JP2010002357A - Vibrator piece characteristic inspection device and vibrator piece characteristic inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibrator piece characteristic inspection device and a vibrator piece characteristic inspection method capable of conveying a crystal blank to an inspection position highly accurately, and performing inspection as it is. <P>SOLUTION: This vibrator piece characteristic inspection device for inspecting an electric characteristic of a vibrator piece such as the crystal blank is equipped with a vacuum chuck for sucking and holding the vibrator piece by a negative pressure. The vacuum chuck has a constitution having the first electrode domain close to the center of the vibrator piece, and a vacuum port disposed on the periphery of the first electrode domain and using an outer wall of the first electrode domain as a part of an inner wall of itself. The vibrator piece characteristic inspection device is also equipped with the second electrode domain disposed oppositely to the first electrode domain. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a vibrator piece characteristic inspection apparatus and a vibrator piece characteristic inspection method for performing predetermined characteristic inspection of a vibrator piece such as a crystal blank.

  Conventionally, a sheet-like crystal blank (crystal piece) is used as a vibrating body of a crystal resonator of an electronic component. If the vibration characteristics of the crystal blank are not constant, the final component performance will vary. Therefore, this crystal blank is part of the crystal blank manufacturing process and the electronic component assembly process using the crystal blank. A characteristic inspection process for confirming / inspecting electrical characteristics (for example, frequency response characteristics) is provided. For example, in this characteristic inspection process, as a crystal blank inspection device generally used, after a crystal blank is aligned and supplied by a parts feeder, the crystal blank is inserted into a rotating table that rotates on the inspection table. Then, by rotating the rotary table by 90 °, it is conveyed to the inspection position on the inspection table, and the characteristics of the crystal blank are inspected. The crystal blank after the inspection is further transported to a predetermined sorting position by the rotary table based on the determination result of the quality of the inspection and sorted into a classification box according to the inspection result.

  However, the rotary table described above has a through-hole into which the crystal blank is dropped, and has a structure in which the inspection table faces the bottom of the through-hole. Therefore, the quartz crystal blank is moved so as to be dragged on the inspection table at the bottom portion of the through hole of the rotary table. In recent years, with the improvement in performance of quartz resonators, the thickness of quartz blanks has become extremely thin. Quartz blanks are caught in the gap between the rotary table and the inspection table, or minute dust etc. are found in the gap between the rotary table and the examination table. There is a problem that the rotation of the rotary table stops and the surface of the crystal blank is easily damaged by the dust.

  Further, in the case of a crystal blank whose performance has been improved, a slight difference in thickness of the vibration region of the crystal blank greatly affects the subsequent product performance. Therefore, it is desirable to inspect at a plurality of locations of the crystal blank (for example, two or four locations in the case of a square crystal blank), but with a rotary table, the crystal blank is highly accurate. There was a problem that it was difficult to position.

  In addition, because the crystal blank is dragged over the inspection table, static electricity is charged on the crystal blank, and when dropping into the sorting box, the crystal blank is difficult to separate from the inspection table or falls to an unexpected location. There was also a problem.

  In particular, the ultra-small crystal blank mounted on the ultra-small crystal resonator that has been developed in recent years is designed to hold the oscillation energy in the center of the crystal blank (to improve electrical characteristics). The bevel processing (also referred to as beveling) is performed to make the peripheral edge of the quartz blank to be thinner than the vibration region. Therefore, although not known at the time of the present application, considering that this crystal blank is held by a vacuum chuck with electrodes, as shown in FIG. Further, the suction nozzle 940 is disposed. However, the vacuum chuck 900 has a problem in that a gap 980 is formed between the beveled slope portion 404 and the suction nozzle 940, and suction pressure leaks from the gap 980, and the crystal blank 400 cannot be reliably sucked. Further, although it is conceivable to arrange the suction nozzle 940 in accordance with the shape of the sloped portion 404 of the beveled crystal blank 400, not only the processing of the suction nozzle 940 is complicated, but also the beveled sloped portion. Since 404 also has a processing error, there is a problem that it is actually difficult to execute.

  In view of such circumstances, the present invention intends to provide a vibrator piece characteristic inspection apparatus and a vibrator piece characteristic inspection method capable of carrying a crystal blank with high precision to an inspection position and performing the inspection as it is. .

  The above-mentioned object is achieved by the following means based on the earnest research of the present inventors.

  (1) The present invention is a vibrator piece characteristic inspection device for inspecting the electrical characteristics of a vibrator piece such as a crystal blank, and includes a vacuum chuck that sucks and holds the vibrator piece with a negative pressure. The chuck is disposed in the vicinity of the first electrode region near the center of the vibrator piece and around the first electrode region, and the vacuum port has the outer wall of the first electrode region as a part of its inner wall. And a second electrode region disposed so as to face the first electrode region.

  (2) The present invention also includes a first contact surface that determines the position of the first electrode region and a second contact surface that determines the position of the second electrode region, and the first contact surface A positioning mechanism that determines a relative distance between the first electrode region and the second electrode region by bringing a surface into contact with the second contact surface, and comprising a positioning mechanism according to (1). This is a vibrator piece characteristic inspection device.

  (3) In the vacuum chuck according to the present invention, the first electrode region is formed in a column shape, and an accommodation hole for accommodating the first electrode region is formed therein, and an outer wall of the first electrode region is formed. The vibrator piece characteristic inspection apparatus according to (1) or (2), wherein a gap serving as the vacuum port exists between the inner wall of the housing hole.

  (4) The vibration according to (3), further comprising an insulating member that is interposed between the first electrode region and the accommodation hole and secures the gap serving as a vacuum port. This is a piece characteristic inspection device.

  (5) In the vacuum chuck according to the present invention, a groove having an outer wall of the first electrode region as an inner wall is formed around the first electrode region, and a negative pressure is generated in the groove. Thus, the vibrator piece characteristic inspection apparatus according to (1) or (2), wherein the groove functions as the vacuum port.

  (6) In the present invention, the vacuum chuck has a holding surface around the vacuum port, and the holding surface abuts the vibrator piece when the vacuum chuck adsorbs the vibrator piece. The vibrator piece characteristic inspection apparatus according to any one of (1) to (5), wherein the vibrator piece is held in a surface state.

  (7) In the vibrator element characteristic according to any one of (1) to (6), the first electrode region may be partly surrounded by an insulating member. Inspection equipment.

  (8) The present invention is also characterized in that the second electrode region is surrounded by an insulating member at all or part of the outer periphery and electrically insulated from a holding member that holds the outer periphery of the second electrode region. The vibrator piece characteristic inspection apparatus according to any one of (1) to (7).

  (9) The vibrator according to (6), wherein the holding surface holds the outside of the vibration region so that the vibration piece does not come into contact with the vibration region. This is a single characteristic inspection device.

  (10) In the present invention, it is preferable that the first electrode region has an area substantially the same as an area of a vibration region where the vibrator piece vibrates or an area smaller than an area of the vibration region where the vibrator piece vibrates. The vibrator piece characteristic inspection apparatus according to any one of (1) to (9).

  (11) The present invention is also characterized in that the holding surface is formed within a predetermined flatness and surface roughness by polishing at least a surface in contact with the vibrator piece. ) Or (9).

  (12) In the present invention, it is also preferable that the first contact surface is polished at least in a region where the first contact surface contacts the second contact surface, and the second contact surface contacts at least the first contact surface. When a region is plane-polished and the region where the first abutment surface and the second abutment surface are plane-polished abuts, a gap between the vacuum chuck and the second electrode region has a predetermined interval. The vibrator piece characteristic inspection apparatus according to (2), which is configured as described above.

  (13) In the present invention, a first positioning member that provides the first contact surface is disposed in the vicinity of the first electrode, and the second contact surface is disposed in the vicinity of the second electrode region. A second positioning member is provided, and at least one of the first positioning member or the second positioning member is replaced or displaced, so that a relative distance between the first electrode region and the second electrode region is increased. The vibrator piece characteristic inspection apparatus according to any one of (1) to (12), wherein the vibrator piece characteristic inspection apparatus is changeable.

  (14) In the present invention, the positioning mechanism includes a displacement permission member, and the displacement permission member absorbs an inclination error when the first contact surface and the second contact surface contact each other. The vibrator piece characteristic inspection apparatus according to (2), characterized in that:

  (15) In the present invention, any one of (1) to (14) is characterized in that the vacuum chuck is rotatably arranged, and the vibrator piece can be rotated by the vacuum chuck. It is a vibrator piece characteristic test | inspection apparatus.

  (16) The vibrator element characteristic inspection apparatus according to any one of (1) to (15), wherein the second electrode region is rotatably arranged. .

  (17) The present invention further includes a negative pressure control device that controls a negative pressure applied to the vacuum port, and the negative pressure control device has a lower absolute pressure than the first negative pressure and the first negative pressure. The second negative pressure can be switched, and at least when the vibrator piece is sucked by the vacuum port, control is performed so as to generate the first negative pressure, and at least when the characteristic of the vibrator piece is measured. The vibrator piece characteristic inspection apparatus according to any one of (1) to (16), wherein control is performed so as to generate the second negative pressure.

  (18) In the present invention, the negative pressure control device further includes an air release valve disposed in a negative pressure supply path that supplies negative pressure to the vacuum port, and the first negative pressure supply path includes the first negative pressure supply path. The vibrator piece characteristic inspection apparatus according to (17), wherein the second negative pressure is generated by opening the atmosphere release valve while pressure is being supplied.

  (19) The present invention is also characterized in that the negative pressure control device detaches the vibrator piece from the vacuum chuck by stopping the supply of the negative pressure while the atmosphere release valve is open. The vibrator piece characteristic inspection device according to (17) or (18).

  (20) The present invention also includes a rotating index table, wherein a plurality of the vacuum chucks having the first electrode region are arranged in a circumferential direction of the index table, and the vibrator piece is formed of the index table. The vibrator according to any one of (1) to (19), wherein the transducer is transferred to the inspection position while being mounted on the vacuum chuck by rotation, and the electrical characteristics are inspected. This is a single characteristic inspection device.

  (21) The present invention is a vibrator piece characteristic inspection device for inspecting the electrical characteristics of a vibrator piece such as a crystal blank, and includes a vacuum chuck that sucks and holds the vibrator piece by negative pressure, and the vacuum piece The chuck is disposed in the vicinity of the first electrode region near the center of the vibrator piece and around the first electrode region, and the vacuum port has the outer wall of the first electrode region as a part of its inner wall. And a second electrode region disposed to face the first electrode region, and the vacuum port is formed of the same member as the first electrode. This is a vibrator piece characteristic inspection device.

  (22) The present invention provides a vibrator piece characteristic inspection method for inspecting electrical characteristics of a vibrator piece such as a crystal blank, a supply step of supplying the vibrator piece by a supply device, a first electrode region, And a vacuum chuck provided around the first electrode region and having an outer wall of the first electrode region as an inner wall of the first electrode region, the vibrator piece supplied from the supply device is held by suction The relative distance between the second electrode region provided opposite to the first electrode region is set by a positioning mechanism at the transporting step for transporting and the inspection position during the transporting step, A characteristic inspection step for inspecting characteristics, and a separation step for conveying and separating the vibrator pieces to a predetermined separation device by the vacuum chuck based on the inspection result of the characteristic inspection step. Wherein a vibrator piece characteristic test method.

  ADVANTAGE OF THE INVENTION According to this invention, the exact positioning control of a crystal blank can be performed, and the outstanding effect that it can convey to a predetermined | prescribed inspection position with high precision can be show | played.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a plan view showing the entirety of a characteristic inspection apparatus 1 for a quartz crystal blank (hereinafter, also referred to as a vibrator piece in the present specification) according to a first embodiment of the present invention.

  The crystal blank characteristic inspection apparatus 1 includes a supply tray 20 that aligns and supplies a plurality of crystal blanks 400, a transfer robot 40, an upper electrode mechanism 50, a camera 60, a lower electrode mechanism 80, and a decompression device 100. The storage device 200 and the vacuum pump 300 are provided.

  The supply tray 20 is a container for arranging the crystal blanks 400 one by one in a matrix and holding them in a predetermined position.

  The transfer robot 40 is an orthogonal robot that can move in the XY axis direction, the Z axis (up and down) direction, and the θ (rotation) direction. The transfer robot 40 includes an X-axis arm 42, a Y-axis arm 44 that can be moved in the X-axis direction by the X-axis arm 42, and a Z-axis arm that can be moved in the Y-axis direction by the Y-axis arm 44. 46. The Z-axis arm 46 holds the upper electrode mechanism 50 so as to be movable in the Z direction and rotatable in the θ direction. The transfer robot 40 is controlled to move in each direction by the control unit 48.

  The camera 60 includes a lens unit 62 and an image processing device 64. Therefore, the camera 60 images the crystal blank 400 conveyed to a predetermined imaging region with the lens unit 62 and analyzes the image data of the captured crystal blank 400 with the image processing device 64, whereby the X of the crystal blank 400 is analyzed. Position information such as coordinates, Y coordinates, and θ coordinates can be acquired. The image processing device 64 transmits the acquired position information of the crystal blank 400 to the control unit 48 of the transfer robot 40. The control unit 48 uses this position information to generate a control signal, and transmits the control signal to each arm to control movement of each arm. The transfer robot 40 is a two-axis orthogonal robot here, but the present invention is not limited thereto, and is preferably a SCARA robot, a vertical articulated robot, or the like. It is also preferable to use a mobile robot that rotates in a turret shape.

  Here, the upper electrode mechanism 50 and the lower electrode mechanism 80 will be described in detail with reference to the cross-sectional view of FIG.

  The upper electrode mechanism 50 also serves as a vacuum chuck that can suck the crystal blank 400 with air pressure (negative pressure), and includes an upper electrode fixing member 52, an insulating member 54, and an upper electrode 56. The upper electrode mechanism 50 is connected to the Z-axis arm 46 and can be rotated by a stepping motor (not shown) built in the Z-axis arm 46. The upper electrode fixing member 52 includes a displacement allowing member 52A such as a rubber plate or a spring on the side connected to the Z-axis arm 46. The displacement allowing member 52A ensures a degree of freedom of inclination with respect to the Z-axis arm 46 of the upper electrode mechanism 50. As a result, when the upper electrode mechanism 50 is in contact with the lower electrode mechanism 80, the tilt error can be absorbed.

  The upper electrode fixing member 52 is a cylindrical member made of metal or resin. An upper electrode 56 is disposed in the center of the upper electrode fixing member 52 via an insulating member 54. The upper electrode 56 is a non-ferrous metal such as copper or a conductive cylindrical member such as iron, and an electrode surface 56b is formed on the distal end side (lower electrode mechanism 80 side).

  A gap is formed between the inner peripheral wall of the upper electrode fixing member 52 and the outer peripheral wall of the upper electrode 56. This gap becomes a vacuum port 58. The vacuum port 58 is a hole for generating a negative pressure for sucking the crystal blank 400 in a state of being in contact with the periphery of the upper electrode 56. That is, a part of the inner wall of the vacuum port 58 is always constituted by the outer peripheral wall of the upper electrode 56. Therefore, negative pressure generated by a vacuum pump described later is introduced into a vacuum port 58 that is a gap between the inner wall of the upper electrode fixing member 52 and the outer wall of the upper electrode 56. The quartz crystal blank 400 is surely adsorbed by the negative pressure generated adjacent to the upper electrode 56.

  Here, the vacuum port 58 is formed as a gap having an equal width provided between the upper electrode fixing member 52 and the upper electrode 56. However, the upper electrode 56 is partially formed on the outer peripheral wall of the upper electrode 56. As long as the quartz crystal blank 400 can be adsorbed and held adjacent to 56, the shape and the like are not limited.

  In order to hold the insulating member 54, an edge member fixing hole 52 b is provided on the back surface (Z-axis arm 46 side) of the upper electrode fixing member 52. The insulating member fixing hole 52b is slightly larger than the vacuum port 58, and a step 52a is formed at the boundary. The insulating member 54 is a circular cylindrical member using an insulating material such as resin or elastomer, and an upper electrode fixing hole 54b is formed on the inner peripheral surface thereof. The upper electrode fixing hole 54b is engaged with the upper electrode 56 to hold the upper electrode 56 in a coaxial state. An upper electrode positioning step 54a is formed on the inner wall of the upper electrode fixing hole 54b, and the upper electrode 56 is positioned in the vertical direction by contacting the positioning step 56c formed on the upper electrode 56 side. Is made.

  As already described, the insulating member 54 also has a role of securing a vacuum port 58 by forming a gap between the upper electrode fixing member 52 and the upper electrode 56. That is, the insulating member 54 rationally has a function of electrically insulating the upper electrode fixing member 52 and the upper electrode 56 and a function of forming the vacuum port 58.

  The insulating member 54 may be coupled to the insulating member fixing hole 52b by a frictional force such as an interference fit, or may be bonded by using an adhesive or the like. Also, the insulating member fixing hole 52b and the insulating member may be bonded. A thread groove may be formed in 54, and both may be screwed together.

  A holding surface 52c and a first contact surface 52e are provided at the lower end of the upper electrode fixing member 52 (on the lower electrode mechanism 80 side).

  The first contact surface 52e is configured to contact a second contact surface 82a provided on an adjustment ring 82, which will be described later. The first contact surface 52e is preferably formed in a range of predetermined flatness and surface roughness by flat polishing such as flat milling and lapping.

  The holding surface 52 c is disposed on the outer peripheral side of the vacuum port 52 and supports the outside of the vibration region inside the bevel processing portion 404 of the crystal blank 400. Therefore, the vacuum port 52 can reliably adsorb the flat portion of the crystal blank 400 (region surface between the vibration region of the crystal blank 400 and the bevel processing portion 404).

  Further, the upper electrode fixing member 52 is formed with a negative pressure introduction hole 52 d that penetrates from the outer peripheral surface to the vacuum port 58. A vacuum pump (details will be described later) is connected to the outside of the negative pressure introduction hole 52d. Therefore, the vacuum pump can create a negative pressure state at the lower end of the vacuum port 58 through the negative pressure introduction hole 52d and suck the crystal blank 400.

  When the crystal blank 400 is attracted by the vacuum port 58, the upper electrode 56 is in close contact with the crystal blank 400 and applies a signal having a predetermined frequency generated by the frequency generator 89 to the crystal blank 400. The electrode surface 56b may be not in close contact with the crystal blank 400 as long as an appropriate signal can be applied to the crystal blank 400. For example, a gap of about 10 to 30 μm may be provided between the upper electrode 56 and the crystal blank 400, for example. This gap can prevent the electrode surface 56b from colliding with the quartz blank 400 and scratching the quartz blank 400 or deforming the quartz blank 400.

  The lower electrode mechanism 80 includes an adjustment ring 82, a lower electrode fixing member 84, an insulating member 86, and a lower electrode 88. The lower electrode 88 and the upper electrode 56 are connected to a frequency generator 89.

  The adjustment ring 82 is a hollow ring member made of a metal member such as iron. On the upper surface of the adjustment ring 82, a second contact surface 82a is formed at a position in contact with the first contact surface 52e of the upper electrode fixing member 54.

  The adjustment ring 82 is replaced with a ring having a predetermined thickness, or an adjustment shim material is inserted on the lower side, whereby the gap between the crystal blank 400 described above and the lower electrode 88 described later can be reduced, for example, Adjustment can be made within a range of 20 to 80 μm.

  The lower electrode fixing member 84 is a disk member made of a metal such as iron or a non-ferrous metal such as aluminum and having an insulating member fixing hole 84a at the center. An adjustment ring 82 is disposed on the upper surface of the lower electrode fixing member 84. Further, a positioning step 84b is formed in the insulating member fixing hole 84a along the circumferential direction.

  The insulating member 86 has a cylindrical shape and is fixed coaxially in the insulating member fixing hole 84 a of the lower electrode fixing member 84. A circumferential step 84b is formed in the insulating member fixing hole 84a. By engaging the lower end of the insulating member 86, relative positioning in the vertical direction is achieved. Further, the inner peripheral surface of the insulating member 86 is a lower electrode fixing hole 86a, which is in contact with the outer peripheral surface (fixed surface 88a) of the cylindrical lower electrode 88 to hold the lower electrode 88 coaxially.

  The fixing surface 88a of the lower electrode is formed with a ring-shaped positioning projection 88b that expands in the radial direction, and is engaged with the upper surface of the insulating member 86 to perform relative positioning in the vertical direction. It is like that. In the present embodiment, one lower electrode 88 is disposed at the center, but the number of lower electrodes 88 is not limited to one, and the crystal blank 400 is considered in consideration of variations in the thickness of the crystal blank 400. It is also preferable to dispose a plurality of crystal blanks in the vibration region, and by arranging at least two symmetrical positions in the longitudinal direction, it is possible to sort out crystal blanks 400 having a more uniform thickness.

  Here, the frequency generator 89 is a frequency sweep type analyzer such as a network analyzer. This frequency generator 89 analyzes the frequency characteristics by observing the phase difference and the output level of the input / output signals of the crystal blank 400 by continuously changing the frequency within a predetermined range.

  Here, the frequency generator 89 is exemplified as the characteristic inspection device for the crystal blank 400. However, the present invention is not limited thereto, and it is of course possible to inspect the characteristics of the crystal blank 400 using other devices. is there.

  Returning to FIG. 1, the decompression device 100 is an electromagnetic valve provided with a closed port 102 and an atmosphere release port 104, and can arbitrarily switch between the closed port 102 and the atmosphere release port 104. This decompression device 100 is provided in the middle of an air pipe 300A that connects between the negative pressure introduction hole 52d and the vacuum pump 300, and maintains the applied state of the negative pressure of the vacuum port 58 applied by the vacuum pump 300. The pressure can be reduced (in absolute value conversion) to a value close to atmospheric pressure. Note that the negative pressure output switch 302 of the vacuum pump 300 controls ON / OFF of the negative pressure of the vacuum pump 300.

  The storage device 200 includes a slide table 210 and a plurality of classification trays 220 arranged in parallel in the sliding direction on the slide table 210.

  The slide table 210 is configured to be slidable by a stepping motor (not shown) provided in the lower part, and corresponds to the inspection result based on the inspection result of the crystal blank 400 by the upper and lower electrode mechanisms 50 and 80 described above. The classification tray 220 is linearly moved to a predetermined carry-in position.

  Next, the method for inspecting the characteristics of the crystal blank will be described in detail with reference to FIG. FIG. 2 is a plan view showing the movement of the crystal blank characteristic inspection apparatus 1.

  <Conveying process>

  The transfer robot 40 controls the X-axis arm 42, the Y-axis arm 44, and the Z-axis arm 46 in accordance with a control signal from the control unit 48, and the individual crystal blanks in which the upper electrode mechanism 50 is disposed on the supply tray 20. Move to just above 400. Further, the Z-axis arm 46 lowers the upper electrode mechanism 50 so that the holding surface 52 c of the upper electrode member 52 approaches the crystal blank 400.

  The Z-axis arm 46 holds the crystal blank 400 and the upper electrode fixing member 52 (holding surface) so that the holding surface 52c and the crystal blank 400 do not come into contact with each other when the crystal blank 400 is sucked. 52c) so as to have a predetermined gap (for example, about 0.1 to 0.3 mm).

  In this state, the negative pressure output switch 302 of the vacuum pump 300 is turned on to apply a negative pressure to the lower end of the vacuum port 58 via the air pipe 300A. At this time, the decompression device 100 is switched to the state of the closed port 102, and the negative pressure inherent to the vacuum pump 300 is applied to the vacuum port 58, so that the quartz crystal blank 400 is reliably sucked up. Since this negative pressure is generated adjacent to the upper electrode 56, even a very small quartz blank 400 is reliably sucked and held.

  Next, the transfer robot 40 controls the X-axis arm 42, the Y-axis arm 44, and the Z-axis arm 46 in a state where the crystal blank 400 is sucked and held to the imaging region of the lens unit 62 of the camera 60. 400 is transported.

  The camera 60 acquires position information (X axis, Y axis, θ angle) of the crystal blank 400 by the image processing device 64 and transmits the position information to the control unit 48 of the transfer robot 40. The control unit 48 and the transfer robot 40 convey the crystal blank 400 to the upper portion of the predetermined inspection position of the lower electrode mechanism 80 while performing position correction based on the position information of the crystal blank 400 described above.

  <Characteristic inspection process>

  The transfer robot 40 moves the upper electrode mechanism 50 (crystal blank 400) to a position just above a predetermined inspection position of the lower electrode mechanism 80, and then lowers the upper electrode mechanism 50 to move the upper electrode fixing member 52. The first contact surface 52e and the second contact surface 82a of the adjustment ring 82 are brought into contact with each other.

  Thereafter, the vacuum pressure 300 is switched to the atmosphere opening port 104 while the negative pressure output switch 302 of the vacuum pump 300 is turned on, so that the adsorption pressure is reduced to a low negative pressure state (inspection pressure). This is because if the suction pressure of the crystal blank 400 is high, the crystal blank 400 may be slightly deformed and an error may occur in output characteristics. Therefore, during the characteristic inspection, the quartz blank 400 is prevented from being subjected to external force by holding it with a negative pressure as small as possible. Although the pressure is reduced using the air release port 104 here, the pressure can also be controlled by controlling the vacuum pump 300 itself.

  A gap between the crystal blank 400 and the lower electrode 88 provided in the lower electrode mechanism 80 is determined by the first contact surface 52e and the second contact surface 82a. The gap can be adjusted by replacing the adjustment ring 82 with a ring having a predetermined thickness. The adjustment of the gap may be such that the adjustment ring 82 and the lower electrode fixing member 84 can be fastened with screws, and the height of the adjustment ring 82 can be arbitrarily adjusted by rotating the screws. It is also preferable that the relative position of the upper electrode 56 and the upper electrode fixing member 52 can be adjusted by a method.

  In this state, the frequency generator 89 applies a sweep signal between the upper electrode 56 of the upper electrode mechanism 50 and the lower electrode 88 of the lower electrode mechanism 80. Thereby, a sweep signal having a frequency (for example, 100 MHz to 200 MHz) continuously changing in a predetermined range is applied to the crystal blank 400.

  The frequency generator 89 inspects the frequency characteristics of the crystal blank 400 by causing the sweep signal to resonate with the crystal blank 400.

  <Separation process>

  The transfer robot 40 controls the X-axis arm 42, the Y-axis arm 44, and the Z-axis arm 46 based on the inspection result performed through the lower electrode mechanism 80 and is held by the upper electrode mechanism 50. The quartz crystal blank 400 is transported to a predetermined place. For example, when the crystal blank 400 is a defective product, the crystal blank 400 may be transported to a waste box (not shown). In other cases, the crystal blank 400 is transported to the storage device 200 side. Even during this conveyance, the negative pressure output switch 302 of the vacuum pump 300 is kept on, and the decompression device 100 is kept in the atmosphere open port 104 state.

  The storage device 200 slides the slide table 210 based on the result of the characteristic inspection of the crystal blank 400 and moves the predetermined classification tray 220 to the movement position of the transfer robot 40. The classification tray 220 may be grouped according to the quality level of the crystal blank 400, or may be grouped according to the signal characteristics of the crystal blank 400. Further, the slide tail 210 is provided with a negative pressure generating device so that a negative pressure is applied to each bottom surface of the classification tray 220.

  When the transfer of the crystal blank 400 by the transfer robot 40 is completed, the negative pressure output switch 302 of the vacuum pump 300 is turned off to stop the supply of negative pressure. Since the decompression device 100 has already been switched to the atmosphere release side (atmosphere release port 104), the negative pressure smoothly decreases, and the pressure applied to the holding surface 56c becomes zero (atmospheric pressure). Thereby, the crystal blank 400 is detached from the holding surface 52c due to its own weight and the negative pressure of the classification tray 220, and is accommodated in a predetermined position of the classification tray 220.

  As described above, according to the characteristic inspection apparatus 1 of the first embodiment, the resonator piece such as the very miniaturized crystal blank 400 whose peripheral edge is beveled by the vacuum port 58 adjacent to the upper electrode 56 is reliably obtained. Adsorb and hold on to transport. In particular, since the outer wall of the upper electrode 56 (first electrode) also serves as a vacuum port 58, the upper electrode 56 and the vacuum port 58 are integrated as compared with the case where the upper electrode 56 and the vacuum port 58 are separately provided. Therefore, since it becomes a very small vacuum chuck, the inner flat portion of the ultra-small quartz blank whose peripheral edge is beveled can be reliably adsorbed. Moreover, according to this characteristic inspection apparatus 1, the characteristic inspection can be performed with the upper electrode 56 and the lower electrode 88 (second electrode) while the crystal blank 400 is held by suction.

  Furthermore, since the upper electrode 56 is entirely or partially surrounded by the insulating member 54 and is electrically insulated from the upper electrode fixing member 52 serving as a casing, the insulating property of the upper electrode 52 can be reliably ensured. In addition, a predetermined gap serving as a vacuum port 58 can be secured between the upper electrode fixing member 52 and the upper electrode 56.

  Further, since the holding surface 52c is disposed on the outer periphery of the vacuum port 58 in the vacuum chuck, the inner and outer regions of the vacuum port 58 can be supported by the holding surface 52c and the electrode surface 56b. Therefore, the vacuum chuck can be held in a stable state without applying unnecessary external force to the crystal blank 400 in a state in which the plane posture (flatness) of the crystal blank 400 is ensured, so that an error in output characteristics is reduced. Characteristic inspection can be performed accurately.

  Furthermore, in this embodiment, the negative pressure control device that controls the negative pressure applied to the vacuum chuck, a first negative pressure (for example, an adsorption pressure) required when sucking and holding the crystal blank 400, and this The second negative pressure (for example, inspection pressure) whose absolute pressure is lower than the first negative pressure can be switched, and at least when the crystal blank 400 is sucked by the vacuum chuck, control is performed so as to generate the first negative pressure. At least when measuring the characteristics of the crystal blank 400, control is performed so as to generate the second negative pressure. As a result, the crystal blank 400 can be reliably sucked, and at the time of inspection, the inspection accuracy can be improved without deforming the crystal blank 400. In particular, since the air pipe 300A serving as the negative pressure supply path is provided with an atmosphere release valve by the decompression device 100, the second negative pressure (inspection pressure) can be generated while maintaining the atmosphere release state. . As a result, when the quartz crystal blank 400 is discharged into the storage device 200, when the vacuum break is performed on the side of the vacuum pump 300 (the act of supplying a positive pressure simultaneously with turning off the switch), the amount of vacuum break (supply of positive pressure) Amount) and the atmospheric release valve can absorb the momentum when the crystal blank 400 is released at the time of destruction, and a smooth discharge operation close to natural fall is realized.

  Next, the characteristic inspection apparatus 101 according to the second embodiment of the present invention will be described in detail with reference to FIG. Except for the structure of the upper electrode mechanism 500, the structure is substantially the same as that of the characteristic inspection apparatus 1 of the first embodiment. Therefore, the same reference numerals are used for the same or similar members, and the entire illustration and description are omitted. The characteristic structure of the upper electrode mechanism 500 will be mainly described. The second embodiment is characterized in that the electrical characteristics can be inspected by attracting the mesa rank 420.

  The upper electrode mechanism 500 includes an upper electrode fixing member 52, an insulating member 54, and an upper electrode 520. On the holding surface 522 of the upper electrode 520, a relief portion 524 is formed at a portion corresponding to the vibration region 422 of the mesa rank 420. The relief portion 524 has a concave shape, and the holding surface 522 contacts the vibration region 422 (the thinnest portion) of the mesa rank 420 when the mesa rank 420 is sucked and held by the holding surface 522 of the upper electrode 520 in a surface state. This prevents the vibration characteristics of the mesa rank 420 from being affected, and further prevents the mesa rank 420 from being damaged. Further, in the escape portion 524, an electrode convex portion 524A is formed so as to be close to the vibration surface of the vibration region 422. Accordingly, it is possible to make the electrode extremely close to the vibration surface while avoiding interference between the contour (outer edge) of the vibration region 422 and the holding surface 522. The insulating member 54 has a role of providing a predetermined gap that functions as a vacuum port 526 between the upper electrode fixing member 52 and the upper electrode 520. That is, a part of the inner wall of the vacuum port 526 is constituted by the outer peripheral wall of the upper electrode 520.

  According to the characteristic inspection apparatus 101 of the second embodiment, the vacuum port 526 securely holds the periphery of the vacuum port 526 while preventing a negative pressure from being applied to the vibration region 422 of the mesa rank 420. As a result, it is possible to inspect the electrical characteristics while maintaining the vibration region 422 in a natural state. Further, the escape portion 524 prevents interference between the holding surface 522 and the vibration region 422, and the holding surface 522 holds the outside of the vibration region 422. Concavities and convexities such as burrs are likely to be formed on the contour portion of the vibration region 422, but the escape portion 524 serving as a concave portion does not damage the vibration region 422 of the mesa rank 420 or give unnecessary external force to the mesa rank 420. It is like that.

  Next, a characteristic inspection apparatus 201 according to the third embodiment of the present invention will be described in detail with reference to FIG. Except for the structure of the upper electrode mechanism 600, the structure is substantially the same as that of the characteristic inspection apparatus 1 of the first embodiment. Therefore, the same reference numerals are used for the same or similar members, and the entire illustration and description are omitted. The characteristic structure of the upper electrode mechanism 600 will be mainly described. The third embodiment is characterized in that a groove for generating a negative pressure is provided around the upper electrode or in the upper electrode itself.

  The upper electrode mechanism 600 includes an upper electrode fixing member 610, an insulating member 620, and an upper electrode 630.

  The vacuum port 614 is an annular groove formed by a gap between the inner wall of the upper electrode fixing member 610 and the outer wall of the upper electrode 630, and the depth thereof is extremely shallow compared to the vacuum port of the first embodiment. ing. That is, a part of the inner wall of the vacuum port 614 is constituted by the outer peripheral wall of the upper electrode 630. The vacuum port 614 is connected to a vacuum pump through a negative pressure introduction hole 615. Therefore, the negative pressure generated by the vacuum pump is applied to the crystal blank 400 by the vacuum port 614, and the crystal blank 400 is sucked and held.

  The upper electrode 630 has an abutting portion 632, and the abutting portion 632 comes into contact with the lower end of the insulating member 620 to determine the vertical position of the upper electrode 630.

  According to the characteristic inspection apparatus 201 of the third embodiment, since the groove-like vacuum port 614 having the outer wall of the first electrode 630 as its inner wall is formed around the first electrode 630, the vacuum chuck is pivoted. The size and weight can be further reduced in the direction.

  Further, the holding surface 616 adjacent to the vacuum port 614 can reliably support the flat portion outside the vibration region 402 of the crystal blank 400.

  Further, in this embodiment, the groove-like vacuum port 614 is formed in an annular shape so as to surround the upper electrode 630. However, any structure can be used as long as the crystal blank 400 can be adsorbed in a balanced manner. As shown in FIG. 6, it is preferable to disperse and provide a plurality of locations such as three or four at an equal angle around the upper electrode 630. Further, the vacuum port is not limited to an annular or arc-shaped groove or gap, and other shapes are preferable as long as the crystal blank 400 can be sucked evenly in a balanced manner.

  Next, a characteristic inspection apparatus 301 according to the fourth embodiment of the present invention will be described in detail with reference to FIG. Except for the structure of the upper electrode mechanism 650, the structure is substantially the same as that of the characteristic inspection apparatus 1 of the first embodiment. Therefore, the same or similar members are denoted by the same reference numerals, and the entire illustration and description are omitted. The characteristic structure of the upper electrode mechanism 650 will be mainly described. This characteristic inspection device 301 is characterized in that the upper electrode and the vacuum port are the same member and are integrally molded.

  The upper electrode mechanism 650 includes an upper electrode 660 and a negative pressure introduction hole 670.

  The upper electrode 660 is a cylindrical electrode member having a bottom, and this bottom portion constitutes an electrode surface 662. Further, the upper electrode 710 includes a vacuum port 664 formed on the electrode surface 662, a holding surface 666 arranged around the vacuum port 664, and a first contact surface 668 for positioning in the vertical direction.

  The electrode surface 662 is provided substantially at the center of the upper electrode 660, and comes close to the approximate center of the crystal blank 400 when the upper electrode mechanism 650 contacts the lower electrode mechanism 80. Further, a vacuum port 664 is arranged in a partial annular shape around the electrode surface 662. That is, the vacuum port 664 defines an inner electrode region for measuring the crystal blank 400 and an outer holding surface 666 for holding the crystal blank 400.

  Specifically, the vacuum port 664 is a hole or a groove formed in an arc shape around the electrode surface 662, and the outer wall of the electrode surface 662 is formed as its inner wall. That is, the vacuum port 664 is disposed adjacent to the electrode surface 662. Further, the vacuum port 664 communicates with a negative pressure introduction hole 670 provided on the back surface side (Z-axis arm 46 side) of the upper electrode 660. Thereby, the vacuum port 664 can adsorb the crystal blank 400 around the electrode surface 662 by the negative pressure generated from the vacuum pump (not shown) connected to the negative pressure introduction hole 670.

  The holding surface 666 is a flat surface provided around the vacuum port 664, and supports the outer periphery of the crystal blank 400 when the vacuum port 664 sucks the crystal blank 400.

  The holding surface 666 mainly holds a portion that does not affect the vibration characteristics of the crystal blank 400 during the inspection. Therefore, the holding surface 666 can support the posture of the crystal blank 400 in a surface state, and can suppress deformation of the crystal blank 400 in the suction state.

  The first contact surface 668 contacts the second contact surface 82 a provided on the adjustment ring 82, and determines the vertical position of the upper electrode mechanism 650. The first contact surface is subjected to an insulation treatment such as covering at least a range in contact with the second contact surface 82a with an insulating coating or insulating coating so as not to be electrically shorted with the adjustment ring 82. It is preferable to keep.

  The negative pressure introduction hole 670 is a hole provided on the back surface (on the Z-axis arm 46 side) of the upper electrode 660 and is connected to a vacuum pump (not shown) to introduce the negative pressure generated by the vacuum pump. Further, the distal end side (lower electrode mechanism 80 side) of the negative pressure introduction hole 670 communicates with the vacuum port 664, introduces the negative pressure generated by the vacuum pump to the distal end, and adsorbs the water-chang blank 400 to the vacuum chuck.

  Therefore, according to the present embodiment, the upper electrode mechanism 650 is configured such that the upper electrode and the vacuum chuck are the same member and are integrally formed, that is, the upper electrode fixing member and the insulating member for fixing the upper electrode to the vacuum chuck. Therefore, it is possible to reduce the manufacturing and assembly costs.

  Further, since the vacuum port 664 having the outer wall of the electrode surface 662 as its inner wall is provided around the electrode surface 662, the vicinity of the center of the crystal blank 400 can be attracted more.

  The vacuum port 664 may have any shape as long as it avoids the center serving as the electrode region and can adsorb the hydrangea blank 400 in a balanced manner. For example, as shown in FIGS. As described above, it is preferable that the electrode surface 662 be arranged symmetrically in the vertical and horizontal directions. In any case, the electrode surface 662 needs to be supported by the plurality of support pieces 669.

  Next, a characteristic inspection apparatus 401 according to the fifth embodiment of the present invention will be described in detail with reference to FIG. The characteristic inspection apparatus 401 includes a crystal blank 400 using a first electrode mechanism 760 provided at regular intervals in the circumferential direction on the index table 750 and a second electrode mechanism 800 provided on a rotation path of the index table 750. It is characterized by inspecting its electrical characteristics.

  The crystal blank characteristic inspection apparatus 401 includes a supply tray 20 in which a plurality of crystal blanks 400 are arranged, a supply robot 700, a position correction camera 720, an index table 750 including a first electrode mechanism 760, a first A two-electrode mechanism 800, a storage robot 900, and a classification tray 920 are provided.

  The supply tray 20 is a tray in which the crystal blanks 400 are arranged in a matrix, and has substantially the same configuration and function as the supply tray 20 described in the first embodiment. Omitted.

  The supply robot 700 is an orthogonal robot that can move in the X-Y axis directions, similarly to the transfer robot 40 described in the first embodiment. The supply robot 700 includes an X-axis arm 702 that moves in the X-axis direction, a Y-axis arm 704 that moves in the Y-axis direction, an image recognition camera 706 for recognizing the crystal blank 400 of the supply tray 20 with an image, The control unit 709 controls each arm based on the control signal, and a Z-axis arm 710 for holding the crystal blank 400 by suction. Although detailed illustration is omitted, the Z-axis arm 710 includes a suction device using a vacuum pump negative pressure, and holds the crystal blank 400 by the suction device. The Z-axis arm 710 is configured to be able to rotate this suction device.

  The image recognition camera 706 is installed adjacent to the Z-axis arm 710 and recognizes the crystal blank 400 and predetermined marking information provided on the supply tray 20 with an image. Such information is input to the control unit 709, and the Z-axis arm 710 can be moved to a position just above the predetermined crystal blank 400 to be sucked and held.

  Similar to the upper electrode mechanism 50 described in the first embodiment, the Z-axis arm 710 sucks the crystal blank 400 by sucking it (suction pressure) and sucks it until it is transported to the index table 750 and released. The holding pressure (holding pressure) can be controlled. That is, the Z-axis arm 710 controls the holding pressure to be lower than the suction pressure when sucking the crystal blank 400 from the supply tray 20, and mounts the crystal blank 400 on the first electrode mechanism 760 (details will be described later). Pressure reduction control up to is possible.

  In this embodiment, the supply robot 700 is an orthogonal robot in which the X-axis arm 702 and the Y-axis arm 704 can move in the X-axis direction or the Y-axis direction. However, the supply robot 700 is not limited to such an orthogonal robot. For example, a SCARA robot or a vertical articulated robot is also preferable.

  The position correction camera 720 includes a lens unit 722 and an image processing device 724. The position correction camera 720 photographs the crystal blank 400 held by the Z-axis arm 710 of the supply robot 700, and analyzes the image information by the image processing device 724, whereby the position of the crystal blank 400 in the photographing region is detected. Coordinates (X, Y, θ) can be acquired. The image processing device 724 transmits the position coordinates (X, Y, θ) to the control unit 709 of the supply robot 700.

  The supply robot 700 and its control unit 709, based on the position information (X, Y, θ) regarding the holding posture of the crystal blank 400, up to a predetermined first electrode mechanism 760 disposed on the index table 750. Transport.

  The Z-axis arm 710 transports the crystal blank 400 to the position directly above the first electrode mechanism 760, then descends to a predetermined height, reduces the adsorption pressure to atmospheric pressure, opens the crystal blank 400, and opens the first electrode. It is placed at a predetermined position of the mechanism 760. The delivery is performed such that the vacuum chuck on the first electrode mechanism 760 side sucks the crystal blank 400 from the Z-axis arm 710.

  In the present embodiment, four first electrode mechanisms 760 are arranged on the circumference of the index table 750 at 90 ° intervals. The index table 750 rotates clockwise (clockwise) every 90 °, and conveys the crystal blank 400 placed on the first electrode mechanism 760 to the inspection position 752 where the second electrode mechanism 800 is located. The number of first electrode mechanisms 760 is not limited to four as in this embodiment. For example, eight first electrode mechanisms 760 may be arranged at 45 ° intervals and twelve at 30 ° intervals. Absent.

  The second electrode mechanism 800 (details will be described later) outputs a sweep signal from the electrode and detects the vibration characteristic of the crystal blank 400 according to the inspection signal. After the inspection is completed, the index table 750 is further rotated 90 ° clockwise (right rotation), so that the first electrode mechanism 760 conveys the crystal blank 400 to the sorting position 754.

  The accommodating robot 900 adsorbs the crystal blank 400 moved to the sorting position 754 described above by a vacuum port provided at its tip, and places the crystal blank 400 on the classification tray 920 according to the characteristic inspection result of the crystal blank 400. Sort.

  The accommodating robot 900 is an orthogonal robot including the X-axis arm 902, the Y-axis arm 904, and the Z-axis arm 906, similar to the supply robot 700 described above, and detailed description of the shape, structure, movement, and the like is omitted. To do. The accommodating robot 900 is an orthogonal robot in which the X-axis arm 902 and the Y-axis arm 904 can move in the X-axis direction or the Y-axis direction, but is not limited to such an orthogonal robot. A vertical articulated robot is also preferable.

  FIG. 10 shows an enlarged cross-sectional view of the first electrode mechanism 760 and the second electrode mechanism 800.

  The first electrode mechanism 760 includes a fixing base 761, a lower electrode fixing member 762, an insulating member 764, and a lower electrode 766. The fixing table 761 is a fixing jig for connecting and fixing the index table 750 and the lower electrode fixing member 762, and accommodates therein a suction port 761a connected to the negative pressure introduction hole 762c and the like. .

  The lower electrode fixing member 762 is provided with a vacuum port 762b, a holding surface 762c, a negative pressure introduction hole 762d, and a step portion 762e.

  The vacuum port 762 b is an annular hole formed by a gap between the inner wall of the lower electrode fixing member 762 and the outer wall of the lower electrode 766. The vacuum port 762b is provided with a negative pressure introduction hole 762d, and the negative pressure introduction hole 762d communicates with the suction port 761a of the fixed base 761 and is connected to the vacuum pump. As a result, a negative pressure can be generated at the upper end (the second electrode mechanism 800 side) of the vacuum port 762b by the vacuum pump. Since the vacuum port 762b is also provided using the outer peripheral surface of the lower electrode 766 as in the first embodiment, the lower electrode 766 and the vacuum port 762b can be integrated. Thereby, since the whole 1st electrode mechanism 760 can be reduced in size very much, the plane part inside the ultra-small crystal blank by which the periphery was beveled can be adsorb | sucked reliably.

  The holding surface 762c is the upper surface of the lower electrode fixing member 762 and is formed adjacent to the outer edge of the vacuum port 762b. As a result, when the vacuum port 762b sucks the crystal blank 400, the vacuum port 762b contacts and supports the vicinity of the outer periphery of the crystal blank 400. Therefore, as described above, the holding surface 762c can support the inside of the inclined surface 404 even in the case of the ultra-small crystal blank 400 whose peripheral edge is beveled.

The step 762e formed on the inner wall of the lower electrode fixing member 762 contacts the upper end of the insulating member 764 fitted from the lower side (fixing base 761 side), and determines the vertical direction of the insulating member 764. The upper end of the insulating member 764 comes into contact with the step 762e of the upper electrode fixing member, and the vertical position of the insulating member 764 is determined.
The insulating member 764 includes a lower electrode holding hole 764a, and holds the lower electrode 766.

  An electrode surface 766a is formed on the upper end surface of the lower electrode 766, and the periphery of the electrode surface 766a is surrounded by a vacuum port 762b. As a result, a negative pressure is generated by the vacuum port 762b adjacent to the periphery of the electrode surface 766a, and the crystal blank 400 is sucked and held by this negative pressure. As a result, in the crystal blank 400, the outer peripheral side of the vacuum port 762b is supported by the holding surface 762c, and the inner peripheral side is supported by the electrode surface 766a. As a result, the first electrode mechanism 760 can be held in a surface state without applying unnecessary external force to the crystal blank 400, so that an error in output characteristics can be reduced and the characteristics can be inspected accurately.

  The suction port 761a is provided with an air release port (not shown). Therefore, a high negative pressure state where the vacuum pump is turned on with the atmosphere release port closed, a low negative pressure state where the vacuum pump is turned on with the atmosphere release port opened, and an atmosphere release with the vacuum pump turned off. It is possible to switch between three types of states, the atmospheric pressure state with the port open. For example, when the Z-axis arm 710 supplies the crystal blank 400 to the first electrode mechanism 760, the first electrode mechanism 760 side is placed in a high negative pressure state so that the crystal blank 400 is sucked. Further, a high negative pressure state is set during the conveyance by the index table 750, and the posture of the crystal blank 400 being conveyed is stabilized. On the other hand, during the characteristic inspection of the crystal blank 400, the air release port is opened while the vacuum pump is turned on so that a low negative pressure state is established, and the negative pressure of the vacuum port 762b is reduced to such an extent that the crystal blank 400 is not deformed. be able to. When the inspection is completed, the high negative pressure state is set again, and rotation is performed 90 degrees.

  When the first electrode mechanism 760 supplies the crystal blank 400 to the housing robot 900, the first electrode mechanism 760 is opened smoothly by opening the atmosphere release port to make it a low negative pressure state and then breaking the vacuum state with a vacuum pump. Can be at atmospheric pressure. Thereby, the crystal blank 400 can be easily detached from the holding surfaces 762c and 766a, and the receiving robot 900 can suck up smoothly.

  The second electrode mechanism 800 includes an upper electrode fixing member 810, an adjustment ring 820, an upper electrode 830, and a probe head 840.

  The upper electrode fixing member 810 is an insulating member made of resin or elastomer, and has a hollow disk shape. The hollow portion of the upper electrode fixing member 810 holds the upper electrode 830. Further, a probe fixing hole 810A is formed in the upper electrode fixing member 810, and a probe head 840 is held in the probe fixing hole 810A. The probe head 840 descends together with the second electrode mechanism 800 and contacts the lower electrode 766 of the counterpart side only when the characteristics of the crystal blank 400 are inspected to ensure an electrical conduction state. Thereby, a voltage can be applied between the lower electrode 766 and the upper electrode 830 only by arranging a network analyzer (frequency generator 89) on the second electrode mechanism 800 side.

  The adjustment ring 820 is a cylindrical member, and includes a second contact surface 822 at a position where the adjustment ring 820 contacts the first contact surface 762 a of the lower electrode fixing member 762. By replacing the adjustment ring 820 with a ring having a predetermined plate thickness, the gap between the crystal blank 400 and the upper electrode 830 described above can be adjusted to a predetermined value (for example, 20 to 80 μm).

  Also in the characteristic inspection apparatus 301 of the fourth embodiment, the crystal blank 400 is held by the vacuum port 762b arranged adjacent to the periphery of the electrode surface 766a. The blank 400 can be reliably conveyed without being damaged.

  Further, since the crystal blank 400 is corrected by the image recognition of the correction camera 720 and accurately placed at a predetermined position of the first electrode mechanism 760, the crystal blank 400 is not subjected to position control on the first electrode mechanism 760 side. The characteristic inspection of the blank 400 can be performed accurately. In addition, a plurality of first electrode mechanisms are arranged on a rotary conveyance device such as the index table 750, and the characteristic inspection can be performed in parallel during the conveyance process. be able to.

  In the various embodiments described above, the electrode mechanism side including the vacuum chuck is shown only when it is rotated around the Z axis, but the present invention is not limited thereto. For example, in the characteristic inspection apparatus 401 of the fifth embodiment, it is possible to accurately position the measurement site in the crystal blank 400 by rotating the second electrode mechanism 800 side.

As mentioned above, although embodiment of this invention was illustrated, it cannot be overemphasized that a measuring object is not limited to the quartz blank 400, and the vibration piece of another material may be sufficient.
In the above-described various embodiments, the upper electrode fixing member and the upper electrode are shown as separate members, but the present invention is not limited thereto. For example, the present invention includes a case in which the upper electrode fixing member and the upper electrode have an integral structure, and a portion close to the measured portion of the crystal blank is used as the upper electrode region.

  The present invention can be widely used in the field of characteristic inspection devices for vibrator pieces such as crystal blanks.

It is a top view showing the whole characteristic inspection apparatus of the crystal blank concerning a 1st embodiment of the present invention. It is sectional drawing of the side surface of an upper electrode mechanism and a lower electrode mechanism. It is a top view showing a motion of the characteristic inspection apparatus of a crystal blank. It is side surface sectional drawing of the upper side electrode mechanism and lower side electrode mechanism of the characteristic inspection apparatus of 2nd Embodiment. It is sectional drawing showing the side surface of the upper side electrode mechanism and lower side electrode mechanism of the characteristic inspection apparatus of 3rd Embodiment. It is the front view seen from the lower electrode mechanism side which shows another form of the upper electrode mechanism which concerns on 3rd Embodiment. It is sectional drawing showing the side surface of the upper side electrode mechanism and lower side electrode mechanism of the characteristic inspection apparatus of 4th Embodiment. (A)-(b) It is the front view seen from the lower electrode mechanism side which shows another form of the upper electrode mechanism which concerns on 4th Embodiment. It is a top view showing the whole characteristic inspection apparatus of a 5th embodiment. 4 is a side sectional view of a first electrode mechanism 760 and a second electrode mechanism 800. FIG. It is a front view regarding the virtual example of the vacuum chuck for crystal blank conveyance.

Explanation of symbols

1, 101, 201, 301 Characteristic inspection device 20 Supply tray 40 Transfer robot 50 Upper electrode mechanism 60 Camera 80 Lower electrode mechanism 100 Decompression device 200 Storage device 300 Vacuum pump 400 Crystal blank

Claims (22)

A vibrator piece characteristic inspection device for inspecting electrical characteristics of a vibrator piece such as a crystal blank,
A vacuum chuck for holding the vibrator piece by negative pressure;
The vacuum chuck is
A first electrode region close to the vicinity of the center of the vibrator piece;
A vacuum port disposed around the first electrode region and having the outer wall of the first electrode region as a part of its inner wall; and
A vibrator piece characteristic inspection apparatus comprising a second electrode region disposed so as to face the first electrode region. A first contact surface for determining a position of the first electrode region;
A second contact surface for determining the position of the second electrode region;
With
A positioning mechanism for determining a relative distance between the first electrode region and the second electrode region by contacting the first contact surface and the second contact surface;
Characterized by comprising,
The vibrator piece characteristic inspection apparatus according to claim 1. The vacuum chuck is
The first electrode region is formed in a columnar shape, and an accommodation hole for accommodating the first electrode region is formed therein,
A gap serving as the vacuum port exists between the outer wall of the first electrode region and the inner wall of the accommodation hole,
The vibrator piece characteristic inspection device according to claim 1. An insulating member is provided between the first electrode region and the accommodation hole to secure the gap serving as a vacuum port.
The vibrator piece characteristic inspection device according to claim 3. The vacuum chuck is
A groove having the outer wall of the first electrode region as its inner wall is formed around the first electrode region, and the groove functions as the vacuum port by generating a negative pressure in the groove. Characterized by the
The vibrator piece characteristic inspection device according to claim 1. The vacuum chuck has a holding surface around the vacuum port;
When the vacuum chuck adsorbs the vibrator piece, the holding surface abuts on the vibrator piece and holds the vibrator piece in a surface state.
The vibrator piece characteristic inspection apparatus according to claim 1. The first electrode region is characterized in that a part of the outer periphery is surrounded by an insulating member,
The vibrator piece characteristic inspection apparatus according to any one of claims 1 to 6. The second electrode region is surrounded by an insulating member in whole or in part, and is electrically insulated from a holding member that holds the outer periphery of the second electrode region.
The vibrator piece characteristic inspection apparatus according to any one of claims 1 to 7. The holding surface holds the outside of the vibration region so as not to contact the vibration region where the vibrator piece vibrates,
The vibrator piece characteristic inspection apparatus according to claim 6. The first electrode region has an area substantially the same as an area of a vibration region where the vibrator piece vibrates or an area narrower than an area of a vibration region where the vibrator piece vibrates,
The vibrator piece characteristic inspection apparatus according to any one of claims 1 to 9. The holding surface is characterized in that at least a surface in contact with the vibrator piece is subjected to plane polishing and is formed within a predetermined flatness and surface roughness range.
The vibrator piece characteristic inspection apparatus according to claim 6 or 9. The first abutment surface is at least a region that abuts on the second abutment surface and is plane polished.
The second abutment surface is at least a region that abuts on the first abutment surface and is plane polished.
When the region where the first contact surface and the second contact surface are polished is contacted, a gap between the vacuum chuck and the second electrode region has a predetermined interval. It is characterized by
The vibrator piece characteristic inspection apparatus according to claim 2. A first positioning member that provides the first contact surface is disposed in the vicinity of the first electrode, and a second positioning member that provides the second contact surface in the vicinity of the second electrode region. Arranged,
The relative distance between the first electrode region and the second electrode region can be changed by replacing or displacing at least one of the first positioning member or the second positioning member.
The vibrator piece characteristic inspection apparatus according to claim 1. The positioning mechanism includes a displacement allowing member,
The displacement allowing member absorbs an inclination error when the first contact surface and the second contact surface contact each other,
The vibrator piece characteristic inspection apparatus according to claim 2. The vacuum chuck is rotatably arranged, and the vibrator piece can be rotated by the vacuum chuck.
The vibrator piece characteristic inspection device according to claim 1. The second electrode region is rotatably arranged,
The vibrator piece characteristic inspection device according to any one of claims 1 to 15. A negative pressure control device for controlling the negative pressure applied to the vacuum port;
The negative pressure control device can switch between a first negative pressure and a second negative pressure whose absolute pressure is lower than the first negative pressure, and at least when the vibrator piece is sucked by the vacuum port, Control is performed so as to generate a negative pressure, and control is performed so as to generate the second negative pressure at least when measuring characteristics of the vibrator piece.
The vibrator piece characteristic inspection device according to any one of claims 1 to 16. The negative pressure control device further includes an air release valve arranged in a negative pressure supply path for supplying a negative pressure to the vacuum port,
The second negative pressure is generated by opening the atmosphere release valve while the first negative pressure is being supplied by the negative pressure supply path.
The vibrator piece characteristic inspection device according to claim 17. The negative pressure control device detaches the vibrator piece from the vacuum chuck by stopping the supply of the negative pressure while the atmosphere release valve is open.
The vibrator piece characteristic inspection device according to claim 17 or 18. With a rotating index table,
A plurality of vacuum chucks having the first electrode region are disposed in a circumferential direction of the index table;
The vibrator piece is transferred to the inspection position while being mounted on the vacuum chuck by the rotation of the index table, and the electrical characteristics are inspected.
The vibrator piece characteristic inspection device according to any one of claims 1 to 19. A vibrator piece characteristic inspection device for inspecting electrical characteristics of a vibrator piece such as a crystal blank,
A vacuum chuck for holding and holding the vibrator piece by negative pressure;
The vacuum chuck is
A first electrode region close to the vicinity of the center of the vibrator piece;
A vacuum port disposed around the first electrode region, wherein the outer wall of the first electrode region is a part of its inner wall;
A second electrode region disposed to face the first electrode region;
Comprising
The vibrator piece characteristic inspection apparatus, wherein the vacuum port is formed of the same member as the first electrode. A vibrator piece characteristic inspection method for inspecting electrical characteristics of a vibrator piece such as a crystal blank,
A supply step of supplying the vibrator element by a supply device;
The vibration supplied from the supply device by a vacuum chuck provided with a first electrode region and a vacuum port disposed around the first electrode region and having an outer wall of the first electrode region as its inner wall A transporting process for sucking and holding the child pieces;
A characteristic inspection step of inspecting an electrical characteristic of the vibrator piece by setting a relative distance of a second electrode region provided facing the first electrode region by a positioning mechanism at an inspection position in the conveying step; ,
Based on the inspection result of the characteristic inspection step, a separation step of conveying and separating the vibrator piece to a predetermined separation device by the vacuum chuck;
Characterized by comprising,
Vibrator piece characteristic inspection method.

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