JP2009180700A - Cylindrical shape measuring device and cylindrical surface shape measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cylindrical shape measuring device for accurately measuring the surface shape of a cylinder processed on a machine tool. <P>SOLUTION: The cylindrical shape measuring device 1 includes a rotation support device of an object to be measured for supporting a cylinder 2 to be measured rotatably about its center axis, a trident sensor holder 3 that is on a cylinder surface to be measured supported by the rotation support device and abuts on the cylinder surface to be measured at a total of three points, namely one point 5c on one linear bus 6 parallel to the center axis (z-axis) of the cylinder to be measured and two points 5a and 5b existing at the positions gripping the linear bus, and a first displacement sensor 4a and a second displacement sensor 4b arranged at the positions separated from the three abutting points by a known distance in the trident sensor holder. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a cylindrical shape measuring apparatus that uses a plurality of displacement sensors and performs measurement of a cylindrical shape including a circular shape of a circular line of a cylinder to be measured and a straight shape of a straight line with high accuracy, and a measuring device thereof. The present invention relates to a method for measuring the shape of a cylinder to be measured.

  Measurements are performed to measure the diameter and roundness of cylinders such as cylindrical rolls, round tubes and crank pins on metal machine tools.

  For example, used with a rotatable device having a geometric center and attached to a support means to rotate about an axis of rotation to form a plane of rotation orthogonal to the axis of rotation. And when the rotatable device rotates about the axis, one or more of the positional, geometric and kinematic parameters of the rotatable device in the plane of rotation. A measuring device for measuring along an arc fixed with respect to the rotatable device and having a known radius of curvature substantially concentric with the geometric center of the rotatable device A plurality of spacing markers spaced apart from one another in an angular direction and fixed to the support means at three different angular positions around the geometric center and rotatable As the device rotates about the axis of rotation, at least three sensors for detecting the marker and the angular position between adjacent markers detected by each sensor, the last marker is the Interpolating means for interpolating as a function of the measured time course after being detected by each sensor, detection of the marker by each sensor, and the last marker detected by each sensor A measuring device has been proposed comprising measuring means for measuring the one or more parameters as a function of the later measured time course (see, for example, Patent Document 1).

  Further, a dimension measuring device for measuring a cylindrical workpiece diameter by contacting a measuring element on both sides of the workpiece and the diameter of the master gauge, and a feeding device for moving the dimension measuring device between the cylindrical workpiece and the master gauge A sizing device having a master gauge rotation drive means is also known (for example, see Patent Document 2).

  Also, a roundness measuring device that is integrally formed with a workpiece rotatably supported by a rotating shaft and measures the roundness of a cylinder eccentric from the rotating shaft, wherein the radius of the cylinder is contacted at three points A three-point contact type measuring instrument for measuring by a method, a measuring instrument sliding means for moving the three-point contact type measuring instrument in contact with a circumference on a cross section perpendicular to the rotation axis of the cylinder, and the roundness Position measuring means for measuring the relative position x of the rotation axis with respect to the measuring device; rotation angle measuring means for measuring the rotation angle Ψ around the rotation axis of the cylinder; and true of the cylinder rotating around the rotation axis. A roundness measuring apparatus is proposed, characterized by comprising roundness calculating means for calculating roundness from the relative position x, the rotation angle Ψ, and the output value y of the three-point contact measuring device. (For example, refer to Patent Document 3).

The end of the cylindrical workpiece having a diameter of 2R is gripped by a workpiece gripper composed of a headstock and a tailstock, and the outer periphery of the workpiece is ground with a grinding wheel that rotates while the workpiece is rotated. -In the method of detecting the grinding end point of the workpiece when the desired fixed size is obtained by grinding by r in the radial direction of the workpiece, the laser beam hits the grinding start of the workpiece on the front and rear slide table. Thus, the distance L _i from the laser displacement sensor to the outer periphery of the workpiece being ground using the laser displacement sensor provided at a position perpendicular to the axis of the workpiece When the displacement width (Δ = L ₀ -L _i ) between the distance L ₀ to the outer periphery of the workpiece at the start of grinding and the distance L _i during grinding becomes r, the cylindrical workpiece A method of finishing the grinding is also proposed (see, for example, Patent Document 4).

  Furthermore, a three-point method (V-block method or saddle gauge method) for measuring roundness for measuring the circular generatrix shape is also known for high-precision measurement of a cylindrical body (for example, see Non-Patent Document 1). ).

  In addition, a method of measuring a cylindrical shape by arranging six displacement sensors at predetermined positions is also known (see, for example, Non-Patent Document 2).

JP-T 9-506176 JP-A-6-79622 JP 2001-66132 A JP 2002-28859 A Satoru Kiyono, “Ultra-precision measurement-focusing on software datum”, publisher Fellow of Japan Society for Precision Engineering, Satoshi Kiyono, p.35-p39, published in March 2007 Endo, Katsuyuki, “Development of Multi-Probe Cylindrical Measuring Machine”, Journal of Precision Engineering, April 2003, page 507

Along with the high accuracy of rotating spindles, etc., the cylindrical shape can no longer satisfy the evaluation accuracy required by machine tool manufacturers only with the information obtained by evaluating the roundness and straightness of the straight busbars individually. . In particular, the bending of the central axis of the cylinder and the change in diameter that occurs in the direction along the axis cannot be evaluated by the conventional three-point method of roundness measurement. Even if the process is repeated, the cylindrical shape cannot be evaluated with the required accuracy unless the perfect circular shape is evaluated together.

  As described in Non-Patent Document 2, there has also been proposed a method of measuring a cylinder on the machine by using five or six displacement sensors and simultaneously performing the three-point method of roundness measurement and the three points of straightness measurement. However, since many displacement sensors are used, the measurement system is expensive, and the difference in drift characteristics between the sensors is an error factor, so that it has not been put into practical use.

  In view of such problems, the present invention provides a multipoint method that simultaneously realizes the three-point method of roundness measurement and straightness measurement with the minimum number of sensors, and the problem of cost in a cylindrical measurement system based on the multipoint method. An object of the present invention is to provide a cylindrical surface shape measuring means that solves the problem of drift.

According to a first aspect of the present invention, there is provided a rotation support device for an object to be measured which rotatably supports a cylinder to be measured on its central axis, and a central axis of the cylinder to be measured which is on a measurement cylinder surface supported by the rotation support device A trident sensor holder that abuts the cylindrical surface to be measured at a total of three points, one point on one straight line parallel to the line and two points sandwiching the straight line, and the three fork sensor holder from the three abutment points A cylindrical shape measuring device including two sensors, a first displacement sensor and a second displacement sensor, which are arranged at a position where the distance is known is provided.

The invention according to claim 2 is characterized in that two contact points between the trident sensor holder and the measured cylindrical surface sandwiching the straight generatrix and a measurement point by one of the two displacement sensors are one of the measured cylinders. The cylindrical shape measuring device according to claim 1, wherein the cylindrical shape measuring device is provided on two cross sections perpendicular to an axis (xy cross section: also referred to as a circle bus).

The invention according to claim 3 provides a cylindrical shape measuring apparatus, wherein at least one of the displacement sensors attached to the three-pronged sensor holder is an angle sensor or a mixed sensor capable of detecting displacement and angle simultaneously. It is.

The invention according to claim 4 is a structure in which two contact points of the trident sensor holder sandwiching the straight generatrix of the cylinder to be measured can rotate with respect to the trident sensor holder in a posture having a rotation axis orthogonal to the axis of the cylinder to be measured. A cylindrical shape measuring device is provided, which is formed by a supporting cylindrical roller attached in (1).

According to the invention of claim 5, two contact points between the trident sensor holder and the cylinder to be measured sandwiching the straight generatrix of the cylinder to be measured are the contact points between the two spheres provided inside the trident sensor holder and the cylinder to be measured. The present invention provides a cylindrical shape measuring apparatus.

The invention of claim 6 uses the cylindrical shape measuring apparatus according to claim 1 to measure the surface shape of the cylinder to be measured supported by the headstock and the tailstock of the numerically controlled cylindrical grinding apparatus. The three-pronged sensor holder of the cylindrical shape measuring device is located on a straight generatrix of the cylinder surface to be measured, one point on one straight generatrix parallel to the central axis of the cylinder to be measured, and a position between the straight generatrix The holder is arranged so as to abut at two points on the surface of the cylinder to be measured, and the three-pronged sensor holder is linearly moved parallel to the central axis (z-axis) of the rotating cylinder to be measured, or the cylinder to be measured is measured. A straight shape value of the section perpendicular to the axis (xy section) of the cylinder to be measured is measured by moving in the direction of the center axis (z axis) of the cylinder, and the distance value and angle between the displacement sensor and the cylinder to be measured are measured by the displacement sensor controller. Measured circle sent by sensor The angle value for the reference straight line bus is transmitted as an electrical signal to the recording unit of the personal computer, and the cylindrical surface shape measurement stored in the storage unit of the personal computer from the electrical signal value of the distance and angle θ transmitted by the data analysis unit According to the program, the coordinate axis values of the x, y and z coordinates of the measured cylindrical surface at the angle θ with respect to the central axis of the cylinder are calculated, and the cylindrical surface shape is output to a personal computer display screen or printer. A method for measuring the surface shape of a cylinder is provided.

  In the present invention, a cylindrical shape can be measured with two displacement sensors by replacing some of the measurement points necessary for the multipoint method with the contact points of the trident sensor holder with the surface to be measured, and the number of displacement sensors can be reduced. Can do.

  In the present invention, the contact point between the trident sensor holder and the cylinder to be measured is formed by a rotatable roller or sphere, and the contact area between the cylinder and the trident sensor holder can be reduced, so that wear of the trident sensor holder can be kept small.

  In the present invention, the roundness measurement and the straightness measurement which have been conventionally performed can be integrated by arranging the contact points on the measurement cylindrical surface in a three-dimensional manner. The surface shape can be measured.

  When an angle sensor is used as the displacement sensor, it is possible to measure a cylindrical high-frequency component, and it is possible to measure the position of two orthogonal components related to the bending of the cylindrical axis.

  Hereinafter, the present invention will be described in more detail with reference to the drawings. 1 is a front view of the cylindrical shape measuring apparatus, FIG. 2 is a side view of the cylindrical shape measuring apparatus, and FIG. 3 is a plan view of the cylindrical shape measuring apparatus.

In the cylindrical shape measuring apparatus 1 shown in FIGS. 1, 2 and 3, 2 is a cylinder to be measured, 3 is a three-pronged sensor holder, 3a and 3b are cylindrical rollers, 3c is a sphere, 4a and 4b are displacement sensors, and 5a is a first sensor. One contact, 5b is a second contact, and 5c is a third contact. Reference numeral 6 denotes a straight bus, 7, 7 a sensor controller, 8 a personal computer, 8a a personal computer display screen, 9 an operation panel, 10 a printer, and 11 a mouse.

The controller 7 receives the distance value between the displacement sensors 4a and 4b and the cylinder 2 to be measured and the angle of the cylinder to be measured with respect to the reference straight line 6 transmitted by the angle sensor 4a, and uses the value as an electrical signal for the personal computer. The data analysis unit (calculation unit) transmits the electrical signal value of the transmitted distance and angle to the central axis of the cylinder according to the cylindrical surface shape measurement program stored in the storage unit of the personal computer. The coordinate axis values of the x, y, and z coordinates of the surface of the cylinder to be measured at the position at the angle θ can be calculated and displayed on the personal computer display screen 8a.

Although not shown in FIGS. 1 and 2, both side surfaces of the cylinder 2 to be measured are rotatably supported by the headstock 12 and the tailstock 13 of the numerically controlled cylindrical grinding apparatus. Are fixed on the same slide table. The trident sensor holder 3 may have a structure in which a longitudinal direction of the trident sensor holder 3 can be moved in parallel with the axis of the cylinder to be measured. Further, the position coordinates (x _i , y _i , z _i ) of the displacement sensors 4a, 4b are not illustrated in correlation with the position coordinates of the three-point sensor holder 3 and the three points on the measured cylinder surface. Reading is performed with an x-axis linear scale, a y-axis linear scale, and a z-axis linear scale provided in the grinding apparatus.

  As non-contact type capacitance displacement sensors, Japan AE Co., Ltd. Microsense 5000 series (product name), Ono Sakusa Co., Ltd. capacitance displacement meter VE-521 (product name), AccuMajor (trade name) of Koyo Seisakusho Co., Ltd., ST-3571A (trade name) of Iwatori Measurement Co., Ltd., ATS series, ATM series (trade name) of Techno System Co., Ltd., etc. can be used. A non-contact type laser beam displacement sensor may be used instead of the non-contact type capacitance displacement meter. As for the angle sensor, a micro angle sensor KMA-200S (trade name) can be obtained from Koyo Manufacturing Co., Ltd., and a three-dimensional angle sensor M12P (trade name) can be obtained from Datatec Corporation.

  An angle sensor capable of detecting an angle α of a line segment connecting two points 5a and 5b at which the three-pronged sensor holder 3 of the measured cylinder and the measured cylindrical surface abut when the measured cylinder is rotating, and The mixed sensor 4a or 4b, which detects the change in the angle and the change in the length and detects the relative displacement of the line segment when the line segment is changed at the same time as the rotation of the line segment, is a keyence stock. A combined angle / displacement sensor KS-1100 (trade name) is sold by the company, and a high-precision laser angle / height displacement sensor HL-V1 (trade name) is sold by Sunkus Corporation.

As the material of the holder bars 3k, 3m, 3n, and 3r of the three-pronged sensor holder 3, a rigid material such as stainless steel, engineering plastics such as polyacetal or nylon 6, quartz, or ceramic is used. As materials for the rollers 3a and 3b and the spheres 3c, polyacetal, poly (difluorodichloroethane), nylon 6, stainless steel, and ceramic are used. A sphere may be used instead of the cylindrical roller.

Hereinafter, the measurement principle for obtaining the outer diameter and roundness of the cylinder to be measured will be described with reference to FIG. 1, FIG. 2, and FIG.

The central axis of the cylinder 2 to be measured is taken as the z-axis, and the sensitivity directions of the displacement sensors 4a and 4b are aligned with the x-axis. The y axis is taken in the direction perpendicular to the xz cross section. As shown in FIG. 2, the bars 3m and 3n of the three-pronged sensor holder 3 have two cylindrical rollers 3a and 3a in which the bars 3m and 3n crotch in a straight line 6 of the cylinder 2 to be measured. Two contact points 5a and 5b on the cross section) are formed, and the measurement point of the first displacement sensor 4a is on the cross section perpendicular to the axis (xy cross section). Further, as shown in FIG. 1, the ball 3c holding member forming the second displacement sensor 4b and the third contact point 5c is on one straight line of the trident sensor holder bar 3k. The fulcrum of the three-pronged sensor holder that forms the third contact point may be a cylindrical fulcrum whose axis is perpendicular to the cylinder to be measured, or a spherical fulcrum. If the sensor holder of the present invention is in contact with the cylinder to be measured at three points and the measured surface has an ideal shape as designed, the three-pronged sensor holder 3 supported by the three points of contact on the surface of the cylinder to be measured. Since the relative positional relationship between the cylinder 2 and the cylinder 2 to be measured is determined, the outputs of the displacement sensors 4a and 4b are calibrated in advance.

Now, the shape F (z, θ) of the cylinder to be measured is bent in the x and y directions of the central axis ΔX (z), ΔY (z), the average radius change R (z), and the average at each point Deviation from radius (circular shape) Suppose that it is represented by r (z, θ).

  F (z, θ) = ΔX (z) + ΔY (z) + R (z) + r (z, θ) (1)

The height of the trident sensor holder in consideration of the influence of the cylindrical surface shape at the two contact points is expressed by the following equation (2).

S (z) = ΔX (z) + {R (z) + r (z, θ-π / 2 + α / 2) + r (z, θ + π / 2-α / 2)} cos (α / 2) (2)

At this time, considering a cross section perpendicular to the axis at the position of z, the perfect circular shape is r (z, θ),
If there are two contact points and a displacement sensor on the cross section, the output of the three-pronged displacement sensor is expressed by the following equation (3).

  m1 (z, θ) = R (z) + r (z, θ) − {R (z) + r (z, θ−π / 2 + α / 2) + r (z, θ + π / 2−α / 2) )} Cos (α / 2) (3)

However, the output of the displacement sensor is represented by the shape height of the cylindrical surface to be measured at the sensor measurement point when the position of the trident sensor holder 3 in the x direction is used as a reference. The same applies thereafter.

  If the contact z or the position z of the displacement sensor is not on the same-axis cross section, substituting the z-axis coordinate of each contact point and the z-coordinate of the displacement sensor position into the above equation gives a temporary approximation for the displacement sensor output. To establish.

As shown in FIG. 1, if the third contact point position on the straight bus 6 is z + L3, the second sensor position is z + Ls, and the contact point of the cylindrical roller sandwiching the bus is z, the third contact point height S (z + L3) is expressed by the following equation (4).

  S (z + L3) = ΔX (z + L3) + R (z + L3) + r (z + L3, θ) (4)

  The displacement output at the position of the second displacement sensor 4b is expressed by the following equation (5).

m2 (z, θ) = X (z + Ls) −X (z) + R (z + Ls) + r (z + Ls, θ) − {S (z + L3) −S (z)} Ls / L3 ( 5)

If there is an angle sensor 4b that detects the inclination of the straight bus at the second displacement sensor position, the output of the angle sensor is expressed by the following equation (6).

  μ2 (z, θ) = dR (z + Ls) / dz + dr (z + Ls, θ) / dz− {S (z + L3) −S (z)} / L3 (6)

  If there is an angle sensor 4b that detects the inclination of the circumferential tangent at the second sensor position, the output of the angle sensor is expressed by the following equation (7).

  ν2 (z, θ) = {ΔY (z + Ls) −ΔY (z)} / R + dr (z + Ls, θ) / Rdθ (7)

When the equations (2) to (7) are averaged for one rotation of the sensor output, the following equations (8), (9), (10), (11), (12) and equation (13) are obtained, respectively.

  Save (z) = ΔX (z) + R (z) cos (α / 2) (8)

  Save (z + L3) = ΔX (z + L3) + R (z + L3) (9)

  m1ave (z, θ) = R (z) −R (z) cos (α / 2) (10)

  m2ave (z, θ) = X (z + Ls) −X (z) + R (z + Ls) − {Save (z + L3) −Save (z)} Ls / L3 (11)

  μ2ave (z, θ) = dR (z + Ls) / dz− {Save (z + L3) −Save (z)} / L3 (12)

  ν2ave (z, θ) = {ΔY (z + Ls) −ΔY (z)} / R (13)

From the equation (10), the average radius R (z) of the cylinder is derived as R (z) = m1ave (z, θ) / {1-cos (α / 2)}. m1ave (z, θ) indicates the average diameter change including the taper of the cylinder 2 to be measured.

Moreover, following Formula (14) is guide | induced from Formula (8) and Formula (9).

  Save (z + L3) −Save (z) = ΔX (z + L3) −ΔX (z) + {R (z + L3) −R (z) cos (α / 2)} (14)

  From the equations (11) and (14), the following equation (15) is derived, which is a straight three-point differential.

m2ave (z, θ) −R (z + Ls) − {R (z + L3) −R (z) cos (α / 2)} Ls / L3
= X (z + Ls) −X (z) − {ΔX (z + L3) −ΔX (z)} Ls / L3 (15)

  If this equation (15) is analyzed, the straight shape of the cylinder to be measured in the xz section of the central axis of the cylinder 2 to be measured is obtained.

  Ν2ave (z, θ) in the previous equation (13) provides a differential output of the two-point method relating to the straight shape in the yz section of the central axis of the cylinder 2 to be measured. If this is analyzed, a straight shape in the yz section of the central axis of the cylinder 2 to be measured is obtained.

  After obtaining the amount determined by the average output in this way, looking at m1 (z, θ) in the previous equation (3), the perfect circle shape of the cylinder 2 to be measured having a cross section perpendicular to the axis at the position z in the axial direction can be seen. . If the straight shape of the central axis is known, the center position of the cylinder 2 to be measured can be found. If the average radii R (z) and r (z, θ) at that position are used, the three-dimensional shape of the cylinder 2 to be measured is obtained. The shape is output.

  The straight shape of the straight bus 6 can also be obtained from the above cylindrical shape, but the straight shape of the straight bus from the m2 (z, θ) in equation (5) when θ is fixed is separately output as a three-point method. You can ask for it.

Although μ2 (z, θ) in the previous equation (6) and μ2ave (z, θ) in the previous equation (12) were not used in the above description, if equation (6) is used instead of equation (5), This is a mixed method output for a straight shape, which is advantageous for knowing the details of the high-frequency component of the shape. Further, when Expression (7) is used instead of Expression (3), a mixed method output relating to the perfect circle shape of the circle bus is obtained, which is also advantageous in knowing details of the high-frequency component of the shape.

In FIG. 1, one of the measuring sensors 4a is arranged on the same circle bus (xy cross section) as the contact points 5a and 5b by the two cylindrical rollers 3a and 3b, but this position is the z axis. It may be moved in the direction. Also, although two displacement sensors are used, adding one to three displacement sensors that have measurement points in the vicinity of the contact point will cause an error even if the contact point is separated from the object to be measured. It can be set as the measuring device system which does not produce. If there is a contact point at which separation from the cylindrical surface to be measured is allowed even at one place, there is an advantage that there is a margin in the uniformity of the distribution of the force for pressing the three-pronged sensor holder 3 against the surface of the cylindrical object to be measured.

In order to measure the surface shape of the cylinder to be measured supported by the headstock 12 and the tailstock 13 of the numerically controlled cylindrical grinding apparatus using the cylindrical shape measuring apparatus 1, the trident sensor holder 3 of the cylindrical shape measuring apparatus 1. The holder bar 3k is provided at a position above the cylindrical surface to be measured, one point on one straight line parallel to the central axis of the measured cylinder, and the measured cylindrical surface of the three-pronged sensor holder at a position sandwiching the straight line. The three-pronged sensor holder 3 is brought into contact with the cylinder surface to be measured at a total of three points, and the cylinder to be measured is rotated, and the cylinder surface shape with respect to the central axis foam is measured by the displacement sensor 4a. The trident sensor holder is linearly moved parallel to the center axis (z axis) of the cylinder to be measured or the cylinder to be measured is moved in the direction of the center axis (z axis) of the cylinder to be measured (xy) Measure the straight shape value of the The distance values between the displacement sensors 4a and 4b and the cylinder 2 to be measured and the angle values of the cylinder to be measured, which are transmitted by the angle sensor 4a, are transmitted from the rollers 7 and 7 to the recording unit of the personal computer 8 as electrical signals. Then, the cylinder according to the cylindrical surface shape measurement program including the above formulas (1) to (15) stored in the storage unit of the personal computer from the electric signal values of the distance and angle transmitted from the data analysis unit (calculation unit) The coordinate axis values of the x, y, and z coordinates of the surface of the cylinder to be measured at the angle θ are calculated with respect to the central axis and projected on the personal computer display screen 8a. As the outer surface shape of the cylinder to be measured, the surface shape of the cylinder to be measured can be calculated by integrating the value of the straight shape value in the direction of movement of the central axis, and can be displayed on the personal computer display screen 8a.

As another aspect of the cylindrical shape measuring apparatus of the present invention, a micro-vibration device may be mounted on the trident sensor holder 3 in order to reduce the influence of friction caused by friction at the contact point between the trident sensor holder 3 and the surface of the cylinder to be measured. Easy. In addition, in order to avoid the influence of dirt on the surface to be measured and the processing liquid adhering during processing on the measurement, a surface cleaning pad may be pressed near the contact point to perform on-machine measurement on a clean surface. Good.

According to the present invention, it is possible to measure the bending of the central axis of the cylinder and the taper of the cylinder. This cannot be realized only by repeating along the z-axis for the measurement of a perfect circle shape by various three-point methods that are conventionally performed.

The cylindrical shape measuring apparatus of the present invention can be used for measuring the shape of a cylinder attached to a machine tool. In particular, if the rotatable cylindrical rollers 5a and 5b and the sphere 5c are used for the support member of the three-pronged sensor holder 3 constituting the contact point, this on-machine measurement becomes easy.

  Since the cylindrical surface shape measurement method of the present invention uses a three-point method for measuring a perfect circle shape with the taper of the cylinder as a change in average radius, zero point adjustment in the straight shape measurement is unnecessary.

It is a front view of a cylindrical shape measuring apparatus. It is a side view of a cylindrical shape measuring apparatus. It is a top view of a cylindrical shape measuring apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cylindrical shape measuring apparatus 2 Cylinder to be measured 3 Trident sensor holder 4a, 4b Displacement sensor or angle / displacement mixed sensor 5 Displacement sensor holder bar 6 Linear bus 7 Controller 8 Personal computer 10 Printer

Claims (6)

A rotation support device for the object to be measured, which rotatably supports the cylinder to be measured about its central axis, and a single linear mother on the surface of the measurement cylinder supported by the rotation support device and parallel to the center axis of the cylinder to be measured A trident sensor holder that abuts the cylindrical surface to be measured at a total of three points, one point on the line and two points between the straight generatrix, and a distance from the three abutment points to the trident sensor holder at a known position A cylindrical shape measuring apparatus including two arranged first displacement sensors and second displacement sensors. Two contact points between the three-pronged sensor holder and the cylindrical surface to be measured sandwiching the straight generatrix, and a measurement point by one displacement sensor of the two displacement sensors are one axis perpendicular section (xy cross section) of the measured cylinder. The cylindrical shape measuring apparatus according to claim 1, wherein   The cylindrical shape measuring apparatus according to claim 1, wherein at least one of the displacement sensors attached to the three-pronged sensor holder is an angle sensor or a mixed sensor capable of detecting displacement and angle simultaneously.   A supporting cylinder attached with a structure in which two contact points of the trident sensor holder sandwiching the straight generatrix of the cylinder to be measured have a rotation axis orthogonal to the axis of the cylinder to be measured and can rotate with respect to the trident sensor holder. The cylindrical shape measuring apparatus according to claim 1, wherein the cylindrical shape measuring apparatus is formed of rollers.   Two contact points between the three-pronged sensor holder and the measured cylinder sandwiching the straight generatrix of the measured cylinder are contact points between the two spheres provided inside the trident sensor holder and the measured cylinder. The cylindrical shape measuring apparatus according to claim 1 or 2.   A method for measuring a surface shape of a cylinder to be measured supported by a headstock and a tailstock of a numerically controlled cylindrical grinding apparatus using the cylindrical shape measuring apparatus according to claim 1, The holder is located on a straight generatrix of the cylinder surface to be measured, on one linear generatrix parallel to the central axis of the cylinder to be measured, and on the surface of the cylinder to be measured of the three-pronged sensor holder at a position sandwiching the straight generatrix. The three-pronged sensor holder is linearly moved parallel to the center axis (z axis) of the rotating cylinder to be measured, or the cylinder to be measured is center axis (z axis) of the cylinder to be measured. ) To measure the straight shape value of the cross section perpendicular to the axis (xy cross section) of the cylinder to be measured, and the distance value between the displacement sensor and the cylinder to be measured and the angle sensor transmitted from the controller of the displacement sensor. To the cylindrical straight straight line The angle value to be transmitted to the recording unit of the personal computer as an electrical signal, and the cylinder surface shape measurement program stored in the storage unit of the personal computer is stored from the distance and the electrical signal value of the angle θ transmitted by the data analysis unit. Calculating the x-axis, y-coordinate and z-coordinate values of the measured cylindrical surface at a position at an angle θ with respect to the central axis, and outputting the cylindrical surface shape to a personal computer display screen or printer; Surface shape measurement method.

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