JP2009270101A - Curable silicone composition for semiconductor and semiconductor device therewith - Google Patents

Curable silicone composition for semiconductor and semiconductor device therewith Download PDF

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JP2009270101A
JP2009270101A JP2009092934A JP2009092934A JP2009270101A JP 2009270101 A JP2009270101 A JP 2009270101A JP 2009092934 A JP2009092934 A JP 2009092934A JP 2009092934 A JP2009092934 A JP 2009092934A JP 2009270101 A JP2009270101 A JP 2009270101A
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silicone composition
curable silicone
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JP5705416B2 (en
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Kikuo Mochizuki
紀久夫 望月
Hideki Kobayashi
秀樹 小林
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Momentive Performance Materials Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a curable silicone composition for a semiconductor having excellent adhesiveness for a metallic electrode containing gold or silver, and a highly reliable semiconductor device therewith. <P>SOLUTION: This composition contains (A) a polyorganosiloxane having 2 or more alkenyl groups in a molecule, (B) a polyorganohydrogensiloxane containing a reaction product of an organosiloxane oligomer having 2 or more hydrogen atoms bonded to a silicon atom in a molecule and an isocyanurate compound having at least an alkenyl group, and (C) a hydrosilylation catalyst and/or a radical initiator, and the blending quantity of the component (B) is equivalent to 0.01-3.0 mole hydrogen atom bonded to the silicon atom to a mole of the alkenyl group of the component (A) (This quantity is equivalent to the blending quantity of the reaction product of the organosiloxane oligomer and the isocyanurate to be 0.01-1.5 mole). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、半導体素子を実装した基板上に配置された金属電極が銀また金を含む場合に、これら金属電極に対する接着性を著しく改善した半導体用硬化性シリコーン組成物及びそれを用いた半導体装置に関する。   The present invention relates to a curable silicone composition for semiconductor and a semiconductor device using the same, in which adhesion to the metal electrode is remarkably improved when the metal electrode disposed on the substrate on which the semiconductor element is mounted contains silver or gold. About.

従来から、シリコーン組成物は、硬化後の耐熱性や機械的特性(例えば硬度、伸び)に優れているため、例えば半導体装置において、半導体素子を封止する封止剤や、半導体素子を固定するダイボンド材などに使用されている。特に、付加反応硬化型のシリコーン組成物は、白金系触媒の存在下で、付加反応(ヒドロシリル化)による硬化が加熱によって迅速に進行するため生産性がよい。   Conventionally, a silicone composition is excellent in heat resistance and mechanical properties (for example, hardness and elongation) after curing. For example, in a semiconductor device, a sealing agent for sealing a semiconductor element or a semiconductor element is fixed. Used in die bond materials. In particular, the addition reaction curable silicone composition has good productivity because curing by addition reaction (hydrosilylation) proceeds rapidly by heating in the presence of a platinum-based catalyst.

このようなシリコーン組成物を例えば半導体素子の封止剤に使用する場合、半導体素子を実装する基板(支持基材)や、基板上に配置された金属電極に対する接着性を高めるために、接着性付与成分を配合したシリコーン組成物が提案されている。例えば特許文献1には、接着性付与成分としてエポキシ基をもつイソシアヌル酸エステルを配合した付加反応硬化型のシリコーン組成物が提案されている。   When such a silicone composition is used, for example, as a sealant for a semiconductor element, in order to increase the adhesion to a substrate (support base material) on which the semiconductor element is mounted or a metal electrode disposed on the substrate, an adhesive property is used. A silicone composition containing an imparting component has been proposed. For example, Patent Document 1 proposes an addition reaction curable silicone composition containing an isocyanuric acid ester having an epoxy group as an adhesion imparting component.

しかしながら、金属電極として各種金属材料が使われているが、特にAg、Auを含む金属電極(例えばAgメッキまたはAuメッキされたリードフレームなど)は、従来のシリコーン組成物では接着が困難であり、剥離が発生する場合があった。   However, various metal materials are used as the metal electrode. Particularly, metal electrodes containing Ag and Au (for example, Ag-plated or Au-plated lead frames) are difficult to bond with conventional silicone compositions. There was a case where peeling occurred.

特開2006−137797号公報JP 2006-137797 A

本発明の目的は、金または銀を含む金属電極に対して優れた接着性を有する半導体用硬化性シリコーン組成物及びそれを用いた高信頼性の半導体装置を提供することにある。   An object of the present invention is to provide a curable silicone composition for a semiconductor having excellent adhesion to a metal electrode containing gold or silver, and a highly reliable semiconductor device using the same.

本発明者らは、上記目的を達成するために鋭意検討した結果、イソシアヌレート化合物とSiH基含有シロキサンオリゴマーとの反応生成物を、アルケニル基含有ポリオルガノシロキサンとの架橋に影響するように所定量配合することで、従来の硬化性シリコーン組成物では接着が困難であった金または銀を含む金属電極に対する接着性を著しく改善することを見出し、本発明をなすに至った。   As a result of intensive studies to achieve the above object, the present inventors have determined a predetermined amount of the reaction product of the isocyanurate compound and the SiH group-containing siloxane oligomer so as to influence the crosslinking with the alkenyl group-containing polyorganosiloxane. By blending, it was found that the adhesion to a metal electrode containing gold or silver, which was difficult to adhere with a conventional curable silicone composition, was remarkably improved, and the present invention was made.

すなわち、本発明の半導体用硬化性シリコーン組成物は、
(A)1分子中にアルケニル基を2個以上有するポリオルガノシロキサン
(B)1分子中にケイ素原子に結合した水素原子を2個以上有するオルガノシロキサンオリゴマーと、少なくとも1個のアルケニル基を有するイソシアヌレート化合物との反応生成物を含むポリオルガノハイドロジェンシロキサン、および
(C)ヒドロシリル化反応触媒及び/又はラジカル開始剤を含有し、
前記(B)成分の配合量が、前記(A)成分のアルケニル基1モルに対して、ケイ素原子に結合した水素原子が0.01〜3.0モルとなる量(但し、前記オルガノシロキサンオリゴマーとイソシアヌレートとの反応生成物の配合量が0.01〜1.5モルとなる量)であることを特徴としている。
That is, the curable silicone composition for semiconductor of the present invention is
(A) A polyorganosiloxane having two or more alkenyl groups in one molecule (B) An organosiloxane oligomer having two or more hydrogen atoms bonded to silicon atoms in one molecule and an isocyana having at least one alkenyl group A polyorganohydrogensiloxane containing a reaction product with a nurate compound, and (C) a hydrosilylation reaction catalyst and / or a radical initiator,
The blending amount of the component (B) is such that the hydrogen atom bonded to the silicon atom is 0.01 to 3.0 moles per mole of the alkenyl group of the component (A) (however, the organosiloxane oligomer) And the amount of the reaction product of isocyanurate is 0.01 to 1.5 mol).

また、本発明の半導体装置は、半導体用硬化性シリコーン組成物の硬化物で半導体素子を接着及び/又は封止されてなることを特徴としている。   The semiconductor device of the present invention is characterized in that a semiconductor element is bonded and / or sealed with a cured product of a semiconductor curable silicone composition.

上記構成により、金または銀を含む金属電極に対する接着性を著しく改善することができる。   With the above configuration, adhesion to a metal electrode containing gold or silver can be remarkably improved.

本発明の半導体装置の構成の一例を模式的に示す断面図。FIG. 6 is a cross-sectional view schematically illustrating an example of a configuration of a semiconductor device of the invention. 凝集破壊率の測定に用いたテストピースと試験条件を示す略図。The schematic diagram which shows the test piece and test condition which were used for the measurement of the cohesive failure rate.

以下、本発明の半導体用硬化性シリコーン組成物について詳細に説明する。   Hereinafter, the curable silicone composition for semiconductors of the present invention will be described in detail.

[(A)成分]
(A)成分はベースポリマーであり、1分子中にアルケニル基を2個以上有するポリオルガノシロキサンを用いる。
[(A) component]
Component (A) is a base polymer, and a polyorganosiloxane having two or more alkenyl groups in one molecule is used.

(A)成分の分子構造は、直鎖状、環状、分岐鎖状、三次元網目状のいずれでもよく、1種単独または2種以上を組み合わせてもよい。例えば、本組成物にシリカ等の補強性充填剤を配合しない場合、硬化物に機械的強度を付与するために、SiO4/2単位を含む三次元網目状のアルケニル基含有ポリオルガノシロキサン(すなわち、シリコーンレジン)を使用することが好ましい。この場合、三次元網目状のアルケニル基含有ポリオルガノシロキサンを直鎖状のアルケニル基含有ポリオルガノシロキサンで希釈して用いることが好ましい。 The molecular structure of the component (A) may be any of linear, cyclic, branched, and three-dimensional network, and may be used alone or in combination of two or more. For example, when a reinforcing filler such as silica is not blended in the present composition, a three-dimensional network-like alkenyl group-containing polyorganosiloxane containing SiO 4/2 units (that is, in order to impart mechanical strength to the cured product (ie, , Silicone resin) is preferably used. In this case, it is preferable to use a three-dimensional network-like alkenyl group-containing polyorganosiloxane diluted with a linear alkenyl group-containing polyorganosiloxane.

三次元網目状のアルケニル基含有ポリオルガノシロキサンは、例えば、平均単位式:
(R SiO1/2(R SiO2/2(RSiO3/2(SiO4/2
で表される。式中、R、R、Rは、独立に置換もしくは非置換の一価炭化水素基であり、R、R及びRのうち少なくとも一つはアルケニル基である。
The three-dimensional network-like alkenyl group-containing polyorganosiloxane has, for example, an average unit formula:
(R 4 3 SiO 1/2 ) a (R 5 2 SiO 2/2 ) b (R 6 SiO 3/2 ) c (SiO 4/2 ) d
It is represented by In the formula, R 4 , R 5 and R 6 are each independently a substituted or unsubstituted monovalent hydrocarbon group, and at least one of R 4 , R 5 and R 6 is an alkenyl group.

としては、例えばメチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、tert−ブチル基、ヘキシル基、シクロヘキシル基、オクチル基のようなアルキル基;ビニル基、アリル基、ブテニル基、ペテニル基、ヘキセニル基のようなアルケニル基;フェニル基、トリル基のようなアリール基;ベンジル基、フェニルエチル基のようなアラルキル基;ならびにこれらの基の水素原子の少なくとも一部がフッ素、塩素、臭素などのハロゲン原子やシアノ基で置換された基、例えばクロロメチル基、2−ブロモエチル基、3−クロロプロピル基、クロロフェニル基、フルオロフェニル基、シアノエチル基等のハロゲン置換アルキル基、シアノ置換アルキル基、ハロゲン置換アリール基等が挙げられ、好ましくはアルキル基、アルケニル基、アリール基であり、より好ましくはメチル基、ビニル基、フェニル基である。 Examples of R 4 include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, hexyl, cyclohexyl and octyl; vinyl, allyl and butenyl. An alkenyl group such as a group, a petenyl group or a hexenyl group; an aryl group such as a phenyl group or a tolyl group; an aralkyl group such as a benzyl group or a phenylethyl group; and at least a part of the hydrogen atoms of these groups are fluorine, Groups substituted with halogen atoms such as chlorine and bromine and cyano groups, such as halogen-substituted alkyl groups such as chloromethyl group, 2-bromoethyl group, 3-chloropropyl group, chlorophenyl group, fluorophenyl group, cyanoethyl group, cyano substitution Examples include an alkyl group and a halogen-substituted aryl group, preferably an alkyl group Alkenyl group, an aryl group, more preferably a methyl group, a vinyl group, a phenyl group.

及びRについても、Rと同様である。 R 5 and R 6 are the same as R 4 .

また、aは正数であり、bは0又は正数であり、cは0又は正数であり、dは正数であり、0<a/(c+d)<3であり、0≦b/(c+d)<2となる数である。   A is a positive number, b is 0 or a positive number, c is 0 or a positive number, d is a positive number, 0 <a / (c + d) <3, and 0 ≦ b / The number is such that (c + d) <2.

三次元網目状のアルケニル基含有ポリオルガノシロキサンの製造方法としては、周知の方法を用いればよく、例えば、各単位源となる化合物を上述した割合で組み合わせた後、酸、アルカリの存在下で共加水分解する方法が挙げられる。   As a method for producing a three-dimensional network-like alkenyl group-containing polyorganosiloxane, a well-known method may be used. For example, after combining the compounds serving as the unit sources at the ratios described above, the compounds are combined in the presence of an acid and an alkali. The method of hydrolyzing is mentioned.

直鎖状のアルケニル基含有ポリオルガノシロキサンのアルケニル基は、分子鎖末端のケイ素原子に結合していても、分子鎖途中のケイ素原子に結合していても、両者に結合していてもよいが、組成物の硬化速度、硬化物の物性の点から、少なくとも分子鎖末端のケイ素原子、特に、分子鎖両末端のケイ素原子に結合していることが好ましい。   The alkenyl group of the linear alkenyl group-containing polyorganosiloxane may be bonded to the silicon atom at the end of the molecular chain, may be bonded to the silicon atom in the middle of the molecular chain, or may be bonded to both. From the viewpoint of the curing speed of the composition and the physical properties of the cured product, it is preferably bonded to at least the silicon atoms at the molecular chain terminals, particularly the silicon atoms at both molecular chain terminals.

アルケニル基以外のケイ素原子に結合した一価炭化水素基としては、例えば、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、tert−ブチル基、ヘキシル基、シクロヘキシル基、オクチル基のようなアルキル基;フェニル基、トリル基のようなアリール基;ベンジル基、フェニルエチル基のようなアラルキル基;ならびにこれらの基の水素原子の少なくとも一部がフッ素、塩素、臭素などのハロゲン原子やシアノ基で置換された基、例えばクロロメチル基、2−ブロモエチル基、3−クロロプロピル基、クロロフェニル基、フルオロフェニル基、シアノエチル基等のハロゲン置換アルキル基、シアノ置換アルキル基、ハロゲン置換アリール基等が挙げられ、好ましくはアルキル基、アリール基であり、より好ましくはメチル基、フェニル基である。   Examples of the monovalent hydrocarbon group bonded to the silicon atom other than the alkenyl group include, for example, methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, hexyl group, cyclohexyl group, and octyl group. Alkyl groups such as: aryl groups such as phenyl and tolyl groups; aralkyl groups such as benzyl and phenylethyl groups; and at least some of the hydrogen atoms of these groups are halogen atoms such as fluorine, chlorine and bromine Or a group substituted with a cyano group, for example, a halogen-substituted alkyl group such as chloromethyl group, 2-bromoethyl group, 3-chloropropyl group, chlorophenyl group, fluorophenyl group, cyanoethyl group, cyano-substituted alkyl group, halogen-substituted aryl group Preferably, an alkyl group or an aryl group is preferable. Or a methyl group or a phenyl group.

(A)成分の25℃における粘度は、(A)成分全体として0.1〜10.0Pa・sであり、好ましくは1.0〜8.0Pa・sである。粘度が0.1Pa・s未満であると、硬化後の物性(例えば硬度、伸び、強度など)が低下し易くなる。一方、10.0Pa・sを超えると、組成物の流動性が低下して作業性の悪化を招く。   The viscosity of the component (A) at 25 ° C. is 0.1 to 10.0 Pa · s, preferably 1.0 to 8.0 Pa · s as the whole component (A). When the viscosity is less than 0.1 Pa · s, physical properties after curing (for example, hardness, elongation, strength, etc.) tend to decrease. On the other hand, when it exceeds 10.0 Pa · s, the fluidity of the composition is lowered and the workability is deteriorated.

なお、(A)成分が、SiO4/2単位を含む三次元網目状のアルケニル基含有ポリオルガノシロキサンを含む場合には、直鎖状のアルケニル基含有ポリオルガノシロキサンで希釈して、(A)成分全体として上記粘度(25℃において0.1〜10.0Pa・s)とすることが好ましい。この場合、直鎖状のアルケニル基含有ポリオルガノシロキサンの25℃における粘度は、1〜100,000mPa・sであることが好ましい。 When the component (A) contains a three-dimensional network-like alkenyl group-containing polyorganosiloxane containing SiO 4/2 units, it is diluted with a linear alkenyl group-containing polyorganosiloxane, and (A) It is preferable to make it the said viscosity (0.1-10.0 Pa.s in 25 degreeC) as the whole component. In this case, the viscosity at 25 ° C. of the linear alkenyl group-containing polyorganosiloxane is preferably 1 to 100,000 mPa · s.

(A)成分に、三次元網目状のアルケニル基含有ポリオルガノシロキサンを使用する場合には、その配合量は、(A)成分中、10重量%以上であり、好ましくは20〜70重量%である。配合量が10重量%未満であると、硬化後の機械的強度が不十分となり、補強性充填材の配合が必要となる。   When the three-dimensional network-like alkenyl group-containing polyorganosiloxane is used as the component (A), the blending amount thereof is 10% by weight or more, preferably 20 to 70% by weight in the component (A). is there. When the blending amount is less than 10% by weight, the mechanical strength after curing becomes insufficient, and a reinforcing filler needs to be blended.

[(B)成分]
(B)成分は架橋剤、かつ、接着性付与剤であり、本発明の特徴を付与する成分である。すなわち、半導体装置において、基板上のAgまたはAuを含む金属電極に対する接着性向上に寄与する成分である。
[Component (B)]
The component (B) is a crosslinking agent and an adhesion imparting agent, and is a component that imparts the characteristics of the present invention. That is, in the semiconductor device, it is a component that contributes to improving the adhesion to the metal electrode containing Ag or Au on the substrate.

(B)成分は、1分子中にケイ素原子に結合した水素原子(SiH基)を2個以上有するオルガノシロキサンオリゴマー(好ましくはケイ素原子数2〜10個)とイソシアヌレート化合物との反応生成物(以下、(B1)とする。)を含んでいる。   The component (B) is a reaction product of an organosiloxane oligomer (preferably 2 to 10 silicon atoms) having two or more hydrogen atoms (SiH groups) bonded to silicon atoms in one molecule and an isocyanurate compound ( (Hereinafter referred to as (B1)).

以下、(B1)について詳細に説明する。まず、イソシアヌレート化合物について説明する。   Hereinafter, (B1) will be described in detail. First, the isocyanurate compound will be described.

(イソシアヌレート化合物)
イソシアヌレート化合物は、下記一般式で表される。

Figure 2009270101
(Isocyanurate compound)
The isocyanurate compound is represented by the following general formula.
Figure 2009270101

式中、R、R、Rは独立に、式:
−(CH−X,または式:
−(CH−O−(CH−Y
で表される基である。
In the formula, R 1 , R 2 and R 3 are independently represented by the formula:
- (CH 2) m -X or wherein:
- (CH 2) p -O- ( CH 2) q -Y
It is group represented by these.

ここで、mは0〜3の整数、pは0〜3の整数、qは0〜3の整数であり、X、Yはアルケニル基、エポキシ基およびアルコキシシリル基から選ばれる基である。X、Yとしては、例えばビニル基、アリル基、プロペニル基、ブテニル基などのアルケニル基;グリシドキシエチル基、グリシドキシプロピル基などのエポキシ基;トリメトキシシリル基、トリエトキシシリル基などのアルコキシシリル基;などが挙げられる。ただし、R、R、Rのうちの少なくとも1個は、XまたはYとしてアルケニル基を有している。 Here, m is an integer of 0 to 3, p is an integer of 0 to 3, q is an integer of 0 to 3, and X and Y are groups selected from an alkenyl group, an epoxy group, and an alkoxysilyl group. X and Y include, for example, alkenyl groups such as vinyl group, allyl group, propenyl group and butenyl group; epoxy groups such as glycidoxyethyl group and glycidoxypropyl group; trimethoxysilyl group and triethoxysilyl group An alkoxysilyl group; and the like. However, at least one of R 1 , R 2 , and R 3 has an alkenyl group as X or Y.

このようなイソシアヌレート化合物の具体例としては、例えば、以下の化合物が挙げられる。

Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101
Specific examples of such isocyanurate compounds include the following compounds.
Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101

組成物の透明性の点からは、エポキシ基を含まないイソシアヌレート化合物の使用が好ましく、特に上記[化4]で表されるTAIC(トリアリルイソシアヌレート)が好ましい。エポキシ基を含むイソシアヌレート化合物を使用した場合には、透明性は低下するが、PPA(ポリフタル酸アミド樹脂)のような難接着性のプラスチックに対する接着性が向上するという効果がある。また、上記[化2]および[化3]で表される、エポキシ基とアリル基の両方を含むイソシアヌレート化合物を、後述する(C1)ヒドロシリル化反応触媒(白金系触媒)と組み合わせて使用した場合には、Au,Agを含む金属に対する特に優れた接着性を得ることができる。さらに、上記[化5]および[化6]で表されるアルコキシシリル基を含む(エポキシ基を含まない)イソシアヌレート化合物を使用した場合には、透明性が向上するうえに、基材表面に存在する水酸基とアルコキシ基との相互作用により、良好な接着性が得られる。   From the viewpoint of the transparency of the composition, the use of an isocyanurate compound containing no epoxy group is preferred, and TAIC (triallyl isocyanurate) represented by the above [Chemical Formula 4] is particularly preferred. When an isocyanurate compound containing an epoxy group is used, the transparency is lowered, but there is an effect that the adhesion to a hardly adhesive plastic such as PPA (polyphthalamide resin) is improved. Moreover, the isocyanurate compound containing both an epoxy group and an allyl group represented by the above [Chemical Formula 2] and [Chemical Formula 3] was used in combination with the (C1) hydrosilylation reaction catalyst (platinum catalyst) described later. In some cases, particularly excellent adhesion to a metal containing Au and Ag can be obtained. Furthermore, when an isocyanurate compound containing an alkoxysilyl group represented by the above [Chemical Formula 5] and [Chemical Formula 6] (not containing an epoxy group) is used, transparency is improved and Good adhesion is obtained by the interaction between the existing hydroxyl groups and alkoxy groups.

(SiH基含有シロキサンオリゴマー)
次に、上記イソシアヌレート化合物と反応させるSiH基含有シロキサンオリゴマーについて説明する。
(SiH group-containing siloxane oligomer)
Next, the SiH group-containing siloxane oligomer to be reacted with the isocyanurate compound will be described.

SiH基含有シロキサンオリゴマーは、1分子中にケイ素原子に結合した水素原子を2個以上有している。このシロキサンオリゴマーは、ケイ素原子数が好ましくは2〜10個であり、より好ましくは2〜6個である。ケイ素原子数2〜10個のSiH基含有シロキサンオリゴマーは、通常のポリオルガノシロキサンに比べて低分子量であるため、イソシアヌレート化合物との相溶性がよく、またSiH基の反応性にも優れている。   The SiH group-containing siloxane oligomer has two or more hydrogen atoms bonded to silicon atoms in one molecule. This siloxane oligomer preferably has 2 to 10 silicon atoms, more preferably 2 to 6 silicon atoms. Since the SiH group-containing siloxane oligomer having 2 to 10 silicon atoms has a low molecular weight as compared with a normal polyorganosiloxane, it has good compatibility with the isocyanurate compound and also has excellent reactivity with SiH groups. .

その分子構造は直鎖状、分岐鎖状、環状のいずれでもよい。水素原子は、分子鎖末端のケイ素原子に結合していても、分子鎖途中のケイ素原子に結合していても、両者に結合していてもよいが、反応性の点から、少なくとも分子鎖末端のケイ素原子、特に、分子鎖両末端のケイ素原子に結合していることが好ましい。   The molecular structure may be linear, branched or cyclic. The hydrogen atom may be bonded to the silicon atom at the molecular chain end, may be bonded to the silicon atom in the middle of the molecular chain, or may be bonded to both, but from the point of reactivity, at least the molecular chain terminal It is preferable that it is bonded to the silicon atom of the molecular chain, particularly to silicon atoms at both ends of the molecular chain.

ケイ素原子に結合する一価炭化水素基としては、脂肪族不飽和結合を除く、炭素原子数が1〜8、好ましくは炭素原子数が1〜6の基であり、例えば、メチル基、エチル基、プロピル基、イソプロピル基等のアルキル基;フェニル基等のアリール基;3−クロロプロピル基等のハロゲン化アルキル基などが挙げられ、なかでもメチル基が好ましい。   The monovalent hydrocarbon group bonded to the silicon atom is a group having 1 to 8 carbon atoms, preferably 1 to 6 carbon atoms, excluding an aliphatic unsaturated bond, such as a methyl group or an ethyl group. Alkyl groups such as propyl group and isopropyl group; aryl groups such as phenyl group; halogenated alkyl groups such as 3-chloropropyl group, and the like. Among them, methyl group is preferable.

SiH基含有シロキサンオリゴマーとしては、例えば、下記のものが挙げられる。

Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101
(式中、yは0〜20の整数である。) Examples of the SiH group-containing siloxane oligomer include the following.
Figure 2009270101
Figure 2009270101
Figure 2009270101
Figure 2009270101
(In the formula, y is an integer of 0 to 20.)

(B1)は、上述したイソシアヌレート化合物とSiH基含有シロキサンオリゴマーとをヒドロシリル化反応触媒とともに、常温から100℃位の温度で加熱・混合することで得られる。イソシアヌレート化合物とSiH基含有シロキサンオリゴマーとの配合割合は、少なくともイソシアヌレート化合物中のアルケニル基より多くのSiH基を必要とし、得られる(B1)分子中にSiH基を存在させるような割合とする。このような配合割合にすることで、AgまたはAuを含む金属電極に対して高い接着性を付与することができる。   (B1) can be obtained by heating and mixing the above-mentioned isocyanurate compound and SiH group-containing siloxane oligomer together with a hydrosilylation reaction catalyst at a temperature of about 100 ° C. from room temperature. The blending ratio of the isocyanurate compound and the SiH group-containing siloxane oligomer is such that at least more SiH groups than the alkenyl groups in the isocyanurate compound are required, and the resulting (B1) SiH groups are present in the molecule. . By setting it as such a mixture ratio, high adhesiveness can be provided with respect to the metal electrode containing Ag or Au.

(B)成分中には、上記(B1)以外に、1分子中にケイ素原子に結合した水素原子を2個以上有するポリオルガノハイドロジェンシロキサン(以下、(B2)とする。)が含まれている。この(B2)の配合により、組成物に十分な硬度を発現させることができる。   In addition to the above (B1), the component (B) contains polyorganohydrogensiloxane (hereinafter referred to as (B2)) having two or more hydrogen atoms bonded to silicon atoms in one molecule. Yes. By blending this (B2), sufficient hardness can be expressed in the composition.

(B2)は、例えば、平均組成式:
SiO[4−(s+t)]/2
で示されるものが用いられる。
(B2) is, for example, an average composition formula:
R 7 s H t SiO [4- (s + t)] / 2
What is shown by is used.

式中、Rは、脂肪族不飽和結合を除く、同一または異なる、置換または非置換の一価炭化水素基である。Rとしては、例えば、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、tert−ブチル基、ヘキシル基、シクロヘキシル基、オクチル基のようなアルキル基;フェニル基、トリル基のようなアリール基;ベンジル基、フェニルエチル基のようなアラルキル基;およびこれらの基の水素原子の一部または全部がフッ素、塩素、臭素などのハロゲン原子やシアノ基で置換されているもの、例えばクロロメチル基、ブロモエチル基、トリフルオロプロピル基、シアノエチル基などの炭素数1〜12の1価炭化水素基が挙げられ、なかでも、合成のし易さ、コストの点から、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基等の炭素数1〜4のアルキル基が好ましく、メチル基がより好ましい。 In the formula, R 7 is the same or different substituted or unsubstituted monovalent hydrocarbon group excluding an aliphatic unsaturated bond. R 7 includes, for example, an alkyl group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a hexyl group, a cyclohexyl group, and an octyl group; Aryl groups such as; aralkyl groups such as benzyl and phenylethyl groups; and those in which some or all of the hydrogen atoms in these groups are substituted with halogen atoms such as fluorine, chlorine, bromine or cyano groups, Examples thereof include monovalent hydrocarbon groups having 1 to 12 carbon atoms such as chloromethyl group, bromoethyl group, trifluoropropyl group, and cyanoethyl group. Among them, from the viewpoint of ease of synthesis and cost, methyl group, ethyl group C1-C4 alkyl groups such as propyl group, isopropyl group, butyl group and isobutyl group are preferred, and methyl group is more preferred. .

s、tは、それぞれ正数であり、0.8≦s≦2.2、0.002≦t≦1、0.8<s+t<3を満足する正数であり、好ましくは、1≦s≦2.2、0.01≦t≦1、1.8≦s+t≦2.5を満足する正数である。   Each of s and t is a positive number, and is a positive number satisfying 0.8 ≦ s ≦ 2.2, 0.002 ≦ t ≦ 1, 0.8 <s + t <3, and preferably 1 ≦ s. It is a positive number that satisfies ≦ 2.2, 0.01 ≦ t ≦ 1, and 1.8 ≦ s + t ≦ 2.5.

(B2)の分子構造は、直鎖状、分岐鎖状、環状または三次元網目状のいずれでもよい。   The molecular structure of (B2) may be any of linear, branched, cyclic or three-dimensional network.

(B2)の水素原子は、分子鎖末端のケイ素原子に結合していても、分子鎖途中のケイ素原子に結合していても、両者に結合していてもよい。   The hydrogen atom of (B2) may be bonded to the silicon atom at the end of the molecular chain, may be bonded to the silicon atom in the middle of the molecular chain, or may be bonded to both.

(B2)の25℃における粘度は、1000mPa・s以下、好ましくは1〜500mPa・sである。   The viscosity of (B2) at 25 ° C. is 1000 mPa · s or less, preferably 1 to 500 mPa · s.

(B)成分の配合量は、(A)成分のアルケニル基1モルに対して、(B)成分全体のケイ素原子に結合した水素原子が0.01〜3.0モルとなる量、好ましくは0.1〜2.0モルとなる量である。配合量が0.01モル未満であると、十分な架橋が得られない。一方、3.0モルを越えると、未反応のSiH基が残存し、硬化後の物性が経時変化しやすい。   The blending amount of the component (B) is such that the hydrogen atom bonded to the silicon atom of the entire component (B) is 0.01 to 3.0 mol, preferably 1 mol of the alkenyl group of the component (A), The amount is 0.1 to 2.0 mol. If the blending amount is less than 0.01 mol, sufficient crosslinking cannot be obtained. On the other hand, when the amount exceeds 3.0 mol, unreacted SiH groups remain, and the physical properties after curing tend to change with time.

ただし、(B1)の配合量が、(A)成分のアルケニル基1モルに対して(B1)のケイ素原子に結合した水素原子が0.01〜1.5モル、好ましくは0.1〜1.0モルとなる量である。(B1)の配合量が0.01モル未満であると、AgまたはAuを含む金属電極に対する接着性が不十分になる。一方、1.5モルを越えると、硬化後の機械的特性に悪影響を及ぼし、さらには十分な硬度が得られず、未反応のSi−H基が残存しやすい。   However, the blending amount of (B1) is 0.01 to 1.5 mol, preferably 0.1 to 1, of hydrogen atoms bonded to the silicon atom of (B1) with respect to 1 mol of the alkenyl group of component (A). It is an amount to be 0.0 mol. When the blending amount of (B1) is less than 0.01 mol, the adhesion to a metal electrode containing Ag or Au becomes insufficient. On the other hand, when the amount exceeds 1.5 mol, the mechanical properties after curing are adversely affected, and furthermore, sufficient hardness cannot be obtained, and unreacted Si—H groups tend to remain.

[(C)成分]
本組成物では、ヒドロシリル化反応による硬化機構と、ラジカル反応による硬化機構の2つの硬化機構を用いることができ、ヒドロシリル化反応による硬化機構でも、ラジカル反応による硬化機構でも、これら両者を併用してもよい。2つの硬化機構を併用する場合には、まず、ヒドロシリル化反応による硬化反応が所定温度で進行し、続いて、前記温度よりも高い温度でラジカル反応による硬化反応が進行する。
[Component (C)]
In this composition, two curing mechanisms, a curing mechanism based on a hydrosilylation reaction and a curing mechanism based on a radical reaction, can be used. Both a curing mechanism based on a hydrosilylation reaction and a curing mechanism based on a radical reaction can be used in combination. Also good. When two curing mechanisms are used in combination, first, the curing reaction by the hydrosilylation reaction proceeds at a predetermined temperature, and then the curing reaction by the radical reaction proceeds at a temperature higher than the above temperature.

本組成物を半導体素子の封止剤として使用する場合には、生産性が良好な点から、ヒドロシリル化反応による硬化機構を単独で用いることが好ましい。   When using this composition as a sealing agent for semiconductor elements, it is preferable to use a curing mechanism based on a hydrosilylation reaction alone from the viewpoint of good productivity.

ヒドロシリル化反応による硬化機構の場合には、(C1)ヒドロシリル化反応触媒を使用し、ラジカル反応による硬化機構の場合には、(C2)ラジカル開始剤を使用する。   In the case of a curing mechanism based on a hydrosilylation reaction, (C1) a hydrosilylation reaction catalyst is used, and in the case of a curing mechanism based on a radical reaction, (C2) a radical initiator is used.

(C1)ヒドロシリル化反応触媒としては、例えば、白金黒、塩化第二白金、塩化白金酸、塩化白金酸と一価アルコールとの反応物、塩化白金酸とオレフィン類やビニルシロキサンとの錯体、白金ビスアセトアセテート等の白金系触媒が挙げられる。   Examples of (C1) hydrosilylation reaction catalysts include platinum black, platinous chloride, chloroplatinic acid, a reaction product of chloroplatinic acid and a monohydric alcohol, a complex of chloroplatinic acid and an olefin or vinyl siloxane, platinum Examples thereof include platinum-based catalysts such as bisacetoacetate.

(C1)ヒドロシリル化反応触媒の配合量は、組成物の硬化に必要な量であればよく、所望の硬化速度などに応じて適宜調整することができる。通常、(A)成分と(B)成分との合計量に対し白金元素に換算して1〜500ppmの範囲とすることが好ましい。配合量が1ppm未満であると、組成物が十分に硬化しにくい。一方、500ppmを越えると、硬化後の耐熱性が低下しやすい。   (C1) The compounding quantity of a hydrosilylation reaction catalyst should just be a quantity required for hardening of a composition, and can be suitably adjusted according to a desired hardening rate. Usually, the total amount of the component (A) and the component (B) is preferably in the range of 1 to 500 ppm in terms of platinum element. When the blending amount is less than 1 ppm, the composition is not easily cured. On the other hand, if it exceeds 500 ppm, the heat resistance after curing tends to decrease.

(C2)ラジカル開始剤としては、例えば、ベンゾイルパーオキサイド、ジクミルパーオキサイド、t−ブチルベンゾエート、t−ブチルパーオキシベンゾエート、ジ−t−ブチルパーオキサイド、ジ−t−ヘキシルパーオキサイド、t−ブチルクミルパーオキサイド、1,1−ビス(t−ブチルパーオキシ)3,3,5−トリメチルシクロヘキサン、2,5−ジメチル−2,5−ビス(t−ブチルパーオキシ)ヘキサン、1,6−ビス(t−ブチルパーオキシカルボキシ)ヘキサン、ジ−(4−メチルベンゾイル)パーオキサイド、ジ−(2−メチルベンゾイル)パーオキサイド、t−ブチルペルオキシイソプロピルモノカーボネート、ジ−(2−t−ブチルペルオキシイソプロピル)ベンゼン等の有機過酸化物が挙げられる。   Examples of the (C2) radical initiator include benzoyl peroxide, dicumyl peroxide, t-butyl benzoate, t-butyl peroxybenzoate, di-t-butyl peroxide, di-t-hexyl peroxide, t- Butylcumyl peroxide, 1,1-bis (t-butylperoxy) 3,3,5-trimethylcyclohexane, 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane, 1,6- Bis (t-butylperoxycarboxy) hexane, di- (4-methylbenzoyl) peroxide, di- (2-methylbenzoyl) peroxide, t-butylperoxyisopropyl monocarbonate, di- (2-t-butylperoxy) And organic peroxides such as isopropyl) benzene.

(C2)ラジカル開始剤の配合量は、(A)成分100重量部に対して0.1〜20重量部、好ましくは0.2〜15重量部である。配合量が0.1重量部未満では、十分な架橋が得られない。一方、20重量部を越えると、コストが増大し、コストに見合った性能の向上が得られない。   The amount of the (C2) radical initiator is 0.1 to 20 parts by weight, preferably 0.2 to 15 parts by weight, based on 100 parts by weight of the component (A). If the blending amount is less than 0.1 parts by weight, sufficient crosslinking cannot be obtained. On the other hand, if it exceeds 20 parts by weight, the cost increases, and the performance improvement corresponding to the cost cannot be obtained.

なお、2つの硬化機構を使用し、(C1)と(C2)を併用する場合であっても、その配合量は上述した範囲である。   In addition, even if it is a case where (C1) and (C2) are used together using two hardening mechanisms, the compounding quantity is the range mentioned above.

[その他任意成分]
本発明の半導体用硬化性シリコーン組成物は、上記(A)〜(C)の各成分を基本成分とし、これらに必要に応じて、ヒドロシリル化反応による硬化機構を使用する場合には、ヒドロシリル化反応を抑制する反応抑制剤を添加してもよい。
[Other optional ingredients]
The curable silicone composition for semiconductors of the present invention comprises the above components (A) to (C) as basic components, and if necessary, when using a curing mechanism by hydrosilylation reaction, hydrosilylation You may add the reaction inhibitor which suppresses reaction.

反応抑制剤としては、例えば、トリフェニルホスフィンなどのリン含有化合物;トリブチルアミン、テトラメチルエチレンジアミン、ベンゾトリアゾールなどの窒素含有化合物;硫黄含有化合物、アセチレン系化合物、アルケニル基を2個以上含む化合物、ハイドロパーオキシ化合物、マレイン酸誘導体などが挙げられ、好ましくは、3−メチル−1−ブチン−3−オール、1−エチニル−1−シクロヘキサノールなどの水酸基を有するアセチレン系化合物である。   Examples of the reaction inhibitor include phosphorus-containing compounds such as triphenylphosphine; nitrogen-containing compounds such as tributylamine, tetramethylethylenediamine, and benzotriazole; sulfur-containing compounds, acetylenic compounds, compounds containing two or more alkenyl groups, hydro A peroxy compound, a maleic acid derivative, etc. are mentioned, Preferably, it is an acetylene type compound which has hydroxyl groups, such as 3-methyl-1-butyn-3-ol and 1-ethynyl-1-cyclohexanol.

さらに、本発明の半導体用硬化性シリコーン組成物には、煙霧質シリカ、焼成シリカ、シリカエアロゲル、沈殿シリカ、煙霧質酸化チタン及びこれらの表面をポリオルガノシロキサン類、ヘキサメチルジシラザンなどで疎水化した補強性充填剤、けいそう土、粉砕シリカ(石英微粉末)、酸化アルミニウム、酸化亜鉛、アルミノケイ酸、炭酸カルシウム、有機酸表面処理炭酸カルシウム、炭酸マグネシウム、炭酸亜鉛、ケイ酸カルシウム、タルク、酸化第二鉄等の非補強性充填剤、カーボンブラック等の導電性充填剤、トルエン、キシレン、ヘキサン、ヘプタン、エタノール、イソプロピルアルコール、アセトン、メチルエチルケトン等の有機溶剤、チクソトロピー性付与剤、染料、顔料、難燃性付与剤、耐熱性向上剤、耐酸化劣化剤、波長調整剤等を本発明の目的を損なわない範囲で添加してもよい。本組成物を高い透明性を必要とする例えばLEDなどの半導体素子に用いる場合には、硬化後の透明性に影響を与えない範囲で使用する。   Furthermore, the curable silicone composition for semiconductors of the present invention is composed of fumed silica, calcined silica, silica aerogel, precipitated silica, fumed titanium oxide, and their surfaces hydrophobized with polyorganosiloxanes, hexamethyldisilazane, etc. Reinforcing filler, diatomaceous earth, ground silica (quartz fine powder), aluminum oxide, zinc oxide, aluminosilicate, calcium carbonate, organic acid surface treatment calcium carbonate, magnesium carbonate, zinc carbonate, calcium silicate, talc, oxidation Non-reinforcing fillers such as ferric iron, conductive fillers such as carbon black, organic solvents such as toluene, xylene, hexane, heptane, ethanol, isopropyl alcohol, acetone, methyl ethyl ketone, thixotropic agents, dyes, pigments, Flame retardancy imparting agent, heat resistance improver, oxidation degradation agent, wavelength The Seizai like may be added within a range not to impair the purpose of the present invention. When using this composition for semiconductor elements, such as LED which requires high transparency, it uses in the range which does not affect the transparency after hardening.

本発明の半導体用硬化性シリコーン組成物の製造方法としては、各成分の添加順序は特に限定されるものではなく、(A)〜(C)の基本成分と上述した任意成分を周知の混練機で混練する方法等が挙げられる。混練機としては、必要に応じて加熱手段及び冷却手段を備えた例えばプラネタリーミキサー、3本ロール、ニーダー、品川ミキサー等が挙げられ、単独またはこれらを組み合わせて使用することができる。   In the method for producing the curable silicone composition for semiconductors of the present invention, the order of addition of the respective components is not particularly limited, and the basic components (A) to (C) and the optional components described above are well-known kneaders. And the like. Examples of the kneader include a planetary mixer, a three-roller, a kneader, and a Shinagawa mixer, which are provided with a heating unit and a cooling unit, if necessary, and these can be used alone or in combination.

半導体用硬化性シリコーン組成物は液状であり、25℃における粘度は0.5〜100Pa・sであることが好ましい。粘度が100Pa・sを超えると、例えばLEDにポッティングする際にディスペンサーの目詰まりを生じやすい。一方、0.5Pa・s未満であると、ポッティングする際に液ダレを起しやすい。   The curable silicone composition for semiconductor is in a liquid state, and the viscosity at 25 ° C. is preferably 0.5 to 100 Pa · s. When the viscosity exceeds 100 Pa · s, for example, when potting an LED, the dispenser is likely to be clogged. On the other hand, if it is less than 0.5 Pa · s, dripping tends to occur when potting.

半導体用硬化性シリコーン組成物の硬化方法は、ヒドロシリル化反応による硬化機構、ラジカル反応による硬化機構に応じて、適宜調整する。ヒドロシリル化反応による硬化機構の場合には、反応抑制剤の種類やその添加量に応じて適宜調整できるが、50〜200℃で60〜120分加熱して硬化させる。また、ラジカル反応による硬化機構の場合には、ラジカル開始剤の種類に応じて適宜調整できるが、好ましくは100〜250℃で15〜60分間である。硬化物は、硬質のゴム状もしくは可撓性を有するレジン状であり、良好な透明性を有していることが好ましい。   The curing method of the curable silicone composition for semiconductor is appropriately adjusted according to the curing mechanism by hydrosilylation reaction and the curing mechanism by radical reaction. In the case of a curing mechanism based on a hydrosilylation reaction, it can be appropriately adjusted according to the type of reaction inhibitor and the amount added, but it is cured by heating at 50 to 200 ° C. for 60 to 120 minutes. Moreover, in the case of the hardening mechanism by radical reaction, it can adjust suitably according to the kind of radical initiator, However, Preferably it is 100 to 250 degreeC for 15 to 60 minutes. The cured product is preferably a hard rubber or flexible resin and has good transparency.

次に、本発明の半導体用硬化性シリコーン組成物を封止材として適用した半導体装置の一例について図面を参照して説明する。図1は、半導体装置の構成を模式的に示す断面図であり、LEDランプを示している。   Next, an example of a semiconductor device to which the curable silicone composition for semiconductors of the present invention is applied as a sealing material will be described with reference to the drawings. FIG. 1 is a cross-sectional view schematically showing a configuration of a semiconductor device, and shows an LED lamp.

半導体装置1は、半導体素子(LED)2と、ポリフタルアミド樹脂から構成された支持基材3と、Agメッキされたリード電極5と半導体用硬化性シリコーン組成物の硬化物4と、を備えている。半導体素子2は、半導体用硬化性シリコーン組成物の硬化物4で封止されている。   The semiconductor device 1 includes a semiconductor element (LED) 2, a support base 3 made of polyphthalamide resin, an Ag-plated lead electrode 5, and a cured product 4 of a semiconductor curable silicone composition. ing. The semiconductor element 2 is sealed with a cured product 4 of a curable silicone composition for semiconductors.

この半導体装置1は、例えば以下のようにして作製される。   For example, the semiconductor device 1 is manufactured as follows.

まず、Agメッキされたリード電極5を有するポリフタルアミド樹脂などの支持基材3に半導体素子(LED)2をダイボンドし、半導体素子2とリード電極5とをボンディングワイヤ6で接続する。   First, a semiconductor element (LED) 2 is die-bonded to a support base 3 such as a polyphthalamide resin having an Ag-plated lead electrode 5, and the semiconductor element 2 and the lead electrode 5 are connected by a bonding wire 6.

次に、半導体素子2に上述した半導体封止用シリコーン組成物をポッティングした後、例えば150℃で1時間加熱して硬化させ、硬化物4を形成する。   Next, after potting the above-mentioned silicone composition for semiconductor encapsulation onto the semiconductor element 2, the cured product 4 is formed by heating and curing at 150 ° C. for 1 hour, for example.

このようにして得られる半導体装置1は、半導体用硬化性シリコーン組成物の硬化物4で半導体素子2が封止されているため、従来のシリコーン組成物では接着が困難であったAgメッキされたリード電極5に対して十分な接着性をそなえており、信頼性に優れている。   The semiconductor device 1 obtained in this manner was Ag-plated because the semiconductor element 2 was sealed with the cured product 4 of the curable silicone composition for semiconductors, which was difficult to bond with the conventional silicone composition. It has sufficient adhesion to the lead electrode 5 and is excellent in reliability.

また、プライマー組成物をAgメッキされたリード電極5などに予め塗布しなくても、本発明の硬化性シリコーン組成物のみで、Agメッキされたリード電極5に対して優れた接着性を有するため、高信頼性の半導体装置1を収率よく、得ることができる。   Further, even if the primer composition is not previously applied to the Ag-plated lead electrode 5 or the like, the curable silicone composition of the present invention alone has excellent adhesion to the Ag-plated lead electrode 5. Thus, the highly reliable semiconductor device 1 can be obtained with high yield.

なお、半導体素子2の一例としてLEDを用いて説明したが、これ以外に、例えばフォトトランジスタ、フォトダイオード、CCD、太陽電池モジュール、EPROM、フォトカプラなどの高い透明性を必要とする半導体素子、透明性を必要としない半導体素子のいずれにも適用することができる。   In addition, although demonstrated using LED as an example of the semiconductor element 2, the semiconductor element which requires high transparency, such as a phototransistor, a photodiode, CCD, a solar cell module, EPROM, a photocoupler, etc., transparent The present invention can be applied to any semiconductor element that does not require the property.

また、ここでは、Agメッキしたリード電極5を用いて説明したが、Auメッキしたリード電極でも同様の効果が得られる。   Further, here, the description is made using the Ag-plated lead electrode 5, but the same effect can be obtained with the Au-plated lead electrode.

また、本発明の半導体用硬化性シリコーン組成物を半導体装置の封止剤として用いたが、これ以外に、半導体素子を接着固定するダイボンド材などの金属電極(特にAu電極、Ag電極)に対する接着性が要求される用途に好適である。   Moreover, although the curable silicone composition for semiconductors of the present invention was used as a sealing agent for semiconductor devices, in addition to this, adhesion to metal electrodes (particularly Au electrodes and Ag electrodes) such as die bonding materials for bonding and fixing semiconductor elements. It is suitable for applications that require high performance.

本発明を実施例により詳細に説明するが、本発明は実施例に限定されるものではない。実施例及び比較例中、粘度は25℃において測定した値である。また、実施例および比較例で得られた半導体用硬化性シリコーン組成物は、以下のようにして評価し、結果を表1に示した。表1に示した特性は、25℃において測定した値である。   The present invention will be described in detail with reference to examples, but the present invention is not limited to the examples. In the examples and comparative examples, the viscosity is a value measured at 25 ° C. Moreover, the curable silicone compositions for semiconductors obtained in Examples and Comparative Examples were evaluated as follows, and the results are shown in Table 1. The characteristics shown in Table 1 are values measured at 25 ° C.

[せん断接着力]
図2に示すように、幅25mmの長方形状のAgメッキ板11,12の各々の一方を厚さ1mmの硬化性シリコーン組成物13を挟む形で張り合わせ(接着面積:25mm×10mm=250mm)、150℃で2時間加熱硬化させてテストピースを作製した。このテストピースのそれぞれの端部を図中の矢印方向に、引っ張り試験機(島津製作所製、オートグラフ)で引張速度10mm/分で引っ張り、Agメッキ板11,12表面のせん断接着力を測定した。Auメッキ板についても同様に測定した。
[Shear adhesive strength]
As shown in FIG. 2, one of each of the rectangular Ag plating plates 11 and 12 having a width of 25 mm is bonded to each other with a curable silicone composition 13 having a thickness of 1 mm sandwiched therebetween (adhesion area: 25 mm × 10 mm = 250 mm 2 ). The test piece was prepared by heating and curing at 150 ° C. for 2 hours. Each end of the test piece was pulled in the direction of the arrow in the drawing with a tensile tester (manufactured by Shimadzu Corporation, Autograph) at a pulling speed of 10 mm / min, and the shear adhesive force on the surfaces of the Ag plated plates 11 and 12 was measured. . It measured similarly about Au plating board.

[凝集破壊率]
上記せん断接着力を測定した際のAgメッキ板11,12の表面を観察し、凝集破壊(シリコーン部分で破断)した部分の比率を凝集破壊率として測定した。Auメッキ板についても同様に測定した。
[Cohesive failure rate]
The surface of the Ag plating plates 11 and 12 when the shear adhesive force was measured was observed, and the ratio of the portion subjected to cohesive failure (breaking at the silicone portion) was measured as the cohesive failure rate. It measured similarly about Au plating board.

[実施例1]
(A−1)式:
[(CHSiO1/237[(CH=CH)(CH)SiO](SiO56
で表されるビニル基含有シリコーンレジン(Vi基量1.0mmol/g)の50wt%キシレン溶液68重量部(レジン34重量部分)と、(A−2)25℃における粘度が3000mPa・sであり、式:
[(CH=CH)(CHSiO1/2][(CHSiO]360[(CH=CH)(CHSiO1/2
で表される両末端にビニル基を含有したポリオルガノシロキサン(Vi基量0.075mmol/g)66重量部を減圧下、150℃で加熱混練してキシレンの除去を行った。冷却後、これに、(B1−1)式:
(B1−1)式:

Figure 2009270101
で表されるTAIC(トリアリルイソシアヌレート)と、式:
H(CHSiOSi(CH
で表されるSiH基含有シロキサンオリゴマーとの反応生成物(SiH基量4.6mmol/g)4.2重量部、(B2)式:
[(CHSiO1/2][H(CH)SiO]23[(CHSiO]15[(CHSiO1/2
で表されるポリオルガノハイドロジェンシロキサン(SiH基量8.7mmol/g)2.2重量部、(C−1)ビニルダイマー白金錯体(Pt含有量1.8%)0.03重量部(白金量として5ppm)を添加、混練して、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。なお、この組成物を硬化させて成る硬化物はは、透明性の高いものであった。 [Example 1]
(A-1) Formula:
[(CH 3 ) 3 SiO 1/2 ] 37 [(CH 2 ═CH) (CH 3 ) SiO] 7 (SiO 2 ) 56
68 parts by weight (34 parts by weight of resin) of a 50 wt% xylene solution of a vinyl group-containing silicone resin represented by the formula (Vi group content 1.0 mmol / g) and (A-2) the viscosity at 25 ° C. is 3000 mPa · s. ,formula:
[(CH 2 = CH) (CH 3 ) 2 SiO 1/2 ] [(CH 3 ) 2 SiO] 360 [(CH 2 = CH) (CH 3 ) 2 SiO 1/2 ]
Xylene was removed by heating and kneading 66 parts by weight of polyorganosiloxane containing a vinyl group at both ends represented by the formula (Vi group amount 0.075 mmol / g) at 150 ° C. under reduced pressure. After cooling, the formula (B1-1):
(B1-1) Formula:
Figure 2009270101
TAIC (triallyl isocyanurate) represented by the formula:
H (CH 3 ) 2 SiOSi (CH 3 ) 2 H
A reaction product with a SiH group-containing siloxane oligomer represented by formula (SiH group amount 4.6 mmol / g) 4.2 parts by weight, formula (B2):
[(CH 3 ) 3 SiO 1/2 ] [H (CH 3 ) SiO] 23 [(CH 3 ) 2 SiO] 15 [(CH 3 ) 3 SiO 1/2 ]
2.2 parts by weight of a polyorganohydrogensiloxane (SiH group content: 8.7 mmol / g), 0.03 parts by weight of (C-1) vinyl dimer platinum complex (Pt content: 1.8%) 5 ppm) was added and kneaded to obtain a curable silicone composition. The properties of this composition were measured and the results are shown in Table 1. A cured product obtained by curing this composition was highly transparent.

[実施例2]
実施例1の(B1−1)を2.5重量部、(B2)を3.1重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。なお、この組成物を硬化させて成る硬化物は、透明性の高いものであった。
[Example 2]
A curable silicone composition was obtained in the same manner as in Example 1 except that (B1-1) of Example 1 was changed to 2.5 parts by weight and (B2) was changed to 3.1 parts by weight. The properties of this composition were measured and the results are shown in Table 1. In addition, the hardened | cured material formed by hardening | curing this composition was a highly transparent thing.

[実施例3]
実施例1の(B1−1)を配合せずに(B1−2)式:

Figure 2009270101
で表される1−アリル−3,5−ジグリルシジルイソシアヌル酸と、式:
Figure 2009270101
で表されるSiH基含有シロキサンオリゴマーとの反応生成物(SiH基量5.8mmol/g)を3.4重量部、(B2)を4.4重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。 [Example 3]
Formula (B1-2) without blending (B1-1) of Example 1:
Figure 2009270101
1-allyl-3,5-digrilcidyl isocyanuric acid represented by the formula:
Figure 2009270101
The reaction product with the SiH group-containing siloxane oligomer represented by the formula (SiH group amount 5.8 mmol / g) is 3.4 parts by weight and (B2) is 4.4 parts by weight. Thus, a curable silicone composition was obtained. The properties of this composition were measured and the results are shown in Table 1.

[実施例4]
実施例1の(B1−1)を配合せずに(B1−2)を2.0重量部、(B2)を3.1重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。
[Example 4]
The curability was the same as in Example 1 except that (B1-2) was 2.0 parts by weight and (B2) was 3.1 parts by weight without blending (B1-1) of Example 1. A silicone composition was obtained. The properties of this composition were measured and the results are shown in Table 1.

[実施例5]
実施例1の(B1−1)を配合せずに(B1−2)を2.0重量部、(B2)を3.1重量部、(C−1)ビニルダイマー白金錯体を配合せずに(C−2)p−メチルベンゾイルパーオキサイド(有機過酸化物)を0.5重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。
[Example 5]
Without blending (B1-1) of Example 1, (B1-2) is 2.0 parts by weight, (B2) is 3.1 parts by weight, and (C-1) vinyl dimer platinum complex is not blended. (C-2) A curable silicone composition was obtained in the same manner as in Example 1 except that 0.5 part by weight of p-methylbenzoyl peroxide (organic peroxide) was used. The properties of this composition were measured and the results are shown in Table 1.

[実施例6]
実施例1の(B1−1)を配合せずに(B1−2)を2.0重量部、(B2)を3.1重量部、(C−1)ビニルダイマー白金錯体0.03重量部と(C−2)有機過酸化物0.5重量部を併用した以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。
[Example 6]
Without blending (B1-1) of Example 1, 2.0 parts by weight of (B1-2), 3.1 parts by weight of (B2), 0.03 parts by weight of (C-1) vinyl dimer platinum complex And (C-2) A curable silicone composition was obtained in the same manner as in Example 1 except that 0.5 part by weight of the organic peroxide was used in combination. The properties of this composition were measured and the results are shown in Table 1.

[比較例1]
実施例1の(B1−1)を配合せずに(B1−3)式:

Figure 2009270101
で表されるSiH基含有シロキサンオリゴマーと、式:
CH=C(CH)COO(CHSi(OCH
で表されるγ−メタクリロキシプロピルトリメトキシシランとの反応生成物(SiH基量4.0mmol/g)を3.0重量部、(B2)を6.5重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。 [Comparative Example 1]
Formula (B1-3) without blending (B1-1) of Example 1:
Figure 2009270101
A SiH group-containing siloxane oligomer represented by the formula:
CH 2 = C (CH 3) COO (CH 2) 3 Si (OCH 3) 3
The reaction product with γ-methacryloxypropyltrimethoxysilane represented by formula (SiH group amount 4.0 mmol / g) was 3.0 parts by weight, and (B2) was 6.5 parts by weight. In the same manner as in Example 1, a curable silicone composition was obtained. The properties of this composition were measured and the results are shown in Table 1.

[比較例2]
実施例1の(B1−1)を配合せずに(B1−4)式:

Figure 2009270101
で表されるγ−グリシドキシプロピルトリメトキシシラン(SiH基量0mmol/g)を2.0重量部、(B2)を6.5重量部とした以外は、実施例1と同様にして、硬化性シリコーン組成物を得た。この組成物の特性を測定し、結果を表1に示した。 [Comparative Example 2]
Formula (B1-4) without blending (B1-1) of Example 1:
Figure 2009270101
In the same manner as in Example 1 except that 2.0 parts by weight of γ-glycidoxypropyltrimethoxysilane (SiH group amount 0 mmol / g) represented by the formula (B2) was 6.5 parts by weight, A curable silicone composition was obtained. The properties of this composition were measured and the results are shown in Table 1.

Figure 2009270101
Figure 2009270101

表1から明らかなように、(B)成分として(B1−1)や(B1−2)のようなイソシアヌレート化合物との反応生成物を配合した実施例は、比較例と比べてAgメッキ板、Auメッキ板に対する接着性が著しく改善されている。   As can be seen from Table 1, the example in which the reaction product with an isocyanurate compound such as (B1-1) or (B1-2) was blended as the component (B) was compared with the comparative example. The adhesion to the Au plated plate is remarkably improved.

1…半導体装置、2…半導体素子(LED)、3…支持基材、4…半導体用硬化性シリコーン組成物の硬化物、5…リード電極(Agメッキ)、6…ボンディングワイヤ。   DESCRIPTION OF SYMBOLS 1 ... Semiconductor device, 2 ... Semiconductor element (LED), 3 ... Support base material, 4 ... Hardened | cured material of the curable silicone composition for semiconductors, 5 ... Lead electrode (Ag plating), 6 ... Bonding wire.

Claims (6)

(A)1分子中にアルケニル基を2個以上有するポリオルガノシロキサン
(B)1分子中にケイ素原子に結合した水素原子を2個以上有するオルガノシロキサンオリゴマーと、少なくとも1個のアルケニル基を有するイソシアヌレート化合物との反応生成物を含むポリオルガノハイドロジェンシロキサン、および
(C)ヒドロシリル化反応触媒及び/又はラジカル開始剤
を含有し、
前記(B)成分の配合量が、前記(A)成分のアルケニル基1モルに対して、ケイ素原子に結合した水素原子が0.01〜3.0モルとなる量(但し、前記オルガノシロキサンオリゴマーとイソシアヌレートとの反応生成物の配合量が0.01〜1.5モルとなる量)であることを特徴とする半導体用硬化性シリコーン組成物。
(A) A polyorganosiloxane having two or more alkenyl groups in one molecule (B) An organosiloxane oligomer having two or more hydrogen atoms bonded to silicon atoms in one molecule and an isocyana having at least one alkenyl group A polyorganohydrogensiloxane containing a reaction product with a nurate compound, and (C) a hydrosilylation reaction catalyst and / or a radical initiator,
The blending amount of the component (B) is such that the hydrogen atom bonded to the silicon atom is 0.01 to 3.0 moles per mole of the alkenyl group of the component (A) (however, the organosiloxane oligomer) The amount of the reaction product of isocyanurate and the amount of isocyanurate is 0.01 to 1.5 mol). A curable silicone composition for semiconductors.
前記イソシアヌレート化合物が、一般式:
Figure 2009270101
(式中、R、R、Rは独立に式:
−(CH−X,または式:
−(CH−O−(CH−Y
で表される基である。ここで、mは0〜3の整数、pは0〜3の整数、qは0〜3の整数、X、Yはアルケニル基、エポキシ基およびアルコキシシリル基から選ばれる基である。ただし、R、R、Rのうちの少なくとも1個は、XまたはYとしてアルケニル基を有する。)で表されることを特徴とする請求項1に記載の半導体用硬化性シリコーン組成物。
The isocyanurate compound has the general formula:
Figure 2009270101
Wherein R 1 , R 2 and R 3 are independently
- (CH 2) m -X or wherein:
- (CH 2) p -O- ( CH 2) q -Y
It is group represented by these. Here, m is an integer of 0 to 3, p is an integer of 0 to 3, q is an integer of 0 to 3, and X and Y are groups selected from an alkenyl group, an epoxy group, and an alkoxysilyl group. However, at least one of R 1 , R 2 and R 3 has an alkenyl group as X or Y. The curable silicone composition for semiconductors according to claim 1, wherein
前記オルガノシロキサンオリゴマーのケイ素原子数は、2〜10個であることを特徴とする請求項1または2に記載の半導体用硬化性シリコーン組成物。   The curable silicone composition for semiconductor according to claim 1 or 2, wherein the organosiloxane oligomer has 2 to 10 silicon atoms. 前記(C)成分が、ヒドロシリル化反応触媒であることを特徴とする請求項1乃至3のいずれか1項に記載の半導体用硬化性シリコーン組成物。   The said (C) component is a hydrosilylation reaction catalyst, The curable silicone composition for semiconductors of any one of the Claims 1 thru | or 3 characterized by the above-mentioned. 請求項1乃至4のいずれか1項に記載の半導体用硬化性シリコーン組成物の硬化物で半導体素子を接着及び/又は封止されてなることを特徴とする半導体装置。   A semiconductor device, wherein a semiconductor element is bonded and / or sealed with a cured product of the curable silicone composition for semiconductor according to any one of claims 1 to 4. 前記半導体素子を実装した基板上に配置された金属電極が、金または銀を含むことを特徴とする請求項5に記載の半導体装置。   The semiconductor device according to claim 5, wherein the metal electrode disposed on the substrate on which the semiconductor element is mounted contains gold or silver.
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