JP2009252927A - Suction nozzle - Google Patents

Suction nozzle Download PDF

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JP2009252927A
JP2009252927A JP2008097907A JP2008097907A JP2009252927A JP 2009252927 A JP2009252927 A JP 2009252927A JP 2008097907 A JP2008097907 A JP 2008097907A JP 2008097907 A JP2008097907 A JP 2008097907A JP 2009252927 A JP2009252927 A JP 2009252927A
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suction
suction nozzle
nozzle
component
wall
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JP4911096B2 (en
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Susumu Takaichi
進 高市
Kiyoshi Tomita
清 冨田
Naoyuki Horigome
直行 堀米
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Panasonic Corp
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Panasonic Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction nozzle assuring easier maintenance by eliminating the need for cleaning a filter member. <P>SOLUTION: In the suction nozzle 12 detachably loaded to a movable head 9 of an electronic part loading apparatus 1 to suck an electronic part P, a partitioning part 30 having a plurality of communicating paths 29 extended along a suction piping 26 is formed at the internal wall of the suction piping 26 connected to a suction port 25 in contact with the electronic part P or a partitioning member 31 having the plurality of communicating paths 29 extended along the suction piping 26 is deposited at the internal wall of the suction piping 26 connected to the suction port 25 in contact with the electronic part P. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用される吸着ノズルに関するものである。   The present invention relates to a suction nozzle that is detachably attached to a transfer head provided in a component mounting apparatus and is used for suction of a component.

部品実装装置は移載ヘッドに取り付けられた吸着ノズルにより部品を真空吸着して基板上の所定位置に搭載する。吸着ノズルは移載ヘッドに設けられたノズルホルダに着脱自在に取り付けられ、搭載する部品の形状や大きさ等に応じて交換できるようになっている。吸着ノズルは消耗品であるため一定の使用限度に達すると新品と交換する必要があるが、実装工程中に半田ペーストが付着したりなどして汚れることがあるので、使用限度に達する前であっても定期的に超音波洗浄などのメンテナンス作業を行う必要がある。   The component mounting apparatus vacuum-sucks the component by a suction nozzle attached to the transfer head and mounts the component at a predetermined position on the substrate. The suction nozzle is detachably attached to a nozzle holder provided in the transfer head, and can be exchanged according to the shape and size of the component to be mounted. Since the suction nozzle is a consumable item, it must be replaced with a new one when it reaches a certain usage limit, but it may become dirty due to solder paste adhering to it during the mounting process. However, it is necessary to regularly perform maintenance work such as ultrasonic cleaning.

また、このような吸着ノズルには、吸い込んだ異物（例えば紙テーピング部品のトップテープを剥がす際に生じる紙繊維）を除去するフィルタ部材が設置される。フィルタ部材は吸着ノズル側に取り付けられる場合と（特許文献１）、ノズルホルダ側に取り付けられる場合があるが（特許文献２）、吸着ノズルのメンテナンス時には吸着ノズルとともに取り外されて洗浄がなされ、目詰まりを起こしている場合には新品と交換される。
特開２００３−１７０３７９号公報 特開平１０−２４２６９４号公報 特開２００７−２８３４４５号公報 In addition, such a suction nozzle is provided with a filter member that removes the sucked foreign matter (for example, paper fibers generated when the top tape of the paper taping component is peeled off). The filter member may be attached to the suction nozzle side (Patent Document 1) or may be attached to the nozzle holder side (Patent Document 2). However, when the suction nozzle is maintained, it is removed together with the suction nozzle and cleaned, resulting in clogging. If you are waking up, it will be replaced with a new one.
JP 2003-170379 A JP-A-10-242694 JP 2007-283445 A

しかしながら、上記のようにフィルタ部材は極めて微小な部品であるため取り扱いが難しいうえ紛失するおそれもあるため、洗浄作業は勿論、交換作業に手間がかかり、作業性が悪いという問題点があった。   However, as described above, since the filter member is an extremely small part, it is difficult to handle and may be lost. Therefore, there is a problem in that it takes time for the replacement work as well as the cleaning work and the workability is poor.

そこで本発明は、フィルタ部材の洗浄が不要であり、メンテナンス作業を行い易い吸着ノズルを提供することを目的とする。   Accordingly, an object of the present invention is to provide a suction nozzle that does not require cleaning of a filter member and that facilitates maintenance work.

請求項１に記載の吸着ノズルは、部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用される吸着ノズルであって、部品と接触する吸引口に繋がる吸引管路の内壁に、吸引管路に沿って延びる複数の連通路を有した仕切り部が形成されている。   The suction nozzle according to claim 1 is a suction nozzle that is detachably attached to a transfer head provided in the component mounting apparatus and is used for suction of the component, and is a suction pipe that leads to a suction port that contacts the component. A partition portion having a plurality of communication passages extending along the suction conduit is formed on the inner wall.

請求項２に記載の吸着ノズルは、部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用される吸着ノズルであって、部品と接触する吸引口に繋がる吸引管路の内壁に、吸引管路に沿って延びる複数の連通路を有した仕切り部材が固着されている。   The suction nozzle according to claim 2 is a suction nozzle that is detachably attached to a transfer head provided in the component mounting apparatus and is used for suction of the component, and is a suction pipe connected to a suction port that contacts the component. A partition member having a plurality of communication passages extending along the suction conduit is fixed to the inner wall.

本発明の吸着ノズルでは、部品と接触する吸引口に繋がる吸引管路の内壁に、吸引管路に沿って延びる複数の連通路を仕切り部が形成されており、この複数の連通路を有した仕切り部にフィルタとしての機能を持たせることができるので、従来吸着ノズルとは別部材として必要であったフィルタ部材が不要となる。仕切り部は吸着ノズルの洗浄時に併せて洗浄することができるので、従来のようにフィルタ部材を吸着ノズルとは別個に洗浄する
必要がなく、吸着ノズルのメンテナンス作業を行い易い。また、複数の連通路を有した仕切り部を吸引管路の内壁に形成する代わりに、複数の連通路を有した仕切り部材を吸引管路の内壁に固着させても同様の効果を得ることができる。 In the suction nozzle of the present invention, a partition portion is formed on the inner wall of the suction conduit that is connected to the suction port that is in contact with the component, and a plurality of communication passages extending along the suction conduit are formed. Since the partition portion can have a function as a filter, a filter member that has been conventionally required as a separate member from the suction nozzle becomes unnecessary. Since the partition portion can be cleaned together with the cleaning of the suction nozzle, it is not necessary to clean the filter member separately from the suction nozzle as in the prior art, and the maintenance work of the suction nozzle is easy to perform. Further, instead of forming the partition portion having a plurality of communication passages on the inner wall of the suction conduit, the same effect can be obtained by fixing the partition member having the plurality of communication passages to the inner wall of the suction conduit. it can.

（実施の形態１）
図１は本発明の実施の形態１における部品実装装置の平面図、図２は本発明の実施の形態１における部品実装装置の移載ヘッドの拡大正面図、図３は本発明の実施の形態１における部品実装装置の移載ヘッドに取り付けられた状態の吸着ノズルの一部断面正面図、図４（ａ），（ｂ）は本発明の実施の形態１における吸着ノズルの断面図である。 (Embodiment 1)
1 is a plan view of a component mounting apparatus according to Embodiment 1 of the present invention, FIG. 2 is an enlarged front view of a transfer head of the component mounting apparatus according to Embodiment 1 of the present invention, and FIG. 3 is an embodiment of the present invention. 4 is a partial cross-sectional front view of the suction nozzle attached to the transfer head of the component mounting apparatus in FIG. 1, and FIGS. 4A and 4B are cross-sectional views of the suction nozzle according to Embodiment 1 of the present invention.

図１において、部品実装装置１は基台２上に基板搬送コンベア３を備えており、この基板搬送コンベア３によって基板４が水平面内の一の方向（Ｘ軸方向）に搬送される。基板搬送コンベア３の上方にはＸ軸方向と水平に直交する方向（Ｙ軸方向）に延びたＹ軸テーブル５が設けられており、Ｙ軸テーブル５には２つのＹ軸スライダ６がＹ軸テーブル５に沿って（すなわちＹ軸方向に）移動自在に設けられている。各Ｙ軸スライダ６にはＸ軸方向に延びたＸ軸テーブル７の一端が取り付けられており、各Ｘ軸テーブル７にはＸ軸テーブル７に沿って（すなわちＸ軸方向に）移動自在な移動ステージ８が設けられている。   In FIG. 1, the component mounting apparatus 1 includes a substrate transfer conveyor 3 on a base 2, and the substrate 4 is transferred by the substrate transfer conveyor 3 in one direction (X-axis direction) in a horizontal plane. A Y-axis table 5 extending in a direction (Y-axis direction) orthogonal to the X-axis direction is provided above the substrate transfer conveyor 3, and two Y-axis sliders 6 are provided on the Y-axis table 5 with the Y-axis. It is provided so as to be movable along the table 5 (that is, in the Y-axis direction). One end of an X-axis table 7 extending in the X-axis direction is attached to each Y-axis slider 6, and each X-axis table 7 is movable along the X-axis table 7 (that is, in the X-axis direction). A stage 8 is provided.

図１及び図２において、各移動ステージ８には移載ヘッド９が取り付けられており、各移載ヘッド９には複数のノズルシャフト１０が上下方向（Ｚ軸方向とする）の下方に延びて設けられている。各ノズルシャフト１０の下端部には内部に中空管路１１ａ（図３）を有して下方に開口した円筒状のノズルホルダ１１が設けられており、各ノズルホルダ１１には吸着ノズル１２が着脱自在に取り付けられている。   1 and 2, a transfer head 9 is attached to each moving stage 8, and a plurality of nozzle shafts 10 extend downward in the vertical direction (Z-axis direction) to each transfer head 9. Is provided. At the lower end of each nozzle shaft 10, there is provided a cylindrical nozzle holder 11 having a hollow duct 11 a (FIG. 3) inside and opening downward, and each nozzle holder 11 has an adsorption nozzle 12. It is detachably attached.

図１において、基板搬送コンベア３の側方領域には移載ヘッド９に部品Ｐ（図２）を供給する複数のテープフィーダ１３がＸ軸方向に並んで設けられている。各テープフィーダ１３は移載ヘッド９の基台２に対する移動可能領域Ｒ内に部品供給口１３ａを位置させている。また、移載ヘッド９には撮像面を下方に向けた基板カメラ１４が設けられており、基台２上には撮像面を上方に向けた部品カメラ１５が設けられている。   In FIG. 1, a plurality of tape feeders 13 for supplying a component P (FIG. 2) to the transfer head 9 are provided side by side in the X-axis direction in a side region of the substrate transport conveyor 3. Each tape feeder 13 has a component supply port 13 a located in a movable region R with respect to the base 2 of the transfer head 9. The transfer head 9 is provided with a substrate camera 14 with the imaging surface facing downward, and a component camera 15 with the imaging surface facing upward is provided on the base 2.

基板搬送コンベア３は基板４をＸ軸方向に搬送し、予め定められた所定の実装作業位置に位置決めする。移動ステージ８は、Ｙ軸スライダ６のＹ軸方向への移動と移動ステージ８自身のＸ軸方向への移動とによって所定の実装作業位置に位置決めされた基板４に対して相対移動し、基板４の上方に位置させた基板カメラ１４に基板４の位置決めマーク（図示せず）の画像認識（撮像）を行わせた後、移載ヘッド９が備える吸着ノズル１２にテープフィーダ１３が部品供給口１３ａに供給する部品Ｐ（図２）をピックアップさせる。そして、吸着ノズル１２に吸着された部品Ｐが部品カメラ１５の上方（部品カメラ１５の視野内）を通過するように水平方向に移動して部品カメラ１５に部品Ｐの下面の画像認識（撮像）を行わせ、次いで、吸着ノズル１２に吸着された部品Ｐに対して与えられている搭載位置データに基づいて吸着ノズル１２を移動させ、吸着ノズル１２に吸着された部品Ｐが基板４上の目標搭載位置に搭載されるようにする。このとき、基板カメラ１４の画像認識によって得られる基板４の位置ずれと、部品カメラ１５の画像認識によって得られる部品Ｐの吸着ノズル１２に対する位置ずれ（吸着ずれ）を修正し、部品Ｐが基板４上の目標搭載位置に正しく搭載されるようにする。   The substrate transport conveyor 3 transports the substrate 4 in the X-axis direction and positions the substrate 4 at a predetermined mounting work position. The moving stage 8 moves relative to the substrate 4 positioned at a predetermined mounting work position by the movement of the Y-axis slider 6 in the Y-axis direction and the movement of the moving stage 8 itself in the X-axis direction. After the substrate camera 14 positioned above the image recognition (imaging) of the positioning mark (not shown) of the substrate 4 is performed, the tape feeder 13 is connected to the suction nozzle 12 of the transfer head 9 and the component supply port 13a. The component P (FIG. 2) to be supplied to is picked up. Then, the component P sucked by the suction nozzle 12 moves in the horizontal direction so as to pass above the component camera 15 (in the field of view of the component camera 15), and the component camera 15 recognizes an image on the lower surface of the component P (imaging). Next, the suction nozzle 12 is moved based on the mounting position data given to the component P sucked by the suction nozzle 12, and the component P sucked by the suction nozzle 12 becomes the target on the substrate 4. Install it at the mounting position. At this time, the positional deviation of the substrate 4 obtained by the image recognition of the substrate camera 14 and the positional deviation (suction deviation) of the component P obtained by the image recognition of the component camera 15 with respect to the suction nozzle 12 are corrected. Make sure it is mounted correctly at the target mounting position above.

この部品実装装置１では部品Ｐの吸着に用いられる吸着ノズル１２に特徴があり、以下にその構成を説明する。   This component mounting apparatus 1 is characterized by a suction nozzle 12 used for suction of the component P, and the configuration thereof will be described below.

図３及び図４において、吸着ノズル１２は上方に狭まるテーパ面２１ａを備えた基部２
１、基部２１から下方に延びて設けられた本体部２２及び基部２１と本体部２２の間に設けられた円盤状の鍔部２３を有しており、基部２１の外周部には内側に窪んだ形状の被係止溝２４が形成されている。 3 and 4, the suction nozzle 12 has a base 2 having a tapered surface 21a that narrows upward.
1. It has a main body portion 22 extending downward from the base portion 21 and a disk-shaped flange portion 23 provided between the base portion 21 and the main body portion 22. An oval shaped locking groove 24 is formed.

吸着ノズル１２の基部２１及び本体部２２の内部には、基部２１から本体部２２にかけて上下に貫通し、部品Ｐと接触する吸引口２５に繋がる吸引管路２６が設けられている。この吸引管路２６は、本体部２２内に設けられた本体部側吸引管路２７と、基部２１内に設けられた基部側吸引管路２８が連通されて成る。   Inside the base portion 21 and the main body portion 22 of the suction nozzle 12, there is provided a suction pipe 26 penetrating vertically from the base portion 21 to the main body portion 22 and connected to the suction port 25 in contact with the component P. The suction pipe 26 is formed by connecting a main body side suction pipe 27 provided in the main body 22 and a base side suction pipe 28 provided in the base 21.

吸着ノズル１２はセラミックス製或いはスチール等の金属製であり、セラミックス製であれば金型焼結等によって、金属製であれば金型鋳造或いはインゴットからの削り出し等によって、基部２１、本体部２２及び鍔部２３が一体に成形される。   The suction nozzle 12 is made of ceramics or metal such as steel. If it is made of ceramics, the base 21 and the main body 22 are obtained by die sintering or the like, and if they are made of metal, the die 21 is cast or cut out from an ingot. And the collar part 23 is shape | molded integrally.

図３において、ノズルホルダ１１には一対の係止フック１６がノズルホルダ１１を挟んで対向する位置に設けられている。各係止フック１６の下端に設けられた係止突起１７はノズルホルダ１１の下方に延びており、各係止フック１６の中間部はノズルホルダ１１の外周に環装されたリング状のばね部材１８によって締め付け保持されている。   In FIG. 3, the nozzle holder 11 is provided with a pair of locking hooks 16 at positions facing each other across the nozzle holder 11. A locking projection 17 provided at the lower end of each locking hook 16 extends below the nozzle holder 11, and an intermediate portion of each locking hook 16 is a ring-shaped spring member that is wrapped around the outer periphery of the nozzle holder 11. 18 is tightened and held.

図３において、吸着ノズル１２をノズルホルダ１１に取り付けるときは、吸着ノズル１２の基部２１をノズルホルダ１１の中空管路１１ａ内に下方から押し込む。これにより、各係止フック１６の係止突起１７は吸着ノズル１２の基部２１のテーパ面２１ａによって外側に押し広げられた後、吸着ノズル１２の基部２１がノズルホルダ１１の中空管路１１ａ内に挿着されたところで（このとき、吸着ノズル１２の基部２１のテーパ面２１ａはノズルホルダ１１の中空管路１１ａの内面のテーパ面１１ｂと接触する）、ばね部材１８の付勢力によって付勢されて吸着ノズル１２の被係止溝２４に嵌入する。これにより一対の係止フック１６の係止突起１７は吸着ノズル１２の被係止溝２４に係止され、吸着ノズル１２はノズルホルダ１１にしっかりと固定された状態となる。吸着ノズル１２がノズルホルダ１１に取り付けられることにより、吸着ノズル１２の吸引管路２６（本体部側吸引管路２７及び基部側吸引管路２８）とノズルホルダ１１の中空管路１１ａが連通される。   In FIG. 3, when attaching the suction nozzle 12 to the nozzle holder 11, the base 21 of the suction nozzle 12 is pushed into the hollow pipe line 11 a of the nozzle holder 11 from below. As a result, the locking projections 17 of the locking hooks 16 are pushed outward by the tapered surface 21 a of the base 21 of the suction nozzle 12, and then the base 21 of the suction nozzle 12 is moved into the hollow pipe 11 a of the nozzle holder 11. (At this time, the taper surface 21a of the base 21 of the suction nozzle 12 comes into contact with the taper surface 11b of the inner surface of the hollow pipe 11a of the nozzle holder 11), and is biased by the biasing force of the spring member 18 Then, it is fitted into the locked groove 24 of the suction nozzle 12. As a result, the locking protrusions 17 of the pair of locking hooks 16 are locked to the locked grooves 24 of the suction nozzle 12, and the suction nozzle 12 is firmly fixed to the nozzle holder 11. By attaching the suction nozzle 12 to the nozzle holder 11, the suction pipe 26 (the main body side suction pipe 27 and the base side suction pipe 28) of the suction nozzle 12 and the hollow pipe 11 a of the nozzle holder 11 are communicated. The

図４（ａ）は吸着ノズル１２の断面正面図であり、図４（ｂ）はこの図４（ａ）の矢視ＩＶ−ＩＶから見た吸着ノズル１２の断面図である。図３及び図４において、吸着ノズル１２の吸引管路２６の内壁（ここでは本体部側吸引管路２７の内壁２７ａ）には、吸引管路２６に沿って延びる複数の連通路２９を有した仕切り部３０が吸引管路２６の内壁（本体部側吸引管路２７の内壁２７ａ）と一体に形成されている。このため、吸引口２５から吸い込まれた空気は複数の連通路２９を通ってその下流側（移載ヘッド９側。図４（ａ）では紙面上方）に流れ、複数の連通路２９を有した仕切り部３０は、吸引管路２６中に介在したフィルタとして機能するようになっている。   4A is a cross-sectional front view of the suction nozzle 12, and FIG. 4B is a cross-sectional view of the suction nozzle 12 as viewed from the direction of arrows IV-IV in FIG. 4A. 3 and 4, the inner wall of the suction pipe 26 of the suction nozzle 12 (here, the inner wall 27a of the main body side suction pipe 27) has a plurality of communication passages 29 extending along the suction pipe 26. The partition portion 30 is formed integrally with the inner wall of the suction pipe line 26 (the inner wall 27a of the main body side suction pipe line 27). For this reason, the air sucked from the suction port 25 flows through the plurality of communication passages 29 to the downstream side (the transfer head 9 side, upper side in FIG. 4A), and has a plurality of communication passages 29. The partition part 30 functions as a filter interposed in the suction pipe line 26.

ここで、仕切り部３０は、吸着ノズル１２がセラミックス製であって金型焼結され、或いは金属製であって金型鋳造されるのであれば吸引管路２６の形成と同時に形成することができる。また、吸着ノズル１２が金属製であってインゴットから削り出されるのであれば吸引管路２６の切削時に形成することができる。また、複数の連通路２９は、吸着ノズル１２がセラミックス製であって金型焼結されるのであれば吸引管路２６及び仕切り部３０と同時に形成することができ、吸着ノズル１２が金属製であって金型鋳造され、或いはインゴットから切り出されるのであれば、金型鋳造或いは削り出しによって仕切り部３０が形成された後に、ドリル等によって仕切り部３０をその厚さ方向に（吸引管路２６に沿った方向に）穿設して形成することができる。   Here, the partition portion 30 can be formed simultaneously with the formation of the suction pipe 26 if the suction nozzle 12 is made of ceramics and die-sintered, or made of metal and die-cast. . Further, if the suction nozzle 12 is made of metal and is cut out from the ingot, it can be formed at the time of cutting the suction pipe 26. The plurality of communication passages 29 can be formed at the same time as the suction pipe 26 and the partition portion 30 if the suction nozzle 12 is made of ceramics and die-sintered, and the suction nozzle 12 is made of metal. If the partition portion 30 is formed by die casting or cutting, the partition portion 30 is formed in the thickness direction by the drill or the like (to the suction conduit 26). Can be drilled (in the direction along).

このように本発明の実施の形態１における吸着ノズル１２では、部品Ｐと接触する吸引
口２５に繋がる吸引管路２６の内壁（ここでは本体部吸引管路２７の内壁２７ａ）に複数の連通路２９を有した仕切り部３０が吸引管路２６の内壁と一体に形成されており、この複数の連通路２９を有した仕切り部３０にフィルタとしての機能を持たせることができるので、従来吸着ノズルとは別部材として必要であったフィルタ部材が不要となる。仕切り部３０は吸着ノズル１２の洗浄（例えば超音波洗浄）時に併せて洗浄することができるので、従来のようにフィルタ部材を吸着ノズルとは別個に洗浄する必要がなく、吸着ノズル１２のメンテナンス作業を行い易い。なお、仕切り部３０は吸引口２５（吸着ノズル１２の先端吸着面）よりも奥まった（図４（ａ）では紙面上方の）箇所に設置することによって吸着に必要な十分な有効開口面積を確保することができるので、部品Ｐの吸着力を低下させない。 As described above, in the suction nozzle 12 according to the first embodiment of the present invention, a plurality of communication paths are provided on the inner wall of the suction pipe line 26 (here, the inner wall 27a of the main body suction pipe line 27) connected to the suction port 25 in contact with the component P. Since the partition part 30 having 29 is formed integrally with the inner wall of the suction pipe line 26, the partition part 30 having the plurality of communication passages 29 can have a function as a filter. The filter member required as a separate member becomes unnecessary. Since the partition part 30 can be cleaned together with cleaning of the suction nozzle 12 (for example, ultrasonic cleaning), there is no need to clean the filter member separately from the suction nozzle as in the prior art, and maintenance work of the suction nozzle 12 is performed. Easy to do. In addition, the partition part 30 secures a sufficient effective opening area necessary for suction by being installed deeper than the suction port 25 (the tip suction surface of the suction nozzle 12) (above the paper surface in FIG. 4A). Therefore, the adsorption power of the part P is not reduced.

（実施の形態２）
図５（ａ），（ｂ）は本発明の実施の形態２における吸着ノズルの断面図である。図５（ａ）は実施の形態２における吸着ノズル１２ａの断面正面図、図５（ｂ）は図５（ａ）の矢視Ｖ−Ｖから見た吸着ノズル１２ａの断面図である。 (Embodiment 2)
5A and 5B are cross-sectional views of the suction nozzle according to Embodiment 2 of the present invention. FIG. 5A is a cross-sectional front view of the suction nozzle 12a according to the second embodiment, and FIG. 5B is a cross-sectional view of the suction nozzle 12a as viewed from the arrow VV in FIG. 5A.

この実施の形態２における吸着ノズル１２ａは、上述の実施の形態１における吸着ノズル１２とほぼ同じ構成であり、図５（ａ），（ｂ）において実施の形態１における吸着ノズル１２と同じ構成部分（或いは同じ機能を有する部分）は図４と同一の符号を付しているが、実施の形態１における吸着ノズル１２が複数の連通路２９を有した仕切り部３０が吸引管路２６の内壁と一体に形成されていたのに対し、この実施の形態２では、複数の連通路２９を有した仕切り部材３１を吸引管路２６の内壁に（ここでは基部側吸引管路２８の内壁２８ａに）固着させた構成となっている。   The suction nozzle 12a in the second embodiment has substantially the same configuration as the suction nozzle 12 in the first embodiment, and the same constituent parts as the suction nozzle 12 in the first embodiment in FIGS. 5 (a) and 5 (b). 4 (or parts having the same function) are given the same reference numerals as those in FIG. 4, but the partition portion 30 in which the suction nozzle 12 in the first embodiment has a plurality of communication passages 29 is connected to the inner wall of the suction conduit 26. In contrast to being formed integrally, in the second embodiment, the partition member 31 having a plurality of communication passages 29 is provided on the inner wall of the suction line 26 (here, on the inner wall 28a of the base side suction line 28). The structure is fixed.

ここで固着とは、接着剤による接合や圧入によるもの等をいう。吸着ノズル１２ａがセラミックス製であれば接着剤による接合を行うことができ、金属製であれば接着剤による接合を行うことができるほか、圧入によることができる。この実施の形態２の場合のように、複数の連通路２９を有した仕切り部材３１を吸引管路２６の内壁に固着させるものでは、仕切り部材３１の材質は必ずしも吸着ノズル１２ａの材質と同一である必要はない。   Here, the term “fixed” refers to bonding by adhesive or press fitting. If the suction nozzle 12a is made of ceramics, bonding with an adhesive can be performed. If the suction nozzle 12a is made of metal, bonding with an adhesive can be performed, and press fitting can be used. In the case where the partition member 31 having a plurality of communication passages 29 is fixed to the inner wall of the suction pipe line 26 as in the case of the second embodiment, the material of the partition member 31 is not necessarily the same as the material of the suction nozzle 12a. There is no need.

このような構成であっても、上述の実施の形態１において示した吸着ノズル１２と同様の効果を得ることができるが、この実施の形態２における吸着ノズル１２ａでは、複数の連通路２９を有した仕切り部材３１を吸着ノズル１２ａの仕切り部材３１以外の部分とは別個に作成し、これを吸引管路２６中に後付けすることができるので、工作工程は実施の形態１における吸着ノズル１２よりも容易なものとなる。また、吸着ノズル１２ａの上部は下端部（吸引口２５側）に比べて形状自由度が高いので、仕切り部材３１の面積、すなわちフィルタ機能の有効面積を実施の形態１における吸着ノズル１２よりも拡大することができる。なお、この実施の形態２では、仕切り部材３１を基部側吸引管路２８の内壁２８ａに設けた構成となっているが、仕切り部材３１は本体部側吸引管路２７の内壁２７ａに設けることもできる。   Even with such a configuration, the same effect as that of the suction nozzle 12 shown in the first embodiment can be obtained. However, the suction nozzle 12a in the second embodiment has a plurality of communication passages 29. Since the partition member 31 can be made separately from the portion other than the partition member 31 of the suction nozzle 12a and can be retrofitted into the suction pipe 26, the work process is more than that of the suction nozzle 12 in the first embodiment. It will be easy. Further, since the upper portion of the suction nozzle 12a has a higher degree of freedom in shape than the lower end portion (on the suction port 25 side), the area of the partition member 31, that is, the effective area of the filter function, is larger than that of the suction nozzle 12 in the first embodiment. can do. In the second embodiment, the partition member 31 is provided on the inner wall 28a of the base side suction pipe 28. However, the partition member 31 may be provided on the inner wall 27a of the main body side suction pipe 27. it can.

（実施の形態３）
図６（ａ），（ｂ）は本発明の実施の形態３における吸着ノズルの断面図である。図６（ａ）は実施の形態３における吸着ノズル１２ｂの断面正面図、図６（ｂ）は図６（ａ）の矢視ＶＩ−ＶＩから見た吸着ノズル１２ｂの断面図である。 (Embodiment 3)
6A and 6B are cross-sectional views of the suction nozzle according to Embodiment 3 of the present invention. 6A is a cross-sectional front view of the suction nozzle 12b in the third embodiment, and FIG. 6B is a cross-sectional view of the suction nozzle 12b as viewed from the arrow VI-VI in FIG. 6A.

この実施の形態３における吸着ノズル１２ｂは実施の形態２における吸着ノズル１２ａとほぼ同じ構成であるが、複数の連通路２９を有した仕切り部材３１を吸引管路２６の端部の内壁（ここでは基部側吸引管路２８の端部の内壁２８ａ）に固着させた構成となっている。このような構成であっても、上述の実施の形態１における吸着ノズル１２及び実施
の形態２における吸着ノズル１２ａと同様の効果を得ることができる。 The suction nozzle 12b in the third embodiment has substantially the same configuration as the suction nozzle 12a in the second embodiment, but the partition member 31 having a plurality of communication passages 29 is connected to the inner wall (here, the suction pipe 26). The base side suction pipe 28 is fixed to the inner wall 28a) at the end. Even with such a configuration, it is possible to obtain the same effects as those of the suction nozzle 12 in the first embodiment and the suction nozzle 12a in the second embodiment.

これまで本発明の実施の形態について説明してきたが、本発明は上述の実施の形態に限定されない。例えば、本発明が適用される吸着ノズルは、部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用されるものであればよく、その形状は上述の実施の形態に示したものに限定されない。   Although the embodiments of the present invention have been described so far, the present invention is not limited to the above-described embodiments. For example, the suction nozzle to which the present invention is applied is not limited as long as it is detachably attached to the transfer head provided in the component mounting apparatus and used for suction of the component, and the shape thereof is shown in the above embodiment. It is not limited to that.

フィルタ部材の洗浄が不要であり、メンテナンス作業を行い易い吸着ノズルを提供する。   Provided is a suction nozzle that does not require cleaning of a filter member and facilitates maintenance work.

本発明の実施の形態１における部品実装装置の平面図The top view of the component mounting apparatus in Embodiment 1 of this invention 本発明の実施の形態１における部品実装装置の移載ヘッドの拡大正面図The enlarged front view of the transfer head of the component mounting apparatus in Embodiment 1 of this invention 本発明の実施の形態１における部品実装装置の移載ヘッドに取り付けられた状態の吸着ノズルの一部断面正面図The partial cross section front view of the adsorption nozzle of the state attached to the transfer head of the component mounting apparatus in Embodiment 1 of this invention （ａ）（ｂ）本発明の実施の形態１における吸着ノズルの断面図(A) (b) Sectional drawing of the suction nozzle in Embodiment 1 of this invention （ａ）（ｂ）本発明の実施の形態２における吸着ノズルの断面図(A) (b) Sectional drawing of the suction nozzle in Embodiment 2 of this invention （ａ）（ｂ）本発明の実施の形態３における吸着ノズルの断面図(A) (b) Sectional drawing of the suction nozzle in Embodiment 3 of this invention

符号の説明Explanation of symbols

１ 部品実装装置
９ 移載ヘッド
１２，１２ａ，１２ｂ 吸着ノズル
２５ 吸引口
２６ 吸引管路
２７ａ 本体部側吸引管路の内壁（吸引管路の内壁）
２８ａ 基部側吸引管路の内壁（吸引管路の内壁）
２９ 連通路
３０ 仕切り部
３１ 仕切り部材
Ｐ 部品 DESCRIPTION OF SYMBOLS 1 Component mounting apparatus 9 Transfer head 12, 12a, 12b Suction nozzle 25 Suction port 26 Suction line 27a Inner wall of main body side suction line (inner wall of suction line)
28a Inner wall of the base side suction line (inner wall of the suction line)
29 Communication passage 30 Partition 31 Partition member P Parts

Claims (2)

部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用される吸着ノズルであって、部品と接触する吸引口に繋がる吸引管路の内壁に、吸引管路に沿って延びる複数の連通路を有した仕切り部が形成されていることを特徴とする吸着ノズル。   A suction nozzle that is detachably attached to a transfer head provided in a component mounting apparatus and is used for suction of a component, and extends along an inner wall of a suction conduit that leads to a suction port that contacts the component, along the suction conduit A suction nozzle having a partition portion having a plurality of communication passages. 部品実装装置が備える移載ヘッドに着脱自在に取り付けられて部品の吸着に使用される吸着ノズルであって、部品と接触する吸引口に繋がる吸引管路の内壁に、吸引管路に沿って延びる複数の連通路を有した仕切り部材が固着されていることを特徴とする吸着ノズル。   A suction nozzle that is detachably attached to a transfer head provided in a component mounting apparatus and is used for suction of a component, and extends along an inner wall of a suction conduit that leads to a suction port that contacts the component, along the suction conduit A suction nozzle, wherein a partition member having a plurality of communication passages is fixed.
JP2008097907A 2008-04-04 2008-04-04 Suction nozzle Expired - Fee Related JP4911096B2 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05228873A (en) * 1992-02-21 1993-09-07 Sony Corp Vacuum chuck
JP2007229860A (en) * 2006-02-28 2007-09-13 Nanto Precision Co Ltd Adsorption nozzle member of electronic component

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05228873A (en) * 1992-02-21 1993-09-07 Sony Corp Vacuum chuck
JP2007229860A (en) * 2006-02-28 2007-09-13 Nanto Precision Co Ltd Adsorption nozzle member of electronic component

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