JPH0651200U - Liquid storage container - Google Patents

Abstract

(57) [Summary] [Object] To provide a container that can be easily filled with a liquid such as a developer used in an IC manufacturing process and taken out of the filled liquid. [Structure] The inlet / outlet port 2 is composed of an upright portion 4, an outer plug 5, an inner plug 6 and a liquid take-out pipe 7 for a developer or the like, and the upright portion 4 is a main body portion 1 of a liquid storage container 1.
a is integrally molded with the outer peripheral surface and the inner peripheral surface of the threaded portion 4
a, 4b are formed, screw parts 5a, 5b are formed on the outer peripheral surface and the inner peripheral surface of the outer plug 5, and the inner peripheral screw part 5b of the outer plug 5 is screwed on the outer peripheral surface of the inner plug 6. A mating outer peripheral threaded portion 6a is formed.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a container for storing a liquid such as a developing solution used in an IC manufacturing process.

[0002]

[Prior art]

 A liquid such as a developer used in the manufacture of IC chips is filled into a container after it has been prepared to the prescribed properties (composition, concentration, viscosity, etc.), and the entire container is brought into the IC chip manufacturing plant for use. It This container is generally made of stainless steel or resin, and if the resin container is thin, it is stored in an iron drum before use.

The structure of the above-mentioned container is to form an inlet / outlet for a liquid such as a developer on the upper surface and to prevent the inside of the container from being decompressed due to the use of the liquid such as a developer. A gas inlet for positively pressurizing the inside of the container is formed. A pipe whose lower end extends near the bottom surface of the container is provided at the inlet / outlet port.When using a liquid such as a developer, the cap of the inlet / outlet port is removed and a joint is attached. A liquid such as a developing liquid is sucked (suction is not necessary when the container is pressurized), and the liquid in the container is taken out through the pipe.

[0004]

[Problems to be solved by the device]

 By the way, the above-mentioned container serves as an inlet and an outlet for a liquid such as a developer. In this case, considering that the liquid such as the developer is injected into the container, the diameter of the injection port needs to be large to some extent. Becomes difficult to take out. As a result, in the past, it took a long time to inject a liquid such as a developing solution, and the structure of the inlet / outlet port was complicated.

[0005]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention provides an upright portion integrally provided with the container for an inlet / outlet opening of a container for storing a liquid such as a developer, and an inner peripheral surface of the upright portion. The outer plug is detachably screwed and supports the upper end of the pipe, and the inner plug is detachably screwed to the inner peripheral surface of the outer plug.

[0006]

[Action]

 When filling the container with liquid, turn the outer plug to integrally remove the outer plug, inner plug and pipe.When using the liquid filled in the container, remove only the inner plug and attach the joint to that part. Install.

[0007]

【Example】

 Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a vertical sectional view of a liquid storage container according to the present invention, FIG. 2 is an enlarged sectional view of an inlet / outlet port, FIG. 3 is a plan view of an inlet / outlet port, and FIG. 4 is an enlarged sectional view of a gas inlet port. It is a figure.

The liquid storage container 1 is made of resin, and is provided with an inlet / outlet port 2 and a gas inlet port 3 for a liquid such as a developer on its upper surface. As shown in FIGS. 2 and 3, the inlet / outlet port 2 is composed of an upright portion 4, an outer plug 5, an inner plug 6 and a pipe 7 for taking out liquid such as a developer, and the gas inlet 3 is shown in FIG. As shown in FIG.

The upright portion 4 of the inlet / outlet port 2 is integrally formed with the main body portion 1a of the liquid storage container 1, and the outer peripheral surface and the inner peripheral surface are formed with screw portions 4a and 4b. The cap 10 is screwed on.

Further, the outer plug 5 is made of resin and has screw portions 5a and 5b formed on its outer peripheral surface and inner peripheral surface, a flange portion 5c projecting outward at the upper end portion, and an inward portion at the lower end portion. The flange portions 5d projecting to the respective sides are integrally formed, and further, the groove portion 5e for engaging with the rotating jig or the fixing jig is integrally formed on the upper surface, and the lightening recessed portion 5f is integrally formed on the lower surface.

Then, when the outer peripheral threaded portion 5a of the outer plug 5 is screwed into the inner peripheral threaded portion 4b of the upright portion 4, a step portion 4c formed on the upper surface of the upright portion 4 and a flange portion of the outer plug 5 are formed. An O-ring (gasket) 11 is sandwiched between it and 5c to prevent liquid leakage.

The inner plug 6 is a resin molded product similar to the above, and the outer peripheral surface is formed with an outer peripheral threaded portion 6a to be screwed into the inner peripheral threaded portion 5b of the outer plug 5, and a cup-shaped inner plug 6 is formed. A groove portion 6b for turning the inner plug 6 at the time of attachment / detachment is formed on the inner peripheral portion of 6. A protrusion may be provided instead of the groove 6b and the groove 5e.

Further, the liquid take-out pipe 7 for the developing solution or the like is also a resin molded product, and an outward flange portion 7 a is formed at an upper end portion thereof, and the upper and lower surfaces of the flange portion 7 a are covered by a packing 12. By sandwiching between the upper surface of the flange portion 5d of the outer plug 5 and the lower end of the inner plug 6, the pipe 7 is held and liquid leakage is prevented.

On the other hand, an outer peripheral screw portion 8a, an inner peripheral screw portion 8b and a step portion 8c are formed on the upright portion 8 of the gas introduction port 3, and an outer peripheral screw portion 9a and a flange portion 9c are formed on the plug 9. The O-ring 13 is sandwiched between the portion 8a and the flange portion 9c.

In the above description, when the liquid storage container 1 is filled with a liquid such as a developer, the outer plug 5 is rotated to be integrally removed from the upright portion 4 together with the inner plug 6 and the pipe 7. That is, the process is performed with the opening diameter increased.

Further, when using a liquid such as a developer filled in a container, only the inner plug 6 is removed, a joint 14 is attached to that portion as shown in FIG. 5, and the liquid in the container 1 is pumped. Suction. In order to prevent the outer plug 5 from rotating when the inner plug 6 is rotated, a jig may be inserted into the groove portion 5e of the outer plug 5.

When taking out the liquid from the container 1 described above, when the amount of the liquid in the container becomes small, the inside of the container is in a depressurized state, and it becomes difficult to take out the liquid. Therefore, when taking out the liquid, as shown in FIG. 6, the plug 9 of the gas inlet 3 is removed and the joint 15 is attached thereto, and nitrogen gas or the like is gradually introduced into the container 1 as the liquid is taken out. To do. It is also possible to positively introduce nitrogen gas into the container 1 to increase the pressure inside the container 1 and utilize this pressure to take out the liquid in the container 1 to the outside.

In the illustrated example, a thin-walled type container to be housed in an iron drum is shown, but the present invention can be applied to a thick-walled container used as it is.

[0019]

[Effect of device]

 As described above, according to the present invention, the inlet / outlet port of the container is detachably screwed to the upright portion integrally provided with the container and the inner peripheral surface of the upright portion. Since the outer plug that supports the upper end of the pipe and the inner plug that is detachably screwed onto the inner peripheral surface of the outer plug are used, the outer plug must be rotated when filling the container with liquid. Since the outer plug, the inner plug and the pipe can be integrally removed to increase the diameter of the opening, the liquid filling time can be shortened and liquid spillage can be prevented. Also, when using the liquid filled in the container, it is only necessary to remove the inner plug and attach the joint to that part, so the operation is simple.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a liquid storage container according to the present invention.

FIG. 2 is an enlarged cross-sectional view of an injection / extraction port.

FIG. 3 is a plan view of the injection / extraction port.

FIG. 4 is an enlarged sectional view of a gas inlet.

FIG. 5 is an enlarged cross-sectional view of an injection / outlet port with a joint attached.

FIG. 6 is an enlarged cross-sectional view of a gas introduction port with a joint attached.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Liquid storage container, 2 ... Injecting / extracting port, 3 ... Gas inlet, 4 ... Standing part, 5 ... Outer plug, 6 ... Inner plug,
7 ... Liquid take-out pipes, 14, 15 ... Joints.

Claims (2)

[Scope of utility model registration request] 1. A liquid storage container having a top surface provided with a liquid inlet / outlet port and a gas inlet port, and a pipe having a lower end extending near the bottom surface of the container at the liquid inlet / outlet port. The inlet / outlet of the pipe is an upright portion that is integrally provided with the container, an outer plug that detachably engages with the inner peripheral surface of the upright portion and supports the upper end of the pipe, and the outer plug. A liquid storage container comprising an inner plug removably screwed onto the inner peripheral surface of the liquid storage container. 2. The inner plug is formed with a groove or a protrusion for turning when attaching and detaching, and the outer plug has a groove for turning when attaching and detaching and for preventing a turn around when turning the inner plug. The liquid storage container according to claim 1, wherein a groove or a protrusion is formed.