JP2009532857A - 流体及び電気的機能を有するデバイスの構築方法 - Google Patents
流体及び電気的機能を有するデバイスの構築方法 Download PDFInfo
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- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/02—Adapting objects or devices to another
- B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
- B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0633—Valves, specific forms thereof with moving parts
- B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/56—Labware specially adapted for transferring fluids
- B01L3/563—Joints or fittings ; Separable fluid transfer means to transfer fluids between at least two containers, e.g. connectors
- B01L3/5635—Joints or fittings ; Separable fluid transfer means to transfer fluids between at least two containers, e.g. connectors connecting two containers face to face, e.g. comprising a filter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0272—Adaptations for fluid transport, e.g. channels, holes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49071—Electromagnet, transformer or inductor by winding or coiling
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49073—Electromagnet, transformer or inductor by assembling coil and core
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
Abstract
Description
− 流体回路を設けた基板に流体の及び電気的な機能を有する構成部(2)を装着すること、
− 上記構成部を上記基板に流体的に接続すること、
− 上記構成部を上記基板に電気的に接続すること、及び
− 上記構成部を上記基板に機械的に接続すること、
を備える。
このような方法により、混成のマイクロ流体システムが構築可能である。
− 流体回路を設けた基板に流体の及び電気的な機能を有する構成部を装着すること、
− 上記構成部を上記基板に流体的に接続すること、
− 上記構成部を上記基板に電気的に接続すること、及び
− 上記構成部を上記基板に機械的に接続すること、を備え、
− フリップチップ技術が使用され、及び
− シールはガスケットによりなされる、ことを特徴とする。
構成部つまりモジュール(2)は、一般的にガラス又はシリコンベースの材料のチップである、例えば3×5mm2の外側面積を有する。構成部(2)は、流れセンサ、圧力センサ、バルブ、ポンプ、反応器、注水器、分離カラム、加熱エレメント、あるいは検出器備えることでも可能である。マイクロ流体デバイス(1)は、基板つまり流路プレート(3)に構成部(2)及び他の必要なモジュールを装着することにより組み立てられる。典型的には、構成部(2)は、10ミクロン以下の精度で基板(3)に位置決めされる必要がある。フリップチップ技術により、これは容易に達成することができる。基板つまり流路プレート(3)は、一般的にガラス及び/又はシリコンベースの材料のチップであり、例えば20×30mm2の外側面積を有し、流体回路(4)及び電気回路(5)を設ける。回路(4,5)は、構成部(2)と、デバイス(1)の入力若しくは出力と、又は基板(3)に装着される一若しくは複数の他の構成部との間の接続を構成する。流路(4)の一般的な面積は、25〜250ミクロン平方である。
− 構成部つまりモジュールの準備;
−清浄化;
−スタッドバンプの適用;
− 基板つまり流路プレートの準備;
−清浄化;
−フリップチップ機器に基板を置く;
− 基板に設けた凹部にガスケットを置く;
− 基板に接着剤を塗布する;
− 構成部の位置決め;
−構成部を受け取る;
−構成部を整列させる;
−基板に構成部を押圧する;
− 接着剤を固める。
− 機械的な、電気的な、及び流体の接続は、互いから大部分は独立して最適化することができる;
− 関連した厚さの一つの又は複数のガスケットにより、製造誤差、組立誤差、化学的な又は熱的な影響及び経年劣化は、吸収可能である;
− 基板上のガスケット及び流体回路の正確な製造の可能性、及び基板に構成部を置く精度は、最小の内部デッドボリュームを生み出す;
− 従来のフリップチップ装置を用いることができるので、必要な投資は低い;
− 既知のフリップチップ技術の使用は、信頼性と歩留まりを増加させて、開発及び生産費をかなり縮小する;及び
− 工程の一般的な特性のおかげで、生産ラインの変更は速やかに安く行うことができる。
Claims (9)
- 流体の及び電気的な機能を有するデバイス(1)を構築する方法であって、
− 流体回路(4)を設けた基板(3)に流体の及び電気的な機能を有する構成部(2)を装着し、
− 上記構成部を上記基板に流体的に接続し、
− 上記構成部を上記基板に電気的に接続し、及び
− 上記構成部を上記基板に機械的に接続することを備え、
− フリップチップ技術が使用され、及び
− ガスケット(6)によってシールがなされる、
ことを特徴とする構築方法。 - 機械的接続のため、接着特性を有する副材料(11)が使用されることを特徴とする、請求項1記載の構築方法。
- 接着特性を有する副材料に関して接着剤が使用されることを特徴とする、請求項2記載の構築方法。
- 接着特性を有する副材料に関して半田材料が使用されることを特徴とする、請求項2記載の構築方法。
- 上記基板は、上記ガスケットを少なくとも部分的に受け入れるために受け入れ空間(7)を設けることを特徴とする、請求項1から4のいずれかに記載の構築方法。
- 上記ガスケットは、機械的接続まで及び機械的接続の間、圧迫された状態に置かれることを特徴とする、請求項1から5のいずれかに記載の構築方法。
- 上記ガスケットは、また、柔軟な膜(106)を形成するために使用されることを特徴とする、請求項1から6のいずれかに記載の構築方法。
- 電気部品は、上記ガスケットによりデバイスに存在する流体から分離されることを特徴とする、請求項1から7のいずれかに記載の構築方法。
- 流体部品は、上記ガスケットにより接着特性を有する副材料から分離されることを特徴とする、請求項1から8のいずれかに記載の構築方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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NL1031465 | 2006-03-30 | ||
NL1031465A NL1031465C2 (nl) | 2006-03-30 | 2006-03-30 | Werkwijze voor het opbouwen van een inrichting met fluïdische en elektrische functies. |
PCT/NL2007/000076 WO2007114687A1 (en) | 2006-03-30 | 2007-03-22 | Method for building a device having fluidic and electrical functions |
Publications (2)
Publication Number | Publication Date |
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JP2009532857A true JP2009532857A (ja) | 2009-09-10 |
JP5186482B2 JP5186482B2 (ja) | 2013-04-17 |
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JP2009502702A Expired - Fee Related JP5186482B2 (ja) | 2006-03-30 | 2007-03-22 | 流体及び電気的機能を有するデバイスの構築方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7594314B2 (ja) |
EP (1) | EP1998893A1 (ja) |
JP (1) | JP5186482B2 (ja) |
CN (1) | CN101410183B (ja) |
NL (1) | NL1031465C2 (ja) |
WO (1) | WO2007114687A1 (ja) |
Families Citing this family (6)
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DE102009007393A1 (de) | 2009-01-29 | 2010-08-05 | Mgb Endoskopische Geräte Gmbh Berlin | Insufflator |
WO2012004423A1 (es) * | 2010-07-07 | 2012-01-12 | Ikerlan, S.Coop | Método de fabricación de dispositivos microfluidicos. |
SG11201406551WA (en) * | 2012-07-12 | 2014-11-27 | Agency Science Tech & Res | A connector for microfluidic device, a method for injecting fluid into microfluidic device using the connector and a method of providing and operating a valve |
EP2964986A1 (en) * | 2013-03-07 | 2016-01-13 | Debiotech S.A. | Microfluidic valve having improved tolerance to particles |
FR3006207A1 (fr) | 2013-05-30 | 2014-12-05 | Commissariat Energie Atomique | Carte fluidique comportant un canal fluidique pourvu d'une ouverture refermable par un film souple |
CN111587149B (zh) * | 2017-09-01 | 2022-11-11 | 米罗库鲁斯公司 | 数字微流控设备及其使用方法 |
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TW560018B (en) * | 2001-10-30 | 2003-11-01 | Asia Pacific Microsystems Inc | A wafer level packaged structure and method for manufacturing the same |
DE10164494B9 (de) * | 2001-12-28 | 2014-08-21 | Epcos Ag | Verkapseltes Bauelement mit geringer Bauhöhe sowie Verfahren zur Herstellung |
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EP1919623B1 (en) * | 2005-07-25 | 2009-12-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Chip-holder for a micro-fluidic chip |
CN100536097C (zh) * | 2005-07-25 | 2009-09-02 | 皇家飞利浦电子股份有限公司 | 带有电子和流体功能的生物医学设备的互连和封装方法 |
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2006
- 2006-03-30 NL NL1031465A patent/NL1031465C2/nl active Search and Examination
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2007
- 2007-03-22 EP EP07747259A patent/EP1998893A1/en not_active Withdrawn
- 2007-03-22 WO PCT/NL2007/000076 patent/WO2007114687A1/en active Application Filing
- 2007-03-22 US US12/067,591 patent/US7594314B2/en not_active Expired - Fee Related
- 2007-03-22 CN CN2007800113597A patent/CN101410183B/zh not_active Expired - Fee Related
- 2007-03-22 JP JP2009502702A patent/JP5186482B2/ja not_active Expired - Fee Related
Patent Citations (3)
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JP2003524750A (ja) * | 1998-02-20 | 2003-08-19 | ナノゲン・インコーポレイテッド | 進歩した活性なデバイスおよび分子生物学的分析および診断の方法 |
JP2004508548A (ja) * | 2000-09-07 | 2004-03-18 | ゲーシム・ゲゼルシャフト・フューア・ジリーツィウム−ミクロジステーメ・ミト・ベシュレンクテル・ハフツング | 3次元マイクロフローセルを製造する方法及び3次元マイクロフローセル |
JP2004163427A (ja) * | 2002-10-31 | 2004-06-10 | Agilent Technol Inc | 可撓性支持体を備えた複合可撓性アレイ基板 |
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CN101410183B (zh) | 2012-10-17 |
US20080250633A1 (en) | 2008-10-16 |
EP1998893A1 (en) | 2008-12-10 |
JP5186482B2 (ja) | 2013-04-17 |
WO2007114687A1 (en) | 2007-10-11 |
CN101410183A (zh) | 2009-04-15 |
US7594314B2 (en) | 2009-09-29 |
NL1031465C2 (nl) | 2007-10-03 |
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