. As a result, the inclination of the lens unit due to contact with the probe is likely to occur, and it is particularly effective to apply a force in the direction opposite to the one direction to the lens unit.

The disclosed method for manufacturing an imaging module includes a method in which the pixel pitch of the imaging element is 1.0 μm or less.

When the pixel pitch of the image sensor is 1.0 μm or less, since alignment accuracy is particularly required, it is particularly effective to apply a force in a direction opposite to the one direction to the lens unit.

The disclosed imaging module manufacturing apparatus includes a measurement chart installation unit for installing a measurement chart, and a subject through a lens unit having a lens group on an axis orthogonal to the measurement chart installed in the measurement chart installation unit. An image sensor unit holding unit for holding an image sensor unit having an image sensor for imaging, and a lens unit for holding the lens unit on the axis between the measurement chart setting unit and the image sensor unit holding unit. A lens unit holding portion; a probe pressing portion that presses the first probe against the lens unit held by the lens unit holding portion; and the first probe is pressed against the lens unit by the probe pressing portion. In a direction perpendicular to the optical axis of the lens group applied to the lens unit At least one of a member pressing portion that applies a force in the opposite direction to the lens unit by pressing the member against the lens unit, the measurement chart setting portion, the lens unit holding portion, and the imaging element unit holding portion. A control unit that changes the relative position in the axial direction, drives the image sensor of the image sensor unit at each relative position, and images the measurement chart through the lens unit by the image sensor; and the image sensor An adjustment unit that adjusts at least one of the axial position and inclination of the image sensor unit with respect to the lens unit based on an image signal obtained by imaging the measurement chart, and the image sensor that has been adjusted by the adjustment unit A unit fixing portion for fixing the unit to the lens unit.

According to this configuration, the pressing force of the first probe for energizing the lens driving device can be offset by a force in the direction opposite to the pressing force of the first probe, and the holding posture of the lens unit Can be maintained in a desired state. As a result, the lens unit and the image sensor unit can be accurately aligned.

In the disclosed imaging module manufacturing apparatus, the probe pressing portion is one of two surfaces facing each other across the optical axis of the lens group in the lens unit housing held by the lens unit holding portion. The first probe is pressed against the electrical connection portion exposed from the surface, and the member pressing portion is a second member as the member with respect to the electrical connection portion exposed from the other surface of the two surfaces. The probe is pressed against it.

According to this configuration, the pressing force of the first probe for energizing the lens driving unit can be canceled by the pressing force of the second probe, and the holding posture of the lens unit is maintained in a desired state. can do. As a result, the lens unit and the image sensor unit can be accurately aligned.

The disclosed imaging module manufacturing apparatus is configured such that the first probe and the second probe are in contact with the lens unit, the contact point between the lens unit and the first probe, the lens unit, and the lens unit. A plane including a contact point with the second probe is perpendicular to the optical axis.

According to this configuration, the pressing force of the first probe for energizing the lens driving unit can be surely offset by the pressing force of the second probe.

The disclosed imaging module manufacturing apparatus includes the same number of the first probe and the second probe, and the optical axis in a state where the first probe and the second probe are in contact with the lens unit. A pair of contact points between the lens unit and one first probe and a contact point between the lens unit and one second probe are arranged on a straight line extending in a direction perpendicular to A plurality are arranged in a direction orthogonal to the straight line.

In the disclosed imaging module manufacturing apparatus, the probe pressing unit includes four or more first probes.

When four or more first probes are pressed against the lens unit, the pressing force increases, so it is particularly effective to apply a force in the opposite direction to the lens unit.

In the disclosed imaging module manufacturing apparatus, the lens unit holding portion includes a suction head having a suction surface orthogonal to the axis, a suction hole formed in the suction surface, and suction for sucking air from the suction hole. The surface of the housing of the lens unit that has a surface perpendicular to the optical axis of the lens group on the subject side, in which air is sucked from the suction hole by the suction portion, and the lens group is accommodated Is held by the suction surface to hold the lens unit on the shaft.

In the disclosed imaging module manufacturing apparatus, the unit fixing portion is divided into two when the lens unit is divided into two by a straight line passing through the optical axis of the lens group and orthogonal to the optical axis when viewed in the axial direction. A light source that is disposed on each of the divided area side and the other divided area side, irradiates light to the gap between the lens unit and the imaging element unit, and cures the photocurable adhesive supplied to the gap. Is included.

The method for manufacturing an imaging module according to the present invention is particularly effective when applied to the manufacture of an imaging module mounted on an electronic device such as a mobile phone, a spectacle-type electronic device, or a wristwatch-type electronic device.

As mentioned above, although this invention was demonstrated by specific embodiment, this invention is not limited to this embodiment, A various change is possible in the range which does not deviate from the technical idea of the disclosed invention.
This application is based on a Japanese patent application filed on October 22, 2013 (Japanese Patent Application No. 2013-219244), the contents of which are incorporated herein.

DESCRIPTION OF SYMBOLS 100 Imaging module 10 Lens unit 11 Housing | casing

11a Top surface

11c, 11d, 11e, 11f of housing | casing Side surface 12 Lens group 13 Flexible board 14A-14F, 14a-14l Lens unit terminal part 16 Lens drive device 16A X direction VCM
16B x direction hall element 16C y direction VCM
16D y-direction Hall element 16E z-direction VCM
16F z-direction Hall element 20 Image sensor unit 21 Substrate 22 Flexible substrate 23 External connection terminal unit 24 Image sensor unit terminal unit 27 Image sensor 200 Imaging module manufacturing apparatus 71 Chart unit 89 Measurement chart 75 Lens unit holding unit

75a Suction head

75b Suction Hole 75c Opening

75d Suction surface

75e Suction part 81

Adhesive supply part

83a, 83b Ultraviolet lamp 79 Imaging element unit holding part 85 Control part 113

Probe unit

113a, 113b Probe Ax Optical axis z A direction along the optical axis xz direction orthogonal to the optical axis Direction yz direction orthogonal to z direction

Claims

A method of manufacturing an imaging module, comprising: a lens unit having a lens group; and an imaging element unit having an imaging element fixed to the lens unit and imaging a subject through the lens group,
The lens unit includes a lens driving device including a lens driving unit that moves at least some of the lenses in the lens group,
On the axis orthogonal to the measurement chart, the relative position in the axial direction of at least one of the image sensor unit, the lens unit, and the measurement chart is changed, and the image sensor is driven at each relative position. A first step of imaging the measurement chart through the lens group by the imaging element;
Based on an imaging signal obtained by imaging the measurement chart with the imaging device, at least one of the axial position and the inclination of the imaging device unit with respect to the lens unit is adjusted, and the imaging device unit is used as the lens unit. A second step of fixing,
In the first step, the lens unit is held on the shaft, and the first probe is pressed against an electrical connection portion provided in the lens unit and electrically connected to the lens driving device. In the state where a force in a direction opposite to the direction perpendicular to the optical axis of the lens group applied to the electrical connection portion by pressing the first probe is applied to the lens unit, the imaging element The manufacturing method of the imaging module which images the said measurement chart.
A method for manufacturing an imaging module according to claim 1,
The housing of the lens unit has two surfaces facing each other across the optical axis of the lens group,
The electrical connection is exposed from each of the two surfaces,
In the first step, the lens unit is held on the shaft, and the first probe is pressed against the electrical connection portion exposed from one of the two surfaces to energize the lens driving device. And imaging the measurement chart by the imaging element in a state where the second probe is pressed against the electrical connection portion exposed from the other surface of the two surfaces and the lens driving device is energized. Module manufacturing method.
A method of manufacturing an imaging module according to claim 2,
In the first step, an imaging module manufacturing method in which four or more first probes are pressed against the electrical connection portion exposed from one surface of the two surfaces.
A method for manufacturing an imaging module according to any one of claims 1 to 3,
The lens unit includes a housing that houses the lens group and has a surface on the subject side that is perpendicular to the optical axis of the lens group,
In the first step, air is sucked from a suction hole provided in the suction surface of the suction head having a suction surface perpendicular to the axis, and the surface of the housing is sucked to the suction surface, thereby the lens. Manufacturing method of imaging module holding unit.
A method for manufacturing an imaging module according to claim 4,
In the second step, when the lens unit is divided into two by a straight line that passes through the optical axis of the lens group and is orthogonal to the optical axis when viewed in the axial direction, the one division area side and the other division area side A method of manufacturing an imaging module that irradiates light from each of them, cures a photocurable adhesive supplied to a gap between the lens unit and the imaging element unit, and fixes the lens unit and the imaging element unit.
A method for manufacturing an imaging module according to any one of claims 1 to 5,
The lens driving device includes: a first lens driving unit that moves at least a part of the lenses in a first direction along an optical axis of the lens group; and at least a part of the lenses in the lens group. A method of manufacturing an imaging module having a second lens driving unit and a third lens driving unit that move the lens in a second direction and a third direction orthogonal to the optical axis of the lens group.
A method for manufacturing an imaging module according to any one of claims 1 to 6,
The manufacturing method of the imaging module whose pixel pitch of the said imaging device is 1.0 micrometer or less.
A measurement chart setting part for setting a measurement chart;
An image sensor unit holding unit for holding an image sensor unit having an image sensor that images a subject through a lens unit having a lens group on an axis orthogonal to the measurement chart installed in the measurement chart installation unit;
A lens unit holding unit for holding the lens unit on the axis between the measurement chart setting unit and the imaging element unit holding unit;
A probe pressing unit that presses the first probe against the lens unit held by the lens unit holding unit;
A force in the direction opposite to the direction perpendicular to the optical axis of the lens group applied to the lens unit in a state in which the first probe is pressed against the lens unit by the probe pressing unit is applied to the lens unit. A member pressing part that presses and adds a member;
The relative position in the axial direction of at least one of the measurement chart setting unit, the lens unit holding unit, and the image sensor unit holding unit is changed, and the image sensor of the image sensor unit is changed at each relative position. A controller that drives and images the measurement chart through the lens unit by the imaging element;
An adjustment unit that adjusts at least one of the axial position and the inclination of the imaging element unit with respect to the lens unit based on an imaging signal obtained by imaging the measurement chart by the imaging element;
An apparatus for manufacturing an imaging module, comprising: a unit fixing unit that fixes the imaging device unit adjusted by the adjustment unit to the lens unit.
An apparatus for manufacturing an imaging module according to claim 8,
The probe pressing portion is connected to an electrical connection portion exposed from one surface of two surfaces facing each other across the optical axis of the lens group in the lens unit housing held by the lens unit holding portion. Pressing the first probe;
The said member pressing part is a manufacturing apparatus of the imaging module which presses the 2nd probe as said member with respect to the electrical-connection part exposed from the other surface of said two surfaces.
An imaging module manufacturing apparatus according to claim 9,
In the state where the first probe and the second probe are in contact with the lens unit, the contact point between the lens unit and the first probe and the contact point between the lens unit and the second probe are included. An imaging module manufacturing apparatus in which a plane is perpendicular to the optical axis.
An imaging module manufacturing apparatus according to claim 9 or 10,
There are the same number of the first probe and the second probe,
In a state where the first probe and the second probe are in contact with the lens unit, a contact point between the lens unit and one of the first probes on a straight line extending in a direction perpendicular to the optical axis; An imaging module manufacturing apparatus in which a pair of contact points between the lens unit and one second probe is arranged, and a plurality of the pairs are arranged in a direction orthogonal to the straight line.
An imaging module manufacturing apparatus according to any one of claims 8 to 11,
The probe pressing unit is an imaging module manufacturing apparatus having four or more first probes.
An imaging module manufacturing apparatus according to any one of claims 8 to 12,
The lens unit holding unit includes a suction head having a suction surface orthogonal to the axis, a suction hole formed in the suction surface, and a suction unit for sucking air from the suction hole, and the suction unit Air is sucked from the suction hole, the lens group housing is accommodated and the surface of the lens unit housing having a surface perpendicular to the optical axis of the lens group on the subject side is adsorbed to the adsorption surface, and the lens An imaging module manufacturing apparatus for holding a unit on the shaft.
An imaging module manufacturing apparatus according to claim 13,
The unit fixing portion is provided on one divided area side and the other divided area side when the lens unit is divided into two by a straight line that passes through the optical axis of the lens group and is orthogonal to the optical axis when viewed in the axial direction. An imaging module manufacturing apparatus including a light source that is disposed in each of the light sources and that irradiates light to a gap between the lens unit and the imaging element unit to cure a photocurable adhesive supplied to the gap.