JP2017212359A - Filter unit and chemical solution supply device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter unit which ensures high stability of a chemical solution discharge behavior and high supply quantity adjustment accuracy of a chemical solution and further also surely prevents occurrence of liquid sag by suppressing generation of a pressure loss, dead volume and air bubbles or micro bubbles to a minimum while adopting a high clean structure having simple structure and compact design in which a valve and a filter are integrated in one body, providing the filter on a post-stage of the valve and being capable of surely catching/removing even micro particles generated by seating/unseating of the valve through the filter, and a chemical solution supply device.SOLUTION: The present invention relates to a filter unit in which a filter is built in a block body, the block body includes a vent mechanism for discharging air bubbles stagnated at a primary side of the filter and the filter and the vent mechanism are integrated in one body by a flow passage that is provided in the block body.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a filter unit and a chemical solution supply apparatus used for supplying a chemical solution such as high-purity chemicals. For example, a chemical solution application line for a coater developer used for applying a resist or thinner to a semiconductor wafer or a chemical solution supply for a wafer cleaning device. The present invention relates to a filter unit and a chemical solution supply device used in a line.

  This kind of chemical supply device is used in various manufacturing processes such as a semiconductor manufacturing process, a liquid crystal substrate manufacturing process, a magnetic disk manufacturing process, or a multilayer wiring board manufacturing process, and a photoresist solution, an alkaline or acid processing solution, It is used to supply various chemicals such as pure water, cleaning liquid, or organic solvent to a use point. For example, there are a resist coating apparatus and a developer supply apparatus used in a photolithography process of a semiconductor device. For example, a resist coating apparatus discharges a predetermined amount of resist solution to the central portion of a wafer that is held by a spin chuck and rotates, whereby a thin resist film is applied so as to diffuse on the wafer surface.

  FIG. 7 is a block diagram showing an example of the configuration of the chemical solution supply apparatus as described above. In the chemical manufacturing apparatus used in the semiconductor manufacturing process, the chemical supply is usually controlled by a stop valve such as a diaphragm valve or a bellows valve. In FIG. To the downstream discharge nozzle 8 side (use point) that is the chemical solution outlet, the tank 1, the valve 2, the pump 3, the valve 4, the filter 5, the valve 6, the valve 7, and the nozzle 8 are connected in series in this order. With this configuration, the chemical liquid that has entered the tank 1 is sucked and discharged by the pump 3, the foreign matter is removed by the filter 5, and then supplied to the nozzle 8 by the opening / closing operation of the valve 6. Chemical solution is supplied. In addition, since the chemical solution supplied to the use point is required to have a very high cleanliness, a high cleanness is also used for a pump, a valve and the like interposed in the flow path. The valve 7 has a suck back function. After the discharge of the chemical liquid is completed, the valve 7 performs a suck back operation to draw the chemical liquid into the nozzle 8 and prevent liquid dripping to the use point.

  Patent document 1 is proposed as a prior art comprised similarly to the said structure. In the same document (such as FIG. 9), an exhaust passage communicating with the inlet side of the filter is provided, a predetermined deaeration valve is provided in the exhaust passage, and the pump and each valve are interlocked with each other, A chemical solution supply apparatus is shown in which bubbles adhering to a filter membrane of a filter are removed.

  On the other hand, in recent years, with the progress of miniaturization of semiconductors, it has become necessary to control the supply of chemicals with extremely high precision, and the demand for cleanliness has been increasing. Along with this, even fine particles (about 10 nm) generated by the opening and closing operation of the valve in the chemical supply apparatus as described above have become a problem. This is because, in recent semiconductor processes that are becoming more sophisticated, the presence of such a small number of particles greatly affects the yield and reliability of products. For example, when the circuit wiring pitch is required to be as fine as 20 nm or less, particles having a size equal to or larger than this pitch may have a great adverse effect on the formation of circuit patterns. Must be removed.

  Patent Documents 2 to 4 have been proposed as conventional techniques related to the above problems. Patent Document 2 proposes a means for improving the cleanliness of a chemical solution by adopting a valve that can suppress dust generation when the valve and the valve seat are seated as an on-off valve used in the chemical solution supply apparatus. Yes. In this document, the piston portion of the valve mechanism is doubled between a second piston portion biased by a second spring and a first piston portion housed in the second piston portion and biased by the first spring. It is configured, and the urging force of the valve seat to the valve seat is divided into the force required for seating and the force required for sealing performance, so that the impact when the valve collides with the valve seat is mitigated to a certain extent, An air operation valve is shown in which the generation of particles due to the separation of the material structure by sitting is reduced.

  Patent Document 3 proposes a means for suppressing particles generated by contact between a valve element and a valve seat by adopting a valve that is not completely closed even in a closed state as an on-off valve. In this document, a first valve is provided in a subsequent stage (processing liquid supply path) of the filter, and the first valve has a structure in which the valve body and the valve seat do not come into contact with each other even when the piston extends downward. Is described. When stopping the discharge of the processing liquid, the first valve is closed and the second valve is opened, so that a processing liquid of about a slow leak flows from the first valve. It is mentioned that the liquid flows out to the branch pipe side by its own weight, flows to the second valve side, and is thereby recovered to the treatment liquid tank.

  In Patent Document 4, by providing the liquid supply device with an aspirator, it is possible to prevent liquid dripping in the liquid use portion, and to reduce the number of on-off valves and filters, thereby simplifying the device structure and improving the cleanliness of the chemical solution. Has been proposed. In the same document (FIG. 8, etc.), an aspirator is provided in the supply piping section, and this aspirator is connected with the main piping section and the auxiliary piping section on the main flow path side, and the use side piping section on the suction flow path side. The main body portion is formed of various fluororesins, and a narrow pipe portion is provided at a portion where the suction flow path is connected to the main flow passage, and a connection portion between the main flow passage and the suction flow passage on the downstream side of the narrow pipe portion is provided. There is a description that the connection chamber is formed.

  Further, in this document, when the liquid supply is stopped, by opening a valve having an opening / closing function, the liquid that has reached the aspirator flows out to the sub-pipe part through the main flow path and passes through the valve. Since the liquid passes through the narrow pipe portion of the aspirator and passes through the narrow pipe portion of the aspirator, the suction flow passage side is depressurized and the inside of the use side piping portion becomes negative pressure, and the liquid filled up to the nozzle is removed from the aspirator. It is shown to be sucked towards Furthermore, there is a mention that the liquid supply amount adjustment is performed using a flow control valve for a valve having an opening / closing function.

Japanese Patent No. 3890229 Japanese Patent No. 5226059 Japanese Patent Laying-Open No. 2015-177090 Japanese Patent No. 5887089

  However, Patent Document 1 is intended to improve the accuracy of chemical discharge by removing bubbles in a filter using a predetermined degassing valve, and does not remove fine particles generated by opening and closing of the valve. . That is, in the case of a chemical solution supply apparatus as shown in the same document, since the valve 6 is downstream of the filter 5 as shown in FIG. 7, fine particles generated by the opening / closing operation of the valve 6 are captured by the filter 5. It is impossible in principle to remove it. Since the filter cannot capture and remove particles, there is a limit to the cleanliness of the chemicals supplied to the point of use. Therefore, it is difficult to ensure the cleanliness of the extremely high chemicals required in recent years. It becomes.

  Further, even if an on-off valve for suppressing dust generation associated with opening and closing of the valve as shown in Patent Document 2 is used in the chemical solution supply apparatus shown in FIG. However, since this is an inevitable structure, there is a limit to preventing the generation of fine particles due to opening and closing of the valve. For this reason, it is difficult to achieve an extremely high level of cleanliness required for chemicals in recent years only by using an on-off valve as in the same document. Furthermore, since such a valve has a complicated structure and is expensive, when it is used in a chemical solution supply apparatus, it is difficult to adopt it because of its low cost, maintenance and handling.

  In this regard, the on-off valve (first valve) shown in Patent Document 3 is such that the valve element does not contact the valve seat even in the closed state. For example, when the processing liquid discharge is stopped, the on-off valve It is completely unclear as to how close the valve body is, or whether it is certain that all of the processing liquid leaking from the on-off valve will flow to the branch piping side and will not drip from the nozzle, It must be said that at least the reliability of the treatment liquid stopping ability is low. Also, the detailed structure of the on-off valve and the operation of the device are unclear, and such a special valve usually has problems in terms of cost and maintenance. Therefore, it is difficult to adopt as a chemical supply apparatus that requires high cleanliness, high discharge behavior, and the like.

  In addition, the filter plays an important function of physically capturing, separating, and filtering particles contained as impurities in high-purity chemicals. In order to maintain a stable chemical supply while increasing to a level required in recent years, it can be said that this is an indispensable component of the chemical supply apparatus. Therefore, the problem that the particles are generated by the opening / closing operation of the valve is solved by improving the structure of the valve as described above, etc., but the structure in which the particles are reliably captured by the filter on the downstream side of the valve. Must be resolved. By adopting a chemical solution separation / filtration structure with a filter, it is easy and reliable high-cleaning of the chemical solution while avoiding the extra costs associated with improvements and maintenance of parts such as valves and mechanical structures, and the increase in size of the equipment. Or the compactness of the apparatus can be secured.

  On the other hand, in the chemical solution supply apparatus shown in FIG. 7, the filter 5 can be provided between the valve 6 and the valve 7 in order to exclude the valve from the downstream side of the filter 5. In this case, since the filter 5 is on the downstream side of the valve 6, particles generated by the opening / closing operation of the valve 6 can be captured by the filter 5.

  However, when the filter 5 is provided on the downstream side of the valve 6, the following problems usually occur. That is, in this configuration, pressure loss in the filter 5 occurs, or bubbles generated on the upstream side of the filter 5 accumulate in the filter 5 so that the discharge behavior of the chemical liquid becomes unstable, and the required level. It becomes impossible to adjust the amount of chemical supply with high accuracy. In addition, there arises a problem that dripping occurs after the valve 6 is closed due to a residual pressure in the filter 5 or the connection part between the valve 6 and the filter 5 is complicated, and bubbles are likely to stay in the connection part. Furthermore, since it becomes impossible to apply a high pressure to the filter 5, it takes time for the initial air purge, and the combination of the filter 5 and the valve 6 increases in size and cannot be compactly accommodated in the apparatus. Therefore, the above problem cannot be solved by simply changing the arrangement, such as providing the filter 5 on the most downstream side.

  In this regard, in the liquid supply device of Patent Document 4, no valve is provided between the subsequent stage of the filter and the nozzle. However, an aspirator is an essential element in the configuration of the apparatus. The aspirator of the same document is expensive in material and complicated in structure, so there are difficulties in the usability, cost and maintenance of the device, and the narrow pipe part and connection chamber have a special shape, so bubbles and It is difficult to suppress the generation of microbubbles. Moreover, it can be said that it would be beneficial if the above-mentioned problems could be solved with a simple configuration as much as possible without using special components such as an aspirator.

  Furthermore, the adjustment of the supply amount of the chemical solution is disclosed only from the point that the flow control valve connected from the branch of the use side piping unit to the downstream side sub piping unit via the aspirator is connected to the downstream side, and the details of the operation are disclosed. There is no disclosure, and there is no disclosure regarding air purging and bubble removal in filters and aspirators. Therefore, at least the pressure response of the chemical solution, the stability of the discharge behavior, and the adjustment accuracy of the chemical solution supply amount are unclear and must be said to have low reliability. Therefore, it is difficult to adopt the chemical supply apparatus of the same document.

  Therefore, the present invention has been developed to solve the above-mentioned problems, and the object of the present invention is a simple structure and a compact design in which the valve and the filter are integrated integrally, and the downstream of the valve. A filter is provided to minimize the generation of pressure loss, dead volume, air bubbles, and microbubbles while adopting a high clean structure that can reliably capture and remove fine particles generated by valve seating and separation. An object of the present invention is to provide a filter unit and a chemical solution supply device that can be suppressed to the limit to ensure high stability of the chemical solution discharge behavior and high supply amount adjustment accuracy of the chemical solution, and also reliably prevent the occurrence of liquid sag.

  In order to achieve the above object, according to the first aspect of the present invention, a filter is incorporated in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter. This is a filter unit in which a filter and a vent mechanism are integrated together by a provided flow path.

  According to the second aspect of the present invention, a filter is incorporated in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter is provided by a flow path provided in the block body. And the vent mechanism are integrated together, and the vent mechanism is provided with the same actuator that combines the driving force of the vent valve and the outlet valve provided in the secondary flow path provided in the block body. It is a filter unit.

  According to a third aspect of the present invention, a filter is built in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter is provided by a flow path provided in the block body. And a vent mechanism are integrally integrated, and in the primary region of the filter, a suck back mechanism having a suck back function is provided, and this suck back mechanism is a filter unit integrated in a block body.

  The invention according to claim 4 is the filter unit in which the block body is provided with an inlet joint and an outlet joint communicated with the primary flow path and the secondary flow path of the filter.

  In the invention according to claim 5, the outlet valve has a function of opening and closing the flow path, a function of adjusting the opening and closing of the flow path, or a suck back function, and the outlet valve is integrated with the filter by the secondary side flow path. In addition, the filter unit is a mechanism that efficiently promotes the air purge operation.

  In the invention according to claim 6, the block body is provided with a storage chamber for storing a filter, and a filter made of a hollow fiber membrane or a flat membrane covered with a casing having a communicating portion is provided in the storage chamber. Filter unit.

  In the invention according to claim 7, the block body is configured by fitting the inlet block and the outlet block and being liquid-tightly sealed, and a storage chamber is formed in the inlet block and the outlet block, and a filter is provided in the storage chamber. Built-in filter unit.

  The invention according to claim 8 is the filter unit in which the outlet of the filter is provided in the vertical direction and the vent mechanism is provided at a position where the air in the primary side region of the filter accumulates.

  According to a ninth aspect of the present invention, there is provided a chemical liquid supply apparatus in which an on-off valve for controlling supply of chemical liquid or fluid is attached to the primary side of the filter unit, and a discharge nozzle is provided on the secondary side of the filter unit.

  According to the first aspect of the present invention, since the vent mechanism is provided, bubbles and microbubbles staying on the primary side of the filter can be appropriately discharged. In particular, the initial air purge at the start of use of the device and the appropriate air purge can be performed when the discharge behavior of the chemical solution becomes unstable during operation, and the pressure response can be reliably maintained, so that the chemical solution supply is always stabilized. It becomes possible.

  In addition, since the vent mechanism is integrated with the filter through the flow path provided in the block body, the cost, maintenance, and usability of the filter unit can be greatly improved by downsizing the vent mechanism. Particularly, since the dead volume between the vent mechanism and the filter can be minimized and optimized by integration, the pressure responsiveness can be reliably maintained.

  According to the second aspect of the present invention, the vent mechanism is provided with the same actuator that combines the driving force of the vent valve and the outlet valve provided in the secondary flow path provided in the block body. This can contribute significantly to the integration of the unit. In addition, the actuator can be simplified and made compact, and the linkage between the vent mechanism and the outlet valve can be enhanced to improve the efficiency of discharging the bubbles.

  According to the invention described in claim 3, since the suck back mechanism having the suck back function is provided, the chemical liquid can be appropriately drawn into the filter unit after the discharge of the chemical liquid is completed, and the liquid dripping from the discharge nozzle is prevented. Is certain. Further, since this suck back mechanism is provided in the primary region of the filter, particles that can be generated from the suck back mechanism can be reliably captured by the filter, and the cleanliness of the chemical solution can be increased.

  According to the invention described in claim 4, since the block body is provided with the inlet joint and the outlet joint communicated with the primary flow path and the secondary flow path of the filter, the fluid to be supplied through these joints Depending on the operating conditions and the like, the filter unit can be detachably attached to various existing devices at appropriate places, and the usability of the filter unit can be greatly improved.

  According to the fifth aspect of the present invention, the outlet valve has a function for opening and closing the flow path, a function for adjusting the opening and closing of the flow path, or a suck back function. The valve can be used as an on-off valve, a flow control valve, or a suck back valve. In addition, since the outlet valve is a mechanism that efficiently promotes the air purge operation, the efficiency of the air purge improves the efficiency of the initial air purge, shortens the startup time of the device, and stabilizes the discharge behavior. It is possible to quickly and appropriately recover the malfunction, and thus it is possible to reliably ensure a high pressure response of the chemical solution supply apparatus.

  According to the invention described in claim 6, the block body is provided with a storage chamber for storing the filter, and the storage chamber is provided with a filter made of a hollow fiber membrane or a flat membrane covered with a casing having a communicating portion. Therefore, the filter can be appropriately stored in the block body, and the filter type can be appropriately selected according to use. In particular, a hollow fiber membrane that is not easily deformed by pressure and has a high degree of integration and volumetric efficiency is suitable.

  According to the invention described in claim 7, since the block body is configured by fitting the inlet block and the outlet block and being liquid-tightly sealed, the block body can be easily made compact and the connecting portion is extremely simple. With the structure, it is possible to minimize the locations where bubbles are likely to stay.

  In addition, since a storage chamber is formed in the inlet block and the outlet block, and a filter is built in this storage chamber, the block body can be formed compactly and appropriately according to the filter, and the filter volume can be optimized. Thus, the pressure loss in the filter can be minimized.

  According to the eighth aspect of the present invention, since the outlet of the filter is provided in the vertical direction and the vent mechanism is provided at a position where the air in the primary side region of the filter accumulates, there is a possibility that air bubbles may stay on the primary side of the filter. And microbubbles can be reliably discharged.

  According to the invention described in claim 9, an on-off valve for controlling supply of a chemical solution or fluid is attached to the primary side of the filter unit, and a discharge nozzle is provided on the secondary side of the filter unit, This filter unit does not have a valve (such as a stop valve) that always opens and closes from the latter stage of the filter to the discharge nozzle (use point). It can be provided at the most downstream stage (secondary side) with respect to the valve. Therefore, all fine particles generated from the contact between the valve body of the on-off valve and the valve seat existing in the flow path can be reliably captured by the filter unit. Therefore, it is possible to provide a high-clean chemical supply apparatus that dramatically increases the cleanliness of the chemical or fluid.

It is a block diagram of the filter unit of the present invention. It is sectional explanatory drawing which showed 1st Embodiment of the filter unit of this invention. It is sectional explanatory drawing which showed 2nd Embodiment of the filter unit of this invention. It is a block diagram of another embodiment of the filter unit of the present invention. It is sectional explanatory drawing which showed 3rd Embodiment of the filter unit of this invention. It is a half cut sectional view of the filter of the present invention. It is an example of the block diagram of the conventional chemical | medical solution supply apparatus.

  Hereinafter, embodiments of a filter unit and a chemical solution supply apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 1 shows a block diagram of a first embodiment (or a second embodiment) of a chemical liquid supply apparatus of the present invention. In the chemical solution supply apparatus of the present invention, an on-off valve for controlling supply of the chemical solution or fluid is attached to the primary side of the filter unit, and a discharge nozzle is provided on the secondary side of the filter unit.

  In FIG. 1, 15 is a tank in which a chemical solution 14 is stored, and 17 is a pump. The pump 17 is configured to supply the chemical solution to the use point by sucking and discharging the chemical solution in the flow path. For example, a bellows type pump is used, and the opening and closing valves 16 are provided on the primary side and the secondary side of the pump 17. 18 are provided. 10 indicated by a one-dot chain line is a filter unit of the present invention, 11 is a filter, 12 is a vent valve, and 13 is an outlet valve. As will be described later, when the filter unit of the present invention is the second embodiment, the same actuator is used for the vent valve 12 and the outlet valve 13. Reference numeral 19 denotes a discharge nozzle.

  Examples of the chemical solution supply device of the present invention include a coater developer chemical solution supply device in a semiconductor manufacturing process, a wafer cleaning device chemical solution supply device, and the like, and examples of the chemical solution include resist, thinner, developer, cleaning solution, and peeling. Examples thereof include liquids and ultrapure water, but there is no limitation as long as the chemical liquid supply apparatus is required to supply a chemical liquid with a predetermined level of high cleanliness and high accuracy.

  FIG. 2 is an explanatory cross-sectional view showing the first embodiment of the filter unit of the present invention. The upward direction in the figure is the vertical upward direction. The block body of the present invention is configured by fitting an inlet block and an outlet block and sealing them in a liquid-tight manner. As shown in the figure, in this example, the block body 20 closely fits the annular convex portion 21a of the inlet block 21 and the annular concave portion 22a of the outlet block 22 to seal the fluid inside. Although not shown, the seal between the inlet block 21 and the outlet block 22 may be sealed through a sealing material such as a PTFE ring-shaped gasket, or in close contact with no sealing material. In addition, for example, sealing may be performed by caulking, welding, welding, or the like.

  The block body has a flow path engraved inside the body constituting the block body as a flow path of the fluid. For example, a plurality of blocks connect each other's flow paths with joints or the like. Even when connected integrally and so as to communicate without piping or the like, it is one block body.

  The block body of the present invention is provided with a storage chamber for storing a filter, and further includes an inlet joint and an outlet joint that communicate with the primary flow path and the secondary flow path of the filter. In this example, hollow cylindrical storage chambers 23 and 24 are formed in the inlet block 21 and the outlet block 22, respectively. When the block body 20 is configured by fitting the inlet block 21 and the outlet block 22, the storage chambers 23, 24 form a hollow cylindrical storage chamber 25, and a filter 26 described later is formed in the storage chamber 25. Is built-in. Since it is preferable that the storage chambers 23 and 24 have a shape that conforms to the outer shape of the filter 26 to be stored, the shape of the storage chamber 25 in this example is an optimal shape (cylindrical shape) for the outer diameter of the filter 26. ). However, the shape of the storage chamber of the present invention is not limited to the cylindrical shape as in this example, and can be appropriately selected according to the implementation.

  In FIG. 2, a primary flow path 27 that communicates between the storage chamber 23 and the inlet 28 is formed in the inlet block 21. The inlet 28 is provided with an inlet joint 29 for connecting a chemical resistant (not shown) tube (made of PFA or the like). The inlet joint 29 has a union nut made of PFA or the like, a sleeve, and a gauge ring made of ETFE or the like, and after inserting the tube to a predetermined depth between the union nut and the sleeve, the union nut is By tightening, the tube is connected and fixed to the inlet joint 29 in a liquid-tight manner.

  Further, a secondary side flow path 31 is also engraved inside the outlet block 22 via an outlet valve 30 described later, and the storage chamber 24 and the outlet 32 are communicated with each other. The outlet 32 is also provided with an outlet joint 33 having a structure similar to that of the inlet joint 29. The inlet joint 29 and the outlet joint 33 are not limited to joints that connect resin tubes, but may be joint members that can appropriately connect flow path members such as pipes.

  The inlet block 21 (outlet block 22) is formed from a material having high chemical resistance and low elution, such as HDPE, PTFE, PFA, PVDF, and is not shown, but has a rectangular parallelepiped or cylindrical compact outer shape. Presents.

  The block body of the present invention is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter and the vent mechanism are integrated together by a flow path provided in the block body. In addition, the outlet of the filter is provided in the vertical direction, and the vent mechanism is provided at a position where air in the primary side region of the filter accumulates.

  In FIG. 2, an air vent channel 35 communicating with the primary region 34 of the filter 26 is formed in the outlet block 22. The air vent channel 35 communicates with the valve chamber 36, and a linear air vent channel 37 that opens to the outside through the air vent 35 communicates with the valve chamber 36. The opening position of the air vent channel 35 toward the primary region 34 in the storage chamber 24 is the upper portion of the storage chamber 25, that is, when the fluid is flowed into the storage chamber 25 and the filter 26 is used. Air bubbles and microbubbles are opened toward the uppermost portion of the primary region 34 where they are likely to rise and stay due to buoyancy, so that bubbles that are likely to stay and have an adverse effect can be efficiently discharged. ing.

  In FIG. 2, a vent valve 38 that opens and closes the air vent channel 35 is mounted (integrated and integrated) on the outlet block 22 as a vent mechanism in this example. The vent valve 38 is a diaphragm valve having a pneumatic actuator, and includes a body 40 having an air supply port 39 for operation, a piston 42 biased by a spring 41 inside, and a piston of the piston 42. And a diaphragm 43 connected to the tip of the rod by screwing or the like. A holding body 44 is tightly fixed between the body 40 and the outlet block 22. The diaphragm 43 is a valve body that has a movable film portion inside and is seated on the valve seat 45 in the valve chamber 36 to open and close the air vent channel 35. It is fixed tightly between.

  The vent valve 38 is a normally closed type, and the spring 41 biases the piston 42 so that the diaphragm 43 at the front end is seated to close the valve. The air pressure is opened by pressing the piston 42 and lifting the diaphragm 43 from the valve seat. The opening / closing operation of the vent valve 38 can be automatically controlled by a control device (not shown).

  In addition to PFA and PTFE, the body 40 is made of a material that is optimal for high chemical resistance, low elution, and the temperature of the fluid used, such as PVDF, PP, and PVC. The vent valve 38 is not particularly limited as long as it is a stop valve made of a material having high chemical resistance and low elution, and generates little dust due to opening and closing operations. For example, in addition to the above configuration, a bellows valve may be used. Alternatively, a solenoid valve that is actuated by an electric signal may be used.

  In FIG. 2, an outlet valve 30 that opens and closes the secondary side flow path 31 is mounted (integrated and integrated) on the outlet block 22 as a vent mechanism in this example. The outlet valve of the present invention has a function of opening and closing a flow path provided in the block body, a function of adjusting the opening and closing of the flow path, or a suck back function, and is integrated with the filter by the secondary side flow path. At the same time, the mechanism efficiently promotes the air purge operation.

  As shown in FIG. 2, in the secondary side channel 31 of this example, a secondary side channel 31 a is engraved in an L shape from the secondary side of the filter 26 and communicates with the valve chamber 46. The valve chamber 46 communicates with the outlet 32 via the secondary channel 31c.

  The outlet valve 30 is configured similarly to the vent valve 38. That is, a diaphragm valve having a pneumatic actuator, a body 48 having an air supply port 47 for operation, a piston 50 biased by a spring 49, and a piston rod tip portion of the piston 50 inside the body 48 And a diaphragm 51 connected by screwing or the like. A holding body 52 is tightly fixed between the body 48 and the outlet block 22. The diaphragm 51 is a valve body that has a movable film portion inside and is seated on the valve seat 53 in the valve chamber 46 to open and close the secondary side flow path 31, and the outer peripheral portion thereof has the outlet block 22 and the holding body 52. It is fixed tightly between.

  The outlet valve 30 is a normally open type, and is basically provided to assist air purge by the vent valve 38. Since it is a normally-open type, the spring 49 urges and lifts the piston 50 in a direction in which the diaphragm 51 at the tip of the piston 50 moves away from the valve seat 53, and air is supplied to the air supply port 47. The air pressure in the air chamber presses the piston 50 to seat the diaphragm 51 toward the valve seat 53, thereby closing the outlet valve 30. Such an opening / closing operation of the outlet valve 30 can be automatically controlled by a control device (not shown). In addition to PFA and PTFE, the body 48 is also made of a material that is optimal for high chemical resistance, low elution, and the temperature of the fluid used, such as PVDF, PP, and PVC. Also, the outlet valve 30 is made of a material having high chemical resistance and low elution, and is not particularly limited as long as it is a stop valve that generates little dust accompanying opening and closing operations. For example, in addition to the above configuration, a bellows valve or the like may be used. A solenoid valve that is actuated by an electric signal may be used.

  The block body storage chamber of the present invention is provided with a filter comprising a hollow fiber membrane or a flat membrane covered with a casing having a communicating portion. As shown in FIG. 2, the filter 26 of this example is stored in a storage chamber 25 inside the block body 20, and the primary side of the filter 26 is a primary flow path 27, and the secondary side is a secondary side flow. The air passages 35 communicate with the passages 31 and the primary region 34 of the filter 26 communicates with the air passages 35.

  As shown in FIG. 2, the filter 26 of this example is a filter comprising a hollow fiber membrane 55 covered with a casing 54 in which a large number of communication portions 54a are arranged in parallel. The casing 54 is formed in a cylindrical shape with both ends open, and one end 54 b is fitted and fixed to a mounting portion 24 a provided on the bottom side surface of the storage chamber 24 of the outlet block 22.

  The end surface of the one end portion 54b is in close contact with the bottom surface portion of the storage chamber 24 to seal the end surface. The close contact force of the end face seal is such that when the tightening force for fitting and sealing the inlet block 21 and the outlet block 22 is increased, the other end 54c is pressed against the bottom surface of the storage chamber 23 of the inlet block 21. Thus, the one end 54b can be pressed and strengthened. As described above, the primary side and the secondary side of the filter 26 in the storage chamber 24 are liquid-tightly separated by the end face seal that does not use a sealing material such as an O-ring, so that fine particles due to wear or deterioration of the sealing material. No leakage or elution.

  A hollow fiber membrane 55 is fixed to the one end 54b. The hollow fiber membrane 55 includes a hollow fiber membrane unit 55a in which a large number of hollow fibers are bent into a U shape and knitted into a bundle, the open state of both ends of the hollow fiber is maintained, and the both ends are connected to one end 54b. And a potting portion 55b which is a fixed end that is cast and fixed to the inner region. The potting portion 55b is formed by filling a potting material in the inner region of the one end portion 54b and curing, and the hollow fiber membrane 55 is fixed to the one end portion 54b so that both end portions of the hollow fiber open to the secondary side. doing.

  Here, the filter used in the semiconductor manufacturing process has high chemical resistance and low elution, as well as high filtration accuracy, that is, a small filter pore diameter, and high flow rate, that is, low pressure loss. Is required. Therefore, a filter made of fluororesin, polyolefin, nylon or the like is used. In addition, a filter having a filtration accuracy of 0.2 μm or less, preferably 0.1 μm or less is used depending on the requirement of cleanliness for the chemical solution. Due to recent advances in semiconductor miniaturization, the demand for cleanliness of chemicals used is increasing, and it is more preferable to use a filter having extremely high filtration accuracy such as 10 nm or 5 nm for the filter 26 of the present invention. . Moreover, if it is such a filter, the filter of this invention can be suitably selected according to use, for example, the filter 26 of this invention is a hollow fiber membrane type or a flat membrane pleat type (flat membrane cartridge) etc. A hollow fiber membrane type having a high degree of integration and volumetric efficiency without using a support such as a support and a core is more preferable.

  FIG. 6 is a half sectional view showing a more preferable example of the filter of the present invention. The filter 60 in the figure is a hollow fiber membrane filter covered with a casing 56 having a communication portion 57 as in the case of the filter 26 described above. The casing 56 is formed in a cylindrical shape with both ends open, and has one end 54b ′. Can be fitted and fixed to a mounting portion provided on the bottom side surface of the storage chamber of the outlet block. Therefore, instead of the above-described filter 26, the filter 60 can be used by being appropriately attached to the filter unit of the present invention. A hollow fiber membrane 55 'is fixed to the one end 54b'. The hollow fiber membrane 55 ′ has a hollow fiber membrane unit 55 a ′ in which a number of hollow fibers are bent into a U shape and knitted into a bundle, maintains the open state of both ends of the hollow fiber, and the both ends are connected to one end. And a potting portion 55b ′ that is a fixed end that is cast and fixed in the inner region of the portion 54b ′.

  As shown in FIG. 6, in the filter 60, the side surface portion of the communication portion 57 is formed in a tapered shape whose diameter decreases from the outside to the inside of the filter 60, and the outer peripheral surface of the casing 56 is the same as that shown in FIG. The filter 26 is different from the filter 26 described above in that it is formed in a stepped surface shape via a stepped portion 58 inside a predetermined length from both left and right end portions. Although not shown, when the filter 60 is built in the storage chamber of the block body, the outer diameter of the casing 56 is reduced by the depth of the stepped portion 58, thereby creating a clearance between the peripheral surface of the storage chamber, The clearance and the taper shape of the communication portion 57 that spreads from the inside to the outside of the casing 56 ensure the passage of bubbles, in particular, the bubbles that have accumulated and adhered to the yarns of the hollow fiber membrane unit 55a ′. , Can be effectively driven out of the casing 56. Further, the filter is not limited to the one covered with the casing having the communication part, but may be one in which the hollow fiber membrane is directly stored in the block body and the end part is cast and fixed.

  A base body 61 is attached to the outer surface of the inlet block 21 of this example by a bolt (not shown). The base body 61 is formed of PP or PPS, and the inlet block 21 is mounted on an external object. It is suitably formed in a shape that becomes a pedestal when placed.

  Next, a second embodiment of the present invention will be described. FIG. 3 is an explanatory cross-sectional view of the second embodiment. In the figure, the same parts are denoted by the same reference numerals, and the description thereof is omitted.

  In FIG. 3, the upward direction is the upward vertical direction. Also in the block body 62 of this example, the annular convex portion 63a of the inlet block 63 and the annular concave portion 64a of the outlet block 64 are closely fitted to seal the fluid inside. The inlet block 63 and the outlet block 64 are formed with hollow cylindrical storage chambers 65 and 66, respectively. When the block body 62 is configured by fitting the inlet block 63 and the outlet block 64, the storage chambers 65, 66 form a hollow cylindrical storage chamber 67, and the filter 26 is built in the storage chamber 67. . As shown in the figure, in this example, the filter 26 is substantially built in the inlet block 63 side, and the storage chamber 66 of the outlet block 64 formed with a shallow bottom surface portion is fitted with one end 54 b of the filter 26. Has become a department. Also in this example, the shape of the storage chamber 67 is formed in an optimum shape for the outer shape of the filter 26.

  In FIG. 3, a primary flow path 69 that communicates the storage chamber 65 and the inlet 68 is formed in the inlet block 63. The inlet 68 is provided with an inlet joint 70 for connecting a chemical resistant tube (not shown) made of PFA or the like. The inlet joint 70 has a union nut made of PFA or the like, a sleeve, and a gauge ring made of ETFE or the like, and after inserting the tube to a predetermined depth between the union nut and the sleeve, the union nut is The tube is connected and fixed to the inlet joint 70 in a liquid-tight manner by tightening.

  In addition, a secondary flow path 72 is also engraved inside the outlet block 64 via an outlet valve 71 described later, and the storage chamber 66 and the outlet 73 are communicated with each other. The outlet 73 is also provided with an outlet joint 74 having a structure similar to that of the inlet joint 70. The inlet joint 70 and the outlet joint 74 are not limited to joints that connect resin tubes, but may be joint members that can appropriately connect flow path members such as pipes. The inlet block 63 (outlet block 64) is formed from a material having high chemical resistance and low elution, such as HDPE, PTFE, PFA, PVDF, and is not shown, but has a rectangular parallelepiped or cylindrical compact outer shape. Presents.

  In FIG. 3, an air vent channel 76 that communicates with the primary region 75 of the filter 26 is formed in the inlet block 63. The air vent channel 76 communicates with a channel 79 a in a body 81 of a vent valve 77 described later via a tube 78. The tube 78 is a flow path that connects the air bleeding flow path 76 and the flow path 79a in the body 81 via joints 80a and 80b connected to both ends. The air vent channel 76 is also provided so as to open toward a position where bubbles in the primary region 75 of the filter 26 are likely to stay.

  In FIG. 3, as a vent mechanism in this example, a vent valve 77 that opens and closes an air vent channel 76 is mounted (integrated and integrated) on the outlet block 64. The vent valve 77 is a normally closed diaphragm valve having a pneumatic actuator, a spring 83 biases the piston 84, and is connected to the tip of the piston rod of the piston 84 by screwing or the like. The piston 85 is lifted by the air pressure press-fitted into the air chamber from the air supply port 82 using the diaphragm 85 as a valve body as a valve body, and the diaphragm 85 leaves the valve seat 88 of the flow path 79 formed in the body 81. On the other hand, when the air is extracted from the air chamber, the diaphragm 85 of the piston 84 is pressed against the valve seat 88 by the elastic force of the spring 83 to close the valve. Such an opening / closing operation of the vent valve 77 can be automatically controlled by a control device (not shown). In addition, a holding body 86 is tightly fixed between the body 81 and the outlet block 64, and an outer peripheral portion of the diaphragm 85 is tightly held between the outlet block 64 and the holding body 86.

  In addition to PFA and PTFE, the body 81 is made of a material that is optimal for high chemical resistance, low elution, and the temperature of the fluid used, such as PVDF, PP, and PVC. The vent valve 77 is not particularly limited as long as it is a stop valve made of a material having high chemical resistance and low elution, and generates little dust due to opening and closing operations. For example, in addition to the above configuration, a bellows valve may be used. Alternatively, a solenoid valve that is actuated by an electric signal may be used.

  In FIG. 3, as a vent mechanism in the present example, an outlet valve 71 that opens and closes the secondary flow path 72 is provided in the outlet block 64 so as to be integrated. In the secondary side flow path 72 of this example, a secondary side flow path 72 a is engraved in an L shape from the secondary side of the filter 26 and communicates with the valve chamber 89. The valve chamber 89 communicates with the outlet 73 via the secondary side flow path 72c.

  The outlet valve 71 is also configured in the same manner as the vent valve 77, and is a diaphragm valve having a pneumatic actuator. The cylinder 90 has an air supply port 82 for operation, and a spring 83 is provided in the cylinder 90. It has an urged piston 84 and a diaphragm 91 connected to the tip end of the piston rod of the piston 84 by screwing or the like. The diaphragm 91 is a valve body that has a movable membrane portion inside and is seated on the valve seat 92 in the valve chamber 89 to open and close the secondary side flow path 72. It is fixed tightly between.

  The outlet valve 71 is a normally open type and is basically provided to assist air purge by the vent valve 77. Since the diaphragm 91 at the tip of the piston 84 is normally open, the spring 83 urges and lifts the piston 84 in a direction away from the valve seat 92, and air is supplied to the air supply port 82. The air pressure in the air chamber presses the piston 84 to seat the diaphragm 91 toward the valve seat 92, thereby closing the outlet valve 71. Such an opening / closing operation of the outlet valve 71 can be automatically controlled by a control device (not shown). In addition to PFA and PTFE, the cylinder 90 is also made of a material that is optimal for high chemical resistance, low elution, and the temperature of the fluid used, such as PVDF, PP, and PVC. The outlet valve 71 is also made of a material having high chemical resistance and low elution, and is not particularly limited as long as it is a stop valve that generates little dust accompanying opening and closing operations.For example, in addition to the above configuration, a bellows valve or the like may be used. A solenoid valve that is actuated by an electric signal may be used.

  As shown in FIG. 3, in this example, the vent mechanism is provided with the same actuator that combines the driving force of the vent valve and the outlet valve provided in the secondary flow path provided in the block body. .

  As apparent from the above structure, the actuator pistons of the vent valve 77 and the outlet valve 71 which are the vent mechanism of this example are a single piston 84, and diaphragm 85, 91 is connected.

  Since it is a single piston, when air is supplied from the air supply port 82 to the air chamber provided between the holding body 86 and the piston 84, the air pressure in the air chamber increases, and this air pressure increases the elasticity of the spring 83. When the force is overcome, the piston 84 is pushed toward the left side in FIG. 3, and the diaphragm 91 is pushed against the valve seat 92 and the outlet valve 71 is closed in conjunction with the pushing toward the left side. 85 leaves the valve seat 88 and the vent valve 77 opens. Conversely, when the air is discharged from the air supply port 82 and the elastic force of the spring 83 exceeds the air pressure in the air chamber, the piston 84 is pushed toward the right side in FIG. Then, the diaphragm 91 is separated from the valve seat 92 and the outlet valve 71 is opened, and the diaphragm 85 is pressed against the valve seat 88 and the vent valve 77 is closed.

  For this reason, in this example, the valve opening driving force (valve closing driving force) of the outlet valve 71 is the same as the valve closing driving force (valve opening driving force) of the vent valve 77 via the single piston 84 and is driven mutually. It is a single pneumatic actuator that can be used for both forces.

  Here, the volume of the filter stored in the storage chamber is determined by a trade-off with the pressure loss accompanying the installation of the filter. That is, if the volume of the filter is small, the pressure loss increases, and not only does it require excessive pressure to send the fluid, but also an inlet valve (in FIG. The pressure responsiveness when the valve 18 or the like is opened / closed also deteriorates, and when the inlet valve is closed, the fluid supply does not stop immediately according to the valve closing, and is connected from the filter unit via a pipe or tube. Liquid dripping occurs in the discharge nozzle.

  On the other hand, if the volume of the filter is too large, the pressure loss decreases, but the storage chamber containing the filter needs to be enlarged, so the pressure associated with opening and closing the inlet valve installed in the front stage of the filter unit Due to expansion and contraction against changes, the pressure responsiveness also deteriorates, and when the inlet valve is closed, the fluid supply does not stop immediately according to the valve closing, but is connected from the filter unit via piping or tubes. Liquid dripping occurs in the discharge nozzle. Further, the pressure responsiveness is also deteriorated by air bubbles staying in the filter unit.

  Since the filter of the present invention is built in the filter storage chamber formed in the block body as described above, the filter volume can be selected simply and appropriately according to the required level of pressure response. can do. In addition, the closed region for storing the filter in the unit is preferably formed as small as possible with respect to the volume of the filter, but as shown in the figure, the internal shape of the filter storage chambers 25 and 67 of this example is It conforms to the external shape of the filter 26 and is formed so as to be almost the same shape by covering with a slight gap. In addition, the filter built in the unit may be divided into a plurality of pieces from the viewpoint of effectively using the volume of the storage chamber.

  In addition, in the filter unit or in the flow path of the chemical solution supply device, the location where fluid stays, the location where bubbles and microbubbles tend to stay, and the location where pressure loss is likely to be lost due to pressure loss are as much as possible. If it is excluded, it is preferable. In particular, in a pipe portion where the inner diameter of the flow path changes discontinuously due to sudden expansion or contraction, the flow is separated and energy loss and convection are likely to occur. In this respect, as shown in the figure, the primary flow paths 27 and 69 and the secondary flow paths 31 and 72 through which the chemicals flow into and out of the storage chambers 25 and 67 are connected from the columnar shape to the conical shape, respectively. It is formed in a simple inner shape that does not. Specifically, the primary flow paths 27a and 69a and the secondary flow paths 31a and 72a are each formed in a simple linear cylindrical shape, and the primary flow paths 27b and 69b and the secondary flow paths 31b, 72b is formed in a simple conical shape. Therefore, it is difficult for stagnation and convection to occur in the inflow and outflow of the chemical into the storage chambers 25 and 67.

  Next, a third embodiment of the present invention will be described. FIG. 4 is a block diagram of the third embodiment, and FIG. 5 is a cross-sectional explanatory diagram of the third embodiment. In the figure, the same parts are denoted by the same reference numerals, and the description thereof is omitted. This example is different from the second embodiment in that a suck back mechanism having a suck back function is provided in the primary region of the filter, and the suck back mechanism is integrated in the block body.

  In FIG. 5, the suck back mechanism of this example is a suck back valve 93. The suck back valve 93 is a diaphragm valve provided with a pneumatic actuator, and a body 94 is directly attached to the inlet block 63 and integrated. A cover 95 is attached to the body 94, and air can communicate with an air chamber provided between the cover 95 and the piston 97 via a port 96 for supplying and discharging air. The piston rod tip of the piston 97 is provided with a diaphragm 99 that serves as a valve body, and the outer diameter side of the diaphragm 99 is sandwiched and fixed between the body 94 and the inlet block 63 via a guide member or the like. On the inner diameter side, there is provided a pressure receiving surface 99a that is exposed to the fluid inside the storage chamber 67 of the filter 26 and defines the flow path volume.

  In FIG. 5, a spring 98 is provided between the body 94 and the piston 97 to push up and urge the piston 97. When air is supplied from the port 96, the air pressure in the air chamber increases, and when this air pressure exceeds the spring force of the spring 98, the piston 97 is pushed down, and the pressure receiving surface 99a of the diaphragm 99 is linked with this depression. It enters (falls) inward of the flow path to reduce the volume of the flow path (housing chamber 67), and the inside of the flow path is pressurized according to the decrease in the flow path volume. On the other hand, when the air is discharged from the port 96, the piston 97 is pushed up by the spring force of the spring 98, and the pressure receiving surface 99a of the diaphragm 99 is retracted (raised) outward from the flow path in conjunction with this push-up. The volume of the (storage chamber 67) is increased. The inside of the flow path is depressurized in accordance with the increase in the flow path volume, and by this depressurization, the fluid can be pulled back to the inside of the chemical liquid supply device (inside the flow path). Can be prevented. Further, the amount of suck back can be adjusted by adjusting the retraction amount of the pressure receiving surface 99a.

  As described above, in the filter unit of the present invention, the vent mechanism (the vent valves 38 and 77 and the outlet valves 30 and 71) and the suck back mechanism (the suck back valve 93) are integrally integrated in the block bodies 20 and 62, respectively. Has been. Specifically, the body of the valve constituting each mechanism is directly attached to the block body without intervening another member such as a pipe or a joint, and the internal flow paths are connected. In the case of the second embodiment, the vent valve 77 is further directly attached to the outlet valve 71 directly attached to the block body 62, so that the whole is integrated as a whole. In FIG. 2, the body 40 of the vent valve 38 and the body 48 of the outlet valve 30 are each directly attached to the outlet block 22 via a sealing material. 3 and 5, the outlet valve 71 has a body portion having a flow path and a valve seat portion provided inside the outlet block 64, and the body 81 of the vent valve 77 is directly attached to the cylinder 90. The same actuator as the outlet valve 71 is also used. Further, in FIG. 5, the body 94 of the suck back valve 93 is directly attached to the inlet block 63.

  Compacting by such integrated integration can greatly increase the cost, maintenance, and usability of the filter unit, and can be easily attached to an existing chemical solution supply apparatus. Particularly, since the dead volume between the vent mechanism and the filter can be minimized and optimized by integration, the pressure responsiveness can be reliably maintained.

  Then, the effect | action of the filter unit and chemical | medical solution supply apparatus of this invention is demonstrated. First, the case where the filter unit of 1st Embodiment of this invention shown to FIG.1, 2 is used for a chemical | medical solution supply apparatus is demonstrated.

  When the filter unit of this example is attached to the chemical solution supply apparatus, an initial air purge operation for completely discharging bubbles in the filter unit and the filter 26 is required. If the filter unit is started up in a state where the initial air purge is insufficient and air bubbles remain in the filter unit, there arises a problem that the pressure response is remarkably deteriorated.

  In this initial air purge operation, first, the on-off valve 18 on the upstream side of the filter unit is closed, the outlet valve 30 is closed, and the vent valve 38 is opened. Next, the on-off valve 18 is opened, the chemical solution is caused to flow into the filter unit via the inlet joint 29, and the chemical chamber is filled in the filter storage chamber 25. At this time, the chemical solution is filled so that the bubbles in the storage chamber 25 are expelled to the vent valve 38. Then, after confirming that bubbles are not discharged from the vent valve 38, the vent valve 38 is closed. Thereafter, when the outlet valve 30 is opened, the chemical liquid filtered by the filter 26 is supplied via the outlet joint 33.

  During normal operation of the chemical solution supply apparatus of this example, the outlet valve 30 is open, the vent valve 38 is closed, and the on-off valve 18 is opened to supply the chemical solution to the discharge nozzle 19. When stopping the supply of the chemical solution, the on-off valve 18 is closed. Then, after the supply of the chemical solution is stopped, the chemical solution is gradually drawn into the discharge nozzle 19 when the chemical solution is held for a certain period of time.

  Normally, the chemical supply apparatus is provided with a suck back mechanism for preventing liquid sag from the discharge nozzle when the chemical supply is stopped. However, in the filter unit of the present invention, the hollow of the built-in filter 26 is provided. The liquid level behavior at the tip of the discharge nozzle 19 changes due to slight contraction and relaxation of the yarn film. That is, when the chemical liquid is discharged, the hollow fiber membrane slightly contracts due to the pressure applied to the filter 26. On the other hand, when the supply of the chemical liquid is stopped, the pressure is released to slightly relax the hollow fiber membrane, and the tip of the discharge nozzle 19 A phenomenon occurs in which the liquid chemical held in is pulled slightly. By utilizing this phenomenon, it is possible to prevent liquid dripping from the tip of the discharge nozzle 19 and to omit the normally provided suck back mechanism.

  Further, even during normal operation of the chemical solution supply apparatus of this example, bubbles generated on the upstream side are mixed into the filter unit, or pressure changes due to opening / closing of the on-off valve 18 installed on the upstream side of the filter unit enter the chemical solution. There are cases where dissolved gas is generated as bubbles. In such a case, air purge during operation is required.

  During the air purge operation, the on-off valve 18 is closed, the outlet valve 30 is closed, the vent valve 38 is opened, and the chemical supply is temporarily stopped. Next, the on-off valve 18 is opened, and air bubbles in the storage chamber 25 of the filter unit are expelled to the vent valve 38 and air purged. Thereafter, the vent valve 38 is closed, the outlet valve 30 is opened, and the operation is resumed.

  Next, the case where the filter unit of the second embodiment of the present invention shown in FIGS. 1 and 3 and the filter unit of the third embodiment of the present invention shown in FIGS. To do. As described above, the configuration of the filter unit of the second embodiment is such that the outlet valve 71 and the vent valve 77 are operated by one actuator, and the configuration other than this is the same as that of the first embodiment. Further, as described above, the configuration of the filter unit of the third embodiment is the same as that of the second embodiment except that the suck-back valve 93 is provided in the inlet block 63. For this reason, each operation in the second embodiment and the third embodiment is the same as that in the first embodiment as described below.

  That is, in the initial air purge operation in the second and third embodiments, first, the on-off valve 18 on the upstream side of the filter unit is closed, the outlet valve 71 is closed, and the vent valve 77 is opened. Next, the on-off valve 18 is opened, the chemical solution is caused to flow into the filter unit through the inlet joint 70, and the filter storage chamber 67 is filled with the chemical solution. At this time, the chemical solution is filled so that the bubbles in the storage chamber 67 are expelled to the vent valve 77. Then, after confirming that bubbles are not discharged from the vent valve 77, the vent valve 77 is closed. At the same time, the outlet valve 71 is opened, and the chemical liquid filtered by the filter 26 is supplied through the outlet joint 74.

  In the second and third embodiments, when the chemical solution supply device is normally operated, the outlet valve 71 is open, the vent valve 77 is closed, the on-off valve 18 is opened, and the chemical solution is supplied to the discharge nozzle 19. To do. When stopping the supply of the chemical solution, the on-off valve 18 is closed. Then, after the supply of the chemical solution is stopped, the chemical solution is gradually drawn into the discharge nozzle 19 when the chemical solution is held for a certain period of time.

  In the air purge operation during operation in the second and third embodiments, the on-off valve 18 is closed, the outlet valve 71 is closed, the vent valve 77 is opened, and the chemical supply is temporarily stopped. Next, the on-off valve 18 is opened, and air bubbles in the storage chamber 67 of the filter unit are expelled to the vent valve 77 and air purged. Thereafter, the vent valve 77 is closed, the outlet valve 71 is opened, and the operation is resumed.

  In the third embodiment, when the chemical liquid supply device is normally operated, the valve body of the suck back valve 93 is raised to perform a suck back operation, and the chemical liquid is drawn into the filter unit, and from the tip of the discharge nozzle 19 Can be prevented from dripping. During normal operation in this example, first, the valve body of the suck back valve 93 is lowered, the chemical liquid is lowered to the nozzle surface of the discharge nozzle 19, the outlet valve 71 is opened, and the vent valve 77 is closed. Then, the on-off valve 18 is opened and the chemical solution is supplied to the discharge nozzle 19 side. On the other hand, when the suck back operation is performed, first, the on-off valve 18 is closed to stop the supply of the chemical solution. And the valve body of the suck back valve 93 is raised, and a chemical | medical solution is drawn in to a predetermined | prescribed nozzle surface.

  Note that the air purge operation during operation may be performed periodically according to the number of times the on-off valve 18 is opened and closed. Further, when a bubble is mixed in the filter unit and the discharge behavior of the chemical liquid in the chemical liquid supply apparatus becomes unstable, it may be performed each time. In this case, although not shown, a pressure gauge capable of measuring the pressure in the storage chambers 25 and 67 of the filter unit is provided, and the pressure change in the filter unit is monitored with this pressure gauge, so that it is efficient and accurate. It is also possible to perform an air purge operation at the timing.

  As described above, the outlet valves 30 and 71 are closed when the bubbles staying in the filter unit of the present invention are discharged. At this time, the bubbles from the vent valves 38 and 77 are maintained by keeping the pressure in the filter unit high. It works to promote more efficient emissions. Further, although not shown in the drawing, it is possible to discharge bubbles more efficiently by connecting a vacuum pump to the exhaust port side (flow channel 37, 79b side) of the vent valves 38, 77. Further, as the outlet valves 30 and 71, valves having a suck back function may be used. In this case, the valve descends and narrows the secondary flow paths 31 and 72 of the filter 26, thereby maintaining a high pressure in the filter unit and promoting the discharge of bubbles from the vent valves 38 and 77.

  Furthermore, the present invention is not limited to the description of the above embodiment, and various modifications can be made without departing from the spirit of the invention described in the claims of the present invention.

20, 62 Block body 26, 60 Filter 38, 77 Vent mechanism (vent valve)
27, 69 Primary side flow path 31, 72 Secondary side flow path 30, 71 Outlet valve 34, 75 Primary side area 93 Suck back mechanism (suck back valve)
29, 70 Inlet joint 33, 74 Outlet joint 25 (23, 24), 67 (65, 66) Storage chamber 54a, 57 Communication portion 54, 56 Casing 55, 55 'Hollow fiber membrane 21, 63 Inlet block 22, 64 Outlet Blocks 32, 73 Outlet 10, 100 Filter unit 18 On-off valve 14 Chemical liquid 19 Discharge nozzle

Claims (9)

  A filter is incorporated in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter and the vent mechanism are provided by a flow path provided in the block body. Is a filter unit that is integrated as a single unit.   A filter is incorporated in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter and the vent mechanism are provided by a flow path provided in the block body. And the vent mechanism is provided with the same actuator that combines the drive force of the vent valve and the outlet valve provided in the secondary flow path provided in the block body. Features a filter unit.   A filter is incorporated in the block body, and the block body is provided with a vent mechanism for discharging bubbles accumulated on the primary side of the filter, and the filter and the vent mechanism are provided by a flow path provided in the block body. A suck back mechanism having a suck back function is provided in a primary side region of the filter, and the suck back mechanism is integrally integrated in the block body. 2. The filter unit according to 2.   4. The filter unit according to claim 1, wherein the block body includes an inlet joint and an outlet joint that communicate with the primary flow path and the secondary flow path of the filter.   The outlet valve has a function of opening and closing the flow path, a function of adjusting the opening and closing of the flow path, or a suck back function, and the outlet valve is integrated with the filter by the secondary side flow path. The filter unit according to any one of claims 2 to 4, wherein the filter unit is a mechanism that efficiently promotes an air purge operation.   The block body is provided with a storage chamber for storing the filter, and a filter made of a hollow fiber membrane or a flat membrane covered with a casing having a communication portion is provided in the storage chamber. The filter unit according to any one of the above.   The block body is configured such that an inlet block and an outlet block are fitted and sealed in a liquid-tight manner, a storage chamber is formed in the inlet block and the outlet block, and a filter is built in the storage chamber. The filter unit described.   The filter unit according to any one of claims 1 to 3, wherein an outlet of the filter is provided in a vertical direction, and the vent mechanism is provided at a position where air in a primary region of the filter accumulates.   An on-off valve for controlling supply of a chemical solution or a fluid is attached to the primary side of the filter unit according to any one of claims 1 to 8, and the chemical solution is provided with a discharge nozzle on the secondary side of the filter unit. Feeding device.

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