JP2010027211A - Ion generation device and neutralization apparatus equipped with it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ion generation device that can grasp a situation of the generation of ions generated by a flat-electrode type ion generation element, and a neutralization apparatus equipped with the ion generation device. <P>SOLUTION: The ion generation device includes: a dielectric material; ion generation elements 11, 12 composed of an ion generation electrode and an induction electrode formed on their surfaces via the dielectric material; and current detecting electrodes 27a, 27b that are disposed along the ion generation electrode in the vicinity of the ion generation elements 11, 12 and detect a discharge current by absorbing the ions generated from the ion generation electrode. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ion generating device that generates ions from an ion generating element and a static eliminator including the same.

  Conventionally, an ion generated from an ion generating electrode is attracted to a current detection electrode and a current flowing through the electrode is regarded as a discharge current of the ion generating electrode. For example, the current detection electrode described in Patent Document 1 is provided between the positive discharge electrode and the negative discharge electrode, and detects the discharge current corresponding to the generation of positive and negative ions by changing the detection timing, It has been proposed to maintain the ion balance based on these detected discharge currents. Patent Document 2 uses a ground plate as a current detection electrode. In Patent Documents 1 and 2 described above, ions are generated by a needle-type discharge electrode.

  By the way, in the ion generator or the static eliminator using the needle-type discharge electrode, unevenness is likely to occur in the static eliminating operation with a large-area, planar workpiece. Further, in the needle-type discharge electrode, the electric field is concentrated on the tip of the needle, dust is attracted to the tip, and the electrode portion is also worn out. In order to solve these problems, there has been proposed a planar electrode type, that is, an element that uses an ion generating element including a dielectric, and an ion generating electrode and an induction electrode formed on each surface via the dielectric.

JP-A-3-266398 (FIG. 1) Japanese Patent Laying-Open No. 2002-216959 (FIG. 5)

  Also in an ion generating device including an ion generating element including a dielectric and an ion generating electrode and an induction electrode formed on each surface via the dielectric, and a static eliminator using the same, positive and negative ions, respectively It is desired to detect the occurrence state of the ion and to control to maintain the ion balance based on the detection of the ion generation state.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ion generator capable of grasping the generation state of ions generated by a planar electrode type ion generator and a static eliminator equipped with the ion generator.

Means for Solving the Problems and Effects of the Invention

  An ion generating apparatus according to the present invention includes an ion generating element including a dielectric, an ion generating electrode and an induction electrode formed on each surface through the dielectric, and the ion generating electrode in the vicinity of the ion generating element. And a current detection electrode that detects a discharge current by attracting ions generated from the ion generation electrode.

  According to the ion generator of the present invention, the discharge current at the time of ion generation can be grasped in the ion generator provided with the planar electrode type ion generator.

  In addition, it is preferable to further include a voltage application unit that applies a voltage to the current detection electrode, and the voltage application unit applies a bias voltage having a polarity opposite to that of ions generated from the ion generation electrode to the current detection electrode. . According to this, since ions are forcibly attracted under uniform conditions, the discharge current can be accurately detected without being affected by the surrounding environment or the like.

  Furthermore, it is preferable that the voltage application means switches the bias voltage having the opposite polarity to the ions generated from the ion generation electrode and the bias voltage having the same polarity to be applied to the current detection electrode. Other than when the discharge is detected, for example, when the current detection electrode is not at a specific potential, the potential becomes unstable, and the generated ions may be attracted to the electrode detection electrode or repelled, which may have an adverse effect. According to this, it is possible to stably generate ions other than at the time of detecting the applied discharge current with a bias voltage having the same polarity as that of ions generated by switching the polarity of the bias voltage other than at the time of detecting the discharge current.

  In addition, it is preferable that a plurality of the ion generation elements and the current detection electrodes are provided, and the plurality of current detection electrodes are respectively arranged along the ion generation electrodes of each ion generation element. According to this, since each ion generating element is provided with the current detection electrode, the discharge current of each ion generating element can be grasped.

  The static eliminator of the present invention is a static eliminator that neutralizes an object to be neutralized that is conveyed in one direction on a conveyance surface, and is provided with a dielectric provided in parallel to the conveyance surface and via the dielectric, respectively. An ion generating element comprising an ion generating electrode and an induction electrode formed on the surface of the electrode, and in the vicinity of the ion generating element and along the ion generating electrode on the side opposite to the transport surface with respect to the ion generating electrode And a current detection electrode for detecting a discharge current by attracting ions generated from the ion generation electrode.

  According to the static eliminator of the present invention, the current detection electrode is provided on the opposite side of the transport surface with respect to the ion generation electrode, so that ions generated from the ion generation electrode are not affected by the current detection electrode and are to be neutralized. Can supply.

  And a voltage applying means for applying a voltage to the current detecting electrode, wherein the voltage applying means applies a bias voltage having a polarity opposite to that of ions generated from the ion generating electrode to the current detecting electrode. preferable. According to this, since ions are forcibly attracted under uniform conditions, the discharge current can be accurately detected without being affected by the surrounding environment or the like.

  Further, it is preferable that the voltage application means switches a bias voltage having a polarity opposite to that of ions generated from the ion generation electrode and a bias voltage having the same polarity to the current detection electrode. Other than when the discharge is detected, for example, when the current detection electrode is not at a specific potential, the potential becomes unstable, and the generated ions may be attracted to the electrode detection electrode or repelled, which may have an adverse effect. According to this, since the bias voltage having the same polarity as the ion generated by switching the polarity of the bias voltage is applied in addition to the detection of the discharge current, the ion generation other than the detection of the discharge current can be stably performed. it can. In addition, since ions are not attracted to the current detection electrode except when the discharge current is detected, ions generated from the ion generation electrode can be effectively supplied to the object to be discharged.

  In addition, the apparatus further includes a detection sensor that detects the object to be neutralized conveyed on the conveyance surface, and the object to be neutralized is not continuously conveyed to a position facing the ion generating element for a predetermined time or more. When this is detected, the voltage applying means preferably applies a bias voltage having a polarity opposite to that of ions generated from the ion generating electrode to the current detecting electrode. That is, when the object to be discharged is not transported continuously to a position facing the ion generating element for a predetermined time or longer, the voltage applying means applies a bias voltage having a polarity opposite to that of the ions generated from the ion generating electrode to the current detecting electrode. Apply to. As a result, sufficient time can be secured for switching from the same polarity voltage to the reverse polarity voltage, and the discharge current can be accurately detected.In addition, when there are a plurality of ion generating elements, sufficient time for feedback control is provided. Can take.

  In addition, the ion generation element may include two ion generation elements arranged close to each other along the one direction, and the two ion generation elements may generate different ions of either positive ions or negative ions. preferable. According to this, it is possible to neutralize the object to be neutralized charged either positively or negatively.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. The static eliminator according to the present embodiment neutralizes the static elimination target object by alternately generating positive ions and negative ions with respect to the static elimination target object conveyed in one direction on the conveyance surface. FIG. 1 is a longitudinal sectional view of a static eliminator according to an embodiment of the present invention. FIG. 2 is a perspective view of an element unit to which an ion generating element is attached.

  As shown in FIG. 1, the static elimination apparatus 1 has the housing | casing 2 in which the partition plate 7 which divides space into two was formed. A control board 4 and a power supply board 5 are disposed in the upper space of the housing 2, and an element unit 3 and a gas tank 6 are disposed in the lower space.

  The static eliminator 1 is supported by a support member (not shown), and below the transfer surface 30a of the transfer device (not shown) in the Y direction at a predetermined interval below (in the transfer direction from left to right in FIG. 1). The object 30 to be discharged is opposed to the object 30 to be discharged.

  The detection sensor 25 is arranged on the upstream side in the transport direction with respect to the static elimination device 1, and the static elimination target 30 is transported when facing the static elimination target 30 transported on the transport surface 30 a. And a detection signal is output to the control board 4. The distance in the transport direction between the static elimination device 1 and the detection sensor 25 is set so that the static elimination object 30 faces the static elimination device 1 after a detection signal is input from the detection sensor 25 to the control board 4 and a desired time elapses. ing. Before the desired time A, when the static elimination target 30 is detected by the detection sensor 25 within a certain time B interval shorter than the desired time A, the static elimination device 1 continues below the static elimination device 1. Thus, it operates in the normal operation mode as if the object to be discharged has been conveyed. Before the desired time A, when the detection sensor 25 detects that the object 30 to be discharged has not been conveyed for a certain time B or longer within the desired time A, the charge removal apparatus 1 is in the discharge current detection mode. Operate. When the detection sensor 25 detects that the object 30 to be discharged has not been transported for at least a time C longer than the desired time A before the desired time A, the static eliminator 1 causes the ion generation element to generate ions. To stop driving. Details will be described later.

  As shown in FIGS. 1 and 2, the element unit 3 has a support 3a made of a resin molded body or the like, and has a long shape in the X direction perpendicular to the Y direction in the transport surface 30a. When viewed from the Y direction, it has reverse-shaped slopes 3c and 3d that form part of the bottom surface. On the inclined surfaces 3c and 3d, ion generating elements 11 and 12 that are long in the X direction are arranged with stabilizing electrodes 26 and 26 to be described later interposed therebetween.

  The ion generating elements 11 and 12 are arranged close to each other along the Y direction with the longitudinal direction parallel to the X direction, and the ion generating surface opposite to the surface facing the inclined surfaces 3c and 3d of the support 3a. One of positive ions and negative ions and the other ion are generated from 11a and 12a (see FIG. 5). In the present embodiment, negative ions are generated from the ion generating surface 11a of the ion generating element 11 located downstream in the transport direction, and positive ions are generated from the ion generating surface 12a of the ion generating element 12 positioned upstream in the transport direction. To do.

  The inclined surface 3c of the support 3a forms an acute angle 45 degrees to the downstream side in the transport direction with the transport surface 30a on which the object 30 to be discharged is transported. Therefore, the ion generating surface 11a of the ion generating element 11 disposed on the inclined surface 3c forms an acute angle that is 45 degrees open to the downstream side in the transport direction with the transport surface 30a. Further, the inclined surface 3d of the support 3a forms an acute angle that is 45 degrees open to the upstream side in the transport direction with the transport surface 30a. Accordingly, the ion generation surface 12a of the ion generation element 12 disposed on the inclined surface 3d forms an acute angle that is 45 degrees open to the upstream side in the transport direction with the transport surface 30a. That is, the ion generation surfaces 11a and 12a form the same angle although the direction opened between the ion generation surfaces 11a and 12a is opposite to the transport direction.

  The element unit 3 has a cover 9 that covers the outer surface of the support 3a. The cover 9 covers the periphery of the ion generating elements 11 and 12 and fixes them to the support 3a. In addition, the cover 9 is formed with an opening so as to expose the ion generating portions of the ion generating elements 11 and 12, and a plurality of holes 9a are formed at positions corresponding to the gas delivery holes 6a described later. . In addition, current detection electrodes 27a and 27b are arranged on the upper outer surface of the cover 9 at a position where the ion generating elements 11 and 12 are sandwiched with respect to the transport direction.

  The two current detection electrodes 27a and 27b are for detecting the discharge currents of the ion generating elements 11 and 12, respectively, and are generated in the vicinity of the ion generating elements 11 and 12 from the ion generating elements 11 and 12. It is placed in a place where there is little influence on the ion distribution. That is, it is arranged above the ion generating elements 11 and 12 in the direction orthogonal to the transport surface 30a. Holes are formed in the current detection electrodes 27 a and 27 b at positions corresponding to the holes 9 a of the cover 9. Note that this is a conventionally known technique in which ions generated from an ion generating element are received from a predetermined electrode and the amount of current flowing through the electrode can be regarded as the amount of generated ions.

  Next, the ion generating elements 11 and 12 will be described. FIG. 3 is a plan view of the ion generating element. FIG. 4 is an enlarged view of the one-dot chain line region of FIG. FIG. 5 is a schematic partially enlarged view of FIG. Since the ion generating elements 11 and 12 have the same configuration except for generating different polarities due to different applied pulse voltages, only the ion generating element 11 will be described. The description of 12 is omitted.

  As shown in FIGS. 3 to 5, the ion generating element 11 has an ion generating electrode 16 and induction electrodes 17 a and 17 b arranged on the front surface 15 a and the back surface 15 b of the dielectric 15, respectively. The surface 15a of the dielectric 15 is a surface opposite to the inclined surface 3c of the support 3a, and the back surface 15b is a surface facing the inclined surface 3c.

  The dielectric 15 is a long rectangular plate in which a large number of mica are laminated with an adhesive. The dielectric 15 has a thickness of 70 μm in this embodiment. The dielectric 15 is not limited to a mica laminate, and may be ceramic, glass, polymer, or the like.

  The ion generating electrode 16 is made of stainless steel on the surface 15a of the dielectric 15 and has a plurality of fine triangular protruding electrodes protruding in a short direction perpendicular to the longitudinal direction from the linear electrode 16a and the linear electrode 16a. 16b. The plurality of protruding electrodes 16b are arranged in two rows in a staggered manner on both sides in the short direction of the linear electrode 16a at equal intervals along the X direction. In the present embodiment, the width X of the linear electrode 16a, the length Y of the bottom side of the protruding electrode 16b, and the height Z of the protruding electrode 16b are 0.1 mm. The angle α formed from the two sides forming the protruding electrode 16b is 53.13 degrees, and the distance L between the apexes 16c of the two adjacent protruding electrodes 16b is 0.3 mm. Yes.

  The induction electrodes 17 a and 17 b are formed of stainless steel on the back surface 15 b of the dielectric 15 in the same manner as the ion generation electrode 16, and are parallel to the ion generation electrode 16. The two linear electrodes 17 a and 17 b are arranged on both sides of the ion generating electrode 16 in the short direction when the induction electrodes 17 a and 17 b are viewed from the ion generating electrode 16. In the present embodiment, the distance K in the short direction from the protruding electrode 16b to the induction electrode 17b is 0.05 mm. The material of the ion generating electrode 16 and the induction electrodes 17a and 17b is not limited to stainless steel, but is a single metal such as carbon, tungsten, aluminum, copper, gold, tantalum, tungsten or nickel, or an alloy thereof, or conductive. Ceramics may be used.

  Further, a surface protective layer 18 that covers the surface 15 a of the dielectric 15 and the ion generating electrode 16 is formed on the entire surface 15 a of the dielectric 15. The surface protective layer 18 is formed for the purpose of preventing peeling of the dielectric 15 and improving moisture resistance, and is made of, for example, a silica coating material or an acrylic coating material.

  In addition, a back surface protective layer 19 that covers the back surface 15b of the dielectric 15 and the induction electrodes 17a and 17b is formed on the entire back surface 15b of the dielectric 15. The back surface protective layer 19 is made of, for example, a silicon coating material or an epoxy coating material.

  As shown in FIG. 5, the stabilizing electrode 26 is arrange | positioned between the back surface protective layer 19 of the ion generating element 11, and the slope 3c of the support body 3a. A bias voltage having the same polarity as the ions generated from the ion generating electrode 16 is applied to the stabilizing electrode 26. That is, since negative ions are generated from the ion generation electrode 16 of the ion generation element 11, a negative bias voltage is applied to the stabilization electrode 26 corresponding to the ion generation element 11. Further, since positive ions are generated from the ion generation electrode 16 of the ion generation element 12, a positive bias voltage is applied to the stabilization electrode 26 corresponding to the ion generation element 12. In this embodiment, bias voltages of minus 12V and plus 12V are applied, respectively.

  The ion generation element 11 generates negative ions from the ion generation electrode 16 by applying a negative pulse voltage between the ion generation electrode 16 and the induction electrodes 17a and 17b using the induction electrodes 17a and 17b as a reference potential. . The ion generating element 12 applies positive pulse voltage from the ion generating electrode 16 by applying a positive pulse voltage between the ion generating electrode 16 and the induction electrodes 17a and 17b with the induction electrodes 17a and 17b as a reference potential. appear.

  Here, if the generation of negative ions from the ion generation electrode 16 of the ion generation element 11 is continued, the amount of ions generated from the ion generation electrode 16 decreases. This is presumably because, if the stabilization electrode 26 is not disposed, the back surface protection layer 19 is charged with a polarity opposite to that of ions generated from the ion generation electrode 16. When the support 3a is made of a resin, the support 3a is charged in addition to the back surface protective layer 19. By providing the stabilizing electrode 26 to which a negative bias voltage is applied to the ion generating element 11 that generates negative ions as in the present embodiment, the back surface protective layer 19 or the support 3a is additionally provided. Prevent charging. As a result, the amount of ions generated from the ion generating electrode 16 does not decrease and stabilizes.

  Referring back to FIGS. 1 and 2, the gas tank 6 is hollow, and a plurality of two gas delivery holes 6a opened downward on both sides in the Y direction of the two ion generating elements 11 and 12 are formed along the X direction. . The gas tank 6 is connected to a gas supply source (not shown). As the gas, air gas or inert gas such as nitrogen is suitable. The compressed gas supplied from the gas supply source is sent out from the gas delivery hole 6a of the gas tank 6 through the hole 9a of the cover 9 and the holes of the current detection electrodes 27a and 27b in the direction orthogonal to the transport surface 30a. That is, the gas delivered from the plurality of gas delivery holes 6a of the gas tank 6 extends in the X direction with the two ion generating elements 11 and 12 sandwiched with respect to the transport direction and facing the direction orthogonal to the transport surface 30a. A gas curtain is formed.

  Here, since the two ion generating elements 11 and 12 generate ions, dust is likely to adhere due to static electricity regardless of the polarity, although not as much as in the case of the needle type. Therefore, by forming the gas curtain, the distribution region of ions generated from the ion generation surfaces 11a and 12a of the ion generation elements 11 and 12 toward the transport surface 30a is blocked from the outside by the gas curtain. It becomes difficult to adhere to the ion generation surfaces 11a and 12a. In addition, ions generated from the ion generation surfaces 11a and 12a flow more efficiently to the transport surface 30a, and the charge removal target 30 can be discharged more effectively. Furthermore, it is possible to prevent the ions generated from the two ion generation surfaces 11a and 12a from being dispersed. In addition, since the gas curtain is formed in a direction perpendicular to the transport surface 30a, positive ions and negative ions generated from the two ion generation surfaces 11a and 12a are less likely to be mixed and neutralized.

  Next, the electrical configuration of the static eliminator 1 will be described with reference to the drawings. FIG. 6 is a block diagram illustrating an electrical configuration of the static eliminator. FIG. 7 is an internal circuit diagram of the power supply board. FIG. 8 is a diagram showing voltage waveforms applied from the power supply substrate to the two ion generating elements. FIGS. 9A and 9B are schematic plan views for explaining the process of neutralizing the object to be neutralized by the two ion generating elements, in which FIG. 9A is during neutralization and FIG. 9B is during discharge current detection.

  As shown in FIG. 6, the power supply substrate 5 is electrically connected to the ion generating elements 11 and 12, the stabilization electrodes 26 and 26, and the current detection electrodes 27a and 27b, respectively. Various voltages are supplied to the ion generating elements 11 and 12 and the current detection electrodes 27a and 27b under the control of an ion generation voltage control unit 31 and a current detection voltage control unit 32 described later.

  As shown in FIG. 7, the power supply substrate 5 includes a power supply 51, a drive circuit 52, a transformer 53, and a secondary circuit 54. The drive circuit 52, the transformer 53, and the secondary circuit 54 are provided corresponding to the ion generating elements 11 and 12, respectively. The voltage output from the power supply 51 is applied to the ion generating elements 11 and 12 via the drive circuit 52, the transformer 53, and the secondary circuit 54, respectively. At this time, since a negative pulse voltage is applied to the ion generating element 11, negative ions are generated, and since a positive pulse voltage is applied to the ion generating element 12, positive ions are generated.

  The control board 4 includes a ROM (Read Only Memory) in which programs and data for controlling various operations are stored, a CPU (Central Processing Unit) for executing various operations to generate signals for controlling the various operations, and a CPU RAM (Random Access Memory) etc. that temporarily stores data such as the calculation results in the are included. Alternatively, the control board 4 may be configured by a logic IC, ASIC, FPGA, or the like. Further, the control board 4 functions as an ion generation voltage control unit 31 and a current detection voltage control unit 32 as shown in FIG.

  The ion generation voltage control unit 31 is in the normal operation mode and the discharge current detection mode, that is, while the object to be discharged 30 is continuously conveyed under the charge removal device 1 (in the normal operation mode), and in the charge removal device. 1 during the desired time A but while the object 30 to be discharged is not transported for a certain time B or longer (in the discharge current detection mode), the voltage is applied to the ion generating element 11 while shifting the voltage application timing. The power supply substrate 5 is controlled so that a positive pulse voltage is applied to the ion generating element 12. Further, the ion generation voltage control unit 31 detects, before the desired time A, that the detection sensor 25 detects that the object 30 to be discharged is not transported for at least a time C longer than the desired time A, that is, the charge removal While the object to be discharged 30 is not transported continuously under the apparatus 1 and is on standby for the charge removal of the next object 30 to be discharged, voltage application to the ion generating elements 11 and 12 is stopped. The power supply board 5 is controlled to do so.

  Specifically, as shown in FIG. 8, the ion generation voltage control unit 31 is continuously positive twice from the power supply substrate 5 to the ion generation element 12 in one cycle (for example, 10 to 500 Hz). After applying the pulse voltage, the voltage application cycle V1 for applying a positive bias voltage is repeated. In addition, the ion generation voltage control unit 31 applies a negative pulse voltage to the ion generation element 11 from the power supply substrate 5 continuously in one cycle, and then applies a negative bias voltage. Repeat cycle V2. In this embodiment, the pulse width B is 5 μs, the pulse interval C is 300 μs, and the output voltage V is 2.4 kVpk. Note that the number of pulse voltages and the peak value of the pulse voltage in one cycle can be variously changed according to the amount of ions to be generated.

  At this time, the ion generation voltage control unit 31 applies a negative pulse voltage to the ion generation element 11 while applying a positive bias voltage to the ion generation element 12 from the power supply substrate 5, and While applying a negative bias voltage to the ion generating element 11, a positive pulse voltage is applied to the ion generating element 12. That is, the ion generation voltage control unit 31 alternately applies a pulse voltage from the power supply substrate 5 to the ion generation elements 11 and 12. Therefore, the static elimination apparatus 1 generates positive ions and negative ions alternately from the ion generating elements 11 and 12 to neutralize the static elimination target 30.

  Further, the ion generation voltage control unit 31 is configured so that the discharge current detected by the current detection electrodes 27a and 27b coincides with the target current, that is, the target ion amount is generated from the ion generation elements 11 and 12. 5 to perform feedback control for changing the peak value of the pulse voltage applied to the ion generating elements 11 and 12.

  In the normal operation mode in which the current detection voltage control unit 32 detects that the static elimination target 30 is continuously conveyed under the static eliminator 1 as shown in FIG. A positive bias voltage is applied from the power supply substrate 5 to the current detection electrode 27b arranged on the side of the ion generating element 12 that generates the. The current detection voltage control unit 32 applies a negative bias voltage from the power supply substrate 5 to the current detection electrode 27a disposed on the side of the ion generating element 11 that generates negative ions. The current detection electrodes 27a and 27b are arranged in positions orthogonal to the transport surface 30a and above the ion generation elements 11 and 12 and at a position that has little influence on the ion distribution generated from the ion generation elements 11 and 12. is there. However, by providing such electrodes, when the current detection electrodes 27a and 27b are not at a specific potential, for example, in the normal operation mode, the current detection electrodes 27a and 27b become unstable potentials due to external noise or the like, and the ion generating element The ions generated from 11 and 12 are attracted to the electrode detection electrodes 27a and 27b and repelled, which has an adverse effect. As described above, in the normal operation mode, by applying a bias voltage having the same polarity as the ions generated from the nearby ion generation elements 11 and 12 to the current detection electrodes 27a and 27b, it is possible to prevent fluctuations in ion generation. . In addition, since ions are not attracted to the current detection electrodes 27a and 27b, ions generated from the ion generation electrodes 16 and 16 can be effectively supplied to the object 30 to be neutralized. In the present embodiment, the bias voltages are plus 12V and minus 12V, respectively.

  Further, as shown in FIG. 9B, the current detection voltage control unit 32 is configured so that the detection sensor 25 is within the desired time A before the desired time A, but the object 30 to be neutralized is not less than a certain time B. In the so-called discharge current detection mode in which it is detected that no current is conveyed, a negative bias voltage is applied from the power supply substrate 5 to the current detection electrode 27b, and a positive bias voltage is applied from the power supply substrate 5 to the current detection electrode 27a. Let In this way, by applying a bias voltage having a polarity opposite to that of ions generated from the nearby ion generating elements 11 and 12 to the current detection electrodes 27a and 27b, the generated ions are forcibly and uniformly applied to the current detection electrodes 27a and 27b. By pulling under conditions, the discharge current is accurately detected without being affected by the surrounding environment. Therefore, the discharge current for generating ions can be grasped in the static eliminator 1 including the so-called planar ion generating elements 11 and 12. In addition, the polarity of the bias voltage is switched and applied to the current detection electrodes 27a and 27b in accordance with the respective modes of the normal operation mode and the discharge current detection mode, so that ions are generated stably other than when the discharge current is detected. be able to. Furthermore, since the ion generating elements 11 and 12 are each provided with the current detection electrodes 27a and 27b, the discharge current of each of the ion generating elements 11 and 12 can be grasped. In addition, the timing to enter the discharge current detection mode is as described above when it is detected that the object 30 to be discharged is not transported continuously for a certain time or more, so that the voltage of the same polarity is changed to the voltage of the opposite polarity. A sufficient time for switching can be ensured and the discharge current can be accurately detected, and when there are a plurality of ion generating elements 11 and 12, a sufficient time for feedback control can be taken. In this embodiment, bias voltages of minus 12V and plus 12V are applied, respectively.

  The period for sending the gas from the gas delivery hole 6a of the gas tank 6 may be only during the gas, the normal operation mode and the discharge current detection mode, but it prevents the dust from adhering to the ion generating elements 11 and 12. From the point of view, it is preferable that the operation is always performed including the standby state in which the driving for generating ions is stopped.

  Next, the charge removal process of the charge removal target 30 by the charge removal apparatus 1 will be described. As shown in FIG. 9A, in the longitudinal section along the Y direction of the ion generating elements 11 and 12, ions are generated from the ion generating electrode 16 portion which is the center of ion generation. The distance M from the ion generating electrode 16 of the ion generating elements 11 and 12 to the conveying surface 30a in the direction orthogonal to the conveying surface 30a is the distance N between the two ion generating electrodes 16 of the two ion generating elements 11 and 12. That's it. In the present embodiment, the distance N is 10 mm, and the distance M is preferably 10 to 500 mm. In this distance relationship, the static eliminator 1 can effectively neutralize the object 30 to be neutralized. When the distance M is equal to or less than the distance N, the ion distribution generated from each of the ion generating elements 11 and 12 becomes an independent distribution on the transport surface 30a, and there is a possibility that the object 30 to be neutralized is overcharged. By setting the distance M to be equal to or greater than the distance N, a coexisting portion of ion distributions generated from the respective ion generating elements 11 and 12 can be formed on the transport surface 30a, and overcharge of the object to be neutralized 30 can be prevented. On the other hand, if the distance M is too large, ions generated from the ion generating elements 11 and 12 are diffused outward until they are transported to the transport surface 30a, and excessive neutralization of the ions occurs. The distance M is preferably set within a predetermined distance.

  In the normal operation mode, when the static elimination object 30 is conveyed in the conveyance direction along the conveyance surface 30a and the static elimination apparatus 1 and the static elimination object 30 face each other, of the generated positive ions and negative ions, Ions having a polarity opposite to the ions charged in the object 30 to be discharged are attracted to the object 30 to be discharged, and the object 30 to be discharged is discharged. At this time, since the coexistence region exists in the distribution of the negative ions and the positive ions generated from the ion generating elements 11 and 12 as described above, the overcharge of the object 30 to be neutralized is prevented. In addition, the object 30 to be neutralized, which is charged positively or negatively, can be neutralized.

  At this time, the ion generation surface 11a of the ion generating element 11 located on the downstream side in the transport direction is not parallel to the transport surface 30a but is inclined 45 degrees toward the downstream side in the transport direction. Then, since the negative ions generated from the ion generating element 11 are distributed along the ion generating surface 11a, the amount of the negative ions generated from the ion generating element 11 increases from the upstream side to the downstream side in the transport direction. It is running low. Therefore, negative ions are rarely carried to the object to be neutralized 30 that is transported to the downstream side in the transport direction after the neutralization is completed, and it is possible to prevent excessive charging.

  Further, since the ion generation surface 11a is opposed to the object to be neutralized 30 by a predetermined area by being inclined 45 degrees downstream in the transport direction, ions can be efficiently conveyed to the object to be neutralized 30. Furthermore, in this embodiment, the ion generation surface 12a of the ion generating element 12 located on the upstream side of the transport side is also inclined 45 degrees upstream of the transport surface 30a in the transport direction. That is, the ion generating surfaces 11a and 12a of the two ion generating elements 11 and 12 form the same angle although the direction opened between the ion generating surfaces 11a and 12a is opposite to the transport direction. According to this, in the two ion generating elements 11 and 12, there are portions of the ion generating surfaces 11 a and 12 a that are opposed to the object to be neutralized 30 by a predetermined area, and both ions are efficiently applied to the object to be neutralized 30. Can carry well. In particular, since the inclination is the same angle, negative ions and positive ions are uniformly conveyed from the two ion generating elements 11 and 12 to the object 30 to be neutralized, and the ion distribution is more uniform including the coexistence region. Can be formed. When negative ions and positive ions are generated alternately, it is possible to avoid excessive or abrupt neutralization of ions during the transfer of ions onto the object 30 to be neutralized, efficiently carrying ions, And it is preferable at the point which can form the coexistence region of useful ion.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made as long as they are described in the claims. For example, in this embodiment, in the discharge current detection mode, the discharge current is detected by attracting ions by applying a bias voltage having a polarity opposite to that of the ions generated in the current detection electrodes 27a and 27b. That is, the discharge current can be detected by attracting the generated ions even when the current detection electrodes 27a and 27b are grounded.

  In the present embodiment, the static eliminator has been described for the purpose of neutralizing the object being conveyed. However, the present invention may be configured as an ion generator that generates ions for other purposes. Good.

  Further, the angle formed between the ion generation surfaces 11a and 12a and the transport surface 30a is 45 degrees, but any angle may be used as long as it is an acute angle. However, 45 degrees can maintain the highest static elimination efficiency and make it difficult to generate extra charge on the static elimination target 30.

  Further, the angle formed between the ion generation surface 11a and the transport surface 30a and the angle formed between the ion generation surface 12a and the transport surface 30a may not be the same angle.

  Further, the stabilization electrode 26 may be grounded. Since the stabilization electrode 26 is grounded, the back surface protection layer 19 and the support 3a can be prevented from being charged, so that the generation of ions from the ion generation electrode 16 is stabilized.

  In addition, the shape of the protruding electrode 16b of the ion generating electrode 16 is not limited to a triangular shape, and may be any shape such as a wave shape, a circular shape, or a lattice shape.

  Further, in the present embodiment, positive ions and negative ions are alternately generated from the ion generating elements 11 and 12, but may be generated simultaneously.

  Furthermore, if dust does not float around the static eliminator 1 and ions generated from the ion generating elements 11 and 12 can reach the static elimination target 30 without using a gas flow, a gas such as the gas tank 6 is used. The sending means may not be provided.

  In addition, the current detection electrodes 27a and 27b may not be upstream of the ion generation elements 11 and 12 in the ion generation direction, but may be downstream as long as they are outside the ion distribution region.

  In the present embodiment, negative ions are generated from the ion generating element 11 and positive ions are generated from the ion generating element 12. However, positive ions are generated from the ion generating element 11, and negative ions are generated from the ion generating element 12. The structure which generate | occur | produces ion may be sufficient. Alternatively, the ion generation element 11 may alternately repeat negative ions and positive ions in time, and the ion generation element 12 may alternately repeat positive ions and negative ions.

  Further, the voltage applied to the ion generating elements 11 and 12 uses the method of constantly applying a bias voltage in the example of FIG. 8, but for the generation of ions, a pulse voltage having a predetermined peak from the ground voltage (0 volts) is used. The driving method may be a method of applying a voltage, and a known and well-known driving method can be used.

It is a longitudinal cross-sectional view of the static elimination apparatus main body which concerns on one Embodiment of this invention. It is a perspective view of an element unit to which an ion generating element is attached. It is a top view of an ion generating element. It is an enlarged view of the dashed-dotted line area | region of FIG. FIG. 2 is a schematic partial enlarged view of FIG. 1. It is a block diagram which shows the electric constitution of a static elimination apparatus. It is an internal circuit diagram of a power supply board. It is a figure which shows the voltage waveform each applied to two ion generating elements from a power supply board | substrate. It is a schematic plan view explaining the static elimination process of the static elimination target object by two ion generating elements, (a) is in the process of static elimination, (b) is in the process of detecting the discharge current.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Static elimination apparatus 2 Case 3 Element unit 4 Control board 5 Power supply board 6 Gas tank 11, 12 Ion generating element 11a, 12a Ion generating surface 27a, 27b Current detection electrode 32 Current detection voltage control part

Claims (9)

An ion generating element comprising a dielectric, and an ion generating electrode and an induction electrode formed on each surface via the dielectric;
Ion generation comprising: a current detection electrode disposed along the ion generation electrode in the vicinity of the ion generation element and detecting a discharge current by attracting ions generated from the ion generation electrode apparatus. A voltage applying means for applying a voltage to the current detection electrode;
2. The ion generating apparatus according to claim 1, wherein the voltage applying unit applies a bias voltage having a polarity opposite to that of ions generated from the ion generating electrode to the current detecting electrode.   3. The ion generation according to claim 2, wherein the voltage application unit switches a bias voltage having a polarity opposite to that of ions generated from the ion generation electrode and a bias voltage having the same polarity to the current detection electrode. apparatus. A plurality of the ion generating element and the current detection electrode;
The ion generator according to claim 1, wherein the plurality of current detection electrodes are respectively arranged along the ion generation electrodes of the respective ion generation elements. A static eliminator that neutralizes an object to be neutralized conveyed in one direction on the conveyance surface,
An ion generating element comprising a dielectric provided in parallel to the transport surface, and an ion generating electrode and an induction electrode formed on each surface via the dielectric;
Current detection for detecting a discharge current by attracting ions generated from the ion generation electrode along the ion generation electrode on the opposite side of the transport surface with respect to the ion generation electrode in the vicinity of the ion generation element And an electrode. Voltage application means for applying a voltage to the current detection electrode,
6. The static eliminator according to claim 5, wherein the voltage application unit applies a bias voltage having a polarity opposite to that of ions generated from the ion generation electrode to the current detection electrode.   7. The static eliminator according to claim 6, wherein the voltage application unit switches a bias voltage having a polarity opposite to that of ions generated from the ion generation electrode and a bias voltage having the same polarity to the current detection electrode. A detection sensor for detecting the object to be discharged that is transported on the transport surface;
When it is detected that the object to be neutralized is not continuously conveyed to a position facing the ion generating element for a predetermined time or longer, the voltage applying means applies a bias voltage having a polarity opposite to that of ions generated from the ion generating electrode. The static eliminator according to claim 6, wherein the static eliminator is applied to the current detection electrode. Having two of the ion generating elements arranged close to each other along the one direction;
9. The static eliminator according to claim 5, wherein the two ion generating elements generate different ions, either positive ions or negative ions. 10.

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