JP2009250907A - Method and apparatus for analyzing organic substance in air - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately analyze a trace amount of aerial organic substances by preventing the decomposition of a solid adsorbent by a sample gas. <P>SOLUTION: The sample gas is drawn from air containing ozone by suction. Organic substances in a drawn sample gas are collected by the solid adsorbent 3 made of a porous polymer. The drawn sample gas is introduced to the sold adsorbent 3 after lowering its ozone concentration at a buffer part 5 to collect the organic substances in the sample gas in this state by the solid adsorbent 3. After this, the organic substances collected by the solid adsorbent 3 are analyzed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an analysis method and an analysis apparatus for airborne organic substances.

  In a semiconductor manufacturing apparatus or a semiconductor inspection apparatus equipped with an apparatus using light such as an exposure apparatus or a film thickness measuring apparatus, if a trace amount of organic substance, particularly organic substance such as siloxane is present in the atmosphere in the apparatus, the optical system becomes cloudy, There is a problem that the illuminance decreases. Therefore, it is necessary to control trace organic substances in the atmosphere in the apparatus. Furthermore, when controlling a trace amount organic substance, it is calculated | required to analyze the trace amount organic substance in the atmosphere in an apparatus accurately.

  For the analysis of organic substances present in the atmosphere, a method is generally used in which organic substances are collected using a solid adsorbent made of a porous polymer, etc., and the collected organic substances are analyzed by gas chromatography or the like. . Specifically, the collection tube filled with the solid adsorbent is connected to the pump directly or via a tube or the like. The pump is operated to suck atmospheric air into the collection tube at a predetermined flow rate for a predetermined time, and organic substances in a predetermined volume of air (sample gas) are collected with a solid adsorbent (see Patent Document 1). Thereafter, the entire collection tube is heated to desorb the organic matter adsorbed on the solid adsorbent. The desorbed organic matter is introduced into a gas chromatography mass spectrometer or the like, and the organic matter concentration is analyzed.

When the organic substance collection method as described above is applied to the collection of trace organic substances in the atmosphere in the apparatus such as a semiconductor manufacturing apparatus, and the collected organic substance is analyzed by gas chromatography or the like, A peak that may be attributed to a decomposition product may appear. In such a case, there arises a problem that the analysis based on the peak of the organic substance such as siloxane to be measured cannot be performed accurately because it is disturbed by the decomposition product peak of the solid adsorbent. It is also possible to collect the organic substance in the air using an activated carbon-based adsorbent, and in this case, no decomposition product peak is generated. However, since the activated carbon-based adsorbent has low adsorption efficiency, it is not possible to analyze air organic substances with high sensitivity as in the case of using a solid adsorbent made of a porous polymer or the like.
Japanese Patent Laid-Open No. 2000-088717

  An object of the present invention is to provide an analysis method and an analysis apparatus for airborne organic substances that can accurately analyze trace organic substances in the air by suppressing the decomposition of the solid adsorbent by the sample gas. .

  The method for analyzing airborne organic matter according to one aspect of the present invention includes a step of sucking a sample gas from the air containing ozone and collecting the organic matter in the sucked sample gas with a solid adsorbent composed of a porous polymer; And analyzing the organic matter collected by the solid adsorbent, wherein the sample gas is analyzed by the solid adsorbent after reducing the ozone concentration in the sample gas. It is characterized by collecting organic matter inside.

  An apparatus for analyzing an organic substance in air according to another aspect of the present invention includes a buffer unit that lowers an ozone concentration in a sample gas sucked from the air containing ozone, and a porous hole into which the sample gas is introduced from the buffer unit. A solid adsorbent composed of a porous polymer, and a collector that collects organic matter in the sample gas with the solid adsorbent, and an analyzer that analyzes the organic matter collected with the solid adsorbent. It is characterized by.

  According to the method and apparatus for analyzing an organic substance in air according to an aspect of the present invention, decomposition of the solid adsorbent by ozone in the sample gas can be suppressed. Therefore, it is possible to analyze a minute amount of organic matter collected by the solid adsorbent with high accuracy.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of an air organic matter collection device applied to the air organic matter analysis device of the first embodiment of the present invention. An air organic matter collection device 1 shown in FIG. 1 includes a suction pump 2 for sucking a sample gas from the air, and a collection filled with a solid adsorbent 3 into which the sample gas sucked by the suction pump 2 is introduced. The tube 4 and the buffer part 5 arrange | positioned in the front | former stage of the collection tube 4 are comprised.

  The air organic matter collection device 1 of this embodiment eliminates the inconvenience due to ozone present in the sample gas. That is, when ozone exists in the sample gas, the solid adsorbent 3 made of a porous polymer is decomposed by ozone. The decomposition product peak of the solid adsorbent 3 becomes a factor that hinders the analysis of the organic matter peak to be measured. Thus, the air organic matter collection device 1 is realized based on the discovery that the solid adsorbent 3 made of a porous polymer is decomposed by ozone. It is possible to suppress the decomposition and to accurately analyze the organic matter to be measured. Therefore, the air organic substance collection device 1 is used for collecting organic substances in the sample gas sucked from the air containing ozone.

  The air organic matter analyzing apparatus according to the first embodiment includes an air organic matter collecting device 1 shown in FIG. 1 and an analysis unit (not shown) for analyzing the organic matter desorbed from the solid adsorbent 3. Composed. As the analysis unit not shown, various known analyzers such as a gas chromatography and a gas chromatography mass spectrometer can be applied. The configurations of these analyzers are well known, and various known configurations can be applied to the analyzer itself used as the analyzer, and therefore the description of the configuration of the analyzer is omitted here.

  In the air organic matter collection device 1 shown in FIG. 1, the suction pump 2 is connected to the collection tube 4 via a tube 6 or directly. The collection tube 4 is filled with a solid adsorbent 3 made of a porous polymer, and functions as an air organic matter collection unit. Examples of the porous polymer constituting the solid adsorbent 3 include polyethylene oxide. Polyethylene oxide is used as an adsorbent (Tenax tube (trade name, manufactured by Chrome Pack Co., Ltd.)) that collects various organic substances (organic compounds) from the air. Polyethylene oxide is effective as the solid adsorbent 3 of the embodiment because it is easily decomposed by ozone.

  However, the porous polymer constituting the solid adsorbent 3 is not limited to polyethylene oxide, and is generally used as an adsorbent porous polyether, porous polystyrene, porous polyester, porous polyvinyl alcohol. Etc. Even if they have different degrees of decomposition, they may be decomposed by ozone. The organic matter collected by the solid adsorbent 3 is not particularly limited, and volatile organic matter (organic compound) present in the air is collected according to the measurement target. Representative examples of the organic matter collected by the solid adsorbent 3 include organosilicon compounds such as siloxane and organosilane.

  The measurement atmosphere for sucking the sample gas with the collection device 1 is not particularly limited as long as the atmosphere contains ozone. In a semiconductor manufacturing apparatus or semiconductor inspection apparatus having an apparatus having a light irradiation unit such as an exposure apparatus or a film thickness measuring apparatus, oxygen in the atmosphere as the atmosphere in the apparatus is often dissociated by light to generate ozone. . For this reason, the collection apparatus 1 is suitably used when the sample gas is sucked from the atmosphere in the apparatus of the semiconductor manufacturing apparatus or semiconductor inspection apparatus including the light irradiation unit to collect organic matter. Furthermore, when the ozone concentration in the atmosphere is about 0.1 ppm or more, the solid adsorbent 3 made of a porous polymer is likely to be decomposed. 1 is valid.

  A buffer unit 5 is connected to the front stage of the collection tube 4 filled with the solid adsorbent 3. The buffer unit 5 is capable of retaining the sample gas for a predetermined time. A suction pipe (not shown) arranged in the air to be measured is connected to the gas inlet 5 a of the buffer unit 5, and the gas outlet 5 b is connected to the gas suction side of the collection pipe 4. When the suction pump 2 is operated, the sample gas is once sucked into the buffer unit 5 from the air requiring analysis (air containing ozone).

  The sucked sample gas stays in the buffer unit 5 for a predetermined time, and during this time, the ozone concentration in the sample gas is lowered. The ozone concentration in the sample gas is lowered to a concentration that does not adversely affect the solid adsorbent 3 (decomposition of the porous polymer) while staying in the buffer unit 5. A sample gas having such a reduced ozone concentration is introduced into the collection tube 4. The ozone concentration at the time of introducing the sample gas into the collection tube 4 varies depending on the type of the solid adsorbent 3 and the like, but is specifically preferably 10 ppb or less. By setting the ozone concentration in the sample gas to 10 ppb or less, decomposition of the solid adsorbent 3 can be stably suppressed.

  Although ozone in the sample gas can be decomposed by being sufficiently retained in the buffer unit 5, it is preferable to heat the sample gas in the buffer unit 5 in order to promote the decomposition of ozone. That is, the buffer unit 5 preferably has a heating mechanism that heats the sample gas and promotes decomposition of ozone. Since the decomposition of ozone present in the sample gas is accelerated by heating, the ozone concentration can be reduced to a predetermined concentration based on the heating temperature and the heating time (residence time). The buffer unit 5 preferably has a piping structure (gabion structure or spiral structure) that increases the residence time of the sample gas.

  Specifically, based on the ozone concentration (initial concentration) in the sample gas, the heating temperature by the heating mechanism and the residence time (heating time) based on the piping structure in the buffer unit 5 are adjusted, and the ozone of the sample gas Reduce the concentration to a predetermined concentration. The heating conditions for reducing the ozone concentration to a predetermined concentration also depend on the initial concentration of ozone, the piping structure of the buffer unit 5, the heating structure, and the like. It is preferable to set. 2 and 3 show an example of the relationship between the heating conditions (heating temperature × heating time) of the sample gas and the ozone concentration.

  Under the conditions shown in FIG. 2, the initial concentration of ozone is 10 ppm. In order to decrease the ozone concentration by two orders of magnitude, for example, heating at 200 ° C. for about 30 seconds or heating at 100 ° C. for about 300 seconds (5 minutes) may be performed. Further, when the ozone concentration of 10 ppm is decreased by two digits, it may be retained for about 20 minutes at room temperature. Under the conditions shown in FIG. 3, the initial concentration of ozone is 0.1 ppm. In order to reduce the ozone concentration to 10 ppb or less, for example, heating at 100 ° C. for 1200 seconds (20 minutes) or more, or heating at 200 ° C. for 120 seconds (2 minutes) or more. However, FIG. 2 and FIG. 3 are merely examples of heating conditions, and in practice, they are set according to sample conditions, apparatus conditions, and the like.

  As described above, the sample gas whose ozone concentration is lowered while staying in the buffer unit 5 is introduced into the collection tube 4 filled with the solid adsorbent 3. When the sample gas passes through the collection tube 4, the organic matter in the sample gas is adsorbed and collected by the solid adsorbent 3. The solid adsorbent 3 that has adsorbed the organic matter is heated together with, for example, the collection tube 4 to desorb the organic matter from the solid adsorbent 3. The organic matter desorbed from the solid adsorbent 3 is sent to an analyzer (analyzer) such as gas chromatography and analyzed. Analysis of organic matter may be either qualitative or quantitative. The desorption of organic substances is not limited to heat desorption, and solvent extraction or the like may be applied depending on the type of analyzer.

  FIG. 4 shows the results of collecting organic substances in the atmosphere of the exposure apparatus using the collection apparatus 1 of the first embodiment and analyzing the collected organic substances using a gas chromatography mass spectrometer. As the solid adsorbent 3, a Tenax tube (trade name, manufactured by Chrome Pack) was used. The ozone concentration (initial concentration) in the atmosphere inside the exposure apparatus was 0.1 ppm. The ozone concentration of the sample gas after being retained in the buffer unit 5 was 10 ppb or less. FIG. 4 is a total ion chart by gas chromatography mass spectrometry of a sample gas having an ozone concentration of 10 ppb or less.

  In the ion chart of FIG. 4, the peak # 8 is a siloxane peak. It can be seen that there is no impurity peak that interferes with the analysis of the siloxane peak, and that the quantitative analysis of siloxane can be performed with high accuracy. On the other hand, FIG. 5 shows the result of measuring the siloxane concentration in the atmosphere in the apparatus in the same manner as in the embodiment except that the buffer portion is not applied. In FIG. 5, a siloxane peak (# 8) is observed as in FIG. 4, but an impurity peak also appears. This is the decomposition peak of the solid adsorbent. In FIG. 5, the siloxane peak cannot be analyzed accurately because of the interference with the adsorbent decomposition peak.

  Thus, before introducing the sample gas into the solid adsorbent 3 made of the porous polymer, the ozone concentration in the sample gas is reduced by the buffer unit 5, so that the solid adsorbent 3 is decomposed by ozone in the sample gas. Furthermore, the appearance of the decomposition peak of the solid adsorbent 3 can be suppressed. Therefore, it becomes possible to analyze the organic substance such as siloxane to be measured with high accuracy. It is clear from FIGS. 4 and 5 that the substance that adversely affects the solid adsorbent 3 made of a porous polymer is an analysis result under the same conditions except that the ozone concentration is different.

  6 and 7 are analysis results of siloxane collected using an activated carbon-based adsorbent (total ion chart by gas chromatography mass spectrometry), and FIG. 6 shows a case where the sample gas contains ozone. Is the case where the ozone concentration in the sample gas is lowered as in the embodiment. In either case, the adsorbent decomposition peak does not appear, but the siloxane peak (# 8) itself as the measurement target is also small. Thus, since the activated carbon-based adsorbent has low adsorption efficiency of organic substances such as siloxane, it is impossible to analyze airborne organic substances with high sensitivity as in the case of using a solid adsorbent made of a porous polymer.

  In the embodiment described above, the collection device 1 shown in FIG. 1 structurally introduces the atmosphere in the buffer unit 5 into the collection tube 4. For such a point, for example, by purging the inside of the buffer unit 5 with an inert gas such as nitrogen gas (nitrogen purge or the like) in advance, the analysis accuracy is reduced due to the air remaining in the buffer unit 5. Can be suppressed. Furthermore, it is possible to eliminate the influence of the atmosphere remaining in the buffer unit 5 with the structure of the collection device 1. The apparatus configuration of such an aerial organic matter collecting apparatus 1 will be described with reference to FIG.

  FIG. 8 is a modification of the air organic matter collection device 1 shown in FIG. In the collection device 1 shown in FIG. 8, the suction pump 2 is connected to a suction pipe 7. The suction pipe 7 has first and second three-way valves 8 and 9, and is further connected to the gas discharge port 5 b of the buffer unit 5 through the valve 10. The gas inlet 5 a of the buffer unit 5 is connected to the suction pipe 12 via the valve 11. The first and second three-way valves 8 and 9 interposed in the suction pipe 7 are respectively connected to the collection pipe 13. A collection pipe 4 filled with a solid adsorbent 3 made of a porous polymer is installed in the middle of the collection pipe 13.

  The sample suction port of the collection tube 4 is connected to a first three-way valve 8 located on the upstream side (buffer portion 5 side) of the suction pipe 7. The sample discharge port of the collection tube 4 is connected to a second three-way valve 9 located on the downstream side (the suction pump 2 side) of the suction pipe 7. As described above, the collection device 1 includes the suction line A for sucking the sample gas from the air through the buffer unit 5 and the collection line B for collecting the organic matter from the sucked sample gas. A and the collection line B can be switched by three-way valves 8 and 9.

  The internal piping of the buffer unit 5 has a gabion structure so as to increase the heating efficiency of the sample gas. Furthermore, the buffer unit 5 is provided with a heating mechanism (such as a heater) 14 for heating the sample gas staying in the buffer unit 5. The buffer unit 5 may be composed of only a heating unit provided with the heating mechanism 14, but when a heated sample gas is directly introduced into the collection tube 4, the collection efficiency and collection accuracy of organic matter may decrease. . In such a case, it is preferable to apply the buffer unit 5 including the heating unit 15 including the heating mechanism 14 and the cooling unit 16 as shown in FIG. The cooling unit is also effective for the collection device 1 shown in FIG.

  The cooling unit 16 is connected to the outlet side of the heating pipe in the heating unit 15. In other words, the cooling unit 16 is installed between the heating unit 15 and the collection tube 4 on the collection line B side of the collection device 1. An intermediate valve 17 is interposed between the heating unit 15 and the cooling unit 16. The buffer unit 5 is configured by the heating unit 15 and the cooling unit 16. The heated sample gas is cooled to near room temperature by staying in the cooling unit 16 and then introduced into the collection tube 4. The cooling unit 16 is not limited to a structure that naturally radiates heat based on the residence time in the pipe, and may have a cooling mechanism such as an air cooling mechanism or a water cooling mechanism that forcibly cools the sample gas.

  In the collection device 1 shown in FIG. 8, first, the collection line B side of the three-way valves 8 and 9 is closed, and only the suction line A is opened. The buffer unit 5 closes the inlet valve 11 and opens the outlet valve 10 (the intermediate valve 17 is also opened in FIG. 9). In this state, the suction pump 2 is operated to suck the inside of the buffer unit 5 to a predetermined reduced pressure state. Next, while the suction tube 12 is disposed in the measurement atmosphere, the outlet valve 10 (the intermediate valve 17 in FIG. 9) of the buffer unit 5 is closed, the inlet valve 11 is opened, and the sample gas is sucked into the buffer unit 5. The inlet valve 11 is closed when the inside of the buffer unit 5 (heating unit 15 in FIG. 9) reaches atmospheric pressure and suction of a predetermined volume of sample gas is completed.

  Next, according to the ozone concentration in the sample gas, the sample gas is heated in the buffer unit 5 (heating unit 15 in FIG. 9) to decompose ozone. During this time, the suction line A from the outlet valve 10 (intermediate valve 17 in FIG. 9) of the buffer unit 5 to the suction pump 2 is kept at atmospheric pressure by opening an air release valve (not shown). Note that the air release valve has an organic substance removal filter, which prevents organic substances other than the sample gas from being mixed when the air is released to the atmosphere. The heating conditions of the sample gas are as described above, and are appropriately determined according to the ozone concentration (initial concentration) of the sample gas, the set concentration of ozone when introduced into the collection tube 4, the piping structure of the buffer unit 5, the heating structure, and the like. Set to.

  After the ozone reduction process of the sample gas is completed, the three-way valves 8 and 9 are switched to the collection line B side, and the outlet valve 10 of the buffer unit 5 is opened. In this state, the suction pump 2 is operated, the sample gas in the buffer unit 5 is introduced into the collection tube 4, and the organic matter in the sample gas is adsorbed by the solid adsorbent 3 and collected. At this time, the inlet valve 11 of the buffer unit 5 is also opened at the same time, but if it is left as it is, there is a risk of collecting organic substances in a gas of a predetermined volume or more. Therefore, nitrogen gas or clean air is introduced into the buffer unit 5 in accordance with the suction amount. Alternatively, an organic substance removal filter may be disposed just before the inlet valve 11 of the buffer unit 5.

  In the collection device 1 shown in FIG. 9, after the ozone reduction processing of the sample gas is completed, the three-way valves 8 and 9 are switched to the collection line B, and the intermediate valve 17 and the outlet valve 10 of the buffer unit 5 are opened. To do. In this state, the suction pump 2 is operated to cool the sample gas to room temperature while the sample gas stays in the cooling unit 16, and then the sample gas is introduced into the collection tube 4. Organic substances in the sample gas are adsorbed and collected by the solid adsorbent 3. Instead of applying the cooling unit 16, the sample gas may be naturally cooled by leaving the heating unit 15 after the heat treatment.

  The solid adsorbent 3 that has adsorbed the organic matter is heated together with, for example, the collection tube 4 to desorb the organic matter from the solid adsorbent 3. The organic matter desorbed from the solid adsorbent 3 is sent to an analyzer (analyzer) such as gas chromatography and analyzed. Also in the collection device 1 shown in FIGS. 8 and 9, the ozone concentration in the sample gas is reduced by the buffer unit 5 before the sample gas is introduced into the solid adsorbent 3 made of the porous polymer. Thereby, decomposition | disassembly of the solid adsorbent 3 by ozone in sample gas can be suppressed, and it becomes possible to analyze the organic substance which is a measuring object with high precision. Further, in FIG. 8 and FIG. 9, the suction line A and the collection line B can be switched, so that only a predetermined volume of sample gas can be introduced into the collection tube 4.

  Next, a second embodiment will be described with reference to FIG. As in the first embodiment, the air organic matter analyzer of the second embodiment is an air organic matter collecting device 21 shown in FIG. 10 and an analysis unit using a gas chromatography, a gas chromatography mass spectrometer, or the like. (Not shown). The air organic substance collection device 21 shown in FIG. 10 has a solid catalyst 23 for ozone decomposition as a buffer unit 22. The solid catalyst 23 for ozonolysis is inserted into the collection tube 4 as a front stage of the solid adsorbent 3. The type of solid adsorbent 3, the measurement atmosphere, the ozone concentration of the sample gas, and the like are the same as in the first embodiment.

  The ozonolysis solid catalyst 23 is arranged in the collection tube 4 as an ozonolysis filter. As the ozonolysis solid catalyst 23, manganese oxide, titanium oxide, platinum or the like is used. In the buffer unit 22 using the solid catalyst for ozone decomposition 23, the reaction time (suction speed) with the sample gas (atmosphere) to be sucked is controlled to efficiently decompose ozone in the sample gas. The solid catalyst 23 for ozonolysis is not limited to the arrangement in the collection tube 4, and may be arranged in a buffer unit provided separately from the collection tube 4. Further, the ozonolysis solid catalyst 23 may be used in combination with the buffer unit 5 of the first embodiment. That is, you may connect the buffer part 5 of 1st Embodiment, and the collection pipe | tube 4 which has the solid catalyst 23 for ozone decomposition | disassembly. Thereby, the decomposition efficiency of ozone is improved.

  In the air organic matter collection device 21 shown in FIG. 10, the sample gas sucked by operating the suction pump 2 first passes through the solid catalyst 23 for ozone decomposition as an ozone decomposition filter, and at that time the ozone concentration is predetermined. The concentration drops below the concentration of. Then, the sample gas having a reduced ozone concentration is introduced into the solid adsorbent 3, and the organic matter in the sample gas is adsorbed and collected by the solid adsorbent 3. The solid adsorbent 3 adsorbing the organic matter is heated together with the collection tube 4, and the organic matter is desorbed from the solid adsorbent 3. At this time, the organic substance adsorbed on the ozone decomposition solid catalyst 23 can also be desorbed by simultaneously heating the ozone decomposition solid catalyst 23. The organic matter desorbed from the solid adsorbent 3 is sent to an analyzer (analyzer) such as gas chromatography and analyzed.

  According to the air organic matter collection device 21 of the second embodiment, before introducing the sample gas into the solid adsorbent 3 made of the porous polymer, the sample gas is brought into contact with the solid catalyst 23 for ozone decomposition to be contained in the sample gas. The ozone concentration is lowered. Thereby, decomposition | disassembly of the solid adsorbent 3 by ozone in sample gas, and also the appearance of the decomposition peak of the solid adsorbent 3 can be suppressed. Therefore, it becomes possible to analyze the organic substance such as siloxane to be measured with high accuracy. As described above, the first embodiment and the second embodiment can be combined, and in this case, the decomposition efficiency of ozone present in the sample gas can be further increased.

  Note that the method and apparatus for analyzing an organic substance in the air according to the present invention are not limited to the above-described embodiments, and collect organic substances using a solid adsorbent made of a porous polymer from the air containing various ozone. It can be applied when analyzing collected organic matter. The specific structure of the air organic matter analyzer of the present invention can be variously modified as long as it satisfies the basic structure of the present invention. Furthermore, the embodiments can be expanded or modified within the scope of the technical idea of the present invention, and the expanded and modified embodiments are also included in the technical scope of the present invention.

It is a figure which shows schematic structure of the collection apparatus of the air organic substance applied to the analyzer of the air organic substance by the 1st Embodiment of this invention. It is a figure which shows an example of the relationship between heating conditions (heating temperature x heating time) in case ozone initial concentration is 10 ppm, and ozone concentration. It is a figure which shows an example of the relationship between heating conditions (heating temperature x heating time) in case ozone initial concentration is 0.1 ppm, and ozone concentration. It is a figure which shows the gas chromatography analysis result of the organic substance in the sample gas by the Example of this invention. It is a figure which shows the gas-chromatography analysis result of the organic substance in the sample gas as a 1st comparative example. It is a figure which shows the gas-chromatography analysis result of the organic substance in the sample gas as a 2nd comparative example. It is a figure which shows the gas-chromatography analysis result of the organic substance in the sample gas as a 3rd comparative example. It is a figure which shows the modification of the collection apparatus of the air | atmosphere organic substance shown in FIG. It is a figure which shows the other modification of the collection apparatus of the air | atmosphere organic substance shown in FIG. It is a figure which shows schematic structure of the collection apparatus of the air organic substance applied to the analysis apparatus of the air organic substance by the 2nd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,21 ... Air organic substance collection apparatus, 2 ... Suction pump, 3 ... Solid adsorbent which consists of porous polymers, 4 ... Collection pipe, 5,22 ... Buffer part, 14 ... Heating mechanism, 15 ... Heating part , 16 ... cooling part, 23 ... solid catalyst for ozonolysis.

Claims (5)

A step of sucking a sample gas from the atmosphere containing ozone, collecting the organic matter in the sucked sample gas with a solid adsorbent made of a porous polymer, and analyzing the organic matter collected with the solid adsorbent A method for analyzing airborne organic matter, comprising:
After reducing the ozone concentration in the sample gas, the organic substance in the sample gas is collected by the solid adsorbent, and the method for analyzing an organic substance in air. The method for analyzing an airborne organic substance according to claim 1,
A method for analyzing airborne organic substances, wherein the sample gas is heated so as to promote the decomposition of ozone to lower the ozone concentration in the sample gas. In the analysis method of the air organic substance according to claim 1 or claim 2,
A method of analyzing organic substances in air, wherein the sample gas is brought into contact with a solid catalyst for ozonolysis to lower the ozone concentration in the sample gas. A buffer unit for lowering the ozone concentration in the sample gas sucked from the atmosphere containing ozone;
A solid adsorbent comprising a porous polymer into which the sample gas is introduced from the buffer unit, and a collection unit for collecting organic matter in the sample gas with the solid adsorbent;
And an analysis unit for analyzing the organic matter collected by the solid adsorbent. In the analysis apparatus of the air organic substance of Claim 4,
The said buffer part is equipped with at least one of the heating mechanism which heats the said sample gas, and accelerates | stimulates decomposition | disassembly of ozone, and the solid catalyst for ozone decomposition | disassembly, The analysis apparatus of the organic substance in air

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