JP2017067287A - Valve unit with filter and medical liquid supply device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain favorable pressure responsiveness and a compact design by accumulatively integrating a valve and a filter, and to surely suppress that a discharge behavior becomes instable due to air bubbles which are accumulated in the filter.SOLUTION: In a valve unit with a filter, the filter is accommodated in a block body having an inlet and an outlet, the inlet and a primary side of the filter are connected to each other by a primary-side flow passage which is formed at the block body, the outlet and a secondary side of the filter are connected to each other by a secondary-side flow passage which is formed at the block body, a first valve for opening and closing the primary-side flow passage is mounted to the block body, a bleeding flow passage communicating with a primary-side region of the filter is formed at the block body, the bleeding flow passage is opened and closed, and a second valve having a vent mechanism is mounted to the block body.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a valve unit with a filter used in a chemical supply apparatus for high-purity chemicals and the like and a chemical supply apparatus therefor, for example, a chemical application line or wafer cleaning of a coater developer used for applying a resist or thinner to a semiconductor wafer. This is a valve unit with a filter used in the chemical solution supply line of the apparatus, which greatly improves the cleanliness of the chemical solution.

  This kind of chemical supply device is used in various manufacturing processes such as a semiconductor manufacturing process, a liquid crystal substrate manufacturing process, a magnetic disk manufacturing process, or a multilayer wiring board manufacturing process, and a photoresist solution, an alkaline or acid processing solution, It is used to supply various chemicals such as pure water, cleaning liquid, or organic solvent to a use point. For example, there are a resist coating apparatus and a developer supply apparatus used in a photolithography process of a semiconductor device. The resist coating apparatus discharges a predetermined amount of resist liquid to the central portion of the wafer held and rotated by the spin chuck, and this applies a thin resist film to the wafer surface.

  Normally, as shown in FIG. 8, the chemical supply apparatus used in the semiconductor manufacturing process is directed from the tank 1 side (upstream side), which is a chemical supply source, toward the discharge nozzle 8 side (downstream side), which is a chemical outlet. The tank 1, the valve 2, the pump 3, the valve 4, the filter 5, the valve 6, the valve 7, and the nozzle 8 are connected in series in this order. With this configuration, the chemical liquid that has entered the tank 1 is sucked and discharged by the pump 3, and foreign matter is removed by the filter 5. Then, the chemical liquid is supplied to the nozzle 8 by the opening / closing operation of the valve 6 and supplied to the use point. The valve 7 has a suck back function. After the discharge of the chemical liquid is completed, the valve 7 performs a suck back operation to draw the chemical liquid into the nozzle 8 and prevent liquid dripping to the use point.

  Since the chemical solution supplied to the use point requires a very high cleanliness, a high cleanness is also used for pumps, valves and the like interposed in the flow path. In particular, the filter has an important function of filtering particles contained as impurities in a high-purity chemical solution, and thus is indispensable for maintaining high cleanliness of the chemical solution and devices such as valves.

  For example, Patent Document 1 has been proposed regarding the chemical solution supply apparatus having such a configuration. In the chemical liquid supply apparatus configured in the same manner as in FIG. 8, an exhaust passage communicating with an inlet side of a filter is provided, and a predetermined deaeration valve is provided in the exhaust passage so that a pump and each valve are predetermined. This makes it possible to remove bubbles adhering to the filter membrane of the filter.

  On the other hand, as an on-off valve used for the chemical solution supply device, means for improving the cleanliness of the chemical solution by adopting a valve capable of suppressing dust generation when the valve and the valve seat are seated has been proposed. For example, in Patent Document 2, the piston portion of the valve mechanism body includes a second piston portion biased by a second spring and a first piston portion housed in the second piston portion and biased by the first spring. With a double structure, the urging force of the valve seat on the valve seat is divided into the force required for seating and the force required for sealing performance, reducing the impact when the valve collides with the valve seat to a certain extent In addition, there is shown an air operation valve in which generation of particles due to separation of a material structure due to sitting is reduced.

Japanese Patent No. 3890229 Japanese Patent No. 5226059

  However, along with the recent progress in miniaturization of semiconductors, the supply of chemicals needs to be controlled with extremely high precision, and the demand for cleanliness is also increasing. The chemical solution supply is controlled by a stop valve such as a diaphragm valve or a bellows valve. In recent years, the generation of extremely fine particles (about 10 nm) accompanying the opening / closing operation of the valve at this time has become a problem. ing. This is because, in recent semiconductor processes that are becoming more sophisticated, the presence of such a small number of particles greatly affects the yield and reliability of products.

  In this regard, in the configuration of the chemical solution supply apparatus as shown in Patent Document 1, since the valve 6 is downstream of the filter 5 as shown in FIG. It is impossible in principle to be captured and removed by the filter 5. On the other hand, it is possible to provide the filter 5 between the valve 6 and the valve 7. In this case, since the filter 5 is on the downstream side of the valve 6, particles generated by the opening / closing operation of the valve 6 are filtered out. Can be captured.

  However, when the filter 5 is provided on the downstream side of the valve 6, the following problems usually occur. That is, in this configuration, pressure loss in the filter 5 occurs, or bubbles generated on the upstream side of the filter 5 accumulate in the filter 5 so that the discharge behavior of the chemical liquid becomes unstable, and the required level. It becomes impossible to adjust the amount of chemical supply with high accuracy. Further, there arises a problem that dripping occurs after the valve 6 is closed due to the residual pressure in the filter 5 and a connection part between the valve 6 and the filter 5 is complicated, and bubbles are likely to stay in the connection part. Furthermore, since it becomes impossible to apply a high pressure to the filter 5, it takes time for the initial air purge, and the combination of the filter 5 and the valve 6 increases in size and cannot be compactly accommodated in the apparatus.

  Further, even if an on-off valve that suppresses dust generation due to valve seating as shown in Patent Document 2 is used in the chemical liquid supply device, the structure is inevitable that sliding and friction between the valve seat and the valve are inevitable. There is a limit to preventing the generation of particles, which is insufficient. For this reason, it is difficult to achieve an extremely high level of cleanliness required for chemicals in recent years only by using an on-off valve as in the same document. Further, since such a valve has a complicated structure and is expensive, when used, the cost and maintenance performance of the chemical solution supply device also deteriorates. For this reason, the problem that particles are generated by the opening and closing operation of the valve is fundamentally solved by a structure in which particles are reliably captured by a filter downstream of the valve rather than by improving the structure of the valve. Should be.

  Therefore, the present invention has been developed to solve the above-mentioned problems, and its object is to achieve a good pressure response and a compact design by integrating and integrating a valve and a filter. It is to reliably suppress the discharge behavior from becoming unstable due to the bubbles accumulated in the filter.

  In order to achieve the above object, the invention according to claim 1 is characterized in that a filter is housed in a block body having an inlet and an outlet, and the inlet and the primary side of the filter are connected by a primary flow path formed in the block body. In addition, the outlet and the secondary side of the filter are connected by a secondary flow path formed in the block body, and a first valve that opens and closes the primary flow path is mounted on the block body. This is a valve unit with a filter in which an air vent channel communicating with the primary region is formed, the air vent channel is opened and closed, and a second valve having a vent mechanism is mounted on the block body.

  In the second aspect of the invention, the secondary channel has a function of opening and closing the secondary channel, a suck back function, or a function of controlling the supply of the chemical liquid by adjusting the opening and closing of the channel. This is a valve unit with a filter in which the valve is mounted on the block body.

  In the invention according to claim 3, the block body is configured by sealing and fixing the inlet block and the outlet block through a sealing material or a structure having a sealing function, and a tube is connected to the inlet and outlet of the block body. This is a valve unit with a filter provided with an inlet joint and an outlet joint.

  In the invention according to claim 4, the block body is formed with a storage chamber for storing a filter communicating with the primary channel and the secondary channel, and the storage chamber is covered with a casing having a communication portion. It is a valve unit with a filter provided with a filter made of a hollow fiber membrane or a flat membrane.

  According to a fifth aspect of the present invention, the mounting posture of the filter provided in the block body is provided in a vertical direction in which the secondary side of the filter is directed upward or an inclined direction in which the secondary side of the filter is inclined upward, and an air vent channel Is a valve unit with a filter provided at a position where air in the primary region of the filter accumulates.

  The invention according to claim 6 is the valve unit with a filter in which a base body for mounting the block body is attached to the inlet block and the outlet block.

  The invention according to claim 7 is a valve unit with a filter in which a suck back mechanism is mounted on a block body.

  The invention according to claim 8 is a chemical supply apparatus using the valve unit with a filter of the present invention in a semiconductor manufacturing process.

  According to the first aspect of the present invention, the first valve is provided on the primary side of the filter housed in the block body, and the second valve that opens and closes the air vent channel is provided in the primary side region of the filter. Since the first valve and the filter are integrated close to each other, particles generated by opening and closing are reliably captured by the filter, the behavior of the first valve is easily transmitted to the filter, and the discharge behavior is stabilized. Highly clean chemical solution can be supplied, pressure response can be maintained by minimizing dead volume, chemical solution supply can be stabilized, and bubbles generated in the primary side region of the filter can be reliably discharged. In addition to maintaining good pressure responsiveness by integrating the filter, the first valve, and the second valve into a compact size, the existing chemical supply It is possible to easily attached to the location.

  According to the second aspect of the present invention, the secondary side flow path of the filter has a function of adjusting the opening and closing of the flow path to control the supply of the chemical solution, a suck back function, or a function of opening and closing the secondary side flow path. Since the third valve is provided, the initial air purge can be made more efficient and the start-up time of the valve unit can be shortened. In particular, the third valve applies air pressure to the filter by opening and closing, thereby preventing bubbles and microbubbles. It has a function to make discharge more efficient.

  According to the third aspect of the present invention, since the inlet block and the outlet block each having the inlet joint and the outlet joint are integrally configured and integrated, it is possible to eliminate the connection site and minimize the bubble staying location. Therefore, it is suitable for a chemical supply apparatus used in a semiconductor manufacturing process.

  According to the fourth aspect of the present invention, by optimizing the filter volume by integrating the inlet block and the outlet block, the pressure loss of the filter can be minimized, and the block body has a hollow space in the storage chamber. A hollow fiber membrane that can easily store a yarn membrane or a flat membrane and is highly resistant to deformation depending on pressure and has a high degree of integration and volumetric efficiency is particularly suitable.

  According to the invention described in claim 5, the filter is provided in a vertical direction in which the secondary side of the filter is directed upward or in an inclined direction in which the secondary side of the filter is inclined upward, and the air vent channel is provided on the primary side of the filter. By providing at a position where air in the region accumulates, it is possible to reliably discharge bubbles and microbubbles that may stay on the primary side of the filter.

  According to the sixth aspect of the present invention, by attaching the base body to the block body, the integrated valve unit can be attached in parallel to the housing of the chemical solution supply apparatus, etc., and used for a compact semiconductor manufacturing process. A chemical supply apparatus can be provided.

  According to the seventh aspect of the present invention, since the suck back mechanism is mounted on the block body, the chemical solution can be drawn into the filter unit while keeping the valve unit with the filter compact, and the discharge nozzle can be used to the point of use. Prevention of dripping is ensured.

  According to the eighth aspect of the invention, the cleanliness of the chemical solution supplied in the chemical solution supply apparatus used in the semiconductor manufacturing process can be dramatically improved.

It is the perspective view which showed 2nd Embodiment of the valve unit with a filter of this invention. It is a block diagram of the chemical | medical solution supply apparatus of this invention. It is a section explanatory view showing a 1st embodiment of a valve unit with a filter of the present invention. It is sectional explanatory drawing which showed 2nd Embodiment of the valve unit with a filter of this invention. It is sectional explanatory drawing which showed 3rd Embodiment of the valve unit with a filter of this invention. It is sectional explanatory drawing which showed 4th Embodiment of the valve unit with a filter of this invention. FIG. 5 is an enlarged half-sectional view of a C portion in FIG. 4. It is a block diagram of the conventional chemical | medical solution supply apparatus. It is sectional explanatory drawing which showed 5th Embodiment of the valve unit with a filter of this invention. It is sectional explanatory drawing which showed 6th Embodiment of the valve unit with a filter of this invention. It is sectional explanatory drawing which showed 7th Embodiment of the valve unit with a filter of this invention. It is a half-cut sectional view showing another embodiment of the filter of the present invention. (A) shows the block diagram of the Example of this invention, (b), (c) shows the block diagram of a comparative example, respectively. It is the graph which measured the pressure in the Example shown to Fig.13 (a), (a) is a graph of a pressure and wide area time, (b) is the C section enlarged graph of (a). It is the graph which measured the pressure in the comparative example shown in FIG.13 (b), (a) is a graph of a pressure and wide area time, (b) is the C section enlarged graph of (a). It is the graph which measured the pressure in the comparative example shown in FIG.13 (c), (a) is a graph of a pressure and wide area time, (b) is the C section enlarged graph of (a).

  DESCRIPTION OF EMBODIMENTS Embodiments of a valve unit with a filter and a chemical solution supply apparatus according to the present invention will be described below in detail based on the drawings.

  FIG. 1: has shown the external appearance perspective view of the valve unit with a filter of 2nd Embodiment of this invention. The block body 11 accommodates the filter 12 therein, is provided with an inlet joint 13 and an outlet joint 14 for connecting a tube (not shown), and is equipped with a first valve 15 and a second valve 16. Is integrated with a compact outer shape.

  FIG. 2 shows a block diagram of the chemical liquid supply apparatus 17 of the present invention. Reference numeral 18 denotes a tank in which the chemical liquid 19 is stored, and 20 denotes a pump. The pump 20 is a pump that sucks and discharges the chemical solution in the flow path and supplies the chemical solution to the use point. For example, a bellows type pump is used. Reference numeral 21 indicated by a one-dot chain line indicates a valve unit with a filter according to the present invention, 15 indicates a first valve, 12 indicates a filter, and 16 indicates a second valve. As will be described later, when the valve unit with a filter of the present invention is the second embodiment, it further includes a third valve 22. Reference numeral 23 denotes a discharge nozzle, 24 denotes a semiconductor wafer, and 25 denotes a turntable. Examples of the chemical solution supply device 17 of the present invention include a coater developer chemical solution supply device in a semiconductor manufacturing process and a wafer cleaning device chemical solution supply device. The chemical solution 19 includes, for example, a resist, a thinner, a developer, and a cleaning solution. However, it is not particularly limited as long as it is a chemical supply device that requires a predetermined level of high cleanliness and high precision chemical supply.

  FIG. 3 is a cross-sectional view showing a first embodiment of a valve unit with a filter according to the present invention. The upward direction in the figure is the vertical upward direction. As shown in the figure, in the present embodiment, the block body 11 is configured by sealingly fixing an inlet block 26 and an outlet block 27 via a sealing material 28. Moreover, the structure part which has a sealing function is not restricted to the above-mentioned sealing material 28, For example, the case where it seals and fixes without using sealing materials, such as caulking, welding, and welding, is included.

  The block body has only a flow path engraved inside the body constituting the block body as a flow path of the fluid, and a plurality of blocks are connected to each other through a joint or the like. What is integrated so as to communicate with each other is also one block body.

  The inlet block 26 is formed from a material having high chemical resistance and low elution, such as HDPE, PTFE, PFA, and PVDF, and has a rectangular parallelepiped or cylindrical compact outer shape as shown in FIG. . Further, as shown in FIG. 3, the primary flow path 30 a is engraved in an L shape from the inlet 29 and communicates with the valve chamber 31. The valve chamber 31 communicates with the primary side of the filter 12 via the primary side flow path 30b. For this reason, the inlet 29 and the primary side of the filter 12 are connected by the primary flow path 30 formed in the block body 11.

  Similarly to the inlet block 26, the outlet block 27 is formed from a material having high chemical resistance and low elution, such as HDPE, PTFE, PFA, PVDF, etc. As shown in FIG. It has a compact outer shape. Further, as shown in FIG. 3, the secondary flow path 35 is engraved linearly from the outlet 36 and communicates with the secondary side of the filter 12. For this reason, the outlet 36 and the secondary side of the filter 12 are connected by the secondary flow path 35 formed in the block body 11.

  As shown in FIG. 3, the inlet block 26 is formed with a storage portion 32 that communicates with the primary side flow path 30, and the outlet block 27 is also formed with a storage portion 33 that communicates with the secondary side flow path 35. Has been. The storage portion 32 and the storage portion 33 are shaped to match the outer shape of the filter 12 to be stored. In the present embodiment, the storage portion 32 and the storage portion 33 have a cylindrical shape, and the storage portion 32 stores the primary side of the filter 12. Contains the secondary side of the filter 12.

  In the present embodiment, the storage chamber 34 a for storing the filter includes a storage portion 32 that communicates with the primary-side flow path 30 and a storage portion 33 that communicates with the secondary-side flow path 35.

  The inlet 29 is provided with an inlet joint 13 for connecting a tube (not shown) having chemical resistance (made of PFA or the like). The inlet joint 13 has a union nut made of PFA or the like, a sleeve, and a gauge ring made of ETFE or the like. After inserting the tube to a predetermined depth between the union nut and the sleeve, the union nut is By tightening, the tube is connected and fixed to the inlet joint 13 in a liquid-tight manner. The outlet 36 is also provided with the outlet joint 14 having the same structure as that of the inlet joint 13. The inlet joint 13 and the outlet joint 14 are not limited to joints that connect resin tubes, but may be joint members that can appropriately connect flow path members such as pipes.

  The first valve 15 is mounted on the block body 11 (inlet block 26) in order to open and close the primary flow path 30. The first valve 15 of the present embodiment is a diaphragm stop valve provided with a pneumatic actuator. As shown in FIG. 3, a body 37 made of PPS having an air supply port 37a for operation and an upper portion thereof are provided. The actuator portion 38 is connected to the inside thereof, and a stem 40 biased by a spring 39 is provided therein, and a diaphragm 41 made of PTFE or the like is connected to the distal end portion of the stem 40 by screwing or the like. . The diaphragm 41 is a valve body that has a movable film portion inside and is seated on the valve seat in the valve chamber 31 to open and close the primary flow path 30, and an outer peripheral portion between the inlet block 26 and the body 37. It is fixed tightly. The stroke of the stem 40 can be adjusted by the flow rate adjustment handle 42.

  The first valve 15 is closed when the spring 39 urges the stem 40 and the diaphragm 41 at the tip is seated, and the air is supplied to the air supply port 37a, so that the air pressure in the air chamber is reduced. To open the diaphragm 41 by lifting the diaphragm 41 from the valve seat. Such opening / closing operation of the first valve 15 can be automatically controlled by a control device (not shown).

  The first valve 15 is not particularly limited as long as it is a stop valve that has high chemical resistance and low elution, and generates little dust due to opening and closing operations. For example, the first valve 15 may be a bellows valve in addition to the above configuration. Further, a solenoid valve that is actuated by an electric signal may be used. Moreover, the presence or absence of the flow rate adjusting mechanism is not particularly limited.

  The base body 43 a is attached to the opposite side of the inlet block 26 with respect to the body 37 of the first valve 15. The base body 43a is molded from PP or PPS and is fastened and fixed by four long bolts 44 that pass through the body 37, the inlet block 26, and the base body 43a as shown in FIGS. The base body 43a is appropriately selected in a shape that serves as a base when the entrance block 26 is placed on an external object.

  The outlet block 27 is formed with an air vent channel 46 a communicating with the primary region 45 of the filter 12. The air vent channel 46 a communicates with the valve chamber 47, and the valve chamber 47 communicates with a straight air vent channel 46 b opened to the outside through an air vent port 48. The air vent channel 46 a and the air vent channel 46 b constitute an air vent channel 46 that communicates the outside of the block body 11 with the primary region 45 of the filter 12.

  A second valve 16 that opens and closes the air vent channel 46 and has a vent mechanism is mounted on the block body 11 (exit block 27). The second valve 16 of the present embodiment is a diaphragm vent valve provided with a pneumatic actuator. As shown in FIG. 3, a body 49 having an air supply port 49a for operation and a spring inside the body 49 are provided. 50 has a stem 51 biased by 50 and a diaphragm 52 connected to the tip of the stem 51 by screwing or the like. A holding body 53 is tightly fixed between the body 49 and the outlet block 27. The diaphragm 52 is a valve body that has a movable film portion on its inner side and seats on a valve seat in the valve chamber 47 to open and close the air vent channel 46, and its outer peripheral portion is formed by the outlet block 27 and the holding body 53. It is fixed tightly between them.

  The second valve 16 is a normally closed type, and is closed when the spring 50 urges the stem 51 and the diaphragm 52 at the front end is seated, and the air is supplied to the air supply port 49a, whereby the air chamber is opened. Is opened by pressing the stem 51 and lifting the diaphragm 52 from the valve seat. The opening / closing operation of the second valve 16 can be automatically controlled by a control device (not shown).

  The second valve 16 is also not particularly limited as long as it is a stop valve that has high chemical resistance and low elution, has a vent mechanism, and generates little dust due to opening and closing operations. For example, in addition to the above configuration, a bellows valve Etc. Further, a solenoid valve that is actuated by an electric signal may be used. As shown in FIG. 1, the body 49 of the second valve 16 is fastened and fixed to the outlet block 27 with four bolts 54. Further, as shown in FIGS. 1 and 3, the base body 43 b is appropriately attached to the outlet block 27 as well as the inlet block 26.

  As shown in FIG. 3, the seal material 28 is a seal member that tightly fixes the inlet block 26 and the outlet block 27. In this embodiment, a ring-shaped gasket made of PTFE is used, and as shown in FIG. 7 to be described later, the outlet block 27 protrudes on the inner peripheral side of the annular portion 55 recessed in the inlet block 26. In a state in which the annular portion 56 is fitted, the space between the inner peripheral surface portion of the annular portion 55 and the outer peripheral surface portion of the annular portion 56 is liquid-tightly sealed. The close contact between the inlet block 26 and the outlet block 27 is not shown, but is fixed by tightening and fixing four bolts that pass through both of them. Although not shown, the inlet block 26 and the outlet block 27 may be tightly fixed by a structural portion having a sealing function that does not use a sealing material, such as caulking, welding, or welding.

  As shown in FIG. 3, the filter 12 of this embodiment is stored in a storage chamber 34 a inside the block body 11. Further, the primary side of the filter 12 communicates with the primary side flow path 30 and the secondary side communicates with the secondary side flow path 35, respectively, and as shown in FIG. An air vent channel 46 communicates with the air vent channel 46.

  As shown in FIG. 3, the filter 12 of this embodiment is a filter comprising a hollow fiber membrane 58 covered with a casing 57 in which a large number of communication portions 57a are arranged in parallel. The casing 57 is formed in a cylindrical shape whose both ends are open, and as shown in FIG. 7 described later, one end 57b is fitted in a mounting portion 33a provided on the bottom side surface portion of the storage portion 33 of the outlet block 27. It is fixed.

  The end surface 57e of the one end portion 57b is in close contact with the bottom surface portion 33c of the storage portion 33 to seal the end surface. The close contact of the end face seal can be strengthened by retightening the bolts that fasten and fix the inlet block 26 and the outlet block 27. In this way, the primary side and the secondary side of the filter 12 in the storage chamber 34 are liquid-tightly separated by the end face seal that does not use a sealing material such as an O-ring, so that fine particles due to wear or deterioration of the sealing material. No leakage or elution.

  A hollow fiber membrane 58 is fixed to the opening 57 d of the casing 57. The hollow fiber membrane 58 includes a hollow fiber membrane unit 58a in which a number of hollow fibers are bent in a U shape and knitted into a bundle, and the open state of both end portions of the hollow fiber is maintained, and the both end portions are open portions 57d. And a potting portion 58b serving as a fixed end fixed by casting. The potting portion 58b is formed by filling a potting material inside the opening portion 57d and curing, and the hollow fiber membrane 58 is fixed to the opening portion 57d so that both ends of the hollow fiber open to the secondary side. ing.

  Here, the filter used in the semiconductor manufacturing process has high chemical resistance and low elution, as well as high filtration accuracy, that is, a small filter pore diameter, and high flow rate, that is, low pressure loss. Is required. Therefore, a filter made of fluororesin, polyolefin, nylon or the like is used. In addition, a filter having a filtration accuracy of 0.2 μm or less, preferably 0.1 μm or less is used depending on the requirement of cleanliness for the chemical solution. Due to recent advances in semiconductor miniaturization, the demand for cleanliness of chemicals used is increasing, and it is more preferable to use a filter having extremely high filtration accuracy such as 10 nm or 5 nm for the filter 12 of the present invention. . Moreover, if it is such a filter, the filter of this invention can be suitably selected according to use, for example, the filter 12 of this invention is a hollow fiber membrane type or a flat membrane pleat type (flat membrane cartridge) etc. A hollow fiber membrane type having a high degree of integration and volumetric efficiency without using a support such as a support and a core is more preferable.

  Here, the volume of the filter 12 is determined by a trade-off with the pressure loss accompanying the installation of the filter 12. When the volume of the filter 12 is large, not only the pressure loss is reduced, but also the pressure responsiveness when the first valve 15 is opened and closed is improved, and when the first valve 15 is closed, the fluid supply stops instantaneously. Liquid dripping at the discharge nozzle connected via the pipe or tube is prevented. Also, when the flow path connecting the first valve 15 and the filter 12 is short, the pressure responsiveness when the first valve 15 is opened and closed is improved, and the fluid is fed when the first valve 15 is closed. Stops instantly and prevents dripping at the discharge nozzle.

  Accordingly, the flow path (primary side flow path 30b) connecting the first valve 15 and the filter 12 is preferably as short as possible, and the volume of the storage chamber 34 for storing the filter 12 is preferably as small as possible. Further, the filter 12 may be divided into a plurality of pieces and stored from the viewpoint of effectively utilizing the capacity of the storage chamber 34.

  As described above, in the valve unit with a filter according to the present invention, the inlet 29 of the block body 11 and the primary side of the filter 12 are connected by the primary channel 30 and the primary channel 30 is opened and closed. Since the valve 15 is mounted on the block body 11, particles generated with the opening / closing operation of the first valve 15 can be captured by the filter 12 with high accuracy and reliability. In addition, the second valve 16 that opens and closes the air vent channel 46 communicating with the primary channel 30 can reliably discharge bubbles, microbubbles, and the like remaining on the primary side of the filter 12 to the outside.

  Further, in the valve unit with a filter of the present invention, the storage chamber 34 is provided inside the block body 11, the filter 12 is stored in the storage chamber 34, and the primary side flow path 30 and the secondary side flow communicating with the storage chamber 34 are provided. Since the path 35 is formed in the block body 11, the filter 12, the first valve 15, and the second valve 16 are integrated in one block body 11 in a compact manner. As described above, the filter and the valve are integrally integrated (unitized) (particularly, the distance between the first valve 15 and the filter 12 is reduced), thereby reducing the dead volume in the flow path volume. The pressure responsiveness can be remarkably improved. Further, since the structure of the connection portion between the filter and the valve is simplified, the bubbles staying at the connection portion are remarkably reduced, and thereby the pressure response is particularly improved. Furthermore, since the volume (configuration) of the filter 12 is also made compact, the pressure loss in the filter 12 is significantly reduced. Further, the whole is compact and can be easily attached to and detached from an existing chemical solution supply apparatus, and the enlargement of the apparatus is avoided, and the handling and maintenance of the apparatus are greatly improved.

  Therefore, it is possible to reliably remove a small amount of particles due to the opening and closing operation of the valve and maintain the chemical liquid cleanliness extremely high, and to supply the chemical liquid with high accuracy and stability without destabilizing the discharge behavior.

  Next, a second embodiment of the present invention will be described. FIG. 4 is a cross-sectional view showing a second embodiment of the valve unit with a filter according to the present invention. The upper part of the figure is the vertically upward direction. In the present embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the second embodiment shown in FIG. 4, the block body 11 (exit block 27a) has a function of opening / closing the secondary flow paths 35a, 35b, a suck back function, or adjusting the opening / closing of the flow paths to adjust the chemical solution. The point which mounted the 3rd valve | bulb 22 which has the function to adjust supply differs from 1st Embodiment. Reference numeral 34b denotes a storage chamber according to the present embodiment that includes a storage portion 32 and a storage portion 33 '.

  As shown in FIG. 4, in the secondary side flow path 35 of the present embodiment, the secondary side flow path 35 a is engraved in an L shape from the secondary side of the filter 12 and communicates with the valve chamber 59. The valve chamber 59 communicates with the outlet 36a through the secondary side flow path 35b. A third valve 22 is mounted in the valve chamber 59.

  The third valve 22 includes a body 60 having an air supply port 60a for operation, a stem 62 biased by a spring 61, and a diaphragm 63 connected to the tip end portion of the stem 62 by screwing or the like. And have. A holding body 64 is tightly fixed between the body 60 and the outlet block 27. The diaphragm 63 is a valve body that has a movable film portion inside and seats on the valve seat in the valve chamber 59 to open and close the secondary side flow paths 35a and 35b. The outer peripheral portion of the diaphragm 63 has an outlet block 27a and a holding body. Narrowly fixed to 64.

  The third valve 22 is a normally open type, and the spring 61 urges the stem 62 to lift the diaphragm 63 at the tip from the valve seat, thereby opening the valve and supplying air to the air supply port 60a. The air pressure in the air chamber presses the stem 62 and seats the diaphragm 63 to close the valve. Such an opening / closing operation of the third valve 22 can be automatically controlled by a control device (not shown).

  The third valve 22 is not particularly limited as long as it is a stop valve that has high chemical resistance and low elution, and generates little dust accompanying opening and closing operations. For example, the third valve 22 may be a bellows valve in addition to the above configuration. Further, a solenoid valve that is actuated by an electric signal may be used. As with the second valve 16, the body 60 is fastened and fixed to the outlet block 27 with four bolts.

  Here, FIG. 7 is an enlarged half-sectional view of a principal part showing a circle C of a two-dot chain line in FIG. As shown in the figure, an air vent channel 65 a is opened in the primary region 45 of the filter 12, and the air vent channel 65 a communicates with the valve chamber 66 of the second valve 16. Is communicated with a straight air vent channel 65 b opened to the outside through an air vent 67.

  Further, as shown in FIG. 7, convex portions 28 a and 28 b having appropriate positions and shapes are provided on the inner diameter portion and the outer diameter portion of the ring-shaped gasket 28 (sealing material). The inner peripheral surface portion and the outer peripheral surface portion of the annular portion 56a are in close contact with each other, and the sealing performance between the inlet block 26 and the outlet block 27a is enhanced. Further, the outer peripheral surface portion of the one end portion 57b of the casing 57 is provided with a convex portion 57c having an appropriate position and shape, and is in close contact with the inner peripheral surface portion of the mounting portion 33b of the outlet block 27a, thereby strengthening the fitting and fixing of the casing 57. ing. Further, the end surface 57e of the one end portion 57b is in close contact with the bottom surface portion 33d of the storage portion 33 'to seal the end surface, thereby separating the primary side and the secondary side in a liquid-tight manner. The structure shown in the figure is the same in other embodiments.

  Next, a third embodiment and a fourth embodiment of the present invention will be described. FIG. 5 is a sectional view showing a third embodiment of the valve unit with a filter of the present invention, and FIG. 6 is a sectional view showing a fourth embodiment of the valve unit with a filter of the present invention. The upper direction in FIG. 5 indicates the vertically upward direction. The left direction in FIG. 6 indicates a vertically upward direction. Also in 3rd, 4th embodiment, the same part as 1st Embodiment shows the same code | symbol, and abbreviate | omits the description.

  In 3rd Embodiment of this invention, the attachment attitude | position of the filter 12 provided in the block body 11b is made into the perpendicular direction where the secondary side of the filter 12 faces upwards. Moreover, in 4th Embodiment of this invention, the attachment attitude | position of the filter 12 provided in the block body 11b is made into the inclination direction in which the secondary side of the filter 12 inclines upwards. Further, in both the third and fourth embodiments, the air vent channel 46 is provided above the primary region 45 of the filter 12.

  The pressure responsiveness is also deteriorated by the bubbles staying in the valve unit. Therefore, it is important to remove the bubbles through the second valve 16 and the outlet joint 14. For this reason, the second valve 16 and its air vent port are important. 48 is preferably provided open toward a position where air is likely to accumulate, such as the upper side of the valve unit, and the outlet 36 of the filter 12 is also preferably directed vertically upward.

  As shown in FIG. 5, in the third embodiment of the present invention, the structure of the inlet block 26a is different from that of the first embodiment. In the present embodiment, the first valve 15 and the filter 12 are arranged so as to form a right-angled intersection (elbow type) in which the axis of the filter 12 intersects at approximately 90 °. The air vent 48 of the second valve 16 is also directed upward. Due to this arrangement, the entire inlet block 26a is formed in an L shape. In addition, the flow path 30c that connects the valve chamber 68 of the first valve 15 and the primary side of the filter 12 has a long linear shape in a direction perpendicular to the axis of the filter 12 as compared with the first embodiment. Is formed. Furthermore, base bodies 43a and 43c are attached to the inlet block 26a. In addition, the structure of the first valve 15 mounted on the inlet block 26a, the structure of the outlet block 27, the structure of the second valve 16 mounted on the outlet block 27, and the like are the same as those of the first embodiment. Reference numeral 34 c denotes a storage chamber according to the present embodiment including the storage portion 32 ′ and the storage portion 33.

  As shown in FIG. 6, in the fourth embodiment of the present invention, the structures of the inlet block 26b and the outlet block 27b are different from those of the first embodiment. In the present embodiment, the first valve 15 and the filter 12 are arranged so as to form an obliquely intersecting type in which the axis of the filter 12 intersects at approximately 60 °. For this reason, the secondary flow path 35c is directed to the outlet 36b. Are inclined obliquely upward by approximately 30 ° with respect to the primary flow path 30d oriented in the horizontal direction. Further, the air vent 69 of the second valve 16 is also directed obliquely upward. In addition, the flow path 30e that connects the valve chamber 70 of the first valve 15 and the primary side of the filter 12 is slightly longer in the direction that obliquely intersects the axis of the filter 12 as compared to the first embodiment. It is formed in a straight line. Further, the outlet block 27b is provided with a leg portion 71, and a base body 43d is attached to the leg portion 71. In addition, the structure of the first valve 15 mounted on the inlet block 26b and the structure of the second valve 16 mounted on the outlet block 27b are the same as the structure of the first embodiment. Reference numeral 34d denotes a storage chamber according to the present embodiment that includes a storage portion 32 ″ and a storage portion 33 ″.

  Then, the effect | action of the valve unit with a filter and chemical | medical solution supply apparatus of this invention is demonstrated. First, the valve unit with a filter according to the first embodiment of the present invention shown in FIG. 3, the third embodiment of the present invention shown in FIG. 5, and the fourth embodiment of the present invention shown in FIG. Explain the case. In the block diagram of the chemical solution supply apparatus shown in FIG. 2, the first embodiment, the third embodiment, and the fourth embodiment correspond to the case where the third valve 22 is not provided.

  When the valve unit with a filter of the present invention is attached to the chemical solution supply apparatus, an air purge operation for discharging bubbles in the valve unit and the filter 12 is required. If this air purge operation is insufficient and bubbles remain in the valve unit, the pressure responsiveness deteriorates, which is an important operation.

  The procedure of the air purge operation is as follows. First, a tube is connected to the inlet joint 13, the first valve 15 is closed, the second valve 16 is opened, the chemical solution is introduced, and the chemical solution is sealed by the first valve 15 (primary The side channel 30 is filled with a chemical solution). Next, the first valve 15 is opened, and the chemical liquid is caused to flow into the storage portion 32 of the inlet block 26 through the primary side flow path 30. At this time, the chemical solution is filled in the storage chamber 34 so that the bubbles in the storage chamber 34 (34a, 34c, 34d) are expelled to the second valve 16. After the bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. After the second valve 16 is closed, a normal operation is possible, and the chemical liquid filtered by the filter 12 can be supplied via the outlet joint 14. When stopping the liquid feeding, the first valve 15 is closed.

  In addition, bubbles generated on the upstream side of the flow path may be mixed into the valve unit, or gas dissolved in the chemical solution may be generated as bubbles due to a pressure change caused by opening / closing the first valve 15. In such a case, an air purge operation is required even during normal operation. Alternatively, the air purge operation may be performed every time the discharge behavior of the chemical liquid becomes unstable. Further, the air purge operation may be performed periodically according to, for example, the number of times the first valve 15 is opened and closed. When performing regularly, although not shown in figure, the pressure gauge which can measure the pressure in the storage chamber 34 of the filter 12 is provided suitably, and the pressure in the storage chamber 34 is always monitored, so that an efficient and accurate timing can be obtained. The air purge operation can be performed.

  The procedure of the air purge operation during normal operation is the same as that described above. First, the first valve 15 is closed and the second valve 16 is opened. Next, the first valve 15 is opened, and the bubbles in the storage chamber 34 are expelled to the second valve 16. When it is confirmed that bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. After the second valve 16 is closed, it can be operated (chemical solution can be supplied).

  Here, an operation in which the first valve 15 is opened with the second valve 16 opened, and the bubbles in the storage chamber 34 are expelled to the second valve 16 will be described. As shown in FIGS. 3, 5, and 6, the secondary side of the filter 12 is stored so as to face in the vertically upward direction (or the inclined upward direction), so that the storage chamber 34 of the filter 12 also has a primary flow path. The secondary side having the secondary flow path 35 is accommodated in a higher position in the vertical direction than the primary side having 30. Further, as shown in FIG. 7, the air vent channel 46 formed in the storage portion 33 of the outlet block 27 has a position where the air is easily collected in the primary region 45 of the storage chamber 34, that is, the highest position (mounting portion). 33a and 33b are located near the position). On the other hand, when the chemical liquid is caused to flow into the storage chamber 34, the bubbles contained in the chemical liquid are likely to collect and accumulate near the highest position in the primary region 45 of the storage chamber 34 due to buoyancy. Therefore, since the bubbles in the chemical solution are gathered toward the air vent channel 46 opened near the highest position so that the bubbles are effectively expelled, the bubble discharge efficiency by the second valve 16 is remarkably increased.

  Next, the case where the valve unit with a filter according to the second embodiment of the present invention shown in FIG. 4 is used in a chemical solution supply apparatus will be described. In the block diagram of the chemical solution supply apparatus shown in FIG. 2, the second embodiment corresponds to the case where the third valve 22 is provided as shown.

  First, the procedure of the air purge operation when attaching to the chemical solution supply apparatus will be described. First, a tube is connected to the inlet joint 13, the first valve 15 and the third valve 22 are closed, the second valve 16 is opened, the chemical solution is introduced, and the chemical solution is sealed by the first valve 15. Next, the first valve 15 is opened, and the chemical liquid is caused to flow into the storage chamber 34 of the inlet block 26 through the primary side flow path 30. At this time, the chemical solution is filled in the storage chamber 34 so that the bubbles in the storage chamber 34 (34 b) are expelled to the second valve 16. After the bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. When the third valve 22 is opened after the second valve 16 is closed, a normal operation is possible, and the chemical liquid filtered by the filter 12 can be supplied via the outlet joint 14. When stopping the liquid feeding, the first valve 15 is closed.

  The procedure of the air purge operation during normal operation is the same as that described above. First, the first valve 15 and the third valve 22 are closed, and the second valve 16 is opened. Next, the first valve 15 is opened, and the bubbles in the storage chamber 34 are expelled to the second valve 16. When it is confirmed that bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. When the second valve 16 is closed and then the third valve 22 is opened, the operation becomes possible (chemical solution can be supplied).

  The third valve 22 has a function of opening and closing the secondary side flow path 35, a suck back function of the secondary side flow path 35, and a function of controlling the supply of the chemical liquid by adjusting the opening and closing of the secondary side flow path 35. You may have. In the suck back operation, the first valve 15 is closed to stop the liquid feeding to the nozzle 23, and the air is discharged from the air chamber of the third valve 22 before the chemical solution is dropped from the nozzle 23 in accordance with the timing of this stop. Then, the stem 62 is raised, a negative pressure is applied to the secondary side flow path 35, and the chemical solution remaining in the secondary side flow path 35 is sucked to the flow path side. Further, by finely adjusting the distance (valve opening) of the diaphragm 63 of the third valve 22 from the valve seat, the supply of the chemical solution can be controlled by adjusting the opening and closing of the secondary side flow path 35.

  Subsequently, a fifth embodiment of the present invention will be described. FIG. 9 is a sectional view showing the filter-equipped valve unit of this example. The upper part of the figure is the vertically upward direction. In FIG. 9, the same parts as those of the second embodiment of the present invention shown in FIG.

  In this example, in the second embodiment, the secondary flow path 35 (35a, 35b) is a linear flow path 72, and a suck back valve 93 is mounted on the secondary flow path 72 as the third valve 22. The difference is that the outlet block 27c is used. Further, the annular convex portion 73 formed on the end surface of the outlet block 27c and the annular concave portion 74 formed on the end surface of the inlet block 26 are fitted and closely fitted without using a sealing material, Another difference is that the end face of the outlet block 27c is sealed in a liquid-tight manner.

  9 to 11, a suck back valve 93 is a diaphragm valve provided with a pneumatic actuator. A cover 95 is attached to a body 94, and a cover 95 and a piston 97 are connected via a port 96 for supplying and discharging air. Air can communicate with the air chamber provided between the two. A diaphragm 99 serving as a valve body is provided at the tip of the piston rod of the piston 97. The diaphragm 99 has an outer diameter side through a guide member or the like, and a mounting member (block body 11 or the like) for the body 94 and the suck back valve 93. The pressure receiving surface 99a is provided on the inner diameter side to be exposed to the fluid inside the storage chamber 34 and the secondary flow path 72 or 75 of the filter 12 to define the flow volume. Yes.

  9 to 11, the spring 98 is provided between the body 94 and the piston 97, and pushes up and urges the piston 97. When air is supplied from the port 96, the air pressure in the air chamber increases, and when this air pressure exceeds the spring force of the spring 98, the piston 97 is pushed down, and the pressure receiving surface 99a of the diaphragm 99 is linked with this depression. The volume of the flow path (the storage chamber 34 or the secondary flow path 72 or 75) is reduced by entering (lowering) inward of the flow path, and the flow path interior is increased according to the decrease in the flow path volume. Pressed. On the other hand, when the air is discharged from the port 96, the piston 97 is pushed up by the spring force of the spring 98, and the pressure receiving surface 99a of the diaphragm 99 is retracted (raised) outward from the flow path in conjunction with this push-up. The volume of the storage chamber 34 or the secondary side flow path 72 or 75 is increased. The inside of the flow path is depressurized in accordance with the increase in the flow path volume, and by this depressurization, the fluid can be pulled back to the inside of the chemical liquid supply device (inside the flow path). Can be prevented. Further, the amount of suck back can be adjusted by adjusting the retraction amount of the pressure receiving surface 99a.

  Next, sixth and seventh embodiments of the present invention will be described. FIG. 10 is a sectional view showing a sixth embodiment of the valve unit with a filter according to the present invention, and FIG. 11 is a sectional view showing the seventh embodiment. 10 and 11 indicate the vertically upward direction. 10 and 11, the same parts as those of the second embodiment of the present invention shown in FIG. In these sixth and seventh embodiments, a suck back mechanism is mounted (integrated integrated) on the block body. The suck back mechanism in this example is a suck back valve 93.

  FIG. 10 is a cross-sectional view showing a valve unit with a filter according to a sixth embodiment of the present invention. In this second embodiment, in this second embodiment, the flow path 35b on the discharge nozzle 23 side of the secondary side flow path 35 is further defined as a flow path 75 that extends straight to the nozzle side. Aside from the three valves 22, the suck back valve 93 is mounted (integrated and integrated) so as to be adjacent to each other to form an outlet block 27d. Further, the annular convex portion 76 formed on the end face of the outlet block 27d and the annular concave portion 77 formed on the end face of the inlet block 26 are fitted and closely fitted without using a sealing material, and the end face of the inlet block 26 is Another difference is that the end face of the outlet block 27d is liquid-tightly sealed.

  FIG. 11 is a cross-sectional view showing a valve unit with a filter according to a seventh embodiment of the present invention. This example is different from the second embodiment in that the suck-back valve 93 is directly mounted (integrated integrated) on the side surface of the inlet block 26c. Further, the annular convex portion 78 formed on the end face of the outlet block 27a and the annular concave portion 79 formed on the end face of the inlet block 26c are fitted and closely fitted without using a sealing material, and the end face of the inlet block 26c is Another difference is that the end face of the outlet block 27a is liquid-tightly sealed.

  As described above, in the present example (sixth and seventh embodiments), the suck back valve 93 is mounted so as to be integrated integrally with the block body 11 (the inlet block 26 and the outlet block 27). Specifically, the body of the valve constituting each mechanism is directly attached to the block body without intermediating another member such as a pipe or a joint, and the internal spaces are connected so as to communicate with each other. 10 and 11, the body 94 of the suck back valve 93 and the outlet block 27d or the inlet block 26c are directly attached via a sealing material or the like, respectively. As described above, the suck back valve 93 and the block body are made compact by integrating them together, so that the usability of the valve unit can be increased and the dead volume can be minimized and the suck back function can be efficiently exhibited.

  FIG. 12 is a half sectional view showing a more preferable example of the filter of the present invention. The filter 80 in the figure is a hollow fiber membrane filter covered with a casing 82 having a communication portion 81 as in the filter 12 described above. The casing 82 is formed in a cylindrical shape with both ends open, and one end 83 is The outlet block 27 can be fitted and fixed to the mounting portion 33 provided on the bottom side surface portion of the storage chamber. Therefore, instead of the above-described filter 12, the filter 80 can be used by being appropriately attached to the filter unit of the present invention. A hollow fiber membrane 84 is fixed to the one end 83. The hollow fiber membrane 84 has a hollow fiber membrane unit 84a in which a large number of hollow fibers are bent into a U shape and knitted into a bundle, and the open state of both ends of the hollow fiber is maintained, and the both ends are connected to one end 83. A potting portion 84b that is a fixed end that is cast and fixed to the inner region.

  In FIG. 12, the filter 80 is formed such that the side surface portion of the round hole-shaped communication portion 81 is formed in a tapered shape whose diameter decreases from the outside to the inside of the filter 80, and the outer peripheral surface of the casing 82 is the same. The filter 12 is different from the filter 12 described above in that it is formed in a stepped surface shape via a stepped portion 85 inside a predetermined length from both left and right ends of the figure. Although not shown, when the filter 80 is built in the storage chamber 34 of the block body 11, the outer diameter of the casing 82 is reduced by the depth of the stepped portion 85, so that there is a clearance between the filter and the peripheral surface of the storage chamber. This clearance and the taper shape of the communication part 81 that spreads from the inside to the outside of the casing 82 ensure the passage of bubbles, and in particular, bubbles that are retained and adhering to the yarn of the hollow fiber membrane unit 84a Can be effectively driven out of the casing 82.

  The liquid level behavior at the tip of the discharge nozzle 23 changes due to slight contraction and relaxation of the hollow fiber membranes of the built-in filters 12 and 80. That is, when the chemical solution is discharged, the hollow fiber membrane is slightly contracted by the pressure applied to the filters 12 and 80, while when the supply of the chemical solution is stopped, the pressure is released, so that the hollow fiber membrane is slightly relaxed and discharged. A phenomenon occurs in which the chemical liquid held at the tip of the nozzle 23 is slightly pulled. By utilizing this phenomenon, it is also possible to prevent liquid dripping from the tip of the discharge nozzle 23.

  Subsequently, the operation of the fifth to seventh embodiments will be described. First, the case where the valve unit with a filter according to the fifth embodiment of the present invention shown in FIG. 9 is used in a chemical solution supply device will be described.

  In the air purge operation when attaching to the chemical solution supply apparatus in this example, first, a tube is connected to the inlet joint 13, the first valve 15 is closed, the chemical solution is introduced, the valve body of the suck back valve 93 is lowered, and the second The valve 16 is opened and the chemical solution is sealed with the first valve 15. Next, the first valve 15 is opened, and the chemical solution is caused to flow into the storage chamber 34 of the inlet block 26 through the primary side flow path 30. At this time, the chemical solution is filled in the storage chamber 34 so that the bubbles in the storage chamber 34 (34 b) are expelled to the second valve 16. After confirming that bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. After closing the second valve 16, when the valve body of the suck back valve 93 is raised and returned to the neutral position, the normal operation is possible, and the chemical liquid filtered by the filter 12 can be supplied through the outlet joint 14. It becomes. When stopping the liquid feeding, the first valve 15 is closed.

  In the normal operation of the chemical solution supply apparatus of this example, first, the valve body of the suck back valve 93 is lowered to return to the neutral position, and the chemical solution is lowered to the nozzle surface of the discharge nozzle 23. Next, with the second valve 16 closed, the first valve 15 is opened to supply the chemical liquid to the discharge nozzle 23 side. On the other hand, at the time of suck back operation, the first valve 15 is closed to stop the supply of the chemical solution, and then the valve body of the suck back valve 93 is raised to draw the chemical solution to a predetermined nozzle surface.

  In the air purge operation during operation of this example, first, the first valve 15 is closed, the valve body of the suck back valve 93 is lowered, and the second valve 16 is opened. Next, the first valve 15 is opened, and the bubbles in the storage chamber 34 are expelled to the second valve 16. When it is confirmed that the bubbles are no longer discharged from the second valve 16, the second valve 16 is closed. After closing the second valve 16, the valve body of the suck back valve 93 is raised and returned to the neutral position.

  Further, the suck-back valve 93 in this example (fifth embodiment) is configured such that when the bubbles staying in the filter unit (housing chamber 34) are discharged, the valve body descends and the outlet flow path (secondary flow path) of the filter 12 is removed. By narrowing 72), the pressure in the filter unit is kept high, and the discharge of bubbles from the second valve 16 is promoted more efficiently.

  On the other hand, the case where the valve unit with a filter according to the sixth and seventh embodiments of the present invention shown in FIGS. 10 and 11 is used in a chemical liquid supply apparatus will be described. The air purge operation during mounting and the air purge operation during operation are the same as the air purge operations in the second embodiment of the present invention described above, respectively. Further, the operation when the chemical liquid supply apparatus of the present example is normally operated is the same as the operation when the chemical liquid supply apparatus of the fifth embodiment of the present invention is normally operated.

  As described above, in the sixth embodiment of the present invention, since the suck-back valve 93 is additionally provided in the secondary side flow path 75 of the outlet block 27d, the chemical solution remaining in the flow path on the discharge nozzle 23 side is removed. It can be drawn directly into the valve unit, and it is possible to prevent dripping from the discharge nozzle 23 to the use point. In the seventh embodiment of the present invention, the suck back operation of the suck back valve 93 also has a function of releasing the residual pressure in the filter unit. Therefore, even when the volume of the filter 12 is reduced, piping or It is also possible to prevent liquid sag occurring in the discharge nozzle 23 connected via the tube.

  In the present embodiment, the filter primary side and the filter secondary side (filters) according to the difference in distance between the filter and the valve (inlet valve in the upstream stage of the filter) disposed in the immediate vicinity of the primary side of the filter. The quality of the pressure characteristics measured between before and after) was confirmed.

  FIG. 13A is a block diagram of a chemical solution supply apparatus configured similarly to the block diagram of the chemical solution supply apparatus of the present invention shown in FIG. 2, and uses the valve unit 21 with a filter of the present invention. FIGS. 13B and 13C are block diagrams of comparative examples to be compared with the embodiment of the present invention shown in FIG. 13A, and 15 ′ in FIG. 13 is the same as the first valve 15. Shows the valve.

  In the comparative example shown in FIGS. 13B and 13C, the filter unit 100 indicated by a dotted line in FIG. 13B is used. In the filter unit 100, the filter 12 used in the valve unit with filter 21 is stored in a storage chamber formed in the same manner as the storage chamber 34, and the primary side and the secondary side of the filter are also respectively connected to the primary side. The filter unit formed and configured in the same manner as the side channel 30 and the secondary channel 35 is schematically shown.

In FIG. 13, pressure gauges are provided at the primary side nearest position and the secondary side nearest position adjacent to the filter 12 and the filter unit 100, respectively. In the figure, reference sign _PIN denotes a predetermined pressure gauge appropriately provided at a position immediately before the primary side of the filter 12 and filter unit 100, and reference sign P _OUT is also a predetermined pressure gauge provided as appropriate at a position immediately after the secondary side of the filter 12 and filter unit 100. The pressure gauge is shown. Further, the distance L shown in FIGS. 13B and 13C indicates the separation distance between the valve 15 ′ and the filter unit 100, except for the difference in the distance L between the flow paths configured under the same conditions. Length.

As described above, the embodiment of the present invention shown in FIG. 13 (a) and the comparative example shown in FIGS. 13 (b) and 13 (c) are composed of the unit 21 including the filter 12 and the filter unit 100. Since the filter medium, the volume and the internal shape are the same, at least the pressure characteristics before and after the filter are the same, and the valves 15 and 15 ′ and the pressure gauges P _IN and P _OUT have the same configuration. The difference in the pressure characteristics measured between the two is basically different depending only on the difference in the distance between the filter and the valve upstream of the filter. Therefore, in the present embodiment, the pressure characteristic corresponding to the separation distance can be captured.

In Figure 14-16 shows a pressure INLET measured by the pressure gauge _{P IN} by a solid line, along with showing the pressure OUTLET measured by the pressure gauge _{P OUT} by a broken line, simultaneously measuring both the pressure within a predetermined time, INLET And the pressure characteristics of OUTLET are measured. 14A and 14B are graphs obtained by measuring the pressure in the embodiment shown in FIG. 13A, in which FIG. 14A is a graph of pressure and global time, and FIG. 14B is a C section obtained by enlarging time in FIG. FIG. 15A and 15B are graphs obtained by measuring the pressure in the comparative example shown in FIG. 13B, where FIG. 15A is a graph of pressure and global time, and FIG. FIG. 16A and 16B are graphs obtained by measuring the pressure in the comparative example shown in FIG. 13C, where FIG. 16A is a graph of pressure and global time, and FIG. FIG.

  14 (b), 15 (b), and 16 (b), the time from when the behavior of the pressures INLET and OUTLET starts until the fluctuations have settled is indicated by t, and this time t ( The pressure fall time when the valve is closed corresponds to the pressure fluctuation relaxation time associated with the opening of the valves 15 and 15 'which were in the open state.

  First, in FIG. 15B, as shown in FIG. 13B, the separation distance L between the filter unit 100 and the valve 15 'is L = 50 mm. In the case of the figure, the pressures INLET and OUTLET have similar waveforms to some extent and the pressure behavior of both is relatively loose, but the pressure fall time is approximately t = 200 ms. In FIG. 16B, as shown in FIG. 13C, the separation distance L is 1000 mm. In the case of the figure, the pressures INLET and OUTLET are greatly different in waveform, so that the pressure behavior is intense, and the pressure fall time is as large as about t = 200 ms. As in the comparative examples shown in FIGS. 15 and 16, when the pressure fall time t is large, the liquid 19 discharged from the discharge nozzle 23 to the use point runs out of stability and the stability after the liquid runs out.

  In contrast, in FIG. 14B, as shown in FIG. 13A, the separation distance L corresponds to the separation distance between the filter 12 and the first valve 15 in the embodiment of the present invention, For example, it corresponds to the length of the primary flow paths 30b, 30c, 30e. As described above, in the present invention, the block body that stores the filter and the block body that forms the primary flow path are the same block body, and the first valve that opens and closes the primary flow path is also the same block body. Therefore, the distance L is extremely short. In this case, the pressures INLET and OUTLET are somewhat similar in waveform to each other, and therefore the pressure behavior of both is loose. The pressure fall time t is about 100 ms, which is about half that of the above comparative example. Therefore, when the filter 12 and the first valve 15 are integrated and the separation distance L is almost eliminated as in the present invention, the fall time of the pressure when the valve is closed is shortened, and the chemical solution 19 runs out. In addition, it has been demonstrated that the stability after running out of liquid is good.

  Furthermore, the present invention is not limited to the description of the above embodiment, and various modifications can be made without departing from the spirit of the invention described in the claims of the present invention.

11 Block body 12, 80 Filter 13 Inlet joint 14 Outlet joint 15 First valve 16 Second valve 17 Chemical liquid supply device 19 Chemical liquid 21 Valve unit with filter 22 Third valve 26 Inlet block 27 Outlet block 28 Sealing material 29 Inlet 30 Primary side Flow path 34 Storage chamber 35, 75 Secondary flow path 36 Outlet 43 Base body 45 Primary side area 46 Air vent flow path 57, 82 Casing 57a, 81 Communication part 58, 84 Hollow fiber membrane 93 Suck back valve (suck back mechanism )

Claims (8)

  A filter is housed inside a block body having an inlet and an outlet, the inlet and the primary side of the filter are connected by a primary flow path formed in the block body, and the outlet and the secondary side of the filter Is connected to a secondary flow path formed in the block body, and a first valve that opens and closes the primary flow path is mounted on the block body, and the block body includes a primary side region of the filter. A valve unit with a filter, wherein a second valve having a vent mechanism is mounted on the block body so as to form an air vent channel that communicates with the air vent channel.   The block body is equipped with a third valve having a function of opening and closing the secondary flow path, a suck back function, or a function of controlling the supply of the chemical liquid by adjusting the opening and closing of the flow path. The valve unit with a filter according to claim 1.   The block body is configured by sealing and fixing an inlet block and an outlet block through a sealing material or a structure having a sealing function, and an inlet joint and an outlet joint for connecting a tube to the inlet and outlet of the block body The valve unit with a filter according to claim 1 or 2, wherein each is provided.   The block body is formed with a storage chamber for storing a filter communicating with the primary channel and the secondary channel, and a hollow fiber membrane or flat coated with a casing having a communication portion is formed in the storage chamber. The valve unit with a filter according to any one of claims 1 to 3, wherein a filter made of a film is provided.   The mounting posture of the filter provided in the block body is provided in a vertical direction in which the secondary side of the filter is directed upward or in an inclined direction in which the secondary side of the filter is inclined upward, and the air vent channel is provided in the filter The valve unit with a filter according to claim 1, wherein the valve unit is provided at a position where air in the primary side region of the gas accumulates.   The valve unit with a filter according to any one of claims 1 to 5, wherein a base body for mounting the block body is attached to the inlet block and the outlet block.   The valve unit with a filter according to any one of claims 1 to 6, wherein a suck back mechanism is mounted on the block body.   A chemical supply apparatus using the valve unit with a filter according to claim 1 in a semiconductor manufacturing process.

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