JP2009257552A - Sealing member, fluid device connection structure, and fluid device unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealing member having anti-corrosive property and capable of adding functions without changing the size of a unit and device and to provide a fluid device connection structure and the fluid device unit. <P>SOLUTION: This resin annular sealing member is provided with annular grooves 22a, 22b arranged in a connection part of an input port 4 provided in a chemical valve 1 and a flow passage 9f provided in a joint block 9 and press-fitted into annular projections 3c, 9c of the chemical valve 1 and a second joint block 9. A filter 25 for removing foreign matter is provided in an inner peripheral part 22f being a flow passage when connecting the input port 4 with the flow passage 9f. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a seal member, a fluid device connection structure, and a fluid device unit used for flow rate control.

  Semiconductor manufacturing equipment includes valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, piping blocks such as joint blocks and flow path blocks, piping such as tubes and pipes, etc. Fluid equipment is used. A seal member is disposed at a connection portion of the fluid device to prevent fluid leakage.

  For example, a metal gasket with a filter is disposed at a connection portion that connects the primary side of the valve to another fluid device, and prevents foreign matters contained in the fluid from entering the valve portion (for example, Patent Document 1). reference).

  Further, for example, a plurality of seal members are arranged at a connection portion between the integrated panel and a valve attached to the integrated panel. The valve includes a resin valve body in which a vertical passage communicating with the valve seat and a vertical ring passage formed concentrically with the vertical passage open on the lower surface. The integrated panel is formed of resin in a block shape, and a first fluid passage communicating with the longitudinal passage and a second fluid passage communicating with the longitudinal ring passage are opened on the upper surface.

  A resin-made first seal member is disposed at a connection portion between the longitudinal passage and the first fluid passage, and a resin-made second seal member is disposed at a connection portion between the longitudinal ring passage and the second fluid passage. . The first and second sealing members include concave and convex strips that are press-fitted into the concave and convex strips provided in the seal grooves of the integrated panel and the valve, and seal at the press-fitted portions of the concave and convex strips and the concave and convex strips. For this reason, the valve and the integrated panel are directly connected without a pipe, and the structure of the connecting portion is made compact.

  And the 1st seal member and the 2nd seal member are connected and integrated by the bridge part, and the attachment and removal work are made easy and efficient. The bridge portion is disposed so as to cross the connection portion between the second fluid passage and the vertical ring passage, and is formed in a screw shape, for example. Therefore, the fluid flowing between the second fluid passage and the vertical ring passage changes the flow direction when passing through the bridge portion, and forms a good flow without stagnation in the flow path (see, for example, Patent Document 2). ).

JP 2000-167318 A JP 2007-147909 A

However, the conventional sealing member has the following problems.
(1) The sealing member described in Patent Document 1 is a metal gasket, and could not be used for fluid control of highly corrosive chemicals such as acid or pure water that requires high purity.

(2) Moreover, the metal gasket of patent document 1 is welded with the metal filter. The metal gasket is sealed while being crushed between the connecting portions and deformed in the radial direction. For this reason, when the metal gasket is crushed between the connecting portions, the welded portion may be deformed. In this case, for example, the filter may be deformed and clogged, or there may be a gap in the welded portion between the filter and the gasket, thereby causing foreign matters to pass through.

(3) Since the sealing member described in Patent Document 2 is made of resin, it can be used for fluid control such as highly corrosive chemicals and pure water that requires high purity. However, the sealing member described in Patent Document 2 changes the flow direction of the flow path by making a bridge portion that must cross the flow path when connecting the first and second seal members into a screw shape. is there. Therefore, Patent Document 2 does not have a technical idea of providing a filter or the like for each seal member.

(4) In the sealing members described in Patent Document 1 and Patent Document 2, if the filter and the bridge portion are arranged in the flow path and the connecting portion is not disassembled, the seal member is provided with a filter, or the bridge portion. It was not possible to confirm that the direction of flow was changed to a screw shape.

  Accordingly, a first object of the present invention is to provide a seal member, a fluid device connection structure, and a fluid device unit that are corrosion resistant and can add functions without changing the size of the unit or device. To do.

  A second object of the present invention is to provide a seal member, a fluid device connection structure, and a fluid device unit that can confirm the function added to the seal member without disassembling the connecting portion of the flow path.

In order to achieve the first object, the seal member according to the present invention has the following configuration.
(1) The resin is formed in an annular shape, and is disposed at a connection portion between the first flow path provided in the first part and the second flow path provided in the second part, and the first part A first annular ridge that is press-fitted into a first annular ridge formed on the outer periphery of the opening in which the first flow path opens; and an outer periphery of the opening in which the second flow path of the second part opens. In a sealing member provided with a second annular concavo-convex line that is press-fitted into the second annular concavo-convex line, foreign matter is removed from an inner peripheral portion that becomes a flow path when the first flow path and the second flow path are connected. A filter is provided.

(2) In the invention described in (1), a storage recess for storing the filter is provided on the inner peripheral surface of the inner peripheral portion, and the filter is press-fitted to the storage recess.

(3) The resin is formed in an annular shape, and is disposed at a connection portion between the first flow path provided in the first component and the second flow path provided in the second component. A first annular ridge that is press-fitted into a first annular ridge formed on the outer periphery of the opening in which the first flow path opens; and an outer periphery of the opening in which the second flow path of the second part opens. In a sealing member provided with a second annular concavo-convex line that is press-fitted into the second annular concavo-convex line, the flow rate is adjusted to the inner peripheral portion that becomes the flow path when the first flow path and the second flow path are connected An orifice is provided.

(4) In the invention described in (3), the orifice is formed integrally with the inner peripheral portion.

(5) The resin is formed in an annular shape, and is disposed at a connection portion between the first flow path provided in the first part and the second flow path provided in the second part, and the first part A first annular ridge that is press-fitted into a first annular ridge formed on the outer periphery of the opening in which the first flow path opens; and an outer periphery of the opening in which the second flow path of the second part opens. In a sealing member provided with a second annular concavo-convex line that is press-fitted into the second annular concavo-convex line, when the first flow path and the second flow path are connected, the fluid is agitated in the inner peripheral portion that becomes the flow path A stirring unit is provided.

(6) In the invention described in (5), the stirring unit includes a stirring wall smaller than a channel area of a connection portion of the first and second channels, and an inner periphery of the stirring wall and the inner peripheral part. And a bridge portion for connecting the stirring wall to the center of the connecting portion.

(7) In the invention described in (5), the agitating portion is erected so as to protrude from the inner peripheral surface of the inner peripheral portion toward the center of the flow path of the connection portion of the first and second flow paths. This is a stirring wall.

(8) The resin is formed in an annular shape, and is disposed at a connection portion between the first flow path provided in the first component and the second flow path provided in the second component, A first annular ridge that is press-fitted into a first annular ridge formed on the outer periphery of the opening in which the first flow path opens; and an outer periphery of the opening in which the second flow path of the second part opens. In the sealing member provided with the second annular concavo-convex ridge that is press-fitted into the second annular concavo-convex ridge, the first peripheral portion, which is a passage when the first passage and the second passage are connected, And a vortex generator for generating a spiral flow in the fluid flowing through the second flow path.

(9) In the invention described in (8), the spiral generation part is an unevenness provided spirally on the inner peripheral surface of the inner peripheral part.

(10) In the invention described in (9), the spiral generating part is a spiral wall integrally provided on the inner peripheral surface of the inner peripheral part and spirally twisted.

In order to achieve the second object, the seal member of the present invention has the following configuration.
(11) In the seal member that is disposed at a connection portion between the first flow path provided in the first component and the second flow path provided in the second component and performs sealing, the first flow path and the second flow path An annular main body provided with a fluid control unit on the inner peripheral part that becomes a flow path when connected, a gripping part disposed outside a connection part to which the first and second connection parts are connected, An extension portion connecting the body portion and the grip portion, and the function of the fluid control portion is displayed on the grip portion.

(12) In order to achieve the first or second object, the fluid device connection structure of the present invention may be any one of (1) to (11) at a connection portion between the first fluid device and the second fluid device. The seal member described in one is used.

(13) In order to achieve the first or second object, the fluid device unit of the present invention uses the seal member described in any one of (1) to (11) to perform the first and second. Fluid equipment is connected.

In order to achieve the second object, the fluid device connection structure of the present invention has the following configuration.
(14) A fluid device in which the first flow path provided in the first fluid device and the second flow path provided in the second fluid device are connected via an annular seal member, and the connecting portion is connected by a connecting member. In the connection structure, the seal member includes an annular main body provided with a fluid control unit in an inner peripheral portion that becomes a flow path when the first flow path and the second flow path are connected, and the first and the second flow paths. A gripping portion disposed outside a connection portion to which the second connection portion is connected; and an overhanging portion that connects the main body portion and the gripping portion; and the gripping portion has a function of the fluid control unit. The display part to display is provided, The said connection member has several division | segmentation piece with which the connection part of the said 1st and 2nd fluid apparatus is mounted | worn and connected so that the said holding part may be covered .

(15) In order to achieve the second object, the fluid device unit of the present invention connects the first fluid device and the second fluid device using the fluid device connection structure described in (14). .

  In the sealing member, the fluid device connecting structure, and the fluid device unit having the above-described configuration, the sealing member is made of resin and has corrosion resistance. When the first and second parts are connected to each other, the first and second annular ridges are press-fitted into the first and second annular ridges of the first and second parts, and the sealing member is sealed at the press-fitted portion. Therefore, the seal member does not deform the inner peripheral portion that becomes the flow path when the first and second flow paths are connected before and after being attached to the connection portion of the first and second components.

  Since a filter, an orifice, a stirring part, and a vortex generating part are provided on the inner peripheral part of such a seal member, even if the seal member is mounted between the first and second parts, the seal member The orifice, stirrer, and vortex generator are not deformed, the function of removing foreign matter, the function of adjusting the flow rate, the function of stirring the fluid, and generating a spiral flow in the fluid flowing through the first and second flow paths. Does not degrade the function.

  Therefore, according to the sealing member, fluid device connection structure, and fluid device unit of the present invention, there is corrosion resistance, and a function can be added without changing the size of the unit or the device.

  Since the seal member, the fluid device connection structure and the fluid device unit of the present invention are provided with a storage recess for storing the filter on the inner peripheral surface of the inner peripheral portion provided in the seal member, and the filter is press-fit into the storage recess, The filter can be easily attached to the seal member so that there is no gap between the inner wall of the housing recess.

  In the seal member, the fluid device connection structure, and the fluid device unit of the present invention, the orifice is integrally formed on the inner peripheral portion of the seal member, so that the orifice can be provided on the seal member at low cost.

  The seal member, the fluid device connection structure, and the fluid device unit of the present invention include a stirring wall having a smaller stirring area than the flow path area of the connection portion of the first and second flow paths, and an inner circumference provided on the stirring wall and the sealing member. And a bridge portion for connecting the stirring wall to the center of the connecting portion. Such a seal member, fluid device connection structure, and fluid device unit shield the center of the flow path where the fluid flow rate is high with a stirring wall, and efficiently generate turbulent flow by hitting the fluid against the stirring wall.・ Can be mixed.

  In the seal member, the fluid device connection structure, and the fluid device unit according to the present invention, the stirring unit protrudes from the inner peripheral surface of the inner peripheral portion provided in the seal member to the center of the flow path of the connection portion of the first and second flow paths. Since the agitating wall is erected so as to perform the turbulent flow in the fluid while changing the flow direction of the fluid flowing in the first and second flow paths, the fluid can be agitated and mixed.

  In the seal member, the fluid device connection structure, and the fluid device unit of the present invention, the vortex generator is a protrusion provided spirally on the inner peripheral surface of the inner periphery provided on the seal member. Can be provided inexpensively.

  The seal member, the fluid device connection structure, and the fluid device unit of the present invention are spiral walls in which the spiral generating portion is integrally provided on the inner peripheral surface of the inner peripheral portion provided in the seal member and is spirally twisted. Therefore, the entire fluid passing through the seal member can be swirled to efficiently generate turbulent flow, and can be stirred and mixed.

  The sealing member, the fluid device connection structure, and the fluid device unit of the present invention are arranged at a connection portion between the first flow path provided in the first component and the second flow path provided in the second component, and perform sealing. However, when the first flow path and the second flow path are connected, the main body portion provided with the fluid control portion on the inner peripheral portion that becomes the flow path and the outer side of the connection portion to which the first and second connection portions are connected A grip portion, and an overhang portion connecting the main body portion and the grip portion, and the function of the fluid control unit is displayed on the grip portion. Therefore, the function added to the seal member can be confirmed without disassembling the connecting portion of the first and second parts.

  In the fluid device connection structure of the present invention, the first flow path provided in the first fluid device and the second flow path provided in the second fluid device are connected via an annular seal member, and the connection portion is connected by a connecting member. It is connected. The seal member includes a main body provided with a fluid control unit in an inner peripheral portion that becomes a flow path when the first flow path and the second flow path are connected, and an outer side of a connection portion where the first and second connection sections are connected. And a projecting part that connects the main body part and the gripping part, and the function of the fluid control part is displayed on the gripping part. And a connection member has a some division | segmentation piece with which the connection part of a 1st and 2nd fluid apparatus is mounted | worn and connected so that a holding part may be covered. In such a fluid device connection structure, when the divided piece is removed from the connection portion of the first and second fluid devices, the function added to the seal member is confirmed by looking at the display of the gripping portion exposed to the outside of the connection portion. be able to.

  Next, an embodiment of a seal member, a fluid device connection structure, and a fluid device unit according to the present invention will be described with reference to the drawings.

(First embodiment)
<Configuration of fluid equipment unit>
FIG. 1 is a cross-sectional view of a fluid device unit 10 using seal members 21 and 31 according to the first embodiment of the present invention.
The fluid device unit 10 is disposed, for example, on the upstream side of a processing chamber used in a semiconductor manufacturing process, and controls supply of a chemical solution for cleaning a wafer. The fluid device unit 10 is configured by connecting joint blocks 9 and 9 to the chemical liquid valve 1 using a fluid device connection structure 20. The chemical valve 1 and the joint block 9 are examples of “fluid devices”.

  The chemical valve 1 and the joint block 9 are made of PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer) or PTFE, except for components (such as return springs and O-rings) that need to be functionally made of metal or rubber. Parts made of a resin having corrosion resistance such as (polytetrafluoroethylene), PP (polypropylene), PPS (polyphenylene sulfide) are used.

  The chemical valve 1 has a driving means 2 connected to a resin body 3. In the body 3, an input port 4 and an output port 5 communicate with each other via a valve seat 6. The driving means 2 gives a driving force for linear reciprocating motion to the valve body 7 so that the valve body 7 is brought into contact with or separated from the valve seat 6. The chemical valve 1 is attached to the semiconductor manufacturing apparatus via the attachment plate 8.

  On the other hand, the joint block 9 is provided with a joint for connecting a pipe to one end opening of the flow path 9f.

  In the chemical liquid valve 1, the connection portion 3 a provided at each opening of the input port 4 and the output port 5 and the connection portion 9 a provided at the other end opening of the flow path 9 f of the joint block 9 have the same shape. In the chemical valve 1, the connection portion 9a of the joint block 9 is connected to each connection portion 3a of the input port 4 and the output port 5 via the seal members 21 and 31, and each joint block 9 is connected to the joint block 9 using the fluid device connection structure 20. It is connected.

<Fluid device connection structure>
FIG. 2 is an enlarged cross-sectional view showing the fluid device connection structure 20 of the chemical liquid valve shown in FIG.
In the chemical valve 1, the input port 4 and the output port 5 are connected to the joint block 9 by the same fluid device connection structure 20. Here, the case where the flow path 9 f of the joint block 9 is connected to the input port 4 is shown. Explanation will be omitted, and the description of the case where the flow path 9f of the joint block 9 is connected to the output port 5 will be omitted.

  The connecting portions 3a and 9a are connected via the seal member 21 and the connection state is held by the connecting member 12. Seal grooves 3b and 9b are formed on the end surfaces of the connecting portions 3a and 9a around the flow path opening. In the seal grooves 3b and 9b, annular protrusions 3c and 9c are provided concentrically with the input port 4 and the flow path 9f, respectively. In the connection portions 3a and 9a, the annular protrusions 3c and 9c are press-fitted into the annular grooves 22a and 22b of the seal member 21, and sealing is performed by the press-fitted portions. On the outer periphery of the end faces of the connecting portions 3a and 9a, convex portions 3e and 9e are projected in a ring shape. Then, mounting grooves 3d and 9d for mounting the connecting member 12 are formed in an annular shape on the outer peripheral surfaces of the connecting portions 3a and 9a.

FIG. 3 is an exploded perspective view of the fluid device connection structure shown in FIG. 2.
The connecting member 12 is divided into a first divided piece 13 and a second divided piece 14. One end of each of the first and second divided pieces 13 and 14 is connected by a hinge portion 15. The ends of the first and second divided pieces 13 and 14 are connected by engaging the engaging convex portions 13d and 14d with the engaging concave portions 13e and 14e at the end on the hinge portion 15 side. To be rotated. The other ends of the first and second divided pieces 13 and 14 are connected by engaging an engaging claw 13c protruding from the extending portion 13a with an engaging hole 14c provided in the extending portion 14a. Through-holes 13b and 14b for inserting the fixing member 16 are formed in the extending portions 13a and 14a. The fixing member 16 is provided with a locking claw portion 16b at the tip of the pin portion 16a, and a nut portion 16c is screwed at the rear end portion of the pin portion 16a.

  Such a connecting member 12 has semicircular arc surfaces on the first and second divided pieces 13 and 14 in order to mount the first and second divided pieces 13 and 14 on the outer periphery of the connecting portions 3a and 9a. The protrusions 13f, 13f, 14f, and 14f are formed inwardly on both sides of the arc surface. As shown in FIG. 2, the connecting member 12 contacts the protrusions 13f, 13f, 14f, 14f of the first and second divided pieces 13, 14 against the inner wall on the end face side of the mounting grooves 3d, 9d of the connecting portions 3a, 9a. The connection portions 3a and 9a are prevented from moving in a direction away from each other by a repulsive force generated by the seal member 21. A taper corresponding to the taper provided on the inner peripheral surface back side of the mounting grooves 3d and 9d is provided on the inner peripheral surface of the tip of the protrusions 13f, 13f, 14f, and 14f.

  The connecting portions 3a and 9a are press-fit areas where the annular protrusions 3c and 9c are press-fitted into the seal member 21 when the force of maintaining the connection state of the connecting portions 3a and 9a decreases while the resin coupling member 12 repeats thermal expansion. May decrease and the sealing force may decrease. In this case, the connecting member 12 is tightened by tightening the nut portion 16c to the pin portion 16a of the fixing member 16, thereby increasing the taper of the protrusions 13f, 13f, 14f, and 14f to the taper of the mounting grooves 3d and 9d. And a force in a direction approaching the connecting portions 3a and 9a is applied. Thereby, as for the connection parts 3a and 9a, the cyclic | annular protrusions 3c and 9c are press-fit in the annular grooves 21a and 21b of the sealing member 21, and it can prevent the fall of a sealing force.

<Seal member with filter>
FIG. 4 is a plan view of the sealing member 21 with a filter shown in FIG. FIG. 5 is a cross-sectional view taken along line AA of the seal member 21 shown in FIG. 6 is a side view of the seal member 21 shown in FIG.
The sealing member 21 is made of a hard and corrosion-resistant resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer). As shown in FIG. 4, the seal member 21 includes a main body portion 22, an overhang portion 23, and a grip portion 24.

  As shown in FIGS. 4-6, the main-body part 22 is formed in the short cylindrical shape. The main body portion 22 has annular grooves 22a and 22b that fit into the annular protrusions 3c and 9c of the connection portions 3a and 9a formed at both end faces, has an H-shaped cross section, and has a cross-sectional shape that is axisymmetric.

  The groove widths of the annular grooves 22a and 22b shown in FIG. 5 are formed to be the same as or slightly larger than the width dimension in the thickness direction of the annular protrusions 3c and 9c (see FIG. 2) provided in the connecting portions 3a and 9a. The annular grooves 22a and 22b are respectively provided with press-fitting allowances 22e on the inner inner wall and the outer inner wall on the back side from the opening, and the groove width on the back side from the opening of the annular grooves 22a and 22b is set to the thickness of the annular protrusions 3c and 9c. It is smaller than the width dimension in the thickness direction. For this reason, guide portions 22c and 22d for guiding the annular protrusions 3c and 9c are provided in the openings of the annular grooves 22a and 22b, respectively.

  As shown in FIG. 5, the main body 22 is provided with an inclination on the inner peripheral surface and the outer peripheral surface so as to correspond to the inclination (see FIG. 2) provided at the bottom of the seal grooves 3b and 9b. When the annular protrusions 3c and 9c (see FIG. 2) of the connecting portions 3a and 9a are press-fitted into the grooves 22a and 22b, the walls provided on both sides of the annular grooves 22a and 22b fall down to reduce the sealing force. Is preventing.

  As shown in FIGS. 4 to 6, a projecting portion 23 projects outward from the outer peripheral surface of the main body portion 22. The overhang portion 23 is formed in an annular shape along the outer peripheral surface of the main body portion 22. A plurality of grip portions 24 are integrally connected to the outer edge portion of the overhang portion 23 at a predetermined interval. Each grip portion 24 is provided on both sides from the end of the overhang portion 23 so as to extend in a direction orthogonal to the overhang portion 23. At both end portions of each gripping portion 24, hook portions 24 a that are hooked and engaged with the convex portions 3 e and 9 e of the connection portions 3 a and 9 a are provided to protrude toward the main body portion 22 (inward). When the hook portion 24a is locked to the convex portion 3e of the connecting portion 3a or the convex portion 9e of the connecting portion 9a, the end portions of the annular protrusions 3c, 9c provided on the connecting portions 3a, 9a are annular grooves 22a, 22b. Are temporarily inserted into the guide portions 22c and 22d, and are provided in each gripping portion 24 so as to properly position the annular protrusions 3c and 9c and the annular grooves 22a and 22b. The convex portion 24 a may be provided only at one end of the grip portion 24.

  As shown in FIG. 2, such a seal member 21 is provided with a filter 25 for removing foreign matter on the inner peripheral portion 22 f of the main body portion 22. The inner peripheral portion 22f of the main body 22 forms a flow path surface when the input port 4 and the flow path 9f are connected. The main body 22 is provided with a storage recess 22g for storing the filter 25 coaxially from one end opening of the inner peripheral portion 22f.

  The filter 25 is made of a hard and corrosion-resistant resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer). The filter 25 is integrally provided with a filter portion 25a at one end opening of a ring-shaped support 25b. The support 25b has an outer diameter dimension larger than that of the storage recess 22g and is press-fitted into the storage recess 22g. In addition, the support 25b has an inner diameter dimension so as to be substantially flush with the inner peripheral portion 22f of the main body 22 when pressed into the housing recess 22g in order to reduce resistance generated in the fluid passing through the filter 25. Is set.

  As shown in FIG. 6, the seal member 21 has “F” displayed on the outer peripheral surface of the grip portion 24 to indicate that the seal member 21 has a filter function. This display is performed by printing, sticking of a seal on which characters are printed, character transfer from a mold at the time of injection molding of the seal member 21, and the like.

<Seal member with orifice>
FIG. 7 is an external perspective view of the orifice-equipped sealing member 31 shown in FIG. FIG. 8 is a plan view of the seal member 31 shown in FIG. FIG. 9 is a BB sectional view of the seal member 31 shown in FIG. FIG. 10 is a side view of the seal member 31 shown in FIG.
The seal member 31 is made of a hard and corrosion-resistant resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer). Similar to the seal member 21, the seal member 31 is provided with annular grooves 32 a and 32 b of the main body portion 32, guide portions 32 c and 32 d, press-fitting allowance 32 e, an overhang portion 33, and a convex portion 34 a of the grip portion 34. 21 compatible. The seal member 31 is different from the seal member 21 in that an orifice function is provided in the main body portion 22.

  As shown in FIGS. 8 and 9, the seal member 31 is integrally provided with an orifice 35 in an inner peripheral portion 32 f of the main body portion 32. At the center of the orifice 35, a size corresponding to the flow rate controlled by the orifice hole 35a is provided. Both end surfaces of the orifice 35 are provided with a taper 35b having a small diameter from the main body portion 22 toward the orifice hole 35a, so that turbulent flow is less likely to occur when the fluid passes through the orifice hole 35a, and the flow rate can be controlled with high accuracy. I have to.

  As shown in FIGS. 7 and 10, the seal member 31 has “OF” on the outer peripheral surface of the gripping portion 34 and an orifice diameter of 0.1 mm indicating that the seal member 31 has an orifice function. “01” is displayed. This display is performed by printing, sticking of a seal on which characters are printed, character transfer from a mold at the time of injection molding of the seal member 31, and the like. When the orifice diameter of the seal member 31 is 0.2 mm, “OF02” is displayed on the grip portion 34.

<Description of operation>
The fluid device unit 10 having the above-described configuration operates as follows.
In the fluid device unit 10, the input port 4 of the chemical valve 1 is connected to a chemical supply source via a joint block 9, and the output port 5 of the chemical liquid valve 1 is connected to a processing chamber of a semiconductor manufacturing apparatus via a joint block 9. The The fluid device unit 10 shuts off the chemical solution while the driving means 2 of the chemical solution valve 1 is in contact with the valve seat 6 and does not supply the chemical solution to the processing chamber. On the other hand, when the driving means 2 moves the valve body 7 away from the valve seat 6, the chemical solution is supplied from the input port 4 to the processing chamber via the valve seat 6 and the output port 5.

  At this time, the chemical solution passes through the filter 25 of the seal member 21 to remove foreign substances when passing through the connection portions of the connection portions 3a and 9a on the input port 4 side. Therefore, the chemical liquid valve 1 is less likely to cause foreign matters to adhere to the valve seat 6 and hardly causes a seal failure due to the foreign matters. And when a chemical | medical solution passes the connection part of the connection parts 3a and 9a by the side of the output port 5, it passes the orifice 35 of the sealing member 31, and the flow volume is adjusted. Since the chemical solution hitting the wall of the orifice 35 is guided to the orifice hole 35a by the taper 35b, the turbulent flow hardly occurs in the vicinity of the orifice 35, and the flow rate is controlled with high accuracy.

<Effect>
In the seal member 21, the fluid device connection structure 20, and the fluid device unit 10 of the first embodiment, the seal member 31 is made of resin and has corrosion resistance. When the seal port 21 connects the input port 4 of the chemical valve 1 and the flow path 9f of the joint block 9, the "annular ridges" formed by the annular grooves 22a and 22b are formed into the annular protrusions 3c of the connection portions 3a and 9a. , 9c are respectively press-fitted into the “annular ridges” and sealed at the press-fitted portions. Therefore, the seal member 21 does not deform the inner peripheral portion 22f that becomes a flow path when the input port 4 and the flow path 9f are connected before and after being attached to the connection portion between the chemical valve 1 and the joint block 9.

  Since the filter 25 is provided in the inner peripheral portion 22f of such a seal member 21, even if the seal member 21 is mounted between the connection portion 3a of the chemical valve 1 and the connection portion 9a of the joint block 9, the seal member 21 is provided. The filter 25 is not deformed, and the function of removing foreign substances is not deteriorated or damaged.

  Therefore, according to the sealing member 21, the fluid device connection structure 20, and the fluid device unit 10 of the first embodiment, there is corrosion resistance, and a filter function can be added without changing the size of the unit or the device.

  In the seal member 31, the fluid device connection structure 20, and the fluid device unit 10 according to the first embodiment, the seal member 31 is made of resin and has corrosion resistance. When the seal port 31 is connected to the output port 5 of the chemical valve 1 and the flow path 9f of the joint block 9, the “annular ridges” formed by the annular grooves 32a and 32b are formed into the annular protrusions 3c of the connection portions 3a and 9a. , 9c are respectively press-fitted into the “annular ridges” and sealed at the press-fitted portions. Therefore, the seal member 31 does not deform the inner peripheral portion 32f that becomes the flow path when the output port 5 and the flow path 9f are connected before and after being attached to the connection portion between the chemical valve 1 and the joint block 9.

  Since the orifice 35 is provided in the inner peripheral portion 32 f of such a seal member 31, even if the seal member 31 is mounted between the connection portion 3 a of the chemical valve 1 and the connection portion 9 a of the joint block 9, the seal member 31. Does not deform the orifice 35 and does not deteriorate the function of adjusting the flow rate.

  Therefore, according to the sealing member 31, the fluid device connection structure 20, and the fluid device unit 10 of the first embodiment, there is corrosion resistance, and a flow rate adjusting function can be added without changing the size of the unit or the device. .

  Here, in recent years, in semiconductor manufacturing apparatuses and the like, the downsizing of the apparatus has progressed, and the downsizing of the fluid equipment unit is required. In the fluid device unit 10 of the first embodiment, the connecting portion 3a of the chemical liquid valve 1 and the connecting portion 9a of the joint unit 9 are directly connected via the seal members 21 and 31 and the connection state is maintained by the connecting member 12. The structure of the fluid device connection portion is made compact to reduce the size of the unit. The fluid device unit 10 is provided with a filter 25 and an orifice 35 on the flow path surfaces of the seal members 21 and 31. Therefore, in the fluid device unit 10 of the first embodiment, a function can be added without impairing the compactness of the fluid device connection structure, which is very useful for downsizing of a semiconductor manufacturing apparatus or the like.

The seal members 21 and 31, the fluid device connection structure 20, and the fluid device unit 10 of the first embodiment can exchange the filter 25 and the orifice 35 together with the seal member 21. Therefore, the replacement work of the filter 25, the replacement / change work of the orifice 35, and the work of changing the function can be easily performed, and the workability is good.
Further, since the resin sealing members 21 and 31 and the filter 25 can be injection-molded, they can be manufactured at low cost.

  The seal member 21, the fluid device connection structure 20, and the fluid device unit 10 of the first embodiment are provided with a storage recess 22 g that stores the filter 25 on the inner peripheral surface of the inner peripheral portion 22 f provided in the seal member 21. Since it is press-fitted and attached to the storage recess 22g, the filter 25 can be easily attached to the seal member 21 so that there is no gap between the storage recess 22g and the inner wall. In particular, in order to remove foreign matter, it is not desired to form a slight gap between the housing recess 22g and the support 25b of the filter 25. Therefore, it is beneficial to secure the function of the filter 25 by press-fitting the filter 25 into the storage recess 22g to eliminate the gap between the filter 25 and the storage recess 22g.

  In the seal member 31, the fluid device connection structure 20, and the fluid device unit 10 according to the first embodiment, the orifice 35 is integrally formed on the inner peripheral portion 32f of the seal member 31, so the orifice 35 is provided on the seal member 31 at a low cost. be able to.

  The fluid device connection structure 20 and the fluid device unit 10 according to the first embodiment are arranged at a connection portion between the input port 4 provided in the chemical valve 1 and the flow path 9f provided in the joint block 9 to perform sealing. However, when the input port 4 and the flow path 9f are connected, the main body part 22 provided with the filter 25 in the inner peripheral part 22f that becomes the flow path, and the grip disposed outside the connection part to which the connection parts 3a and 9a are connected Part 24 and an overhang part 23 for connecting the main body part 22 and the grip part 24, and “F” indicating the function of the filter 25 is displayed on the grip part 24. In addition, the fluid device connection structure 20 and the fluid device unit 10 are provided with a seal member 31 that is disposed at a connection portion between the output port 5 provided in the chemical valve 1 and the flow path 9f provided in the joint block 9 and performs sealing. A main body 32 provided with an orifice 35 in an inner peripheral portion 32f that becomes a flow path when the port 5 and the flow path 9f are connected, and a gripping portion 34 disposed outside the connection portion to which the connection portions 3a and 9a are connected; The body portion 32 and the gripping portion 34 are connected to each other, and an extension portion 33 that connects the gripping portion 34 is displayed, and “OF01” indicating the function of the orifice 35 is displayed on the gripping portion 34. Therefore, the filter function and the orifice function added to the seal member 21 can be seen by looking at the indications of the grip portions 24 and 34 without disassembling the connecting portion between the chemical valve 1 and the joint block 9 and removing the seal members 21 and 31. Can be confirmed.

  In the fluid device connection structure 20 of the first embodiment, the input port 4 provided in the chemical valve 1 and the flow path 9f provided in the joint block 9 are connected via an annular seal member 21, and the connecting portion is connected to the connecting member 12. Are linked together. The seal member 21 is disposed outside the main body portion 22 provided with the filter 25 in the inner peripheral portion 22f that becomes the flow path when the input port 4 and the flow path 9f are connected, and the connection portion to which the connection portions 3a and 9a are connected. The grip portion 24 and the overhang portion 33 that connects the main body portion 22 and the grip portion 24 are displayed, and “F” indicating the function of the filter 25 is displayed on the grip portion 24. In the fluid device connection structure 20, as with the seal member 21, “OF01” indicating the function of the orifice 35 is displayed on the grip portion 34 of the seal member 31. The connecting member 12 is attached to and connected to the connecting portion of the connecting portion 3a of the chemical valve 1 and the connecting portion 9a of the joint block 9 so as to cover the grip portion 24, and the first and second divided pieces 13 and 14 are connected. Have Such a fluid device connection structure 20 is configured such that when the first and second divided pieces 13 and 14 are removed from the connection portions of the connection portions 3a and 9a, the grip portion 24 exposed to the outside of the connection portions of the connection portions 3a and 9a. The filter function and the orifice function added to the seal member 21 can be confirmed by looking at the display “F” or the display “OF01” of the grip portion 34.

  Moreover, in the fluid device connection structure 20, the annular protrusions 3c and 9c are press-fitted into the connection portions 3a and 9a in the annular grooves 22a and 22b of the seal member 21 and sealed in the radial direction. Therefore, the connection state of the connection parts 3a and 9a is not released only by removing the connecting member 12 from the connection part of the connection parts 3a and 9a. Therefore, after confirming the display “F” of the gripping part 24, the fluid device connection structure 20 can attach the connecting member 12 to the connection part of the connection parts 3a and 9a again, and perform the function confirmation work of the seal member 21. It can be done easily.

(Second Embodiment)
Subsequently, a second embodiment of the present invention will be described. FIG. 11 is a cross-sectional view of a fluid device unit 99 using seal members 41 and 51 according to the second embodiment of the present invention. 12 is a cross-sectional view taken along the CC line in FIG.

<Overall configuration of fluid equipment unit>
The fluid device unit 99 of the second embodiment is obtained by connecting the chemical valves 90, 91, 92 using the fluid device connection structure 20. As shown in FIG.11 and FIG.12, the chemical | medical solution valves 90-92 are three-way valves, and make the same structure except the port shape which inputs and outputs a fluid. Briefly, the chemical flow valves 90 to 92 have main passages 94 formed in the bodies 93, 97, and 98. A valve hole 95 communicates with the main flow path 94. In the chemical valves 90 to 92, the valve seat 6 is provided on the outer periphery of the opening of the valve hole 95, and the valve body 7 contacts or separates from the valve seat 6. As shown in FIG. 12, the valve hole 95 communicates with the branch channel 96 through the valve seat 6.

The chemical liquid valve 90 is provided with connection portions 3 a on the outer periphery of both end openings of the main flow path 94. A joint for connecting a pipe is provided on the outer periphery of the opening of the branch channel 96.
The chemical liquid valves 91 and 92 are provided with a connecting portion 3a on the outer periphery of one end opening of the main flow path 94, and with a joint for connecting a pipe to the other end opening. Similarly to the chemical valve 90, the chemical valves 91 and 92 are provided with a joint for connecting a pipe to the outer peripheral surface of the opening of the branch channel 96.
Note that the configuration of the connecting portion 3a is the same as that of the first embodiment, and thus the description thereof is omitted.

The connecting portions of the chemical liquid valves 90 and 91 are connected by the connecting member 12 by disposing a seal member 41 with a swirl generating function between the connecting portions 3a and 3a.
Further, the connecting portions of the chemical liquid valves 90 and 92 are connected by the connecting member 12 with the sealing member 51 having a stirring function disposed between the connecting portions 3a and 3a.

<Seal member with spiral generation function>
FIG. 13 is an external perspective view of the sealing member 41 with a spiral generating function shown in FIG. FIG. 14 is a plan view of the seal member 41 shown in FIG. FIG. 15 is a DD cross-sectional view of the seal member 41 shown in FIG. FIG. 16 is a side view of the seal member 41 shown in FIG.
The seal member 41 includes annular grooves 42a and 42b, a guide portion 42c and 42d, a press-fitting allowance 42e, a protruding portion 43, and a convex portion 44a of the grip portion 44, which are the same as the seal member 21 of the first embodiment. It is provided similarly. The seal member 41 is different from the seal member 21 of the first embodiment in that the main body portion 42 includes a spiral generating portion 45.

As shown in FIGS. 13 to 15, a spiral generating portion 45 is provided on the inner peripheral portion 42 f of the main body portion 42. The spiral generating part 45 is constituted by a protrusion 45a provided in a spiral shape on the inner peripheral part 42f.
Further, as shown in FIGS. 13 and 16, the grip 44 of the seal member 41 has “MIX” indicating a function of mixing fluid, “SC” indicating a function of generating a vortex in the fluid, and vortex generation. “In” indicating that the portion 45 is provided in the inner peripheral portion 42f is displayed. This display method is the same as in the first embodiment.

<Seal member with stirring function>
FIG. 17 is an external perspective view of the sealing member 51 with a stirring function shown in FIG. 18 is a plan view of the seal member 51 shown in FIG. FIG. 19 is an EE cross-sectional view of the seal member 51 shown in FIG. 20 is a side view of the seal member 51 shown in FIG.
The seal member 51 includes annular grooves 52a and 52b, guide portions 52c and 52d, a press-fitting allowance 52e, an overhang portion 53, and a convex portion 54a of the grip portion 54, which are the same as the seal member 21 of the first embodiment. It is provided similarly. The seal member 51 is different from the seal member 21 of the first embodiment in that the main body portion 52 includes a stirring portion 55.

  The stirring portion 55 is obtained by connecting the stirring wall 55a to the inner peripheral portion 52f of the main body portion 52 through a plurality of bridge portions 55b. The stirring wall 55 a is provided with an area smaller than the cross-sectional area of the main channel 94. The bridge portion 55b is integrally connected to the outer edge portion of the stirring wall 55a and the inner peripheral portion 52f of the main body portion 52, and the stirring wall 55a is disposed at the center of the flow path. As shown in FIG. 19, both end surfaces of the stirring wall 55a have a conical shape in which the center is recessed, so that the fluid hitting the stirring wall 55a can easily flow to the inner wall side of the flow path to increase the efficiency of stirring.

  In the sealing member 51, “MIX” indicating a function of mixing fluid and “W” indicating a function of stirring the fluid are displayed on the outer peripheral surface of the grip portion 54. This display method is the same as that of the seal member 21 of the first embodiment.

<Description of operation>
The fluid device unit 99 having the above configuration supplies the first chemical liquid to the main flow path 94 of the chemical liquid valve 91, for example. Further, the second chemical liquid, the third chemical liquid, and the fourth chemical liquid are supplied to the branch flow paths 96 of the chemical liquid valves 91, 90, and 92, respectively. When the chemical liquid valves 90 to 92 are in the valve closed state, the first chemical liquid is output from the main flow path 94 of the chemical liquid valve 92 without being mixed with the second to fourth chemical liquids.

  For example, when the chemical liquid valve 91 is opened and the chemical liquid valves 90 and 92 are closed, the second chemical liquid is supplied from the branch flow path 96 of the chemical liquid valve 91 to the main flow path 94 via the valve seat 6 and the valve hole 95. , Join the first chemical. When the first and second chemicals pass through the seal member 41, they flow in a spiral shape along the protrusions 45a projecting from the inner peripheral portion 42f, and are stirred and mixed.

  Furthermore, when the mixed fluid passes through the seal member 51, it strikes the stirring wall 55 a to generate turbulent flow, and then flows from between the bridge portions 55 b to the secondary side. Therefore, the first and second chemical solutions are output from the main flow path 94 of the chemical solution valve 92 after the whole is uniformly stirred by the stirring unit 55. However, since the end surface of the stirring wall 55a has a conical shape, the chemical liquid that has collided with the stirring wall 55a smoothly flows toward the inner wall of the flow path, and the chemical liquid can be prevented from staying in the vicinity of the stirring wall 55a.

<Effect>
In the seal member 41, the fluid device connection structure 20, and the fluid device unit 99 having the above-described configuration, the seal member 41 is made of resin and has corrosion resistance. When the connection part 3a of the chemical | medical solution valves 90 and 91 is connected, the sealing member 41 is the "annular uneven | corrugated strip" comprised by the cyclic | annular protrusion 3c of the connection part 3a. ”And seal at the press-fitted part. Therefore, the seal member 41 does not deform the inner peripheral portion 42f that becomes a flow path when the main flow path 94 is connected before and after being attached to the connection portion of the chemical valves 90 and 91.

  Since the spiral generating portion 45 is provided in the inner peripheral portion 42f of such a seal member 41, even if the seal member 41 is mounted between the connection portion 3a of the chemical valve 90 and the connection portion 3a of the chemical valve 91, The seal member 41 does not deteriorate the function of generating a spiral flow in the fluid flowing through the main flow path 94 because the spiral generation portion 45 is not deformed into strain.

  Therefore, according to the seal member 41, the fluid device connection structure 20, and the fluid device unit 99 of the second embodiment, there is corrosion resistance, and a swirl generation function can be added without changing the size of the unit or device. .

  In the seal member 41, the fluid device connection structure 20, and the fluid device unit 99 according to the second embodiment, the spiral generating portion 45 is a projection 45a provided in a spiral shape on the inner peripheral surface of the inner peripheral portion 42f provided in the seal member 41. Therefore, the spiral generating portion 45 can be provided on the seal member 41 at low cost by injection molding or the like.

  In the sealing member 51, the fluid device connection structure 20, and the fluid device unit 99 having the above-described configuration, the sealing member 51 is made of resin and has corrosion resistance. When the connection part 3a of the chemical | medical solution valves 90 and 92 is connected, the sealing member 51 is an "annular uneven | corrugated strip | line" comprised by the cyclic | annular protrusion 3c of the cyclic | annular protrusion 52c comprised by the annular groove 52a, 52b. ”And seal at the press-fitted part. Therefore, the seal member 51 does not deform the inner peripheral portion 52f that becomes a flow path when the main flow path 94 is connected before and after being attached to the connection portion of the chemical valves 90 and 92.

  Since the stirring part 55 is provided in the inner peripheral part 52f of such a seal member 51, even if the seal member 51 is mounted between the connection part 3a of the chemical liquid valve 90 and the connection part 3a of the chemical liquid valve 92, the seal member 51 is sealed. The member 51 does not deform the stirring section 55 and does not deteriorate the function of stirring the main flow path 94.

  Therefore, according to the sealing member 51, the fluid device connection structure 20, and the fluid device unit 99 of the second embodiment, there is corrosion resistance, and a stirring function can be added without changing the size of the unit or the device.

  In the seal member 51, the fluid device connection structure 20, and the fluid device unit 99 of the second embodiment, the stirrer 55 is smaller than the channel area of the connection portion of the main channel 94, the stirrer wall 55a, and the seal member 51. And a bridge portion 55b for connecting the stirring wall 55a to the center of the connecting portion. The seal member 51, the fluid device connection structure 20, and the fluid device unit 99 efficiently shield turbulent flow by shielding the center of the flow path where the flow rate of the chemical solution is high with the stirring wall 55a, and hitting the chemical solution against the stirring wall 55a. And can be stirred and mixed. In particular, when mixing a plurality of chemical solutions, they are uniformly mixed by hitting the stirring wall 55a and generating turbulent flow.

(Third embodiment)
Then, 3rd Embodiment of the sealing member of this invention, a fluid apparatus connection structure, and a fluid apparatus unit is described. FIG. 21 is a cross-sectional view of a fluid device unit 100 using a seal member 61 according to the third embodiment of the present invention.
The fluid device unit 100 is configured by replacing the seal members 41 and 51 provided in the fluid device unit 99 of the second embodiment with a seal member 61. Therefore, here, the seal member 61 different from that of the second embodiment will be mainly described, and the points common to the second embodiment will be denoted by the same reference numerals as those of the second embodiment, and description thereof will be omitted as appropriate.

<Seal member with spiral generation function>
22 is an external perspective view of the sealing member 61 with a spiral generating function shown in FIG. FIG. 23 is a plan view of the seal member 61 shown in FIG. 24 is a cross-sectional view of the seal member 61 shown in FIG. 25 is a side view of the seal member 61 shown in FIG.
The seal member 61 includes annular grooves 62a and 62b of the main body 62, guide portions 62c and 62d, a press-fitting allowance 62e, an overhang portion 63, and a convex portion 64a of the grip portion 64, and the seal member 41 of the second embodiment. It is provided similarly. The seal member 61 is different from the spiral generator 45 of the seal member 41 according to the second embodiment in the structure of the spiral generator 65 provided in the main body 62.

  As shown in FIGS. 22 to 24, the spiral generating portion 65 is configured by integrally providing a helical wall 65a formed by twisting a thin plate on the inner peripheral portion 62f of the main body portion 52 by welding. As shown in FIG. 21, the spiral generating portion 65 has a spiral wall 65a whose width is smaller than the inner diameter of the main flow path 94, and is attached to the inner wall of the main flow path 94 when the sealing member 61 is detached between the connection portions 3a and 3a. It is prevented from being damaged by touching or damaging the channel surface. As shown in FIGS. 24 and 25, the spiral wall 65 a is longer than the entire length in the axial direction of the main body portion 52, and both end portions protrude from both end openings of the main body portion 52.

  Further, as shown in FIGS. 22 and 25, the grip portion 64 of the seal member 61 has “MIX” indicating a function of mixing a chemical solution, “SC” indicating a function of generating a vortex in the fluid, and vortex generation. “OUT” indicating that the portion 65 is provided so as to protrude from the inner peripheral surface 62f is displayed. This display method is the same as that of the seal member 41 of the second embodiment.

<Description of operation>
In the fluid device unit 100 including the seal member 61, the chemical liquid flowing through the main flow path 94 is guided by the spiral wall 65 a to flow spirally, and the chemical liquid flows between the main flow path 94 and the flow path surface when flowing through the main flow path 94. The resulting pressure loss is reduced. Since the spiral wall 65a is longer than the inner peripheral portion 62f, the spiral liquid 65a has a longer distance for guiding the drug solution in a spiral shape, and can form a stable spiral flow.

  Further, for example, in a state where the first chemical liquid is supplied from the main flow path 94 of the chemical liquid valve 91 to the main flow path 94 of the chemical liquid valve 92, the chemical liquid valve 91 is opened and the chemical liquid valves 90 and 92 are closed. When the first and second chemical liquids are merged with the first chemical liquid, the first and second chemical liquids are stirred while flowing spirally when passing through the seal member 61, and are uniformly mixed. In particular, the seal member 61 has a spiral wall 65a disposed at the center of the inner peripheral portion 62f, and guides the portion of the first and second liquid chemicals having the highest flow velocity in a spiral manner to the entire fluid mixture. Since a spiral flow is formed, the first and second chemical liquids can be mixed efficiently.

<Effect>
In the seal member 61, the fluid device connection structure 20, and the fluid device unit 100 having the above-described configuration, the seal member 61 is made of resin and has corrosion resistance. For example, when the connecting portion 3a of the chemical liquid valves 90 and 91 is connected, the sealing member 61 has an “annular unevenness” formed by the annular protrusions 3c of the connecting portion 3a. It is press-fitted into the "strip" and sealed at the press-fitted part. Therefore, the seal member 61 does not deform the inner peripheral portion 62f that becomes the flow path when the main flow paths 94 are connected before and after being attached to the connection portion of the chemical valves 90 and 91.

  Since the spiral generating portion 65 is provided in the inner peripheral portion 62f of such a seal member 61, even if the seal member 61 is mounted between the connecting portion 3a of the chemical valve 90 and the connecting portion 3a of the chemical valve 91, The seal member 61 does not deform the spiral generating portion 65 and does not deteriorate the function of generating a spiral flow in the chemical liquid flowing through the main flow path 94.

  Therefore, according to the seal member 61, the fluid device connection structure 20, and the fluid device unit 100 of the third embodiment, there is corrosion resistance, and a swirl generation function can be added without changing the size of the unit or device. .

  In the seal member 61, the fluid device connection structure 20, and the fluid device unit 100 according to the third embodiment, the spiral generating portion 65 is integrally provided on the inner peripheral surface of the inner peripheral portion 62f provided in the seal member 61, and is spiral. Since the spiral wall 65a is twisted, the entire fluid passing through the seal member 61 can be swirled to efficiently generate a turbulent flow, which can be stirred and mixed.

In addition, this invention is not limited to the said embodiment, Various application is possible.
(1) For example, in the first embodiment, the filter 25 is press-fitted into the housing recess 22g of the main body 22, but the inner periphery of the filter 75 and the main body 72 like the seal member 71 with a filter shown in FIG. The filter 75 may be attached to the main body 72 by welding a contact portion with the 72f. In this case, by forming the filter 75 in a bag shape with a large depth, the foreign matter removal area of the filter can be increased and the pressure loss can be reduced.

(2) For example, as shown in the sealing member 81 with a stirring function shown in FIGS. May be integrally provided on the inner peripheral portion 82f by injection molding or welding. The chemical solution passing through the seal member 81 collides with the stirring unit 85 to generate turbulent flow, and flows to the secondary side through a portion not blocked by the stirring unit 85. Therefore, the seal member 81 shown in FIGS. 27 to 30 is a stirring wall in which the stirring portion 85 is erected so as to protrude from the inner peripheral surface of the inner peripheral portion 82f to the center of the flow channel, and thus the main flow path 94. The chemical solution can be stirred and mixed while changing the flow direction of the chemical solution flowing through the.

  Here, the mounting direction of the sealing member 81 to the connecting portion 3a is not limited. Therefore, for example, when the seal member 81 is attached to four connection portions, the seal member 81 is disposed in each connection portion so that the position of the stirring portion 85 is shifted by 90 degrees. In this case, every time the chemical solution passes through the seal member 81, the flow direction is changed by 90 degrees. Therefore, when the chemical liquid is a mixed fluid, the chemical liquid of the mixed fluid can be mixed uniformly.

(3) For example, the 1st and 2nd division | segmentation pieces 13 and 14 of the said embodiment are good also as a transparent member which uses a transparent epoxy resin etc. as a material. According to this, it is possible to confirm the display of the grip portions 24, 34, 44, 54, 64, 74, 84 from the outside while the connecting member 12 is mounted on the connection portion.

(4) For example, the sealing member 21 of the first embodiment may be provided with a taper on the inner peripheral surface of the opening of the support 25b of the filter 25. In this case, it is desirable that the taper be formed so as to be flush with the taper provided on the inner periphery of both ends of the main body 22 when the filter 25 is press-fitted into the housing recess 22g. According to this, it is possible to further reduce the resistance generated in the fluid passing through the connecting portions 3a and 9a.

It is sectional drawing of the fluid apparatus unit which uses the sealing member which concerns on 1st Embodiment of this invention. It is an expanded sectional view which shows the fluid apparatus connection structure of the chemical | medical solution valve shown in FIG. FIG. 3 is an exploded perspective view of the fluid device connection structure shown in FIG. 2. It is a top view of the sealing member with a filter shown in FIG. It is AA sectional drawing of FIG. It is a side view of the sealing member shown in FIG. It is an external appearance perspective view of the sealing member with an orifice shown in FIG. It is a top view of the sealing member shown in FIG. It is BB sectional drawing of FIG. It is a side view of the sealing member shown in FIG. It is sectional drawing of the fluid apparatus unit which uses the sealing member which concerns on 2nd Embodiment of this invention. It is CC sectional drawing of FIG. It is an external appearance perspective view of the sealing member with a spiral generation function shown in FIG. It is a top view of the sealing member shown in FIG. It is DD sectional drawing of FIG. It is a side view of the sealing member shown in FIG. It is an external appearance perspective view of the sealing member with a stirring function shown in FIG. It is a top view of the sealing member shown in FIG. It is EE sectional drawing of FIG. It is a side view of the sealing member shown in FIG. It is sectional drawing of the fluid apparatus unit which uses the sealing member which concerns on 3rd Embodiment of this invention. It is an external appearance perspective view of the sealing member with a spiral generation function shown in FIG. It is a top view of the sealing member shown in FIG. It is FF sectional drawing of FIG. It is a side view of the sealing member shown in FIG. It is sectional drawing which shows the modification of the sealing member with a filter. It is an external appearance perspective view which shows the modification of the sealing member with a stirring function. It is a top view of the sealing member shown in FIG. It is GG sectional drawing of FIG. FIG. 29 is a side view of the seal member shown in FIG. 28.

Explanation of symbols

1, 90, 91, 92 Chemical valve (first part, second part, fluid control device)
3a connecting portion 9 joint block 9a connecting portion 12 connecting member 13 first divided piece 14 second divided pieces 21, 31, 41, 51, 61, 71, 81 seal members 21a, 21b, 31a, 31b, 41a, 41b, 51a , 51b, 61a, 61b, 71a, 71b, 81a, 81b Annular groove 25, 75 Filter 35 Orifice 45, 65 Swirl generating part 45a Protrusion 65a Spiral wall 55, 85 Stirring part 55a Stirring wall 55b Bridge part

Claims (15)

A resin is formed in an annular shape, and is disposed at a connection portion between a first flow path provided in the first part and a second flow path provided in the second part, and the first part of the first part is provided. A first annular projection and depression that is press-fitted into a first annular projection and depression formed on the outer periphery of the opening where the flow path opens, and a second formed on the outer periphery of the opening where the second flow path of the second part opens. In a sealing member provided with the 2nd annular concavo-convex ridge press-fitted into the annular ridge,
A seal member, wherein a filter for removing foreign matter is provided in an inner peripheral portion that becomes a flow path when the first flow path and the second flow path are connected. The sealing member according to claim 1,
A seal member, wherein a storage recess for storing the filter is provided on an inner peripheral surface of the inner peripheral portion, and the filter is press-fitted into the storage recess. A resin is formed in an annular shape, and is disposed at a connection portion between a first flow path provided in the first part and a second flow path provided in the second part, and the first part of the first part is provided. A first annular projection and depression that is press-fitted into a first annular projection and depression formed on the outer periphery of the opening where the flow path opens, and a second formed on the outer periphery of the opening where the second flow path of the second part opens. In a sealing member provided with the 2nd annular concavo-convex ridge press-fitted into the annular ridge,
The sealing member characterized by providing the orifice which adjusts a flow volume in the inner peripheral part used as a flow path when the said 1st flow path and the said 2nd flow path are connected. In the sealing member according to claim 3,
The orifice is formed integrally with the inner peripheral portion. A resin is formed in an annular shape, and is disposed at a connection portion between a first flow path provided in the first part and a second flow path provided in the second part, and the first part of the first part is provided. A first annular projection and depression that is press-fitted into a first annular projection and depression formed on the outer periphery of the opening where the flow path opens, and a second formed on the outer periphery of the opening where the second flow path of the second part opens. In a sealing member provided with the 2nd annular concavo-convex ridge press-fitted into the annular ridge,
A sealing member, wherein an agitation part for agitating a fluid is provided in an inner peripheral part that becomes a flow path when the first flow path and the second flow path are connected. The seal member according to claim 5,
The stirrer is connected to the stirrer wall smaller than the channel area of the connecting portion of the first and second flow paths, and the stirrer wall and the inner peripheral surface of the inner peripheral part to connect the stirrer wall A sealing member comprising a bridge portion arranged at the center of the portion. The seal member according to claim 5,
The stirring portion is a stirring wall that is erected so as to protrude from the inner peripheral surface of the inner peripheral portion toward the center of the flow path of the connection portion of the first and second flow paths. Seal member. A resin is formed in an annular shape, and is disposed at a connection portion between a first flow path provided in the first part and a second flow path provided in the second part, and the first part of the first part is provided. A first annular projection and depression that is press-fitted into a first annular projection and depression formed on the outer periphery of the opening where the flow path opens, and a second formed on the outer periphery of the opening where the second flow path of the second part opens. In a sealing member provided with the 2nd annular concavo-convex ridge press-fitted into the annular ridge,
A spiral generator for generating a spiral flow in the fluid flowing through the first and second flow paths is provided in an inner peripheral portion that becomes a flow path when the first flow path and the second flow path are connected. The sealing member characterized by the above-mentioned. The seal member according to claim 8,
The seal member according to claim 1, wherein the spiral generating portion is a protrusion provided in a spiral shape on an inner peripheral surface of the inner peripheral portion. The seal member according to claim 9,
The seal member, wherein the spiral generating portion is a spiral wall integrally provided on the inner peripheral surface of the inner peripheral portion and spirally twisted. In the sealing member that performs sealing by being arranged at a connection portion between the first flow path provided in the first part and the second flow path provided in the second part,
An annular main body provided with a fluid control unit on the inner periphery that becomes the flow path when the first flow path and the second flow path are connected;
A gripping portion disposed outside a connection portion to which the first and second connection portions connect;
An overhang part connecting the main body part and the grip part,
The sealing member, wherein the function of the fluid control unit is displayed on the gripping unit.   A fluid device connection structure, wherein the seal member according to any one of claims 1 to 11 is used at a connection portion between the first fluid device and the second fluid device.   A fluid device unit, wherein the first and second fluid devices are connected using the seal member according to any one of claims 1 to 11. In a fluid device connection structure in which a first flow path provided in a first fluid device and a second flow path provided in a second fluid device are connected via an annular seal member, and the connection portion is connected by a connection member. ,
The sealing member is
An annular main body provided with a fluid control unit on the inner periphery that becomes the flow path when the first flow path and the second flow path are connected;
A gripping portion disposed on the outside of a connection portion to which the first and second connection portions are connected;
An overhang part connecting the main body part and the grip part,
The grip part is provided with a display unit for displaying the function of the fluid control unit,
The connecting member is
A fluid device connection structure comprising a plurality of divided pieces that are mounted and connected to a connection portion of the first and second fluid devices so as to cover the grip portion.   A fluid device unit, wherein the fluid device connection structure according to claim 14 connects the first fluid device and the second fluid device.

Images