JP2009181986A - 固体撮像素子および固体撮像装置 - Google Patents
固体撮像素子および固体撮像装置 Download PDFInfo
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- 239000012535 impurity Substances 0.000 claims abstract description 47
- 239000004065 semiconductor Substances 0.000 claims abstract description 33
- 238000006243 chemical reaction Methods 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims abstract description 4
- 238000003384 imaging method Methods 0.000 claims description 71
- 238000012545 processing Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 238000012546 transfer Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
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- 230000001276 controlling effect Effects 0.000 description 5
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- 230000004888 barrier function Effects 0.000 description 4
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- 238000007599 discharging Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000003321 amplification Effects 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
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- 230000000149 penetrating effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14654—Blooming suppression
- H01L27/14656—Overflow drain structures
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/62—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
- H04N25/621—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels for the control of blooming
- H04N25/622—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels for the control of blooming by controlling anti-blooming drains
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/766—Addressed sensors, e.g. MOS or CMOS sensors comprising control or output lines used for a plurality of functions, e.g. for pixel output, driving, reset or power
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
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- H01L27/14636—Interconnect structures
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- General Physics & Mathematics (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
【解決手段】pn接合を有する光電変換素子203を含んでなる画素が、マトリックス状に形成された画素領域と、該画素領域において、半導体層の第1面側に形成されたMOSトランジスタを、少なくとも1つ含む画素信号読み出し回路210と、を備え、前記画素のそれぞれは、前記半導体層の前記第1面側に形成された第1導電型の第1半導体領域322と、前記第1半導体領域と電気的に接続される電位制御配線320と、を有し、前記光電変換素子のpn接合を構成する第2導電型の第2半導体領域が、前記画素信号読出し回路を構成するMOSトランジスタの第2導電型不純物領域と前記第1導電型半導体層を介して隣接するよう配置されてなり、前記光電変換素子への光の入射は、前記第1面側とは反対の第2面側からなされる。
【選択図】図3
Description
10 固体撮像素子
100 固体撮像素子チップ
101 撮像領域
102 負荷トランジスタ部
103 CDS回路
104 V選択回路
105 H選択回路
106 AGC(自動ゲイン制御回路)
107 ADC(A/D変換器)
108 デジタルアンプ
109 TG(タイミングジェネレータ)回路
201 光電変換素子
201a n型不純物領域
202 容量
203 転送トランジスタ
204 検出ノード
210 読み出し回路
210a n型不純物領域
210b p型不純物領域
301 SOI基板
301a SOI層
301b SiO2層
310 支持基板
314 SiN層
316 光シールド
320 電位制御線
322 p+型不純物領域
400 固体撮像装置
410 光学システム
430 信号処理装置
Claims (11)
- 第1導電型の半導体層と、
該第1導電型半導体層と、第1導電型と反対導電型の第2導電型不純物領域とにより構成されるpn接合を有する光電変換素子を含んでなる画素が、マトリックス状に形成された画素領域と、
該画素領域において、前記半導体層の第1面側に形成され、第2導電型の不純物領域からなるソースおよびドレインを有するMOSトランジスタを、少なくとも1つ含む画素信号読み出し回路と、
を備え、
前記画素のそれぞれは、
前記半導体層の前記第1面側に形成された第1導電型の第1半導体領域と、
前記第1半導体領域と電気的に接続される電位制御配線と、
を有し、
前記光電変換素子のpn接合を構成する第2導電型の第2半導体領域が、前記画素信号読出し回路を構成するMOSトランジスタの第2導電型不純物領域と前記第1導電型半導体層を介して隣接するよう配置されてなり、
前記光電変換素子への光の入射は、前記第1面側とは反対の第2面側からなされることを特徴とする固体撮像素子。 - 前記光電変換素子のpn接合を構成する第2導電型の第2半導体領域が、前記MOSトランジスタの第2導電型不純物領域の直下まで延在することを特徴とする請求項1記載の固体撮像素子。
- 前記光電変換素子のpn接合を構成する第2導電型の第2半導体領域は、前記半導体層に覆われるように前記半導体層の内部に形成されてなることを特徴とする請求項1または2記載の固体撮像素子。
- 前記電位制御配線は、前記画素領域の全ての画素に対して共通の配線として形成されていることを特徴とする請求項1乃至3記載の固体撮像素子。
- 前記電位制御配線は、前記画素領域において同一の行に配置される画素に対して共通の配線として形成されていることを特徴とする請求項1乃至3記載の固体撮像素子。
- 前記電位制御配線を介して前記第1半導体領域に一定のDC電位が印加されることを特徴とする請求項1乃至5のいずれかに記載の固体撮像素子。
- 前記電位制御配線を介して前記第1半導体領域にパルス状の電位が印加されることを特徴とする請求項1乃至5のいずれかに記載の固体撮像素子。
- 前記電位制御配線を介して前記第1半導体領域に、行単位の画素読出し動作と同期した、パルス状の電位が印加されることを特徴とする請求項5記載の固体撮像素子。
- 前記読み出し回路は、画素毎に設けられていることを特徴とする請求項1乃至8のいずれかに記載の固体撮像素子。
- 前記読み出し回路は、前記画素領域の複数の画素に対して設けられていることを特徴とする請求項1乃至8のいずれかに記載の固体撮像素子。
- 請求項1乃至10のいずれかに記載の固体撮像素子と、
入射光を前記固体撮像素子に導く光学システムと、
前記固体撮像素子から出力される電気信号を処理する信号処理部と、
を備えていることを特徴とする固体撮像装置。
Priority Applications (2)
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JP2008017232A JP5269425B2 (ja) | 2008-01-29 | 2008-01-29 | 固体撮像素子および固体撮像装置 |
US12/350,459 US8089543B2 (en) | 2008-01-29 | 2009-01-08 | Solid-state image pickup element and solid-state image pickup device |
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JP2008017232A JP5269425B2 (ja) | 2008-01-29 | 2008-01-29 | 固体撮像素子および固体撮像装置 |
Publications (3)
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JP2009181986A true JP2009181986A (ja) | 2009-08-13 |
JP2009181986A5 JP2009181986A5 (ja) | 2011-02-10 |
JP5269425B2 JP5269425B2 (ja) | 2013-08-21 |
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JP2008017232A Expired - Fee Related JP5269425B2 (ja) | 2008-01-29 | 2008-01-29 | 固体撮像素子および固体撮像装置 |
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US (1) | US8089543B2 (ja) |
JP (1) | JP5269425B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017215312A (ja) * | 2016-05-25 | 2017-12-07 | パナソニックIpマネジメント株式会社 | 気体センサ装置、気体センサモジュール、及び気体検知方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5985136B2 (ja) | 2009-03-19 | 2016-09-06 | ソニー株式会社 | 半導体装置とその製造方法、及び電子機器 |
JP2010238848A (ja) * | 2009-03-31 | 2010-10-21 | Sony Corp | 固体撮像装置および電子機器 |
JP5558801B2 (ja) * | 2009-12-18 | 2014-07-23 | キヤノン株式会社 | 固体撮像装置 |
TWI467751B (zh) | 2011-12-12 | 2015-01-01 | Sony Corp | A solid-state imaging device, a driving method of a solid-state imaging device, and an electronic device |
JP6037878B2 (ja) * | 2013-02-13 | 2016-12-07 | オリンパス株式会社 | 撮像装置 |
JP2014199898A (ja) | 2013-03-11 | 2014-10-23 | ソニー株式会社 | 固体撮像素子および製造方法、並びに、電子機器 |
JP2015088693A (ja) * | 2013-11-01 | 2015-05-07 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
US9780138B2 (en) * | 2014-11-26 | 2017-10-03 | Caeleste Cvba | Three level transfer gate |
US9819882B2 (en) | 2015-06-05 | 2017-11-14 | Caeleste Cvba | Global shutter high dynamic range sensor |
EP3407592B1 (en) * | 2016-01-18 | 2020-01-29 | Fujifilm Corporation | Image capture device and image data generation method |
CN108605083B (zh) * | 2016-01-26 | 2020-09-15 | 富士胶片株式会社 | 摄像装置及图像数据生成方法 |
CN111769130B (zh) * | 2020-07-17 | 2021-10-08 | 山东大学 | 一种cmos像素传感器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006049338A (ja) * | 2004-07-30 | 2006-02-16 | Sony Corp | 固体撮像装置 |
JP2007221134A (ja) * | 2006-02-17 | 2007-08-30 | Internatl Business Mach Corp <Ibm> | 背面照射を用いる光センサおよびピクセル・アレイ、ならびに光センサを形成する方法 |
JP2008053333A (ja) * | 2006-08-23 | 2008-03-06 | Fujifilm Corp | 固体撮像デバイス |
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JP3759435B2 (ja) | 2001-07-11 | 2006-03-22 | ソニー株式会社 | X−yアドレス型固体撮像素子 |
JP2008172580A (ja) * | 2007-01-12 | 2008-07-24 | Toshiba Corp | 固体撮像素子及び固体撮像装置 |
JP5016941B2 (ja) * | 2007-02-08 | 2012-09-05 | 株式会社東芝 | 固体撮像装置 |
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2008
- 2008-01-29 JP JP2008017232A patent/JP5269425B2/ja not_active Expired - Fee Related
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- 2009-01-08 US US12/350,459 patent/US8089543B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006049338A (ja) * | 2004-07-30 | 2006-02-16 | Sony Corp | 固体撮像装置 |
JP2007221134A (ja) * | 2006-02-17 | 2007-08-30 | Internatl Business Mach Corp <Ibm> | 背面照射を用いる光センサおよびピクセル・アレイ、ならびに光センサを形成する方法 |
JP2008053333A (ja) * | 2006-08-23 | 2008-03-06 | Fujifilm Corp | 固体撮像デバイス |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017215312A (ja) * | 2016-05-25 | 2017-12-07 | パナソニックIpマネジメント株式会社 | 気体センサ装置、気体センサモジュール、及び気体検知方法 |
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US8089543B2 (en) | 2012-01-03 |
US20090190016A1 (en) | 2009-07-30 |
JP5269425B2 (ja) | 2013-08-21 |
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