JP2006114326A - Ion generating device and destaticizing and removal method of organic substance using this - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ion generating device capable of destaticizing and removal of an organic substance in a manufacturing process of a semiconductor or liquid crystal or the like. <P>SOLUTION: An ion generating device 1 having a plurality of ion generating element 2 for generating a positive and a negative ions is installed on a gate shape support 9 provided so as to straddle a stage 11 of a transfer line 10. The ion generating elements 2 are provide and arranged facing a destaticizing object 12 mounted on the stage 11 of the transfer line 10. The positive and negative ions generated in the static eliminator 8 contact the destaticizing object 12 and destaticize the destaticizing object and at the same time decompose the organic substance. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ion generator capable of performing charging and organic substance removal in a manufacturing process of a semiconductor, a liquid crystal panel, and the like, and a static elimination and organic substance removal method using the same.

  Conventionally, there has been a problem that static electricity is generated in manufacturing processes of semiconductors, liquid crystal panels, and the like. For example, in the liquid crystal manufacturing process, since glass, which is an insulator, is used as a substrate material, electrostatic charges of several kV or more are generated by peeling electrification simply by lifting from a metal stage such as stainless steel during transportation, and the yield rate is improved. It is a big factor to reduce.

  For this reason, it is indispensable to reduce electrification using a static eliminator. Therefore, a static eliminator has been used as a countermeasure against static electricity. In general, a static eliminator performs static elimination by applying a high voltage to the needle electrode, generating positive or negative ions, and irradiating the object to be neutralized by blowing air or the like. Many attempts have been made to improve the balance of the amount of ions generated (Patent Document 1).

  Conventionally, dust foreign matter has been a problem in semiconductor manufacturing processes, but in recent years, the problem of dust foreign matter has been solved by the advancement of fine particle removal technology. Therefore, at present, organic matter remaining in the process of semiconductors and the like has become a problem as semiconductor wiring is miniaturized and highly integrated, rather than problems caused by dust. In a display such as a liquid crystal display, there is a problem that display unevenness occurs due to a slight amount of organic matter contamination. As this residual organic matter, for example, phthalic acid ester and siloxane are problematic. Since these substances are added to the wiring coating agent and the interior material / resin resin agent, it is difficult to completely prevent the occurrence. Phthalates and siloxanes have a high boiling point, so their content in the atmosphere is slight, but they adhere to a semiconductor substrate or a liquid crystal wiring substrate in a small amount, causing problems.

  Therefore, in order to reduce organic substances in the environment, it is a general method to reduce residual organic substances using, for example, a chemical filter as in Patent Document 2 or a scrubber.

  Further, as a method of cleaning indoor spaces and generating negative ions for static elimination, Patent Document 3 examines a method of forming a dust filter and a photocatalyst and / or an adsorbent on a photoelectron emitting material and allowing indoor air to pass therethrough. Has been.

Japanese Patent Laid-Open No. 10-287996 (see paragraph 0021) JP 10-340874 A (see paragraph 0013) Japanese Unexamined Patent Publication No. 2000-300936 (see paragraph 0006)

  However, in the conventional static elimination method such as Patent Document 1, since a high voltage is applied, there is a concern about generation of NOx and ozone. Since it is necessary to install many static eliminators in the transport path, even if the amount of NOx, ozone, etc. generated by individual static eliminators is very small, installing many static eliminators in the process results in The amount produced was large, which could have an adverse effect on the human body.

  Further, even if a chemical filter is used as in Patent Document 2, organic substances continue to be generated in the process, and the organic substances generated in the process cannot be completely removed and remain. Further, the chemical filter is expensive, and there is a problem that the running cost due to the use of the chemical filter is high.

  In a method of forming a dust filter and a photocatalyst and / or an adsorbent on a photoelectron emitting material and passing indoor air as in Patent Document 3, after using a photocatalyst or an adsorbent to remove organic substances, A separate ion generator is provided. For this reason, there existed a fault that an apparatus became complicated and an apparatus became expensive.

  In view of the above problems, an object of the present invention is to provide an ion generator capable of removing electricity and removing organic substances in a manufacturing process of a semiconductor, a liquid crystal panel or the like.

In order to achieve the above object, the present invention generates H ₃ O ⁺ (H ₂ O) m as a positive ion and O ₂ ⁻ (H ₂ O) n (where m and n are 0 or a natural number) as a negative ion. The ion generating means is disposed opposite to the relatively movable object to be removed, and at the same time as the object to be discharged is discharged by the ions generated from the ion generating means, An ion generator for neutralizing and removing organic matter, characterized in that it removes organic matter existing on the surface of the subject to be neutralized or in the vicinity thereof.

  The ion generating means can generate positive or negative ions, only positive ions, or only negative ions. Among the generated positive and negative ions, ions having the opposite polarity to the charge charged on the object to be neutralized act on the object to be neutralized to neutralize the charged potential, thereby neutralizing the object to be neutralized. Is done.

In order to generate H ₃ O ⁺ (H ₂ O) m as positive ions and O ₂ ⁻ (H ₂ O) n as negative ions, the energy given to molecules in the air is about 5 eV. This can be achieved by adjusting the discharge energy. According to this apparatus, the generation amount of NOx, ozone, etc. is small, and even if a large amount is installed in the process, there is no problem due to NOx and ozone becoming harmful.

Moreover, hydrogen peroxide H ₂ O ₂ , hydrogen dioxide HO _2, or hydroxy radical / OH, which are active species, can be generated by the following chemical reactions (1) and (2) by both positive and negative ions, and the organic matter can be decomposed.

H ₃ O ⁺ + O ₂ ⁻ → OH + H ₂ O ₂ (1)
H ₃ O ⁺ + O ₂ ⁻ → HO ₂ + H ₂ O (2)

Thus, this ion generator can decompose | disassemble the organic substance which exists in the surface of the to-be-discharged object, or its vicinity simultaneously with the removal of to-be-charged object, such as a board | substrate. The organic substance refers to various chemical substances existing on the surface of the object to be neutralized such as a semiconductor or the like, and is not limited thereto, but includes phthalate ester and siloxane. It is done. These substances are continuously generated because they are added to the wiring coating agent and the resin agent of the interior material / device. However, according to the present invention, H ₃ O ⁺ (H ₂ O) m is used as positive ions. By generating O ₂ ^— (H ₂ O) n as the main ions as negative ions, these organic substances can be easily decomposed and removed simultaneously with static elimination. Organic substances with a large molecular weight such as phthalate esters adhere to the substrate because even if they are not completely decomposed to the level of CO ₂ or H ₂ O, some of the molecules are decomposed, resulting in a lower molecular weight and a lower boiling point. And the problem of organic contamination does not occur.

Examples of elements having a discharge mechanism for generating H ₃ O ⁺ (H ₂ O) m as positive ions and O ₂ ⁻ (H ₂ O) n as negative ions as main ions include creeping discharge elements and corona discharge elements. A plasma discharge element or the like can be mentioned, but is not limited thereto. Also, the shape and material of the electrode of the discharge element can be selected from any shape and material including a needle shape.

  The ion generating means can generate ions by various methods as described above, but it is preferable to generate ions using a creeping discharge method. If creeping discharge is used, ions can be generated at a lower voltage than a method of applying a voltage to the needle-like electrode.

  More specifically, as shown in FIG. 1, the dielectric 5 is sandwiched between the plate-shaped electrode 7 and the mesh-shaped electrode 6. By alternately applying positive and negative voltages to the plate-shaped electrode 7 by the power source 3, an electric field is concentrated on the end face of the mesh-shaped electrode 6, plasma discharge occurs in the air, and a plasma region A is formed. Both positive and negative ions are generated.

  The applied voltage necessary for generating and sending out these positive and negative ions is 2 to 10 kV, preferably 3 to 7 kV as a peak-to-peak voltage between the electrodes, depending on the structure of the ion generating element. It can be a range. With such a setting, discharge energy necessary for generating the ions can be obtained.

  In a method using a needle-like electrode, a high voltage of 7 kV or higher is generally applied, so that foreign matter adheres and accumulates easily, and periodic cleaning is necessary. However, in a creeping discharge method using a dielectric, a low voltage is required. Can be applied. For this reason, foreign matter is unlikely to accumulate, and there is an advantage that it is unnecessary to clean the discharge electrode. Further, since the voltage is low, there is an advantage that there is almost no risk of electric shock and it is safe. Furthermore, in the case of the acicular electrode method, it was necessary to use dry air as the air supplied to the periphery of the electrode to prevent abnormal discharge, but in the case of the creeping discharge method, ions can be generated at a low voltage, Air having a normal humidity of about 20 to 90% can be used, and the running cost can be reduced.

  The ion generating means is preferably provided with a positive ion generating part and a negative ion generating part separately. By separating the positive ion generation unit and the negative ion generation unit, the amount of ions generated can be increased. In general, in order to generate ions, an AC voltage or a pulse voltage is applied to the electrodes. In applying an alternating voltage, positive and negative voltages are alternately applied. In the application of the pulse voltage, a positive or negative pulse signal is output for a fixed time, and then a reverse polarity pulse signal is output for a fixed time, and positive and negative voltages are alternately applied. In this voltage application method, for example, since negative ions having opposite polarity are generated by the same electrode immediately after positive ions are generated by applying a positive voltage, there is a problem that positive ions and negative ions collide and easily recombine. there were.

  According to the present invention, since the positive ion generation unit and the negative ion generation unit are separated, the collision between the positive ions and the negative ions is reduced, and the recombination rate can be reduced. Binding of positive and negative ions is relaxed, and the amount of generated ions can be increased.

  Although arrangement | positioning of a positive ion generation part and a negative ion generation part is not limited, It is preferable to arrange | position alternately. It is possible to uniformly supply positive ions and negative ions to the object to be neutralized.

  A charge amount measuring means for measuring the charge amount of the object to be neutralized; and a control means for controlling the ion generation amount of the ion generating means. The control means is a positive ion based on a measurement result by the charge amount measuring means. It is preferable to adjust the amount of negative ions generated.

  Controls the amount of ions generated from the ion generating means based on the result of measuring the amount of charge by a device that measures the amount of charge of the object to be discharged. For example, the object to be discharged is negatively charged. If negative ions are generated, only positive ions are generated without generating negative ions, or the amount of positive ions generated relative to negative ions is increased. In this control method, a large amount of ions suitable for charge removal are generated depending on the charged state of the object to be discharged, so that the substrate can be discharged efficiently.

  The said ion generator is provided in the conveyance line which conveys a static elimination target object. The ion generator is arranged above or on the side of the object to be neutralized. When arrange | positioning to a side, a fan should be provided and ion should be sprayed on a static elimination target object. In the case of being arranged on the upper side, the ions are lowered by their own weight and can be supplied to the object to be neutralized. Then, ions generated from the ion generator act on the object to be neutralized conveyed on the conveyance line, and neutralization and organic substance removal are performed.

According to the present invention, H ₃ O ⁺ (H ₂ O) m as positive ions and O ₂ ⁻ (H as negative ions by adjusting the discharge energy so that the energy given to molecules in the air is about 5 eV. _{By generating 2} O) n as the main ions, it is possible to remove static electricity with little generation of harmful NOx, ozone, etc., and at the same time, hydroxy radicals (.OH), hydrogen peroxide generated by the reaction of positive and negative ions Purification of organic substances can be realized by the active species of (H ₂ O ₂ ) and hydrogen dioxide (HO ₂ ).

<Example 1>
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of an ion generator using a creeping discharge method, FIG. 2 is a schematic diagram of a static eliminator using the ion generator, and FIG. 3 is a test for confirming the organic substance removal effect by the positive and negative ion generator according to the present invention It is an explanation of the method.

  As shown in FIG. 1, the present ion generator 1 includes an ion generating element 2 that generates positive and negative ions, a power source 3 that supplies a high voltage to the ion generating element 2, and a control unit 4 that controls the output voltage of the power source 3. It consists of.

  The ion generating element 2 generates ions by a creeping discharge method. The ion generating element 2 includes a flat dielectric 5, an ion generating electrode 6 provided on the surface of the dielectric 5, and a voltage applying electrode 7 provided on the back surface. The ion generating electrode 6 is formed in a mesh shape, and the voltage applying electrode 7 is formed in a flat plate shape.

  The power source 3 is connected to the electrodes 6 and 7 of each ion generating element 2. The power source 3 is an AC power source that generates a high voltage sufficient to generate positive ions and negative ions.

  The control unit 4 is composed of a microcomputer, and adjusts the applied voltage to be output to the voltage application electrode 7 so as to obtain a set ion generation amount when the power supply 3 is turned on / off.

The mechanism of positive / negative ion generation of the ion generator 1 comprised in this way is demonstrated. A positive voltage and a negative voltage are alternately applied to the voltage application electrode 7, and electric lines of force are formed between both side surfaces of the mesh-like ion generation electrode 6 and the surface of the voltage application electrode 7. A plasma region A is formed along the lines of electric force. Then, positive and negative ions are generated by creeping discharge in the air. By applying an applied voltage of 2 to 10 kV, H ₃ O ⁺ (H ₂ O) m as positive ions and O ₂ ⁻ (H ₂ O) n as negative ions (where m and n are 0 or a natural number) are generated. To do.

  In FIG. 2, the static elimination apparatus 8 which has the organic substance removal function using the ion generator 1 is shown. The static elimination apparatus 8 is comprised from the ion generator 1 and the support body 9 which supports this. That is, the gate-shaped support body 9 is provided so as to straddle the stage 11 of the transfer line 10, and the plurality of ion generating elements 2 are arranged in a row on the lower surface of the support body 9 facing the stage 11. The plurality of ion generating elements 2 are arranged so as to face the object to be neutralized 12 placed on the stage 11 of the transport line 10. Each ion generating element 2 is connected in parallel to the power supply 3. Two static elimination devices 8 configured in this way are provided side by side along the transport direction.

  Positive and negative ions generated from the static eliminator 8 are pushed out by positive and negative ions generated one after another, and flow downward due to the pressure and the own weight. The object to be discharged is brought into contact with the object to be discharged 12 and the organic substance is decomposed simultaneously with the charge removal from the object to be discharged 12. Note that a fan may be provided above the support 9 so that positive and negative ions are forcedly blown into contact with the object to be neutralized 12.

(Charging effect test)
The following tests were conducted on the static eliminator 8 using the ion generator 1 configured as described above.

  A glass substrate 12 having a thickness of 465 mm × 360 mm and a thickness of 0.7 mm is conveyed by the conveyance line 3. The distance between the ion generating element 2 and the glass substrate 12 was adjusted to be 10 cm. Moreover, the conveyance line 10 conveyed in the fixed direction at the speed | rate of 20 cm / min. Two such static eliminators 8 were mounted side by side at intervals of 20 cm as shown in FIG.

The static eliminator 8 has eight ion generating elements arranged in a line. The ion generating element 2 has the structure shown in FIG. 1, and an alumina substrate is used as the material of the dielectric 5, and an AC waveform of 3.7 kV is applied as a peak-to-peak voltage between the electrodes. As a result of measuring the amount of generated ions using an air ion counter (Dan Kagaku Co., Ltd .: 83-1011B), the number of positive and negative ions in the vicinity of the substrate was 4 million / cm ³ . In addition, as a result of analyzing the ions generated from the present ion generating element 2 with a time-of-flight mass spectrometer, positive ions are H ₃ O + (H ₂ O) m and negative ions are O ₂ ⁻ (H ₂ O) n. there were.

  The substrate charge amount when passing through the lower part of the static eliminator 8 before operating the static eliminator 8 was -2.1 kV. On the other hand, the substrate charge amount after operating the two static elimination devices 8 was -0.6 kV, and the charge amount was greatly reduced. Therefore, it can be seen that the static eliminator 8 has a static elimination effect.

(Organic substance removal effect test)
Moreover, the following test was conducted in order to confirm the reduction effect of phthalate ester (DEP). As shown in FIG. 3, the present ion generating element 2 is attached to the inner surface of the side wall of a glass container 14 having a volume of about 16 liters placed on a mounting table 13, and a glass dish 15 in which DEP is placed inside the container 14 is attached. installed. Further, a fan 16 is provided so that the generated ions diffuse in the container 14. The container 14 is placed in a thermostatic chamber, left at 25 ° C. for 24 hours, the air inside is sucked through the suction sampling port 17, and a flow rate of 1 L / min is put into a glass tube containing the adsorbent TEAN TA (registered trademark). Then, air was passed through for 10 minutes to adsorb the vaporized DEP in the adsorbent. A bag filled with clean air was connected to the clean air inlet 18 so that the inside of the glass container 14 did not become negative pressure. For quantitative analysis of DEP adsorbed on the adsorbent, a gas chromatograph mass spectrometer (GC-MS apparatus) connected with a Curie Point Headspace Sampler (JHS-100A manufactured by Nippon Analytical Industries, Ltd.) was used. Set the adsorbent with DEP adsorbed on the sample heating section in the headspace sampler, heat it to 300 ° C, desorb it, collect it in a secondary adsorption tube cooled with liquid nitrogen, The sample was desorbed by heating for 20 seconds by a heating method, introduced into the GC-MS apparatus, and analyzed.

  As a result of measurement by this method, the concentration of DEP in the container was 3.2 ppb when the ion generator 1 was not operated. Next, after leaving the ion generator 1 to operate for 24 hours under the same conditions as described above, the DEP concentration was evaluated. As a result, the concentration of DEP was 1.1 ppb.

  From this result, it is clear that by generating positive and negative ions, the substrate can be neutralized and organic substances can be removed.

<Example 2>
The static eliminator 8 in the present embodiment is characterized in that a part of the plurality of ion generating elements 2 generates positive ions and the other ion generating elements 2 generate negative ions. The basic configuration is the same as that of the first embodiment. Thus, the amount of ion generation can be increased by independently providing a positive ion generation unit that generates positive ions and a negative ion generation unit that generates negative ions.

  Specifically, in a static eliminator in which a plurality of ion generating elements 2 are arranged in a line, a positive bias voltage is applied to half of the ion generating elements 2 and a positive AC voltage of 20 kHz is further applied. The peak-to-peak voltage of the AC waveform was 3.7 kV, and the bias voltage was set so that the lowest voltage was +0.1 kV. The remaining ion generating element 2 was applied with a negative bias voltage, and a negative 20 kHz AC voltage was further applied. The peak-to-peak voltage of the AC waveform was 3.7 kV, and the bias voltage was set so that the closest voltage to 0 was −0.1 kV. In addition, the ion generating element 2 to be applied positively and the ion generating element 2 to be applied negatively were arranged alternately.

As a result of disposing the static eliminator 8 configured in this way on the same conveyance line 3 as in Example 1, and measuring the ion concentration of the static eliminator 8 using an air ion counter (Dan Kagaku: 83-1011B), As a result of measurement at a position 10 cm from the ion generating element 2, both positive and negative ions were 9 million / cm ³ .

On the other hand, as a comparative example, a peak-to-peak voltage of 3.7 kV and a 20 kHz alternating voltage centered on 0 V were applied to the voltage application electrodes 7 of all the ion generating elements 2, and the ion concentration was measured in the same manner. As a result, 4 million pieces / cm ³ were obtained.

  From this result, the voltage applied to the ion generating element 2 is changed to a waveform that is positively or negatively biased from an alternating waveform that changes positively or negatively, and alternately arranged, so that high-concentration ions can be generated. It became clear that it is possible to carry out efficiently.

<Example 3>
In the third embodiment, a surface potential sensor for measuring the charge amount and the charge polarity of the object to be discharged is provided. The control unit 4 is characterized by adjusting the generation amount of positive ions and / or negative ions based on the measurement result by the surface potential sensor, and other configurations are the same as those in the first embodiment. The surface potential sensor is disposed in a non-contact manner on the object to be neutralized 12 on the upstream side in the transport direction from the ion generating element 2.

  When the surface potential sensor detects that the object 12 to be neutralized is negatively charged, the controller 4 biases the voltage application electrodes 7 of all the ion generating elements 2 negatively to drive them. When only positive ions are generated and the surface potential sensor detects that the object 12 to be discharged is positively charged, the voltage application electrodes 7 of all the ion generating elements 2 are positively biased and driven. By performing, it controls so that only a negative ion is generated. The driving conditions of the ion generating element 2 were the same as the conditions biased positively or negatively in Example 2. In the former case, the generation amount of positive ions with respect to negative ions may be increased, and in the latter case, the generation amount of negative ions with respect to positive ions may be increased. The voltage applied to the ion generating element 2 may be controlled according to the charge amount of the object 12 to be neutralized, and unnecessary power consumption can be reduced.

A case where the object to be neutralized 12 is negatively charged will be described. When the surface potential sensor detects that the object 12 to be neutralized is negatively charged, the control unit 4 applies a negative bias voltage to the voltage application electrodes 7 of all the ion generating elements 2. . The ion concentration of the static eliminator 8 at this time was measured at a position 10 cm from the ion generating element 2 using an air ion counter (Dan Kagaku Co., Ltd .: 83-1011B). As a result, 8 million positive ions / cm ^{3 were obtained.} The number of negative ions was 100 / cm ³ or less.

  Next, the charge amount of the substrate was evaluated under the same conditions as in Example 1 using the static eliminator 8. The substrate charge amount at the lower part of the static eliminator 8 before operating the static eliminator 8 was -2.1 kV, whereas the substrate charge amount after operating the static eliminator 8 was -0.2 kV, and the charge amount Was greatly reduced.

  From the above, in Example 1 in which an equal amount of both positive and negative ions was generated, the charge amount when the static eliminator 8 was operated was -0.6 kV, whereas this example in which only positive ions were generated. Then, the substrate charge amount after operating the static elimination device 8 is -0.2 kV, and it has become clear that the effect of generating a larger amount of positive ions suitable for static elimination of negative ions is great. .

  In addition, this invention is not limited to the said embodiment, Of course, many corrections and changes can be added to the said embodiment within the scope of the present invention. In the above embodiment, an AC power source is used as a current. However, the present invention is not limited to this, and a DC power source such as a battery or a battery may be used. By using such a power source, the portability of the static eliminator 8 is improved. When using a DC power supply, a positive DC power supply and a negative DC power supply are provided, and positive and negative voltages may be applied alternately by switching the DC power supply alternately.

  The ion generating elements 2 of the static eliminator 8 may be arranged in a plurality of rows. And you may assign a positive ion generation part and a negative ion generation part to each column by turns.

  Further, in the static eliminator 8 shown in FIG. 2, one of the upstream and downstream static eliminators 8 is for generating positive ions and the other is for generating negative ions, depending on the charge polarity of the object to be neutralized. Only one of the static eliminators 8 may be operated.

  Alternatively, one is used for charge removal, and either positive or negative ions are generated according to the charge polarity of the charge removal target. The other may be used for organic substance removal, and the generation of ions may be controlled so as to generate positive and negative ions.

  In the above embodiment, the object to be neutralized is moved with respect to the ion generator. However, the object to be neutralized is stationary and the ion generator is moved to bring the ions into contact with the object to be neutralized. It is also possible to perform static elimination and organic matter removal.

Configuration diagram of ion generator using creeping discharge method Schematic diagram of static eliminator using this ion generator Explanatory drawing of the test method for confirming the organic substance removal effect by the positive / negative ion generating element by this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ion generator 2 Ion generation element 3 Power supply 4 Control part 5 Dielectric body 6 Ion generation electrode 7 Voltage application electrode 8 Static elimination apparatus 9 Support body 10 Conveyance line 11 Stage 12 Electric discharge object (glass substrate)
13 Mounting table 14 Glass container 15 Glass dish 16 Fan 17 Suction sampling port 18 Clean air inlet A Plasma region

Claims (7)

Ion generating means for generating H ₃ O ⁺ (H ₂ O) m as positive ions and O ₂ ⁻ (H ₂ O) n (where m and n are 0 or natural numbers) as negative ions, Is arranged opposite to the movable object to be neutralized, and the ions generated from the ion generating means are used to neutralize the object to be neutralized, and at the same time, the organic substances present on or around the surface of the object to be neutralized are removed. An ion generator for removing static electricity and removing organic substances, characterized in that it is removed. The ion generation apparatus according to claim 1, wherein the ion generation unit generates ions using a creeping discharge method. The ion generator according to claim 1 or 2, wherein the ion generator includes a positive ion generator and a negative ion generator separately. 4. The ion generating apparatus according to claim 3, wherein the ion generating means includes positive ion generating units and negative ion generating units arranged alternately. A charge amount measuring means for measuring the charge amount of the object to be discharged, and a control means for controlling the ion generation amount of the ion generation means, the control means based on the measurement result by the charge amount measurement means, The ion generator according to claim 1, wherein the generation amount of positive ions and / or negative ions is adjusted. A neutralization device, wherein the ion generator according to any one of claims 1 to 5 is provided in a conveyance line that conveys an object to be neutralized. H ₃ O ⁺ (H ₂ O) m as a positive ion and O ₂ ⁻ (H ₂ O) n (where m and n are 0 or a natural number) are generated as a negative ion, and the positive ion and the negative ion A method of removing electricity and removing an organic substance, characterized by removing electricity from the object to be discharged and removing organic substances existing on or around the surface of the object to be discharged.

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