JP2010018402A - Workpiece conveyance device and workpiece conveyance method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece conveyance device capable of spreading substrates (workpieces) at a desired interval from each other during conveyance and accurately and easily aligning the substrates in a grid shape. <P>SOLUTION: This workpiece conveyance device includes a workpiece holding part 1a for attracting a plurality of ceramic substrates 20 and holding them in units of rows, a moving part 2 on whose end the workpiece holding part 1a is mounted, a movable column 3 suspended from the moving part 2, a Z shaft guide part 4 for elevatably supporting the movable column 3, an X shaft guide part 6 for advanceably/retreatably supporting the Z shaft guide part 4 along a guide rail 5, and a screw feeding mechanism (not shown) for driving the X shaft guide part 6 and the Z shaft guide part 4. The workpiece holding part 1a includes attracting parts 8a, 8b each having fifteen suction holes 7 bored in the vertical direction. The attracting parts 8a, 8b are advanceably/retreatably supported with respect to the X shaft direction by adsorbing part guide parts 13a, 13b mounted on side faces thereof. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an apparatus for transferring a plurality of workpieces arranged vertically and horizontally to a workpiece storage tray and a transfer method thereof, and more particularly to a plurality of ceramic substrates (workpieces) obtained by dividing a multi-piece wiring board into individual pieces. The present invention relates to a workpiece transfer apparatus capable of transferring in a batch for each row or block and a workpiece transfer method using the same.

Ceramic circuit boards (hereinafter simply referred to as ceramic boards) used in electronic devices and the like are generally divided into individual pieces of a multi-piece wiring board in order to improve the workability such as handling and processing during manufacturing. Manufactured. Usually, a large number of dividing grooves having a V-shaped cross section are formed in a grid pattern in advance on a multi-piece wiring board. That is, the multi-piece wiring board has a structure that can be divided vertically and horizontally along the dividing groove. The division is performed mechanically or manually using a jig or device.
Usually, a large number of ceramic substrates obtained by dividing a multi-piece wiring substrate are once transferred to a workpiece supply tray and then stored in a workpiece storage tray having a plurality of pockets formed at predetermined intervals. Is done. In addition, since the divided ceramic substrates are supplied to the workpiece supply tray in a disjointed state, when the ceramic substrate is taken out from the workpiece supply tray and transferred to the workpiece storage tray, for example, a transport device provided with a suction pad For example, it is necessary to suck the ceramic substrates one by one and take them out from the work supply tray. Therefore, the transfer operation of the ceramic substrate is not performed smoothly, and there is a possibility that the work efficiency is remarkably reduced.
In general, the work of transferring a workpiece in a production line or the like, not limited to a ceramic substrate, greatly affects the production efficiency. For this reason, various researches and developments have been made on techniques for efficiently transferring workpieces, and some inventions and devices have been disclosed so far.

For example, Patent Document 1 discloses an invention related to an improvement in an arrangement method of chip components such as electronic components used in OA equipment or the like under the name “chip component arrangement method”.
The invention disclosed in Patent Document 1 is a method of arranging a plurality of chip parts on a planar jig surface, and a supply part is provided in a storage part feeder in which a chip part storage tray is detachably installed. After the chip parts are sequentially supplied by the feeder and stored in an aligned state in the tray, the tray is removed and the chip part side of the tray is brought into close contact with the surface of the jig to which the adhesive is applied.
According to such a configuration, a large number of chip parts can be automatically arranged on the jig surface without using a robot. Therefore, the equipment cost can be reduced and the equipment space can be saved. Further, the arrangement speed of the chip parts can be increased about 10 times as compared with the case of using the robot.

In Patent Document 2, it is possible to separate and align the workpieces such as sintered parts conveyed on the belt conveyor so that the interval between them is constant under the name of “work interval alignment conveying device”. An invention relating to a possible transport apparatus is disclosed.
The invention disclosed in Patent Document 2 includes a belt conveyor that conveys a workpiece placed on a conveyance surface, and a guide roller that is spaced apart from the conveyance surface of the belt conveyor and supported rotatably in a horizontal plane. I have. The guide roller is structured to rotate according to a certain direction by a work contacting the outer peripheral surface.
According to such a structure, the workpiece that has rotated in contact with the guide roller moves in the width direction of the conveyor and is then released. At this time, since the time during which the workpiece is restrained by the guide roller is made uniform, the interval between the workpieces fed from the guide roller is also made uniform.
JP-A-6-31714 JP-A-9-208041

  In the invention disclosed in Patent Document 1 which is the above-described prior art, the rotation of the supply part feeder and the storage part feeder is used when aligning the chip parts. For example, it is difficult to align in a grid pattern.

  Moreover, in the invention disclosed in Patent Document 2, since a belt conveyor is required, there is a problem that the apparatus is increased in size. There is also a problem that the interval between the workpieces cannot be adjusted strictly.

  The present invention has been made in view of such a conventional situation, and can transfer a substrate (workpiece) to a desired interval during transfer and accurately and easily align it in a grid pattern. And a work transfer method using the same.

In order to achieve the above object, a workpiece transfer apparatus according to claim 1 is a workpiece transfer apparatus that adsorbs a plurality of workpieces arranged in a grid pattern and aligns them with an increased interval. It is possible to adjust the distance between the suction parts and the work holding part which is composed of a moving part arranged above the plurality of suction parts and a plurality of suction parts installed on the moving part and sucks and holds the work in rows. And a plurality of suction portion guide portions installed in the work holding portion.
In the workpiece transfer apparatus having the above-described configuration, after a plurality of workpieces are collectively sucked by the suction unit in units of columns, the workpieces are transferred while being expanded between the rows.

According to a second aspect of the present invention, in the workpiece transfer device according to the first aspect, the suction portion is attached to the moving portion so as to be movable in the row direction, and includes a plurality of suction units. A plurality of suction unit guide parts are installed in the work holding part so that the interval between them can be adjusted.
In the workpiece transfer apparatus having the above-described configuration, after a plurality of workpieces are collectively sucked by the suction unit in units of rows, there is an effect that the workpieces are transferred while being widened in the row direction and the direction orthogonal thereto.

According to a third aspect of the present invention, there is provided a workpiece transfer method including a step of sucking a plurality of workpieces arranged in a grid pattern for each row parallel to the first direction, and transferring the plurality of sucked workpieces. However, the step of expanding the rows, the alignment step of arranging a plurality of workpieces with the spaces expanded on the alignment tray, and the step of orthogonally crossing the plurality of workpieces arranged on the alignment tray in the first direction. The process of adsorbing for each row parallel to the two directions, the process of expanding the adsorbed workpieces while expanding the adsorbed workpieces, and storing the plural workpieces expanded between the columns in the storage tray And a storing step.
According to such a workpiece transfer method, a plurality of workpieces arranged in a grid pattern are stored in a pocket provided in the storage tray regularly and vertically with a predetermined interval and with a small number of transfers. .

According to a fourth aspect of the present invention, there is provided a workpiece transfer method including a step of sucking a plurality of workpieces arranged in a grid pattern for each row parallel to the first direction, and transferring the plurality of sucked workpieces. However, it is characterized by comprising a step of expanding the interval with respect to the row direction and a direction orthogonal thereto, and a storing step of storing a plurality of workpieces with the increased interval in the storage tray. .
According to such a workpiece transfer method, when a plurality of workpieces arranged in a grid pattern are stored in a pocket provided in a storage tray regularly and vertically at predetermined intervals, the invention according to claim 4. Compared to the above, the number of transfers is further reduced.

  In the workpiece transfer apparatus according to the first aspect of the present invention, it is possible to accurately adjust the interval in the row direction of the plurality of workpieces sucked by the suction portion. In addition, the apparatus can be reduced in size and price.

  In the workpiece transfer apparatus according to the second aspect of the present invention, it is possible to accurately adjust the interval between the plurality of workpieces sucked by the suction portion and the direction perpendicular thereto.

  According to the workpiece transfer method of the third aspect of the present invention, a plurality of workpieces can be efficiently and surely stored one by one in each of the pockets formed in a grid pattern on the workpiece storage tray. Is possible.

  According to the workpiece transfer method described in claim 4 of the present invention, the work of storing a plurality of workpieces one by one in a pocket formed in a grid pattern on the workpiece storage tray is more than the invention of claim 3. Furthermore, it can be performed efficiently and reliably.

  Hereinafter, examples of the workpiece transfer device according to the best mode of the present invention will be described with reference to FIGS. 1 to 7.

The workpiece transfer apparatus according to the present embodiment includes a workpiece holding unit supported so as to be movable in a horizontal plane and in the vertical direction, and a driving unit and a suction unit connected to the workpiece holding unit. Among these components, a work holding portion that plays an especially important role in the present invention will be described in detail below with reference to FIGS.
Fig.1 (a) is an external appearance perspective view of Example 1 of the workpiece transfer apparatus which concerns on embodiment of this invention, (b) and (c) are the front views and top views of a workpiece holding part, respectively. 2 (a) and 2 (b) are enlarged views of the cross section taken along the line AA in FIG. 1 (c), and FIG. 2 (c) is a diagram showing a state in which the suction portion has advanced in FIG. 1 (a). It is. In addition, in FIG. 1 (a) and FIG.2 (c), the workpiece holding part is simplified and displayed.
As shown in FIGS. 1A to 1C, in the workpiece transfer apparatus of this embodiment, the ceramic substrates 20 obtained from the divided multi-piece wiring substrate 18 are regularly provided in a vertical and horizontal direction with a predetermined interval. In addition, the apparatus is provided with a work holding unit 1a that sucks a plurality of ceramic substrates 20 and holds them in units of rows. As described above, the assembly of the ceramic substrates 20 is obtained by dividing the multi-cavity wiring 18 into individual pieces along the dividing grooves 19 formed in a grid pattern. The work holding unit 1 a is disposed above the aggregate of the ceramic substrates 20 and is attached to the end of the moving unit 2. A movable column 3 is supported by the moving unit 2 so as to be movable up and down by a Z-axis guide unit 4. The Z-axis guide unit 4 is supported by an X-axis guide unit 6 and is parallel to the X-axis. Thus, it can advance and retreat along the guide rail 5 installed in the main body of the workpiece transfer device. The X-axis guide unit 6 and the Z-axis guide unit 4 are driven by a screw feed mechanism (not shown) including a servo motor and a ball screw. Further, the support relationship between the X-axis guide portion 6 and the Z-axis guide portion 4 may be reversed. That is, the movable column 3 is supported by the X-axis guide portion 6 so as to be movable back and forth along the guide rail 5, and the guide rail 5 is supported so as to be movable up and down by the Z-axis guide portion 4 installed in the main body of the workpiece transfer device. It may be. Further, for example, the Y-axis guide part may be provided between the X-axis guide part 6 and the Z-axis guide part 4 so as to be movable in the Y-axis direction.
The work holding portion 1a is composed of suction portions 8a and 8b each having 15 suction holes 7 formed in the vertical direction, and suction pipes 9 and suction pads 10 are attached to the upper and lower ends of the suction holes 7, respectively. . The suction portions 8a and 8b have X-axis guide holes 11a on the side surfaces thereof, and suction portion guide portions 13a and 13b each having a built-in ball screw 12. The suction pipe 9 has suction means (not shown). It is connected. Therefore, when the suction pad 10 is brought into contact with the ceramic substrate 20 and the suction means is operated so that the inside of the suction hole 7 is set to a negative pressure, the ceramic substrate 20 for one row arranged in the Y-axis direction is attracted to the suction portions 8a and 8b. Each is adsorbed. In addition, a guide member 14a (see FIG. 2 (b)), which is fixed to the moving portion 2 at one end and installed so as to be parallel to the X-axis direction, is slidable inside the X-axis guide hole 11a. The suction portion guide portions 13a and 13b are guided by the guide member 14a and can be advanced and retracted.

  As shown in FIG. 2A, assuming that the positive direction of the X-axis is the front in the drawing, the workpiece transfer device of the present embodiment is rotatably supported by a ball bearing 15 incorporated in the suction portion guide portion 13a. And a ball screw 12 screwed into a female screw portion 16 formed in the suction portion guide portion 13b and a servo motor (not shown) for rotationally driving the ball screw 12, and a suction portion 8a The guide member 14 a is fixed to the moving unit 2. Accordingly, when the ball screw 12 is rotationally driven by the servo motor, the suction portion 8b moves forward or backward in the X-axis direction with respect to the suction portion 8a as shown in FIG. That is, when the suction portion 8b is advanced in the X-axis direction while the two rows of ceramic substrates 20 arranged in the Y-axis direction are sucked by one row by the suction portions 8a and 8b, the suction portions 8a and 8b The width of each row of the held ceramic substrates 20 is expanded as shown in FIG.

Next, in the workpiece transfer apparatus of this embodiment, a procedure for transferring a plurality of ceramic substrates 20 obtained by dividing the multi-piece wiring substrate 18 to the pockets of the workpiece storage tray will be described with reference to FIGS. explain.
FIGS. 3A and 3B are plan views of the multi-piece wiring board 18 and the work storage tray 22 in a divided state, respectively. 3C is a plan view of the ceramic substrate 20 transferred to the workpiece alignment tray 21. FIG. 3D is a plan view of the ceramic substrate 20 rotated 90 degrees in the horizontal plane together with the workpiece alignment tray 21. FIG. It is. Further, FIG. 4 is a block diagram showing a process of storing the ceramic substrate 20 in the pocket 23 of the work storage tray 22.
As shown in FIG. 3A, when the multi-piece wiring substrate 18 is divided along 14 dividing grooves 19 parallel to the X-axis direction and seven dividing grooves 19 parallel to the Y-axis direction, A total of 120 ceramic substrates 20 are obtained in a state where 15 rows are arranged in the direction and 8 rows are arranged in the Y-axis direction. When the ceramic substrates 20 are respectively stored in the pockets 23 of the workpiece storage tray 22 shown in FIG. 3B, the ceramic substrates 20 shown in FIG. 3A are usually transferred one by one to store the workpieces. Each is stored in a predetermined pocket 23 provided in the tray 22 for use. In this case, the ceramic substrate 20 is transferred 120 times.
On the other hand, in the workpiece transfer apparatus of the present embodiment, first, 15 ceramic substrates 20 arranged in the Y-axis direction from the divided multi-piece wiring substrate 18 shown in FIG. 8b is adsorbed two rows at a time (step S1 in FIG. 4). Next, while transferring the ceramic substrate 20 adsorbed by the adsorbing portions 8a and 8b, the space between the rows is expanded (step S2 in FIG. 4). Thereby, the interval between the rows of the ceramic substrates 20 in the X-axis direction becomes equal to the pitch (interval) in the Y-axis direction of the pockets 23 in the work storage tray 22 shown in FIG. Thereafter, these ceramic substrates 20 are transferred to the work alignment tray 21. In the case of the present embodiment, by repeating this transfer operation four times, all the ceramic substrates 20 are transferred to the workpiece alignment tray 21 as shown in FIG. 3C (step S3 in FIG. 4). Further, the ceramic substrate 20 is rotated 90 degrees together with the workpiece alignment tray 21 in a horizontal plane (step S4 in FIG. 4). Thereby, as shown in FIG. 3D, 120 ceramic substrates 20 are arranged in 8 rows in the Y-axis direction and 15 rows in the X-axis direction. Then, eight ceramic substrates 20 arranged in the Y-axis direction are sucked by the suction portions 8a and 8b, two rows at a time (step S5 in FIG. 4). In this case, the ceramic substrate 20 is sucked for each row parallel to the direction orthogonal to the row direction of the ceramic substrate 20 sucked in step S2. Further, while transferring the ceramic substrates 20 adsorbed by the adsorbing portions 8a and 8b, the space between the columns is expanded (step S6 in FIG. 4). Thereby, the interval between the rows of the ceramic substrates 20 in the X-axis direction becomes equal to the pitch (interval) in the X-axis direction of the pockets 23 in the work storage tray 22 shown in FIG. Thereafter, the workpiece is transferred to the work storage tray 22. In this embodiment, by repeating this transfer operation eight times, all the ceramic substrates 20 are stored in the work storage tray 22 in FIG. 3B (step S7 in FIG. 4).

As described above, in the workpiece transfer apparatus of the present embodiment, the ceramic substrates 20 arranged in a grid pattern are sucked together by the suction units 8a and 8b in a row unit, and then transferred while being expanded between the rows. Has the effect of In the present embodiment, all 120 ceramic substrates 20 are stored in the work storage tray 22 by four transfer operations in step S2 and eight transfer operations in step S7. That is, the time required for the operation of storing the ceramic substrate 20 in the work storage tray 22 is shortened as compared with the conventional method of transferring the ceramic substrates 20 one by one.
Here, the arrangement of the pockets 23 of the work storage tray 22 is 8 rows × 15 rows, and the number of the pockets 23 is equal to the number of the ceramic substrates 20. The number of substrates 20 need not be the same. That is, the number of workpieces transferred onto the workpiece alignment tray 21 may be adjusted according to the number of pockets 23 of the workpiece storage tray 22.

  As described above, in the workpiece transfer apparatus of the present embodiment, the ceramic substrate 20 obtained in the state of being arranged in a grid pattern by dividing the multi-piece wiring substrate 18 is transferred in an adsorbed state, and is regularly arranged vertically and horizontally. It can be efficiently stored with a small number of operations in each pocket 23 provided on the workpiece storage tray 22 with a predetermined interval. Further, since the suction portion 8b is driven by a screw feed mechanism composed of a servo motor and a ball screw 12 so as to be able to advance and retract with respect to the suction portion 8a, the suction portions 8a and 8b are arranged between the rows of ceramic substrates 20 to which the suction portions 8a and 8b are sucked. Can be adjusted accurately. Thus, the ceramic substrate 20 can be securely placed in the pockets 23 of the work storage tray 22 without changing the configuration of the apparatus for a plurality of work storage trays 22 having different pitches of the pockets 23 in the vertical direction or the horizontal direction. It can be stored. Further, since the screw feeding mechanism including the servo motor and the ball screw 12 has a simple structure, the apparatus can be reduced in size and cost.

In addition, the workpiece transfer apparatus of this invention is not limited to the case shown in a present Example. For example, the work holding unit 1a may have a structure including three or more suction units. Further, the location and number of the X-axis guide portions 6 and the number and pitch (interval) of the intake holes 7 are not limited to those shown in FIGS. 1 and 2 and can be changed as appropriate. Furthermore, you may use the 2 workpiece | work transfer apparatus arrange | positioned so that the moving direction of the adsorption | suction part 8b may orthogonally cross. In this case, the step of rotating the workpiece alignment tray 21 described with reference to FIG. Moreover, the installation of the workpiece holding unit 1a on the moving unit 2 is not limited to the end. That is, the work holding unit 1a may be installed at a location other than the end of the moving unit 2. Similarly, the suction portion guide portions 13a and 13b can be configured to be installed on other surfaces than the side surfaces of the suction portions 8a and 8b.
In addition, in order to store the ceramic substrate 20 in the workpiece alignment tray 21 with higher accuracy, the positional deviation of the ceramic substrate 20 aligned in the workpiece alignment tray 21 is positioned before being transferred to the workpiece storage tray 22. It is good also as a structure corrected using a jig | tool or a mechanism.
Further, when the size of the interval between the pockets 23 and the pockets 23 of the work storage tray 22 varies for each tray, the size of the interval between the pockets 23 and the pockets 23 of each tray is recognized by an image sensor or a displacement sensor, After correcting the position of the ceramic substrate 20 aligned on the alignment tray 21 to the recognized pocket position, the ceramic substrate 20 may be transferred to the workpiece storage tray 22.
In the present specification, the term “work” is used in a broad concept including not only a ceramic substrate but also all articles to be transferred in a production line such as a package or a green sheet. That is, the workpiece transfer apparatus of the present invention is not limited to the ceramic substrate, but is applied to the above-described transfer target products in general.

The workpiece transfer apparatus of the present embodiment will be described with reference to FIGS.
FIGS. 5A to 5C are a front view, a top view, and a side view, respectively, of a workpiece holding portion 1b in Example 2 of the workpiece transfer apparatus according to the embodiment of the present invention. 6 (a) to 6 (c) are partially enlarged views taken along the line BB in FIG. 5 (b). FIGS. 7A and 7B are front views showing a state where the ceramic substrate 20 is adsorbed in the work holding unit 1b of the second embodiment, and FIG. 7C is a top view of FIG. 7B. The components shown in FIGS. 1 to 3 are denoted by the same reference numerals, and the description thereof is omitted.
As shown in FIGS. 5A to 5C, the workpiece transfer apparatus according to the present embodiment is similar to the workpiece transfer apparatus according to the first embodiment, in which the suction portions 8a and 8b are configured by a plurality of suction units 17a and 17b. The side surfaces of the units 17a and 17b are provided with Y-axis guide holes 11b and suction unit guide portions 13c and 13d in which a ball screw 12 is incorporated, respectively. The suction portion 8a is attached to the moving portion 2 so as to be movable in the Y-axis direction. Further, the suction units 17a and 17b are respectively provided with suction holes 7 in the vertical direction, and suction pipes 9 and suction pads 10 are attached to the upper and lower ends of the suction holes 7, respectively. The guide member 14b is installed so as to be parallel to the Y-axis direction, and one end thereof is fixed to the end portions of the suction portions 8a and 8b. Furthermore, the guide member 14b is slidable inside the Y-axis guide hole 11b, and the suction unit guide portions 13c and 13d are guided by the guide member 14b and can advance and retreat in the Y-axis direction.

  As shown in FIG. 6 (a), in the workpiece transfer device of this embodiment, the rear half is rotatably supported by a ball bearing 15 built in the suction unit guide part 13d, and the front half is the suction unit guide part 13c. A ball screw 12a that is screwed into the female screw portion 16 formed on the ball screw and a ball bearing 15 incorporated in the suction unit guide portion 13c and a rear half portion thereof are rotatably supported and a front half portion is formed on the suction unit guide portion 13d. And a servo motor (not shown) that rotationally drives the ball screws 12a and 12b. One end of the guide member 14b is fixed to the suction portion guide portions 13a and 13b. ing. Therefore, when the ball screw 12a is rotationally driven by the servo motor, the suction unit 17a moves forward or backward in the Y-axis direction with respect to the suction unit 17b as shown in FIG. 6B. Further, when the ball screw 12b is rotationally driven by the servo motor, the suction unit 17b moves forward or backward in the Y-axis direction with respect to the suction unit 17a as shown in FIG. 6C. In this embodiment, the ball screws 12a and 12b are rotated in order, but the ball screws 12a and 12b are not necessarily rotated individually. That is, the ball screws 12a and 12b may be driven to rotate simultaneously.

  In the workpiece transfer apparatus having such a structure, as shown in FIG. 7A, after the suction portions 8a and 8b suck the two rows of ceramic substrates 20 arranged in the Y-axis direction one by one, the servo motor When the ball screws 12a and 12b are driven to rotate, the space between the suction units 17a and 17b in the Y-axis direction is increased as shown in FIG. 7B. At this time, if the ball screw 12 is also driven to rotate together, the interval in the X-axis direction of the suction units 17a and 17b is increased as shown in FIG. 7C.

  As described above, in the workpiece transfer apparatus according to the present embodiment, the plurality of ceramic substrates 20 are sucked by the suction units 17a and 17b, and the distance between the X-axis direction and the Y-axis direction during the transfer is screw feed mechanism. Thus, it is possible to accurately extend to a desired distance. Therefore, for example, the interval in the X-axis direction and the Y-axis direction of the ceramic substrate 20 is equal to the pitch (interval) in the Y-axis direction and the X-axis direction of the pockets 23 in the work storage tray 22 shown in FIG. Can be. According to such a method, the ceramic substrate 20 obtained by dividing the multi-piece wiring substrate 18 can be directly stored in the pocket 23 of the workpiece storage tray 22 without going through the workpiece alignment tray 21. Can do. This is equivalent to adding a step of expanding the intervals in the row direction and the direction orthogonal to the ceramic substrate 20 sucked by the suction units 17a and 17b instead of the steps S2 to S6 in FIG. To do. In this case, all 120 ceramic substrates 20 are stored in the work storage tray 22 by four transfer operations. That is, in the workpiece transfer apparatus of the present embodiment, the work of storing the plurality of ceramic substrates 20 divided from the multi-piece wiring substrate 18 in the workpiece storage tray 22 is performed in a shorter time than in the case of the first embodiment. It is possible.

  According to the first to fourth aspects of the present invention, a plurality of workpieces are sucked and held in a row unit or a block unit in various processing lines and conveyance lines, and transferred while increasing the interval between the workpieces. Applicable when necessary.

(A) is the external appearance perspective view of Example 1 of the workpiece transfer apparatus which concerns on embodiment of this invention, (b) and (c) are the front views and top views of a workpiece holding part, respectively. (A) And (b) is an enlarged view of the AA arrow directional cross section of FIG.1 (c), (c) is a figure which shows the state which the adsorption | suction part advanced in FIG.1 (a). (A) and (b) are plan views of a multi-piece wiring substrate and a substrate storage tray in a divided state, respectively. (C) is a plan view of a ceramic substrate transferred to a workpiece alignment tray. d) is a plan view of the ceramic substrate rotated 90 degrees in the horizontal plane together with the workpiece alignment tray. It is a block diagram which shows the process of accommodating a ceramic substrate in the pocket of a workpiece | work storage tray. (A) thru | or (c) are the front views, top views, and side views of a workpiece | work holding | maintenance part in Example 2 of the workpiece transfer apparatus which concerns on embodiment of this invention, respectively. (A) thru | or (c) is the figure which expanded the BB arrow directional cross section of FIG.5 (b) partially. (A) And (b) is a front view which shows the state which adsorb | sucked the ceramic substrate in the workpiece holding part of Example 2, (c) is a top view of the same figure (b).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1a, 1b ... Work holding part 2 ... Moving part 3 ... Movable column 4 ... Z-axis guide part 5 ... Guide rail 6 ... X-axis guide part 7 ... Intake hole 8a, 8b ... Adsorption part 9 ... Intake pipe 10 ... Adsorption pad 11a ... X-axis guide hole 11b ... Y-axis guide hole 12 ... Ball screw 12a, 12b ... Ball screw 13a, 13b ... Suction part guide part 13c, 13d ... Suction unit guide part 14a, 14b ... Guide member 15 ... Ball bearing 16 ... Female thread part 17a, 17b ... Suction unit 18 ... Multi-piece wiring board 19 ... Divided groove 20 ... Ceramic substrate 21 ... Work alignment tray 22 ... Work storage tray 23 ... Pocket

Claims (4)

  A workpiece transfer device that adsorbs a plurality of workpieces arranged in a grid pattern and aligns them with an increased interval, and a moving unit disposed above the workpiece, and a plurality of units installed in the moving unit A work holding unit configured by a suction unit and sucking and holding the workpieces in a row unit, and a plurality of suction unit guide units installed in the work holding unit so as to adjust an interval between the suction units. A workpiece transfer device.   The suction portion is attached to the moving portion so as to be movable in the row direction and is constituted by a plurality of suction units. A plurality of suction unit guides are provided on the side surface of the work holding portion so that the interval between the suction units can be adjusted. The work transfer device according to claim 1, wherein a part is installed.   A process of adsorbing a plurality of workpieces arranged in a grid pattern for each column parallel to the first direction, a step of expanding the columns while transferring the adsorbed workpieces, and a space between the columns An alignment step of arranging a plurality of spread workpieces on an alignment tray, and a step of adsorbing the plurality of workpieces arranged on the alignment tray for each row parallel to a second direction orthogonal to the first direction And a step of expanding the spaces between the plurality of workpieces while transferring the plurality of sucked workpieces, and a storing step of storing the plurality of workpieces having the spaces extended between the rows in a storage tray. Work transfer method. A step of sucking a plurality of workpieces arranged in a grid pattern for each row parallel to the first direction, and a distance from the row direction and a direction perpendicular thereto while transferring the sucked workpieces A workpiece transfer method comprising: a step of expanding each of the plurality of workpieces, and a storage step of storing a plurality of workpieces with the increased spacing in a storage tray.