JP2009217193A5 - - Google Patents

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Publication number
JP2009217193A5
JP2009217193A5 JP2008063522A JP2008063522A JP2009217193A5 JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5 JP 2008063522 A JP2008063522 A JP 2008063522A JP 2008063522 A JP2008063522 A JP 2008063522A JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5
Authority
JP
Japan
Prior art keywords
mirror
magnet
substrate
recess
optical deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008063522A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009217193A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008063522A priority Critical patent/JP2009217193A/ja
Priority claimed from JP2008063522A external-priority patent/JP2009217193A/ja
Publication of JP2009217193A publication Critical patent/JP2009217193A/ja
Publication of JP2009217193A5 publication Critical patent/JP2009217193A5/ja
Withdrawn legal-status Critical Current

Links

JP2008063522A 2008-03-13 2008-03-13 光偏向器及びその製造方法 Withdrawn JP2009217193A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008063522A JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008063522A JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Publications (2)

Publication Number Publication Date
JP2009217193A JP2009217193A (ja) 2009-09-24
JP2009217193A5 true JP2009217193A5 (enExample) 2011-04-07

Family

ID=41189070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008063522A Withdrawn JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Country Status (1)

Country Link
JP (1) JP2009217193A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5842356B2 (ja) * 2011-03-24 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP5923933B2 (ja) * 2011-11-08 2016-05-25 セイコーエプソン株式会社 ミラーデバイス、光スキャナーおよび画像形成装置
JP5842837B2 (ja) * 2013-01-30 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置

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