JP2009255188A - Polishing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus improving flatness of the surface of a polishing member. <P>SOLUTION: This polishing apparatus is provided with a polishing unit 50 for polishing the surface of the polishing member held by a retaining mechanism to correct the flatness of the surface. The polishing unit 50 is composed of: a dressing head portion 110 partially polishing the surface of the polishing member; a measurement section 90 measuring the surface shape of the polishing member, a horizontal movement mechanism 60 moving the dressing head portion 110 in a horizontal direction substantially parallel to the surface of the polishing member; and a control section controlling the operation of the horizontal movement mechanism 60 so as to move the dressing head portion 110 in response to the surface shape measured by the measurement section 90. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a polishing apparatus for polishing a surface of a plate member such as a glass plate.

  A polishing apparatus for polishing the surface of a glass plate is configured to polish both surfaces of a glass plate by bringing a pair of polishing members disposed so as to face each other into contact with each other and rotating relative to each other. Is known (see, for example, Patent Document 1). In such a polishing apparatus, it is necessary to flatten the surface of the polishing member in order to polish the surface of the glass plate flatly. For example, in a polishing apparatus that polishes both sides of a large glass, the glass plate is moved up and down. As a method of flattening the sandwiched disc-shaped polishing member (hereinafter referred to as the upper plate and the lower plate), the surface of the lower plate attached to the apparatus is ground using a correction plate having a plate diameter of about half. A method of correcting the flatness and a method of removing the upper and lower dishes from the apparatus and grinding the surface of each dish with a dedicated grinding apparatus (for example, a rotary grinder) to correct the flatness are employed.

In addition, when correcting the flatness of the surface of the lower plate using the correction plate, the lower plate is rotated while the correction plate is in contact with the surface of the lower plate, and corrected using the frictional force with the lower plate. The surface of the lower plate is ground and the flatness is corrected by so-called “rotating” for rotating the plate and rotating the correction plate and the lower plate together.
JP 2001-30151 A

  However, when the flatness of the surface of the lower plate is corrected using the correction plate, for example, the position of the correction plate is fixed, so that it is not possible to selectively apply the polishing pressure to the convex portion of the lower plate surface. It was difficult to increase the flatness of the surface. In addition, when the flatness of the lower plate surface is corrected by a dedicated grinding device, the upper and lower plates removed from the device are attached again, so that the flatness immediately after grinding is not always obtained due to an attachment error or the like.

  This invention is made | formed in view of such a problem, and it aims at providing the grinding | polishing apparatus which can improve the flatness of the surface of a grinding | polishing member.

  In order to achieve such an object, a polishing apparatus according to the present invention includes a polishing member capable of polishing a surface of a plate member, and a holding mechanism that holds the polishing member, and the polishing member held by the holding mechanism In a polishing apparatus configured to polish the surface of the plate member by grinding the surface of the polishing member held by the holding mechanism. A grinding unit for correcting the flatness of the surface, the grinding unit being capable of partially grinding the surface of the polishing member, a measuring unit for measuring the surface shape of the polishing member, and the grinding tool A movement mechanism for moving the polishing tool in a direction substantially parallel to the surface of the polishing member, and a control for controlling the operation of the movement mechanism to move the polishing tool in accordance with the surface shape measured by the measurement unit Configured to have a door.

  According to the present invention, it is possible to improve the flatness of the surface of the polishing member.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. A schematic configuration of a polishing apparatus 1 to which the present invention is applied is shown in FIG. The polishing apparatus 1 includes a carrier support mechanism 20 that supports the side surface of the carrier 15, a polishing head mechanism 30 that polishes the glass plate 10 held by the carrier 15, and a surface 31 a of an upper plate 31 that constitutes the polishing head mechanism 30. An upper plate grinding unit 40 (see FIG. 2) for grinding and a lower plate grinding unit 50 (see FIG. 2) for grinding the surface 36a of the lower plate 36 constituting the polishing head mechanism 30 are mainly configured.

  As shown in FIG. 2, the carrier 15 for transporting the glass plate 10 includes a frame member 16 and a holding member 17. The frame member 16 is made of a metal material such as stainless steel and the outer peripheral portion is formed into a substantially circular frame plate shape, and the holding member 17 is attached to the inside of the frame member 16. The holding member 17 is formed in a plate shape having a rectangular hole at the center using a highly flexible resin material, and the glass plate 10 is fitted in the hole formed in accordance with the shape of the glass plate 10. To be held. The glass plate 10 thus held by the carrier 15 is placed on the surface 36a of the lower plate 36 together with the carrier 15 by a conveying device (not shown), and the side surface of the carrier 15 is supported by the carrier support mechanism 20 in this state. The The frame member 16 and the holding member 17 are formed to be thinner than the glass plate 10.

  As shown in FIG. 2, the carrier support mechanism 20 includes three guide rollers 21, 22, and 23 and one drive roller 24 that are arranged at equal intervals (90-degree intervals) with respect to the carrier 15. And the side surfaces of the carrier 15 are supported by the rollers 21 to 24. The driving roller 24 is connected to a roller motor 25 and is rotated by receiving the rotational driving force of the roller motor 25. And the rotational driving force with respect to the driving roller 24 is transmitted to the carrier 15 using the frictional force between the carrier 15 and the driving roller 24, and thereby the rotational driving force of the driving roller 24 (roller motor 25) is reduced. Utilizing the carrier 15, that is, the glass plate 10 placed on the surface 36a of the lower plate 36 is rotationally driven.

The polishing head mechanism 30 includes a pair of upper and lower upper plates 31 and 36 that can polish the upper surface and the lower surface of the glass plate 10 respectively, and an upper plate holding unit that holds the upper plate 31 and the lower plate 36 so as to face each other. 32 and the lower dish holding part 37 are comprised mainly. The upper plate 31 is formed in a disk shape using a high-rigidity material such as ceramics, and the surface 31a of the upper plate 31 serving as a polishing surface has high flatness. The upper plate holding part 32 is provided above the lower plate holding part 37, and holds the upper plate 31 so that the surface 31a of the upper plate 31 faces downward. The upper plate holding part 32 is connected to the upper spindle 33 so as to be rotatable, and the upper plate 31 can be rotated and moved up and down together with the upper plate holding part 32.

  The lower plate 36 is formed in a disk shape using a high-rigidity material such as ceramics, and the surface 36a of the lower plate 36 serving as a polishing surface has high flatness. The lower dish holding part 37 is provided below the upper dish holding part 32, and holds the lower dish 36 so that the surface 36a of the lower dish 36 faces upward. Further, the lower plate holding part 37 is connected to the lower spindle 38 and is configured to be rotatable, and the lower plate 36 can be rotated together with the lower plate holding part 37.

  And the glass plate 10 hold | maintained at the carrier 15 is mounted in the surface 36a of the lower pan 36 with the conveying apparatus which is not shown in figure, the upper pan 31 hold | maintained at the upper pan holding part 32 is moved below, and the upper pan 31 and The lower plate 36 is brought into contact with both surfaces (upper surface and lower surface) of the glass plate 10, and the carrier roller (glass plate 10) is rotated by rotationally driving the driving roller 24 of the carrier support mechanism 20 that supports the side surface of the carrier 15. Thus, both surfaces of the glass plate 10 are polished. At this time, an abrasive or a polishing liquid is supplied to the contact portion between the upper plate 31 and the lower plate 36 and the glass plate 10 by an unillustrated abrasive supply device.

  In the polishing apparatus 1 in which both surfaces of the glass plate 10 are polished in this way, the surface 31a of the upper plate 31 held by the upper plate holding unit 32 by the upper plate grinding unit 40 is ground to obtain the flatness of the surface 31a. In addition to correction, the surface 36a of the lower plate 36 held by the lower plate holding unit 37 by the lower plate grinding unit 50 is ground to correct the flatness of the surface 36a. Therefore, the lower dish grinding unit 50 will be described below with additional reference to FIGS. The upper plate grinding unit 40 has the same configuration as that of the lower plate grinding unit 50 except that the upper and lower directions thereof are reversed, and detailed description thereof will be omitted.

  Now, as shown in FIG. 4, the lower dish grinding unit 50 includes a casing 51, a control device 55 (see FIG. 3), a horizontal movement mechanism 60, a dress elevating mechanism 70, a measuring unit 90, The dress rotation mechanism 100, the dress head unit 110, the water supply device 130, and the air supply control unit 140 are mainly configured. The casing 51 is formed in a box shape that is long in the horizontal direction with the lower side open. Further, as shown in FIG. 3, the casing 51 is disposed on the side of the lower plate holding unit 37 (and the carrier support mechanism 20), and when the lower plate 36 is ground, the operation control of the control device 55 is performed. Thus, the casing 51 that is always located at a predetermined retraction position is swung above the lower plate 36 by using a swing mechanism (not shown). At this time, the front end side of the housing part 51 extends in the radial direction from the vicinity of the center part of the lower plate 36, and the horizontal movement of the dress head unit 110 described later and the rotational movement of the lower plate 36 are combined. Thus, the entire surface 36a of the lower plate 36 can be ground.

  A tilt adjustment screw 52 is provided at the distal end of the casing 51, and the casing 51, that is, lower plate grinding, is centered on a swinging central axis 53 provided at the base end of the casing 51. The vertical inclination (horizontal level) of the unit 50 can be adjusted. At this time, the first dial gauge 57 and the second dial gauge 58 are attached to the lower portion of the front end side of the housing portion 51. For example, the first and second dial gauges 57 and 58 are respectively attached to the lower plate 36. The vertical inclination (horizontal level) of the lower plate grinding unit 50 is adjusted based on the amount of displacement measured by contacting the surface 36a.

  The horizontal movement mechanism 60 mainly includes a traveling shaft 61 disposed inside the housing 51, a traveling body 62 screwed to the traveling shaft 61, and a traveling shaft motor 64 that rotationally drives the traveling shaft 61. The dress head unit 110 connected to the traveling body 62 is horizontally moved along the traveling axis 61 (that is, moved in a direction substantially parallel to the surface 36a of the lower plate 36). The traveling shaft 61 is a so-called ball screw, and is attached so as to be rotatable around the central axis of the traveling shaft 61 from the vicinity of the distal end portion of the housing portion 51 to the base end portion. The traveling shaft 61 extends substantially parallel to the casing 51. A travel shaft driven pulley 63 is attached to the tip of the travel shaft 61.

  The traveling body 62 is screwed with the traveling shaft 61, and moves horizontally (reciprocally) according to the rotation of the traveling shaft 61. The traveling body 62 is connected to the elevating base member 71 of the dress elevating mechanism 70, thereby horizontally moving the dress head unit 110 connected via the dress elevating mechanism 70 and the dress rotating mechanism 100 along the traveling axis 61. It becomes possible. In addition, a measuring unit 90 is connected to the traveling body 62 so that the contact-type displacement sensor 91 of the measuring unit 90 can be moved horizontally together with the dress head unit 110.

  The travel shaft motor 64 is attached to the inside of the casing 51, and the travel shaft speed reducer 65 is connected to the rotation shaft of the travel shaft motor 64, and the travel shaft speed reducer 65 is connected to the output shaft. A travel shaft drive pulley 66 is coupled. A belt is wound between the travel shaft drive pulley 66 and the travel shaft driven pulley 63, and the rotational drive force of the travel shaft motor 64 causes the travel shaft speed reducer 65, the travel shaft drive pulley 66, and the travel shaft. The travel shaft 61 is transmitted to the travel shaft 61 via the driven pulley 63, and the travel shaft 61 is rotationally driven by the travel shaft motor 64. The travel axis origin detection sensor 67 for detecting the origin position on the travel axis 61 of the dress head portion 110 connected to the travel body 62 and the dress head portion 110 (the travel body 62) are the distal end portion and the proximal end of the travel shaft 61. Travel axis limit sensors 68 and 69 for detecting whether or not the vehicle has reached the center are attached to the inside of the casing 51.

  The dress elevating mechanism 70 includes an elevating base member 71 connected to the traveling body 62 of the horizontal moving mechanism 60, two elevating ball screws 72 and 75 attached to the elevating base member 71, elevating ball screws 72 and 75, and screws. The elevating member 77 and the elevating motor 78 that rotationally drives the elevating ball screws 72 and 75 are mainly configured, and the dress head portion 110 connected to the elevating member 77 is moved up and down along the elevating ball screws 72 and 75. It is like that. The elevating base member 71 is formed in a box shape, and is connected to the traveling body 62 of the horizontal movement mechanism 60 so as to be horizontally movable.

  Each of the two lifting ball screws 72 and 75 is rotatably mounted inside the lifting base member 71. At this time, the elevating ball screws 72 and 75 are directed in the vertical direction so as to be parallel to each other. A first elevating driven pulley 73 is attached to the lower end portion of the first elevating ball screw 72, and a drive transmission pulley 74 is attached to the upper end portion of the first elevating ball screw 72. A second elevating driven pulley 76 is attached to the upper end portion of the second elevating ball screw 75, and a belt is wound between the second elevating driven pulley 76 and the drive transmission pulley 74.

  The elevating motor 78 is attached to the elevating base member 71, and the elevating speed reducer 79 is connected to the rotating shaft of the elevating motor 78, and the elevating drive pulley 80 is connected to the output shaft of the elevating speed reducer 79. Connected. A belt is wound between the elevating drive pulley 80 and the first elevating driven pulley 73, and the rotational driving force of the elevating motor 78 is used as the elevating speed reducer 79, the elevating drive pulley 80, and the first elevating / lowering pulley. The first elevating ball screw 72 is transmitted to the first elevating ball screw 72 via the driving pulley 73 and the second elevating ball screw 75 is transmitted to the second elevating ball screw 75 via the drive transmitting pulley 74 and the second elevating driven pulley 76. The first and second lifting ball screws 72 and 75 are driven to rotate by 78. The lift origin sensor 81 for detecting the origin position on the lift ball screws 72 and 75 of the dress head portion 110 connected to the lift member 77 and the dress head portion 110 (the lift member 77) of the lift ball screws 72 and 75. Elevating limit sensors 82 and 83 for detecting whether or not the upper end portion and the lower end portion have been reached are attached to the elevating base member 71.

  The measuring unit 90 is mainly composed of a contact-type displacement sensor 91 that measures the height of the surface 36 a of the lower plate 36 and an elevating cylinder 92 that raises and lowers the contact-type displacement sensor 91. The contact-type displacement sensor 91 measures the height of the surface 36a of the lower plate 36 by bringing the probe provided at the tip into contact with the surface 36a of the lower plate 36, and sends the measurement signal to the control device 55 (see FIG. 3). Output). The elevating cylinder 92 is a so-called air cylinder, the rod portion of which is connected to the contact type displacement sensor 91 via the connecting member 93, and raises and lowers the contact type displacement sensor 91 using air pressure. Therefore, the piping of the elevating cylinder 92 is connected to the cylinder drive valve 152 of the air supply control unit 140 via the speed controllers 94 and 95. The elevating cylinder 92 is connected to the traveling body 62 of the horizontal movement mechanism 60, and is configured to be able to move the contact displacement sensor 91 together with the dress head 110. In addition, elevating limit sensors 96 and 97 for detecting whether or not the contact-type displacement sensor 91 has reached a predetermined ascending position and descending position are built in the elevating cylinder 92.

  The dress rotation mechanism 100 is mainly composed of a spindle 101 rotatably attached to an elevating member 77 of the dress elevating mechanism 70, and a rotation motor 104 that rotationally drives the spindle 101, and is connected to a lower end portion of the spindle 101. The dress head portion 110 is rotated. The spindle 101 is formed in a hollow cylindrical shape, is rotatably attached to an elevating member 77 of the dress elevating mechanism 70, and is configured to be elevate together with the elevating member 77.

  A dress head portion 110 is connected to a lower end portion of the spindle 101, and an air passage for supplying and discharging air to the inside of the dress head portion 110 (a pressure chamber H described later) is formed inside the spindle 101. On the other hand, a rotary joint 103 is attached to the upper end portion of the spindle 101 and is connected to the pressurizing pipeline 141 of the air supply control unit 140. A driven pulley for rotation 102 is attached near the center of the spindle 101.

  The rotation motor 104 is attached to the elevating member 77 of the dress elevating mechanism 70, and the rotation speed reducer 105 is connected to the rotation shaft of the rotation motor 104 and the output shaft of the rotation speed reducer 105 is rotated. Drive pulley 106 is coupled. A belt is wound between the rotation driving pulley 106 and the rotation driven pulley 102, and the rotation driving force of the rotation motor 104 is transmitted via the rotation reduction gear 105, the rotation driving pulley 106, and the rotation driven pulley 102. Is transmitted to the spindle 101, and the spindle 101 is rotationally driven by the rotation motor 104. A rotation detection sensor 107 that detects the rotation of the dress head unit 110 connected to the spindle 101 is attached to the elevating member 77.

  As shown in FIG. 5, the dress head unit 110 is mainly composed of a head housing 111 connected to the lower end of the spindle 101 and a grinding tool 121 provided so as to close the opening of the head housing 111. . The head housing 111 is mainly composed of a connecting portion 112 connected to the spindle 101, a plate portion 113 connected to the lower side of the connecting portion 112, and an outer ring 117 connected to the lower side of the plate portion 113. By these, it forms in the bottomed cylindrical shape opened to the lower side.

  The connecting portion 112 is formed in a disk shape having an opening at the center, and the lower end portion of the spindle 101 is connected to the upper center portion of the connecting portion 112. The opening of the connecting portion 112 is connected to the inside of the spindle 101, and air is supplied and discharged from the inside of the spindle 101 (air passage) to the inside of the head housing 111 (pressure chamber H described later). The plate portion 113 is formed in a disk shape having an opening at the center, and is connected to the lower side of the outer peripheral portion of the connecting portion 112. The outer ring 117 is formed in an L-shaped ring shape having an outer diameter equivalent to that of the plate portion 113, and is connected to the lower side of the outer peripheral portion of the plate portion 113. A plurality of guide pins 118 are attached to the bottom of the outer ring 117 so as to face upward.

  An inner ring 114 is attached to the inner side of the outer ring 117 below the plate portion 113, and the outer peripheral side of the diaphragm 116 is sandwiched between the fixing ring 115 attached to the inner upper surface of the inner ring 114. . The diaphragm 116 is formed in a disk shape using a highly elastic resin material such as rubber, and the outer peripheral side of the diaphragm 116 is sandwiched between the inner ring 114 and the fixing ring 115, and the inner peripheral side is the upper part of the grinding tool 121. It is sandwiched between the plate 122 and the lower plate 123. Accordingly, a pressure chamber H is formed in the head housing 111 surrounded by the head housing 111, the grinding tool 121, and the diaphragm 116. The grinding tool 121 can reciprocate in the vertical direction (direction toward the surface 36 a of the lower plate 36) by receiving the air pressure in the pressure chamber H at the center upper surface of the grinding tool 121.

  The grinding tool 121 includes an upper plate 122, a lower plate 123 connected to the lower side of the upper plate 122, and a grinding member 125 connected to the lower side of the lower plate 123. The upper plate 122 is formed in a disk shape, and the inner peripheral side of the diaphragm 116 is sandwiched between the upper plate 122 and the lower plate 123. The lower plate 123 is formed in a disk shape having a larger outer diameter than the upper plate 122 and is connected to the lower side of the upper plate 122. The grinding member 125 is formed into a disk shape having a smaller outer diameter than the lower plate 123 using, for example, a ceramic material containing diamond abrasive grains, and is connected to the lower side of the lower plate 123. The surface (lower surface) of the grinding member 125 becomes a grinding surface for grinding the surface 36 a of the lower plate 36.

  A plurality of guide grooves 124 aligned with the guide pins 118 of the head housing 111 are formed on the outer peripheral portion of the lower plate 123, and the plurality of guide pins 118 attached to the outer ring 117 of the head housing 111 are respectively The guide groove 124 is engaged. As a result, the rotational driving force of the head housing 111 connected to the spindle 101 is transmitted to the grinding tool 121 via the guide pins 118 and the guide grooves 124. The guide groove 124 is formed to be slightly larger than the guide pin 118 so that the grinding tool 121 can follow (tilt) the shape of the surface 36a of the lower plate 36.

  As shown in FIG. 4, the water supply device 130 is a device that supplies cleaning water during grinding of the lower plate surface 36 a, and the water supply line 139 of the water supply device 130 is connected to the water supply source B in order from the upstream side. A master valve 131 that opens and closes the connecting passage, a regulator 132 that reduces the water pressure in the water supply line 139 to a desired water pressure, and a water supply valve 133 that opens and closes the water supply line 139 are provided. The water supply valve 133 receives the pressure of the air branched and supplied from the sensor pipe line 151 of the air supply control unit 140, opens the water supply pipe line 139, and supplies cleaning water. A water supply operation valve 155 that controls the opening / closing operation of the water supply conduit 139 by the water supply valve 133 is disposed in the conduit between the sensor conduit 151 and the water supply valve 133. In addition, the water supply valve 133 can adjust the flow rate of water passing through the water supply valve 133.

  The air supply control unit 140 includes a pressurization pipeline 141 that supplies air to the inside of the head housing 111 of the dress head unit 110, a sensor pipeline 151 that supplies air to the lift cylinder 92 of the measurement unit 90, and a measurement unit. When the height of the surface 36a of the lower plate 36 is measured by 90, it is configured to have three pipes of an air blow pipe 161 for supplying air that blows away moisture remaining on the surface 36a of the lower plate 36. The pressurizing conduit 141 is connected from the air supply source A to the inside of the head housing 111 via the spindle 101 (rotary joint 103). The pressurizing conduit 141 is connected to the air supply source A in order from the upstream side. A master valve 142 that opens and closes the connecting passage, a first regulator 143 that reduces the air pressure in the pressurizing pipe 141, a second regulator 144 that further reduces the air pressure in the pressurizing pipe 141, and a pressurizing control unit 145.

  The pressurization control unit 145 receives an air pressure control signal from the control device 55 (see FIG. 3), and controls the air pressure in the pressurization pipe line 141 to a predetermined air pressure, and the electropneumatic regulator 146. And an open / close valve 149 provided in the downstream pipe line. In addition, a pipe line between the electropneumatic regulator 146 and the open / close valve 149 has a first pressure sensor 147 that detects the air pressure in the pipe line and outputs it to the electropneumatic regulator 146, and the air pressure in the pipe line. A second pressure sensor 148 for preliminary detection is provided. The on-off valve 149 receives the pressure of the air branched and supplied from the downstream side of the second regulator 144, and always opens the pressurizing pipeline 141 and has a predetermined air pressure obtained by the electropneumatic regulator 146. Air is supplied into the head housing 111. On the other hand, when a predetermined drive signal is input from the control device 55, the open / close valve 149 closes the pressurizing conduit 141 and opens the inside of the head housing 111 to the atmospheric pressure, and pressurizes the head housing 111. Air is discharged to the outside. Therefore, the open / close valve 149 is provided with a silencer 149a that suppresses air exhaust noise.

  The sensor pipe 151 branches from the downstream side of the first regulator 143 in the pressurizing pipe 141 and is connected to the lift cylinder 92. The sensor pipe 151 is provided with a cylinder drive valve 152. . The cylinder driving valve 152 receives a switching signal from the control device 55 (see FIG. 3), and supplies the air from the sensor conduit 151 to either one of the two cylinder chambers in the elevating cylinder 92. . Thereby, the raising / lowering operation of the contact-type displacement sensor 91 by the raising / lowering cylinder 92 can be switched by switching the cylinder drive valve 152.

  The air blow conduit 161 branches off from the downstream side of the second regulator 144 in the pressurization conduit 141, and the air blow conduit 161 is provided with an opening / closing valve 162 that opens and closes the air blow conduit 161. Yes. The open / close valve 162 receives the pressure of the air that is branched from the sensor pipe 151 and opens the air blow pipe 161 to supply air that blows away the water remaining on the surface 36 a of the lower plate 36. It has become. An air blow operation valve 156 for controlling the opening / closing operation of the air blow conduit 161 by the opening / closing valve 162 is disposed in the conduit between the sensor conduit 151 and the opening / closing valve 162.

  In order to correct the flatness of the surface 36a by grinding the surface 36a of the lower plate 36 held by the lower plate holding unit 37 by the lower plate grinding unit 50 configured as described above, first, the control device 55 is used. With the operation control, the casing 51 located at a predetermined retraction position is swung above the lower plate 36 using a swing mechanism (not shown). At this time, when the dress head unit 110 is horizontally moved by the horizontal movement mechanism 60, the rotation axis of the dress head unit 110 is made to be coaxial with the central axis (rotation axis) of the lower plate 36. Accordingly, the dress head unit 110 and the measuring unit 90 (contact displacement sensor 91) are horizontally moved along the radial direction of the lower plate 36 by the horizontal movement mechanism 60. At this time, the tilt adjustment screw 52 is used to adjust the vertical tilt (horizontal level) of the casing 51, that is, the lower plate grinding unit 50.

  Next, while the measurement unit 90 is horizontally moved along the radial direction of the lower plate 36 by the horizontal movement mechanism 60, the height of the surface 36a of the lower plate 36 at a plurality of measurement positions by the contact-type displacement sensor 91 of the measurement unit 90. Measure. At this time, when the elevation cylinder 92 of the measuring unit 90 measures the height of the surface 36a of the lower plate 36 by the switching operation of the cylinder drive valve 152, the probe of the contact-type displacement sensor 91 is moved to the surface 36a of the lower plate 36. The contact-type displacement sensor 91 is lowered until it touches, and when the measurement is completed, the contact-type displacement sensor 91 is raised. Then, by repeating the above measurement while rotating the lower plate 36 held by the lower plate holding unit 37 by a predetermined angle, the height of the surface 36a of the lower plate 36 can be measured over the whole. The measurement signal of the contact type displacement sensor 91 is output to the control device 55, and the control device 55 is based on the height of the surface 36 a of the lower plate 36 at each measurement position measured by the contact type displacement sensor 91. The flatness and the inclination angle (from the horizontal) of the surface 36a are calculated.

  When the flatness of the surface 36a of the lower plate 36 is calculated, the control device 55 determines that the surface 36a of the lower plate 36 measured by the contact-type displacement sensor 91 when the calculated flatness does not reach the required flatness. In accordance with the height, for example, the operations of the horizontal movement mechanism 60, the dress raising / lowering mechanism 70, the lower plate holding portion 37, and the like are controlled so that the dress head portion 110 moves to a convex portion on the lower plate surface 36a. In order to grind and flatten the convex portion on the dish surface 36a, the operations of the dress rotating mechanism 100, the electropneumatic regulator 146, and the like are controlled, and the grinding tool 121 (grinding member 125) of the dress head portion 110 is rotated. Press the convex part. At this time, in order to flatten the surface 36 a of the lower plate 36, the rotation speed of the dress head unit 110 (grinding tool 121) by the dress rotating mechanism 100 and the air pressure supplied from the electropneumatic regulator 146 to the inside of the head housing 111 ( That is, the lower plate surface 36a is ground by the grinding tool 121 (grinding member 125) while adjusting the pressing force of the grinding tool 121) and the like.

  Then, after grinding the lower plate surface 36a, the height of the surface 36a of the lower plate 36 is measured again in the same manner as described above, and the calculated flatness of the surface 36a of the lower plate 36 is required. Check if it has reached the required degree.

  As a result, according to the polishing apparatus 1 of the present embodiment, the control device 55 controls the operation of the horizontal movement mechanism 60 according to the height of the surface 36a of the lower plate 36 measured by the contact displacement sensor 91. The convex portion on the lower plate surface 36a can be selectively ground, and the flatness of the lower plate surface 36a can be improved. Further, since the flatness of the surface 36a is corrected by grinding the surface 36a of the lower plate 36 held by the lower plate holding part 37, it is possible to eliminate the influence of the mounting error of the lower plate 36, etc. It becomes possible to further improve the flatness of the surface 36a.

  At this time, the lower plate grinding unit 50 is configured to be able to partially grind the surface 36a of the lower plate 36 by rotating the grinding tool 121 of the dress head portion 110 in contact with the surface 36a of the lower plate 36. In this way, it is possible to effectively grind the convex portion on the lower plate surface 36a.

  Further, the dress head unit 110 is configured to have an adjustment mechanism (guide pin 118 and guide groove 124) that adjusts the inclination of the grinding tool 121 according to the surface shape of the lower plate 36 (followed by the grinding tool 121). It is preferable that the convex portion on the lower plate surface 36a can be ground more flatly.

  Further, by using the upper plate grinding unit 40 and the lower plate grinding unit 50, the flatness is corrected by grinding at least one of the surfaces of the upper plate 31 and the lower plate 36 for polishing both surfaces of the glass plate 10. In this way, it is possible to improve not only the flatness of each dish, but also the parallelism between the surfaces of the upper dish 31 and the lower dish 36.

  In the above-described embodiment, the polishing apparatus 1 for polishing both surfaces of the glass plate 10 has been described as an example. However, the present invention is not limited to this. For example, a plate member such as a liquid crystal glass substrate, a wafer, or a metal plate is polished. The present invention can also be applied to the polishing apparatus.

It is a side view (partial sectional view) of a polishing apparatus according to the present invention. It is a top view of a polish device. It is a top view of the polish device in the state where a carrier was removed. It is a sectional side view of a lower plate grinding unit. It is a sectional side view of a dress head part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Polishing apparatus 10 Glass plate (plate member) 15 Carrier 30 Polishing head mechanism 31 Upper plate (polishing member) 32 Upper plate holding part (holding mechanism)
36 Lower plate (abrasive member) 37 Lower plate holder (holding mechanism)
40 Upper plate grinding unit 50 Lower plate grinding unit 55 Control device (control unit)
60 Horizontal Movement Mechanism (Movement Mechanism) 70 Dress Lifting Mechanism 90 Measurement Unit 91 Contact Displacement Sensor 100 Dress Rotation Mechanism 110 Dress Head Unit 111 Head Housing 118 Guide Pin (Adjustment Mechanism)
121 Grinding tool 124 Guide groove

Claims (4)

A polishing member capable of polishing the surface of the plate member; and a holding mechanism for holding the polishing member; and by moving the polishing member held by the holding mechanism in contact with the surface of the plate member In the polishing apparatus configured to polish the surface of the plate member,
A grinding unit for correcting the flatness of the surface by grinding the surface of the polishing member held by the holding mechanism;
The grinding unit is
A grinding tool capable of partially grinding the surface of the abrasive member;
A measuring unit for measuring the surface shape of the polishing member;
A moving mechanism for moving the grinding tool in a direction substantially parallel to the surface of the polishing member;
A polishing apparatus comprising: a control unit that controls the operation of the moving mechanism so as to move the polishing tool according to the surface shape measured by the measuring unit. The grinding unit has a dress head portion that is rotatable while holding the grinding tool, and the grinding tool held by the dress head portion is brought into contact with the surface of the polishing member to rotate the grinding tool. It is configured to be able to partially grind the surface of the abrasive member,
The polishing apparatus according to claim 1, wherein the moving mechanism moves the dress head unit holding the grinding tool in a direction substantially parallel to a surface of the polishing member.   The polishing apparatus according to claim 2, wherein the dress head unit includes an adjustment mechanism that adjusts an inclination of the grinding tool according to a surface shape of the polishing member. The polishing member is a pair of polishing members capable of polishing both surfaces of the plate member, and the holding mechanism holds the pair of polishing members so as to face each other and holds the pair of holding members held by the holding mechanism. The polishing member is configured to polish both surfaces of the plate member by bringing the polishing member into contact with both surfaces of the plate member and moving them relative to each other.
The grinding unit corrects the flatness of the surface by grinding the surface of at least one of the pair of polishing members held by the holding mechanism. Polishing apparatus as described in any one of them.

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