JP2010032405A - Substrate fixing mechanism and substrate fixing method by this - Google Patents

Substrate fixing mechanism and substrate fixing method by this Download PDF

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JP2010032405A
JP2010032405A JP2008195890A JP2008195890A JP2010032405A JP 2010032405 A JP2010032405 A JP 2010032405A JP 2008195890 A JP2008195890 A JP 2008195890A JP 2008195890 A JP2008195890 A JP 2008195890A JP 2010032405 A JP2010032405 A JP 2010032405A
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substrate
chuck
clamp piece
chucks
adjacent sides
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JP5129681B2 (en
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Makoto Shimizu
誠 清水
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Hioki EE Corp
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Hioki EE Corp
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<P>PROBLEM TO BE SOLVED: To provide a substrate fixing mechanism which enables reduction of the price of equipment, since it dispenses with a supporting base, while being capable of corresponding to substrates of different sizes, and a substrate fixing method which enables shortening of time for fixing and also prolongation of the service life. <P>SOLUTION: The substrate fixing mechanism is equipped with a chuck 2 having contact walls 11 and support pawls 12, a chuck 3 having setting pawls 13, a clamp piece 4 which is driven to move back and forth on the chuck 3 by a pneumatic cylinder 6 and a tension spring 7 so as to press and fix the substrate 20, and a threaded rod 5 which is screwed in and inserted through arm parts 2a and 3a of the chucks 2 and 3 and has screwing portions 5a and 5b of which the screws are formed in reverse directions to each other. As for the substrate fixing method, the substrate 20 is lowered to a position where the underside thereof is located between the upper and lower ends of the contact walls 11, and is held in a state of being lifted from the pawls 12 and 13, by being pressed by the clamp piece 4. Then the substrate is released from suction and made to fall onto the pawls 12 and 13 by moving the clamp piece 4 backward and is fixed by pressing by the clamp piece 4. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、基板の検査装置や基板の移動装置などにおいて、基板を挟持固定するための基板固定機構およびこの機構による基板固定方法に関するものである。   The present invention relates to a substrate fixing mechanism for sandwiching and fixing a substrate in a substrate inspection apparatus, a substrate moving apparatus, and the like, and a substrate fixing method using this mechanism.

プリント配線された基板やこれに部品実装された基板を検査する基板検査装置では、基板をあらかじめ位置固定する必要がある。このような基板固定機構が、例えば特許文献1に記載されている。この特許文献1に記載された被検査基板の位置固定機構には、基台上に一側チャック部と他側チャック部とが相互に近接方向に付勢されて配設され、被検査基板を挟み込んで固定している。   In a board inspection apparatus for inspecting a printed wiring board or a board mounted with components, it is necessary to fix the position of the board in advance. Such a substrate fixing mechanism is described in Patent Document 1, for example. In the position fixing mechanism for a substrate to be inspected described in Patent Document 1, a chuck on one side and a chuck on the other side are urged toward each other on a base, and the substrate to be inspected is arranged. It is pinched and fixed.

この両チャック部には、基板の対向2角を密着支持するコーナー支持片が各々配設されている。この各コーナー支持片には、基板の2辺を下支えする幅狭な庇状に突出した受け部が形成されている。   Each of the chuck portions is provided with a corner support piece for tightly supporting the opposite two corners of the substrate. Each corner support piece is formed with a receiving portion protruding in a narrow bowl shape that supports two sides of the substrate.

このように構成することで、基板のサイズが変更されても固定可能で、しかもサイズによらず基板の中心位置を一定に固定可能にしている。   With this configuration, the substrate can be fixed even when the size of the substrate is changed, and the center position of the substrate can be fixed regardless of the size.

このような基板固定機構で基板を固定する固定方法としては、一例として、両チャック部の間に、基台の下方から補助台を迫り上げる。そこに基板を真空吸着した基板吸着装置が上方から基板を下降させて、真空を大気開放して基板を載置する。この補助台上の基板を、両チャックのコーナー支持片が挟み込んで固定する。   As an example of a fixing method for fixing a substrate with such a substrate fixing mechanism, an auxiliary base is pushed up from below the base between both chuck portions. A substrate suction device that vacuum-sucks the substrate there lowers the substrate from above and opens the vacuum to the atmosphere to place the substrate. The corner support pieces of both chucks are sandwiched and fixed on the substrate on the auxiliary table.

ところが、コーナー支持片には、基板を下支えする庇状の受け部が形成されていることから、この受け部と基板との衝突を防止するため、補助台をこの受け部よりも若干高く迫り上げる必要がある。そのため、受け部によって基板は下支えされていない状態でコーナー支持片によって挟持される。   However, since the corner support piece is formed with a bowl-shaped receiving portion that supports the substrate, the auxiliary base is pushed up slightly higher than the receiving portion in order to prevent a collision between the receiving portion and the substrate. There is a need. Therefore, the substrate is held by the corner support pieces in a state where the substrate is not supported by the receiving portion.

受け部によって基板が下支えされるために、つまり、受け部に基板が密着するために、一例として、基板吸着装置などで上方から基板を押すことで、受け部まで押し下げることが行われている。   In order to support the substrate by the receiving portion, that is, in order for the substrate to be in close contact with the receiving portion, as an example, the substrate is pushed down from above with a substrate suction device or the like, and pushed down to the receiving portion.

特開2006−30049号公報JP 2006-30049 A

このように、従来の基板固定機構を用いるためには、基板の補助台が必要である。また、補助台を上下動させるための工程や、基板を受け部まで押し下げる工程が必要になる。さらに、基板を受け部まで押し下げることから、基板との摩擦で固定機構が摩耗するといった課題もある。   Thus, in order to use the conventional board | substrate fixing mechanism, the auxiliary | assistant base of a board | substrate is required. Further, a process for moving the auxiliary table up and down and a process for pushing the substrate down to the receiving part are required. Furthermore, since the substrate is pushed down to the receiving portion, there is a problem that the fixing mechanism is worn by friction with the substrate.

本発明はこれらの課題を解決するためになされたもので、サイズの異なる基板に対応可能でありながら、基板の補助台が不要であるため、装置価格を低減できると共に基板の固定に要する時間を短縮し得る基板固定機構を提供することを目的とする。また、この基板固定機構を用いて、基板の固定に要する時間を短縮化でき、さらに、使用耐用期間を長期化し得る基板固定方法を提供することを目的とする。   The present invention has been made in order to solve these problems, and can support substrates of different sizes, but does not require an auxiliary board for the substrate, so that the cost of the apparatus can be reduced and the time required for fixing the substrate can be reduced. It is an object to provide a substrate fixing mechanism that can be shortened. It is another object of the present invention to provide a substrate fixing method capable of shortening the time required for fixing a substrate by using this substrate fixing mechanism and further extending the service life.

前記の目的を達成するためになされた、特許請求の範囲の請求項1に記載された基板固定機構は、平板状の基板の隣接2辺に当接する当接壁および該隣接2辺を下支えする支持爪を有する一方のチャックと、該基板の他の隣接2辺を下支えする載置爪を有する他方のチャックと、該他方のチャック上に該基板方向に進退自在に配置されると共に駆動手段によってその進退を駆動され、該他の隣接2辺に当接して該基板を押圧固定するクランプ片と、該両チャックの各々に孔開け形成された雌ねじに螺合挿通されると共に、該両チャックの各々に螺合する部分の雄ねじの螺旋方向が互いに逆方向に形成されて該雄ねじの回転で該両チャックを移動させるねじロッドと、を備えることを特徴とする。   The substrate fixing mechanism according to claim 1, which has been made to achieve the above object, supports a contact wall that contacts two adjacent sides of a flat substrate and the two adjacent sides. One chuck having a support claw, the other chuck having a mounting claw for supporting the other two adjacent sides of the substrate, and a drive means that is disposed on the other chuck so as to be capable of moving forward and backward. The advancement and retraction are driven, and the clamp piece that presses and fixes the substrate in contact with the other two adjacent sides and the female screw formed in each of the chucks are screwed and inserted. And a screw rod that is formed in opposite directions to each other and screwed to move both chucks by rotation of the male screw.

請求項2に記載された基板固定方法は、平板状の基板の隣接2辺に当接する当接壁および該隣接2辺を下支えする支持爪を有する一方のチャック、および、該基板の他の隣接2辺を下支えする載置爪を有する他方のチャック、の該両爪の上空で、該基板の下面が該当接壁の上端よりも低く、該当接壁の下端よりも高い位置まで、基板吸着装置で吸着した該基板を下降し、該他方のチャック上に該基板方向に進退自在に配置されたクランプ片で該他の隣接2辺を押圧して該クランプ片と該当接壁との間で該両爪から浮いた状態で該基板を挟持し、該基板吸着装置が該基板を解放し、該クランプ片を該当接壁の逆方向に移動させて、該基板を該支持爪および該載置爪上に落下させ、該クランプ片で他の隣接2辺を押圧して、該当接壁との間で該基板を固定することを特徴とする。   According to a second aspect of the present invention, there is provided a substrate fixing method comprising: one chuck having an abutting wall that abuts two adjacent sides of a flat substrate and a support claw that supports the two adjacent sides; The substrate suction device up to the position of the lower surface of the substrate lower than the upper end of the corresponding contact wall and higher than the lower end of the corresponding contact wall above both the claws of the other chuck having the mounting claws supporting the two sides. The substrate adsorbed by the lowering is lowered, and the other adjacent two sides are pressed by a clamp piece which is disposed on the other chuck so as to be able to advance and retreat in the direction of the substrate. The substrate is held in a state where it is lifted from both claws, the substrate suction device releases the substrate, the clamp piece is moved in the opposite direction of the corresponding wall, and the substrate is moved to the support claw and the mounting claw. Drop it on the top and press the other two adjacent sides with the clamp piece. Characterized by fixing the.

請求項3に記載された基板固定方法は、請求項2に記載の基板固定方法であって、前記基板吸着装置で前記基板を下降させる前の準備調整として、前記両チャックの各々に孔開け形成された雌ねじに螺合挿通されると共に、該両チャックの各々に螺合する部分の雄ねじの螺旋方向が互いに逆方向に形成されたねじロッドを、軸周りに回転させ、前記両チャックの間隔を、前記両爪で該基板を支持可能な間隔に調整することを特徴とする。   The substrate fixing method according to claim 3 is the substrate fixing method according to claim 2, wherein a hole is formed in each of the chucks as a preparation adjustment before the substrate is lowered by the substrate suction device. A screw rod that is threaded into and inserted into the female screw and is formed in a direction opposite to the spiral direction of the male screw of the portion to be screwed into each of the chucks is rotated around the axis, and the interval between the chucks is increased. The spacing between the two claws is such that the substrate can be supported.

本発明の基板固定機構によれば、上記のように構成したことにより、サイズの異なる基板に対応可能であり、従来の固定機構を用いるために必要であった下部側から上昇させて基板を支持する補助台が不要になる。このため、補助台およびその駆動機構のコストを削減することができ、装置価格を低減することができる。また、この補助台を上下移動させるための時間が不要であるので、基板を固定するための時間を短縮することができる。   According to the substrate fixing mechanism of the present invention, it is possible to cope with substrates of different sizes by configuring as described above, and the substrate is supported by raising from the lower side, which was necessary for using the conventional fixing mechanism. No need for an auxiliary stand to perform. For this reason, the cost of an auxiliary stand and its drive mechanism can be reduced, and an apparatus price can be reduced. In addition, since the time for moving the auxiliary base up and down is unnecessary, the time for fixing the substrate can be shortened.

本発明の基板固定方法によれば、従来の固定機構で基板を固定する際のように基板を固定状態で下支えする爪まで押し込む工程が、不要になる。このため、基板を固定するための時間を短縮することができる。さらに、当接壁やクランプ片の摩耗が防止されるため、機器の使用耐用期間を長期化することができる。   According to the substrate fixing method of the present invention, the step of pushing the substrate to the nail that supports the substrate in a fixed state as in the case of fixing the substrate by the conventional fixing mechanism becomes unnecessary. For this reason, the time for fixing a board | substrate can be shortened. Furthermore, since wear of the abutting wall and the clamp piece is prevented, the service life of the device can be extended.

また、本発明の基板固定方法によれば、サイズの異なる基板に対応可能であり、同種の多数の基板を順次固定する場合には、サイズに合わせるための予備調整を最初に行うだけでよい。   In addition, according to the substrate fixing method of the present invention, it is possible to deal with substrates of different sizes, and when a large number of substrates of the same type are sequentially fixed, it is only necessary to first perform preliminary adjustment to match the size.

発明を実施するための好ましい形態Preferred form for carrying out the invention

以下、本発明の実施例を詳細に説明するが、本発明の範囲はこれらの実施例に限定されるものではない。   Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.

図1には、本発明の基板固定機構の上部から観察した概要図が示されている。図2には、図1のA−A断面図が示されている。また、図2では、図2(a)〜図2(e)に基板固定機構の使用状態が図示されている。なお、図2では、発明の理解を容易にするために、発明の要部を誇張して図示されている。   FIG. 1 is a schematic view of the substrate fixing mechanism according to the present invention observed from above. FIG. 2 is a cross-sectional view taken along the line AA in FIG. Further, in FIG. 2, the use state of the substrate fixing mechanism is shown in FIGS. 2 (a) to 2 (e). In FIG. 2, the main parts of the invention are exaggerated for easy understanding of the invention.

図1に示されるように、基板固定機構1は、チャック2、チャック3、クランプ片4、および、ねじロッド5を備え、これらが非図示の基台上に配置されて基板20を挟持固定する。この固定対象となる基板20は、一例として、電気部品の実装されるプリント配線基板であって、平板状の正方形状に形成されている。   As shown in FIG. 1, the substrate fixing mechanism 1 includes a chuck 2, a chuck 3, a clamp piece 4, and a screw rod 5, which are arranged on a base (not shown) to clamp and fix the substrate 20. . As an example, the board 20 to be fixed is a printed wiring board on which electrical components are mounted, and is formed in a flat square shape.

チャック2は、本発明における一方のチャックの一例であって、基板20の隣接2辺20aに当接する当接壁11およびこの隣接2辺20aを下支えする支持爪12を有して形成されている。   The chuck 2 is an example of one chuck according to the present invention, and is formed having a contact wall 11 that contacts two adjacent sides 20a of the substrate 20 and a support claw 12 that supports the two adjacent sides 20a. .

具体的には、チャック2は、所要に板厚の樹脂で形成されて、その基板20側(図の左側)は、直角V字状に開口してその開口端面に、当接壁11が形成されている。さらにこの開口部のV字頂部は、略U字状に切り欠かれている。したがって、当接壁11は、V字開口部のV字対辺に分離して形成されて、隣接2辺20aの各々の辺の一部に当接可能に形成されている。当接壁11は、図2に示されるように、基板20の板厚と略同じ高さで垂直に形成されている。   Specifically, the chuck 2 is made of a resin having a required thickness, and the substrate 20 side (the left side in the figure) is opened in a right-angled V shape, and the contact wall 11 is formed on the opening end surface. Has been. Furthermore, the V-shaped top of the opening is cut out in a substantially U shape. Therefore, the contact wall 11 is formed so as to be separated into the V-shaped opposite sides of the V-shaped opening, and is formed so as to be able to contact a part of each of the adjacent two sides 20a. As shown in FIG. 2, the abutting wall 11 is formed vertically with substantially the same height as the thickness of the substrate 20.

また、図1,図2(a)に示されるように、当接壁11の下側には、幅狭で庇状に突出すると共にその上面が平端な支持爪12が形成されている。   As shown in FIGS. 1 and 2A, a support claw 12 having a narrow width and protruding like a bowl and having a flat top surface is formed below the contact wall 11.

チャック3は、本発明における他方のチャックの一例であって、基板20の他の隣接2辺20bを下支えする載置爪13を有して形成されている。   The chuck 3 is an example of the other chuck according to the present invention, and is formed with a mounting claw 13 that supports the other two adjacent sides 20b of the substrate 20.

具体的には、チャック3は、所要の板厚の樹脂で形成されて、その基板20側(図1の右側)は、直角V字状に開口して、この開口部のV字頂部は、略U字状に切り欠かれている。このV字開口部のV字対辺に分離して、図1,図2(a)に示されるように、その上面が平坦な載置爪13形成されて、隣接2辺20bの各々の辺の一部を下支え可能に形成されている。   Specifically, the chuck 3 is formed of a resin having a required plate thickness, and the substrate 20 side (the right side in FIG. 1) is opened in a right-angled V-shape. It is cut out in a substantially U shape. As shown in FIGS. 1 and 2 (a), the top surface of the V-shaped opening is separated into a V-shaped opposite side, and a flat mounting claw 13 is formed on each side of the adjacent two sides 20b. It is formed so that a part can be supported.

図2(a)に示されるように、支持爪12の上面と載置爪13の上面とは、水平な同一面を構成するように、チャック2,3は非図示の基台上に配置されている。また、図1に示されるように、チャック2,3は、互いの開口部が常に正方形の辺の一部を形成するように、基台上に進退自在に配置されている。   As shown in FIG. 2A, the chucks 2 and 3 are arranged on a base (not shown) so that the upper surface of the support claw 12 and the upper surface of the mounting claw 13 constitute the same horizontal surface. ing. As shown in FIG. 1, the chucks 2 and 3 are disposed on the base so as to freely advance and retract so that the openings of each other always form a part of a square side.

クランプ片4は、図1に示されるように、チャック3の上に基板20方向に進退自在に配置され、駆動手段の一例である空気圧シリンダ6および引っ張りばね7によってその進退を駆動されて基板20の隣接2辺20bに当接して基板20を押圧固定する。   As shown in FIG. 1, the clamp piece 4 is disposed on the chuck 3 so as to be able to advance and retract in the direction of the substrate 20. The clamp piece 4 is driven to advance and retract by a pneumatic cylinder 6 and a tension spring 7 as an example of a driving unit. The substrate 20 is pressed and fixed in contact with two adjacent sides 20b.

具体的には、クランプ片4は、基板20の板厚と略同じ厚さの樹脂で形成されて、その基板20側(図の右側)は、チャック3とほぼ同一の開口部形状に形成されている。このクランプ片4は、その全体形状がチャック3よりも小さく形成されて、チャック3上のレール(非図示)に嵌められて、その開口部形状とチャック3の開口部形状とが常に同一方向に開口して進退可能に配置されている。   Specifically, the clamp piece 4 is formed of a resin having a thickness substantially the same as the thickness of the substrate 20, and the substrate 20 side (the right side in the figure) is formed in an opening shape substantially the same as the chuck 3. ing. The overall shape of the clamp piece 4 is smaller than that of the chuck 3 and is fitted to a rail (not shown) on the chuck 3 so that the shape of the opening and the shape of the opening of the chuck 3 are always in the same direction. It is arranged to be openable and retractable.

空気圧シリンダ6は、圧縮空気の供給でピストンが押し出されるものであり、このピストンがクランプ片4に固定されている。また、クランプ片4には、引っ張りばね7がチャック3との間に架け渡されている。   In the pneumatic cylinder 6, a piston is pushed out by supplying compressed air, and the piston is fixed to the clamp piece 4. Further, a tension spring 7 is spanned between the clamp piece 4 and the chuck 3.

ねじロッド5は、金属性の円柱棒体に雄ねじが形成されて、両チャック2,3の各々に孔開け形成された雌ねじに螺合挿通されると共に、両チャック2,3の各々に螺合する部分の雄ねじの螺旋方向が逆方向に形成されている。つまり、ねじロッド5の螺合挿通される両チャック2,3の雌ねじの螺旋方向も逆方向に形成されている。   The threaded rod 5 has a male cylindrical rod formed with a male thread, and is threaded through a female thread formed in each of the chucks 2 and 3 and is threaded into each of the chucks 2 and 3. The spiral direction of the male screw of the part to be formed is formed in the opposite direction. That is, the spiral direction of the internal thread of both chucks 2, 3 through which the threaded rod 5 is screwed is also formed in the opposite direction.

具体的には、チャック2,3には、各々雌ねじのねじ孔が貫通形成された腕部2a,3aが形成されている。腕部2a,3aの雌ねじの螺旋方向は互いに逆方向に形成されている。この腕部2a,3aは、ねじロッド5が挿通されても、ねじロッド5が基板20に干渉しない位置に形成されている。ねじロッド5は、腕部2aの雌ねじに螺合される螺合部分5aの雄ねじと、腕部3aの雌ねじに螺合される螺合部分5bの雄ねじとの螺旋方向が互いに逆方向に形成されている。なお、雌ねじ、雄ねじのピッチは全て同じに形成されている。   More specifically, the chucks 2 and 3 are formed with arm portions 2a and 3a, respectively, through which female screw holes are formed. The spiral directions of the female threads of the arms 2a and 3a are formed in opposite directions. The arm portions 2 a and 3 a are formed at positions where the screw rod 5 does not interfere with the substrate 20 even when the screw rod 5 is inserted. The screw rod 5 is formed so that the spiral directions of the male screw of the screwing portion 5a screwed to the female screw of the arm portion 2a and the male screw of the screwing portion 5b screwed to the female screw of the arm portion 3a are opposite to each other. ing. The pitches of the female screw and the male screw are all the same.

また、ねじロッド5には、その軸周り方向に正反転可能な回転手段(非図示)が付されている。この回転手段は、手動式の回転ハンドルや回転量制御可能な電気モータを例示できる。   Further, the screw rod 5 is provided with a rotating means (not shown) capable of reversing in the direction around the axis. Examples of the rotating means include a manual rotating handle and an electric motor capable of controlling the amount of rotation.

次に、この基板固定機構による本発明の基板固定方法を説明する。   Next, the substrate fixing method of the present invention using this substrate fixing mechanism will be described.

一例として、基板20を検査装置で検査するために、基板固定機構1で基板20を固定する場合についての動作を説明する。   As an example, an operation in the case where the substrate 20 is fixed by the substrate fixing mechanism 1 in order to inspect the substrate 20 by the inspection apparatus will be described.

先ず、基板検査を行う前の準備調整として、図1に示されるように、ねじロッド5を回転手段によって回転させ、両チャック2,3の間隔を、両爪12,13で基板20を支持可能な所要の間隔に調整する。この所要の間隔とは、基板20の隣接2辺20aがチャック2の当接壁11に当接した状態で、他の隣接2辺20bの基板下面縁が支持爪12の幅と同じ狭幅で載置爪13によって支持される間隔である。   First, as shown in FIG. 1, as a preparatory adjustment before the substrate inspection, the screw rod 5 is rotated by rotating means, and the substrate 20 can be supported by the claws 12 and 13 with the distance between both chucks 2 and 3 being adjusted. Adjust to the required interval. This required interval means that the adjacent two sides 20a of the substrate 20 are in contact with the contact wall 11 of the chuck 2, and the substrate lower surface edge of the other adjacent two sides 20b is narrow as the width of the support claw 12. This is the interval supported by the mounting claw 13.

この際に、螺合部分5a,5bの雄ねじの螺旋方向が互いに逆方向であるため、ねじロッドを一方向に回転させるとチャック2,3が互いに近づき、逆方向に回転させると互いが遠ざかるように移動する。チャック2,3は同距離だけ移動するので、チャック2,3の中間位置は常に一定である。これにより、異なるサイズの基板を、その中心位置を一定に固定することができる。   At this time, since the spiral directions of the male threads of the threaded portions 5a and 5b are opposite to each other, the chucks 2 and 3 approach each other when the screw rod is rotated in one direction, and move away from each other when the screw rod is rotated in the opposite direction. Move to. Since the chucks 2 and 3 move by the same distance, the intermediate position of the chucks 2 and 3 is always constant. Thereby, the center position of the board | substrate of a different size can be fixed uniformly.

この準備調整で、両爪12,13の間隔が基板20を支持可能な間隔に予め狭められることにより、従来の固定機構のように基板20の下側に補助台が不要になる。   As a result of this preparation and adjustment, the distance between the claws 12 and 13 is narrowed in advance to a distance that can support the substrate 20, so that an auxiliary base is not required on the lower side of the substrate 20 unlike the conventional fixing mechanism.

通常、基板検査では同種の基板20を多数連続して検査を行うが、上記したこの準備調整は、基板20のサイズが変わらない限り、最初に予め1回調整するだけでよい。   Usually, in the substrate inspection, a large number of the same type of substrates 20 are inspected continuously. However, this preparation adjustment described above only needs to be adjusted once in advance as long as the size of the substrate 20 does not change.

基板検査のために基板20を固定する際には、最初は空気圧シリンダ6に圧縮空気を供給しない。これにより、引っ張りばね7の付勢力で、図2(a)に示されるように、クランプ片4が当接壁11から遠ざかる方向に駆動されて移動している。   When fixing the substrate 20 for substrate inspection, compressed air is not supplied to the pneumatic cylinder 6 at first. Thereby, the clamping piece 4 is driven and moved in the direction away from the contact wall 11 by the urging force of the tension spring 7 as shown in FIG.

そこに、図2(a)に示されるように、基板20を吸着した基板吸着装置5が、両爪12,13の上空で、基板20の下面(図の下側)が当接壁11の上端よりも低く、当接壁11の下端よりも高い位置まで、基板20を下降させる。   2A, the substrate adsorption device 5 that adsorbs the substrate 20 is above the claws 12 and 13, and the lower surface of the substrate 20 (the lower side in the figure) is the contact wall 11. The substrate 20 is lowered to a position lower than the upper end and higher than the lower end of the contact wall 11.

次に、空気圧シリンダ6に圧縮空気を供給してクランプ片4を駆動する。クランプ4は、引っ張りばね7の付勢力に抗しつつ基板20方向に移動して、図2(b)に示されるように、隣接2辺20bを押圧してクランプ片4と当接壁11との間で基板20を挟持する。この際に、基板20は、両爪12,13から浮いた状態で挟持されている。   Next, compressed air is supplied to the pneumatic cylinder 6 to drive the clamp piece 4. The clamp 4 moves in the direction of the substrate 20 while resisting the urging force of the tension spring 7 and presses the adjacent two sides 20b as shown in FIG. The substrate 20 is sandwiched between them. At this time, the substrate 20 is held in a state of being lifted from both the claws 12 and 13.

続いて、図2(c)に示されるように、基板吸着装置5が、吸引していた真空を大気開放して、基板20を解放し、上方に移動する。この際に、基板20がクランプ片4と当接壁11との間で挟持されているため、大気解放の衝撃で基板固定機構1外に基板20が落下することが防止される。   Subsequently, as shown in FIG. 2C, the substrate suction device 5 releases the vacuum that has been sucked to the atmosphere, releases the substrate 20, and moves upward. At this time, since the substrate 20 is sandwiched between the clamp piece 4 and the contact wall 11, the substrate 20 is prevented from falling out of the substrate fixing mechanism 1 due to the impact of air release.

続いて、空気圧シリンダ6への圧縮空気の供給を停止する。これにより、引っ張りばね7の付勢力で、図2(d)に示されるように、クランプ片4を当接壁11の逆方向に移動させ、基板20を支持爪12および載置爪13上に自重落下させる。   Subsequently, the supply of compressed air to the pneumatic cylinder 6 is stopped. As a result, the urging force of the tension spring 7 moves the clamp piece 4 in the opposite direction of the abutting wall 11 as shown in FIG. 2D, and the substrate 20 is placed on the support claws 12 and the placement claws 13. Drop by its own weight.

最後に、図2(e)に示されるように、空気圧シリンダ6に圧縮空気を供給して、クランプ片4で隣接2辺20bを押圧して、当接壁11との間で基板20を固定する。これにより、基板固定機構1は、両爪12,13で支持しつつ、基板20を確実に固定することができる。また、従来の固定機構の使用方法と異なり、基板を挟持した状態で両爪12,13まで押し込むことが不要になる。   Finally, as shown in FIG. 2 (e), compressed air is supplied to the pneumatic cylinder 6, the adjacent two sides 20 b are pressed by the clamp pieces 4, and the substrate 20 is fixed between the contact walls 11. To do. Thereby, the board | substrate fixing mechanism 1 can fix the board | substrate 20 reliably, supporting with the both claws 12 and 13. FIG. Further, unlike the conventional method of using the fixing mechanism, it is not necessary to push the claws 12 and 13 into the state where the substrate is held.

基板20の検査の終了後には、空気圧シリンダ6への圧縮空気の供給が停止され、クランプ片4が引っ張りばね7の付勢力で基板20から遠ざかり、基板20の固定が解除される。   After completion of the inspection of the substrate 20, the supply of compressed air to the pneumatic cylinder 6 is stopped, the clamp piece 4 is moved away from the substrate 20 by the urging force of the tension spring 7, and the fixation of the substrate 20 is released.

なお、以上は本発明の一実施形態を図示例に基づいて説明したものであり、実施形態はこれに限定されない。例えば、基板20が正方形状の場合について説明したが、チャック2,3やクランプ片4の形状をそのままで、または変更して挟持可能な形状であれば、基板の形状は長方形状などの略方形状や多角形状であってもよい。   The embodiment of the present invention has been described based on the illustrated example, and the embodiment is not limited to this. For example, the case where the substrate 20 has a square shape has been described. However, if the shape of the chucks 2 and 3 and the clamp piece 4 can be held without changing the shape of the chucks 2 and 3 and the clamp piece 4, the shape of the substrate is generally a rectangle or the like. It may be a shape or a polygonal shape.

また、当接壁11が隣接2辺20aの各々の辺の一部に当接する例について説明したが、隣接2辺20a全てに当接可能な長さに形成してもよい。クランプ片4も同様に隣接2辺20bの全部に当接可能な長さで形成してもよい。支持爪12や載置爪13の長さも同様に隣接2辺20a,20bの全部を支持可能な長さであってもよい。   Moreover, although the contact wall 11 demonstrated the example which contact | abuts a part of each edge | side of the adjacent 2 sides 20a, you may form in the length which can contact | abut all the adjacent 2 sides 20a. Similarly, the clamp piece 4 may be formed to have a length that can contact all of the adjacent two sides 20b. Similarly, the lengths of the support claws 12 and the placement claws 13 may be long enough to support all of the adjacent two sides 20a and 20b.

当接壁11の高さやクランプ片4の板厚は、基板20の板厚よりも厚く(高く)形成してもよい。   The height of the contact wall 11 and the plate thickness of the clamp piece 4 may be formed thicker (higher) than the plate thickness of the substrate 20.

また、クランプ片4の駆動手段を空気圧シリンダ6および引っ張りばね7によって構成した例について説明したが、直線往復駆動可能な空気圧シリンダのみで構成してもよい。また、油圧シリンダなど各種アクチュエータも用いることができる。また、引っ張りばねでクランプ片4を基板20に押圧駆動させ、空気圧シリンダでクランプ片4を当接壁11から遠ざける方向に駆動する構成としてもよい。   Moreover, although the example which comprised the drive means of the clamp piece 4 with the pneumatic cylinder 6 and the tension spring 7 was demonstrated, you may comprise only with the pneumatic cylinder which can be linearly reciprocated. Various actuators such as a hydraulic cylinder can also be used. Alternatively, the clamp piece 4 may be driven to be pressed against the substrate 20 by a tension spring, and the clamp piece 4 may be driven in a direction away from the contact wall 11 by a pneumatic cylinder.

本発明を適用する基板固定機構の概要図である。It is a schematic diagram of the board | substrate fixing mechanism to which this invention is applied. 本発明を適用する基板固定機構の使用方法を示す断面図である。It is sectional drawing which shows the usage method of the board | substrate fixing mechanism to which this invention is applied.

符号の説明Explanation of symbols

1は基板固定機構、2,3はチャック、2a,3aは腕部、4はクランプ片、5はねじロッド、5a,5bは螺合部分、6は空気圧シリンダ、7は引っ張りばね、11は当接壁、12は支持爪、13は載置爪、20は基板、20aは隣接2辺、20bは他の隣接2辺である。   1 is a substrate fixing mechanism, 2 and 3 are chucks, 2a and 3a are arm portions, 4 is a clamp piece, 5 is a screw rod, 5a and 5b are screwed portions, 6 is a pneumatic cylinder, 7 is a tension spring, and 11 is a contact The contact wall, 12 is a support claw, 13 is a placement claw, 20 is a substrate, 20a is two adjacent sides, and 20b is another two adjacent sides.

Claims (3)

平板状の基板の隣接2辺に当接する当接壁および該隣接2辺を下支えする支持爪を有する一方のチャックと、該基板の他の隣接2辺を下支えする載置爪を有する他方のチャックと、該他方のチャック上に該基板方向に進退自在に配置されると共に駆動手段によってその進退を駆動され、該他の隣接2辺に当接して該基板を押圧固定するクランプ片と、該両チャックの各々に孔開け形成された雌ねじに螺合挿通されると共に、該両チャックの各々に螺合する部分の雄ねじの螺旋方向が互いに逆方向に形成されて該雄ねじの回転で該両チャックを移動させるねじロッドと、を備えることを特徴とする基板固定機構。   One chuck having an abutting wall that contacts two adjacent sides of a flat substrate and a support claw that supports the two adjacent sides, and another chuck having a mounting claw that supports the other two adjacent sides of the substrate And a clamp piece which is arranged on the other chuck so as to be able to advance and retreat in the direction of the substrate and which is driven to advance and retreat by the driving means, and abuts against the other adjacent two sides to press and fix the substrate, Screws are inserted into the internal threads formed in the holes of the chucks, and the spiral directions of the male threads of the portions to be engaged with the chucks are formed in opposite directions to each other. A board fixing mechanism comprising: a screw rod to be moved. 平板状の基板の隣接2辺に当接する当接壁および該隣接2辺を下支えする支持爪を有する一方のチャック、および、該基板の他の隣接2辺を下支えする載置爪を有する他方のチャック、の該両爪の上空で、該基板の下面が該当接壁の上端よりも低く、該当接壁の下端よりも高い位置まで、基板吸着装置で吸着した該基板を下降し、
該他方のチャック上に該基板方向に進退自在に配置されたクランプ片で該他の隣接2辺を押圧して該クランプ片と該当接壁との間で該両爪から浮いた状態で該基板を挟持し、
該基板吸着装置が該基板を解放し、
該クランプ片を該当接壁の逆方向に移動させて、該基板を該支持爪および該載置爪上に落下させ、
該クランプ片で他の隣接2辺を押圧して、該当接壁との間で該基板を固定することを特徴とする基板固定方法。
One chuck having an abutting wall that contacts two adjacent sides of a flat substrate and a supporting claw that supports the two adjacent sides, and the other having a mounting claw that supports the other two adjacent sides of the substrate Lowering the substrate adsorbed by the substrate adsorption device to a position above the both claws of the chuck to a position where the lower surface of the substrate is lower than the upper end of the corresponding contact wall and higher than the lower end of the corresponding contact wall;
The other two sides are pressed on the other chuck with a clamp piece arranged so as to be able to advance and retreat in the direction of the substrate, and the substrate is lifted from the claws between the clamp piece and the contact wall. Pinch
The substrate suction device releases the substrate;
The clamp piece is moved in the opposite direction of the corresponding wall, and the substrate is dropped onto the support claw and the mounting claw,
A substrate fixing method comprising pressing the other two adjacent sides with the clamp piece to fix the substrate between the corresponding contact walls.
前記基板吸着装置で前記基板を下降させる前の準備調整として、前記両チャックの各々に孔開け形成された雌ねじに螺合挿通されると共に、該両チャックの各々に螺合する部分の雄ねじの螺旋方向が互いに逆方向に形成されたねじロッドを、軸周りに回転させ、前記両チャックの間隔を、前記両爪で該基板を支持可能な間隔に調整することを特徴とする請求項2に記載の基板固定方法。   As a preparatory adjustment before the substrate is lowered by the substrate suction device, a screw of a male screw is inserted into a female screw formed in a hole in each of the chucks and is screwed into each of the chucks. The screw rod formed in directions opposite to each other is rotated around an axis, and the interval between the chucks is adjusted to an interval at which the substrate can be supported by the claws. Board fixing method.
JP2008195890A 2008-07-30 2008-07-30 Substrate fixing mechanism and substrate fixing method using the same Expired - Fee Related JP5129681B2 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014077715A (en) * 2012-10-11 2014-05-01 Hioki Ee Corp Substrate support device and substrate inspection device
JP2014169973A (en) * 2013-03-05 2014-09-18 Hioki Ee Corp Substrate inspection device
JP2014185950A (en) * 2013-03-25 2014-10-02 Hioki Ee Corp Substrate fixing device of substrate to be inspected and substrate fixing method thereof
JP2015162564A (en) * 2014-02-27 2015-09-07 日置電機株式会社 Substrate holding device and substrate inspection device
CN112113071A (en) * 2020-08-24 2020-12-22 南京瑞贻电子科技有限公司 Wave recorder fixing device with protection function and fixing method
CN113747781A (en) * 2021-08-04 2021-12-03 星源电子科技(深圳)有限公司 Paster centre gripping location utensil convenient to adjustment

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014077715A (en) * 2012-10-11 2014-05-01 Hioki Ee Corp Substrate support device and substrate inspection device
JP2014169973A (en) * 2013-03-05 2014-09-18 Hioki Ee Corp Substrate inspection device
JP2014185950A (en) * 2013-03-25 2014-10-02 Hioki Ee Corp Substrate fixing device of substrate to be inspected and substrate fixing method thereof
JP2015162564A (en) * 2014-02-27 2015-09-07 日置電機株式会社 Substrate holding device and substrate inspection device
CN112113071A (en) * 2020-08-24 2020-12-22 南京瑞贻电子科技有限公司 Wave recorder fixing device with protection function and fixing method
CN112113071B (en) * 2020-08-24 2022-02-01 南京瑞贻电子科技有限公司 Wave recorder fixing device with protection function and fixing method
CN113747781A (en) * 2021-08-04 2021-12-03 星源电子科技(深圳)有限公司 Paster centre gripping location utensil convenient to adjustment
CN113747781B (en) * 2021-08-04 2022-11-29 星源电子科技(深圳)有限公司 Paster centre gripping location utensil convenient to adjustment

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