JPH0221071A - Sealing device - Google Patents

Abstract

PURPOSE:To prevent the occurrence of leak and make miniaturization and facilitate the operation of attachment/detachment at the time of the exchange of flow passage resisting bodies, by forming integrally a sealing gasket at the outer perimeter portion of the flow passage resisting body. CONSTITUTION:When an orifice plate 19 is fixed at a vacuum container 3, a sealing gasket 20 united with the outer perimeter of the orifice plate 19 through a uniting portion 21, is pinched in between uniting flanges 4, 4, and the uniting flanges 4, 4 are tightened by means of bolts 6 and nuts 7. As a result, the number of the sealing gasket 20 required at the time of fitting one piece of the orifice plate 19, becomes only one piece, and the number of the sealing gasket 20 to be used can be reduced to a half in comparison with a prior method, so the possibility of the occurrence of leak is drastically lowered. Also, a tightening torque added on the bolt 6 at the time of fitting can be lightened, and the occurrence of leak due to the extension of the bolt 6 in a baking processing or the like is avoided. In addition, handling is easy, and the operation of attachment/detachment can be simplified.

Description

[Detailed Description of the Invention] [Objective of the Invention] (Industrial Application Field) The present invention relates to a sealing device that is detachably installed in a joint flange of a vacuum device or piping system, and particularly relates to a sealing device that is detachably installed in a joint flange of a vacuum equipment or piping system, and in particular, is designed to reduce fluid leakage. , relates to a sealing device that is small and easy to attach and detach.

(Prior art) When measuring the flow rate of a fluid flowing in a vacuum device or piping system, measuring the fluid discharge, calibrating a vacuum gauge, etc., it is necessary to place a flow path resistor with a known resistance value in the system in an airtight manner. An interposed sealing device is used, and the flow rate etc. are determined by measuring the differential pressure etc. before and after the flow path resistor.

For example, in a vacuum gauge calibration device, an orifice plate 1 is used as a flow path resistor as shown in FIG.

The orifice plate 1 is formed of a disk having a small-diameter orifice hole 1a bored in the center, as shown in FIG. As shown in FIG. 13, the orifice plate 1 is sandwiched between the joint 7 flanges 4, 4 attached to the vacuum container 3, with vacuum sealing gaskets 2 interposed on both sides. A through hole 5 is bored in the side surface of the joint 7 flange 4, and the inserted orifice plate 1 is integrally fixed by tightening a nut 7 to a bolt 6 inserted through the through hole 5.

FIG. 15 shows another structural example of a conventional sealing device, in which the orifice plate 8 is formed to have the same outer diameter as the joining flange 4, a through hole 8a is provided in the part through which the bolt 6 passes, and a vacuum container is provided. This structure differs from the structural example shown in FIG. 13 in that a mounting groove 9 for a vacuum sealing gasket 2 is formed on the end face of the joining flange 4 provided in FIG. Since the vacuum sealing gasket 2 is fitted into the mounting groove 9 and the bolt 6 is inserted into the through hole 8a, positioning of the vacuum sealing gasket 2 and the orifice plate 8 is easy.

In this way, the orifice plate 1.8 does not have a structure in which it is integrally joined to the vacuum vessel 3 by welding or the like, but as shown in FIGS. 13 and 15.
As shown in the figure, since the structure is such that it is detachably attached between the joining flanges 4.about.4, the diameter of the orifice hole 1a can be easily changed by simply replacing the orifice plates 1 and 8.

However, according to Hiragizo, one orifice plate 1
, 8, a total of two vacuum sealing gaskets 2 are attached, one on each side, so there is a high possibility that fluid will leak.

In addition, in order to attach the orifice plates 1 and 8 to the vacuum vessel 3, the mounting interval ρ provided between the joining flanges 4 and 4 is as follows.
At the minimum, a dimension that is the sum of the thickness 11 of the orifice plate 1.8 and a value 212 twice the thickness fJ2 of the vacuum sealing gasket 2 is required.

Therefore, as the number of orifice plates 1.8 used increases, the ratio of the mounting interval ρ to the total volume of the vacuum device increases, and the device volume inevitably increases.

In addition, when the vacuum sealing gasket 2 is made of metal,
Compared to non-metallic gaskets, it has higher rigidity and stronger repulsive force, so a greater tightening force is required when fixing it.
The tightening torque applied to poles 1-6 becomes extremely large. For example, when fixing two vacuum sealing gaskets 2, the tightening torque applied to the bolts 6 is twice that in the case of one gasket.

This tightening is usually done by increasing the diameter of the bolt 6 or by increasing the number of bolts 6 to reduce the torque. However, depending on usage conditions, the bolt 6 may stretch and cause a leak.

Especially in vacuum equipment, in order to increase the degree of vacuum,
A baking process is performed, but during this heat process, the bolt 6 thermally expands and there is a high possibility that a leak will occur.

Therefore, as shown in Figures 17 and 18, Pol 11
Sealing devices that reduce the tightening load applied to the seal have also been put into practical use.

The seal arrangement δ shown in FIG. 17 has an orifice hole 1a in the center.
It is composed of an orifice plate 10 having a hole therein, an outer periphery 7 flange 11 integrally attached to the outer periphery of the orifice plate 10, and vacuum sealing gaskets 2 disposed on both sides of the outer periphery flange 11.

A bolt 6 is attached to the joint flange 4 attached to the end of the vacuum container 3.
A through hole 5 is bored therein, and screw holes 11a are bored in both sides of the outer peripheral flange 11. The orifice plate 10 is
It has a structure in which it is fixed from both sides of the outer periphery 7 flange 11 by bolts 6 passed through the joint 7 flange 4.

According to the above structure, the bolt 6 has a structure in which one vacuum sealing gasket 1-2 is tightened and fixed, and the tightening torque applied to the bolt 6 is reduced to about half compared to the conventional one. Therefore, the bolt 6 does not elongate much, and the risk of leakage is eliminated.

However, there are many difficulties in terms of workability in film deposition operations.

That is, when attaching and detaching the orifice plate 10 from the vacuum vessel 3, it is necessary to attach and detach both groups of bolts 6 that fix each vacuum sealing gasket 2, and the amount of work is twice that of the conventional method.

Furthermore, the minimum required mounting interval g for mounting the orifice plate 10 is the sum of the thickness jt3 of the outer peripheral flange 11 and twice the thickness 12 of the vacuum sealing gasket 2. In this case, the installation interval ρ is shown in Fig. 13, 1.
Compared to the case shown in FIG. 5, the value is large, and the disadvantage is that the vacuum equipment used will inevitably become larger.

The sealing device shown in FIG. 18 is a modification of FIG. 17, and has a structure in which two outer peripheral flanges 12 are separately arranged around the outer periphery of an orifice plate 10 in which an orifice hole 1a is formed. A through hole 12a for inserting a bolt 6 is formed on the circumference of each outer circumference 7 flange 12, and this outer circumference flange 1
2 is integrally fixed to a joining flange 4 provided at the end of the vacuum container 3 with a bolt 6 and a nut 7, with a vacuum sealing gasket 2 sandwiched therebetween.

In the sealing device having the above structure as well, the tightening load applied to the bolt 6 can be reduced similarly to the sealing device not shown in FIG. However, the M removal operation is similarly troublesome.

Furthermore, the minimum installation interval 1 required for installing the sealing device is the sum of the face-to-face distance a114 of the outer circumference 7 flange 12 and twice the thickness j2 of the vacuum sealing gasket. This has the disadvantage that the size of the device cannot be avoided.

Next, an example of the structure of a sealing device for fixing a diaphragm vacuum gauge and a rupture disk as a flow path resistor having a structure similar to the above-mentioned orifice plate is shown in FIGS. 19 and 20, respectively. Explain with reference to.

The sealing device shown in FIG. 19 consists of a diaphragm 13 disposed between joint flanges 4°, a sealing plate 14 integrally attached to the outer periphery of the diaphragm 13, and a sealing plate 14 interposed on both sides of the sealing plate 14. It has a vacuum sealing gasket 2. The diaphragm 13 is fixed integrally by bolts 6 and nuts 7 to joint flanges 4.4 attached to the vacuum vessels 15a, 15b. Further, the vacuum container 15a is connected to an evacuation device such as a vacuum pump (not shown) via a connection 7 flange 16a, and the evacuation device connects the vacuum container 15a.
The interior is maintained at a predetermined standard odor level.

On the other hand, the vacuum container 15b is connected via a connecting flange 16b to a vacuum device (not shown) whose degree of vacuum is to be measured. Then, by measuring the displacement ω of the diaphragm 13, the differential pressure applied to the diaphragm 13 is determined, and the degree of vacuum of the vacuum device connected to the vacuum container 15b is measured.

The sealing device shown in FIG. 20 uses a rupture plate 17 as a flow path resistor and connects flanges 4 and 4 of vacuum vessels 18a and 18b.
It is arranged and configured in between. The rupture disc 17 has vacuum sealing gaskets 2 on both sides thereof, is fastened with a pole 1-6 and a nut 7, and is integrally fixed to the vacuum vessels 18a and 18b.

Here, the vacuum container 18a is connected to a vacuum device such as a semiconductor manufacturing device (not shown) that handles harmful gases and radioactive gases, while the vacuum container 18b is connected to a gas processing system (not shown) that processes the harmful gases, etc. .

If the pressure inside the vacuum container 18a suddenly rises and exceeds a predetermined value due to an erroneous operation, the rupture disc 17 is destroyed by the pressure of the harmful gas, etc., and the harmful gas passes through the vacuum container 18b as shown by the arrow. , guided to the gas treatment system.

(Problems to be Solved by the Invention) The orifice plate, diaphragm, and diaphragm shown in FIGS. 13 to 20 above,
In conventional sealing devices that airtightly attach flow path resistors such as rupture discs to equipment piping systems, a total of two sealing gaskets are attached to each flow path resistor, one on each side. Due to its structure, there is a high possibility of leaks occurring from the mounting surface.

Furthermore, in order to install the flow path resistor in the equipment piping system, a mounting interval is required that is equal to the thickness of the flow path resistor plus the thickness of the vacuum sealing gaskets attached to both sides of the flow path resistor. Therefore, as the number of flow path resistors used increases, the volume ratio of the installation interval to the total volume of the equipment piping system increases, making it difficult to increase the size of equipment such as vacuum equipment.
<It turns out.

If the sealing gasket that is inserted on both sides of the flow path resistor is made of metal, the repulsion force is greater than that of a non-metallic gasket, so it is necessary to use a fixing gasket to fix the sealing gasket. It is necessary to apply a huge tightening load to the bolt.

Therefore, when simultaneously tightening and fixing the vacuum sealing gaskets interposed on both sides, the tightening torque is twice as much as when only one gasket is used. Since such a strong tensile force is generated within the bolt, there is a high possibility that the fixing bolt will stretch, particularly during baking treatment where it is heated to a high temperature, and leakage will occur from the seal portion.

In addition, if a structure is adopted in which each vacuum sealing gasket is fixed with a group of bolts on each side of the flow path resistor, the tightening torque per bolt will be reduced, but when the sealing device is coated, The number of bolts attached to IB2 is doubled,
The disadvantage is that the attachment/detachment operation is very complicated. Furthermore, there is a problem in that the installation interval of the sealing devices increases, the capacity of the devices and equipment used increases, and equipment costs rise.

The present invention was made to solve the above problems, and is a sealing device for airtightly and removably attaching a flow path resistor such as an orifice plate, diaphragm, or rupture disk to equipment, and is particularly suitable for sealing. To provide a sealing device which can prevent the occurrence of leakage by reducing the number of gaskets used, can be made smaller by reducing the installation space, and can be easily attached and detached when replacing a flow path resistor. The purpose is to

[Structure of the invention]

(Means for Solving the Problems) In order to achieve the above object, the present invention is removably interposed in a joint 7 flange in a device or piping system to regulate fluid flow in the system or to control fluid flow in the system. Orifice plate that detects pressure,
In a sealing device comprising a flow path resistor such as a diaphragm or a lubricant P-disc, and a sealing gasket that prevents fluid from leaking from a gap between the flow path resistor and a joining flange and maintains airtightness, the flow path is A feature is that a sealing gasket is integrally formed on the outer periphery of the resistor.

(Function) According to the sealing device having the above configuration, since the sealing gasket is integrally formed on the outer periphery of the flow path resistor, the number of sealing gaskets used can be reduced to half of the conventional number. Therefore, the occurrence of leakage from the contact surface of the sealing gasket can be significantly reduced.

Furthermore, since it is possible to reduce the tightening torque applied to the bolts that airtightly fix the sealing gasket, it is possible to effectively prevent leakage caused by elongation of the bolts.

Since the flow path resistor and the sealing gasket are integrally formed in advance, it is easy to position the flow path resistor at a fixed location, and the replacement and attachment/detachment operations of the flow path resistor are simplified.

In addition, since the installation interval is only the width of the sealing gasket, excellent effects such as the ability to downsize the equipment used are achieved.

(Example) Next, an example of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a sectional view showing an embodiment of a sealing device according to the present invention. Note that the same elements as in the conventional example shown in FIGS. 13 to 20 are given the same reference numerals, and detailed explanation thereof will be omitted.

The sealing device according to this embodiment includes an orifice plate 1 that is detachably installed in the joint 7 of the vacuum container 3 and the flanges 4, 4, and serves as a flow path resistor that regulates the fluid flow rate in the system and detects pressure.
9 and a sealing gasket 20 that prevents leakage of fluid from the gap between the orifice plate 19 and the joining flange 4 and maintains airtightness. A sealing gasket 20 is integrally formed with the main body. Orifice plate 1
An orifice hole 1a is bored in the center of the hole 9, and a joint 21 between the orifice plate 19 and the sealing gasket 20 is formed by welding, brazing, or adhesive.

Generally, when the sealing gasket 20 is made of metal, it is formed by welding or brazing, and when it is made of non-metal, an adhesive or the like is used.

When fixing this orifice plate 19 to the vacuum container 3,
A sealing gasket 20 joined to the outer periphery of the orifice plate 19 via a joint 21 is inserted between the joint flanges 4.4, and the joint flange 4.4 is connected to the bolt 6 and nut 7.
Concluded.

At this time, with the sealing gasket I.20 tightened,
It goes without saying that the thickness of the orifice plate 19 is set so that the orifice plate 19 and the joint 7 flange 4 do not interfere with each other.

According to the sealing device according to this embodiment, only one sealing gasket 20 is required when mounting one orifice plate 19. That is, the number of sealing gaskets 1-20 used can be halved compared to the conventional one, so the possibility of leakage is significantly reduced.

Furthermore, since the tightening torque applied to the bolt 6 during installation can be reduced, the occurrence of leakage due to elongation of the bolt 6 during baking treatment can be avoided.

Furthermore, since the orifice plate 19 and the sealing gasket 20 are integrally formed, handling is easy and attachment/detachment operations can be simplified.

Also, the mounting interval of the orifice plate 19 is determined by the thickness of the sealing gasket 20! Since it is only J2 and is significantly smaller than the conventional sealing device, the sealing device itself and the vacuum device used can be downsized.

3 and 4 show an example in which the orifice plate 19a and the sealing gasket 20a are integrally molded without forming a joint between them. The orifice plate 19a and the sealing gasket 20a are manufactured, for example, by cutting out a single piece of material, or by pressing, rolling using a mold, casting, or the like.

The effects of this embodiment are similar to those of the embodiment shown in FIG. However, in this embodiment, the orifice plate 19a and the sealing gasket 20a are integrally formed, which has the advantage that the bonding strength between the two is significantly increased.

Next, an embodiment of a sealing device according to the present invention constructed by integrally joining a currently used vacuum sealing gasket and an orifice plate will be described with reference to FIGS. 5 to 10.

FIG. 5 shows an example in which an O-ring 22 made of a hollow metal is integrally joined to the outer periphery of an orifice plate 19 with an orifice hole 1a formed in the center via a joint 21. FIG. 6 shows an example in which a sealing gasket 25 with a pure aluminum sealing plate 24 interposed on the outside of the coil spring 23 is integrally joined to the outer periphery of the orifice plate 19.

FIG. 7 shows an example in which an aluminum gasket 26 made of pure aluminum and having a rectangular cross section is bonded to the outer periphery of the orifice plate 19.

Gold FSp of the O-ring 22, sealing gasket 25, aluminum gasket 26, etc. shown in FIGS. 5 to 7
When joining the orifice plate 19 to the # vacuum sealing gasket 2, the joining portion 21 can be formed by welding, brazing, or the like.

Therefore, the material of the orifice plate 19 does not necessarily have to be the same as the material of the vacuum sealing gasket 2.

FIG. 8 is a cross-sectional view showing a state in which an integral body in which an aluminum gasket 26 is bonded to the outer periphery of the orifice plate 19 shown in FIG. A knife 27 formed with a hardened film is provided on the end face of the joining flange 4°4. Connect the joint flanges 4, 4 with the integral part sandwiched between them with the bolts 6 and nuts 7.
When tightened, the knife 27 bites into the side surface of the aluminum gasket 26 and the vacuum state is maintained more completely.

FIG. 9 shows a vacuum sealing gasket 28 formed of a non-metallic material such as fluoro rubber, which is attached to an orifice plate 1.
An example is shown in which the outer periphery of 9 is integrally joined. In this case, the joint 21 between the vacuum sealing gasket 28 and the orifice plate 79 is made of adhesive.

FIG. 10 shows an embodiment in which the orifice plate 19 and the vacuum sealing gasket l-28a on its outer periphery are integrally formed of the same material. The sealing device according to this embodiment can be easily manufactured by cutting a flat plate material, pressing using a mold, rolling, or the like.

FIG. 11 shows a sealing device according to the present invention at a distance Il! l! An example in which the present invention is applied to a diaphragm 13 of a vacuum gauge is shown. A sealing gasket 20b is attached to the outer periphery of the diaphragm 13 via the joint 21.
are joined.

In this example as well, the distance is one sheet! ! ! There is only one sealing socket 20b used to airtightly fix J13. Therefore, the occurrence of leakage from the sealing gasket 20b is small, and the intervals between the sealing gaskets 20b are narrow, making it easy to handle and making it possible to downsize the equipment used.

Further, FIG. 12 is a sectional view showing an example in which the sealing device according to the present invention is applied to a rupture disc 17 as a flow path resistor. A sealing gasket 20c is integrally joined to the outer periphery of the rupture disc 17 via a joint 21.

Also in this embodiment, the rupture disc 17 has a structure in which it is airtightly fixed by one sealing gasket 1 to 20c, so that the same effect as in the embodiment shown in FIG. 11 is achieved.

Note that the sealing device according to the present invention is not limited to use as a seal for a flow path resistor disposed in a device used in a vacuum state as disclosed in the embodiments above. That is, as shown in FIG. 12, the present invention can be similarly applied to a device piping system having a pressure equal to or higher than atmospheric pressure, such as a rupture disc 17 disposed in an emergency release piping system.

〔Effect of the invention〕

As explained above, according to the sealing device according to the present invention, since the sealing gasket is integrally formed on the outer periphery of the flow path resistor, the number of sealing gaskets used can be reduced to half of the conventional one. can. Therefore, the occurrence of leakage from the contact surface of the sealing gasket can be significantly reduced.

Furthermore, it becomes possible to reduce the tightening torque applied to the bolts that fix the sealing gasket, and it is possible to effectively prevent the occurrence of leakage due to the elongation of the ports 1 to 1.

Since the flow path resistor and the sealing gasket are integrally formed in advance, it is easy to position the flow path resistor at a fixed location, and the replacement and attachment/detachment operations of the flow path resistor are simplified.

In addition, since the installation interval is only the width of the sealing gasket, excellent effects such as the ability to downsize the equipment used are achieved.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the sealing device according to the present invention, and FIG. 2 is a sectional view taken along the line II-[arrow in FIG.
The figure is a cross-sectional view of a sealing device constructed by integrally manufacturing an orifice plate and a sealing gasket, Figure 4 is a cross-sectional view of the fV-IV arrow in Figure 3, and Figure 5 is a hollow metal '74
6 is a sectional view showing a state in which the O-ring and orifice plate are joined together, Figure 6 is a sectional view showing a state in which a sealing sket is joined to the outer periphery of the orifice plate, and Figure 7 is a sectional view showing the state in which an aluminum gasket is joined to the outer periphery of the orifice plate. Fig. 8 is a cross-sectional view showing the state in which the aluminum gasket shown in Fig. 7 is attached to a vacuum vessel, and Fig. 9 is a state in which a non-metallic sealing gasket is bonded to the outer periphery of the orifice plate. 10 is a sectional view showing a sealing gasket and an orifice plate integrally formed with the same thickness. FIG. 11 is a sectional view showing a sealing device according to the present invention applied to a diaphragm of a diaphragm vacuum gauge. 12 is a cross-sectional view showing an example in which the sealing device according to the present invention is applied to a rupture disc; FIG. 13 is a cross-sectional view showing the structure of a conventional sealing device;
14 is a side view of X rV -X IV in FIG. 13, FIG. 15 is a sectional view showing another structural example of a conventional sealing device, and FIG. 16 is a side view of
vr arrow side view, Figure 17 shows 1 on the outer periphery of the orifice plate.
FIG. 18 is a sectional view of a conventional seal device configured with two outer peripheral flanges provided on the outer periphery of an orifice plate, and FIG. 19 is a conventional seal device configured with seven outer peripheral flanges. FIG. 20 is a cross-sectional view of a sealing device using a conventional vacuum sealing gasket as a rupture plate. FIG. 1... Orifice plate, 1a... Orifice hole, 2...
... Vacuum sealing gasket, 3... Vacuum container, 4.
...Joining 7 lange, 5...Through hole, 6...Bolt,
7... Oak 1-18... Orifice plate, 8a...
Through hole, 9...Mounting groove, 10...Orifice plate, 1
1...Outer circumference 7 langes, 11a...screw holes, 12...
- Outer flange, 12a... Through hole, 13... Diaphragm, 14... Seal plate, 15a. 15b... Vacuum container, 16a, 16b... Joint flange, 17... Rupture disc, 18a, 18b... Vacuum container, 19.198-... Orifice plate, 20.20a,
20b, 20C...Sealing gasket, 21...
Joint part, 22... O-ring, 23... Coil spring, 24... Seal plate, 25... Sealing gasket, 26... Aluminum gasket, 27...
・Nifetsuji, 28.288... Vacuum sealing gasket, 1... Installation interval, pl... Orifice plate thickness, 1□... Vacuum sealing gasket thickness, 13
...Thickness of outer circumference 7 flange, fJ4... Distance between surfaces of outer circumference flange. Applicant's agent Hisashi Hatano Figure 1 Figure 2 Figure 3 Figure 12 Figure 17 Figure 18 Figure 19 Figure 20

Claims (1)

[Claims] A flow path resistor such as an orifice plate, diaphragm, or rupture disk that is removably installed on a joint flange in a device or piping system to regulate the fluid flow rate in the system or detect the pressure in the system, and a flow path In a sealing device equipped with a sealing gasket that prevents leakage of fluid from the gap between the resistor and the joining flange and maintains airtightness, the sealing gasket is integrally formed on the outer periphery of the flow path resistor. Features a sealing device.