JP6720013B2 - Plug and plug structure - Google Patents

Description

The present invention relates to a plug attached to an opening of a liquid storage container and a plug structure including the plug.

BACKGROUND ART Conventionally, a plug attached to a liquid storage container that stores a liquid such as a chemical liquid used in semiconductor manufacturing has been known (see, for example, Patent Document 1).
The plug disclosed in Patent Document 1 has an outer plug attached to an opening of a liquid container, a liquid take-out pipe inserted into the outer plug, and an inner plug attached to the outer plug.

Japanese Utility Model Publication No. 6-51200

The plug disclosed in Patent Document 1 holds a pipe and prevents liquid leakage by disposing packing between the flange portion of the outer plug and the lower end of the inner plug. Therefore, when the inner plug is attached to the outer plug, the internal space of the liquid take-out pipe and the internal space of the liquid storage container do not communicate with each other.

However, when the amount of gas stored in the liquid storage container increases due to a change in the environmental temperature of the liquid storage container due to transportation or storage, the internal space of the liquid storage container is pressurized. In this case, when removing the inner plug from the outer plug to use the liquid, the liquid may be ejected to the outside through the liquid take-out pipe.

The present invention has been made in view of the above circumstances, and a plug that suppresses a problem in which the amount of gas contained in a liquid storage container increases due to a change in the environmental temperature of the liquid storage container and the liquid ejects to the outside And it aims at providing the plug structure provided with it.

The present invention adopts the following means in order to solve the above problems.
A plug according to an aspect of the present invention is a plug that is attached to a liquid storage container having an opening formed in a cylindrical shape along an axis on an upper surface thereof, and is attached to an inner peripheral surface of the opening. A plug body portion having a through hole extending along the axis at the lower end, and a siphon tube connected to the lower end of the plug body and extending along the axis to the bottom of the liquid storage container, A first main body part that is attached to the inner peripheral surface of the opening and is formed in a cylindrical shape along the axis, and that is integrally formed with the first main body part. A second main body portion having a bottom surface portion arranged on a plane intersecting the axis, wherein the first main body portion is formed in the plug main body portion with respect to the outside of the liquid storage container. has an inner circumferential surface capable of mounting a sealing portion having a sealing member for sealing, the second body portion is an endless seal region said sealing member is in contact with the bottom surface portion extending in the axis line When the container is formed, it has a communication part that connects the internal space of the liquid storage container and the internal space of the plug.

According to the plug of one aspect of the present invention, the seal member is brought into contact with the bottom surface of the second main body part of the plug main body in a state where the plug main body is attached to the inner peripheral surface of the opening of the liquid storage container. By doing so, the flow path formed at the lower end of the plug body is sealed. By sealing the flow path, the liquid contained in the liquid container is prevented from being ejected to the outside through the siphon tube.

Further, according to the plug of one aspect of the present invention, since the second main body portion has the communicating portion, even when the seal member is arranged in contact with the bottom surface portion, the internal space of the liquid storage container And the internal space of the plug communicate with each other. Therefore, even when the amount of gas stored in the liquid storage container increases due to changes in the environmental temperature of the liquid storage container, the pressure in the internal space of the liquid storage container and the pressure in the internal space of the plug are maintained at the same pressure. To be done. Thereby, when the sealing of the flow path by the seal member is released, the problem that the liquid stored in the liquid storage container is ejected to the outside via the siphon tube is suppressed.

In the plug according to one aspect of the present invention, the communication portion has a through hole extending along the axis and a plane that intersects with the axis and has one end communicating with the through hole and the other end of the plug. It may be configured to have a communication groove that communicates with the internal space.
By doing so, when the seal member is arranged in contact with the bottom surface of the second main body, the internal space of the liquid storage container and the internal space of the plug are separated from each other via the through hole and the communication groove. Can be communicated. Thereby, when the sealing of the flow path by the seal member is released, the problem that the liquid stored in the liquid storage container is ejected to the outside via the siphon tube is suppressed. Further, the communication portion can be formed with a relatively simple structure in which the through hole and the communication groove intersecting with the through hole are formed in the second main body portion.

In the plug having the above configuration, the bottom surface portion may have an endless annular projection portion that extends around the axis line on the outer peripheral side of the through hole with respect to the axis line.
With this configuration, when the seal member is arranged in contact with the bottom surface of the second main body, the endless seal area is formed on the outer peripheral side of the through hole communicating with the internal space of the liquid storage container. To be done. As a result, it is possible to reliably suppress the problem that the liquid flows out from the siphon tube or the liquid storage container to the outside.

In the plug according to one aspect of the present invention, the plug body and the siphon tube may be formed of a resin material, and the plug body and the siphon tube may be connected by welding of the resin material. ..
By doing so, compared to the case where the plug main body and the siphon pipe are not welded and are connected as separate members via a seal member, etc., liquid or gas flows out from the connecting portion between the plug main body and the siphon pipe. It is possible to suppress the trouble caused by the insertion.

A plug structure according to one aspect of the present invention includes the plug according to any one of the above, and a seal member that is attached to an inner peripheral surface of the first main body portion and that forms a seal region by contacting the bottom surface portion. And a sealing portion having.
According to the plug structure of one aspect of the present invention, the sealing member is attached to the inner peripheral surface of the first main body portion of the plug, so that the sealing member and the bottom surface portion are in contact with each other to form the sealing region. The seal area suppresses the problem that the liquid flows out from the liquid container and the siphon tube to the outside.

Further, in the state where the seal region is formed, the internal space of the liquid storage container and the internal space of the plug are in communication with each other. Therefore, even when the amount of gas stored in the liquid storage container increases due to changes in the environmental temperature of the liquid storage container, the pressure in the internal space of the liquid storage container and the pressure in the internal space of the plug are maintained at the same pressure. To be done. Thereby, when the sealing of the flow path by the seal member is released, the problem that the liquid stored in the liquid storage container is ejected to the outside via the siphon tube is suppressed.

In the plug structure according to one aspect of the present invention, a female screw is formed on the inner peripheral surface of the first main body portion, and a male screw is formed on the outer peripheral surface of the sealing portion, and the first main body portion and The sealing portion may be connected by engaging the male screw with the female screw.
By doing so, the sealing portion is attached to the first main body portion by a relatively simple operation in which the male screw formed on the outer peripheral surface of the sealing portion is attached to the female screw formed on the inner peripheral surface of the first main body portion. Can be attached to.

According to the present invention, it is possible to provide a plug that suppresses a problem in which the amount of gas contained in a liquid storage container increases due to a change in the environmental temperature of the liquid storage container and the liquid is ejected to the outside, and a plug structure including the plug. You can

It is a block diagram which shows the liquid supply system of one Embodiment of this invention. FIG. 6 is a partial vertical cross-sectional view showing an opening of a liquid storage container to which a plug is attached. FIG. 3 is a vertical sectional view of the plug shown in FIG. 2. FIG. 3 is a plan view of the plug shown in FIG. 2 seen from above. FIG. 2 is a vertical sectional view of the sealing portion. It is a partial longitudinal cross-sectional view showing an opening of a liquid storage container to which a socket is attached. It is a longitudinal cross-sectional view showing a plug and a socket. It is a longitudinal cross-sectional view showing a plug and a socket. It is a longitudinal cross-sectional view showing a plug and a socket. It is a fragmentary longitudinal cross-sectional view showing an opening of a liquid storage container to which a plug of a modified example is attached.

Hereinafter, a liquid supply system according to an embodiment of the present invention will be described with reference to the drawings.
The liquid supply system of the present embodiment shown in FIG. 1 is a system that sucks the liquid contained in the liquid storage container 400 with a pump (not shown) and supplies the liquid to a plurality of supply destination devices (not shown).

Here, the liquid in the present embodiment is, for example, pure water or various chemical liquids used in the semiconductor manufacturing process of the semiconductor manufacturing apparatus.
The liquid storage container 400 may have an environmental temperature higher than that at the time when the liquid is stored therein during transportation to the factory where the semiconductor manufacturing apparatus is installed or storage inside the factory. In this case, the amount of gas contained in the liquid container 400 increases due to evaporation of the liquid inside, and the internal space is pressurized. Further, for example, hydrogen peroxide solution used as a chemical solution decomposes into water and oxygen according to the environmental temperature and the like. Therefore, when the liquid container 400 is sealed, the gas region in the internal space of the liquid container 400 is pressurized by oxygen. Further, even in the case of a volatile chemical liquid or the like, the gas region in the internal space of the liquid storage container 400 is in a state of being pressurized by oxygen.

The liquid supply system of the present embodiment suppresses the liquid from spouting from the liquid storage container 400 to the outside even when the internal space of the liquid storage container 400 is in a pressurized state.
As shown in FIG. 1, a liquid storage container 400 included in the liquid supply system of the present embodiment includes a container body 410 formed in a cylindrical shape around an axis X2, and an axis line provided on an upper surface (top plate) of the container body 410. An opening 420 and an opening 430 which are formed in a cylindrical shape around X1 are provided.

As shown in FIG. 1, the liquid supply system of the present embodiment includes a plug 100 attached to an opening 420 of a liquid storage container 400 and a sealing unit 200. Further, the liquid supply system of the present embodiment includes the sealing stopper 300 attached to the opening 430 of the liquid storage container 400.
In the liquid supply system of this embodiment, when the liquid stored in the liquid storage container 400 is sucked and supplied to the supply destination device, the socket 500 is attached instead of the sealing unit 200. Further, instead of the sealing stopper 300, another stopper (not shown) capable of supplying gas into the liquid storage container 400 is attached.

Hereinafter, the plug structure of the present embodiment will be described with reference to the drawings.
As shown in FIGS. 2 and 3, the plug structure of the present embodiment includes the plug 100 attached to the opening 420 of the liquid storage container 400 and the sealing portion 200 attached to the plug 100.
The plug 100 includes the plug main body 10 attached to the inner peripheral surface of the opening 420, and the siphon tube 20 connected to the plug main body 10 and extending to the bottom 440 (see FIG. 1) of the liquid storage container 400. A flow channel 11 extending along the axis X1 is formed inside the plug body 10 and is connected to a flow channel 20a formed inside the siphon tube 20.

The plug body 10 and the siphon tube 20 are each formed of a fluororesin material such as PFA (tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer) or a crystalline thermoplastic resin material such as HDPE (high density polyethylene). There is. The plug body 10 and the siphon tube 20 are welded by melting the resin material of these connecting portions by ultrasonic waves. Instead of melting the resin material by ultrasonic waves, the connecting portion between the plug body 10 and the siphon tube 20 may be welded by melting a welding rod made of the resin material.

As shown in FIG. 3, the plug body 10 has a second body having a first body 10a formed in a cylindrical shape along the axis X1 and a bottom surface 12 arranged on a plane orthogonal to the axis X1. And a portion 10b. The first main body portion 10a and the second main body portion 10b are integrally formed of a fluororesin material such as PFA or a crystalline thermoplastic resin material such as HDPE.

A male screw is formed on the outer peripheral surface of the first main body portion 10a, and a female screw is formed on the inner peripheral surface of the opening 420. By fastening the male screw of the first main body portion 10 a to the female screw of the opening portion 420, the first main body portion 10 a is attached to the inner peripheral surface of the opening portion 420.
A female screw is formed on the inner peripheral surface of the first main body portion 10a, and a male screw is formed on the outer peripheral surface of the sealing portion 200. By fastening the male screw of the sealing portion 200 to the female screw of the first main body portion 10a, the sealing portion 200 and the first main body portion 10a are connected.

An O-ring 450 made of fluororubber or the like is attached to the inner peripheral surface of the opening 420. When the first main body portion 10a is attached to the inner peripheral surface of the opening 420, the O-ring 450 and the first main body portion 10a come into contact with each other to form a seal region that extends endlessly around the axis X1. As a result, it is possible to prevent the liquid from flowing out through the gap between the plug body 10 and the opening 420.

As shown in FIG. 3, in the second main body portion 10b, one end communicates with the through hole 13a formed on the outer peripheral side of the flow path 11 with respect to the axis X1 and one end communicates with the through hole 13a, and the other end has an internal space S2 of the plug 100. A communication portion 13 having a communication groove 13b that communicates with
As shown in FIG. 3, the communication portion 13 is arranged in a state where the sealing member 220 of the sealing portion 200 is in contact with the bottom surface portion 12, the internal space S1 of the liquid storage container 400 and the internal space S2 of the plug 100. And communicate with.

As shown in FIG. 3, the through hole 13a is formed so as to extend along the axis X1. Further, as shown in the plan view of FIG. 4, the through holes 13a have a shape extending along the circumferential direction around the axis X1 and are formed at four places with intervals of 90 degrees around the axis X1.
The communication groove 13b communicates with each of the through holes 13a formed at four places, and is formed at four places so as to extend in the radial direction around the axis X1 on a plane orthogonal to the axis X1.
Although the through holes 13a and the communication grooves 13b are formed at four locations in the circumferential direction around the axis X1 in FIG. 3, they may be formed at any locations such as two locations, six locations, and eight locations.

As shown in FIG. 3, an endless annular projection 12a extending around the axis X1 is formed on the bottom surface 12 of the second body 10b on the outer peripheral side of the through hole 13a with respect to the axis X1. As shown in FIG. 2, when the sealing member 220 of the sealing portion 200 is arranged in contact with the bottom surface portion 12, an endless shape extending around the axis X1 is provided at a contact portion between the annular protrusion 12a and the sealing member 220. A seal area is formed. The sealing region seals the flow passage 11 formed at the lower end of the plug body 10.

As shown in FIG. 5, the sealing unit 200 includes a main body 210 attached to the inner peripheral surface of the first main body 10 a and a seal member 220 that contacts the bottom surface 12 of the plug main body 10 to form a seal area. With. The seal member 220 is attached to the plug body 10 so that an annular seal surface 220a is formed below.

The main body 210 has a protrusion 210a that protrudes downward from the seal surface 220a of the seal member 220. The protruding portion 210 a is a portion that is inserted into the recess 14 formed in the plug body portion 10 when the body portion 210 of the sealing portion 200 is attached to the plug body portion 10. By inserting the protrusion 210 a into the recess 14, the central axis of the main body 210 of the sealing portion 200 can be easily matched with the central axis of the plug main body 10 of the plug 100.

Even if the protruding portion 210a of the sealing portion 200 is inserted into the recess 14 of the plug body 10, a minute gap is provided between the outer peripheral surface of the protruding portion 210a and the inner peripheral surface of the recess 14. It will be in a state of being. Therefore, even when the sealing portion 200 is attached to the plug 100, the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100 are maintained in a state of being communicated with each other via the communication portion 13. .. Therefore, even when the internal space S1 of the liquid storage container 400 is pressurized due to a change in environmental temperature or the like, the pressure of the internal space S1 and the internal space S2 of the siphon tube 20 are maintained at the same pressure.

Next, the socket 500 that is attached to the opening 420 instead of the sealing portion 200 when sucking the liquid stored in the liquid storage container 400 and supplying the liquid to the supply destination device will be described.
As shown in FIG. 6, the socket 500 includes a socket body 510 formed in a cylindrical shape extending along the axis X1 and a cylindrical body extending along the axis X1 and surrounding the socket body 510. The mounting nut 520 arranged, the O-ring 530 mounted on the outer peripheral surface of the socket body 510, the flange portions 540 and 550 fastened by the fastening bolts above the socket body 510, the seal member 560, and the lower end portion. 570 and an O-ring 580.

A flow channel 511 is formed inside the socket body 510, and in the state where the socket 500 is attached to the plug 100, the flow channel 511, the flow channel 20a formed inside the siphon tube 20, and the socket body. The supply pipe 600 attached to 510 is in communication.
The mounting nut 520 is a member having a male screw formed on the lower outer peripheral surface thereof, and is a member that is movable relative to the socket body 510 along the axis X1.

By moving the mounting nut 520 relatively to the lower end of the socket body 510, the male screw of the mounting nut 520 can be fastened to the female screw formed on the inner peripheral surface of the plug body 10. As a result, as shown in FIG. 7, the socket body 510 and the seal member 560 are sandwiched between the mounting nut 520 and the plug body 10.

The O-ring 530 restricts the mounting nut 520 from moving excessively with respect to the socket body 510 while allowing the mounting nut 520 to move relative to the socket body 510. The O-ring 530 functions as a stopper that holds the mounting nut 520 upward so that the operator can easily see the tip of the socket 500 when the socket 500 is mounted on the plug 100.
The flange portions 540 and 550 are members that are fastened to the socket main body portion 510 by fastening bolts. The flange portions 540 and 550 define the upper limit position where the mounting nut 520 can move relative to the socket body 510.

As shown in FIG. 7, the seal member 560 is attached to the socket body 510 so that an annular seal surface 560a is formed below.
A lower end portion 570 protruding downward from the sealing surface 560a of the seal member 560 is attached to the lower end of the socket body 510. The lower end portion 570 is a portion that is inserted into the recess 14 formed in the plug body portion 10 when the socket body portion 510 is attached to the plug body portion 10. By inserting the lower end portion 570 into the recess 14, the central axis of the socket body 510 can be easily aligned with the central axis of the plug body 10 of the plug 100.

As shown in FIG. 7, when the lower end 570 is inserted into the recess 14 of the plug body 10, the O-ring 580 attached to the outer peripheral surface of the socket body 510 comes into contact with the inner peripheral surface of the recess 14, An endless seal region extending around the axis X1 is formed. Therefore, when the socket 500 is attached to the plug 100, the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100 are maintained in a state of not communicating. Therefore, when the internal space S2 of the siphon tube 20 is sucked by a pump (not shown), the pressure difference generated between the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100 is maintained. It

Next, an operation of removing the socket 500 from the plug 100 will be described with reference to FIGS. 8 and 9.
When the fastening between the mounting nut 520 and the plug body 10 is gradually loosened from the state shown in FIG. 7, the state shown in FIG. 8 is obtained. In the state shown in FIG. 8, since the O-ring 580 is in contact with the inner peripheral surface of the recess 14, it occurs between the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100. The pressure difference is maintained. In this state, the liquid inside the siphon tube 20 may rise to the recess 14 of the plug 100 due to the pressure difference between the internal space S1 and the internal space S2.

When the fastening between the mounting nut 520 and the plug body 10 is further loosened from the state shown in FIG. 8, the state shown in FIG. 9 is obtained. In the state shown in FIG. 9, since the O-ring 580 is not in contact with the inner peripheral surface of the recess 14, pressure is applied between the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100. There will be no difference. In this state, since there is no pressure difference between the internal space S1 and the internal space S2, the liquid inside the siphon tube 20 does not rise to the recess 14 of the plug 100. In this state, the height of the liquid surface of the liquid in the internal space S1 and the height of the liquid surface of the liquid in the internal space S2 are the same.

According to the plug 100 of the present embodiment, the communication groove 13b is further formed in addition to the through hole 13a, so that the O-ring 580 has the recess 14 in comparison with the case where the communication groove 13b is not formed. The state of not contacting the inner peripheral surface is realized at an early stage. Therefore, as compared with the case where the communication groove 13b is not formed, it is possible to suppress the problem that the liquid inside the siphon tube 20 rises to the recess 14 of the plug 100 and is ejected.

The operation and effect of the plug 100 and the plug structure of the present embodiment described above will be described.
According to the plug 100 of the present embodiment, the plug body 10 is attached to the inner peripheral surface of the opening 420 of the liquid storage container 400, and the bottom surface 12 of the second body 10b of the plug body 10 is attached to the bottom surface 12. By bringing the sealing member 220 into contact, the flow path 11 formed at the lower end of the plug body 10 is sealed. By sealing the flow path 11, the liquid contained in the liquid container 400 is prevented from being ejected to the outside via the siphon tube 20.

Further, according to the plug 100 of the present embodiment, since the second main body portion 10b has the communication portion 13, even when the seal member 220 is arranged in contact with the bottom surface portion 12, the liquid storage container 400 is provided. The internal space S1 and the internal space S2 of the siphon tube 20 of the plug 100 are in communication with each other.
Therefore, even when the amount of gas stored in the liquid storage container 400 increases due to a change in the environmental temperature of the liquid storage container 400 or the like, the pressure of the internal space S1 of the liquid storage container 400 and the pressure of the internal space S2 of the plug 100 are increased. And are maintained at the same pressure. Thereby, when the sealing of the flow path by the seal member 220 is released, the problem that the liquid stored in the liquid storage container 400 is ejected to the outside via the siphon tube 20 is suppressed.

In the plug 100 of the present embodiment, the communication portion 13 extends in a through hole 13a extending along the axis X1 and a plane that intersects the axis X1 and has one end communicating with the through hole 13a and the other end inside the plug 100. And a communication groove 13b communicating with the space S2.
By doing so, when the seal member 220 is arranged in contact with the bottom surface portion 12 of the second main body portion 10b, the internal space S1 of the liquid storage container 400 is inserted through the through hole 13a and the communication groove 13b. And the internal space S2 of the plug 100 can communicate with each other. As a result, when the sealing of the flow path 11 by the seal member 220 is released, the problem that the liquid stored in the liquid storage container 400 is ejected to the outside via the siphon tube 20 is suppressed. Further, the communication portion 13 can be formed with a relatively simple configuration in which the through hole 13a and the communication groove 13b orthogonal to the through hole 13a are formed in the second main body portion 10b.

Further, in the plug 100 of the present embodiment, the bottom surface portion 12 has the endless annular projection 12a extending around the axis X1 on the outer peripheral side of the through hole 13a with respect to the axis X1.
By doing so, when the seal member 220 is arranged in contact with the bottom surface portion 12 of the second main body portion 10b, there is no end on the outer peripheral side of the through hole 13a communicating with the internal space S1 of the liquid storage container 400. A seal area is formed. As a result, it is possible to reliably prevent the liquid from flowing out from the siphon tube 20 or the liquid storage container 400 to the outside.

In the plug 100 of this embodiment, the plug body 10 and the siphon pipe 20 are made of a resin material, and the plug body 10 and the siphon pipe 20 are connected by welding of a resin material.
By doing so, as compared with the case where the plug body 10 and the siphon pipe 20 are not welded and are connected as separate members via a seal member or the like, the liquid from the connecting portion between the plug body 10 and the siphon pipe 20 It is possible to suppress problems caused by the inflow and outflow of gas.

The plug structure of the present embodiment includes a plug 100 and a sealing portion 200 having a sealing member 220 that is attached to the inner peripheral surface of the first main body portion 10a and that contacts the bottom surface portion 12 to form a sealing area. ..
According to the plug structure of the present embodiment, by mounting the sealing portion 200 on the inner peripheral surface of the first main body portion 10a of the plug 100, the sealing member 220 and the bottom surface portion 12 are in contact with each other to form a sealing region. .. This seal area suppresses the problem that the liquid flows out from the liquid storage container 400 and the siphon tube 20 to the outside.

Further, in the state where the seal region is formed, the internal space S1 of the liquid storage container 400 and the internal space S2 of the siphon tube 20 of the plug 100 are in communication with each other. Therefore, even when the gas stored in the liquid storage container 400 increases due to a change in the environmental temperature of the liquid storage container 400 or the like, the pressure in the internal space S1 of the liquid storage container 400 and the inside of the siphon tube 20 of the plug 100. The pressure in the space S2 is maintained at the same pressure. As a result, when the sealing of the flow path 11 by the seal member 220 is released, the problem that the liquid stored in the liquid storage container 400 is ejected to the outside via the siphon tube 20 is suppressed.

In the plug structure of the present embodiment, a female screw is formed on the inner peripheral surface of the first main body portion 10a, and a male screw is formed on the outer peripheral surface of the sealing portion 200, so that the first main body portion 10a and the sealing portion are formed. 200 is connected by engaging a male screw with a female screw.
By doing so, the sealing portion 200 is moved to the first position by a relatively simple operation of attaching the male screw formed on the outer peripheral surface of the sealing portion 200 to the female screw formed on the inner peripheral surface of the first main body portion 10a. 1 can be attached to the main body 10a.

<Other Embodiments>
In the above description, the plug body 10 and the siphon tube 20 are welded by melting the resin material by ultrasonic waves, or welded by melting the welding rod, but other embodiments are also possible. Good.
For example, as shown in FIG. 10, the lower end of the plug body 10A may be formed in a tubular shape, and the lower A end of the plug body 10 may be inserted into the upper end of the siphon tube 20A.

As shown in FIG. 10, the lower end of the plug body 10A according to another aspect (modification) is formed in a tubular shape extending along the axis X1 and provided with an endless annular projection 15 on the outer peripheral surface. ing. As shown in FIG. 10, the outer peripheral surface of the lower end of the plug body 10A is in contact with the inner peripheral surface of the upper end of the siphon tube 20A. In this state, an endless seal region extending around the axis X1 is formed between the annular protrusion 15 and the inner peripheral surface of the upper end of the siphon tube 20A. Since this seal region is formed, in this aspect, the plug body 10A and the siphon tube 20 can be connected without performing work such as welding or welding.

10, 10A Plug body portion 10a First body portion 10b Second body portion 11 Flow path 12 Bottom surface portion 12a Annular protrusion portion 13 Communication portion 14 Recess 15 Annular protrusion portion 20,20A Siphon tube 100 Plug 200 Sealing portion 210 Main body portion 210a Projection 220 Sealing member 220a Sealing surface 300 Sealing plug 400 Liquid storage container 410 Container body 420,430 Opening 440 Bottom 450 O-ring 500 Socket 510 Socket body 520 Mounting nut 530 O-ring 540,550 Flange 560 Sealing member 570 Lower end 580 O-ring 600 Supply pipe S1, S2 Internal space X1, X2 Axis

Claims (5)

A plug attached to a liquid storage container, the opening of which is formed in a cylindrical shape along an axis, is provided on the upper surface,
A plug main body part formed on the inner peripheral surface of the opening and having a flow path extending along the axis;
A siphon tube connected to the plug body and extending to the bottom of the liquid storage container along the axis,
The plug body is
A first body portion that is attached to the inner peripheral surface of the opening portion and is formed into a cylindrical shape along the axis;
A second body portion that is integrally formed with the first body portion and has a bottom surface portion that is arranged on a plane that intersects the axis.
The first main body portion has an inner peripheral surface to which a sealing portion having a sealing member that seals the flow path formed in the plug main body portion can be attached to the outside of the liquid storage container,
The second body portion, when the endless sealing region extending said sealing member is in contact with the bottom surface portion in the axis line is formed, the internal space of the plug and the inner space of the liquid container have a communication portion for communicating,
The communication part is
A through hole extending along the axis,
A plug having a communication groove extending on a plane intersecting the axis and having one end communicating with the through hole and the other end communicating with the internal space of the plug. The plug according to claim 1 , wherein the bottom surface portion has an endless annular projection portion that extends around the axis line on the outer peripheral side of the through hole with respect to the axis line. The plug body and the siphon tube are made of a resin material,
The plug according to claim 1 or 2 , wherein the plug body and the siphon tube are connected by welding of the resin material. A plug according to any one of claims 1 to 3 ,
And a sealing portion having the sealing member attached to the inner peripheral surface of the first main body portion and contacting the bottom surface portion to form a sealing region. A female screw is formed on the inner peripheral surface of the first main body portion,
A male screw is formed on the outer peripheral surface of the sealing portion,
The plug structure according to claim 4 , wherein the first main body portion and the sealing portion are connected by fastening the male screw to the female screw.

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