JP2009209320A - Double-sided pressure-sensitive adhesive tape for fixing abrasive - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a double-sided pressure-sensitive adhesive tape for fixing abrasives, exhibiting excellent repeelability even when in a large scale as well as exhibiting excellent adhesiveness even in the presence of a strong acid or a strong alkali. <P>SOLUTION: The double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive C is used for freely removably fixing the abrasive on the disc B of a grinder A. In the tape, an acrylic adhesive layer 12 comprising a xylene-based tackifying resin and an acrylic copolymer is integrally laminated on one side of a polyethylene terephthalate film 11 which is a substrate, while a urethane-based adhesive layer 13 is integrally laminated on the other side of the polyethylene terephthalate film, and the 180° peel strength of the urethane-based adhesive constituting the urethane-based adhesive layer to a stainless plate measured according to JIS Z0237 is 1.2-7.0 N/25 mm. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an abrasive fixing double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine.

  Conventionally, double-sided pressure-sensitive adhesive tapes are used in Patent Document 1 and Patent Document 2 to fix an abrasive to a surface plate of a polishing machine.

  As such a double-sided pressure-sensitive adhesive tape for fixing an abrasive, it is necessary to peel and remove the abrasive from the surface plate of the polishing machine after the polishing process is completed.

  In recent years, strong acids and strong alkalis have been used as slurry liquids used in the polishing process of electronic parts, and double-sided pressure-sensitive adhesive tapes for fixing abrasives are required to be resistant to peeling even in the presence of acids and alkalis. It has been.

  Thus, as the double-sided pressure-sensitive adhesive tape for fixing abrasives, a tape having two properties of re-peelability that can be peeled off without adhesive residue and pressure-sensitive adhesive property even in the presence of acid or alkali has been demanded. . However, these two characteristics are in a trade-off relationship, and it is difficult to achieve both.

  Therefore, as a double-sided pressure-sensitive adhesive tape for fixing an abrasive material that has excellent removability and exhibits excellent adhesiveness even in the presence of acid or alkali, for example, Patent Document 3 discloses a thermally active acrylic on one side of a substrate. A double-sided adhesive tape for fixing abrasives is proposed, characterized in that a base adhesive layer is provided and a releasable adhesive layer is provided on the other side of the substrate. It is disclosed that the thickness of a certain acrylic adhesive layer is 80 μm, and the thickness of a releasable pressure-sensitive adhesive layer that is an adhesive layer on the surface plate side is 35 μm.

  However, the double-sided adhesive tape for fixing abrasives was excellent in removability and adhesiveness in the presence of acids and alkalis compared with past double-sided adhesive tapes for fixing abrasives. None of them are sufficient, and further improvement has been demanded.

  On the other hand, with the increase in the size of the display screen of a display device, there is a demand for a technique for efficiently polishing a large square glass substrate with a side of 1.5 m or more, and Patent Document 4 discloses a large glass. In a substrate polishing apparatus, it has been pointed out that there are difficulties in removing and handling a glass substrate.

  As described above, when polishing a large glass substrate, the polishing material used for polishing the glass substrate and the double-sided adhesive tape for fixing the polishing material to fix the polishing material on the surface plate are also suitable for the substrate. There is a need to.

  However, when the double-sided pressure-sensitive adhesive tape for fixing the abrasive material is enlarged, the problem arises that it becomes difficult to peel off the double-sided pressure-sensitive adhesive tape for fixing the abrasive material from the surface plate with an increase in the sticking area to the surface plate. Therefore, even the double-sided pressure-sensitive adhesive tape for fixing an abrasive disclosed in Patent Document 3 was not satisfactory.

JP 2000-190213 A JP 2000-77366 A JP 2001-354926 A JP 2004-122351 A

  The present invention provides a double-sided pressure-sensitive adhesive tape for fixing an abrasive, which has excellent removability even in the case of an increase in size and exhibits excellent adhesiveness even in the presence of a strong acid or strong alkali.

  The double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive according to the present invention, as shown in FIGS. 1 and 2, is for fixing an abrasive used to detachably fix an abrasive C on a surface plate B of a polishing machine A. A double-sided pressure-sensitive adhesive tape, wherein an acrylic pressure-sensitive adhesive layer 12 containing a xylene-based tackifier resin and an acrylic copolymer is laminated and integrated on one surface of a polyethylene terephthalate film 11 serving as a base material, and the polyethylene A urethane pressure-sensitive adhesive layer 13 is laminated and integrated on the other surface of the terephthalate film, and the 180-degree peel force of the urethane pressure-sensitive adhesive constituting the urethane pressure-sensitive adhesive measured on the stainless steel plate according to JIS Z0237 is 1. 2 to 7.0 N / 25 mm.

  The double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive material uses a polyethylene terephthalate film as a base material. This is because the polyethylene terephthalate film is excellent in chemical resistance and can be manufactured with excellent thickness accuracy at the time of manufacture.

  When the thickness of the polyethylene terephthalate film is thin, the polishing accuracy may be lowered. When the thickness is thick, the double-sided pressure-sensitive adhesive tape for fixing the abrasive is hardened and the peelability may be lowered. Therefore, the thickness is preferably 10 to 200 μm.

  An acrylic pressure-sensitive adhesive layer is laminated and integrated on one surface of the polyethylene terephthalate film. The acrylic pressure-sensitive adhesive layer contains a xylene-based tackifier resin and an acrylic copolymer.

  The acrylic pressure-sensitive adhesive layer contains a xylene-based tackifying resin and thus has excellent adhesiveness and excellent chemical resistance. Even if it is used, the adhesiveness hardly decreases, and the abrasive can be stably fixed on the acrylic adhesive layer.

  As the xylene-based tackifying resin, an alkylphenol reaction product of a xylene resin is preferable. Such an alkylphenol reaction product of xylene resin is commercially available, for example, under the trade name “Nikanol T Series” from Fudou.

  In addition to the xylene-based tackifying resin, the acrylic pressure-sensitive adhesive layer may appropriately contain other tackifying resins such as a phenol resin, a rosin resin, and a terpene resin, and these are used alone. Or 2 or more types may be used together.

  If the content of the xylene-based tackifying resin in the acrylic pressure-sensitive adhesive layer is small, the acrylic pressure-sensitive adhesive layer may cause cohesive failure, and if it is large, the pressure-sensitive adhesive force and tack of the acrylic pressure-sensitive adhesive layer may decrease. Therefore, 5 to 30 parts by weight is preferable with respect to 100 parts by weight of the acrylic copolymer, and 9 to 20 parts by weight is more preferable.

  Although it does not specifically limit as an acryl-type copolymer, The (meth) acrylic-acid alkylester which contains (meth) acrylic-acid alkylester and (meth) acrylic acid whose carbon number of an alkyl group is 1-12 as a copolymerization component. A copolymer (hereinafter simply referred to as “(meth) acrylic acid alkyl ester copolymer”) is preferred. In the present invention, “(meth) acrylic acid” means “methacrylic acid or acrylic acid”.

  Examples of the alkyl ester having 1 to 12 carbon atoms in the alkyl group include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and isopropyl (meth) acrylate. , (Meth) acrylic acid-n-butyl, (meth) acrylic acid-t-butyl, (meth) acrylic acid-2-ethylhexyl, octyl (meth) acrylate, and the like. The above may be used in combination.

  In addition to (meth) acrylic acid, the (meth) acrylic acid alkyl ester copolymer includes other vinyl monomers copolymerizable with (meth) acrylic acid alkyl esters having 1 to 12 carbon atoms in the alkyl group. It may be contained as a copolymerization component. Examples of such vinyl monomers include (meth) acrylic acid-2-hydroxyethyl, (meth) acrylic acid glycidyl, allyl glycidyl ether, crotonic acid, maleic acid, itaconic acid, n-methylolacrylamide, maleic anhydride, Examples thereof include vinyl acetate and styrene.

  In the (meth) acrylic acid alkyl ester copolymer, when the content of the (meth) acrylic acid alkyl ester component having 1 to 12 carbon atoms in the alkyl group is small, the adhesive strength and tack of the pressure-sensitive adhesive layer are reduced. Therefore, 70% by weight or more is preferable, 80% by weight or more is more preferable, and if too much, the crosslinking of the (meth) acrylic acid alkyl ester copolymer becomes insufficient and the cohesive force decreases, 80 to 90% by weight is particularly preferable because the acrylic pressure-sensitive adhesive layer may cause cohesive failure.

  When the content of the (meth) acrylic acid component in the (meth) acrylic acid alkyl ester-based copolymer is large, the adhesive strength and tack of the pressure-sensitive adhesive layer may be lowered. If it is too high, the cross-linking of the (meth) acrylic acid alkyl ester copolymer is insufficient and the cohesive force is lowered, and the acrylic pressure-sensitive adhesive layer may be cohesively broken, so 1 to 20% by weight is more preferable. .

  In order to obtain a (meth) acrylic acid alkyl ester copolymer, a (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms in the alkyl group and (meth) acrylic acid are blended as necessary. What is necessary is just to carry out the radical reaction with the other monomer mentioned above in presence of a polymerization initiator. In addition, it does not specifically limit as a polymerization method, A conventionally well-known method is used, For example, solution polymerization, emulsion polymerization, suspension polymerization, block polymerization, etc. are mentioned.

  The polymerization initiator is not particularly limited. For example, 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane, t-hexylperoxypivalate, t-butylperoxypivalate 2,5-dimethyl-2,5-bis (2-ethylhexanoylperoxy) hexane, t-hexylperoxy-2-ethylhexanoate, t-butylperoxy-2-ethylhexanoate, t -Butyl peroxyisobutyrate, t-butyl peroxy-3,5,5-trimethylhexanoate, t-butyl peroxylaurate and the like, 1,1-bis (t-hexylperoxy)- 3,3,5-trimethylcyclohexane and t-hexylperoxypivalate are preferred. In addition, the said polymerization initiator may be used independently, or 2 or more types may be used together.

  If the thickness of the acrylic pressure-sensitive adhesive layer is thin, the pressure-sensitive adhesive strength of the acrylic pressure-sensitive adhesive layer becomes insufficient, and the abrasive fixed on the acrylic pressure-sensitive adhesive layer may peel off during polishing. Since force may fall, 30-100 micrometers is preferable, 40-80 micrometers is more preferable, 50-70 micrometers is still more preferable.

  If the 180 ° peel force with respect to the stainless steel plate measured according to JIS Z0237 of the acrylic pressure-sensitive adhesive layer is low, the acrylic pressure-sensitive adhesive is altered by the acid or alkali contained in the slurry during polishing, and the pressure-sensitive adhesive force When it decreases, the abrasive may peel off from the acrylic adhesive layer, and if it is high, it may cause inconvenience if you want to re-attach the abrasive to the double-sided adhesive tape for fixing the abrasive, 7-40N / 25mm is preferable and 10-30N / 25mm is more preferable.

  In measuring the 180 ° peel force of the acrylic pressure-sensitive adhesive layer on the stainless steel plate measured according to JIS Z0237, a test piece made of double-sided adhesive tape for fixing the abrasive material was attached to the test plate (stainless steel plate). It is assumed that the sample is allowed to stand in an atmosphere of a temperature of 25 ° C. and a relative humidity of 50% for 30 minutes before the 180 ° peel force is measured.

  A urethane adhesive layer is laminated and integrated on the other surface of the polyethylene terephthalate film. The urethane-based pressure-sensitive adhesive layer preferably contains a urethane-based pressure-sensitive adhesive obtained by reacting a polyurethane polyol and a polyfunctional isocyanate-based curing agent. By using a polyfunctional isocyanate-based curing agent, the crosslinking density of the urethane-based pressure-sensitive adhesive can be appropriately controlled, and as a result, excellent removability can be imparted to the urethane-based pressure-sensitive adhesive layer.

  The polyurethane polyol has a hydroxyl group capable of reacting with a polyfunctional isocyanate curing agent while having a urethane bond. The polyurethane polyol is obtained mainly by reacting a polyol and a polyfunctional isocyanate in the presence of a catalyst.

  Examples of the polyol for producing the polyurethane polyol include polyester polyol, polyether polyol, polycarbonate polyol, and polycaprolactone polyol.

  Polyfunctional isocyanates for producing polyurethane polyols include phenylene diisocyanate, diphenyl diisocyanate, toluylene diisocyanate, triisocyanate toluene, triisocyanate benzene, diphenyl ether diisocyanate, naphthylene diisocyanate, diphenylmethane diisocyanate, xylylene diisocyanate, triphenylmethane triisocyanate. Aromatic polyisocyanates such as: hexamethylene diisocyanate, trimethylene diisocyanate, pentamethylene diisocyanate, propylene diisocyanate, butylene diisocyanate, trimethylhexamethylene diisocyanate, etc .; diisocyanate dimethylbenzene, diisocyanate Araliphatic polyisocyanates such as diethylbenzene and tetramethylxylylene diisocyanate, cyclopentane diisocyanate, cyclohexane diisocyanate, methylene bis (cyclohexyl isocyanate), bis (isocyanate methyl) cyclohexane, trimethylcyclohexyl isocyanate, etc. Is mentioned.

  The polyurethane polyol is preferably a urethane / urea bond type obtained by reacting a chain extender, particularly a diamine, in addition to the polyol and the polyfunctional isocyanate. The number average molecular weight of the polyurethane polyol is preferably 10,000 to 300,000.

  Polyurethane polyols are commercially available, for example, under the trade name “Takelac U” from Takeda Pharmaceutical Co., Ltd., under the trade name “Vainsol U” from Otsuka Kogyo Co., Ltd., and under the trade name “Siabine SP205” from Toyo Ink Co., Ltd. ing.

  The polyurethane polyol may be appropriately diluted with a solvent. Examples of such a solvent include methyl ethyl ketone, ethyl acetate, toluene, xylene, and acetone.

  The polyfunctional isocyanate-based curing agent may be a compound having two or more isocyanate groups. For example, diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, phenylene diisocyanate, 1,5 -Aromatic diisocyanates such as naphthylene diisocyanate, xylylene diisocyanate, toluylene diisocyanate; aliphatic or cycloaliphatic diisocyanates such as hexamethylene diisocyanate, isophorone diisocyanate, 4,4'-dicyclohexylmethane diisocyanate.

  The polyfunctional isocyanate-based curing agent is, for example, a product name “Takenate D” from Takeda Pharmaceutical Co., Ltd., and a product name “B-45” from Toyo Ink Industries Co., Ltd. 501 ".

  0.1-10 weight part is preferable with respect to 100 weight part of polyurethane polyols, and, as for content of the polyfunctional isocyanate type hardening | curing agent in a urethane type adhesive, 0.15-9 weight part is more preferable.

  If the 180 ° peel force of the urethane-based pressure-sensitive adhesive constituting the urethane-based pressure-sensitive adhesive layer measured on the stainless steel plate in accordance with JIS Z0237 is low, the urethane-based pressure is reduced by the acid or alkali contained in the slurry during the polishing process. When the adhesive is denatured and its adhesive strength decreases, the double-sided adhesive tape for fixing the abrasive may peel off from the surface plate of the polishing machine. If it is high, the abrasive will peel off from the surface plate of the polishing machine. In particular, when the double-sided pressure-sensitive adhesive tape for fixing the abrasive is increased in size, the workability is lowered, so that it is limited to 1.2 to 7.0 N / 25 mm.

  When measuring the 180 ° peel force of the urethane-based pressure-sensitive adhesive layer on a stainless steel plate measured according to JIS Z0237, a test piece made of a double-sided adhesive tape for fixing an abrasive is attached to the test plate (stainless steel plate). It shall be left still for 30 minutes in an atmosphere at a temperature of 25 ° C. and a relative humidity of 50% before the 180 ° peel force is measured after being put on.

  When the thickness of the urethane-based adhesive layer is thin, the adhesiveness of the urethane-based adhesive decreases, and during polishing, the double-sided adhesive tape for fixing the abrasive may be detached from the surface plate. Since the peelability from the surface plate of the double-sided pressure-sensitive adhesive tape for fixing the abrasive may be lowered, it is preferably 10 to 100 μm, more preferably 20 to 70 μm.

  As a manufacturing method of the double-sided pressure-sensitive adhesive sheet for fixing an abrasive material of the present invention, for example, first, two release films each having a release treatment applied to one surface, an acrylic pressure-sensitive adhesive solution for an acrylic pressure-sensitive adhesive layer, A urethane pressure-sensitive adhesive solution for the urethane pressure-sensitive adhesive layer is prepared.

  Subsequently, the acrylic pressure-sensitive adhesive solution is applied to the release treatment surface of one release film, and the solvent in the acrylic pressure-sensitive adhesive solution is completely dried and removed to remove the solvent on the release treatment surface of the release film. An acrylic pressure-sensitive adhesive laminated film having an acrylic pressure-sensitive adhesive layer formed thereon is prepared.

  On the other hand, a urethane-based adhesive solution for the urethane-based adhesive layer is applied to the release treatment surface of the other release film, and the solvent in the urethane-based adhesive solution is completely dried and removed, thereby removing the release film. A urethane-based pressure-sensitive adhesive laminated film in which a urethane-based pressure-sensitive adhesive layer is formed on the mold release surface is prepared.

  Thereafter, a polyethylene terephthalate film is prepared as a base material, and the acrylic pressure-sensitive adhesive laminated film is laminated on one surface of the polyethylene terephthalate film so that the acrylic pressure-sensitive adhesive layer faces the polyethylene terephthalate film, A laminate is produced by laminating a urethane-based pressure-sensitive adhesive layer laminated film on the other surface of the polyethylene terephthalate film so that the urethane-based pressure-sensitive adhesive layer faces the polyethylene terephthalate film.

  Then, by pressing the laminate in the thickness direction with a rubber roller or the like, the urethane adhesive layer, the polyethylene terephthalate film and the acrylic adhesive layer are laminated and integrated in this order, and the urethane adhesive layer In addition, a double-sided pressure-sensitive adhesive tape for fixing an abrasive, in which a release film is laminated and integrated on the surface of an acrylic pressure-sensitive adhesive layer so as to be peelable, can be obtained.

  Next, how to use the double-sided pressure-sensitive adhesive tape for fixing the abrasive will be described. This double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive is used for detachably fixing an abrasive C on a surface plate B of a polishing machine A.

  As shown in FIG. 2, the polishing machine A has a drive shaft B1 integrally provided on the lower surface, rotates in a predetermined direction, and an arrangement surface B2 for detachably arranging the abrasive C on the upper surface. And a rotating plate D that is disposed above the surface plate B and fixes an object to be polished E such as a large glass substrate or a wafer.

  The rotating plate D has a drive shaft D1 integrally provided on the upper surface thereof, and is configured to be rotatable in a predetermined direction. The general purpose member (not shown) can be used to attach and detach the workpiece E to the lower surface. It is configured to be able to adhere to.

  Then, the double-sided pressure-sensitive adhesive tape 1 for fixing the abrasive material is prepared, and the abrasive material C is laminated on the acrylic adhesive layer 12 of the double-sided pressure-sensitive adhesive tape 1 for fixing the abrasive material, and is stuck by pressing in the thickness direction from both sides. It integrates and the abrasive laminated body 2 is produced. Next, the abrasive C is polished by placing and pressing the abrasive laminate 2 on the arrangement surface B2 with the urethane adhesive layer 13 facing the arrangement surface B2 of the surface plate B. It is bonded and integrated on the arrangement surface B2 of the surface plate B through the double-sided pressure-sensitive adhesive tape 1 for fixing the material. On the other hand, an object to be polished E such as a large glass substrate or a wafer is detachably fixed to the lower surface of the rotating plate D using a general-purpose means.

  Thereafter, the drive shaft B1 of the surface plate B is driven to rotate the surface plate B in a certain direction, and the rotation shaft D1 is driven to rotate the rotating plate D in a certain direction. Then, the lower surface of the workpiece E disposed on the lower surface of the rotating plate is polished by the abrasive C disposed on the surface plate B.

  At this time, since the double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive has a specific acrylic pressure-sensitive adhesive layer and a urethane-type pressure-sensitive adhesive layer as the pressure-sensitive adhesive layer, the double-sided pressure-sensitive adhesive tape for fixing the abrasive on the surface plate B The urethane-based pressure-sensitive adhesive layer 1 maintains a strong adhesiveness despite the presence of strong acid and strong alkali used during polishing of the workpiece E, and the double-sided pressure-sensitive adhesive tape 1 for fixing abrasives during polishing. Does not leave the surface B2 of the surface plate B, and the acrylic pressure-sensitive adhesive layer 12 of the double-sided adhesive tape 1 for fixing the abrasive on the surface plate B does not cause cohesive failure during polishing. The abrasive material C can be stably and reliably adhered and integrated on the surface plate B via the double-sided adhesive tape 1 for fixing the abrasive material, and the polishing object E can be polished smoothly. it can.

  Then, after the polishing of the polishing object E is completed, the double-sided adhesive tape 1 for fixing the abrasive is peeled off from the arrangement surface B2 of the surface plate B. As described above, both sides for fixing the abrasive are fixed. Since the adhesive tape 1 is detachably fixed on the arrangement surface B2 of the surface plate B by a specific urethane adhesive layer 13, the adhesive adhesive layer 13 does not cause cohesive failure and there is no adhesive residue. The double-sided pressure-sensitive adhesive tape 1 for fixing the abrasive material can be peeled off from the arrangement surface B2 of the surface plate B. In particular, even when the double-sided adhesive tape 1 for fixing the abrasive material is large, the surface B2 of the surface plate B is provided. Can be smoothly peeled off.

  Furthermore, since the acrylic pressure-sensitive adhesive layer of the double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive material contains a specific acrylic pressure-sensitive adhesive, the double-sided pressure-sensitive adhesive tape 1 for fixing an abrasive material is placed on the surface B2 of the surface plate B. At the time of peeling, the abrasive C and the double-sided adhesive tape 1 for fixing the abrasive are not unexpectedly separated, and the abrasive C and the double-sided adhesive tape for fixing the abrasive from the arrangement surface B2 of the surface plate B. 1 can be integrally peeled and removed.

  A double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention is a double-sided pressure-sensitive adhesive tape for fixing an abrasive used to detachably fix an abrasive on a surface plate of a polishing machine, and has xylene on one surface of a polyethylene terephthalate film. An acrylic pressure-sensitive adhesive layer containing an acrylic tackifying resin and an acrylic copolymer is laminated and integrated, and a urethane pressure-sensitive adhesive layer is laminated and integrated on the other surface of the polyethylene terephthalate film. Since the 180 ° peel force of the urethane-based pressure-sensitive adhesive constituting the adhesive layer to the stainless steel plate measured in accordance with JIS Z0237 is 1.2 to 7.0 N / 25 mm, strong acid or strong acid supplied during the polishing step Maintains sufficient adhesive performance without being affected by alkali, and stably adheres to the surface plate of the polishing machine to ensure that the abrasive is detached from the surface plate. On the other hand, after completion of the polishing step, it can be easily detached from the surface plate without causing cohesive failure, and is excellent in removability.

  And since the double-sided pressure-sensitive adhesive tape for fixing an abrasive material of the present invention uses a polyethylene terephthalate film as the base material, the acrylic pressure-sensitive adhesive layer and the urethane pressure-sensitive adhesive layer can be firmly integrated and polished. In addition, delamination does not occur at the interface between the acrylic pressure-sensitive adhesive layer and the urethane-based pressure-sensitive adhesive layer, and the polyethylene terephthalate film. Even when peeling and removing from the board, the double-sided pressure-sensitive adhesive tape for fixing the abrasive can be reliably peeled off integrally from the surface board.

  Hereinafter, embodiments of the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

Example 1
Acrylic copolymer obtained by copolymerizing acrylic acid-n-butyl, acrylic acid-2-ethylhexyl, ethyl acrylate and acrylic acid (“WHD” manufactured by Sekisui Chemical Co., Ltd., acrylic acid-n-butyl component: 38 weight) %, 2-ethylhexyl acrylate component: 54.9% by weight, ethyl acrylate component: 4.2% by weight, acrylic acid component: 2.9% by weight) 100 parts by weight xylene resin (Mitsubishi Chemical) Acrylic pressure-sensitive adhesive A was obtained by adding 10 parts by weight of a product name “Nikanol T” manufactured by the company and 1.2 parts by weight of a curing agent (trade name “Coronate L55” manufactured by Nippon Polyurethane Co., Ltd.).

  Polyurethane polyol solution (trade name “Siavine SP205” manufactured by Toyo Ink Co., Ltd., polyurethane polyol solid content: 60% by weight) and polyfunctional isocyanate curing agent solution (trade name “T-501B” manufactured by Toyo Ink Co., Ltd.) Curing agent solid content: 50% by weight) is added to 100 parts by weight of the polyurethane polyol so that the polyfunctional isocyanate curing agent is 2.5 parts by weight and mixed uniformly to obtain a solution A for urethane-based adhesive. It was.

  A 75 μm thick polyethylene terephthalate (PET) film (trade name “Teijin Tetron Film HS75” manufactured by Teijin DuPont Films Ltd.) is prepared as a base material, and the thickness after drying the acrylic adhesive A on one surface of the polyethylene terephthalate film is 55 μm. It was applied and dried to form an acrylic pressure-sensitive adhesive layer.

  Next, the urethane polyol and the polyfunctional isocyanate are coated on the other surface of the polyethylene terephthalate film so that the thickness A after drying of the urethane-based adhesive solution A is 60 μm and dried at 100 ° C. for 3 minutes. A urethane-based pressure-sensitive adhesive layer is formed by reacting with a urethane-based curing agent, and an acrylic pressure-sensitive adhesive layer is laminated and integrated on one surface of the polyethylene terephthalate film, and a urethane-based pressure-sensitive adhesive layer is formed on the other surface of the polyethylene terephthalate film. A double-sided pressure-sensitive adhesive tape for fixing an abrasive obtained by laminating and integrating was obtained.

(Example 2)
Instead of the urethane-based adhesive solution A, Takeda Pharmaceutical Co., Ltd. is used as a polyfunctional isocyanate-based curing agent solution in a polyurethane polyol solution (polyurethane polyol solid content) marketed by Takeda Pharmaceutical Company Limited under the trade name “Takelac UW1”. A polyfunctional isocyanate curing agent solution commercially available from Kogyo Co., Ltd. under the trade name “Takenate D160N” was added so that the polyfunctional isocyanate curing agent was 1.2 parts by weight with respect to 100 parts by weight of the polyurethane polyol. Other than using urethane adhesive solution B obtained by uniformly mixing, and applying this urethane adhesive solution B to the other surface of the polyethylene terephthalate film so that the thickness after drying was 70 μm. Obtained a double-sided pressure-sensitive adhesive tape for fixing an abrasive as in Example 1.

(Example 3)
A double-sided pressure-sensitive adhesive tape for fixing an abrasive was obtained in the same manner as in Example 1 except that the urethane-based adhesive solution A was applied so that the thickness after drying was 45 μm instead of 60 μm.

(Comparative Example 1)
Instead of the urethane-based adhesive solution A, an acrylic copolymer obtained by copolymerizing acrylic acid-n-butyl, acrylic acid-2-ethylhexyl, and ethyl acrylate (“WHD” manufactured by Sekisui Chemical Co., Ltd.) Acid-n-butyl component: 38 wt%, acrylic acid-2-ethylhexyl component: 54.9 wt%, ethyl acrylate component: 4.2: wt%) 100 parts by weight of a curing agent (manufactured by Nippon Polyurethane Co., Ltd.) "Coronate L55") Using acrylic adhesive B obtained by adding 1.2 parts by weight and mixing uniformly, the acrylic adhesive B was dried on the other surface of the polyethylene terephthalate film and the thickness after drying was 35 µm. A double-sided pressure-sensitive adhesive tape for fixing an abrasive was obtained in the same manner as in Example 1 except that the coating was performed so that

(Comparative Example 2)
The urethane adhesive solution B was used in place of the acrylic adhesive A and the urethane adhesive solution A, and the thickness after drying the urethane adhesive solution B on both sides of the polyethylene terephthalate film was 70 μm. A double-sided pressure-sensitive adhesive tape for fixing an abrasive was obtained in the same manner as in Example 1 except that the coating was performed as described above.

(Comparative Example 3)
Instead of the urethane-based pressure-sensitive adhesive solution A, a polyfunctional isocyanate-based curing agent solution (trade name “T-501B” manufactured by Toyo Ink Co., Ltd.) For urethane-based pressure-sensitive adhesives obtained by uniformly adding and mixing 3 parts by weight of polyfunctional isocyanate-based curing agent with respect to 100 parts by weight of polyurethane polyol. Both surfaces for fixing abrasives in the same manner as in Example 1 except that the solution C was used and the urethane-based adhesive solution C was applied to the other surface of the polyethylene terephthalate film so that the thickness after drying was 30 μm. An adhesive tape was obtained.

  About the obtained double-sided pressure-sensitive adhesive tape for fixing an abrasive, 180 ° peel force, removability and retention were measured in the following manner, and the results are shown in Table 1.

(180 ° peel force)
A flat rectangular test piece having a length of 150 mm × width of 25 mm was cut out from the double-sided adhesive tape for fixing the abrasive. The acrylic pressure-sensitive adhesive layer of this test piece was superposed on a stainless steel plate and pressed with a 2 kg roller, and the test piece was stuck on the stainless steel plate and then 30 ° C. in an atmosphere with a temperature of 25 ° C. and a relative humidity of 50%. After leaving for a minute, 180 degree peel force was measured based on JIS Z0237 using a tensile tester.

  Next, the urethane pressure-sensitive adhesive layer of the test piece is adhered to the stainless steel plate in the same manner as described above, and a 180 ° peel force is applied in accordance with JIS Z0237 using a tensile tester in the same manner as described above. It was measured.

(Removability)
The urethane adhesive layer of the test piece is stuck on the stainless steel plate in the same manner as the 180 ° peel force measurement method, and the presence or absence of adhesive residue on the stainless steel plate when the test piece is peeled off from the stainless steel plate is visually observed. Judgment was made based on the following criteria.
○: There was no adhesive residue on the stainless steel plate.
Δ: Adhesive residue partially formed on the stainless steel plate.
X: Cohesive failure occurred in the urethane-based pressure-sensitive adhesive layer, and adhesive residue was formed on the entire surface of the stainless steel plate.

(Retention)
A polishing pad (trade name “Rigid Urethane Resin Pad” manufactured by Rodel Nitta Co., Ltd.) is laminated on the acrylic adhesive layer of the obtained double-sided pressure-sensitive adhesive sheet for fixing abrasives, and the polishing pad is used on the acrylic adhesive layer using a rubber roll. Affixed. In the double-sided pressure-sensitive adhesive tape for fixing abrasives of Comparative Examples 1 and 3, the polishing pad is on the acrylic pressure-sensitive adhesive A layer. Was stuck.

  Then, place the urethane adhesive layer of the double-sided pressure-sensitive adhesive tape for fixing the abrasive material on the polishing machine (made by Strasbaugh), press the rubber roll from the polishing pad side, and place the double-sided pressure-sensitive adhesive tape for fixing the abrasive material on the surface plate. Fixed to. In addition, in the double-sided pressure-sensitive adhesive tape for fixing the abrasive of Comparative Example 1, the acrylic pressure-sensitive adhesive B layer was adhered to a surface plate.

A glass plate was used as an object to be polished, and the polishing pad was operated at a polishing pressure of 6.9 kPa and a rotation speed of 30 rpm for 15 minutes. Thereafter, the peeled state of the interface between the abrasive-fixing double-sided tape and the surface plate and the interface between the abrasive-fixing double-sided tape and the polishing pad was visually observed and evaluated according to the following criteria. In Comparative Example 2, a part of the polishing pad was peeled off from the double-sided adhesive tape for fixing the abrasive due to insufficient adhesive force. In Comparative Example 3, a part of the double-sided pressure-sensitive adhesive tape for fixing the abrasive was peeled off from the surface plate due to insufficient adhesion to the surface plate.
○: No peeling was observed at any of the interfaces on the polishing pad side and the surface plate side.
X: Peeling was observed on at least one of the interfaces on the polishing pad side or the surface plate side.

It is the longitudinal cross-sectional view which showed the double-sided adhesive tape for abrasive | polishing material fixation of this invention. It is the model front view which made the cross section the part which showed the use condition of the double-sided adhesive tape for abrasive | polishing material fixation.

Explanation of symbols

1 Double-sided adhesive tape for fixing abrasives
11 Polyethylene terephthalate film
12 Acrylic adhesive layer 4 Urethane adhesive layer A Polishing machine B Surface plate C Abrasive

Claims (4)

A double-sided adhesive tape for fixing abrasives, which is used to detachably fix abrasives on the surface plate of a polishing machine, and contains a xylene-based tackifying resin and an acrylic copolymer on one side of a polyethylene terephthalate film The urethane pressure-sensitive adhesive layer JIS Z0237 of the urethane-based pressure-sensitive adhesive layer is formed by laminating and integrating the acrylic pressure-sensitive adhesive layer and the urethane-based pressure-sensitive adhesive layer on the other surface of the polyethylene terephthalate film. A double-sided pressure-sensitive adhesive tape for fixing an abrasive, characterized in that a 180 ° peel force with respect to a stainless steel plate measured in accordance with the above is 1.2 to 7.0 N / 25 mm. Urethane pressure-sensitive adhesive layer is formed on the pressure-sensitive adhesive layer for the surface plate for removably attaching to the surface plate, and acrylic pressure-sensitive adhesive layer is formed on the pressure-sensitive adhesive layer for the abrasive material for attaching the abrasive material detachably. The double-sided pressure-sensitive adhesive tape for fixing an abrasive according to claim 1, wherein the double-sided pressure-sensitive adhesive tape is fixed. The double-sided pressure-sensitive adhesive tape for fixing an abrasive according to claim 1, wherein the urethane-based pressure-sensitive adhesive layer contains a urethane-based pressure-sensitive adhesive obtained by reacting a polyurethane polyol and a polyfunctional isocyanate-based curing agent. The acrylic copolymer is a (meth) acrylic acid alkyl ester copolymer containing (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms and (meth) acrylic acid as a copolymerization component. The double-sided pressure-sensitive adhesive tape for fixing an abrasive according to claim 1, which is contained.

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