TWI529918B - Semiconductor memory card - Google Patents

Semiconductor memory card Download PDF

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Publication number
TWI529918B
TWI529918B TW101130716A TW101130716A TWI529918B TW I529918 B TWI529918 B TW I529918B TW 101130716 A TW101130716 A TW 101130716A TW 101130716 A TW101130716 A TW 101130716A TW I529918 B TWI529918 B TW I529918B
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TW
Taiwan
Prior art keywords
wiring
layer
external connection
connection terminals
wafer
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TW101130716A
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Chinese (zh)
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TW201336054A (en
Inventor
Hiroshi Inagaki
Hideki Kawamura
Takashi Okada
Taku Nishiyama
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Toshiba Kk
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Publication of TW201336054A publication Critical patent/TW201336054A/en
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Publication of TWI529918B publication Critical patent/TWI529918B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]

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  • Credit Cards Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)

Description

半導體記憶卡 Semiconductor memory card [相關申請案] [Related application]

本申請案享有以日本專利申請案2012-43680號(申請日:2012年2月29日)為基礎申請案之優先權。本申請案藉由參照該基礎申請案而包含基礎申請案之全部內容。 The present application has priority in the application based on Japanese Patent Application No. 2012-43680 (filing date: February 29, 2012). This application contains the entire contents of the basic application by reference to the basic application.

本發明之實施形態係關於一種半導體記憶卡。 Embodiments of the present invention relate to a semiconductor memory card.

於內置如NAND(Not-AND,與非)型快閃記憶體之非揮發性半導體記憶體晶片之記憶卡(半導體記憶卡)中,為了謀求高容量化、高速化、製造成本之降低等,而推進如下構造之應用:將於1個封裝體內密封有記憶體晶片或控制器晶片之SiP(System in Package,系統級封裝)構造之半導體記憶裝置收容於卡盒內。SiP構造之半導體記憶裝置例如包括:配線基板,其設置有外部連接端子;記憶體晶片及控制器晶片,其等搭載於與配線基板之端子形成面為相反側之面;及密封樹脂層,其以密封記憶體晶片及控制器晶片之方式,形成於配線基板之晶片搭載面。 In a memory card (semiconductor memory card) in which a nonvolatile semiconductor memory chip such as a NAND (Not-AND) type flash memory is incorporated, in order to increase the capacity, speed, and manufacturing cost, The application of the structure is as follows: a semiconductor memory device of a SiP (System in Package) structure in which a memory chip or a controller chip is sealed in one package is housed in a cartridge. The semiconductor memory device of the SiP structure includes, for example, a wiring board provided with external connection terminals, a memory chip and a controller wafer mounted on a surface opposite to a terminal forming surface of the wiring substrate, and a sealing resin layer. The wafer mounting surface of the wiring substrate is formed by sealing the memory chip and the controller wafer.

於SiP構造之半導體記憶裝置中,通常使用如下配線基板:於絕緣性之樹脂基材之兩面設置使銅箔圖案化而形成之配線層,並且以通孔電性連接兩面之配線層間。於設置於配線基板之端子形成面之銅配線層之一部分形成成為外部連接端子之鍍金層。於先前之SiP構造之半導體記憶裝置中,存在如下缺點:自進行與外部機器之電性連接之外 部連接端子至控制器晶片之配線長度易於變長。因此,信號傳輸速度下降,又,因配線密度下降而導致基板面積易於增大。根據此種情況,為了實現記憶卡中之信號傳輸速度之提高或構成SiP構造之配線基板之小型化等,較為理想的是縮短自外部連接端子至控制器晶片之配線長度。 In the semiconductor memory device of the SiP structure, a wiring board is generally used in which a wiring layer formed by patterning a copper foil is provided on both surfaces of an insulating resin substrate, and wiring layers on both sides are electrically connected by via holes. A gold plating layer serving as an external connection terminal is formed in one of the copper wiring layers provided on the terminal forming surface of the wiring board. In the semiconductor memory device of the prior SiP structure, there are the following disadvantages: from performing electrical connection with an external device The length of the wiring from the connection terminal to the controller chip tends to be long. Therefore, the signal transmission speed is lowered, and the substrate area is liable to increase due to a decrease in the wiring density. In this case, in order to increase the signal transmission speed in the memory card or to miniaturize the wiring board constituting the SiP structure, it is preferable to shorten the wiring length from the external connection terminal to the controller chip.

本發明所欲解決之課題在於提供一種可縮短自外部連接端子至控制器晶片之配線長度之半導體記憶卡。 SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor memory card capable of shortening the wiring length from an external connection terminal to a controller chip.

實施形態之半導體記憶卡具備半導體記憶裝置,該半導體記憶裝置包括:配線基板,其具備包含複數個外部連接端子與第1配線層之第1面、包含晶片搭載區域與第2配線層之第2面、及電性連接第1配線層與第2配線層之通孔;記憶體晶片,其配置於配線基板之晶片搭載區域上,且包含至少1個沿外形邊排列之第1電極墊;控制器晶片,其積層於記憶體晶片上,且包含至少1個沿外形邊排列之第2電極墊;第1金屬線,其電性連接記憶體晶片之第1電極墊與配線基板之第2配線層;第2金屬線,其電性連接控制器晶片之第2電極墊與配線基板之第2配線層;以及密封樹脂層,其以將記憶體晶片及控制器晶片連同第1及第2金屬線一併密封之方式,形成於配線基板之第2面上。複數個外部連接端子係以位於配線基板之第1外形邊之附近之方式,沿第1外形邊排列。控制器晶片之第2電極晶片中之與 外部連接端子電性連接之電極墊,係以位於與配線基板之第1面上之複數個外部連接端子之形成區域相對應的第2面上之區域內或上述區域之附近之方式,沿與複數個外部連接端子之排列方向平行、且位於配線基板之第1外形邊側之控制器晶片之外形邊排列。 A semiconductor memory card according to an embodiment includes a semiconductor memory device including a wiring board including a first surface including a plurality of external connection terminals and a first wiring layer, and a second wafer including a wafer mounting region and a second wiring layer And a via hole electrically connecting the first wiring layer and the second wiring layer; the memory chip is disposed on the wafer mounting region of the wiring substrate, and includes at least one first electrode pad arranged along the outer shape; The wafer is laminated on the memory chip and includes at least one second electrode pad arranged along the outer shape; the first metal wire electrically connecting the first electrode pad of the memory chip and the second wiring of the wiring substrate a second metal wire electrically connected to the second electrode pad of the controller wafer and the second wiring layer of the wiring substrate; and a sealing resin layer for connecting the memory chip and the controller wafer together with the first and second metals The wire is sealed together on the second surface of the wiring board. The plurality of external connection terminals are arranged along the first outer shape so as to be located in the vicinity of the first outer edge of the wiring board. The second electrode wafer of the controller chip The electrode pad electrically connected to the external connection terminal is located in the region on the second surface corresponding to the formation region of the plurality of external connection terminals on the first surface of the wiring substrate or in the vicinity of the region. The plurality of external connection terminals are arranged in parallel to each other and are arranged outside the controller wafer on the first outer side of the wiring substrate.

以下,參照圖式,對實施形態之半導體記憶卡進行說明。圖1係表示實施形態之半導體記憶卡之平面圖。圖1所示之半導體記憶卡1係例如用作SD(Secure Digital,安全數位)TM規格之記憶卡(SDTM卡)者,包括上下一對卡盒2、及收容於卡盒2內之半導體記憶裝置3。半導體記憶裝置3係由SiP構造之半導體裝置構成。以下,對半導體記憶裝置3之具體構造進行詳細敍述。 Hereinafter, a semiconductor memory card according to an embodiment will be described with reference to the drawings. Fig. 1 is a plan view showing a semiconductor memory card of an embodiment. The semiconductor memory card 1 shown in FIG. 1 is used, for example, as an SD (Secure Digital) TM memory card (SD TM card), including a pair of upper and lower cartridges 2, and a semiconductor housed in the cartridge 2. Memory device 3. The semiconductor memory device 3 is composed of a semiconductor device of a SiP structure. Hereinafter, the specific structure of the semiconductor memory device 3 will be described in detail.

(第1實施形態) (First embodiment)

參照圖3至圖6,對第1實施形態之SiP構造之半導體記憶裝置進行說明。圖3係表示第1實施形態之半導體記憶裝置之上表面透視圖,圖4係沿圖3之A-A線之剖面圖,圖5係自半導體記憶裝置之上表面(模塑面)透視觀察圖3所示之半導體記憶裝置中之配線基板之端子形成面之透視圖,圖6係自半導體記憶裝置之上表面(模塑面)透視觀察圖3所示之半導體記憶裝置中之配線基板之晶片搭載面之透視圖。該等圖中所示之半導體記憶裝置11(3)包括兼作外部連接端子之形成基板與半導體晶片之搭載基板之配線基板12。配線基板12具有成為外部連接端子之形成面之第1面12a、及成為 記憶體晶片或控制器晶片之搭載面之第2面12b。 A semiconductor memory device of the SiP structure according to the first embodiment will be described with reference to Figs. 3 to 6 . 3 is a perspective view showing the upper surface of the semiconductor memory device of the first embodiment, FIG. 4 is a cross-sectional view taken along line AA of FIG. 3, and FIG. 5 is a perspective view of the upper surface (molding surface) of the semiconductor memory device. FIG. 6 is a perspective view showing a terminal forming surface of a wiring substrate in the semiconductor memory device shown in FIG. Perspective of the face. The semiconductor memory device 11 (3) shown in the drawings includes a wiring substrate 12 which also serves as a substrate for forming an external connection terminal and a substrate for mounting a semiconductor wafer. The wiring board 12 has the first surface 12a which is a forming surface of the external connection terminal, and becomes The second surface 12b of the mounting surface of the memory chip or controller chip.

如圖4所示,配線基板12包含:樹脂基材13,其包含環氧樹脂或BT(Bismaleimide Triazine)樹脂(雙馬來醯亞胺三嗪樹脂)等;第1配線層14,其設置於樹脂基材13之第1面12a側;第2配線層15,其設置於樹脂基材13之第2面12b側;及通孔16,其電性連接第1配線層14與第2配線層15。第1及第2配線層14、15係藉由例如根據配線圖案使積層於樹脂基材13之兩面之銅箔圖案化而形成。第1及第2配線層14、15之表面係為了絕緣保護而由阻焊劑17、18覆蓋。 As shown in FIG. 4, the wiring board 12 includes a resin base material 13 including an epoxy resin or a BT (Bismaleimide Triazine) resin (a bismaleimide triazine resin), and the like, and a first wiring layer 14 provided on the first wiring layer 14 The first surface 12a side of the resin substrate 13; the second wiring layer 15 is provided on the second surface 12b side of the resin substrate 13, and the through hole 16 electrically connects the first wiring layer 14 and the second wiring layer 15. The first and second wiring layers 14 and 15 are formed by, for example, patterning copper foil laminated on both surfaces of the resin substrate 13 in accordance with a wiring pattern. The surfaces of the first and second wiring layers 14 and 15 are covered with the solder resists 17 and 18 for insulation protection.

第1配線層14具有外部連接端子19。於第1配線層14之成為外部連接端子19之部分,在阻焊劑17上形成有開口圖案,經由該開口圖案而於第1配線層14上形成有鍍金層20。外部連接端子19係由第1配線層14與作為表面層之鍍金層20構成。第2配線層15具有連接墊21(21A、21B)。於第2配線層15之成為連接墊21之部分,在阻焊劑18上形成有開口圖案,經由該等開口圖案而於第2配線層15上形成有鍍金層22。連接墊21係由第2配線層15與作為表面層之鍍金層22構成。鍍金層20、22係例如藉由電鍍而形成。 The first wiring layer 14 has an external connection terminal 19. In the portion of the first interconnect layer 14 that becomes the external connection terminal 19, an opening pattern is formed on the solder resist 17, and the gold plating layer 20 is formed on the first wiring layer 14 via the opening pattern. The external connection terminal 19 is composed of a first wiring layer 14 and a gold plating layer 20 as a surface layer. The second wiring layer 15 has connection pads 21 (21A, 21B). In the portion of the second wiring layer 15 that serves as the connection pad 21, an opening pattern is formed on the solder resist 18, and the gold plating layer 22 is formed on the second wiring layer 15 via the opening patterns. The connection pad 21 is composed of a second wiring layer 15 and a gold plating layer 22 as a surface layer. The gold plating layers 20, 22 are formed, for example, by electroplating.

如圖4及圖5所示,配線基板12之第1面12a具有第1配線層14與複數個外部連接端子19。複數個外部連接端子19係以位於配線基板12之第1外形邊S1之附近之方式,沿第1外形邊S1排列。如圖3、圖4及圖6所示,配線基板12之第2面12b具有第2配線層15與晶片搭載區域23。第2配線層15具有連接墊21A、21B。連接墊21A成為與配置於晶片搭載區 域23之記憶體晶片之電極墊之連接部,連接墊21B成為與積層於記憶體晶片上之控制器晶片之電極墊之連接部。 As shown in FIGS. 4 and 5, the first surface 12a of the wiring board 12 has a first wiring layer 14 and a plurality of external connection terminals 19. The plurality of external connection terminals 19 are arranged along the first outer side S1 so as to be located in the vicinity of the first outer side S1 of the wiring board 12. As shown in FIGS. 3, 4, and 6, the second surface 12b of the wiring board 12 has the second wiring layer 15 and the wafer mounting region 23. The second wiring layer 15 has connection pads 21A and 21B. The connection pad 21A is disposed and disposed in the wafer mounting area The connection portion of the electrode pad of the memory chip of the domain 23, the connection pad 21B serves as a connection portion with the electrode pad of the controller wafer laminated on the memory chip.

於配線基板12之晶片搭載區域23內配置有記憶體晶片24。作為記憶體晶片24,例如使用如NAND型快閃記憶體之半導體記憶體晶片。圖3及圖4表示積層8個記憶體晶片24而配置於晶片搭載區域23之狀態。記憶體晶片24相對於配線基板12之搭載數量並不限定於此。記憶體晶片24之搭載數量可為1個,又,亦可為2個、4個,進而亦可為9個以上。記憶體晶片24相對於配線基板12之搭載數量為1個或複數個之任一者均可。 The memory chip 24 is disposed in the wafer mounting region 23 of the wiring substrate 12. As the memory chip 24, for example, a semiconductor memory wafer such as a NAND type flash memory is used. FIG. 3 and FIG. 4 show a state in which eight memory chips 24 are stacked and placed in the wafer mounting region 23. The number of mounting of the memory chip 24 with respect to the wiring substrate 12 is not limited to this. The number of the memory chips 24 to be mounted may be one, or two or four, or nine or more. The number of the memory chips 24 to be mounted on the wiring substrate 12 may be one or plural.

於圖3及圖4中,複數個記憶體晶片24具有矩形狀之相同形狀,且分別具備電極墊25。電極墊25係位於與配線基板12之第1外形邊S1對向之第2外形邊S2側,且沿記憶體晶片24之位於第2外形邊S2側之外形邊排列。複數個記憶體晶片24構成記憶體晶片群26,進而分為2個晶片群26A、26B。第1晶片群26A係由以積層於配線基板12之晶片搭載區域23上之狀態而配置之4個記憶體晶片24構成。第2晶片群26B係由以積層於第1晶片群26A上之狀態而配置之4個記憶體晶片24構成。 In FIGS. 3 and 4, a plurality of memory chips 24 have the same shape in a rectangular shape, and each has an electrode pad 25. The electrode pads 25 are located on the second outer side S2 side opposite to the first outer side S1 of the wiring board 12, and are arranged side by side along the second outer side S2 side of the memory chip 24. The plurality of memory chips 24 constitute a memory chip group 26, and are further divided into two wafer groups 26A and 26B. The first wafer group 26A is composed of four memory chips 24 arranged in a state of being laminated on the wafer mounting region 23 of the wiring substrate 12. The second wafer group 26B is composed of four memory chips 24 arranged in a state of being laminated on the first wafer group 26A.

構成第1晶片群26A之4個記憶體晶片24係以如下方式呈階梯狀積層:分別使電極墊25位於配線基板12之第2外形邊S2側,且使各個電極墊25露出。4個記憶體晶片24之電極墊25係經由金屬線27而依序連接。於第1晶片群26A中,位於最下層之記憶體晶片24之電極墊25經由金屬線27而與 配線基板12之連接墊21A電性連接。於第1晶片群26A上,介隔絕緣樹脂製之間隔層28而配置有第2晶片群26B。 The four memory chips 24 constituting the first wafer group 26A are stacked in a stepped manner such that the electrode pads 25 are placed on the second outer side S2 side of the wiring substrate 12, and the electrode pads 25 are exposed. The electrode pads 25 of the four memory chips 24 are sequentially connected via the metal wires 27. In the first wafer group 26A, the electrode pads 25 of the memory chip 24 located at the lowermost layer are connected via the metal wires 27 The connection pads 21A of the wiring substrate 12 are electrically connected. In the first wafer group 26A, the second wafer group 26B is disposed by interposing the spacer layer 28 made of a resin.

構成第2晶片群26B之4個記憶體晶片24係以如下方式呈階梯狀積層:分別使電極墊25位於配線基板12之第2外形邊S2側,且使各個電極墊25露出。4個記憶體晶片24之電極墊25係經由金屬線27而依序連接。於第2晶片群26B中,位於最下層之記憶體晶片24之電極墊25經由金屬線27而與配線基板12之連接墊21A電性連接。於第1晶片群26A中,連接於位於最上層之記憶體晶片24之電極墊25之金屬線27係埋設於絕緣樹脂製之間隔層28內,藉此防止與第2晶片群26B之位於最下層之記憶體晶片24接觸。 The four memory chips 24 constituting the second wafer group 26B are stacked in a stepped manner such that the electrode pads 25 are placed on the second outer side S2 side of the wiring substrate 12, and the electrode pads 25 are exposed. The electrode pads 25 of the four memory chips 24 are sequentially connected via the metal wires 27. In the second wafer group 26B, the electrode pads 25 of the memory chip 24 located at the lowermost layer are electrically connected to the connection pads 21A of the wiring substrate 12 via the metal wires 27. In the first wafer group 26A, the metal wires 27 connected to the electrode pads 25 of the uppermost memory chip 24 are embedded in the insulating resin spacer layer 28, thereby preventing the second wafer group 26B from being located most. The lower layer of memory wafer 24 is in contact.

於記憶體晶片群26上積層有控制器晶片29。控制器晶片29係自複數個記憶體晶片24中選擇進行資料之寫入或讀出之晶片,從而進行向所選擇之記憶體晶片24之資料之寫入、及所選擇之記憶體晶片24中所記憶之資料之讀出等。控制器晶片29具有L型墊構造,且包含沿長邊29a排列之電極墊30A、及沿短邊29b排列之電極墊30B。控制器晶片29係以長邊29a位於配線基板12之第1外形邊S1側、即排列有複數個外部連接端子19之第1外形邊S1側,且與第1外形邊S1平行之方式配置。 A controller wafer 29 is laminated on the memory chip group 26. The controller chip 29 selects a wafer from which data is written or read from a plurality of memory chips 24 to perform writing to the selected memory chip 24 and to the selected memory chip 24. Reading of the memorized data, etc. The controller wafer 29 has an L-shaped pad structure and includes an electrode pad 30A arranged along the long side 29a and an electrode pad 30B arranged along the short side 29b. The controller wafer 29 is disposed such that the long side 29a is located on the first outer side S1 side of the wiring board 12, that is, on the side of the first outer side S1 on which the plurality of external connection terminals 19 are arranged, and is parallel to the first outer side S1.

控制器晶片29之電極墊30(30A、30B)係經由金屬線31而與配線基板12之連接墊21B電性連接。沿控制器晶片29之長邊29a排列之電極墊30A係經由金屬線31而與配置於設置在配線基板12之第1外形邊S1側之墊區域32A內之連接墊 21B電性連接。沿控制器晶片29之短邊29b排列之電極墊30B係經由金屬線31而與配置於設置在配線基板12之第3外形邊S3側之墊區域32B內之連接墊21B電性連接。 The electrode pads 30 (30A, 30B) of the controller wafer 29 are electrically connected to the connection pads 21B of the wiring substrate 12 via the metal wires 31. The electrode pad 30A arranged along the long side 29a of the controller wafer 29 is connected to the pad disposed in the pad region 32A provided on the first outer side S1 side of the wiring substrate 12 via the metal wire 31. 21B is electrically connected. The electrode pads 30B arranged along the short sides 29b of the controller wafer 29 are electrically connected to the connection pads 21B disposed in the pad regions 32B provided on the third outer side S3 side of the wiring substrate 12 via the metal wires 31.

於搭載有記憶體晶片24或控制器晶片29之配線基板12之第2面12b上模塑成形有包含例如環氧樹脂之密封樹脂層33。記憶體晶片24或控制器晶片29係與金屬線27、31等一併藉由密封樹脂層33而一體地密封。藉由該等而構成SiP構造之半導體記憶裝置11(3)。如上所述,藉由將SiP構造之半導體記憶裝置11收容至卡盒2內而構成半導體記憶卡1。如圖1所示,卡盒2具有使外部連接端子19露出之開口4。 A sealing resin layer 33 containing, for example, an epoxy resin is molded on the second surface 12b of the wiring substrate 12 on which the memory chip 24 or the controller wafer 29 is mounted. The memory chip 24 or the controller wafer 29 is integrally sealed with the metal wires 27, 31 and the like by the sealing resin layer 33. The semiconductor memory device 11 (3) of the SiP structure is constructed by these. As described above, the semiconductor memory card 1 is constructed by accommodating the semiconductor memory device 11 of the SiP structure into the cartridge 2. As shown in FIG. 1, the cartridge 2 has an opening 4 for exposing the external connection terminal 19.

然而,對於上述SDTM卡等記憶卡要求記憶容量進一步增大。因此,不斷推進具有64 GB或者其以上之記憶容量之記憶卡之實用化。此種記憶卡中除記憶容量之增大以外,亦期望提高數位信號之傳輸速度。因此,不斷推進數位信號之理論上之最大傳輸速度為50 MB/秒以上之記憶卡的實用化。即,不斷推進記憶卡與外部機器(主機)之間之資料讀寫速度之最大規格值為50 MB/秒或其以上之記憶卡的實用化。此處,將具有上述信號傳輸速度之記憶卡稱為高速動作型(高速傳輸型)記憶卡。 However, the above-described memory card SD TM card requires memory capacity is further increased. Therefore, the practical use of a memory card having a memory capacity of 64 GB or more has been continuously promoted. In addition to the increase in memory capacity, such a memory card is also expected to increase the transmission speed of the digital signal. Therefore, the practical use of a memory card in which the theoretical maximum transmission speed of a digital signal is 50 MB/sec or more is continuously advanced. That is, the memory card with the maximum specification value of the data read/write speed between the memory card and the external device (host) is 50 MB/sec or more. Here, the memory card having the above-described signal transmission speed is referred to as a high-speed operation type (high-speed transmission type) memory card.

於如上所述之高速動作型之記憶卡中,為了提高外部機器與記憶卡之間之介面(IF,Interface)信號之特性,滿足如上所述之數位信號之傳輸速度,而期望縮短自進行與外部機器之電性連接之外部連接端子至控制器晶片之電極墊 之配線長度(IF用信號配線長度)。因此,於該實施形態之半導體記憶卡1中,將控制器晶片29之電極墊30中之直接與外部連接端子19電性連接之電極墊(IF用電極墊)301配置於與配線基板12之第1面12a上之外部連接端子19之形成區域相對應的第2面12b上之區域(端子對應區域)X1內。再者,IF用電極墊301亦可配置於端子對應區域X1之附近。 In the high-speed operation type memory card as described above, in order to improve the characteristics of the interface (IF, Interface) signal between the external device and the memory card, the transmission speed of the digital signal as described above is satisfied, and it is desired to shorten the self-operation. External connection terminal for electrical connection of external machine to electrode pad of controller chip Wiring length (signal wiring length for IF). Therefore, in the semiconductor memory card 1 of the embodiment, the electrode pads (IF electrode pads) 301 electrically connected to the external connection terminals 19 in the electrode pads 30 of the controller wafer 29 are disposed on the wiring substrate 12 In the region (terminal corresponding region) X1 on the second surface 12b corresponding to the formation region of the external connection terminal 19 on the first surface 12a. Further, the IF electrode pad 301 may be disposed in the vicinity of the terminal corresponding region X1.

於將IF用電極墊301配置於端子對應區域X1內時,控制器晶片29係以如下方式積層於記憶體晶片24(記憶體晶片群26)上:其長邊29a與配線基板12之第1外形邊S1平行,該配線基板12之第1外形邊S1與外部連接端子19之排列方向平行,並且長邊29a位於配線基板12之第1外形邊S1側。沿此種控制器晶片29之長邊29a而配置IF用電極墊301。IF用電極墊301係經由金屬線31而與設置於配線基板12之第1外形邊S1側之墊區域32A內之連接墊21B電性連接。 When the IF electrode pad 301 is disposed in the terminal corresponding region X1, the controller wafer 29 is laminated on the memory chip 24 (memory wafer group 26) as follows: the long side 29a and the first of the wiring substrate 12 The outer side S1 is parallel, the first outer side S1 of the wiring board 12 is parallel to the arrangement direction of the external connection terminals 19, and the long side 29a is located on the first outer side S1 side of the wiring board 12. The IF electrode pad 301 is disposed along the long side 29a of the controller wafer 29. The IF electrode pad 301 is electrically connected to the connection pad 21B provided in the pad region 32A on the first outer side S1 side of the wiring substrate 12 via the metal wire 31.

進而,為了將IF用電極墊301配置於配線基板12之第2面12b上之端子對應區域X1之中央附近,IF用電極墊301係配置於控制器晶片29之長邊29a上之接近於端子對應區域X1之中央之位置。即,以如下方式設定控制器晶片29之長邊29a上之IF用電極墊301之位置:使IF用電極墊301較除IF用電極墊301以外之控制器晶片29之其他電極墊30更接近於端子對應區域X1之中央。 Further, in order to arrange the IF electrode pad 301 in the vicinity of the center of the terminal corresponding region X1 on the second surface 12b of the wiring board 12, the IF electrode pad 301 is disposed on the long side 29a of the controller wafer 29 close to the terminal. Corresponds to the position of the center of the area X1. That is, the position of the IF electrode pad 301 on the long side 29a of the controller wafer 29 is set such that the IF electrode pad 301 is closer to the other electrode pads 30 of the controller wafer 29 other than the IF electrode pad 301. In the center of the terminal corresponding area X1.

藉由應用如上所述之IF用電極墊301之配置位置,而可縮短自外部連接端子19至控制器晶片29之IF用電極墊301之信號配線長度。即,與沿控制器晶片29之短邊29b配置 IF用電極墊301之情形、或將控制器晶片29配置於配線基板12之第2面12b上(例如,圖3之記憶體晶片24之側方、且配線基板12之外形邊S3側)之情形相比,自IF用電極墊301至複數個外部連接端子19之各個距離變短,故可縮短IF用信號配線長度。 By applying the arrangement position of the IF electrode pad 301 as described above, the signal wiring length from the external connection terminal 19 to the IF electrode pad 301 of the controller wafer 29 can be shortened. That is, configured with the short side 29b along the controller chip 29. In the case of the IF electrode pad 301 or the controller wafer 29 on the second surface 12b of the wiring substrate 12 (for example, the side of the memory chip 24 of FIG. 3 and the side of the wiring board 12 outside the side S3) In contrast, since the distance from the IF electrode pad 301 to the plurality of external connection terminals 19 is shortened, the length of the IF signal wiring can be shortened.

於圖3所示之半導體記憶裝置11中,由於應用具有L型墊構造之控制器晶片29,故藉由沿控制器晶片29之短邊29b排列之電極墊30B與連接墊21B之打線接合(Wire Bonding),而限制IF用電極墊301之配置位置。如圖7所示,於應用具有長邊單側墊構造之控制器晶片29之情形時,可將IF用電極墊301配置於端子對應區域X1之更接近於中央之位置。無論於哪種情形時,均可藉由沿控制器晶片29之長邊29a排列IF用電極墊301,而縮短自外部連接端子19至IF用電極墊301之信號配線長度。 In the semiconductor memory device 11 shown in FIG. 3, since the controller wafer 29 having the L-type pad structure is applied, the electrode pads 30B arranged along the short side 29b of the controller wafer 29 are bonded to the connection pads 21B ( Wire Bonding), and the position of the IF electrode pad 301 is limited. As shown in FIG. 7, when the controller wafer 29 having the long-side one-side pad structure is applied, the IF electrode pad 301 can be disposed closer to the center of the terminal corresponding region X1. In either case, the length of the signal wiring from the external connection terminal 19 to the IF electrode pad 301 can be shortened by arranging the IF electrode pad 301 along the long side 29a of the controller wafer 29.

又,為了縮短自設置於配線基板12之第1面12a之外部連接端子19至設置於第2面12b之連接墊21B(配置於墊區域32A內之連接墊21B)之配線長度,而將電性連接第1配線層14與第2配線層15之通孔16之一部分設置於複數個外部連接端子19之間。於圖5及圖6中,通孔161為信號配線用通孔,且設置於複數個外部連接端子19之間。藉由應用此種信號配線用通孔161,可進一步縮短自外部連接端子19至控制器晶片29之IF用電極墊301之信號配線長度。再者,圖5中省略了配線之一部分(自連接墊21A至連接墊21B之配線等)之圖示。 In order to shorten the wiring length from the external connection terminal 19 provided on the first surface 12a of the wiring board 12 to the connection pad 21B (the connection pad 21B disposed in the pad region 32A) provided on the second surface 12b, the wiring is shortened. One of the through holes 16 of the first wiring layer 14 and the second wiring layer 15 is connected between the plurality of external connection terminals 19. In FIGS. 5 and 6, the through hole 161 is a through hole for signal wiring, and is provided between a plurality of external connection terminals 19. By applying such a signal wiring via hole 161, the signal wiring length from the external connection terminal 19 to the IF electrode pad 301 of the controller wafer 29 can be further shortened. In addition, in FIG. 5, illustration of one part of wiring (wiring from the connection pad 21A to the connection pad 21B, etc.) is abbreviate|omitted.

如上所述,基於IF用電極墊301之配置位置、或第1配線層14與第2配線層15之電性連接構造,而縮短自外部連接端子19至控制器晶片29之IF用電極墊301之信號配線長度,藉此提高外部機器與半導體記憶卡1之間之IF信號之電特性。因此,可提高數位信號之傳輸速度。進而,記憶卡之電容負載亦會對IF信號之特性產生影響。因此,於半導體記憶卡1中,在配線基板12之第2面12b上之端子對應區域X1之一部分設定有不設置第2配線層15之區域X2。藉此,可降低將半導體記憶卡1連接於外部機器時之電容負載。 As described above, the IF electrode pad 301 from the external connection terminal 19 to the controller wafer 29 is shortened based on the arrangement position of the IF electrode pad 301 or the electrical connection structure between the first wiring layer 14 and the second wiring layer 15. The signal wiring length is thereby increased the electrical characteristics of the IF signal between the external device and the semiconductor memory card 1. Therefore, the transmission speed of the digital signal can be improved. Furthermore, the capacitive load of the memory card also affects the characteristics of the IF signal. Therefore, in the semiconductor memory card 1, a region X2 in which the second wiring layer 15 is not provided is set in one of the terminal corresponding regions X1 on the second surface 12b of the wiring substrate 12. Thereby, the capacitive load when the semiconductor memory card 1 is connected to an external device can be reduced.

此處,於在端子對應區域X1之一部分設定不設置第2配線層15之區域X2時,若將區域X2設為空白區域(不設置任何元件之區域),則有如下之虞:搭載記憶體晶片24或控制器晶片29時、或形成密封樹脂層33時之配線基板12之翹曲變得顯著。對此,於區域X2內,以與第2配線層15電性獨立之狀態局部地設置有構成第2配線層15之金屬層(Cu層)34。圖6表示於區域X2內形成有具有點圖案(圓點圖案)之Cu層34之狀態。此種Cu層34之虛設圖案(dummy pattern)不僅能抑制配線基板12之翹曲,而且有助於降低半導體記憶卡1之電容負載。 Here, when the region X2 in which the second interconnect layer 15 is not provided is set in a portion of the terminal corresponding region X1, if the region X2 is a blank region (a region where no component is provided), the following is true: the memory is mounted. The warpage of the wiring substrate 12 when the wafer 24 or the controller wafer 29 is formed or when the sealing resin layer 33 is formed becomes remarkable. On the other hand, in the region X2, the metal layer (Cu layer) 34 constituting the second wiring layer 15 is partially provided in a state of being electrically independent from the second wiring layer 15. Fig. 6 shows a state in which the Cu layer 34 having a dot pattern (dot pattern) is formed in the region X2. Such a dummy pattern of the Cu layer 34 can suppress not only the warpage of the wiring substrate 12 but also the capacitive load of the semiconductor memory card 1.

進而,鍍敷引線亦會對記憶卡之電容負載產生影響。即,第2配線層15具有用以藉由電鍍形成外部連接端子19之表面層(鍍金層)20之鍍敷引線35。若鍍敷引線35變長,則將半導體記憶卡1連接於外部機器時之電容負載會變 大。對此,使設置於配線基板12之第2面12b之鍍敷引線35經由設置於複數個外部連接端子19之間之通孔(鍍敷引線用通孔)162而與設置於配線基板12之第1面12a之外部連接端子19電性連接,並且引出至配線基板12之第1外形邊S1。藉此,可大幅度地縮短藉由電鍍形成外部連接端子19之鍍金層20之鍍敷引線35之長度。 Furthermore, the plated leads also have an effect on the capacitive loading of the memory card. That is, the second wiring layer 15 has a plating lead 35 for forming a surface layer (gold plating layer) 20 of the external connection terminal 19 by plating. If the plating lead 35 becomes long, the capacitive load when the semiconductor memory card 1 is connected to an external device may become Big. In this case, the plating lead 35 provided on the second surface 12b of the wiring board 12 is provided in the wiring board 12 via a through hole (a through hole for plating) 162 provided between the plurality of external connection terminals 19 The external connection terminal 19 of the first surface 12a is electrically connected to the first outer side S1 of the wiring substrate 12. Thereby, the length of the plating lead 35 of the gold plating layer 20 which forms the external connection terminal 19 by electroplating can be drastically shortened.

如上所述,縮短自外部連接端子19至控制器晶片29之IF用電極墊301之信號配線長度,並且藉由形成Cu層34之虛設圖案、或縮短鍍敷引線35而降低半導體記憶卡1之電容負載,藉此可提高外部機器與半導體記憶卡1之間之IF信號之電特性。因此,可提高外部機器與半導體記憶卡1之間之數位信號之傳輸速度。即,可提供能夠實現50MB/秒以上之數位信號之理論上之最大傳輸速度的半導體記憶卡1。如此,第1實施形態之半導體記憶卡1適合於高速動作型之記憶卡。 As described above, the signal wiring length from the external connection terminal 19 to the IF electrode pad 301 of the controller wafer 29 is shortened, and the semiconductor memory card 1 is lowered by forming a dummy pattern of the Cu layer 34 or shortening the plating lead 35. The capacitive load, thereby improving the electrical characteristics of the IF signal between the external device and the semiconductor memory card 1. Therefore, the transmission speed of the digital signal between the external device and the semiconductor memory card 1 can be improved. That is, the semiconductor memory card 1 capable of realizing the theoretical maximum transmission speed of a digital signal of 50 MB/sec or more can be provided. As described above, the semiconductor memory card 1 of the first embodiment is suitable for a high-speed operation type memory card.

於第1實施形態之半導體記憶卡1中,將電性連接配線基板12之第1配線層14與第2配線層15之通孔16之一部分設置於複數個外部連接端子19之間。因此,可將第2配線層15形成至配線基板12之第2面12b之端子形成區域X1。如上所述,藉由提高第2配線層15之形成密度,而可實現配線基板12之小型化。如圖4所示,可將記憶體晶片24以多段積層而增大記憶容量,並且使配線基板12小型化。 In the semiconductor memory card 1 of the first embodiment, one of the first wiring layer 14 electrically connected to the wiring board 12 and the through hole 16 of the second wiring layer 15 is provided between the plurality of external connection terminals 19. Therefore, the second wiring layer 15 can be formed in the terminal formation region X1 of the second surface 12b of the wiring substrate 12. As described above, by increasing the formation density of the second wiring layer 15, the size of the wiring substrate 12 can be reduced. As shown in FIG. 4, the memory wafer 24 can be stacked in a plurality of stages to increase the memory capacity, and the wiring board 12 can be miniaturized.

又,藉由提高第2配線層15之形成密度,而可將與記憶體晶片24連接之連接墊21A集中配置於配線基板12之第2外 形邊S2側,並且將與控制器晶片29連接之連接墊21B配置於配線基板12之第1外形邊S1側。藉此,亦可實現配線基板12之小型化。又,可不增加配線基板12之配線層數而實現如上所述之配線形狀或連接墊之配置構造。藉由該等,可降低SiP構造之半導體記憶裝置11之製造成本,進而可降低半導體記憶卡1之製造成本。 Moreover, by increasing the formation density of the second wiring layer 15, the connection pads 21A connected to the memory chip 24 can be collectively disposed on the second outside of the wiring substrate 12. On the side of the side S2, the connection pad 21B connected to the controller wafer 29 is disposed on the first outer side S1 side of the wiring substrate 12. Thereby, the size of the wiring board 12 can also be reduced. Moreover, the wiring shape or the arrangement structure of the connection pads as described above can be realized without increasing the number of wiring layers of the wiring board 12. By these, the manufacturing cost of the semiconductor memory device 11 of the SiP structure can be reduced, and the manufacturing cost of the semiconductor memory card 1 can be reduced.

進而,如圖4所示,將第1晶片群26A與第2晶片群26B以構成其等之記憶體晶片24之墊排列邊朝向同一方向之方式進行積層,藉此可將連接記憶體晶片24與配線基板12之金屬線27佈線於同一方向上。藉此,可削減記憶體晶片24相對於配線基板12之搭載面積或配線基板12之配線層數。因此,於使配線基板12之面積相同之情形時,可搭載更大之記憶體晶片24,故能以相同外形之半導體記憶裝置11增大記憶容量。又,於使記憶體晶片24之面積相同之情形時,可使配線基板12以及半導體記憶裝置11小型化。 Further, as shown in FIG. 4, the first wafer group 26A and the second wafer group 26B are laminated so that the pad arrays of the memory chips 24 constituting the first wafer group 26A are aligned in the same direction, whereby the memory wafer 24 can be connected. The metal wires 27 of the wiring substrate 12 are wired in the same direction. Thereby, the mounting area of the memory chip 24 with respect to the wiring board 12 or the number of wiring layers of the wiring board 12 can be reduced. Therefore, when the area of the wiring board 12 is made the same, a larger memory chip 24 can be mounted, so that the memory capacity can be increased by the semiconductor memory device 11 having the same outer shape. Further, when the area of the memory chip 24 is the same, the wiring board 12 and the semiconductor memory device 11 can be miniaturized.

(第2實施形態) (Second embodiment)

其次,參照圖8至圖11,對第2實施形態之SiP構造之半導體記憶裝置進行說明。圖8係表示第2實施形態之半導體記憶裝置之上表面透視圖,圖9係沿圖8之A-A線之剖面圖,圖10係自半導體記憶裝置之上表面(模塑面)透視觀察圖8所示之半導體記憶裝置中之配線基板之端子形成面之透視圖,圖11係自半導體記憶裝置之上表面(模塑面)透視觀察圖8所示之半導體記憶裝置中之配線基板之晶片搭載面之透視圖。再者,對與第1實施形態相同之部分標示相 同符號而省略其說明之一部分。 Next, a semiconductor memory device of the SiP structure according to the second embodiment will be described with reference to Figs. 8 to 11 . 8 is a perspective view showing the upper surface of the semiconductor memory device of the second embodiment, FIG. 9 is a cross-sectional view taken along line AA of FIG. 8, and FIG. 10 is a perspective view of the upper surface (molding surface) of the semiconductor memory device. The perspective view of the terminal forming surface of the wiring substrate in the semiconductor memory device shown, and FIG. 11 is a perspective view of the wafer mounting of the wiring substrate in the semiconductor memory device shown in FIG. 8 from the upper surface (molding surface) of the semiconductor memory device. Perspective of the face. Furthermore, the same part as the first embodiment is labeled The same reference numerals are omitted and a part of the description is omitted.

圖8至圖11所示之半導體記憶裝置41(3)與第1實施形態同樣地,包括配線基板12。配線基板12係與第1實施形態同樣地,包含:第1配線層14,其設置於樹脂基材13之第1面12a側;第2配線層15,其設置於樹脂基材13之第2面12b側;及通孔16,其電性連接第1配線層14與第2配線層15。第1配線層14具有外部連接端子19。第2配線層15具有連接墊21(21A、21B)。 The semiconductor memory device 41 (3) shown in FIGS. 8 to 11 includes the wiring board 12 in the same manner as in the first embodiment. Similarly to the first embodiment, the wiring board 12 includes a first wiring layer 14 provided on the first surface 12a side of the resin substrate 13, and a second wiring layer 15 provided on the second resin substrate 13. The surface of the surface 12b and the through hole 16 are electrically connected to the first wiring layer 14 and the second wiring layer 15. The first wiring layer 14 has an external connection terminal 19. The second wiring layer 15 has connection pads 21 (21A, 21B).

如圖9及圖10所示,配線基板12之第1面12a包含第1配線層14與複數個外部連接端子19。複數個外部連接端子19係以位於配線基板12之第1外形邊S1之附近之方式,沿第1外形邊S1排列。如圖8、圖9及圖11所示,配線基板12之第2面12b包含第2配線層15與晶片搭載區域23。於配線基板12之晶片搭載區域23內,並列配置有記憶體晶片24與控制器晶片29。記憶體晶片24之搭載數量並不限定為1個,亦可為2個、4個、8個或以上。 As shown in FIGS. 9 and 10, the first surface 12a of the wiring board 12 includes a first wiring layer 14 and a plurality of external connection terminals 19. The plurality of external connection terminals 19 are arranged along the first outer side S1 so as to be located in the vicinity of the first outer side S1 of the wiring board 12. As shown in FIGS. 8 , 9 , and 11 , the second surface 12 b of the wiring board 12 includes the second wiring layer 15 and the wafer mounting region 23 . The memory chip 24 and the controller wafer 29 are arranged in parallel in the wafer mounting region 23 of the wiring substrate 12. The number of the memory chips 24 to be mounted is not limited to one, and may be two, four, eight or more.

記憶體晶片24具有電極墊25。電極墊25係位於配線基板12之第2外形邊S2側,且沿記憶體晶片24之位於第2外形邊S2側之外形邊排列。記憶體晶片24之電極墊25係經由金屬線27而與配線基板12之連接墊21A電性連接。控制器晶片29具有長邊單側墊構造,且具有沿長邊排列之電極墊30。控制器晶片29之電極墊30係經由金屬線31而與配線基板12之連接墊21B電性連接。 The memory chip 24 has an electrode pad 25. The electrode pads 25 are located on the second outer side S2 side of the wiring substrate 12, and are arranged side by side along the second outer side S2 side of the memory wafer 24. The electrode pads 25 of the memory wafer 24 are electrically connected to the connection pads 21A of the wiring substrate 12 via the metal wires 27. The controller wafer 29 has a long-side one-sided pad structure and has electrode pads 30 arranged along the long sides. The electrode pads 30 of the controller wafer 29 are electrically connected to the connection pads 21B of the wiring substrate 12 via the metal wires 31.

電性連接第1配線層14與第2配線層15之通孔16之一部分 係設置於複數個外部連接端子19之間。設置於外部連接端子19之間之通孔16中之通孔161為信號配線用通孔,形成電性連接外部連接端子19與控制器晶片29之電極墊30之信號配線之一部分。即,複數個外部連接端子19之至少一部分係經由信號配線用通孔161而與控制器晶片29之電極墊30電性連接。藉此,可縮短自外部連接端子19至控制器晶片29之電極墊30之信號配線長度。 Electrically connecting one of the first wiring layer 14 and the through hole 16 of the second wiring layer 15 It is disposed between a plurality of external connection terminals 19. The through hole 161 provided in the through hole 16 between the external connection terminals 19 is a signal wiring through hole, and is formed as a part of the signal wiring electrically connecting the external connection terminal 19 and the electrode pad 30 of the controller wafer 29. In other words, at least a part of the plurality of external connection terminals 19 is electrically connected to the electrode pads 30 of the controller wafer 29 via the signal wiring vias 161. Thereby, the signal wiring length from the external connection terminal 19 to the electrode pad 30 of the controller wafer 29 can be shortened.

又,設置於外部連接端子19之間之通孔16中之通孔162為鍍敷引線用通孔,形成電性連接外部連接端子19與鍍敷引線35之配線之一部分。即,複數個外部連接端子19之至少一部分係經由鍍敷引線用通孔162而與鍍敷引線35電性連接,進而鍍敷引線35被引出至配線基板12之第1外形邊S1。藉由該等,可大幅度地縮短藉由電鍍形成外部連接端子19之鍍金層20之鍍敷引線35之長度。 Further, the through hole 162 provided in the through hole 16 between the external connection terminals 19 is a through hole for plating leads, and is formed as a part of a wiring electrically connecting the external connection terminal 19 and the plating lead 35. In other words, at least a part of the plurality of external connection terminals 19 is electrically connected to the plating leads 35 via the plating lead vias 162, and the plating leads 35 are led out to the first outer side S1 of the wiring substrate 12. By this, the length of the plating lead 35 of the gold plating layer 20 which forms the external connection terminal 19 by electroplating can be drastically shortened.

於搭載有記憶體晶片24或控制器晶片29之配線基板12之第2面12b上模塑成形有包含例如環氧樹脂之密封樹脂層33。記憶體晶片24或控制器晶片29係與金屬線27、31等一併藉由密封樹脂層33而一體地密封。藉由該等而構成SiP構造之半導體記憶裝置41(3)。如上所述,藉由將SiP構造之半導體記憶裝置11收容至卡盒2內而構成半導體記憶卡1。如圖1所示,卡盒2具有使外部連接端子19露出之開口4。 A sealing resin layer 33 containing, for example, an epoxy resin is molded on the second surface 12b of the wiring substrate 12 on which the memory chip 24 or the controller wafer 29 is mounted. The memory chip 24 or the controller wafer 29 is integrally sealed with the metal wires 27, 31 and the like by the sealing resin layer 33. The semiconductor memory device 41 (3) of the SiP structure is constructed by these. As described above, the semiconductor memory card 1 is constructed by accommodating the semiconductor memory device 11 of the SiP structure into the cartridge 2. As shown in FIG. 1, the cartridge 2 has an opening 4 for exposing the external connection terminal 19.

如上所述,藉由將通孔16之一部分(161、162)設置於複數個外部連接端子19之間,而可縮短自外部連接端子19至 控制器晶片29之信號配線長度或鍍敷引線35之長度。又,可將與配線基板12之第1面12a上之外部連接端子19之形成區域相對應的第2面12b上之區域(端子對應區域)用作配線區域。藉由該等,可提高配線基板12之每單位面積之配線密度,故可實現配線基板12之小型化。藉此,可降低SiP構造之半導體記憶裝置11之製造成本,進而可降低半導體記憶卡1之製造成本。 As described above, by providing a portion (161, 162) of the through hole 16 between the plurality of external connection terminals 19, the external connection terminal 19 can be shortened The signal wiring length of the controller wafer 29 or the length of the plating lead 35. Moreover, a region (terminal corresponding region) on the second surface 12b corresponding to the formation region of the external connection terminal 19 on the first surface 12a of the wiring substrate 12 can be used as the wiring region. By this, the wiring density per unit area of the wiring board 12 can be increased, so that the size of the wiring board 12 can be reduced. Thereby, the manufacturing cost of the semiconductor memory device 11 of the SiP structure can be reduced, and the manufacturing cost of the semiconductor memory card 1 can be reduced.

進而,藉由縮短自外部連接端子19至控制器晶片29之信號配線長度,而提高與外部機器之間之信號傳輸速度。藉由縮短鍍敷引線35之長度,而降低將半導體記憶卡1連接於外部機器時之電容負載。藉由該等,可應對半導體記憶卡1之高速動作化。再者,由於設置於複數個外部連接端子19之間之通孔161、162於將半導體記憶裝置41收容至卡盒2內時,隱藏於開口4間之阻隔壁5之下側,故不會自記憶卡1之外觀上被看到,又,亦不會對記憶卡1之動作造成不良影響等。 Further, by shortening the signal wiring length from the external connection terminal 19 to the controller chip 29, the signal transmission speed with the external device is increased. By shortening the length of the plating lead 35, the capacitive load when the semiconductor memory card 1 is connected to an external device is reduced. With these, it is possible to cope with the high-speed operation of the semiconductor memory card 1. Furthermore, since the through holes 161 and 162 provided between the plurality of external connection terminals 19 are housed in the cartridge 2 when the semiconductor memory device 41 is housed in the cartridge 2, they are hidden under the barrier wall 5 between the openings 4, so It is seen from the appearance of the memory card 1, and it does not adversely affect the operation of the memory card 1.

再者,對本發明之若干實施形態進行了說明,但該等實施形態係作為例子而提示者,而並非欲限定發明之範圍。該等實施形態可藉由其他各種形態而實施,且可於不脫離發明之主旨之範圍內進行各種省略、置換、變更。該等實施形態或其變形包含於發明之範圍或主旨中,同時包含於申請專利範圍中所記載之發明與其均等之範圍內。 Furthermore, the embodiments of the present invention have been described, but the embodiments are presented as examples and are not intended to limit the scope of the invention. The embodiments can be implemented in various other forms, and various omissions, substitutions and changes can be made without departing from the scope of the invention. The invention or its modifications are intended to be included within the scope and spirit of the invention, and are included in the scope of the invention as described in the appended claims.

1‧‧‧半導體記憶卡 1‧‧‧Semiconductor memory card

2‧‧‧卡盒 2‧‧‧Carton

3‧‧‧半導體記憶裝置 3‧‧‧Semiconductor memory device

11‧‧‧半導體記憶裝置 11‧‧‧Semiconductor memory device

12‧‧‧配線基板 12‧‧‧Wiring substrate

12a‧‧‧第1面 12a‧‧‧1st

12b‧‧‧第2面 12b‧‧‧2nd

14‧‧‧第1配線層 14‧‧‧1st wiring layer

15‧‧‧第2配線層 15‧‧‧2nd wiring layer

16‧‧‧通孔 16‧‧‧through hole

19‧‧‧外部連接端子 19‧‧‧External connection terminal

20‧‧‧鍍金層 20‧‧‧ gold plating

21‧‧‧連接墊 21‧‧‧Connecting mat

21A‧‧‧連接墊 21A‧‧‧Connecting mat

21B‧‧‧連接墊 21B‧‧‧Connecting mat

22‧‧‧鍍金層 22‧‧‧ gold plating

23‧‧‧晶片搭載區域 23‧‧‧ wafer loading area

24‧‧‧記憶體晶片 24‧‧‧ memory chip

25‧‧‧電極墊 25‧‧‧electrode pads

27‧‧‧金屬線 27‧‧‧Metal wire

29‧‧‧控制器晶片 29‧‧‧ Controller chip

29a‧‧‧長邊 29a‧‧‧Longside

29b‧‧‧短邊 29b‧‧‧Short side

30‧‧‧電極墊 30‧‧‧electrode pads

30A‧‧‧電極墊 30A‧‧‧electrode pad

30B‧‧‧電極墊31金屬線 30B‧‧‧electrode pad 31 metal wire

32A‧‧‧墊區域 32A‧‧‧Mat area

32B‧‧‧墊區域 32B‧‧‧Mat area

33‧‧‧密封樹脂層 33‧‧‧ sealing resin layer

34‧‧‧金屬層(Cu層) 34‧‧‧metal layer (Cu layer)

35‧‧‧鍍敷引線 35‧‧‧ plating lead

41‧‧‧半導體記憶裝置 41‧‧‧Semiconductor memory device

161‧‧‧通孔 161‧‧‧through hole

162‧‧‧通孔 162‧‧‧through hole

301‧‧‧IF用電極墊 301‧‧‧ IF electrode pads

S1‧‧‧第1外形邊 S1‧‧‧1st side

S2‧‧‧第2外形邊 S2‧‧‧2nd side

S3‧‧‧第3外形邊 S3‧‧‧3rd side

X1‧‧‧端子對應區域 X1‧‧‧ terminal corresponding area

圖1係表示實施形態之半導體記憶卡之平面圖。 Fig. 1 is a plan view showing a semiconductor memory card of an embodiment.

圖2係表示收容於圖1所示之半導體記憶卡之半導體記憶裝置之平面圖。 Fig. 2 is a plan view showing a semiconductor memory device housed in the semiconductor memory card shown in Fig. 1.

圖3係表示第1實施形態之半導體記憶裝置之上表面透視圖。 Fig. 3 is a perspective view showing the upper surface of the semiconductor memory device of the first embodiment;

圖4係沿圖3之A-A線之剖面圖。 Figure 4 is a cross-sectional view taken along line A-A of Figure 3.

圖5係自半導體記憶裝置之上表面透視觀察圖3所示之半導體記憶裝置中之配線基板之端子形成面之透視圖。 Fig. 5 is a perspective view showing a terminal forming surface of a wiring substrate in the semiconductor memory device shown in Fig. 3 as seen from the upper surface of the semiconductor memory device.

圖6係自半導體記憶裝置之上表面透視觀察圖3所示之半導體記憶裝置中之配線基板之晶片搭載面之透視圖。 Fig. 6 is a perspective view showing the wafer mounting surface of the wiring substrate in the semiconductor memory device shown in Fig. 3 as seen from the upper surface of the semiconductor memory device.

圖7係表示第1實施形態之半導體記憶裝置之變形例之上表面透視圖。 Fig. 7 is a top perspective view showing a modification of the semiconductor memory device of the first embodiment.

圖8係表示第2實施形態之半導體記憶裝置之上表面透視圖。 Fig. 8 is a perspective view showing the upper surface of the semiconductor memory device of the second embodiment.

圖9係沿圖8之A-A線之剖面圖。 Figure 9 is a cross-sectional view taken along line A-A of Figure 8.

圖10係自半導體記憶裝置之上表面透視觀察圖8所示之半導體記憶裝置中之配線基板之端子形成面之透視圖。 Fig. 10 is a perspective view showing a terminal forming surface of a wiring substrate in the semiconductor memory device shown in Fig. 8 as seen from the upper surface of the semiconductor memory device.

圖11係自半導體記憶裝置之上表面透視觀察圖8所示之半導體記憶裝置中之配線基板之晶片搭載面之透視圖。 Fig. 11 is a perspective view showing the wafer mounting surface of the wiring substrate in the semiconductor memory device shown in Fig. 8 as seen from the upper surface of the semiconductor memory device.

3‧‧‧半導體記憶裝置 3‧‧‧Semiconductor memory device

11‧‧‧半導體記憶裝置 11‧‧‧Semiconductor memory device

12‧‧‧配線基板 12‧‧‧Wiring substrate

12b‧‧‧第2面 12b‧‧‧2nd

21A‧‧‧連接墊 21A‧‧‧Connecting mat

21B‧‧‧連接墊 21B‧‧‧Connecting mat

23‧‧‧晶片搭載區域 23‧‧‧ wafer loading area

24‧‧‧記憶體晶片 24‧‧‧ memory chip

25‧‧‧電極墊 25‧‧‧electrode pads

27‧‧‧金屬線 27‧‧‧Metal wire

29‧‧‧控制器晶片 29‧‧‧ Controller chip

29a‧‧‧長邊 29a‧‧‧Longside

29b‧‧‧短邊 29b‧‧‧Short side

30A‧‧‧電極墊 30A‧‧‧electrode pad

30B‧‧‧電極墊 30B‧‧‧electrode pad

31‧‧‧金屬線 31‧‧‧Metal wire

32A‧‧‧墊區域 32A‧‧‧Mat area

32B‧‧‧墊區域 32B‧‧‧Mat area

301‧‧‧IF用電極墊 301‧‧‧ IF electrode pads

S1‧‧‧第1外形邊 S1‧‧‧1st side

S2‧‧‧第2外形邊 S2‧‧‧2nd side

S3‧‧‧第3外形邊 S3‧‧‧3rd side

Y1‧‧‧端子對應區域 Y1‧‧‧ terminal corresponding area

Claims (4)

一種半導體記憶卡,其特徵在於包括半導體記憶裝置,該半導體記憶裝置包括:配線基板,其具備包含複數個外部連接端子與第1配線層之第1面、包含晶片搭載區域與第2配線層之第2面、及電性連接上述第1配線層與上述第2配線層之通孔;記憶體晶片,其配置於上述配線基板之上述晶片搭載區域上,且包含至少1個沿外形邊排列之第1電極墊;控制器晶片,其積層於上述記憶體晶片上,且包含至少1個沿外形邊排列之第2電極墊;第1金屬線,其電性連接上述記憶體晶片之上述第1電極墊與上述配線基板之上述第2配線層;第2金屬線,其電性連接上述控制器晶片之上述第2電極墊與上述配線基板之上述第2配線層;以及密封樹脂層,其以將上述記憶體晶片及上述控制器晶片連同上述第1及第2金屬線一併密封之方式,形成於上述配線基板之上述第2面上;且上述複數個外部連接端子係以位於上述配線基板之第1外形邊之附近之方式,沿上述第1外形邊排列,且上述控制器晶片之上述第2電極墊中之與上述外部連接端子電性連接之電極墊,係以位於與上述配線基板之上述第1面上之上述複數個外部連接端子之形成區域相對應的上述第2面上之區域內或上述區域之附近之方式,沿與 上述複數個外部連接端子之排列方向平行、且位於上述配線基板之上述第1外形邊側之上述控制器晶片之外形邊排列;上述配線基板之上述第2面上之上述端子對應區域包含未設置上述第2配線層之區域,且於未設置上述第2配線層之區域內,以未與上述第2配線層電性連接之狀態局部地設置有構成上述第2配線層之金屬層;上述通孔之至少一部分係設置於上述複數個外部連接端子間,且上述複數個外部連接端子之至少一部分係經由設置於上述複數個外部連接端子間之上述通孔而與上述控制器晶片之上述第2電極墊電性連接;上述複數個外部連接端子分別具備電鍍層作為表面層,且上述配線基板之上述第2配線層包含形成上述電鍍層之鍍敷引線,上述鍍敷引線之至少一部分經由設置於上述複數個外部連接端子間之上述通孔而與上述外部連接端子電性連接。 A semiconductor memory card comprising: a semiconductor memory device comprising: a wiring substrate including a first surface including a plurality of external connection terminals and a first wiring layer; and a wafer mounting region and a second wiring layer a second surface, and a through hole electrically connecting the first wiring layer and the second wiring layer; and the memory wafer is disposed on the wafer mounting region of the wiring substrate, and includes at least one of the outer edges a first electrode pad; a controller wafer laminated on the memory chip and including at least one second electrode pad arranged along the outer shape; and a first metal wire electrically connected to the first electrode of the memory chip An electrode pad and the second wiring layer of the wiring substrate; a second metal wire electrically connecting the second electrode pad of the controller wafer and the second wiring layer of the wiring substrate; and a sealing resin layer Forming the memory chip and the controller wafer together with the first and second metal wires on the second surface of the wiring substrate; and the plurality of The external connection terminals are arranged along the first outer shape so as to be located adjacent to the first outer edge of the wiring substrate, and the second electrode pads of the controller wafer are electrically connected to the external connection terminals. The electrode pad is located in a region on the second surface corresponding to a formation region of the plurality of external connection terminals on the first surface of the wiring substrate or in the vicinity of the region The plurality of external connection terminals are arranged in parallel, and are arranged outside the controller wafer on the first outer side of the wiring substrate; and the terminal corresponding region on the second surface of the wiring substrate is not provided a region of the second interconnect layer is partially provided with a metal layer constituting the second interconnect layer in a region where the second interconnect layer is not provided, and is not electrically connected to the second interconnect layer; At least a part of the hole is disposed between the plurality of external connection terminals, and at least a part of the plurality of external connection terminals is connected to the second of the controller chip via the through hole provided between the plurality of external connection terminals The electrode pads are electrically connected; each of the plurality of external connection terminals includes a plating layer as a surface layer, and the second wiring layer of the wiring substrate includes a plating lead forming the plating layer, and at least a part of the plating lead is disposed through The through holes between the plurality of external connection terminals are electrically connected to the external connection terminals. 一種半導體記憶卡,其特徵在於包括半導體記憶裝置,該半導體記憶裝置包括:配線基板,其具備包含複數個外部連接端子與第1配線層之第1面、包含晶片搭載區域與第2配線層之第2面、及電性連接上述第1配線層與上述第2配線層之通孔;記憶體晶片,其配置於上述配線基板之上述晶片搭載區域上,且包含至少1個沿外形邊排列之第1電極墊; 控制器晶片,其積層於上述記憶體晶片上,且包含至少1個沿外形邊排列之第2電極墊;第1金屬線,其電性連接上述記憶體晶片之上述第1電極墊與上述配線基板之上述第2配線層;第2金屬線,其電性連接上述控制器晶片之上述第2電極墊與上述配線基板之上述第2配線層;以及密封樹脂層,其以將上述記憶體晶片及上述控制器晶片連同上述第1及第2金屬線一併密封之方式,形成於上述配線基板之上述第2面上;且上述複數個外部連接端子係以位於上述配線基板之第1外形邊之附近之方式,沿上述第1外形邊排列;上述控制器晶片之上述第2電極墊中之與上述外部連接端子電性連接之電極墊,係以位於與上述配線基板之上述第1面上之上述複數個外部連接端子之形成區域相對應的上述第2面上之區域內或上述區域之附近之方式,沿與上述複數個外部連接端子之排列方向平行、且位於上述配線基板之上述第1外形邊側之上述控制器晶片之外形邊排列;上述配線基板之上述第2面上之上述端子對應區域包含未設置上述第2配線層之區域,且於未設置上述第2配線層之區域內,以未與上述第2配線層電性連接之狀態局部地設置有構成上述第2配線層之金屬層。 A semiconductor memory card comprising: a semiconductor memory device comprising: a wiring substrate including a first surface including a plurality of external connection terminals and a first wiring layer; and a wafer mounting region and a second wiring layer a second surface, and a through hole electrically connecting the first wiring layer and the second wiring layer; and the memory wafer is disposed on the wafer mounting region of the wiring substrate, and includes at least one of the outer edges First electrode pad; a controller wafer laminated on the memory chip and including at least one second electrode pad arranged along the outer shape; and a first metal wire electrically connecting the first electrode pad of the memory chip and the wiring a second wiring layer of the substrate; a second metal wire electrically connected to the second electrode pad of the controller wafer and the second wiring layer of the wiring substrate; and a sealing resin layer for the memory chip And the controller chip is formed on the second surface of the wiring board together with the first and second metal wires, and the plurality of external connection terminals are located on the first outer side of the wiring substrate In the vicinity of the first outer shape, the electrode pads electrically connected to the external connection terminals of the second electrode pads of the controller wafer are located on the first surface of the wiring substrate Arranging along the plurality of external connection terminals in a region of the second surface corresponding to the formation region of the plurality of external connection terminals or in the vicinity of the region The controller wafers are arranged in parallel with each other on the first outer side of the wiring board, and the terminal corresponding region on the second surface of the wiring substrate includes an area in which the second wiring layer is not provided. Further, in a region where the second wiring layer is not provided, a metal layer constituting the second wiring layer is partially provided in a state where the second wiring layer is not electrically connected. 一種半導體記憶卡,其特徵在於包括半導體記憶裝置,該半導體記憶裝置包括: 配線基板,其包括包含複數個外部連接端子與第1配線層之第1面、包含晶片搭載區域與第2配線層之第2面、及電性連接上述第1配線層與上述第2配線層之通孔;記憶體晶片,其配置於上述配線基板之上述晶片搭載區域上,且包含至少1個沿外形邊排列之第1電極墊;控制器晶片,其配置於上述配線基板之上述晶片搭載區域上或上述記憶體晶片上,且包含至少1個沿外形邊排列之第2電極墊;第1金屬線,其電性連接上述記憶體晶片之上述第1電極墊與上述配線基板之上述第2配線層;第2金屬線,其電性連接上述控制器晶片之上述第2電極墊與上述配線基板之上述第2配線層;以及密封樹脂層,其以將上述記憶體晶片及上述控制器晶片連同上述第1及第2金屬線一併密封之方式,形成於上述配線基板之上述第2面上;且上述通孔之至少一部分設置於上述複數個外部連接端子間;上述複數個外部連接端子之至少一部分係經由設置於上述複數個外部連接端子間之上述通孔而與上述控制器晶片之上述第2電極墊電性連接。 A semiconductor memory card comprising a semiconductor memory device, the semiconductor memory device comprising: The wiring board includes a first surface including a plurality of external connection terminals and a first wiring layer, a second surface including the wafer mounting region and the second wiring layer, and electrically connected to the first wiring layer and the second wiring layer The memory chip is disposed on the wafer mounting region of the wiring substrate, and includes at least one first electrode pad arranged along the outer shape, and a controller chip disposed on the wafer of the wiring substrate a second electrode pad arranged on the memory chip in the region or on the memory chip; the first metal wire electrically connecting the first electrode pad of the memory chip and the wiring substrate a wiring layer; the second metal wire electrically connecting the second electrode pad of the controller chip and the second wiring layer of the wiring substrate; and a sealing resin layer for connecting the memory chip and the controller The wafer is formed on the second surface of the wiring board together with the first and second metal wires, and at least a part of the through hole is provided in the plurality of external connections At least a part of the plurality of external connection terminals is electrically connected to the second electrode pad of the controller chip via the through hole provided between the plurality of external connection terminals. 如請求項3之半導體記憶卡,其中上述複數個外部連接端子分別具備電鍍層作為表面層,且上述配線基板之上述第2配線層包含形成上述電鍍層之鍍敷引線; 上述鍍敷引線之至少一部分係經由設置於上述複數個外部連接端子間之上述通孔而與上述外部連接端子電性連接。 The semiconductor memory card of claim 3, wherein each of the plurality of external connection terminals includes a plating layer as a surface layer, and the second wiring layer of the wiring substrate includes a plating lead forming the plating layer; At least a part of the plating lead is electrically connected to the external connection terminal via the through hole provided between the plurality of external connection terminals.
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