JP2009205613A - Semiconductor memory apparatus - Google Patents

Semiconductor memory apparatus Download PDF

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JP2009205613A
JP2009205613A JP2008049712A JP2008049712A JP2009205613A JP 2009205613 A JP2009205613 A JP 2009205613A JP 2008049712 A JP2008049712 A JP 2008049712A JP 2008049712 A JP2008049712 A JP 2008049712A JP 2009205613 A JP2009205613 A JP 2009205613A
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semiconductor memory
electrode pads
wiring board
stacked
memory elements
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Takashi Okada
岡田  隆
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Toshiba Corp
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Toshiba Corp
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Priority to JP2008049712A priority Critical patent/JP2009205613A/en
Priority to US12/396,017 priority patent/US7939927B2/en
Publication of JP2009205613A publication Critical patent/JP2009205613A/en
Priority to US13/077,131 priority patent/US8154112B2/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48145Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06506Wire or wire-like electrical connections between devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/0651Wire or wire-like electrical connections from device to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/20Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/20EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Wire Bonding (AREA)
  • Non-Volatile Memory (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor memory apparatus which enables increase in the size and the laminated layer number of a plurality of laminated and mounted semiconductor memory devices. <P>SOLUTION: The semiconductor memory apparatus includes: a wiring substrate equipped with an device mounting part and connection pads arranged along one side of an external shape; and a plurality of semiconductor memory devices having electrode pads arranged along one side of the external shape. In this case, the plurality of semiconductor memory devices are provided with: semiconductor memory device groups which are laminated on the device mounting part of the wiring substrate so that the pad arrangement sides may look toward the same direction; and controller elements which are laminated on the semiconductor memory device groups and have at least the electrode pads arranged along one side of the external shape. The electrode pads of the plurality of semiconductor memory devices and the electrode pads of the controller elements are arranged in parallel in alignment with the arrangement positions of the connection pads on the wiring substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、半導体記憶装置に関し、特に複数の半導体記憶素子を備えた半導体記憶装置に関する。   The present invention relates to a semiconductor memory device, and more particularly to a semiconductor memory device including a plurality of semiconductor memory elements.

NAND型フラッシュメモリ等を内蔵するメモリカードは、小型化と大容量化が進められている。例えば、SD(登録商標)メモリカードのカードサイズは、通常のSDカードサイズ、ミニSDカードサイズ、マイクロSDカードサイズの三種類が存在し、マイクロSDカードにおいても大容量化が進められている。メモリカードの小型化を実現するために、メモリ素子やコントローラ素子等の半導体素子は配線基板上に積層して搭載されている。半導体素子の電極パッドはワイヤボンディングを使用して配線基板の接続パッドと電気的に接続されている。さらに、メモリカードの大容量化を図るために、メモリ素子自体も配線基板上に多段に積層されるようになってきている。   Memory cards incorporating NAND flash memory and the like are being reduced in size and capacity. For example, there are three types of SD (registered trademark) memory card sizes: a normal SD card size, a mini SD card size, and a micro SD card size, and the capacity of micro SD cards is also being increased. In order to reduce the size of the memory card, semiconductor elements such as a memory element and a controller element are stacked and mounted on a wiring board. The electrode pads of the semiconductor element are electrically connected to the connection pads of the wiring board using wire bonding. Furthermore, in order to increase the capacity of memory cards, the memory elements themselves are also stacked in multiple stages on a wiring board.

例えば、特許文献1に記載されたメモリカードでは、片側長辺に沿ってほぼ一列に形成された複数の電極パッドを備える複数のメモリ素子が積層され、複数の電極パッドと配線基板の接続パッドがボンディングワイヤにより接続される。積層されたメモリ素子上にはコントローラ素子が積層され、コントローラ素子の電極パッドはワイヤボンディングにより配線基板の接続パッドと接続される。コントローラ素子は、メモリ素子より小型でかつ細長形状であり、その長辺がボンディング時の超音波印加方向に対して平行になるように配置されている。
特開2007−128953号公報
For example, in the memory card described in Patent Document 1, a plurality of memory elements including a plurality of electrode pads formed in a line along one long side are stacked, and the plurality of electrode pads and the connection pads of the wiring board are provided. Connected by bonding wire. Controller elements are stacked on the stacked memory elements, and electrode pads of the controller elements are connected to connection pads of the wiring board by wire bonding. The controller element is smaller and slender than the memory element, and is arranged so that its long side is parallel to the ultrasonic wave application direction during bonding.
JP 2007-128953 A

本発明は、積層して搭載する複数の半導体記憶素子のサイズの拡大や積層数の増大を可能にする半導体記憶装置を提供する。   The present invention provides a semiconductor memory device capable of increasing the size of a plurality of semiconductor memory elements to be stacked and mounted and increasing the number of stacked layers.

本発明の実施の形態に係る半導体記憶装置は、素子搭載部と、外形の一辺に沿って配列された接続パッドとを備える配線基板と、外形の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層された半導体記憶素子群と、前記半導体記憶素子群上に積層され、少なくとも外形の一辺に沿って配列された電極パッドを有するコントローラ素子と、前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第1の金属ワイヤと、前記コントローラ素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第2の金属ワイヤと、前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドとを電気的に接続する第3の金属ワイヤと、を具備し、前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドは、前記配線基板の前記接続パッドの配列位置に合わせて平行に配置したことを特徴とする。   A semiconductor memory device according to an embodiment of the present invention includes a wiring board including an element mounting portion, a connection pad arranged along one side of the outer shape, and a plurality of electrode pads arranged along one side of the outer shape. A plurality of semiconductor memory elements, wherein the plurality of semiconductor memory elements are stacked on the element mounting portion of the wiring board so that the pad array sides are directed in the same direction, and on the semiconductor memory element group A controller element having electrode pads that are stacked and arranged along at least one side of the outer shape, and a first metal that electrically connects the electrode pads of the plurality of semiconductor memory elements and the connection pads of the wiring board A wire, a second metal wire that electrically connects the electrode pad of the controller element and the connection pad of the wiring board, and a front of the plurality of semiconductor memory elements A third metal wire that electrically connects the electrode pad and the electrode pad of the controller element, wherein the electrode pad of the plurality of semiconductor memory elements and the electrode pad of the controller element are connected to the wiring It is characterized by being arranged in parallel according to the arrangement position of the connection pads on the substrate.

本発明の実施の形態に係る半導体記憶装置は、素子搭載部と、少なくとも外形の二辺に沿って配列された接続パッドとを備える配線基板と、外形の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層される第1の素子群と、外形の他の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層される第2の素子群と、前記第2の素子群上に積層され、少なくとも外形の一辺に沿って配列された電極パッドを有するコントローラ素子と、前記第1の素子群を構成する前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第1の金属ワイヤと、前記第2の素子群を構成する前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第2の金属ワイヤと、前記コントローラ素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第3の金属ワイヤと、を具備し、前記第1の素子群を構成する前記複数の半導体記憶素子と前記第2の素子群を構成する前記複数の半導体記憶素子を前記電極パッドが互いに露出するように交互に積層するとともに、前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドは前記配線基板の前記接続パッドの配列位置に合わせて平行に配置したことを特徴とする。   A semiconductor memory device according to an embodiment of the present invention includes a wiring board including an element mounting portion, connection pads arranged along at least two sides of the outer shape, and electrode pads arranged along one side of the outer shape. A plurality of semiconductor memory elements, wherein the plurality of semiconductor memory elements are stacked on the element mounting portion of the wiring board so that the pad array side faces in the same direction; A plurality of semiconductor memory elements having electrode pads arranged along one side, wherein the plurality of semiconductor memory elements are stacked on the element mounting portion of the wiring board so that the pad array side is directed in the same direction; Two element groups, a controller element having electrode pads stacked on the second element group and arranged along at least one side of the outer shape, and the plurality of semiconductor memories constituting the first element group A first metal wire for electrically connecting the electrode pad of the child and the connection pad of the wiring board; and the electrode pad and the wiring board of the plurality of semiconductor memory elements constituting the second element group A second metal wire that electrically connects the connection pad of the controller, and a third metal wire that electrically connects the electrode pad of the controller element and the connection pad of the wiring board. The plurality of semiconductor memory elements constituting the first element group and the plurality of semiconductor memory elements constituting the second element group are alternately stacked so that the electrode pads are exposed to each other, and the plurality The electrode pad of the semiconductor memory element and the electrode pad of the controller element are arranged in parallel in accordance with the arrangement position of the connection pads on the wiring board.

本発明よれば、積層して搭載する複数の半導体記憶素子のサイズの拡大や積層数の増大を可能にする半導体記憶装置を提供することができる。   According to the present invention, it is possible to provide a semiconductor memory device capable of increasing the size of a plurality of semiconductor memory elements stacked and mounted and increasing the number of stacked layers.

以下、本発明の実施の形態を図面を参照して説明する。実施の形態に係る半導体記憶装置はここではマイクロSDカードを例に取って説明する。なお、実施の形態において、同一構成要素には同一符号を付け、実施の形態の間において重複する説明は省略する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. The semiconductor memory device according to the embodiment will be described here taking a micro SD card as an example. Note that, in the embodiments, the same components are denoted by the same reference numerals, and redundant description among the embodiments is omitted.

(第1の実施の形態)
図1は、第1の実施の形態に係るマイクロSDカード1の構成を示す平面図である。図2は、図1のA−A線に沿った側面図である。図1において、マイクロSDカード1は、素子実装基板と端子形成基板とを兼ねる配線基板2を備える。配線基板2は、例えば、絶縁性樹脂基板の内部や表面に配線網を設けたものであり、具体的にはガラス−エポキシ樹脂やBT樹脂(ビスマレイミド・トリアジン樹脂)等を使用したプリント配線基板が適用される。配線基板2は、素子実装面となる第1の主面2aと、端子形成面となる第2の主面2bとを備える。
(First embodiment)
FIG. 1 is a plan view showing the configuration of the micro SD card 1 according to the first embodiment. FIG. 2 is a side view taken along line AA of FIG. In FIG. 1, a micro SD card 1 includes a wiring board 2 that serves as both an element mounting board and a terminal forming board. The wiring board 2 is, for example, provided with a wiring network inside or on the surface of an insulating resin board. Specifically, a printed wiring board using glass-epoxy resin, BT resin (bismaleimide / triazine resin) or the like. Applies. The wiring board 2 includes a first main surface 2a serving as an element mounting surface and a second main surface 2b serving as a terminal formation surface.

配線基板2は、概略矩形状の外形を有する。配線基板2の一方の短辺2Aは、マイクロSDカード1を電子機器のカードスロットに挿入する際の先端部に相当する。他方の短辺2Bは、マイクロSDカード1の後方部に相当する。配線基板2の一方の長辺2Cは、直線形状である。配線基板2の他方の長辺2Dには、マイクロSDカード1の前後や表裏の向きを示す切り欠き部2Eやくびれ部2Fが形成されている。   The wiring board 2 has a substantially rectangular outer shape. One short side 2A of the wiring board 2 corresponds to a tip when the micro SD card 1 is inserted into a card slot of an electronic device. The other short side 2 </ b> B corresponds to the rear part of the micro SD card 1. One long side 2C of the wiring board 2 has a linear shape. On the other long side 2D of the wiring board 2, a notch portion 2E and a constricted portion 2F indicating the front and back direction of the micro SD card 1 and the front and back sides are formed.

配線基板2の第2の主面2bには、マイクロSDカード1の入出力端子となる外部接続端子3が形成されている。外部接続端子3は電解メッキ等により形成された金属層で構成される。なお、配線基板2の第2の主面2bはマイクロSDカード1の表面に相当する。   On the second main surface 2 b of the wiring board 2, external connection terminals 3 that are input / output terminals of the micro SD card 1 are formed. The external connection terminal 3 is composed of a metal layer formed by electrolytic plating or the like. The second main surface 2b of the wiring board 2 corresponds to the surface of the micro SD card 1.

配線基板2の第1の主面2aには、素子搭載部4と、ワイヤボンディング時のボンディング部となる接続パッド5が形成されている。なお、配線基板2の第1の主面2aはマイクロSDカード1の裏面に相当する。接続パッド5は、配線基板2の図示を省略した内部配線(スルーホール等)を介して、外部接続端子3と電気的に接続される。接続パッド5は、配線基板2の長辺2Dに沿ったパッド領域5Aに配置されている。   On the first main surface 2a of the wiring board 2, there are formed an element mounting portion 4 and a connection pad 5 serving as a bonding portion at the time of wire bonding. The first main surface 2 a of the wiring board 2 corresponds to the back surface of the micro SD card 1. The connection pad 5 is electrically connected to the external connection terminal 3 via an internal wiring (through hole or the like) (not shown) of the wiring board 2. The connection pads 5 are arranged in a pad region 5A along the long side 2D of the wiring board 2.

配線基板2の第1の主面2aの素子搭載部4には、複数のNANDメモリチップ(半導体記憶素子)6A〜6Hが積層されて搭載されている。NANDメモリチップ6H上にはコントローラチップ(コントローラ素子)7が積層されている。コントローラチップ7は、複数のNANDメモリチップ6A〜6Hからデータの書き込みや読み出しを行うNANDメモリチップ6を選択し、選択したNANDメモリチップ6へのデータを書き込み、また選択したNANDメモリチップ6に記憶されたデータの読み出し等を行う。   A plurality of NAND memory chips (semiconductor memory elements) 6 </ b> A to 6 </ b> H are stacked and mounted on the element mounting portion 4 of the first main surface 2 a of the wiring board 2. A controller chip (controller element) 7 is stacked on the NAND memory chip 6H. The controller chip 7 selects the NAND memory chip 6 for writing and reading data from the plurality of NAND memory chips 6A to 6H, writes the data to the selected NAND memory chip 6, and stores it in the selected NAND memory chip 6. The read data is read out.

図2に示すように、配線基板2の第1の主面2a上には、8段のNANDメモリチップ6A〜6Hが下から順に積層されている。NANDメモリチップ6Aは、その下面側に設けられたダイアタッチフィルム8Aにより配線基板2の素子搭載部4に接着されている。NANDメモリチップ6B〜6Hは、中空フィルム9A〜9Gを介して、下層のNANDメモリチップ6A〜6Gの各上面(積層面)に接着されている。なお、第1の実施の形態では、NANDメモリチップ6の積層数を8段とした場合を示すが、その積層数を特に限定するものではない。   As shown in FIG. 2, on the first main surface 2a of the wiring board 2, eight stages of NAND memory chips 6A to 6H are stacked in order from the bottom. The NAND memory chip 6A is bonded to the element mounting portion 4 of the wiring board 2 by a die attach film 8A provided on the lower surface side thereof. The NAND memory chips 6B to 6H are bonded to the upper surfaces (laminated surfaces) of the lower NAND memory chips 6A to 6G via the hollow films 9A to 9G. Although the first embodiment shows a case where the number of stacked NAND memory chips 6 is eight, the number of stacked layers is not particularly limited.

ダイアタッチフィルム8Aは、ダイシングテープとボンディング剤としての機能を持ち合わせた接着フィルムである。その接着層には一般的なポリイミド樹脂、エポキシ樹脂、アクリル樹脂等を主成分とするものが用いられる。ダイアタッチフィルム8Aは、NANDメモリチップ6A〜6Hの外形と同一形状の矩形形状のものを用いている。   The die attach film 8A is an adhesive film having a function as a dicing tape and a bonding agent. As the adhesive layer, a material mainly composed of a general polyimide resin, epoxy resin, acrylic resin or the like is used. The die attach film 8A has a rectangular shape that is the same as the outer shape of the NAND memory chips 6A to 6H.

中空フィルム9A〜9Gは、NANDメモリチップ6A〜6Gの各上面に積層されている。中空フィルム9A〜9Gは樹脂等を主成分とするものが用いられる。中空フィルム9A〜9Gは、後述するNANDメモリチップ6A〜6Gの各上面(積層面)に備えられる電極パッド10A〜10Gと、電極パッド10A〜10Gに接続されるボンディングワイヤ12A〜12Gとを樹脂内部に埋め込むように設けられている。中空フィルム9A〜9Gは、NANDメモリチップ6A〜6Hの外形と同一形状の矩形形状のものを用いている。   The hollow films 9A to 9G are stacked on the upper surfaces of the NAND memory chips 6A to 6G. As the hollow films 9A to 9G, those having a resin or the like as a main component are used. The hollow films 9A to 9G have electrode pads 10A to 10G provided on respective upper surfaces (stacked surfaces) of NAND memory chips 6A to 6G to be described later and bonding wires 12A to 12G connected to the electrode pads 10A to 10G inside the resin. It is provided to be embedded in. As the hollow films 9A to 9G, rectangular films having the same shape as that of the NAND memory chips 6A to 6H are used.

NANDメモリチップ6A〜6Hは、矩形状の同一形状を有し、それぞれ上面に電極パッド10A〜10Hを備えている。図1では、最上層に積層されたNANDメモリチップ6Hの上面に備えられている電極パッド10Hのみを示し、他の電極パッド10A〜10Gの図示は省略している。電極パッド10Hは、NANDメモリチップ6Hの外形の一辺(図1に示す長辺6a)に沿って一列に配列されている。同様に、他のNANDメモリチップ6A〜6Gの電極パッド10A〜10Gも各NANDメモリチップ6A〜6Gの外形の一辺(図示せず)に沿って一列に配列されている。また、電極パッド10A〜10Hは、配線基板2の第1の主面2aに配列された接続パッド5の配列位置に合わせて平行に配置されている。なお、本第1の実施の形態では、NANDメモリチップ6A〜6Hの電極パッド10A〜10Hが配列された辺をパッド配列辺と呼ぶものとする。   The NAND memory chips 6A to 6H have the same rectangular shape, and are provided with electrode pads 10A to 10H on the upper surface, respectively. In FIG. 1, only the electrode pad 10H provided on the upper surface of the NAND memory chip 6H stacked on the uppermost layer is shown, and the other electrode pads 10A to 10G are not shown. The electrode pads 10H are arranged in a line along one side (the long side 6a shown in FIG. 1) of the outer shape of the NAND memory chip 6H. Similarly, the electrode pads 10A to 10G of the other NAND memory chips 6A to 6G are also arranged in a line along one side (not shown) of the outer shape of each NAND memory chip 6A to 6G. The electrode pads 10 </ b> A to 10 </ b> H are arranged in parallel according to the arrangement position of the connection pads 5 arranged on the first main surface 2 a of the wiring board 2. In the first embodiment, the side on which the electrode pads 10A to 10H of the NAND memory chips 6A to 6H are arranged is referred to as a pad arrangement side.

コントローラチップ7は、ダイアタッチフィルム8BによりNANDメモリチップ6Hの上面に接着されている。ダイアタッチフィルム8Bはコントローラチップ7の外形と同一形状の矩形形状のものを用いている。コントローラチップ7は、その上面に電極パッド11を備えている。電極パッド11は、コントローラチップ7の外形の一辺(図1に示す長辺)に沿って配列されている。また、電極パッド11は、配線基板2の接続パッド5に直接接続されるものと、NANDメモリチップ6Hの電極パッド10Hを介して配線基板2の接続パッド5に接続されるものがある。さらに、コントローラチップ7の電極パッド11は、NANDメモリチップ6Hの電極パッド10Hの配列位置と、配線基板2の接続パット5の配列位置に合わせて平行に配列されている。   The controller chip 7 is bonded to the upper surface of the NAND memory chip 6H by a die attach film 8B. The die attach film 8B has a rectangular shape that is the same as the outer shape of the controller chip 7. The controller chip 7 includes electrode pads 11 on the upper surface. The electrode pads 11 are arranged along one side of the outer shape of the controller chip 7 (long side shown in FIG. 1). In addition, there are electrode pads 11 that are directly connected to the connection pads 5 of the wiring board 2 and those that are connected to the connection pads 5 of the wiring board 2 via the electrode pads 10H of the NAND memory chip 6H. Further, the electrode pads 11 of the controller chip 7 are arranged in parallel in accordance with the arrangement position of the electrode pads 10H of the NAND memory chip 6H and the arrangement position of the connection pads 5 of the wiring board 2.

配線基板2の接続パッド5は、その第1の主面2aに外形の一辺(図1に示す長辺2D)に沿って配列されている。配線基板2は、NANDメモリチップ6A〜6Hの電極パッド10A〜10Hと直接接続される接続パッド5を切り欠き部2E及びくびれ部2Fより外側に配置し、コントローラチップ7の電極パッド11と直接接続される接続パッド5をくびれ部2Fに配置している。   The connection pads 5 of the wiring board 2 are arranged on the first main surface 2a along one side of the outer shape (long side 2D shown in FIG. 1). In the wiring board 2, the connection pads 5 directly connected to the electrode pads 10A to 10H of the NAND memory chips 6A to 6H are arranged outside the notch portion 2E and the constricted portion 2F, and are directly connected to the electrode pads 11 of the controller chip 7. The connecting pad 5 is arranged in the constricted portion 2F.

NANDメモリチップ6Hの電極パッド10Hは、ボンディングワイヤ12H(第1の金属ワイヤ)により配線基板2の接続パッド5と電気的に接続されている。同様に、NANDメモリチップ6A〜6Gの電極パッド10A〜10Gは、ボンディングワイヤ12A〜12G(第1の金属ワイヤ)により配線基板2の接続パッド5と電気的に接続されている。コントローラチップ7の電極パッド11は、ボンディングワイヤ13A(第3の金属ワイヤ)によりNANDメモリチップ6Hの電極パッド10Hと電気的に接続されるとともに、ボンディングワイヤ13B(第2の金属ワイヤ)により配線基板2の接続パッド5と電気的に接続されている。   The electrode pads 10H of the NAND memory chip 6H are electrically connected to the connection pads 5 of the wiring board 2 by bonding wires 12H (first metal wires). Similarly, the electrode pads 10A to 10G of the NAND memory chips 6A to 6G are electrically connected to the connection pads 5 of the wiring board 2 by bonding wires 12A to 12G (first metal wires). The electrode pads 11 of the controller chip 7 are electrically connected to the electrode pads 10H of the NAND memory chip 6H by bonding wires 13A (third metal wires), and are also connected to the wiring board by bonding wires 13B (second metal wires). 2 connection pads 5 are electrically connected.

以上のように、図1に示したマイクロSDカード1では、配線基板2の長辺2Dに沿って一列に配列された電極パッド10A〜10Hを有する複数のNANDメモリチップ6A〜6Hを備える。また、複数のNANDメモリチップ6A〜6Hは、配線基板2の第1の主面2aの素子搭載部4上に電極パッド10A〜10Hの配列辺(パッド配列辺)が同方向に向くように積層した。NANDメモリチップ6Hの積層面上にはコントローラチップ7を積層した。コントローラチップ7は、少なくとも配線基板2の長辺2Dに沿って一列に配列された電極パッド11を有する。また、NANDメモリチップ6A〜6Hの電極パッド10A〜10Hとコントローラチップ7の電極パッド11は、配線基板2の第1の主面2aの接続パッド5の配列位置に合わせて平行に配列した。   As described above, the micro SD card 1 shown in FIG. 1 includes a plurality of NAND memory chips 6A to 6H having the electrode pads 10A to 10H arranged in a line along the long side 2D of the wiring board 2. The plurality of NAND memory chips 6A to 6H are stacked on the element mounting portion 4 on the first main surface 2a of the wiring board 2 so that the array sides (pad array sides) of the electrode pads 10A to 10H face in the same direction. did. A controller chip 7 was stacked on the stacked surface of the NAND memory chip 6H. The controller chip 7 has electrode pads 11 arranged in a line along at least the long side 2D of the wiring board 2. Further, the electrode pads 10A to 10H of the NAND memory chips 6A to 6H and the electrode pad 11 of the controller chip 7 are arranged in parallel according to the arrangement position of the connection pads 5 on the first main surface 2a of the wiring board 2.

配線基板2の第1の主面2aに備えた複数の接続パッド5は、長辺2Dに沿って配列した。NANDメモリチップ6A〜6Hの電極パッド10A〜10Hと直接接続する接続パッド5と、NANDメモリチップ6Hの電極パッド10Hを介してコントローラチップ7の電極パッド11と接続する接続パッド5は、配線基板2の切り欠き部2E及びくびれ部2Fより外側に配置した。コントローラチップ7の電極パッド11と直接接続する接続パッド5は、配線基板2のくびれ部2Fに配置した。   The plurality of connection pads 5 provided on the first main surface 2a of the wiring board 2 were arranged along the long side 2D. The connection pads 5 directly connected to the electrode pads 10A to 10H of the NAND memory chips 6A to 6H and the connection pads 5 connected to the electrode pads 11 of the controller chip 7 through the electrode pads 10H of the NAND memory chip 6H are the wiring board 2 The cutout portion 2E and the constricted portion 2F are arranged outside. The connection pads 5 that are directly connected to the electrode pads 11 of the controller chip 7 are arranged in the constricted portion 2F of the wiring board 2.

さらに、NANDメモリチップ6A〜6H間には、各NANDメモリチップ6A〜6Gの積層面上に中空フィルム9A〜9Gを積層した。ダイアタッチフィルム8Aと中空フィルム9A〜9Gは、NANDメモリチップ6A〜6Hと同一の外形の矩形形状を有するものを用いた。このため、NANDメモリチップ6A〜6Gの電極パッド10A〜10Gと、配線基板2の接続パッド5とを電気的に接続するボンディングワイヤ12A〜12Gの接続端部を基板間に埋め込むことを可能にした。このため、NANDメモリチップ6A〜6Gの電極パッド10A〜10Gを露出する段差を設けることなく、NANDメモリチップ6A〜6Hの外形の各辺を揃えて垂直方向に積層することを可能にした。   Furthermore, between the NAND memory chips 6A to 6H, hollow films 9A to 9G were stacked on the stacked surface of the NAND memory chips 6A to 6G. As the die attach film 8A and the hollow films 9A to 9G, those having a rectangular shape having the same outer shape as the NAND memory chips 6A to 6H were used. Therefore, it is possible to embed the connection ends of bonding wires 12A to 12G that electrically connect the electrode pads 10A to 10G of the NAND memory chips 6A to 6G and the connection pads 5 of the wiring substrate 2 between the substrates. . For this reason, it is possible to stack the vertical sides of the NAND memory chips 6A to 6H with the sides of the outer shapes aligned without providing a step to expose the electrode pads 10A to 10G of the NAND memory chips 6A to 6G.

以上のようにマイクロSDカード1を構成したため、図1に示す配線基板2の第1の主面2a上の部品配置限界位置15内で最大の外形を有するNANDメモリチップ6A〜6Hを積層することが可能になった。その結果、マイクロSDカード1の外形寸法(L:15.0mm,W:11.0mm,T:1.0mm)内でNANDメモリチップの容量を増大することが可能になった。   Since the micro SD card 1 is configured as described above, the NAND memory chips 6A to 6H having the maximum outer shape within the component placement limit position 15 on the first main surface 2a of the wiring board 2 shown in FIG. 1 are stacked. Became possible. As a result, the capacity of the NAND memory chip can be increased within the external dimensions (L: 15.0 mm, W: 11.0 mm, T: 1.0 mm) of the micro SD card 1.

(第2の実施の形態)
本第2の実施の形態では、上記第1の実施の形態で用いた中空フィルム9A〜9Gを不要として、NANDメモリチップの積層数を更に増やしたマイクロSDカードの構成例について説明する。
(Second Embodiment)
In the second embodiment, a configuration example of a micro SD card in which the hollow films 9A to 9G used in the first embodiment are not required and the number of stacked NAND memory chips is further increased will be described.

本第2の実施の形態に係るマイクロSDカードについて図3及び図4を参照して説明する。図3は、第2の実施の形態に係るマイクロSDカード20の構成を示す平面図である。図4は、図3のA−A´線に沿った側面図である。なお、図3及び図4において、図1及び図2に示したマイクロSDカード1と同一の構成部分には同一符号を付しており、その構成説明は省略する。   A micro SD card according to the second embodiment will be described with reference to FIGS. FIG. 3 is a plan view showing the configuration of the micro SD card 20 according to the second embodiment. FIG. 4 is a side view taken along the line AA ′ of FIG. 3 and 4, the same reference numerals are given to the same components as those of the micro SD card 1 shown in FIGS. 1 and 2, and the description of the components is omitted.

配線基板2の第1の主面2aには、素子搭載部4と、ワイヤボンディング時のボンディング部となる接続パッド23が形成されている。なお、配線基板2の第1の主面2aはマイクロSDカード1の裏面に相当する。接続パッド23は、配線基板2の図示を省略した内部配線(スルーホール等)を介して、外部接続端子3と電気的に接続される。接続パッド23は、配線基板2の外形の二つの長辺2C,2Dに沿ったパッド領域23A,23Bに配置されている。   On the first main surface 2 a of the wiring substrate 2, an element mounting portion 4 and a connection pad 23 serving as a bonding portion at the time of wire bonding are formed. The first main surface 2 a of the wiring board 2 corresponds to the back surface of the micro SD card 1. The connection pad 23 is electrically connected to the external connection terminal 3 via an internal wiring (through hole or the like) (not shown) of the wiring board 2. The connection pads 23 are arranged in pad regions 23A and 23B along the two long sides 2C and 2D of the outer shape of the wiring board 2.

配線基板2の第1の主面2aの素子搭載部4には、複数のNANDメモリチップ(半導体記憶素子)21A〜21Pが積層されて搭載されている。NANDメモリチップ21P上にはコントローラチップ(コントローラ素子)7が積層されている。コントローラチップ7は、複数のNANDメモリチップ21A〜21Pからデータの書き込みや読み出しを行うNANDメモリチップ21を選択し、選択したNANDメモリチップ21へのデータを書き込み、また選択したNANDメモリチップ21に記憶されたデータの読み出し等を行う。   A plurality of NAND memory chips (semiconductor memory elements) 21 </ b> A to 21 </ b> P are stacked and mounted on the element mounting portion 4 of the first main surface 2 a of the wiring board 2. A controller chip (controller element) 7 is stacked on the NAND memory chip 21P. The controller chip 7 selects the NAND memory chip 21 that writes and reads data from the plurality of NAND memory chips 21 </ b> A to 21 </ b> P, writes data to the selected NAND memory chip 21, and stores it in the selected NAND memory chip 21. The read data is read out.

図4に示すように、配線基板2の第1の主面2a上には、16段のNANDメモリチップ21A〜21Pが下から順に積層されている。NANDメモリチップ21Aは、その下面側に設けられたダイアタッチフィルム22Aにより配線基板2の素子搭載部4に接着されている。NANDメモリチップ21B〜21Pは、ダイアタッチフィルム22B〜22Pにより、下層のNANDメモリチップ21A〜21Oの各上面(積層面)に接着されている。なお、第2の実施の形態では、NANDメモリチップ21の積層数を16段とした場合を示すが、その積層数を特に限定するものではない。   As shown in FIG. 4, 16 stages of NAND memory chips 21 </ b> A to 21 </ b> P are stacked in order from the bottom on the first main surface 2 a of the wiring board 2. The NAND memory chip 21A is bonded to the element mounting portion 4 of the wiring board 2 by a die attach film 22A provided on the lower surface side thereof. The NAND memory chips 21B to 21P are bonded to the upper surfaces (laminated surfaces) of the lower NAND memory chips 21A to 21O by die attach films 22B to 22P. In the second embodiment, the case where the number of stacked NAND memory chips 21 is 16 is shown, but the number of stacked layers is not particularly limited.

ダイアタッチフィルム22A〜22Pは、ダイシングテープとボンディング剤としての機能を持ち合わせた接着フィルムである。その接着層には一般的なポリイミド樹脂、エポキシ樹脂、アクリル樹脂等を主成分とするものが用いられる。ダイアタッチフィルム22A〜22Pは、NANDメモリチップ21A〜21Pの外形と同一形状の矩形形状のものを用いている。   The die attach films 22A to 22P are adhesive films having a function as a dicing tape and a bonding agent. As the adhesive layer, a material mainly composed of a general polyimide resin, epoxy resin, acrylic resin or the like is used. The die attach films 22A to 22P have rectangular shapes that are the same as the outer shapes of the NAND memory chips 21A to 21P.

NANDメモリチップ21A〜21Pは、矩形状の同一形状を有し、それぞれ上面に電極パッド24A〜24Pを備えている。図3では、最上層に積層されたNANDメモリチップ21Pの上面に備えられている電極パッド24Pと、その下層に積層されたNANDメモリチップ21M〜21Oの各上面に備えられている電極パッド24M〜24Oのみを示し、他の電極パッド24A〜24Lの図示は省略している。図4に示すように、NANDメモリチップ21A〜21Pは、各電極パッド24A〜24Pが互いに露出するように段差をつけて積層している。   The NAND memory chips 21A to 21P have the same rectangular shape, and are provided with electrode pads 24A to 24P on the upper surfaces, respectively. In FIG. 3, the electrode pads 24P provided on the upper surface of the NAND memory chip 21P stacked on the uppermost layer, and the electrode pads 24M˜ provided on the upper surfaces of the NAND memory chips 21M to 21O stacked on the lower layer thereof. Only 24O is shown, and the other electrode pads 24A to 24L are not shown. As shown in FIG. 4, the NAND memory chips 21A to 21P are stacked with a step so that the electrode pads 24A to 24P are exposed to each other.

NANDメモリチップ21A,21B,21E,21F,21I,21J,21M,21Nの電極パッド24A,24B,24E,24F,24I,24J,24M,24Nは、NANDメモリチップ21Pの外形の一辺(図3に示す長辺21a)に沿って一列に配列されている。NANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21Pの電極パッド24C,24D,24G,24H,24K,24L,24O,24Pは、NANDメモリチップ21Pの外形の一辺(図3に示す長辺21b)に沿って一列に配列されている。   The electrode pads 24A, 24B, 24E, 24F, 24I, 24J, 24M, and 24N of the NAND memory chips 21A, 21B, 21E, 21F, 21I, 21J, 21M, and 21N are sides of the outer shape of the NAND memory chip 21P (see FIG. 3). It is arranged in a line along the long side 21a) shown. The electrode pads 24C, 24D, 24G, 24H, 24K, 24L, 24O, and 24P of the NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, and 21P are sides of the outer shape of the NAND memory chip 21P (see FIG. 3). It is arranged in a line along the long side 21b) shown.

また、電極パッド24C,24D,24G,24H,24K,24L,24O,24Pは、配線基板2の第1の主面2aに配列された接続パッド23のバッド領域23Aの配列位置に合わせて平行に配置されている。電極パッド24A,24B,24E,24F,24I,24J,24M,24Nは、配線基板2の第1の主面2aに配列された接続パッド23のバッド領域23Bの配列位置に合わせて平行に配置されている。なお、本第2の実施の形態では、NANDメモリチップ21A〜21Pの電極パッド24A〜24Pが配列された各辺をパッド配列辺と呼ぶものとする。   The electrode pads 24C, 24D, 24G, 24H, 24K, 24L, 24O, and 24P are parallel to the arrangement position of the pad region 23A of the connection pad 23 arranged on the first main surface 2a of the wiring board 2. Has been placed. The electrode pads 24A, 24B, 24E, 24F, 24I, 24J, 24M, and 24N are arranged in parallel in accordance with the arrangement positions of the pad regions 23B of the connection pads 23 arranged on the first main surface 2a of the wiring board 2. ing. In the second embodiment, each side where the electrode pads 24A to 24P of the NAND memory chips 21A to 21P are arranged is referred to as a pad arrangement side.

コントローラチップ7は、ダイアタッチフィルム22QによりNANDメモリチップ21Pの上面に接着されている。ダイアタッチフィルム22Qはコントローラチップ7の外形と同一形状の矩形形状のものを用いている。コントローラチップ7は、その上面に電極パッド11を備えている。電極パッド11は、コントローラチップ7の外形の一辺(図3に示す長辺)に沿って配列されている。また、電極パッド11は、配線基板2の接続パッド23に直接接続されるものと、NANDメモリチップ21Pの電極パッド24Pを介して配線基板2の接続パッド23に接続されるものがある。さらに、コントローラチップ7の電極パッド11は、NANDメモリチップ21Pの電極パッド1024Pの配列位置と、配線基板2の接続パット5の配列位置に合わせて平行に配列されている。   The controller chip 7 is bonded to the upper surface of the NAND memory chip 21P with a die attach film 22Q. The die attach film 22Q has a rectangular shape that is the same as the outer shape of the controller chip 7. The controller chip 7 includes electrode pads 11 on the upper surface. The electrode pads 11 are arranged along one side of the outer shape of the controller chip 7 (long side shown in FIG. 3). In addition, there are electrode pads 11 that are directly connected to the connection pads 23 of the wiring board 2 and those that are connected to the connection pads 23 of the wiring board 2 via the electrode pads 24P of the NAND memory chip 21P. Furthermore, the electrode pads 11 of the controller chip 7 are arranged in parallel in accordance with the arrangement position of the electrode pads 1024P of the NAND memory chip 21P and the arrangement position of the connection pads 5 of the wiring board 2.

配線基板2の接続パッド23は、その第1の主面2aに外形の二辺(図3に示す長辺2C,2D)に沿って配列されている。配線基板2は、NANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21Pの電極パッド24C,24D,24G,24H,24K,24L,24O,24Pと直接接続される接続パッド23を切り欠き部2E及びくびれ部2Fより外側に配置し、コントローラチップ7の電極パッド11と直接接続される接続パッド23をくびれ部2Fに配置している。また、配線基板2は、NANDメモリチップ21A,21B,21E,21F,21I,21J,21M,21Nの電極パッド24A,24B,24E,24F,24I,24J,24M,24Nと直接接続される接続パッド23を第1の主面2aに外形の一辺(図3に示す長辺2C)に沿って配置している。   The connection pads 23 of the wiring board 2 are arranged on the first main surface 2a along two outer sides (long sides 2C and 2D shown in FIG. 3). The wiring board 2 has connection pads 23 directly connected to the electrode pads 24C, 24D, 24G, 24H, 24K, 24L, 24O, 24P of the NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, 21P. A connection pad 23 arranged outside the notch 2E and the constricted part 2F and directly connected to the electrode pad 11 of the controller chip 7 is arranged in the constricted part 2F. The wiring board 2 is a connection pad that is directly connected to the electrode pads 24A, 24B, 24E, 24F, 24I, 24J, 24M, and 24N of the NAND memory chips 21A, 21B, 21E, 21F, 21I, 21J, 21M, and 21N. 23 is arranged on the first main surface 2a along one side of the outer shape (long side 2C shown in FIG. 3).

図3に示すように、NANDメモリチップ21O,221Pの電極パッド24O,24Pは、ボンディングワイヤ25O,25P(第1の金属ワイヤ)により配線基板2の接続パッド23と電気的に接続されている。図4に示すように、NANDメモリチップ21C,21D,21G,21H,21K,21Lの電極パッド24C,24D,24G,24H,24K,24Lは、ボンディングワイヤ25C,25D,25G,25H,25K,25L(第1の金属ワイヤ)により配線基板2の接続パッド23と電気的に接続されている。   As shown in FIG. 3, the electrode pads 24O and 24P of the NAND memory chips 21O and 221P are electrically connected to the connection pads 23 of the wiring board 2 by bonding wires 25O and 25P (first metal wires). As shown in FIG. 4, the electrode pads 24C, 24D, 24G, 24H, 24K, and 24L of the NAND memory chips 21C, 21D, 21G, 21H, 21K, and 21L are bonded to the bonding wires 25C, 25D, 25G, 25H, 25K, and 25L. It is electrically connected to the connection pad 23 of the wiring board 2 by (first metal wire).

また、図3に示すように、NANDメモリチップ21M,221Nの電極パッド24M,24Nは、ボンディングワイヤ25M,25N(第1の金属ワイヤ)により配線基板2の接続パッド23と電気的に接続されている。図4に示すように、NANDメモリチップ21A,21B,21E,21F,21I,21Jの電極パッド24A,24B,24E,24F,24I,24Jは、ボンディングワイヤ25A,25B,25E,25F,25I,25J(第1の金属ワイヤ)により配線基板2の接続パッド23と電気的に接続されている。   Further, as shown in FIG. 3, the electrode pads 24M and 24N of the NAND memory chips 21M and 221N are electrically connected to the connection pads 23 of the wiring board 2 by bonding wires 25M and 25N (first metal wires). Yes. As shown in FIG. 4, the electrode pads 24A, 24B, 24E, 24F, 24I, and 24J of the NAND memory chips 21A, 21B, 21E, 21F, 21I, and 21J are bonded to bonding wires 25A, 25B, 25E, 25F, 25I, and 25J. It is electrically connected to the connection pad 23 of the wiring board 2 by (first metal wire).

コントローラチップ7の電極パッド11は、ボンディングワイヤ26A(第3の金属ワイヤ)によりNANDメモリチップ21Pの電極パッド24Pと電気的に接続されるとともに、ボンディングワイヤ26B(第2の金属ワイヤ)により配線基板2の接続パッド23と電気的に接続されている。   The electrode pad 11 of the controller chip 7 is electrically connected to the electrode pad 24P of the NAND memory chip 21P by a bonding wire 26A (third metal wire) and is also connected to the wiring board by a bonding wire 26B (second metal wire). The two connection pads 23 are electrically connected.

以上のように、図3に示したマイクロSDカード20では、配線基板2の長辺2C,2Dに沿って一列に配列された電極パッド24A〜24Pを有する複数のNANDメモリチップ21A〜21Pを備える。また、複数のNANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21P(第1の素子群)は、配線基板2の第1の主面2aの素子搭載部4上に電極パッド24C,24D,24G,24H,24K,24L,24O,24Pの配列辺(パッド配列辺)が同方向に向くように積層した。NANDメモリチップ24Pの積層面上にはコントローラチップ7を積層した。コントローラチップ7は、少なくとも配線基板2の長辺2Dに沿って一列に配列された電極パッド11を有する。また、NANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21Pの電極パッド24C,24D,24G,24H,24K,24L,24O,24Pとコントローラチップ7の電極パッド11は、配線基板2の第1の主面2aの接続パッド23の配列位置に合わせて平行に配列した。   As described above, the micro SD card 20 illustrated in FIG. 3 includes a plurality of NAND memory chips 21A to 21P having the electrode pads 24A to 24P arranged in a line along the long sides 2C and 2D of the wiring board 2. . The plurality of NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, and 21P (first element group) are electrode pads on the element mounting portion 4 on the first main surface 2a of the wiring board 2. Lamination was performed such that the arrangement sides (pad arrangement sides) of 24C, 24D, 24G, 24H, 24K, 24L, 24O, and 24P faced in the same direction. The controller chip 7 was stacked on the stacked surface of the NAND memory chip 24P. The controller chip 7 has electrode pads 11 arranged in a line along at least the long side 2D of the wiring board 2. Further, the electrode pads 24C, 24D, 24G, 24H, 24K, 24L, 24O, and 24P of the NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, and 21P and the electrode pads 11 of the controller chip 7 are connected to the wiring board. The two first main surfaces 2a were arranged in parallel in accordance with the arrangement positions of the connection pads 23.

また、複数のNANDメモリチップ21A,21B,21E,21F,21I,21J,21M,21N(第2の素子群)は、配線基板2の第1の主面2aの素子搭載部4上に電極パッド24A,24B,24E,24F,24I,24J,24M,24Nの配列辺(パッド配列辺)が同方向に向くように積層した。さらに、NANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21P(第1の素子群)と、NANDメモリチップ21A,21B,21E,21F,21I,21J,21M,21N(第2の素子群)は、各電極パッド24A〜24Pが互いに露出するように段差をつけて積層した。   The plurality of NAND memory chips 21A, 21B, 21E, 21F, 21I, 21J, 21M, and 21N (second element group) are electrode pads on the element mounting portion 4 on the first main surface 2a of the wiring board 2. The layers 24A, 24B, 24E, 24F, 24I, 24J, 24M, and 24N were stacked so that the array sides (pad array sides) faced in the same direction. Furthermore, NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, 21P (first element group) and NAND memory chips 21A, 21B, 21E, 21F, 21I, 21J, 21M, 21N (second) The element group) was laminated with a step so that the electrode pads 24A to 24P were exposed to each other.

配線基板2の接続パッド23は、その第1の主面2aに外形の二辺(図3に示す長辺2C,2D)に沿って配列されている。配線基板2は、NANDメモリチップ21C,21D,21G,21H,21K,21L,21O,21Pの電極パッド24C,24D,24G,24H,24K,24L,24O,24Pと直接接続される接続パッド23を切り欠き部2E及びくびれ部2Fより外側に配置し、コントローラチップ7の電極パッド11と直接接続される接続パッド23をくびれ部2Fに配置した。   The connection pads 23 of the wiring board 2 are arranged on the first main surface 2a along two outer sides (long sides 2C and 2D shown in FIG. 3). The wiring board 2 has connection pads 23 directly connected to the electrode pads 24C, 24D, 24G, 24H, 24K, 24L, 24O, 24P of the NAND memory chips 21C, 21D, 21G, 21H, 21K, 21L, 21O, 21P. A connection pad 23 arranged outside the cutout portion 2E and the constricted portion 2F and directly connected to the electrode pad 11 of the controller chip 7 is arranged in the constricted portion 2F.

さらに、NANDメモリチップ21A〜21P間には、各NANDメモリチップ21A〜21Pの積層面上にダイアタッチフィルム22A〜22Pを積層した。ダイアタッチフィルム22A〜22Pは、NANDメモリチップ21A〜21Pと同一の外形の矩形形状を有するものを用いた。このため、マイクロSDカード20では、第1の実施の形態に示したマイクロSDカード1のように中空フィルム9A〜9Gを用いないため、電極パッド24A〜24P部分に上層のNANDメモリチップを重ねて積層することはできず、NANDメモリチップの積層位置を平面方向にずらして積層する必要がある。   Further, die attach films 22A to 22P were stacked on the stacked surface of the NAND memory chips 21A to 21P between the NAND memory chips 21A to 21P. As the die attach films 22A to 22P, those having the same rectangular shape as the NAND memory chips 21A to 21P were used. Therefore, since the micro SD card 20 does not use the hollow films 9A to 9G unlike the micro SD card 1 shown in the first embodiment, an upper layer NAND memory chip is stacked on the electrode pads 24A to 24P. Stacking is not possible, and it is necessary to shift the stacking position of the NAND memory chip in the plane direction.

また、NANDメモリチップ21A〜21Pは、電極パッド24A〜24P部分を露出するように積層したため、NANDメモリチップ21A〜21Pの各長辺21a,21bに沿って電極パッド24A〜24Pを配置する必要がある。このため、NANDメモリチップ21A〜21Pの大きさは、図3に示す部品配置限界位置27より内側に配置した電極パッド24A〜24Pの制約を受ける。すなわち、NANDメモリチップ21A〜21Pの大きさは、第1の実施の形態に示したマイクロSDカード1に搭載したNANDメモリチップ6A〜6Hの大きさよりも小さくなる。   Further, since the NAND memory chips 21A to 21P are stacked so as to expose the electrode pads 24A to 24P, it is necessary to arrange the electrode pads 24A to 24P along the long sides 21a and 21b of the NAND memory chips 21A to 21P. is there. For this reason, the sizes of the NAND memory chips 21A to 21P are restricted by the electrode pads 24A to 24P arranged inside the component arrangement limit position 27 shown in FIG. That is, the size of the NAND memory chips 21A to 21P is smaller than the size of the NAND memory chips 6A to 6H mounted on the micro SD card 1 shown in the first embodiment.

しかし、NANDメモリチップ21A〜21Pの電極パッド24A〜24Pは、ボンディングワイヤ25B,25D,25F,25H,25J,25L,25N,25Pにより隣接するNANDメモリチップ21A〜21P同士が接続され、ボンディングワイヤ25A,25C,25E,25G,25I,25K,25M,25Oにより配線基板2上の接続パッド23に接続される。このため、NANDメモリチップの積層数が多くなっても、配線基板2上のパッド領域23A,23Bは拡大する必要がない。したがって、第2の実施の形態に示したマイクロSDカード20では、搭載可能なNANDメモリチップの大きさは第1の実施の形態に示したマイクロSDカード1よりも小さくなるが、ボンディング用のパッドの配置を工夫し、中空フィルムの積層を不要にしたため、NANDメモリチップの積層数を容易に増やすことができる。その結果、マイクロSDカード1の外形寸法(L:15.0mm,W:11.0mm,T:1.0mm)内でNANDメモリチップの容量を更に増大することが可能になった。   However, the adjacent NAND memory chips 21A to 21P are connected to the electrode pads 24A to 24P of the NAND memory chips 21A to 21P by bonding wires 25B, 25D, 25F, 25H, 25J, 25L, 25N, and 25P. , 25C, 25E, 25G, 25I, 25K, 25M, and 25O, the connection pads 23 on the wiring board 2 are connected. For this reason, even if the number of stacked NAND memory chips increases, the pad regions 23A and 23B on the wiring board 2 do not need to be enlarged. Therefore, in the micro SD card 20 shown in the second embodiment, the size of the mountable NAND memory chip is smaller than that of the micro SD card 1 shown in the first embodiment, but the bonding pad is used. Therefore, the number of stacked NAND memory chips can be easily increased. As a result, the capacity of the NAND memory chip can be further increased within the external dimensions (L: 15.0 mm, W: 11.0 mm, T: 1.0 mm) of the micro SD card 1.

なお、上記第1、第2の実施の形態では、本発明をマイクロSDカードに適用した場合を示したが、これに限定するものではない。本発明は配線基板上に複数の半導体記憶素子を積層して搭載する各種の半導体記憶装置等に適用可能である。   In the first and second embodiments, the case where the present invention is applied to a micro SD card has been described. However, the present invention is not limited to this. The present invention is applicable to various semiconductor memory devices and the like in which a plurality of semiconductor memory elements are stacked and mounted on a wiring board.

本発明の第1の実施の形態に係るマイクロSDカードの構成を示す平面図である。It is a top view which shows the structure of the micro SD card based on the 1st Embodiment of this invention. 第1の実施の形態に係るマイクロSDカードの図1のA−A´線に沿った側面図である。It is a side view along the AA 'line of FIG. 1 of the micro SD card based on 1st Embodiment. 本発明の第2の実施の形態に係るマイクロSDカードの構成を示す平面図である。It is a top view which shows the structure of the micro SD card based on the 2nd Embodiment of this invention. 第2の実施の形態に係るマイクロSDカードの図3のA−A´線に沿った側面図である。It is a side view along the AA 'line of Drawing 3 of a micro SD card concerning a 2nd embodiment.

符号の説明Explanation of symbols

1,20…マイクロSDカード、2…配線基板、2D…長辺、2E…切り欠き部、2F…くびれ部、4…素子搭載部、5,23…接続パッド、5A,23A,23B…パッド領域、6A〜6H,21A〜21P…NANDメモリチップ、7…コントローラチップ、8A,8B,22A〜22Q…ダイアタッチフィルム、9A〜9G…中空フィルム、10A〜10H,11,24A〜24P…電極パッド、12A〜12H,13A,13B,25A〜25P,26A,26B…ボンディングワイヤ。
DESCRIPTION OF SYMBOLS 1,20 ... Micro SD card, 2 ... Wiring board, 2D ... Long side, 2E ... Notch part, 2F ... Constriction part, 4 ... Element mounting part, 5, 23 ... Connection pad, 5A, 23A, 23B ... Pad area | region 6A-6H, 21A-21P ... NAND memory chip, 7 ... Controller chip, 8A, 8B, 22A-22Q ... Die attach film, 9A-9G ... Hollow film, 10A-10H, 11, 24A-24P ... Electrode pad, 12A to 12H, 13A, 13B, 25A to 25P, 26A, 26B ... bonding wires.

Claims (5)

素子搭載部と、外形の一辺に沿って配列された接続パッドとを備える配線基板と、
外形の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層された半導体記憶素子群と、
前記半導体記憶素子群上に積層され、少なくとも外形の一辺に沿って配列された電極パッドを有するコントローラ素子と、
前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第1の金属ワイヤと、
前記コントローラ素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第2の金属ワイヤと、
前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドとを電気的に接続する第3の金属ワイヤと、を具備し、
前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドは、前記配線基板の前記接続パッドの配列位置に合わせて平行に配置したことを特徴とする半導体記憶装置。
A wiring board comprising an element mounting portion and connection pads arranged along one side of the outer shape;
A plurality of semiconductor memory elements having electrode pads arranged along one side of the outer shape, and the plurality of semiconductor memory elements are stacked on the element mounting portion of the wiring board so that the pad array side faces in the same direction. A group of semiconductor memory elements,
A controller element having electrode pads stacked on the semiconductor memory element group and arranged along at least one side of the outer shape;
A first metal wire that electrically connects the electrode pads of the plurality of semiconductor memory elements and the connection pads of the wiring board;
A second metal wire that electrically connects the electrode pad of the controller element and the connection pad of the wiring board;
A third metal wire that electrically connects the electrode pads of the plurality of semiconductor memory elements and the electrode pads of the controller element;
2. The semiconductor memory device according to claim 1, wherein the electrode pads of the plurality of semiconductor memory elements and the electrode pads of the controller element are arranged in parallel according to the arrangement position of the connection pads of the wiring board.
前記積層される半導体記憶素子間には、前記半導体記憶素子の積層面上に積層され、前記半導体記憶素子の外形と同一形状の中空フィルムを積層したことを特徴とする請求項1に記載の半導体記憶装置。   2. The semiconductor according to claim 1, wherein the semiconductor memory elements are stacked on a stacked surface of the semiconductor memory elements, and a hollow film having the same shape as the outer shape of the semiconductor memory elements is stacked between the stacked semiconductor memory elements. Storage device. 前記半導体記憶素子群は、前記複数の半導体記憶素子の前記電極パッドが配列された一辺と、該一辺以外の他の辺とを揃えて垂直方向に積層したことを特徴とする請求項1又は2に記載の半導体記憶装置。   3. The semiconductor memory element group according to claim 1, wherein one side where the electrode pads of the plurality of semiconductor memory elements are arranged and another side other than the one side are aligned and stacked vertically. The semiconductor memory device described in 1. 素子搭載部と、少なくとも外形の二辺に沿って配列された接続パッドとを備える配線基板と、
外形の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層される第1の素子群と、
外形の他の一辺に沿って配列された電極パッドを有する複数の半導体記憶素子を備え、前記複数の半導体記憶素子は前記配線基板の前記素子搭載部上にパッド配列辺を同方向に向けるように積層される第2の素子群と、
前記第2の素子群上に積層され、少なくとも外形の一辺に沿って配列された電極パッドを有するコントローラ素子と、
前記第1の素子群を構成する前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第1の金属ワイヤと、
前記第2の素子群を構成する前記複数の半導体記憶素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第2の金属ワイヤと、
前記コントローラ素子の前記電極パッドと前記配線基板の前記接続パッドとを電気的に接続する第3の金属ワイヤと、を具備し、
前記第1の素子群を構成する前記複数の半導体記憶素子と前記第2の素子群を構成する前記複数の半導体記憶素子を前記電極パッドが互いに露出するように交互に積層するとともに、前記複数の半導体記憶素子の前記電極パッドと前記コントローラ素子の前記電極パッドは前記配線基板の前記接続パッドの配列位置に合わせて平行に配置したことを特徴とする半導体記憶装置。
A wiring board comprising an element mounting portion and connection pads arranged along at least two sides of the outer shape;
A plurality of semiconductor memory elements having electrode pads arranged along one side of the outer shape, and the plurality of semiconductor memory elements are stacked on the element mounting portion of the wiring board so that the pad array side faces in the same direction. A first element group,
A plurality of semiconductor memory elements having electrode pads arranged along another side of the outer shape, wherein the plurality of semiconductor memory elements have their pad arrangement sides directed in the same direction on the element mounting portion of the wiring board; A second element group to be laminated;
A controller element having an electrode pad stacked on the second element group and arranged along at least one side of the outer shape;
A first metal wire for electrically connecting the electrode pads of the plurality of semiconductor memory elements constituting the first element group and the connection pads of the wiring board;
A second metal wire for electrically connecting the electrode pads of the plurality of semiconductor memory elements constituting the second element group and the connection pads of the wiring board;
A third metal wire for electrically connecting the electrode pad of the controller element and the connection pad of the wiring board;
The plurality of semiconductor memory elements constituting the first element group and the plurality of semiconductor memory elements constituting the second element group are alternately stacked so that the electrode pads are exposed to each other, and the plurality of semiconductor memory elements The semiconductor memory device according to claim 1, wherein the electrode pads of the semiconductor memory element and the electrode pads of the controller element are arranged in parallel in accordance with the arrangement position of the connection pads of the wiring board.
前記積層される半導体記憶素子間には、前記半導体記憶素子の積層面上に積層され、前記半導体記憶素子の外形と同一形状の接着フィルムを積層したことを特徴とする請求項4に記載の半導体記憶装置。   5. The semiconductor according to claim 4, wherein an adhesive film having the same shape as the outer shape of the semiconductor memory element is stacked between the stacked semiconductor memory elements on the stacked surface of the semiconductor memory element. Storage device.
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