JP2009544009A5 - - Google Patents

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Publication number
JP2009544009A5
JP2009544009A5 JP2009519581A JP2009519581A JP2009544009A5 JP 2009544009 A5 JP2009544009 A5 JP 2009544009A5 JP 2009519581 A JP2009519581 A JP 2009519581A JP 2009519581 A JP2009519581 A JP 2009519581A JP 2009544009 A5 JP2009544009 A5 JP 2009544009A5
Authority
JP
Japan
Prior art keywords
inductor
dimensional change
sensor material
inductance
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009519581A
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English (en)
Japanese (ja)
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JP2009544009A (ja
Filing date
Publication date
Priority claimed from US11/456,410 external-priority patent/US20080018424A1/en
Application filed filed Critical
Publication of JP2009544009A publication Critical patent/JP2009544009A/ja
Publication of JP2009544009A5 publication Critical patent/JP2009544009A5/ja
Pending legal-status Critical Current

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JP2009519581A 2006-07-10 2007-06-29 誘導センサ Pending JP2009544009A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/456,410 US20080018424A1 (en) 2006-07-10 2006-07-10 Inductive sensor
PCT/US2007/072475 WO2008008643A2 (en) 2006-07-10 2007-06-29 Inductive sensor

Publications (2)

Publication Number Publication Date
JP2009544009A JP2009544009A (ja) 2009-12-10
JP2009544009A5 true JP2009544009A5 (enExample) 2010-08-12

Family

ID=38924022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009519581A Pending JP2009544009A (ja) 2006-07-10 2007-06-29 誘導センサ

Country Status (5)

Country Link
US (1) US20080018424A1 (enExample)
EP (1) EP2041760A2 (enExample)
JP (1) JP2009544009A (enExample)
CN (1) CN101496121A (enExample)
WO (1) WO2008008643A2 (enExample)

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CN115188559B (zh) * 2022-09-08 2022-12-09 东南大学 一种基于折纸结构的mems电感
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