JP2009264760A5 - - Google Patents

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Publication number
JP2009264760A5
JP2009264760A5 JP2008111014A JP2008111014A JP2009264760A5 JP 2009264760 A5 JP2009264760 A5 JP 2009264760A5 JP 2008111014 A JP2008111014 A JP 2008111014A JP 2008111014 A JP2008111014 A JP 2008111014A JP 2009264760 A5 JP2009264760 A5 JP 2009264760A5
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JP
Japan
Prior art keywords
cavity
package
gyro element
gyro
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008111014A
Other languages
English (en)
Japanese (ja)
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JP2009264760A (ja
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Publication date
Application filed filed Critical
Priority to JP2008111014A priority Critical patent/JP2009264760A/ja
Priority claimed from JP2008111014A external-priority patent/JP2009264760A/ja
Publication of JP2009264760A publication Critical patent/JP2009264760A/ja
Publication of JP2009264760A5 publication Critical patent/JP2009264760A5/ja
Withdrawn legal-status Critical Current

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JP2008111014A 2008-04-22 2008-04-22 圧電ジャイロセンサおよび電子機器 Withdrawn JP2009264760A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008111014A JP2009264760A (ja) 2008-04-22 2008-04-22 圧電ジャイロセンサおよび電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008111014A JP2009264760A (ja) 2008-04-22 2008-04-22 圧電ジャイロセンサおよび電子機器

Publications (2)

Publication Number Publication Date
JP2009264760A JP2009264760A (ja) 2009-11-12
JP2009264760A5 true JP2009264760A5 (https=) 2011-04-14

Family

ID=41390809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008111014A Withdrawn JP2009264760A (ja) 2008-04-22 2008-04-22 圧電ジャイロセンサおよび電子機器

Country Status (1)

Country Link
JP (1) JP2009264760A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250133A (ja) 2012-05-31 2013-12-12 Seiko Epson Corp 電子デバイス及びその製造方法、並びに電子機器
KR20230095689A (ko) 2021-12-22 2023-06-29 삼성전자주식회사 마이크로폰 패키지 및 이를 포함하는 전자 장치
JP2023105388A (ja) * 2022-01-19 2023-07-31 セイコーエプソン株式会社 センサーモジュール

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