JP4089646B2 - Organic volatile matter collection tube and organic volatile matter measurement method - Google Patents

Description

  The present invention relates to a collection tube for organic volatile matter measurement and an organic volatile matter measurement method, and particularly suitable for measuring highly adsorbable organic volatile matter that volatilizes in a trace amount from a test piece such as an organic material. The present invention relates to a collection tube for use and an organic volatile matter measuring method.

  Various organic materials are used for various materials installed in wall materials and floor materials constituting clean rooms or clean rooms. Organic volatiles are generated from these organic materials. A typical example is dioctyl phthalic acid (DOP). Dioctyl phthalic acid is often used as a plastic additive in plastic materials. Dioctyl phthalic acid has a boiling point of 360 ° C. and is slightly volatile at room temperature. For this reason, dioctylphthalic acid is usually contained in a trace amount of 0.1 to 1 ng / L in a clean room atmosphere. Dibutyl phthalic acid (DBP), dioctyl adipic acid (DOA), and the like are similarly contained in a clean room atmosphere. There is a problem that these organic volatiles present in the clean room atmosphere are adsorbed on the surface of the semiconductor wafer and affect the electrical characteristics thereof. Therefore, it is necessary to evaluate those organic volatiles that adsorb on the wafer surface.

  Currently, the method described in “Measurement Guidelines for Molecular Pollutants Generated from Cleanroom Constituent Materials (Draft)” of the Japan Air Cleaning Association is used to measure organic volatiles volatilized from specimens such as organic materials. ing. A schematic diagram thereof is shown in FIG. In this measurement method, organic volatiles that are volatilized from the test piece 1 are sucked by the suction pump 5 and are collected by the collecting part in front of the suction pump on the air flow while adjusting the measurement time with the integrating flow meter 6. It is. First, a test piece 1 such as an organic material to be measured is placed in the chamber 2. The chamber 2 is made of a stainless steel or glass container. Purified air or nitrogen gas is injected from the upper inlet in the chamber 2, organic volatiles volatilized from the test piece 1 are entrained in the air flow, and the invinger 3 or the through the pipe 7 connected to the upper outlet of the chamber 2. Collected by a collection unit such as a collection agent 4. Thereafter, the organic volatiles collected in the collection part are analyzed by a thermal desorption gas chromatograph or the like, and the type and amount of the organic volatiles are measured.

Further, in Patent Document 1, a test piece on which contaminants are adsorbed is accommodated in an adsorption tube container, and by attaching the adsorption tube container to the mass spectrometer, the contaminants adsorbed on the test piece are thermally desorbed and contaminated. A method is described in which the type and mass of a substance are measured to evaluate the degree of contamination at the location to be measured.
JP 2001-264295 A

  However, in the measurement method according to the guideline, organic volatiles generated from the test piece are strongly adsorbed such as dioctylphthalic acid (DOP), and are adsorbed on the inside of the chamber 2 or the inner wall of the pipe 7. Unable to reach the collecting part. For this reason, it is difficult to accurately measure the type and amount of generated organic volatiles. In addition, the method described in Patent Document 1 is a method for measuring and evaluating contaminants adsorbed on a test piece, and is not a method for measuring organic volatiles volatilized from a test piece such as a plastic component. .

  An object of the present invention is to provide a collection tube for measuring organic volatile matter and an organic volatile matter measuring method capable of accurately measuring even strongly adsorbing organic volatiles that volatilize from a test piece. .

  In order to achieve the above object, an organic volatile matter measuring collection tube according to the present invention includes a tubular body provided with an airflow inlet and an outlet and an upstream portion of the tubular body for accommodating a test piece. A possible test piece container, an organic volatiles collector filling part disposed in the downstream part of the tubular body, and an organic volatile matter disposed between the test piece container and the collector filling part. And an airflow guide member for guiding the airflow passing through the adsorption portion to the inner wall of the pipe, and can be directly loaded into the thermal desorption portion of the thermal desorption type gas chromatograph apparatus.

  In addition, the organic volatile matter measuring collection tube according to the present invention includes the organic volatile matter measuring collection tube divided into a primary collection tube and a secondary collection tube. A piece containing part, the adsorbing part, and the airflow guide member are arranged, the collecting agent filling part is arranged in a secondary collecting pipe, and the primary collecting pipe and the secondary collecting pipe are each heated independently. The desorption type gas chromatograph apparatus can be loaded into a thermal desorption section.

It is preferable that the airflow guide member has a structure in which an airflow blocking member is disposed at a central portion of the filter member and guides the airflow in an annular shape with respect to a pipe cross section.
Further, in the organic volatile matter measuring method according to the present invention, the collection pipe having the above-described configuration is arranged vertically so that the airflow inlet is located above, and the test piece is suspended from the inlet. A first step in which the organic volatiles contained in the collection tube and introduced into the collection tube and volatilized from the test piece are adsorbed and collected by the adsorption unit and the collection agent filling unit; and a first step After extracting the test piece from the subsequent collection tube, the collection tube is loaded into a thermal desorption part of a thermal desorption type gas chromatograph device, and the organic volatiles adsorbed and collected in the collection tube are converted into the heat And a second step of analyzing by a desorption type gas chromatograph apparatus.

  According to the present invention, the test piece is accommodated in the collection tube, and the organic volatiles volatilized from the test piece are immediately collected in the collection tube, and the collection tube is thermally desorbed in the thermal desorption type gas chromatograph apparatus. It was made possible to load directly in the part. For this reason, it can measure with high precision also to organic volatiles with strong adsorptivity, such as dioctyl phthalic acid (DOP) which volatilizes from a test piece. In particular, by arranging an airflow guide member that guides the airflow passing through the adsorption section to the inner wall of the pipe, when the collection pipe is loaded into the thermal desorption section of the thermal desorption type gas chromatograph apparatus, Fully contact with organic volatiles adsorbed on the inner wall of the tube to ensure desorption of organic volatiles. For this reason, the desorption rate of the organic volatile matter can be increased, and the measurement accuracy in the thermal desorption type gas chromatograph apparatus can be improved.

  In addition, the collection tube is divided into a primary collection tube and a secondary collection tube. They are used by connecting both at the time of sampling, and separated between the primary collection tube and the secondary collection tube during measurement and analysis. Were individually loaded into the thermal desorption part of the thermal desorption type gas chromatograph so that measurement and analysis could be performed. For this reason, it is effective not only for measuring the type and amount of the organic volatiles that volatilize from the test piece, but also for determining the tendency of the adsorbability of the volatile organic volatiles. Furthermore, the test piece storage part, the adsorption part, and the airflow guide member are arranged in the primary collection tube, and the airflow passing through the adsorption part is guided to the inner wall of the pipe. For this reason, the measurement accuracy in the thermal desorption-type gas chromatograph apparatus of the highly adsorbable organic volatiles collected by the primary collection tube can be improved.

  This makes it possible to clarify the relationship between the selection of organic materials and the like constituting the clean room and the amount of organic volatiles allowed in the clean room atmosphere. Therefore, it becomes possible to give a guide to the influence of organic volatiles contained in the development of clean room constituent materials.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a sectional view showing a first embodiment of a collection tube for measuring organic volatile matter according to the present invention. The collection tube 10 is divided into a primary collection tube 12 and a secondary collection tube 14. The primary collection tube 12 is formed of a quartz tubular body, and a gas supply plug 16 that is an air flow inlet is attached to the upper end opening, and a test piece container 20 that can accommodate a test piece 18 in the upstream part. It is said. A lower area of the test piece container 20 is an organic volatiles adsorption unit 22. An airflow guide member 24 that guides the airflow passing through the adsorption portion 22 to the inner wall of the pipe is disposed in the adsorption portion 22. The airflow guide member 24 has a structure in which a quartz plate 24B is fixed as an airflow blocking member at a central portion of a quartz filter 24A arranged so as to block the cross section of the tube, and an annular shape is provided between the side portion of the quartz plate 24B and the inner wall of the tube. A gap S is formed. The airflow passing through the adsorption part passes through the annular gap S avoiding the quartz plate 24B, and as a result, the airflow is guided to the inner wall of the tube. Below the airflow guide member 24 is a tapered tapered portion 26, and a connecting portion 28 is formed at the lower end of the tapered portion 26.

  Similarly to the primary collection tube 12, the secondary collection tube 14 is also formed of a quartz tubular body, and a connecting portion 30 is formed at the upper end. By connecting the connecting portion 30 and the connecting portion 28 of the primary collection tube 12 with a connector 32, the primary collection tube 12 and the secondary collection tube 14 communicate with each other. A quartz filter 34 is attached in the secondary collection tube 14. A lower area of the quartz filter 34 is an organic volatile trapping agent filling section 36, and is filled with a trapping agent such as a porous polymer adsorbent (trade name: Tenax). Quartz wool 38 is packed in the lower end side of the collecting agent filling portion 36 to fix the collecting agent and prevent the collecting agent from falling downward. A gas discharge plug 40 is attached to the lower end opening of the secondary collection pipe 14, and this gas discharge plug 40 serves as an airflow outlet. The primary collection tube 12 and the secondary collection tube 14 can be separated by removing the connector 32. Each of the separated primary collection pipe 12 and secondary collection pipe 14 can be independently loaded into the thermal desorption section of the thermal desorption type gas chromatograph apparatus.

  Hereinafter, a method for measuring organic volatiles using the collection tube 10 will be described with reference to FIG. First, each heat cleaning process is performed separately in the state which separated the primary collection pipe | tube 12 and the secondary collection pipe | tube 14 as a preliminary | backup process before a measurement (S100). The heating and cleaning process of the primary collection tube 12 is performed at 280 ° C. for 1 hour while flowing high-purity nitrogen into the tube in an empty state where the test piece 18 is not accommodated in the test piece accommodation unit 20. By this heating, organic volatiles adsorbed on the inner wall of the tube, the quartz filter 24A, and the quartz plate 24B are volatilized, and the inside of the primary collection tube 12 is purified. Similarly, the heating and cleaning treatment of the secondary collection tube 14 is heated at 280 ° C. for 3 hours while flowing high-purity nitrogen in the tube, and is adsorbed on the collection agent or the like of the collection agent filling unit 36. Volatilize and discharge. The reason why the heating time is increased to 3 hours is that it takes time to completely desorb the organic volatiles because the adsorbing power of the scavenger to the organic volatiles is strong. In next S 110, the primary collection tube 12 and the secondary collection tube 14 are connected using the connector 32. In S100 and S110, the gas of the gas supply plug 16 of the primary collection pipe 12 or the gas of the secondary collection pipe 14 in a state in which the primary collection pipe 12 and the secondary collection pipe 14 are connected in reverse to the above procedure. High purity nitrogen may be flowed from either one of the discharge plugs 40 to heat and clean the primary collection pipe 12 and the secondary collection pipe 14 simultaneously.

  In S120, the test piece 18 is preliminarily processed. The test piece 18 is obtained by processing an organic material or the like to be measured into a size that can be accommodated in the test piece accommodation portion 20 of the primary collection tube 12. In the pretreatment, the test piece 18 is exposed to air. As the air for exposure, clean air from which impurities such as organic substances have been removed is used. The exposure time is about 48 hours, for example. The purpose of this pretreatment is to make the test piece 18 in the same state as when the material to be measured is actually used as, for example, a clean room component. Therefore, the exposure conditions in the pretreatment are appropriately set in consideration of the state in which the material to be measured is actually used.

  In S <b> 130, the test piece 18 for which the preliminary processing has been completed is attached to the test piece storage unit 20 of the primary collection tube 12. FIG. 1 shows a state in which the test piece 18 is mounted. That is, the primary collection pipe 12 is vertically arranged so that the gas supply plug 16 is positioned above, and the test piece 18 is suspended from the gas supply plug 16 using a stainless steel wire 42 having a diameter of about 0.1 mm.

  In S140, sampling is performed. In this sampling, as shown in FIG. 1, the test piece 18 is suspended from the test piece housing portion 20 of the primary collection tube 12, and air is allowed to flow from the gas supply plug 16 without the test piece 18 being in contact with the inner wall of the tube. By doing. As sampling air, use is made of clean air obtained by removing organic substances or the like with activated carbon and adjusted to a predetermined temperature and humidity. The supply air amount is set so that the air flow rate in the pipe is 0.1 to 2.0 m / sec. The sampling time is in the range of 25 to 320 minutes. By this sampling, the organic volatiles contained in the test piece 18 are continuously volatilized from the surface of the test piece 18. Among the volatilized organic volatiles, those having strong adsorptivity are mainly adsorbed on the inner wall of the adsorbing portion 22 of the primary collection tube 12 and the lower quartz filter 24A and the quartz plate 24B as shown in FIG. On the other hand, organic volatiles having a weak adsorptivity pass through the primary collection tube 12 and are collected mainly by the collection agent filling section 36 of the secondary collection tube 14. That is, the porous polymer adsorbent (trade name: Tenax) filled in the collector filling portion 36 is a collector having a large adsorbing power for organic volatiles, and is a low concentration organic volatile having a low adsorbability. However, it is reliably collected by its adsorption power. Although a small amount of organic volatiles may be volatilized from the stainless steel wire 42 that suspends the test piece 18, the surface area of the stainless steel wire 42 is remarkably smaller than the surface area of the test piece 18, so the influence can be ignored.

  When the sampling of S140 is completed, the process proceeds to the next measurement / analysis of S150. For the measurement and analysis, a thermal desorption type gas chromatograph apparatus is used, and the primary collection tube 12 and the secondary collection tube 14 are separately measured and analyzed. The sampling tube 10 for which sampling has been completed is separated into a primary collection tube 12 and a secondary collection tube 14, and the test piece 18 is extracted from the primary collection tube 12 and then applied to a thermal desorption type gas chromatograph apparatus. FIG. 4 is a schematic diagram of a thermal desorption type gas chromatograph apparatus. The apparatus 50 includes a thermal desorption unit 52, a gas chromatograph 54, and a mass analysis unit 56. By loading the primary collection tube 12 or the secondary collection tube 14 into the thermal desorption unit 52, the respective collections are performed. Measure and analyze the type and amount of organic volatiles collected in the tube.

  That is, the thermal desorption section 52 heats the collection tube 12 (or 14) to a predetermined temperature by the heater 59 while flowing the carrier gas from the gas cylinder 58 to the loaded collection tube 12 (or 14). Then, the organic volatile matter adsorbed on the collection tube 12 (or 14) is desorbed from each part of the collection tube 12 (or 14) and sent to the gas chromatograph 54. In the gas chromatograph 54, a plurality of types of organic volatiles are developed and separated with a difference in moving speed due to their adsorptivity, and reach the mass spectrometer 56 with a time difference. Therefore, the mass analyzer 56 can detect the amount of each type of organic volatile matter.

  FIG. 5 is an explanatory view showing the flow state of the carrier gas when the primary collection tube is subjected to thermal desorption at the thermal desorption section 52. (1) is the case of the primary collection tube 12 according to the present invention, (2 ) Shows the case of the primary collection tube 60 outside the present invention. In the primary collection tube 12 according to the present invention shown in FIG. 5 (1), an airflow guide member 24 composed of a quartz filter 24 A and a quartz plate 24 B is disposed in the adsorption portion 22. For this reason, the carrier gas C passing through the adsorbing portion 22 passes through the annular gap S avoiding the quartz plate 24B, and the carrier gas C is guided to the inner wall of the pipe. Therefore, the carrier gas C is sufficiently in contact with the organic volatiles adsorbed on the inner wall of the pipe and reliably desorbs the organic volatiles. For this reason, the desorption rate of organic volatiles can be increased, and the measurement accuracy of the thermal desorption type gas chromatograph apparatus 50 is improved. On the other hand, in the primary collection pipe 60 outside the present invention that does not have the airflow guide member shown in FIG. 5 (2), the carrier gas C is easy to flow to the pipe center. For this reason, the contact between the carrier gas C and the organic volatile matter adsorbed on the inner wall of the pipe becomes insufficient, and the desorption of the organic volatile matter becomes uncertain. Therefore, the desorption rate of organic volatiles is lowered, and the measurement accuracy of the thermal desorption type gas chromatograph apparatus 50 is lowered.

  FIG. 6 is a spectrum diagram illustrating the results of mass spectrometry in the thermal desorption type gas chromatograph apparatus 50 when the primary collection tube 12 according to the present invention shown in FIG. In the detection by the primary collection tube, the organic volatile matter detected at a retention time of 25 minutes is dioctylphthalic acid (DOP) having strong adsorptivity. DOP is not detected in the secondary collection tube. From this, DOP is actively volatilized from the test piece used at the time of sampling, and almost all of the volatilized DOP is adsorbed and collected by the adsorption unit 22 including the quartz filter 24A and the quartz plate 24B. It clearly shows that the next collection tube 14 has not been reached.

  FIG. 7 is a spectrum diagram illustrating the results of mass spectrometry in the thermal desorption type gas chromatograph apparatus 50 when the primary collection tube 60 outside the present invention shown in FIG. 5 (2) is used. Sampling conditions are the same as those shown in FIG. Even in this case, there is a tendency similar to the result shown in FIG. However, in the detection with the primary collection tube, the amount of DOP detected in the holding time of 25 minutes is reduced to about half. From this, when the primary collection tube 60 outside the present invention is used, since the desorption of DOP in the thermal desorption section 52 of the thermal desorption gas chromatograph apparatus 50 is insufficient, the mass spectrometric value of DOP is It shows that it becomes smaller and the repeatability of measurement repeats worsens.

  As described above, the organic volatile matter measuring collection tube 10 of the present embodiment is divided into a primary collection tube 12 and a secondary collection tube 14, and the primary collection tube 12 includes a test piece container 20 and A suction part 22 is arranged. Further, a collection agent filling portion 36 is disposed in the secondary collection tube 14. Therefore, the two are connected and used at the time of sampling, and both are separated at the time of measurement / analysis, and the primary collection tube 12 and the secondary collection tube 14 are each loaded in the thermal desorption section 52 of the thermal desorption type gas chromatograph apparatus 50 alone. Can be measured and analyzed. For this reason, it is effective when investigating the tendency regarding not only the kind and amount of organic volatiles that volatilize from the test piece 18 but also the adsorptivity of the volatile organic volatiles. Further, an air flow guide member 24 is disposed in the primary collection tube 12 so as to guide the air flow passing through the adsorption portion 22 to the inner wall of the tube. For this reason, when the primary collection tube 12 is loaded into the thermal desorption section 52 of the thermal desorption type gas chromatograph apparatus 50 and thermal desorption is performed, the carrier gas sufficiently contacts the organic volatiles adsorbed on the inner wall of the tube. And ensure that organic volatiles are desorbed. For this reason, the desorption rate of organic volatiles can be increased, and the measurement accuracy in the thermal desorption type gas chromatograph apparatus 50 can be improved.

  FIG. 8 is a cross-sectional view showing a modified example of the airflow guide member disposed in the primary collection tube 12. FIG. 8A shows an example in which the quartz plate 24B, which is an airflow blocking member, is supported by the support member 24D so as to be located at the center of the tube. FIG. 8B is an example in which quartz wool 24E is disposed below a quartz plate 24B similar to (1). FIG. 8 (3) shows an example in which a quartz plate 24B is embedded in the center of an annular quartz filter 24F, and an integrated one is fused to the inner wall of the tube. (2) In the case shown in (3), the quartz wool 24E and the quartz filter 24F play an auxiliary role in collecting strongly adsorbing organic volatiles during sampling.

  FIG. 9 is a sectional view showing a second embodiment of the organic volatile matter measuring collection tube according to the present invention. The collection tube 70 is formed of a tubular body, and a gas supply plug 72 as an airflow inlet is attached to the upper end opening. And, sequentially from the upstream side of the air flow, a test piece housing part 73 capable of housing the test piece 18, an organic volatile matter adsorption part 74, and an air flow guide member 76 for guiding the air flow passing through the adsorption part 74 to the inner wall of the pipe An organic volatile scavenger filling unit 78 is disposed. A gas discharge plug 80 which is an outlet for airflow is attached to the lower end opening.

  Even when organic volatiles are measured using the collection tube 70, sampling, measurement, and analysis are performed in the same manner as the procedure shown in FIG. However, since the collection tube 70 is not divided as in the first embodiment, the connecting operation of S110 in FIG. 2 is not necessary. An airflow guide member 76 is also disposed in the collecting pipe 70 so as to guide the airflow passing through the adsorption portion 74 to the inner wall of the pipe. Therefore, when the sampling tube 70 after sampling is loaded into the thermal desorption section of the thermal desorption type gas chromatograph and thermal desorption is performed, the carrier gas is in sufficient contact with the organic volatiles adsorbed on the inner wall of the tube. And ensure that organic volatiles are desorbed. For this reason, the desorption rate of the organic volatile matter can be increased, and the measurement accuracy in the thermal desorption type gas chromatograph apparatus can be improved. When loading the collection tube 70 into the thermal desorption section, it is preferable to reverse the loading direction so that the carrier gas flows from the gas discharge plug 80 side and escapes from the gas supply plug 72 during the thermal desorption. . By loading in this manner, the organic volatiles desorbed from the collecting agent of the collecting agent filling section 78 having a strong adsorbing force are smoothly carried to the carrier gas without repeating re-adsorption, so that the thermal desorption operation is efficiently performed. Measurement accuracy can be improved.

  In the above embodiment, the case where the material of each part constituting the collection tube is mainly quartz has been described. However, the present invention is not limited to this, and other materials may be used as the material of each part constituting the collection tube. For example, when it is desired to examine the state of adhesion of organic volatiles to a silicon-based wafer, it is desirable to use a silicon-based material as the material of each part constituting the collection tube. Even when the investigation object is a metal or glass, it is desirable to select the same material as the material of each part constituting the collection tube.

  In the said embodiment, what was provided with the mass-analysis part was demonstrated as a thermal desorption type gas chromatograph apparatus. However, the thermal desorption type gas chromatograph apparatus according to the present invention is not limited to this, and an apparatus equipped with various analysis units instead of the mass analysis unit can be used.

It is sectional drawing which shows 1st Embodiment of the collection tube for organic volatile matter measurement which concerns on this invention. It is explanatory drawing which shows the measurement procedure of the organic volatile matter measuring method which concerns on this invention. It is explanatory drawing which shows the adsorption | suction state of the organic volatile matter in the adsorption | suction part of a primary collection tube. It is a schematic diagram of a thermal desorption type gas chromatograph apparatus. It is explanatory drawing which showed the flow condition of the carrier gas at the time of a primary collection pipe receiving thermal desorption in a thermal desorption part. It is the spectrum figure which illustrated the mass spectrometry result in the thermal desorption type gas chromatograph device at the time of using the primary collection tube concerning the present invention. It is the spectrum figure which illustrated the mass spectrometry result in the thermal desorption type gas chromatograph device at the time of using the primary collection tube outside the present invention. It is sectional drawing which shows the modification of the airflow guide member arrange | positioned at a primary collection pipe. It is sectional drawing which shows 2nd Embodiment of the collection tube for organic volatile matter measurement which concerns on this invention. It is a schematic diagram which shows the organic volatile matter measuring method which concerns on a prior art.

Explanation of symbols

10 ......... Collecting tube, 12 ......... Primary collecting tube, 14 ......... Secondary collecting tube, 16 ...... Gas supply plug, 18 ......... Test specimen, 20 ......... Test specimen container , 22 ......... Adsorption part, 24 ... ... Airflow guide member, 24A ... ... Quartz filter, 24B ... ... Quartz plate, 28, 30 ... ... Connection part, 32 ... ... Connector, 34 ... ... Quartz Filter, 36 ......... Filling agent filling section, 38 ......... Quartz wool, 40 ......... Gas discharge plug, 50 ......... Heat desorption type gas chromatograph, 52 ......... Heat desorption section, 54 ......... Gas chromatograph, 56... Mass spectrometer, 60... Primary collection tube (outside of the present invention) 70... Collection tube, 72... Gas supply plug, 73. 74 ......... Adsorption part, 76 ...... Airflow guide member, 78 ......... Filling agent filling part, 80 ...... Gas discharge plug.

Claims (4)

  A tubular body having an airflow inlet and an outlet, a test piece container disposed in an upstream portion of the tubular body and capable of accommodating a test piece, and an organic volatile substance disposed in a downstream portion of the tubular body. A collector filling portion, an organic volatiles adsorbing portion disposed between the test piece container and the collecting agent filling portion, and an airflow guide member for guiding the airflow passing through the adsorbing portion to the inner wall of the pipe; A collection tube for measuring organic volatile matter, characterized in that it can be directly loaded into a thermal desorption part of a thermal desorption type gas chromatograph apparatus.   The organic volatile matter measuring collection tube is divided into a primary collection tube and a secondary collection tube, and the test piece storage unit, the adsorption unit, and the airflow guide member are arranged in the primary collection tube. The secondary collection tube is provided with the collecting agent filling unit, and the primary collection tube and the secondary collection tube can each be independently loaded into the thermal desorption unit of the thermal desorption type gas chromatograph apparatus. The collection tube for measuring organic volatile matter according to claim 1.   3. The organic volatilization according to claim 1, wherein the air flow guide member has a structure in which an air flow blocking member is disposed in a central portion of the filter member, and guides the air flow in an annular shape with respect to a pipe cross section. Collection tube for measuring objects. The collecting pipe according to any one of claims 1 to 3 is arranged vertically so that an airflow inlet is located above, and the test piece is suspended from the inlet and the trapping is performed. A first step in which the organic volatiles contained in the collecting tube, air is introduced into the collecting tube, and volatilized from the test piece are adsorbed and collected by the adsorbing unit and the collecting agent filling unit, and after the first step After extracting the test piece from the collection tube, the collection tube is loaded into a thermal desorption section of a thermal desorption type gas chromatograph device, and the organic volatiles adsorbed and collected in the collection tube are desorbed in the heat. The organic volatile matter measuring method characterized by including the 2nd process analyzed by a type | mold gas chromatograph apparatus.

Images