JP2010010025A - Manufacturing method of organic electroluminescent panel, and organic electroluminescent panel substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an application method capable of reducing production cost of organic electroluminescent panels through easy and quick detection of jetting defects of a nozzle head of an ink-jet apparatus; and a substrate for an organic electroluminescent panel. <P>SOLUTION: In the manufacturing method of an organic electroluminescent panel in which an organic luminescent layer is formed by applying ink containing an organic electroluminescent material by an ink-jet method, the following steps are sequentially performed: a step of irradiating a panel substrate with light that activates the organic luminescent material contained in the ink from the rear face side of the substrate after applying ink to an inspection region, which is composed of a portion that intercepts light irradiated to the panel substrate and a portion that passes the light, from the side of the panel substrate opposite to the side thereof on which the organic electroluminescent layer is formed (rear face side of the substrate); a step of measuring the amount of light activated by the preceding step; a step of judging whether or not the measured amount of light is equal to a predetermined value; and a step of applying the ink to a display region if the measured amount of light is equal to the predetermined value. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an electronic device in which a material that emits light when excited by light, such as an organic EL light-emitting layer, is applied by inkjet.

  In recent years, methods for manufacturing electronic devices using inkjet technology have attracted attention.

  Manufacturing using inkjet technology is simpler and cheaper than equipment such as vapor deposition technology. In addition, since the ink jet technique is a direct patterning technique, a mask in the vapor deposition technique is unnecessary and the size can be increased. For example, in display electronic devices, market demand for large screens has increased, and expectations for electronic device manufacturing technology by inkjet coating have increased.

  Hereinafter, a manufacturing technique by coating will be described taking an organic EL display as an example.

  FIG. 3 shows the structure of the organic EL display.

  The organic EL display includes a substrate 1, an anode 32, light emitting layers 301 </ b> R-B, a cathode 33, and a partition wall 31. The substrate has a built-in TFT for driving the display, but is not shown here. Further, a sealing film, a color filter, and the like are appropriately disposed on the upper layer of the cathode, but are not shown. In the case of an organic EL display, there are three types corresponding to three colors of RGB as a light emitting layer, which are represented by 301R, 301G, and 301B, respectively. Further, the partition wall 31 is used for patterning ink applied to each pixel in ink jet coating, which will be described in the following description of the manufacturing process. The ink refers to a solution in which the light emitting layer material is dissolved in a solvent.

  Examples of the raw material for the organic EL light-emitting layer include polymer materials such as polyfluorene-based, polyarylene-based, polyarylene vinylene-based, alkoxybenzene, and alkylbenzene. Solvents include toluene, xylene, acetone, anisole, methyl ethyl ketone, Examples thereof include single or mixed solvents such as methyl isobutyl ketone and cyclohexylbenzene. In the case of the display shown in FIG. 3, since the partition wall 31 is formed, the applied ink stays in a desired pixel region, and a high-quality display can be realized without mixing colors. At this time, the partition may be preferably made of a resin containing fluorine and have ink repellency. The organic EL device configured as described above functions as a display by combining electrons from the cathode and holes from the anode in the light emitting layer to emit light.

  FIG. 4 is a cross-sectional view at the height of the organic light emitting layer of the organic EL display. The cross section of the height of an organic light emitting layer is shown. An example in which RGB is patterned in a pixel shape is shown. Each pixel (also referred to as a “pixel”) emits light to function as a display device such as a television. An area where the pixels are formed is called a display area.

  Next, a conventional method for manufacturing an organic EL display will be described.

  First, an anode is formed on a substrate using a photolithography technique. Next, barrier ribs are created using a photolithography technique. Thereafter, the ink of the RGB light emitting layer is applied by an ink jet printing method. The applied ink is dried in the application step and the next step to form a light emitting layer pattern. Further, a cathode is then formed on the light emitting layer by a method such as sputtering.

  Hereinafter, ink application by ink jet will be described.

  FIG. 1 shows the configuration of the ink jet apparatus. The components are a substrate transfer stage 2, a nozzle head 10, a nozzle head mounting column, an ink delivery pipe 3, an ink tank 4, an ink pump 5, a nozzle head lifting mechanism (not shown), and a control unit (not shown). .

  Next, the operation of each element will be described. Ink is sent from the ink tank 4 to the nozzle head 10 by the ink pump 5 through the ink delivery pipe 3. As shown in FIG. 2, the nozzle head 10 includes an ink introduction port 13 to which an ink pipe is connected, a manifold portion 12 that distributes the introduced ink to each nozzle hole, a nozzle hole 11, a piezoelectric element 14, a vibration plate 15, and an ink. It consists of chamber 16. Ink is supplied from the manifold portion 12 to the plurality of ink chambers 16.

  A piezoelectric element 14 and a diaphragm 15 are installed in each ink chamber. At this time, when a voltage is applied to the piezoelectric element 14 by a signal from the control unit, the piezoelectric element 14 contracts and the diaphragm 15 is deformed. As a result, the pressure in the ink chamber 16 increases and ink droplets are ejected from the nozzle holes 11. A plurality of nozzle holes 11 are opened in the nozzle head 10, and ink is simultaneously ejected and applied to a plurality of pixels.

  The distance between the substrate 1 and the nozzle hole 11 of the nozzle head 10 is adjusted to a gap of 500 μm to 1000 μm by the nozzle lifting mechanism, and the ink ejected from the nozzle hole 11 is conveyed as shown in FIGS. It is applied to the conveyed substrate 1 by the movement of the stage. The pixel pattern is applied by detecting the position of the stage and controlling the ejection timing.

  In such an ink jet apparatus, the discharge of the droplet is very sensitive to the dry state of the ink around the nozzle hole 11 and the remaining wet state of the ink. In many cases, non-ejection and flight bends occur. In particular, since organic EL ink is easy to dry, such a tendency is remarkable. When non-ejection of the droplets of the nozzle head 10 occurs, the dot missing defect occurs as an organic EL panel. Further, when the flying curve of the droplet occurs, the landing position of the droplet becomes a dot misalignment or color mixing defect as the organic EL panel from the target landing position (regular landing position). For this reason, in order to ensure the quality of the product, when a dot dropout or a dot shift occurs, it is necessary to detect this and perform a recovery process such as cleaning or nozzle suction on the droplet discharge head.

  Conventionally, as a method for detecting dot deviation and dot dropout, as disclosed in Patent Document 1, an electronic image of a plurality of dots formed side by side on an object to be inspected is taken, and the electronic image is subjected to image processing to be adjacent. A method has been proposed in which the dot misalignment is detected by measuring the interval between dots to be measured and comparing the measured value with a normal value.

Further, as another detection method, a light projecting unit that irradiates light onto an inspection substrate having an optical layer that guides and transmits incident light and emits light from an interface with a droplet landed with the passing light; Using a device equipped with a light receiving unit that receives light that has been irradiated by the light unit and passed through the optical layer, based on changes in the intensity of the light received by the light receiving unit, the occurrence of abnormal landing of droplets on the inspection substrate is determined This method is disclosed in Patent Document 2.
JP 2005-014216 A JP 2007-175614 A

  However, in Patent Document 1, there is a problem in that an image recognition device is necessary and the inspection device is expensive, the inspection cost is high, and the product cost is high. In addition, it is necessary to scan the image recognition apparatus with respect to the substrate, and there is a problem that it takes time for inspection.

  Further, in Patent Document 2, since a dedicated inspection substrate is used, there is a problem that the inspection cost is increased correspondingly, and as a result, the product cost is increased. In addition, the optical system and the signal processing system are complicated, and there is a problem that the inspection cost is increased by that amount. In addition, since a dedicated inspection board is used, the state of the nozzle changes while switching from the inspection board to the product board. However, although it is determined to be OK in the inspection, the product is NG and the yield is low. In particular, organic EL inks are prone to drying, so such problems are significant.

  The present invention has been made in view of the above-described problems of the prior art, and a coating method and a substrate for an organic EL panel that can reduce the manufacturing cost of an organic EL by simply and quickly detecting an abnormal discharge of a nozzle head of an inkjet apparatus. The purpose is to provide.

  In order to solve the above-described problems and achieve the object, the first invention of the present application is “to apply an ink containing an organic light-emitting material by inkjet onto a panel substrate and form an organic light-emitting layer on one surface of the substrate. A method of manufacturing an organic EL panel, comprising: an inspection area of a substrate that is provided outside a display area of the substrate and includes a portion that blocks light and a portion that transmits light; After the ink is applied, the result of measuring the amount of light emitted from the organic light emitting material contained in the ink by irradiating the inspection area with light from the other surface side facing the one surface of the substrate When the measured light quantity is an allowable value, the ink is applied to the display area of the substrate. ”This is a method for manufacturing an organic EL panel.

  Further, at this time, it is preferable that the portion that blocks light has more ink affinity than the portion that transmits light. Further, a groove may be provided in a portion that blocks light.

  Further, the second invention of the present application is “an organic EL panel substrate having an inspection region of a substrate that is provided outside the display region of the substrate and includes a portion that blocks light and a portion that transmits light”. It is an organic EL panel substrate.

  At this time, it is preferable that the light shielding portion and the anode are made of the same material. Further, it is preferable that the portion that blocks light has more ink affinity than the portion that transmits light. Further, it is also preferable to provide a groove in a portion that blocks light.

  According to the present invention, light emitted to the panel from the opposite side (substrate back side) of the panel substrate to the side on which the organic light emitting layer is formed is hit against the ejected ink droplets at regular positions, Emits excitation light. On the other hand, ink droplets that have been ejected from an abnormal nozzle and have not landed at the proper position do not receive light and do not emit light. Since the presence of ink droplets that have not landed at the normal position is detected based on the difference in the amount of light, nozzle abnormalities can be detected in a short time without using an image recognition device, its driving system, or a complicated optical system. .

  At this time, since the inspection area of the product substrate is used, it is not necessary to use a dedicated inspection substrate, and it can be applied at a low cost and immediately after the inspection, thereby improving the yield. As described above, according to the present invention, it is possible to easily and quickly detect the ejection abnormality of the nozzle head of the ink jet apparatus. As a result, the manufacturing cost of the organic EL panel can be reduced.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
5A and 5B show an organic EL panel substrate according to the first embodiment of the present invention.

  Compared with the conventional organic EL panel substrate shown in FIG. 4, the light emitted to the panel substrate from the opposite side (substrate back side) of the panel substrate on the side where the organic light emitting layer is formed is provided. The difference is that it has an inspection region 41 composed of a light shielding portion and a light transmitting portion.

  The inspection area 41 is provided at the position where the display area starts to be painted.

  FIG. 5A is a cross-sectional view at the height of the organic light emitting layer corresponding to FIG. However, the state immediately before applying the organic EL layer is shown. FIG. 5B is a cross-sectional view taken along the line AA ″ of FIG.

  The inspection area 41 includes a light-shielding area 411 (hereinafter also referred to as “light-shielding area”) that shields light L applied to the panel substrate from the back side of the substrate, and a transmission area 412 that transmits light (hereinafter also referred to as “transmission area”). Consists of. The region that transmits light is formed to have approximately the same size as when the ink droplet landed at a normal position during the ejection inspection. If the size of the droplet is 1 to 3 pl, the transmission region 412 that transmits light has a circular shape with a diameter of 10 to 30 μm. The light shielding region 411 is formed using one of the layers constituting the anode 32.

  If the light shielding region 411 is formed in this manner, the light shielding region 411 and the transmission region 412 can be formed simultaneously with the pixel pattern of the anode during the patterning of the anode. Therefore, it is necessary to increase a new manufacturing process in order to form the inspection region. There is no advantage. As a specific material for the light shielding region, an alloy of silver, palladium, and copper is used.

  Next, a coating apparatus that performs a discharge inspection using a substrate will be described with reference to FIG.

  6, the same numbers as those in FIG. 1 indicate the same components. The substrate transport stage 2 has a hole 21 for irradiating light from the back surface of the substrate corresponding to the inspection area 41 of the substrate. A light irradiation device 51 and an optical filter 52 are disposed below the hole 21, and a specific wavelength is selected by the optical filter 52 from the light irradiated from the light irradiation device 51, and passes through the hole 21. The back surface of 41 is irradiated.

  An optical filter 53 and a light meter 54 are arranged on the front side of the substrate in the vicinity of the nozzle head 10 at positions corresponding to the light irradiation device 51 and the optical filter 52. As the light irradiation device 51, a UV light source such as a mercury lamp is used. At this time, an optical filter that transmits a wavelength of 365 nm is used as the optical filter 52. The optical filter 53 is an optical filter that transmits a wavelength of 525 nm. As the light meter 54, a photodiode is used.

  Next, the coating method of the present invention will be described.

  As shown in FIG. 7A, the substrate is transported by the transport stage 2, the inspection region 41 is moved directly below the nozzle, and the ink droplet 60 is test-discharged from each nozzle. Next, as shown in FIG. 7B, the inspection area 41 is moved directly below the light meter 54. At this time, light L having a wavelength of 365 nm passes through the hole 21 from the light irradiation device side and is applied to the ink droplet 60 applied to the test region 41. The irradiated light L excites the light emitting material of the ink, and excitation light having a wavelength of 525 nm is emitted from the light emitting material of the ink. This light emission amount is measured by the light meter 54.

  FIG. 8A shows a plan view of the inspection region 41 after test ejection when there is no ejection abnormality in the nozzle. A state after the ink for the red light emitting layer 301R is ejected to the inspection area 41 is shown.

  When there is no ejection abnormality, all ink droplets are contained in the transmission region 412 of the inspection region 41. Therefore, the light emission amount of the excitation light from the ink droplet is the light emission amount from the ink droplet ejected from all the nozzles that have received the ejection signal. In FIG. 8A, the light emission amount is 3 drops.

  FIG. 8B shows a plan view of the inspection area 41 after the test discharge when the nozzle has a discharge error due to a curved flight. A droplet ejected from a nozzle having ejection abnormality due to flying bend protrudes from the transmission region 412 as indicated by reference numeral 61 in FIG. Therefore, the amount of excitation light emitted from the ink droplets is less than the amount of light emitted from the ink droplets ejected from all the nozzles that received the ejection signal. In FIG. 8B, the light emission amount is not about 3 drops but about 2.5 drops.

  FIG. 8C shows a plan view of the inspection region 41 after test ejection when there is a non-ejection abnormality in the nozzle. In this case, ink droplets are not applied to the transmission region 412 corresponding to the non-ejection nozzle. Therefore, the amount of excitation light emitted from the ink droplets is less than the amount of light emitted from the ink droplets ejected from all the nozzles that received the ejection signal. In FIG. 8B, the light emission amount is not equal to 3 drops, but is equal to 2 light emissions.

  In the next step of the coating method of the present invention, the light emission amount from the ink droplets from the transmission region 412 as described above is measured by the light quantity meter 54, and the ink droplets discharged from all the nozzles receiving the discharge signal are measured. The control unit 18 determines whether or not the light emission amount is equivalent. In the case of FIG. 8, as shown in FIG. As a result of the determination, if the light emission amount is equivalent to three drops, it is applied to the display area.

  As shown in FIGS. 8B and 8C, if the amount of emitted light is less than 3 drops, measures such as nozzle cleaning are performed. After the nozzle cleaning or the like, if test discharge is performed again and it is confirmed that there is no abnormal discharge, it is applied to the display area. Therefore, it is desirable to provide a plurality of transmission regions 412 corresponding to each nozzle as shown in FIG.

  The ink droplets ejected at regular positions are irradiated with light radiated to the panel substrate from the side opposite to the side on which the organic light emitting layer is formed (the back side of the substrate), and a predetermined excitation light is applied. Emits light. On the other hand, ink droplets that have been ejected from an abnormal nozzle and have not landed at the proper position do not receive light and do not emit light. The difference in the amount of light detects the presence of ink droplets that have not landed at the normal position, so nozzle abnormalities can be made quickly and inexpensively without using an image recognition device, its drive system, or complex optical system. Can be detected.

  At this time, since the inspection area of the product substrate is used, it is not necessary to use a dedicated inspection substrate, and it can be applied at a low cost and immediately after the inspection, thereby improving the yield. As described above, according to the present invention, it is possible to easily and quickly detect the ejection abnormality of the nozzle head of the ink jet apparatus.

  As a result, the manufacturing cost of the organic EL panel can be reduced.

  In the above embodiment, one ink droplet is used for the test ejection to the inspection area 41, but two or more ink droplets may be ejected. When the landing position accuracy is not so strict, it is desirable to inspect by application with a larger number of droplets because the amount of light emitted from the ink droplets is large and inspection can be performed with an inexpensive light meter having low sensitivity.

  In the description of the above embodiment, the step of applying the ink of the red light emitting layer has been described as an example. However, after applying the red light emitting layer, the above application is also performed in the step of sequentially applying the green light emitting layer and the blue light emitting layer. Use the method. At that time, since the light for exciting the light emitting material in the ink is irradiated from the back surface of the substrate, the previously applied light emitting layer is not irradiated, and the previously applied light emitting layer is damaged. There is nothing. For example, after applying a red light emitting layer, irradiation light when performing a discharge inspection of the green light emitting layer does not hit the red light emitting layer and cause damage. Thus, when apply | coating to an organic electroluminescent panel board | substrate several times, it is desirable to irradiate the light for exciting the luminescent material in ink from the back surface of a board | substrate.

(Embodiment 2)
In Embodiment 1 described above, the light shielding region 411 is formed using one of the anodes 32 formed on the substrate 1 that does not transmit light. However, a wiring material for forming a driving circuit such as a TFT on the substrate 1 is used. The light shielding region 411 may be formed using the above patterning.

  In a so-called bottom emission type organic EL panel in which light is extracted from the anode side, the anode does not include a light-shielding layer. Therefore, it is preferable to form an inspection region in the substrate 1 in this way.

  This embodiment will be described with reference to FIG. FIG. 10A is a diagram corresponding to FIG. 5A of the first embodiment.

  5A, the light shielding region 411 is formed by using one of the anodes 32 that does not transmit light. In FIG. 10A, the signal line 421 is patterned when a driving circuit such as a TFT is formed. In use, a light shielding region 411 is formed. The signal lines are patterned so that the gap between the signal lines 421 becomes a transmission part so that the signal line 421 becomes a light shielding part. That is, patterning is performed so that the space between the signal lines 421 is on the extended line of the application region, and the distance between the signal lines 421 is slightly larger than the diameter after the ink droplets have landed.

  FIG. 10B shows a portion corresponding to the reference numeral 42 in FIG. 10A, and a portion 422 substantially surrounded by a portion protruding from the signal line as indicated by reference numeral 422 in FIG. If the portion is provided and the portion is a light transmission portion, an ejection abnormality in the signal line direction can also be inspected. In addition, when the diameter of each ink drop after landing is large, as shown in FIG. 10C, it is preferable to provide a portion 423 having a wide interval in a part of the wiring. With such a pattern, the wiring is thinned only at a portion necessary for inspection, so that the possibility of disconnection can be reduced as compared with the case where the whole is thinned. In the above description, the inspection region is formed using only the signal line. However, the inspection region may be formed together with a wiring in a layer different from the signal line.

  FIG. 10D shows an example in which the inspection region is formed using the signal line 421 and the scanning line 422.

  When the inspection area is formed in this way, the transmissive part is completely surrounded by the light-shielding part, so that highly accurate inspection is possible.

  In the first and second embodiments, a method of forming the inspection region 41 using a layer that does not transmit light of the anode 32 and a method of forming the inspection region 41 using a wiring layer in the substrate 1 are used. As described above, when the patterning accuracy of these layers does not reach the desired accuracy, a photolithographic process for separately forming an inspection region may be added.

  When a higher-definition organic EL panel is manufactured, the amount of ink droplets per droplet is reduced, and thus it is desirable to increase the photolithography process with high accuracy and create the inspection region 41 in this way.

(Embodiment 3)
The third embodiment will be described with reference to FIG.

  The third embodiment is characterized in that the light-shielding part has ink affinity more than the transmissive part.

  FIG. 11A is an enlarged view of a portion corresponding to 41 in FIG. 5A described in the first embodiment. Compared to FIG. 5A, the transmission part 412 includes the partition wall 31 having ink repellency. The difference is that it is filled with the same material.

  FIG. 11B is a cross-sectional view taken along the line A-A ′ of FIG. 11A, and corresponds to 41 part of FIG. FIG. 11B is different from FIG. 5B in that the transmission part 412 is filled with the same material as the partition wall 31 having ink repellency.

  With such a configuration, ink droplets that deviate from the normal landing position are drawn into the light-shielding portion due to the difference in wettability, so that a large difference in light emission amount can be obtained even from a slight deviation in the landing position. it can. As a result, it is possible to improve the detection accuracy of the ejection abnormality. If the transmission part 412 is made of the same material as that of the partition wall 31 as described above, the transmission part can be made of ink-repellent material in the partition formation process, so that a new process is not required and the manufacturing cost is not increased. The effects of the invention can be obtained.

  However, if the patterning accuracy of the partition wall forming process is insufficient for making the transmissive part ink-repellent, a separate plasma treatment or a variable wettability photosensitive film may be used to make the transmissive part more ink-repellent than the light-shielding part. Good.

(Embodiment 4)
The fourth embodiment will be described with reference to FIG.

  The fourth embodiment is characterized in that a groove capable of generating capillary action is provided in a portion that blocks light.

  FIG. 12A is an enlarged view of a portion corresponding to 41 in FIG. 5A described in the first embodiment. Compared with FIG. 5A, a capillary phenomenon occurs in the light shielding region 411 that blocks light. The difference is that a groove 431 is provided.

  FIG. 12B is a cross-sectional view taken along the line A-A ′ in FIG. 12A, and corresponds to 41 in FIG. FIG. 12B is different from FIG. 5B in that a groove 431 capable of causing capillary action is provided in a light shielding region 411 that shields light. The width of the groove is 1 to 10 μm, the length is 10 to 50 μm, and the depth is 0.01 to 0.5 μm.

  With such a configuration, ink droplets that deviate from the normal landing position are drawn into the light-shielding portion by capillary action, so that a large difference in light emission amount can be obtained even from a slight deviation in the landing position. As a result, it is possible to improve the detection accuracy of the ejection abnormality. Further, the groove 432 may be provided in a two-layer structure as shown in FIGS.

  FIG. 12C is an enlarged view of a portion corresponding to 41 in FIG. 5A described in the first embodiment, and FIG. 12D is a cross-sectional view taken along line AA ′ in FIG. .

  The diameter of the groove 432 is 5 to 30 μm larger than the diameter of the transmission part, and the depth is 0.01 to 0.5 μm. The manufacturing process of the panel substrate is complicated because of the two-layer structure, but with this structure, the ink droplets are surely drawn into the light-shielding part by capillary action regardless of which direction the ink droplets deviate from the normal landing position. Therefore, a large difference in the amount of emitted light can be obtained even from a slight shift in the landing position. As a result, it is possible to improve the detection accuracy of the ejection abnormality.

(Embodiment 5)
Embodiment 5 will be described with reference to FIG. The same reference numerals as those in FIG. 6 represent the same components.

  FIG. 13 differs from FIG. 6 in that a light source 56 and an optical filter 55 for irradiating light L2 for exciting the light emitting material of ink applied to the inspection region 41 are also provided on the light meter 54 side. With this configuration, when a discharge abnormality is detected, it can be determined whether it is a non-discharge or a flight curve, and appropriate measures can be taken for each.

  The method will be described below.

  First, the light source 56 is turned off, the light source 51 is turned on, and only L1 is used to detect an ejection abnormality. For example, if the excitation light is detected only by the amount of ink ejected from the two nozzle holes in the light quantity meter 54 even though ejection signals are applied to the three nozzle holes, it is determined that the ejection is abnormal. However, at this stage, it cannot be determined whether the abnormality is due to non-ejection or flight bending.

  Next, the light source 51 is turned off, the light source 56 is turned on, L2 is ejected onto the application region and irradiated onto the ink, and the light quantity of the excitation light is measured by the light quantity meter 54. At this time, if excitation light is detected only by the amount of ink ejected from the two nozzle holes in the light meter 54, it is determined that ejection has failed. Since non-ejection is caused by bubbles and foreign matter, it can be recovered by nozzle suction.

  Instead, when the light meter 54 detects excitation light corresponding to the ink ejected from the three nozzle holes, it is determined that the flight is bent. The flight bend can be recovered by wiping because it is caused by thickening in the nozzle surface.

  As described above, according to the present embodiment, since it is possible to accurately cope with ejection abnormality, it is possible to quickly recover from the abnormality and improve productivity, and to reduce the manufacturing cost of the organic EL display. This embodiment is particularly effective when the first color is applied or when ink with high resistance to ultraviolet rays is used.

  The present invention can be applied to the manufacture of electronic devices such as organic EL panels using an inkjet apparatus.

Diagram showing inkjet device The figure which shows the nozzle head of the ink jet device Structure diagram of organic EL device Sectional view at the height of the organic light emitting layer of the organic EL device Conceptual diagram of the organic EL panel substrate of Embodiment 1 of the present invention 1 is a conceptual diagram of an organic EL panel manufacturing apparatus according to Embodiment 1 of the present invention. Explanatory drawing of the organic electroluminescent panel manufacturing method of Embodiment 1 of this invention Explanatory drawing of the organic electroluminescent panel manufacturing method of Embodiment 1 of this invention Explanatory drawing of the organic electroluminescent panel manufacturing method of Embodiment 1 of this invention Conceptual diagram of organic EL panel substrate of Embodiment 2 of the present invention Conceptual diagram of organic EL panel substrate according to Embodiment 3 of the present invention Conceptual diagram of organic EL panel substrate of Embodiment 4 of the present invention Explanatory drawing of the organic EL panel manufacturing method of Embodiment 5 of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Board | substrate conveyance stage 3 Ink delivery piping 4 Ink tank 5 Ink pump 10 Nozzle head 11 Nozzle hole 18 Control part 21 Hole 31 Partition 32 Anode 33 Cathode 41 Inspection area 51 Light source 52, 53 Optical filter 54 Light meter 301R-B Light emitting layer 401R, 401G, 403B Coated ink 411 Light shielding part (light shielding region)
412 Transmission part (transmission area)

Claims (7)

An organic EL panel manufacturing method in which an ink containing an organic light emitting material is applied to a panel substrate by inkjet, and an organic light emitting layer is formed on one surface of the substrate,
Provided outside the display area of the substrate,
After applying ink from one surface side of the substrate to the inspection region of the substrate composed of a portion that blocks light and a portion that transmits light,
Irradiate light from the other surface side facing the one surface of the substrate to the inspection region,
As a result of measuring the amount of light emitted from the organic light emitting material contained in the ink,
When the measured light quantity is an allowable value, an ink is applied to the display area of the substrate. The method for producing an organic EL panel according to claim 1, wherein the portion that blocks light has more ink affinity than the portion that transmits light. The manufacturing method of the organic electroluminescent panel of Claim 1 which provided the groove | channel in the part which shields the said light. An organic EL panel substrate,
An organic EL panel substrate comprising an inspection region of a substrate that is provided outside a display region of the substrate and includes a portion that blocks light and a portion that transmits light. The organic EL panel substrate according to claim 4, wherein the light shielding portion and the anode are made of the same material. 5. The organic EL panel substrate according to claim 4, wherein the portion that blocks light has more ink affinity than the portion that transmits light. The organic EL panel substrate according to claim 4, wherein a groove is provided in a portion that blocks the light.

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