JP2009238715A5 - - Google Patents

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Publication number
JP2009238715A5
JP2009238715A5 JP2008113156A JP2008113156A JP2009238715A5 JP 2009238715 A5 JP2009238715 A5 JP 2009238715A5 JP 2008113156 A JP2008113156 A JP 2008113156A JP 2008113156 A JP2008113156 A JP 2008113156A JP 2009238715 A5 JP2009238715 A5 JP 2009238715A5
Authority
JP
Japan
Prior art keywords
fixed electrode
vibration sensor
electrode
spacer
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008113156A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009238715A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008113156A priority Critical patent/JP2009238715A/ja
Priority claimed from JP2008113156A external-priority patent/JP2009238715A/ja
Publication of JP2009238715A publication Critical patent/JP2009238715A/ja
Publication of JP2009238715A5 publication Critical patent/JP2009238715A5/ja
Pending legal-status Critical Current

Links

JP2008113156A 2008-03-27 2008-03-27 傾斜・振動センサ Pending JP2009238715A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008113156A JP2009238715A (ja) 2008-03-27 2008-03-27 傾斜・振動センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008113156A JP2009238715A (ja) 2008-03-27 2008-03-27 傾斜・振動センサ

Publications (2)

Publication Number Publication Date
JP2009238715A JP2009238715A (ja) 2009-10-15
JP2009238715A5 true JP2009238715A5 (https=) 2010-12-16

Family

ID=41252387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008113156A Pending JP2009238715A (ja) 2008-03-27 2008-03-27 傾斜・振動センサ

Country Status (1)

Country Link
JP (1) JP2009238715A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101366553B1 (ko) 2012-09-20 2014-02-26 주식회사 동부하이텍 반도체 소자 및 그 제조 방법
KR101366554B1 (ko) 2012-09-20 2014-02-26 주식회사 동부하이텍 반도체 소자 및 그 제조 방법
KR101366552B1 (ko) 2012-09-20 2014-02-26 주식회사 동부하이텍 반도체 소자 및 그 제조 방법
KR101391290B1 (ko) 2012-12-24 2014-05-02 주식회사 동부하이텍 반도체 소자 및 그 제조 방법
JP6021799B2 (ja) * 2013-12-27 2016-11-09 京セラ株式会社 振動検出装置

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