JP2010016040A - Magnetic detecting element, method of manufacturing magnetic detecting element, and magnetic body detecting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-quality magnetic detecting element which is excellent in manufacture efficiency without needing expensive facilities or device, and to provide a method of manufacturing the magnetic detecting element. <P>SOLUTION: The magnetic detecting element includes a magnetism sensing unit 20 which is made of an amorphous magnetic material 22 and varies in impedance with an external magnetic field H, and a substrate 10 fitted with the magnetism sensing unit 20, wherein the magnetic detecting element is configured such that the longitudinal direction of the magnetism sensing unit 20 is made parallel to the rolling direction of the amorphous magnetic material 22 and the direction of the external magnetic field H. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a magnetic detection element, a method of manufacturing a magnetic detection element, and a magnetic body detection method. More specifically, the present invention relates to a magnetic detection element including a magnetic sensing section using a magnetic impedance effect, a method of manufacturing the same, and such a method. The present invention relates to a magnetic substance detection method using a magnetic detection element.

  2. Description of the Related Art A magnetic detection element (magnetic sensor) that detects the position and amount of movement of a detection target by attaching a magnetic body to the detection target such as a rotating object or a moving object and detecting a change in an external magnetic field is known. ing.

  As described in Patent Document 1, for example, the magnetic detection element is formed by forming a magnetosensitive part having a magnetic impedance effect on a substrate made of a non-magnetic material made of ceramic or the like. Various magnetic materials can be applied to the magnetic sensing portion. As an example, a magnetic detecting element using an amorphous foil obtained by rolling an amorphous magnetic material with a roll is known. This type of magnetic detection element is configured by cutting (cutting) this amorphous foil into a predetermined shape (the shape of the magnetic sensing portion) and attaching (pasting) it onto the non-magnetic substrate.

JP 2001-358378 A

  However, the magnetic detection element having such a magnetic sensing portion using an amorphous foil has the following problems.

  First, for example, there is a problem that the sensor sensitivity, that is, the magnetic impedance characteristics of the magnetosensitive part varies from product to product, compared to a magnetic sensing element in which the magnetosensitive part is formed by, for example, amorphous wire or vapor deposition. . Second, there is a problem that the sensor sensitivity varies depending on the direction in which the magnetic detection element is attached. Therefore, depending on the product, there is a problem that the required sensor sensitivity cannot be obtained.

  In view of the above problems, the problem to be solved by the present invention is a magnetic detection element capable of stabilizing the impedance characteristics of the magnetic sensing portion with a simple configuration, a method of manufacturing the magnetic detection element, and such a magnetic field. An object of the present invention is to provide a magnetic substance detection method using a detection element.

  The inventors of the present invention are that the rolling direction of the amorphous magnetic material constituting the magnetic sensitive part affects the impedance characteristic of the magnetic sensitive part, and this causes variations in the impedance characteristic of each product. I found out. Specifically, it has been found that when the longitudinal direction of the magnetic sensitive part is parallel to the rolling direction of the amorphous magnetic material constituting the magnetic sensitive part, the impedance characteristic of the magnetic sensitive part is most improved. Furthermore, it has been found that the impedance characteristics of the magnetic sensitive part can be improved by positioning the longitudinal direction of the magnetic sensitive part parallel to the direction of the external magnetic field.

  The magnetic sensing element according to the present invention completed based on this knowledge is a magnetic sensing element comprising an amorphous magnetic material, a magnetic sensing part whose impedance is changed by an external magnetic field, and a substrate to which the magnetic sensing part is attached. The gist of the present invention is that the longitudinal direction of the magnetically sensitive portion is parallel to the rolling direction of the amorphous magnetic material.

  The magnetic detection element according to the present invention is characterized in that the longitudinal direction of the magnetic sensing part is parallel to the direction of the external magnetic field.

  As described above, the magnetic sensing part of the magnetic sensing element according to the present invention is provided on the substrate so that the longitudinal direction thereof is parallel to the rolling direction of the amorphous magnetic material. (Sensor sensitivity) can be improved and stabilized. In addition, since the longitudinal direction of the magnetic sensing part is positioned parallel to the direction of the external magnetic field, the impedance characteristic of the magnetic sensing part can be further improved.

  In this case, the terminal part connected to the magnetic sensitive part may be formed of a nonmagnetic material.

  Thereby, since only the magnetic sensing part is comprised with the magnetic material, a magnetic detection element suppresses that the external magnetic field which is a measuring object changes with magnetic detection elements itself. This leads to improved sensor sensitivity of the magnetic detection element and prevention of erroneous detection.

  Moreover, the hook part by which the said magnetically sensitive part is hooked should just be formed in the said board | substrate.

  Thereby, the magnetic sensitive part can be attached to the substrate in a state where tension is applied to the magnetic sensitive part by hooking the magnetic sensitive part to the hooking part formed on the substrate. Therefore, it is possible to prevent distortion and wrinkles from occurring in the magnetic sensitive part, and the magnetic impedance characteristic of the magnetic sensitive part is stabilized.

  In addition, it is preferable that the magnetic sensing portion is provided on one surface of the substrate, and the terminal portion and the connection portion of the magnetic sensing portion and the terminal portion are provided on the other surface.

  As a result, the surface provided with the magnetic sensing portion does not swell due to solder, welding marks or the like generated by electrically connecting the magnetic sensing portion or the electric wire to the terminal portion. In other words, compared to the case where the magnetic sensing part and the terminal part are formed on the same plane, the magnetic sensing element can be arranged with the magnetic sensing part as close as possible to the detection target (magnetic material), so that the detection target Object detection accuracy is improved.

  In order to solve the above problems, a method of manufacturing a magnetic sensing element according to the present invention includes a magnetic sensing portion made of an amorphous magnetic material, the impedance of which varies with an external magnetic field, and a substrate to which the magnetic sensing portion is attached. It is a manufacturing method of a detecting element, and includes a magnetic sensitive part attaching step for attaching the magnetic sensitive part to the substrate with the longitudinal direction of the magnetic sensitive part parallel to the rolling direction of the amorphous magnetic material.

  And the manufacturing method of the magnetic detection element which concerns on this invention makes it a summary to make the longitudinal direction of the said magnetic sensing part parallel to the direction of the said external magnetic field in the said magnetic sensing part attachment process.

  According to this method of manufacturing a magnetic sensing element according to the present invention, in the magnetic sensing part mounting step of attaching the magnetic sensing part to the substrate, the longitudinal direction of the magnetic sensing part is parallel to the rolling direction of the amorphous magnetic material and the direction of the external magnetic field. Since the magnetic sensor is mounted so as to be positioned, a stable magnetic detection element having a high impedance characteristic of the magnetic sensing portion and a stable value can be obtained.

  In this case, in the magnetic sensing part attaching step, the magnetic sensing part may be attached to the substrate in a state where the magnetic sensing part is hooked on a hooking part formed on the substrate and tension is applied to the magnetic sensing part.

  As described above, in the magnetic sensitive part forming step, if the magnetic sensitive part is attached to the substrate in a state where tension is applied to the magnetic sensitive part, the magnetic sensitive part is prevented from being distorted or wrinkled. A magnetic detecting element having a stable magnetic impedance characteristic of the magnetic part can be obtained. In addition, the hooking portion formed on the substrate improves the workability of attaching the magnetic sensitive portion to the substrate in a state where tension is applied to the magnetic sensitive portion.

  A magnetic substance detection method according to the present invention is a magnetic substance detection method using a magnetic detection element that is made of an amorphous magnetic material and includes a magnetic sensitive part whose impedance is changed by an external magnetic field generated from the magnetic substance. The gist is to make the longitudinal direction of the magnetic part parallel to the rolling direction of the amorphous magnetic material.

  The gist of the magnetic detection method according to the present invention is to make the longitudinal direction of the magnetic sensing part parallel to the direction of the external magnetic field.

  According to the magnetic body detection method of the present invention, since the magnetic detection element is provided so that the longitudinal direction of the magnetic sensitive portion is parallel to the rolling direction of the amorphous magnetic material and the direction of the external magnetic field, the detection accuracy is improved. Thus, it is possible to reliably detect the magnetic body that is the detection target.

  According to the magnetic sensing element of the present invention, the magnetic sensing part of the magnetic sensing element is provided on the substrate so that the longitudinal direction thereof is parallel to the rolling direction of the amorphous magnetic material. It is possible to improve and stabilize the impedance characteristics (sensor sensitivity). In addition, since the longitudinal direction of the magnetic sensing part is positioned parallel to the direction of the external magnetic field, the impedance characteristic of the magnetic sensing part can be further improved.

  Hereinafter, embodiments of a magnetic detection element according to the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is an external perspective view of a magnetic detection element 1 according to the first embodiment. The magnetic detection element 1 according to the present embodiment includes a substrate 10, and a magnetic sensing unit 20 and a terminal unit 30 attached on the substrate 10.

  The substrate 10 is a rectangular substrate made of a nonmagnetic material. Examples of the non-magnetic material constituting the substrate 10 include ceramic and glass, and may be formed of an epoxy resin or the like as long as sufficient rigidity can be obtained.

  The magnetosensitive part 20 is formed of an amorphous magnetic material, and a change in the external magnetic field is detected by its magnetic impedance characteristics. Examples of the amorphous magnetic material include cobalt-based or iron-based amorphous alloys. Specifically, as a cobalt system, amorphous alloys such as Co-Fe-Ni-Mo-B-Si and Co-Fe-Ni-B-Si, and as an iron system, Fe-B-Si, Fe-B Examples include amorphous alloys such as -Si-C, Fe-B-Si-Cr, Fe-Co-B-Si, and Fe-Ni-Mo-B.

  In the present embodiment, the magnetic sensing unit 20 includes a first magnetic sensing unit 201 and a second magnetic sensing unit 202, which will be described later. The magnetic sensing unit 20 as a whole is a single elongated linear amorphous foil. Consists of. This amorphous foil is formed by rolling the amorphous magnetic material. And the magnetic sensitive part 20 is attached to the board | substrate 10 so that the longitudinal direction (X direction in FIG. 1) may become in parallel with the rolling direction of an amorphous magnetic material.

  The magnetic sensitive part 20 is electrically connected to the terminal part 30. The terminal unit 30 includes a first terminal unit 301, a second terminal unit 302, and a third terminal unit 303. Each of the terminal portions 301 to 303 includes end portions 301a to 303a and land portions 301b to 303b at both ends. Then, one end 20 a of the magnetic sensing unit 20 is connected to the end 301 a of the first terminal unit 301. The other end 20 b of the magnetic sensing unit 20 is connected to the end 302 a of the second terminal unit 302. A central portion 20 c in the longitudinal direction of the magnetic sensitive portion 20 is connected to the end portion 303 a of the third terminal portion 303. In addition, as this connection method, soldering, welding, etc. are mentioned, for example. In particular, the connection method by welding is more preferable because the portion that undergoes phase transition (may cause deterioration in sensitivity) by suppressing heat conduction can be reduced.

  Moreover, the terminal part 30 is formed from the nonmagnetic material which has electrical conductivity. Thereby, in the magnetic detection element 1, only the magnetic sensing portion 20 is made of a magnetic material, and thus the magnetic detection element 1 itself (for example, generated from the terminal portion 30 when the terminal portion 30 is formed of a magnetic material). The external magnetic field that is the measurement object is prevented from being changed by the magnetic field to be measured. Therefore, the above configuration leads to improvement in sensor sensitivity of the magnetic detection element 1 and prevention of erroneous detection.

  The magnetic detection element 1 according to the present embodiment is a so-called differential magnetic detection element. Specifically, the magnetic sensing unit 20 includes a first magnetic sensing unit 201 connected to the first terminal unit 301 and the third terminal unit 303, a second terminal unit 302, and a third terminal unit 303. The second magnetic sensing unit 202 connected to the first magnetic sensing unit 201 and the second magnetic sensing unit 202 to obtain a differential output so that an output of about twice is obtained. It is configured. That is, the first terminal portion 301 and the third terminal portion 303 are output terminals to which an impedance meter (or impedance measurement circuit) is connected, and the third terminal portion 303 is connected to the first magnetic sensitive portion 201. This is a common terminal used for taking a differential with the second magnetic sensing unit 202.

  The manufacturing method of the magnetic detection element 1 configured as described above is as follows. First, as shown in FIG. 2A, the terminal portion 30 is formed on one surface of the substrate 10. An example of a method for forming the terminal portion 30 is a method in which a metal foil having electrical conductivity is attached to the substrate 10 and formed into a predetermined pattern as illustrated by photolithography (terminal portion formation). Process).

  Then, as shown in FIG. 2A to FIG. 2B, the first linear terminal portion 301 to the third terminal portion are formed by welding the elongated linear amorphous magnetic material 22 to be the magnetic sensitive portion 20 by welding or the like. It connects with the edge parts 301a-303a of 303. FIG. At this time, the connection is made so that the rolling direction of the amorphous magnetic material 22 is parallel to the longitudinal direction of the magnetic sensitive portion 20. After the amorphous magnetic material 22 is connected, the excess portion (the portion outside the one end 20a and the other end 20b) is cut (magnetic sensing portion attaching step). Thereby, the magnetic detection element 1 is obtained.

  According to the magnetic sensing element 1 configured as described above, the magnetosensitive part 20 is attached so that the longitudinal direction thereof is parallel to the rolling direction of the amorphous magnetic material 22, and thus the impedance of the magnetosensitive part 20. The characteristic (sensor sensitivity of the magnetic detection element 1) is high and stable.

(Second embodiment)
FIG. 3 is an external perspective view of the magnetic detection element 2 according to the second embodiment. Similarly to the first embodiment, the magnetic detection element 2 according to the second embodiment includes the substrate 40, and the magnetic sensing unit 20 and the terminal unit 30 attached on the substrate 40, and only the configuration of the substrate 40 is provided. Different from the first embodiment. Hereinafter, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The substrate 40 included in the magnetic detection element 2 is a rectangular substrate made of a non-magnetic material, and has notches 421 and 422 having predetermined widths from one side surface (both side surfaces parallel to the longitudinal direction of the terminal portion 30). This is different from the first embodiment in that it corresponds to a hooking portion in the present invention. The notches 421 and 422 are formed such that the longitudinal direction thereof is located on the same straight line as the longitudinal direction of the magnetic sensing unit 20.

  Using this notch 421, 422, the magnetic detection element 2 is manufactured as follows. First, the terminal part 30 is formed on the board | substrate 40 by the terminal part formation process similar to 1st embodiment. Then, in the magnetic sensing portion mounting step, the amorphous magnetic material 22 is hooked on the notches 421 and 422, and tension is applied to the ends 301a to 303a of the first to third terminal portions 301 to 303 by welding or the like. Connect to. At this time, the amorphous magnetic material 22 is connected so that the rolling direction is parallel to the longitudinal direction of the magnetic sensitive portion 20.

  As described above, when the amorphous magnetic material 22 is attached to the substrate 40, the amorphous magnetic material 22 can be easily attached to the substrate 40 in a state where the amorphous magnetic material 22 is tensioned by being hooked on the notches 421 and 422. Therefore, it is possible to prevent distortion and wrinkle from occurring in the magnetic sensing part 20 and to stabilize the magnetic impedance characteristics of the magnetic sensing part 20. Similarly to the first embodiment, the magnetic sensitive part 20 is mounted so that its longitudinal direction is parallel to the rolling direction of the amorphous magnetic material 22, so that the impedance characteristic of the magnetic sensitive part 20 is high. And stable.

(Third embodiment)
FIG. 4 is an external perspective view of the magnetic detection element 3 according to the third embodiment. Similarly to the first and second embodiments, the magnetic detection element 3 according to the third embodiment includes a substrate 50, and a magnetic sensing unit 20 and a terminal unit 30 mounted on the substrate 50. Only the configuration is different from the first and second embodiments. Hereinafter, the same components as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  The substrate 50 included in the magnetic detection element 3 is a rectangular substrate made of a nonmagnetic material. As shown in the drawing, each of the end portions 301 a and 302 a of the first terminal portion 301 and the second terminal portion 302 is provided. It differs from the first embodiment in that insertion holes 521 and 522 (corresponding to the hooking portions in the present invention) are formed on the outside (not the notches 421 and 422 but the second embodiment, This is different in that insertion holes 521 and 522 are formed.

  Using the insertion holes 521 and 522, the magnetic detection element 3 is manufactured as follows. First, the terminal part 30 is formed on the board | substrate 50 by the terminal part formation process similar to 1st, 2nd embodiment. Then, in the magnetic sensing portion mounting step, the amorphous magnetic material 22 is inserted through the insertion holes 521 and 522 and hooked, and the tension is applied to the end portions of the first to third terminal portions 301 to 303 by welding or the like. Connect to 301a-303a. At this time, the amorphous magnetic material 22 is connected so that the rolling direction is parallel to the longitudinal direction of the magnetic sensitive portion 20.

  As described above, when the amorphous magnetic material 22 is attached to the substrate 50, the amorphous magnetic material 22 can be attached to the substrate 50 in a state where tension is applied to the amorphous magnetic material 22 by being hooked in the insertion holes 521 and 522. Therefore, similarly to the second embodiment, distortion and wrinkles are prevented from occurring in the magnetic sensitive part 20, and the magnetic impedance characteristic of the magnetic sensitive part 20 can be stabilized. Similarly to the first and second embodiments, the magnetosensitive part 20 is mounted so that its longitudinal direction is parallel to the rolling direction of the amorphous magnetic material 22, and thus the impedance of the magnetosensitive part 20. The characteristics are high and stable.

(Fourth embodiment)
FIG. 5 is an external perspective view of the magnetic detection element 4 according to the fourth embodiment. Here, FIG. 5A is an external view showing a surface on which the terminal portion 30 is formed, and FIG. 5B is an external view showing a surface on which the magnetic sensitive portion 60 is formed. As in the first to third embodiments, the magnetic detection element 4 according to the fourth embodiment has a substrate 70 and a terminal attached to one surface of the substrate 70 (hereinafter referred to as a terminal surface 741). Part 30 and a magnetic sensing part 60 (first magnetic sensing part 601 and second magnetic sensing part 602) attached to the other surface (hereinafter referred to as sensor surface 742). Here, since the terminal portion 30 has the same configuration as that of the first to third embodiments, the same reference numeral is given and the description thereof is omitted.

  The substrate 70 included in the magnetic detection element 4 has insertion holes 721 and 722 formed outside the end portions 301 a and 302 a of the first terminal portion 301 and the second terminal portion 302. Further, insertion holes 723 and 724 are formed on both sides of the end portion 303a of the third terminal portion 303 (the insertion holes 721 to 724 correspond to the hooking portions in the present invention).

  The magnetic detection element 4 is manufactured as follows using the insertion holes 721 to 724. First, the terminal part 30 is formed on the board | substrate 50 by the terminal part formation process similar to 1st-3rd embodiment. Then, as shown in FIG. 6A, in the magnetic sensitive part attaching step, the amorphous magnetic material 22 is inserted so as to be sewn in the order of the insertion holes 721, 723, 724, 722 (which may be reversed). At this time, the amorphous magnetic material 22 between the insertion holes 721 and 723 and between the holes 724 and 722 is inserted so as to be positioned on the sensor surface 742. In this embodiment, as can be seen from FIG. 5B, the portion located between the insertion holes 721 and 723 becomes the first magnetic sensing portion 601 and the portion located between the insertion holes 724 and 722 is the second. The magnetic sensing part 602 becomes.

  Subsequently, as shown in FIGS. 6B and 6C, the amorphous magnetic material 22 is bent inward and pulled, and the first terminal portion 301 and the second terminal portion 302 are in tension. The end portions 301a and 302a are connected by welding or the like, and excess portions are cut. And the part which overlaps with the edge part 303a of the 3rd terminal part 303 located between the insertion holes 723 and 722 is connected by welding etc. FIG. Thereby, the first magnetic sensing part 601 is electrically connected to the first terminal part 301 and the third terminal part 303, and the second magnetic sensing part 602 is connected to the second terminal part 302 and the third terminal part 303. The terminal portion 303 is electrically connected. Moreover, in this magnetic sensing part attachment process, it connects so that the rolling direction of the amorphous magnetic material 22 may become parallel to the longitudinal direction of the magnetic sensing part 60 similarly to 1st-3rd embodiment.

  According to the magnetic detection element 4 thus obtained, the sensor surface 742 provided with the magnetic sensing portion 60 has a magnetic sensitivity on the end portions 301a to 303a and the land portions 301b to 303b of the terminal portions 301 to 303. Swelling such as solder and welding marks caused by electrically connecting the portion 60 and the electric wire does not occur (swelling such as solder and welding marks occurs on the terminal surface 741). That is, as compared with the case where the magnetic sensing part 60 and the terminal part 30 are formed on the same plane, the magnetic sensing element 4 can be arranged with the magnetic sensing part 60 as close as possible to the detection target (magnetic body). Therefore, the detection accuracy can be greatly improved.

  Further, when the amorphous magnetic material 22 is attached to the substrate 70, the amorphous magnetic material 22 can be attached to the substrate 70 in a state where tension is applied to the amorphous magnetic material 22 by being hooked in the insertion holes 721 to 724. Therefore, similarly to the second and third embodiments, distortion and wrinkles are prevented from occurring in the magnetic sensing part 60, and the magnetic impedance characteristics of the magnetic sensing part 60 can be stabilized. Similarly to the first to third embodiments, the magnetic sensitive part 60 is mounted so that the longitudinal direction thereof is parallel to the rolling direction of the amorphous magnetic material 22, and thus the impedance of the magnetic sensitive part 60. The characteristics are high and stable.

  As shown in FIG. 7A for the first to third embodiments and FIG. 7B for the fourth embodiment, the magnetic detection elements 1 to 4 according to the above-described embodiment are detected objects. The magnetic body 20 is mounted on various devices so that the longitudinal direction of the magnetic sensitive portion 20 (60) (the rolling direction of the amorphous magnetic material 22) is parallel to the direction of the external magnetic field H generated by the magnetic body. This is because the impedance characteristics of the magnetic sensing unit 20 (60) can be improved and the detection accuracy of the detection target can be improved as described in the following embodiments.

  Hereinafter, the present invention will be described in detail using examples.

  As described in the above embodiment, a magnetic detection element (Example) was prepared in which the longitudinal direction of the magnetic sensitive part was positioned parallel to the rolling direction of the amorphous magnetic material (inclination 0 degree). Further, as comparative examples, the longitudinal direction of the magnetic sensing portion of the magnetic detection element is inclined 45 degrees with respect to the rolling direction of the amorphous magnetic material (Comparative Example 1), and the longitudinal direction is inclined 90 degrees (Comparative Example 2). Created.

  For these examples and comparative examples, the change in impedance was measured when the magnitude of the external magnetic field was changed. The results are shown in FIGS. Here, FIG. 8 shows the measurement results when the longitudinal direction of the magnetic sensitive part is perpendicular to the direction of the external magnetic field, and FIG. 9 shows the longitudinal direction of the magnetic sensitive part parallel to the direction of the external magnetic field. It is a measurement result in the case of.

(Relationship between longitudinal direction of magnetic sensing part and rolling direction of amorphous magnetic material)
As can be seen from FIG. 8 and FIG. 9, there was a tendency that the smaller the inclination of the longitudinal direction of the magnetic sensitive portion with respect to the rolling direction of the amorphous magnetic material, the greater the impedance change. Therefore, in order to improve the sensor sensitivity, it can be said that the longitudinal direction of the magnetic sensing portion of the magnetic detection element is preferably positioned in parallel with the rolling direction of the amorphous magnetic material.

(Relationship between longitudinal direction of magnetic sensing part and direction of external magnetic field)
As can be seen by comparing FIG. 8 and FIG. 9, a larger impedance change is obtained when the magnetic field is applied in parallel than when the magnetic field is applied perpendicular to the longitudinal direction of the magnetic sensing portion. I understood that.

  As described above, when the longitudinal direction of the magnetic sensing part is positioned parallel to the rolling direction of the amorphous magnetic material and the direction of the external magnetic field, the impedance change becomes the largest, that is, the magnetic sensing element having the best sensor sensitivity. Was found to be obtained.

  Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention.

  In the present embodiment, it has been described that the magnetic sensing portion is formed in an elongated linear shape, but may be formed in other shapes, for example, a zigzag folded shape. The technical idea of the present invention can also be applied to a so-called non-differential magnetic detection element having a single magnetic sensing portion.

1 is an external perspective view of a magnetic detection element according to a first embodiment of the present invention. It is the schematic for demonstrating the manufacturing method of the magnetic detection element which concerns on 1st embodiment shown in FIG. It is an external appearance perspective view of the magnetic detection element which concerns on 2nd embodiment of this invention. It is an external appearance perspective view of the magnetic detection element which concerns on 3rd embodiment of this invention. FIG. 5A is an external perspective view of a magnetic detection element according to a fourth embodiment of the present invention, FIG. 5A is a surface (terminal surface) on which a terminal portion is formed, and FIG. 5B is a magnetic sensitive portion. The surface (sensor surface) is shown. It is the schematic for demonstrating the manufacturing method of the magnetic detection element which concerns on 4th embodiment shown in FIG. It is the schematic for demonstrating the relationship between the longitudinal direction of the magnetic sensing part with which a magnetic detection element is provided, and the direction of an external magnetic field, Fig.7 (a) is FIG.7 (b) about 1st-3rd embodiment. ) Is a diagram for explaining the fourth embodiment. It is a measurement result of the magnetic impedance change in the case where the longitudinal direction of the magnetic sensing portion provided in the magnetic detection element is perpendicular to the direction of the external magnetic field. It is a measurement result of the magnetic impedance change in the case where the longitudinal direction of the magnetic sensing portion provided in the magnetic detection element is parallel to the direction of the external magnetic field.

Explanation of symbols

1 Magnetic detection element (first embodiment)
DESCRIPTION OF SYMBOLS 10 Board | substrate 20 Magnetosensitive part 2 Magnetic detection element (2nd embodiment)
40 Substrate 421, 422 Notch (Hook)
3 Magnetic sensing element (third embodiment)
50 Substrate 521, 522 Insertion hole (hook)
4. Magnetic detection element (fourth embodiment)
60 Magnetosensitive part 70 Substrate 721-724 Insertion hole (hook part)

Claims (10)

A magnetic sensing element comprising an amorphous magnetic material and having a magnetic sensing portion whose impedance changes due to an external magnetic field, and a substrate to which the magnetic sensing portion is attached,
The magnetic sensing element according to claim 1, wherein a longitudinal direction of the magnetic sensitive portion is parallel to a rolling direction of the amorphous magnetic material.   The magnetic detection element according to claim 1, wherein a longitudinal direction of the magnetic sensing part is parallel to a direction of the external magnetic field.   The magnetic detection element according to claim 1, wherein a terminal portion connected to the magnetic sensing portion is made of a nonmagnetic material.   The magnetic detection element according to claim 1, wherein a hooking portion on which the magnetic sensing portion is hooked is formed on the substrate.   5. The magnetic sensing portion is provided on one surface of the substrate, and the terminal portion and a connection portion between the magnetic sensing portion and the terminal portion are provided on the other surface. Any one of the magnetic detection elements. A method of manufacturing a magnetic sensing element comprising an amorphous magnetic material, and a magnetic sensing part whose impedance changes with an external magnetic field, and a substrate to which the magnetic sensing part is attached,
A method of manufacturing a magnetic sensing element, comprising a step of attaching a magnetic sensing part to the substrate with the longitudinal direction of the magnetic sensing part parallel to the rolling direction of the amorphous magnetic material.   The method of manufacturing a magnetic sensing element according to claim 6, wherein in the magnetic sensing portion mounting step, a longitudinal direction of the magnetic sensing portion is parallel to the direction of the external magnetic field.   8. The magnetic sensitive part attaching step, wherein the magnetic sensitive part is attached to the substrate in a state in which the magnetic sensitive part is hooked on a hooking part formed on the substrate and tension is applied to the magnetic sensitive part. The manufacturing method of the magnetic detection element of description. A magnetic substance detection method using a magnetic detection element comprising a magnetic sensing part made of an amorphous magnetic material and having impedance changed by an external magnetic field generated from the magnetic substance,
A method of detecting a magnetic material, characterized in that a longitudinal direction of the magnetically sensitive portion is parallel to a rolling direction of the amorphous magnetic material.   The magnetic body detection method according to claim 9, wherein a longitudinal direction of the magnetic sensing portion is parallel to a direction of the external magnetic field.

Images