JP2010006624A - Method for manufacturing fpd - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a FPD (Flat Panel Display) which is made as thin as possible, without deteriorating the productivity. <P>SOLUTION: The method includes: a first step of scribing a surface of a laminated glass substrate having a plurality of display panel areas to form scribe lines for partitioning the display panel areas; a second step of immersing a work box housing a plurality of such laminated glass substrates in a chemical polishing solution stored in a polishing tank to reduce the thickness of the laminated glass substrates to ≤1 mm; and a third step of cutting the thinned laminated glass substrates along the scribe lines. At the second step, lateral end faces of the laminated glass substrates are linearly retained over the virtually whole areas by linear grooves made in the work box. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a flat panel display (FPD), and more particularly to a method for manufacturing a laminated glass plate that is a constituent element of an FPD to an extremely thin thickness.

  FPD is a term contrasted with a display device having a bulge such as a cathode ray tube of a CRT display, and has a great feature in that it is small in depth and space-saving, and the display panel has no bulge.

  Examples of FPDs in practical use include liquid crystal displays, plasma displays, and organic EL displays. In particular, liquid crystal displays are widely used not only as television receivers but also as display devices for mobile phones and computer equipment. It is popular.

  By the way, in any FPD, there is a strong demand for improvement in productivity and further reduction in size and weight. For example, in a liquid crystal display liquid crystal, a pair of glass substrates provided with a plurality of display panel areas are vertically and horizontally bonded. The laminated glass substrate is chemically polished. Since the thickness of the laminated glass substrate after chemical polishing may be less than 0.5 mm, the laminated glass substrate thinned to the limit is extremely difficult to cut thereafter for each display panel region. . That is, in the case of mechanical cutting with a cutter blade or thermal cutting with a laser beam, a crack may occur during the cutting operation and the display panel may be damaged.

Therefore, a method is preferably used in which a scribe line that is physically formed in advance is polished in the depth direction in accordance with the chemical polishing of the glass substrate, and after the polishing of the glass substrate is completed, the glass substrate is cleaved along the scribe line. (For example, Patent Document 1). The display panel manufactured in this way is excellent in mechanical strength because the peripheral edge surface thereof is extremely flat including the broken glass cross section.
JP 2008-81353 A

  However, as the plate thickness of the laminated glass substrate is reduced, the flexibility increases. Therefore, the laminated glass substrate is greatly bent due to the flow of the polishing liquid, and cracks are generated starting from the scribe line. It may adhere to the glass substrate.

  In particular, a laminated glass substrate tends to increase in size, and unless an appropriate manufacturing method is adopted, cracks generated in one place may spread over the entire area, which may significantly deteriorate productivity.

  This point is not limited to the laminated glass substrate provided with the scribe line, and the same problem occurs when the plate thickness is finally reduced to 0.3 mm or less.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an FPD manufacturing method that does not deteriorate the productivity of an FPD that is extremely thinned.

  In order to achieve the above object, the invention according to claim 1 includes a first step of providing a scribe line for partitioning the display panel region on the surface of a laminated glass substrate having a plurality of display panel regions, and chemical polishing. A second step of thinning the thickness of the laminated glass substrate to 1 mm or less by immersing a work box containing a plurality of laminated glass substrates in a polishing tank for storing the liquid, and the thinned lamination The glass substrate has a third step of cutting along the scribe line, and in the second step, the side end surface of the bonded glass substrate is substantially formed by a linear groove provided in the work box. It is held linearly over the entire area.

  In the present invention, in the second step of thinning the laminated glass substrate, the side end surface of the glass substrate is held linearly over almost the entire area, so that the glass substrate is greatly swept by the liquid flow of the polishing liquid. It does not bend and does not crack or adhere to the adjacent glass substrate.

  The chemical polishing liquid is not particularly limited, but a polishing liquid containing 10 to 30% by weight of hydrofluoric acid and 20 to 50% by weight of sulfuric acid is suitable for securing a certain polishing rate and improving working efficiency. The concentration of hydrofluoric acid is preferably 10 to 30% by weight, preferably 15 to 28% by weight, and more preferably 17 to 25% by weight. The concentration of sulfuric acid in the polishing liquid is preferably 20 to 50% by weight, preferably 30 to 45% by weight, and more preferably 35 to 42% by weight.

  On the other hand, the concentration of hydrofluoric acid may be suppressed to about 0.5 to 5% by weight in order to improve the quality even at the expense of work efficiency. However, in this case, it is necessary to increase the concentration of sulfuric acid to about 50 to 90% by weight.

  In any case, the polishing liquid may contain one or more of inorganic acids and surfactants. Examples of the inorganic acid include hydrochloric acid, nitric acid, and phosphoric acid, and examples of the surfactant include ester type, phenol type, amide type, ether type, and amine type surfactants.

  The size and shape of the laminated glass substrate are not particularly limited, but particularly when polishing a rectangular large glass substrate of about 1100 mm long × 1250 mm wide, or 1500 mm long × 1850 mm wide, or a glass substrate larger than that. The present invention functions effectively. When a large glass substrate of this degree is thinned to 1 mm or less, even if it is a laminated glass substrate obtained by laminating two sheets of glass, the flexibility increases, so that the periphery of the glass substrate is supported in a dotted pattern. Therefore, the glass substrate cannot be held. It is possible to hold the glass substrate strongly or to increase the holding size. However, when the glass substrate is swept by a liquid flow, stress concentrates on the holding point and breaks the glass substrate. End up.

  The second step should be performed with the polishing liquid flowing. Here, as a method of flowing the polishing liquid, it is preferable that a large number of bubbles are continuously supplied from below the work box toward the inside of the work box. In this case, the reaction product can be effectively removed from the glass substrate as the bubbles rise. In addition, since the flow rate of the polishing liquid can be suppressed, so much stress is not applied to the periphery of the glass substrate. Moreover, even if stress is applied, the side end surface of the laminated glass substrate is linearly held over almost the entire region, so that the stress can be appropriately dispersed.

  The work box is preferably configured in a substantially rectangular parallelepiped shape with a front plate, a rear plate, a pair of side plates, a top plate, and a bottom plate. In this case, a straight groove is provided in another member excluding the pair of side plates, or a straight groove is provided in another member excluding the front and rear plates. Here, the linear groove may be a recessed groove that does not penetrate in the plate thickness direction, or may be a through groove that penetrates in the plate thickness direction.

  In any case, it is preferable to set the holding white of the laminated glass substrate to a depth of 5 mm or less. This holding white is evaluated on the bottom plate that supports the lower part of the laminated glass substrate. Therefore, the straight grooves of the other members are formed to a depth of 5 mm or more in consideration of workability when receiving the glass substrate.

  In the second step of the present invention, prior to the chemical polishing operation, a plurality of glass substrates are preferably accommodated in order in a substantially rectangular parallelepiped work box. In order to facilitate this housing operation, the top plate is removed, and a plurality of glass substrates may be slid in order in a work box opened upward (see FIGS. 1 and 2). In the illustrated example, the glass substrate GL is fitted into the straight grooves GV provided in the front plate 1, the rear plate 2, and the bottom plate 3, and the side end surfaces of the three peripheral edges of the glass substrate GL are held.

  After all the glass substrates are accommodated, the top plate 4 is then put on the plurality of glass substrates GL. In this case, preferably, as shown in FIG. 1, the top plate 4 is slid in the horizontal direction. Since the linear groove GV is also formed on the top plate 4, the upper peripheral edge of the glass substrate accommodated in the work box is fitted into the linear groove GV of the top plate 4 by the sliding movement of the top plate 4. Are aligned in the correct upright position. Polishing unevenness can be prevented because the glass substrate stands upright accurately.

  In the present invention, preferably, the pair of side plates should be connected to each other by a plurality of connecting rods with the front plate, the rear plate, and the bottom plate held inside. Here, if one slide groove running in the horizontal direction is provided on the inner surface of the pair of side plates, the top plate 4 can be accurately slid by the slide groove, and during the subsequent polishing operation, The glass substrate is held in the correct position.

  A plurality of linear grooves parallel to each other should be formed in the vertical direction on the inner surface of the front plate and the rear plate, but a configuration in which there is no liquid passage passing from the inner surface to the outer surface is preferable. That is, it is preferable that the straight grooves of the front plate and the rear plate are constituted by recessed grooves that do not penetrate in the plate thickness direction. By adopting such a configuration, a straight liquid flow from the lower side to the upper side can be formed, and uneven polishing can be prevented.

  For the same purpose, the side plate is preferably configured such that there is no liquid passage that passes from the inner surface to the outer surface. In addition, it is not prohibited to provide positioning holes for attaching the front plate, the rear plate, the bottom plate, and the like.

  The bottom plate of the present invention preferably has a vertically upward liquid passage. That is, it is preferable that an opening hole penetrating in the thickness direction is formed in the bottom plate. In this case, an opening hole may be dug in one plate material separately from the straight groove, or a plurality of rods may be discretely spanned between a pair of base materials or a rectangular frame material. . In the case where a plurality of bar members are used, it is preferable to form linear grooves in the respective bar members in a concave shape.

  In any case, it is preferable that the bottom plate is configured by arranging a plurality of base plates having the same shape in the horizontal direction with a gap therebetween. When such a configuration is adopted, when the work box is pulled up from the polishing tank, the polishing liquid in the work box is smoothly removed from the gap, so that no extra stress is applied to the glass substrate accommodated, The pulling operation can be speeded up. In addition, when a work box containing a plurality of glass substrates is introduced into the polishing tank, the work can be carried out smoothly.

  In the top plate of the present invention, it is preferable that a plurality of linear grooves parallel to each other are formed in the horizontal direction, so that a liquid passage upwardly passing through the linear grooves is secured. By adopting such a configuration, the liquid flow that has risen inside the work box escapes upward from the work box, so that reaction products and the like do not stay in the work box.

  Here, the top plate is constituted by a pair of base materials or a rectangular frame member, and a plurality of bar members are spanned, and a linear groove is realized by a gap between adjacent bar members. Is. The top plate 4 shown in FIG. 1 has a rectangular frame member FR, and a plurality of square members BA are spanned to form a straight groove GV.

  As shown in FIG. 1, it is preferable that the square bar is tapered on the vertical lower side during use, like a square bar having a hexagonal cross section. Further, if both end portions or one end portion in the length direction of the square member are tapered surfaces, the glass substrate can be smoothly received by sliding movement.

  Moreover, the invention which concerns on Claim 12 immerses the work box which accommodates several laminated glass substrates in the polishing tank which stores a chemical polishing liquid, and the plate | board thickness of a laminated glass substrate to 0.3 mm or less A manufacturing method of an FPD having a polishing step for thinning, wherein the work box is configured in a substantially rectangular parallelepiped with a front plate, a rear plate, a pair of side plates, a top plate, and a bottom plate. The side end surfaces of the laminated glass substrate are linearly held over almost the entire area by linear grooves provided in the front plate, rear plate, top plate, and bottom plate of the box.

  In the polishing step of the present invention, the side end surface of the glass substrate is held linearly over almost the entire area, so that the glass substrate is not greatly bent due to the flow of the polishing liquid, and cracks are generated. , It is not bonded to the adjacent glass substrate.

  The present invention is particularly effective when the final thickness of the laminated glass substrate is 0.2 mm or less, and further when the effect is 0.1 mm or less.

  Also in the present invention, it is preferable that one slide groove that runs in the horizontal direction is provided on the inner surfaces of the pair of side plates, and the top plate is held by the slide grooves. In addition, the preferred embodiment for the invention of claim 1 is also preferably applied to the manufacturing method of claim 12 as it is.

  ADVANTAGE OF THE INVENTION According to this invention, about the FPD thinned extremely, the manufacturing method of FPD which does not degrade the productivity is realizable.

  Examples of working boxes that realize the manufacturing method of the present invention will be described below. The work box BX shown in FIG. 2 is immersed in a chemical polishing tank in a state where a plurality of laminated glass substrates GL... GL are accommodated. Then, a number of bubbles are continuously supplied from below the work box BX to the inside of the work box BX, so that a chemical polishing process for thinning the glass substrate GL proceeds.

  On the laminated glass substrate GL accommodated in the work box BX, scribe lines that divide a plurality of display panel regions are provided in advance in the vertical and horizontal directions. In addition, although a scribe line may be provided corresponding to both front and back both surfaces of the bonding glass substrate GL, Preferably, a scribe line is provided only in one surface.

  The glass substrate is finally thinned to 1 mm or less, preferably less than 0.7 mm, but the scribe line is also deepened while being smoothed in accordance with this polishing treatment. And if a load is applied along a scribe line after a chemical polishing process is complete | finished, a laminated glass substrate will be cut | disconnected by cutting glass, and it isolate | separates into each panel.

  As shown in FIG. 2, the working box BX of the embodiment is configured as a substantially rectangular parallelepiped as a whole with the front plate 1 and the rear plate 2 having the same shape, the bottom plate 3, the top plate 4, and the pair of side plates 5. Yes.

  The pair of side plates 5 and 5 are connected to each other by four connecting rods 6 with the front plate 1, the rear plate 2 and the bottom plate 3 held inside, and in this state, the work box BX opened upward Become.

  The side plate 5 is provided with one slide groove SL that runs in the horizontal direction, and the top plate 4 is held by the slide groove SL. The side plate 5 has positioning holes for attaching the front plate 1, the rear plate 2, the bottom plate 3, etc., but does not have a liquid passage extending from the inner surface to the outer surface.

  The front plate 1 and the rear plate 2 have a large number of linear grooves formed in a concave shape on the inner surface side. Since these front and rear plates 1 and 2 do not have a liquid passage from the inner surface to the outer surface, a large number of bubbles supplied from below the work box BX together with the chemical polishing liquid move from the bottom to the top inside the work box BX. Will move.

  The bottom plate 3 is formed by arranging a plurality of base plates 30 having the same shape in a horizontal direction with a gap. Therefore, when the work box BX is introduced into the polishing tank or when the work box is pulled up from the polishing tank, a reliable liquid passage is ensured and workability is not impaired.

  As shown in FIG. 3, each base plate 30 is configured by laminating and joining an upper first member 30A and a lower second member 30B. The first member 30A is provided with a number of elongated holes HO penetrating in the plate thickness direction and a number of recessed grooves TR not penetrating in the plate thickness direction (see FIG. 4). Although not shown in FIG. 3, a buffer material BUF is disposed at the bottom of the recess groove TR so as to receive the lower end of the glass substrate.

  The second member 30B is formed with three large openings BG and a large number of small openings SM arranged on the left and right sides of the large openings, each penetrating in the plate thickness direction (see FIG. 3). Here, the small opening SM is formed at a position corresponding to the long hole HO of the first member. The large opening BG and small opening SM formed in the second member 30B and the long hole HO formed in the first member 30A constitute a liquid introduction passage at the bottom of the work box BX.

  Here, the concave groove TR of the first member 30 </ b> A corresponds to the linear groove of the present invention, but it goes without saying that these linear grooves continue across the plurality of base plates 30. Note that the configuration is not limited to the configuration shown in FIG. 3 in which the concave groove TR is dug in the base plate 30. For example, a plurality of bar members are spanned between a pair of base materials or a rectangular frame member, and each bar member is provided. A configuration in which a concave groove is formed may be adopted.

  Incidentally, the top plate 4 of FIG. 2 is shown only schematically, and the details are as shown in FIG. That is, the top plate 4 of the embodiment is configured by discretely spanning a plurality of bar members BA on a rectangular frame material FR. A straight groove is formed by the gap between the bar BA and the bar BA. The top plate 4 is arranged in the upper portion of the work box BX by being slid and guided by the slide grooves SL formed in the pair of side plates 5 and 5.

  By sliding the top plate 4, the upper peripheral edges of a large number of glass substrates already accommodated in the work box BX are fitted into the straight grooves GV of the top plate 4, and the glass substrates are aligned in the correct upright posture. Further, the bubbles and the liquid flow rising in the work box BX overflow from the work box BX through the linear groove GV.

  Although the laminated glass substrate provided with the scribe line has been specifically described above, it is not essential to provide the scribe line. That is, for example, in the FPD in which the laminated glass substrate is thinned to 0.3 mm or less, the glass substrate can be prevented from being damaged by using the work box shown in FIGS.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the principle figure explaining this invention, and the structure of a top plate. It is drawing explaining the work box used for this invention. It is drawing explaining the bottom plate of a work box. It is drawing explaining the structural member of a baseplate.

Explanation of symbols

GL Laminated glass substrate BX Work box GV Straight groove

Claims (13)

A first step of providing a scribe line for partitioning the display panel region on the surface of a laminated glass substrate having a plurality of display panel regions;
A second step of immersing a work box containing a plurality of laminated glass substrates in a polishing tank storing a chemical polishing liquid, and reducing the thickness of the laminated glass substrate to 1 mm or less;
About the thinned laminated glass substrate, it is configured to have a third step of cutting along the scribe line,
In the second step, the side end face of the laminated glass substrate is held linearly over almost the whole area by the straight groove provided in the work box.   The manufacturing method according to claim 1, wherein a large number of bubbles are continuously supplied from below the work box toward the inside of the work box.   The said work box is a manufacturing method of Claim 1 or 2 comprised by the substantially rectangular parallelepiped with the front board, the rear board, a pair of side board, the top plate, and the baseplate.   The manufacturing method according to claim 3, wherein the pair of side plates are connected to each other by a plurality of connecting rods in a state where the front plate, the rear plate, and the bottom plate are held inside.   The manufacturing method according to claim 3 or 4, wherein each of the pair of side plates is provided with one slide groove running in a horizontal direction, and the top plate is held by the slide groove.   The manufacturing method according to any one of claims 3 to 5, wherein a plurality of linear grooves parallel to each other are formed in the vertical direction on the inner surfaces of the front plate and the rear plate.   The manufacturing method according to claim 3, wherein the front plate and the rear plate have no liquid passage that passes from the inner surface to the outer surface.   The manufacturing method according to any one of claims 3 to 7, wherein an opening hole is formed in the bottom plate to secure a liquid passage upward in the vertical direction.   The manufacturing method according to any one of claims 3 to 8, wherein the bottom plate is configured by arranging a plurality of base plates having the same shape in a horizontal direction with a gap therebetween.   The top plate is formed with a plurality of straight grooves parallel to each other in the horizontal direction, so that a vertically upward liquid passage that passes through the straight grooves is secured. Manufacturing method.   The top plate is configured by a plurality of bar members being stretched over a pair of base materials or a rectangular frame member, and the linear groove is realized by a gap between adjacent bar members. The manufacturing method in any one of. Manufacture of an FPD having a polishing process in which a work box containing a plurality of bonded glass substrates is immersed in a polishing tank storing chemical polishing liquid, and the thickness of the bonded glass substrate is reduced to 0.3 mm or less. A method,
The work box is configured in a substantially rectangular parallelepiped with a front plate, a rear plate, a pair of side plates, a top plate, and a bottom plate,
In the polishing step, the side end surface of the laminated glass substrate is linearly held over almost the entire region by the linear grooves provided in the front plate, the rear plate, the top plate, and the bottom plate of the work box. FPD manufacturing method.   The manufacturing method according to claim 12, wherein each of the pair of side plates is provided with one slide groove running in a horizontal direction, and the top plate is held by the slide groove.

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