JP2009174034A - Amorphous soft magnetic alloy, amorphous soft magnetic alloy strip, amorphous soft magnetic alloy powder, and magnetic core and magnetic component using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an amorphous soft magnetic alloy having preferable soft magnetic characteristics, the strip thereof, the powders thereof, a low-loss magnetic core and a high-performance magnetic component using the alloy. <P>SOLUTION: The amorphous soft magnetic alloy includes Fe<SB>100-x-y-z</SB>Si<SB>x</SB>B<SB>y</SB>P<SB>z</SB>(atom%) as a main component (wherein x, y and z each satisfies the relation: 0.5≤x≤15, 5≤y≤25, z≤15 and 18≤x+y+z≤30), and contains, by mass based on the main component, ≥0.01 but ≤0.3% Mn, ≥0.0001 but ≤0.01% Al, ≥0.001 but ≤0.03% Ti, ≥0.005 but ≤0.2% Cu and ≥0.001 but ≤0.05% S. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention is used for magnetic components such as various reactors, various choke coils, various transformers, iron cores for motors, magnetic shields, magnetic sensors, current sensors, and the like, and particularly has characteristics suitable for magnetic cores of reactors, choke coils, and transformers. The present invention relates to an amorphous soft magnetic alloy, an amorphous soft magnetic alloy ribbon, an amorphous soft magnetic alloy powder, a low-loss magnetic core using the same, and a high-performance magnetic component using the same.

  Magnetic materials used in magnetic components such as various reactors, various choke coils and inductors, various transformers, motor cores, magnetic shields, magnetic sensors, and current sensors include silicon steel, ferrite, amorphous alloys, and nanocrystalline alloy materials. Etc. are known. Ferrite has excellent high-frequency characteristics, but has a low saturation magnetic flux density, poor temperature characteristics, and is likely to be magnetically saturated. Inferior direct current superposition characteristics, especially when used for reactors, there are problems in miniaturization and compatibility with large current circuits. . Silicon steel has a feature of high magnetic flux density, but has a problem of large magnetic core loss for high frequency applications, and particularly has a problem of large heat generation when used at a frequency exceeding 10 kHz.

  Fe-based nanocrystalline alloys exhibit excellent soft magnetic properties, and are therefore used in magnetic cores such as common mode choke coils, high frequency transformers, and pulse transformers. These Fe-based nanocrystalline alloys are usually prepared by quenching from a liquid phase or a gas phase to form an amorphous alloy, and then microcrystallizing this by heat treatment. Fe-based nanocrystalline alloys are microcrystalline crystallization of amorphous alloys and are known to exhibit excellent soft magnetic properties with high saturation magnetic flux density and low magnetostriction comparable to those of Fe-based amorphous alloys. However, nanocrystalline alloys contain a large amount of expensive elements such as Nb and Zr, and are more difficult to produce than amorphous alloys used as amorphous soft magnetic materials when producing amorphous alloys. Inferior. As a method for producing an amorphous alloy, as a method for quenching from a liquid phase, a single roll method, a twin roll method, a centrifugal quench method, a spinning in a rotating liquid, an atomizing method, a cavitation method, and the like are known. . Further, as a method of quenching from the gas phase, a sputtering method, a vapor deposition method, an ion plating method and the like are known.

  On the other hand, currently available amorphous alloys such as Fe-Si-B and Co-Fe-Si-B are superior in soft magnetism to conventional crystalline soft magnetic alloy materials. Must be manufactured using an ultra-quenching technique such as an atomizing method or the like, and it is difficult to manufacture a completely amorphous alloy with a large size, and there is a shape limitation. Currently produced amorphous soft magnetic alloys are usually thin ribbons with a thickness of about 25 μm and wires with a diameter of about 150 μm. For example, amorphous alloy ribbons for electric power are used at commercial frequencies, that is, relatively low frequencies such as 50 Hz and 60 Hz. When used for these applications, it is required to have a low iron loss and a high saturation magnetic flux density (Bs) and a high space factor from the viewpoint of miniaturization. As described above, the amorphous alloy is mass-produced with a material having a thickness of about 25 μm. From the viewpoint of improving the space factor, it is preferable to increase the thickness further, but the magnetic properties are deteriorated due to crystallization. There's a problem. Amorphous alloy powder is also manufactured for the purpose of use in dust cores used in choke coils, etc., but when manufactured by the water atomization method or gas atomization method, powder with a large particle size is not completely produced. Hard to be amorphous. In particular, when a powder is produced by gas atomization or the like having a low cooling rate, it is difficult to realize a complete amorphous state for a powder having a large particle size, and therefore, a powder having poor characteristics is likely to be mixed.

  In order to solve such a problem, amorphous formation as described in Patent Document 1 (Japanese Patent No. 3929327), Patent Document 2 (Japanese Patent Laid-Open No. 2007-92096) and Patent Document 3 (Japanese Patent Laid-Open No. 2007-231415) is performed. High performance Fe-based amorphous alloys (metallic glasses) have been reported, and it has been reported that amorphous alloys and powders with relatively large dimensions can be produced.

Japanese Patent No. 3929327 JP 2007-92096 A JP 2007-231415 A

However, when producing amorphous alloys in alloys with compositions that are reported to have a high ability to form these materials, investigations were made using industrial raw materials such as ferroalloys instead of pure raw materials. If the alloy size during casting is large, if the plate thickness is large or the grain size is large, it is difficult to make the alloy completely amorphous, and a crystalline phase is formed and the alloy softens. It became clear that the magnetic properties deteriorated. This is considered to be because an element contained in a trace amount promotes crystallization. Therefore, it is necessary to suppress the formation of crystal phase and suppress the deterioration of soft magnetic properties by adjusting a small amount of alloy elements.
As described above, even at the industrial level, it is difficult to form a crystalline phase, the alloy size can be increased, the shape restrictions are small, soft magnetic properties are not easily deteriorated, and amorphous soft magnetic alloys exhibiting excellent magnetic properties are strongly realized. It is desired.

  Therefore, the present invention is used for magnetic components such as various reactors, various choke coils and inductors, various transformers, iron cores for motors, magnetic shields, magnetic sensors, and current sensors, and is particularly suitable for magnetic cores of reactors, choke coils, and transformers. Amorphous soft magnetic alloy, amorphous soft magnetic alloy ribbon, amorphous soft magnetic alloy powder, and low-loss magnetic core using the same and suitable for mass production with excellent characteristics, good amorphous forming ability and excellent magnetic properties An object is to provide a high-performance magnetic component.

As a result of intensive studies to solve the above problems, the present inventors have Fe _100-x-yz Si _x B _y P _z (atomic%) as a main component, and x, y, and z are each 0. 5 ≦ x ≦ 15, 5 ≦ y ≦ 25, z ≦ 15, 18 ≦ x + y + z ≦ 30, Mn is 0.01% by mass or more and 0.3% by mass or less with respect to the main component, and Al is 0.8%. 0001 mass% to 0.01 mass%, Ti 0.001 mass% to 0.03 mass%, Cu 0.005 mass% to 0.2 mass% and S 0.001 mass% to 0 The present inventors have found that an amorphous soft magnetic alloy containing 0.05 mass% or less hardly forms a crystal phase and exhibits excellent soft magnetic properties, and have arrived at the present invention.

  In the present invention, Si has an effect of assisting the formation of an amorphous phase. When the Si amount x is less than 0.5 atomic%, the thermal stability is remarkably deteriorated, and when the Si amount x exceeds 15 atomic%, it is not preferable. This is not preferable because it causes a significant decrease. For this reason, the Si amount x needs to satisfy 0.5 ≦ x ≦ 15 (atomic%). A more preferable range of the Si amount x is 1 ≦ x ≦ 13 (atomic%). In this range, it is easier to produce an amorphous ribbon. B is an element effective for amorphization, and when the B amount y is less than 5 atomic%, it is difficult to form an amorphous material, and when the B amount y exceeds 25 atomic%, the saturation magnetic flux density is remarkably lowered. . P is an element effective for amorphization, and the P amount z needs to be 15 atomic% or less. Although the amorphous forming ability is improved by containing P, if the amount of P exceeds 15 atomic%, the saturation magnetic flux density is significantly decreased, which is not preferable. The sum x + y + z of the Si amount x, the B amount y, and the P amount z needs to be 18 atom% or more and 30 atom% or less. This is because if the sum x + y + z of Si amount x, B amount y, and P amount z is less than 18 atomic%, the amorphous forming ability is inferior, and if it exceeds 30 atomic%, the saturation magnetic flux density is significantly lowered, which is not preferable. is there.

  Mn is an element that suppresses amorphous crystallization by coexisting with S. When the amount of Mn is less than 0.01 wt% with respect to the main component, there is almost no crystallization suppressing effect. The reaction with the refractory during embrittlement or dissolution becomes large, which is not preferable. For this reason, the amount of Mn needs to be 0.01 mass% or more and 0.3 mass% or less with respect to the said main component. Al and Ti are elements that are difficult to remove completely, and are elements that promote the crystallization of the amorphous surface and are harmful to the formation of the amorphous. It is difficult to make the amount of Al 0.0001% by mass or less, and when the amount of Al exceeds 0.01% by mass, crystallization tends to occur, which is not preferable. For this reason, Al amount needs to be 0.001 mass% or more and 0.01 mass% or less. It is difficult to make the Ti content 0.001% by mass or less, and when the Ti content exceeds 0.03% by mass, the amorphous alloy surface is easily crystallized, which is not preferable. For this reason, the amount of Ti needs to be 0.001 mass% or more and 0.03 mass% or less. Cu and S are elements that suppress crystallization within a certain content range when a small amount of Al and Ti are contained, and it is desirable that both are contained within a certain range. If the amount of Cu is less than 0.005% by mass, there is no effect of suppressing crystallization, and if the amount of Cu exceeds 0.2% by mass, the amorphous forming ability decreases, and in the case of a thick shape or a shape having a large particle size, amorphization is not achieved. It becomes difficult. For this reason, the amount of Cu needs to be 0.005 mass% or more and 0.2 mass% or less. When the amount of S is less than 0.001% by mass, there is no effect of suppressing crystallization, and when the amount of S exceeds 0.05% by mass, significant embrittlement is caused, which is not preferable. For this reason, S amount needs to be 0.001 mass% or more and 0.05 mass% or less.

In the present invention, a part of Fe can be substituted with at least one element selected from Co and Ni. By substituting Co or Ni, the saturation magnetic flux density can be changed or the magnetostriction can be changed. In addition, when performing heat treatment in a magnetic field, the induced magnetic anisotropy can be changed.
In the present invention, 5 atomic% or less of Fe can be substituted with C. By substituting with C, the viscosity of the molten metal at the time of producing an amorphous alloy is lowered and the production becomes easy. However, when the amount of C exceeds 5 atomic%, the change with time is remarkably increased. A more preferable substitution amount of C is 2 atomic% or less. A particularly preferable amount of C is 1 atomic% or less.
In the present invention, 3 atomic% or less of Fe can be substituted with at least one element selected from Cr, V, Nb, Mo, Ta, W, Zr, and Hf. By substituting these elements, it is possible to improve corrosion resistance, thermal stability, and soft magnetic properties.
In the present invention, 1 atomic% or less of B can be substituted with at least one element selected from Ge, Ga, and Sn. By substituting these elements, the magnetic properties can be adjusted. However, if the amount of substitution exceeds 1 atomic%, it tends to become brittle, which is not preferable.
The alloy of the present invention can contain impurities such as oxygen and nitrogen, but it is not preferable to contain a large amount.

The amorphous soft magnetic alloy of the present invention can obtain an amorphous soft magnetic alloy ribbon having a thickness of 3 μm to 350 μm by a liquid quenching method such as a single roll method or a twin roll method using industrial raw materials. It is possible to produce a wide alloy ribbon having a thickness of 15 mm or more. In particular, the amorphous alloy of the present invention can provide a wide amorphous soft magnetic alloy ribbon having a thick plate thickness in the range of 40 μm to 350 μm.
Examples of the method for producing the alloy ribbon or wire of the present invention include a single roll method, a twin roll method, a rotating liquid prevention method, and a molten glass spinning method. Further, it is desirable that the molten metal temperature at the time of rapid cooling of the molten metal is higher by about 50 ° C. to 300 ° C. than the melting point of the alloy.

When a ribbon is produced by a rapid quenching method such as a single roll method, the alloy ribbon according to the present invention is used in the atmosphere, in an atmosphere such as local Ar or nitrogen gas, in an inert gas such as Ar or He, in nitrogen gas or Manufacture while reducing the pressure or controlling the gas atmosphere near the roll surface at the tip of the nozzle. Also, there are cases where CO ₂ gas is blown onto the roll, or alloy ribbon production is performed while CO gas is burned near the roll surface near the nozzle.

  In the case of the single roll method, the peripheral speed of the cooling roll is desirably in the range of about 2 m / s to 80 m / s, and the cooling roll is made of pure copper, Cu—Be, Cu—Cr, Cu—Zr, Cu, which has good heat conduction. Copper alloys such as -Zr-Cr, Cu-Zr-Si, Cu-Ni-Si are suitable. When manufacturing a strip in a large amount, when manufacturing a strip having a large plate thickness or a wide strip, it is preferable that the cooling roll has a water cooling structure. The ribbon can be used after being heat-treated and mechanically pulverized into powder or flakes.

  The amorphous soft magnetic alloy of the present invention can produce a powder, and an amorphous soft magnetic alloy powder having a particle size of 350 μm or less can be obtained using industrial raw materials. Further, it is possible to obtain an amorphous soft magnetic alloy powder having a large particle size in which a powder having a particle number of 50% or more has a particle size of 30 μm or more. The amorphous soft magnetic alloy powder of the present invention is a water atomizing method, a gas atomizing method, an oil atomizing method, a gas bubbling spray method, a spray roll splat method, a roll spray method, a centrifugal spray method, a rotating liquid spray method, a gas quench centrifugal spray method, It can be manufactured by various methods such as spray disk / splat method. Further, the amorphous soft magnetic alloy powder of the present invention can be flattened by an attritor or a bead mill.

  In addition, the amorphous alloy of the present invention has a rod shape with a diameter exceeding 200 μm and a plate thickness of 200 μm by die casting method, arc melting casting method, arc melting tilt casting method, high pressure injection molding method, centrifugal casting method, strip casting, etc. A plate-like bulk-shaped amorphous soft magnetic alloy can be produced.

The heat treatment is usually performed in an inert gas such as argon gas, nitrogen gas or helium, but heat treatment in the air or heat treatment in vacuum is also possible. The soft magnetic alloy of the present invention can apply a magnetic field or stress to the alloy during at least a part of the heat treatment step. Induction magnetic anisotropy can be imparted by performing heat treatment in a magnetic field or heat treatment under stress. The heat treatment in the magnetic field is performed by applying a magnetic field having a sufficient strength for at least a part of the heat treatment period. The strength of the magnetic field to be applied depends on the shape of the alloy, and it is preferable to apply a sufficient magnetic field at which the alloy is magnetically saturated. In the case of a ribbon, generally, a magnetic field of 1 kAm ⁻¹ or more is applied when applied in the width direction of the ribbon, and a magnetic field of 80 Am ⁻¹ or more is applied when applied in the longitudinal direction. As the magnetic field to be applied, any of direct current, alternating current, and a repetitive pulse magnetic field may be used. It is desirable to perform the heat treatment in an inert gas atmosphere having a dew point of −30 ° C. or lower. When the heat treatment is performed in an inert gas atmosphere having a dew point of −60 ° C. or lower, the variation is further reduced and a more preferable result is obtained. . The maximum temperature reached during the heat treatment is usually in the range of 200 ° C to 500 ° C. In the case of the heat treatment pattern held at a constant temperature, the holding time at the constant temperature is usually 100 hours or less, preferably 4 hours or less from the viewpoint of mass productivity. The average rate of temperature increase during the heat treatment is preferably 0.1 ° C./min to 10000 ° C./min, more preferably 1 ° C./min to 10000 ° C./min, particularly preferably 3000 ° C./min to 10000 ° C./min, average The cooling rate is preferably 0.1 ° C./min to 10000 ° C./min, more preferably 1 ° C./min to 5000 ° C./min, and an alloy having a particularly low magnetic core loss can be obtained within this range. The heat treatment is not limited to a single step, and a multi-step heat treatment or a plurality of heat treatments can be performed. Furthermore, the alloy can be heated and heat-treated by passing a direct current, an alternating current or a pulsed current through the alloy. In addition, during the heat treatment, the magnetic properties can be improved by applying heat treatment while applying tension or compressive force.

Another aspect of the present invention is a magnetic core using the amorphous soft magnetic alloy. The magnetic core can be manufactured using not only a bulk type but also an amorphous soft magnetic alloy ribbon or amorphous soft magnetic alloy powder. The amorphous soft magnetic alloy of the present invention is coated with a powder or film of SiO ₂ , MgO, Al ₂ O ₃ or the like as necessary, and the surface of the alloy ribbon, the surface of the alloy flakes or the surface of the alloy powder is surface-treated by chemical conversion treatment, and the surface is applied. An insulating layer is formed, an oxide insulating layer is formed on the surface by anodic oxidation treatment, or an organic resin layer is formed and interlayer insulation is performed. By applying such treatment, The high frequency characteristics of the magnetic core are further improved, and more preferable results are obtained. This is because, particularly when parts such as magnetic cores and sheets are produced, the effect of eddy currents at high frequencies across the layers of alloy ribbons and alloy flakes or between alloy particles is reduced and the loss at high frequencies is improved. is there.

  The amorphous soft magnetic alloy powder magnetic core of the present invention using the amorphous soft magnetic alloy powder of the present invention has a small core loss and a small characteristic variation even when manufactured using industrial raw materials. The powder magnetic core of the present invention is obtained by adding an insulating binder composed of an epoxy resin, a phenol resin or a silicone resin to the amorphous soft magnetic alloy powder of the present invention, and further a lubricant such as zinc stearate or stearicsan Al. Are mixed and pressure molded with a press machine. Further, the magnetic properties can be improved by heat treatment. In addition to being performed at room temperature, the pressure molding can be performed by heating and warm pressing, hot pressing, plasma discharge sintering, or the like. The uniaxial pressure is preferably 400 MPa or more and 2500 MPa or less. Moreover, after pressure-molding using low melting glass etc., each powder is couple | bonded by heating and a powder magnetic core can also be manufactured.

In addition, an inorganic insulating film such as SiO ₂ , Al ₂ O _3, or MgO is formed on the surface of the amorphous soft magnetic alloy powder of the present invention, or covered with insulating fine particles such as SiO ₂ , Al ₂ O ₃ , or MgO. When the treatment is performed, the insulation between the amorphous alloy powders is improved, and the high-frequency characteristics are improved by reducing the eddy current loss, and a preferable result is obtained. Moreover, the filling rate of the amorphous alloy powder in the powder magnetic core can be improved by classifying and blending powders having different particle sizes. Further, a powder magnetic core can be produced by mixing crystalline metal powder such as Fe-based, Fe-Si-based, Fe-Ni-based, Fe-Cr-based and the like and the amorphous alloy powder of the present invention. In this case, it is preferable that the crystalline metal powder is easily deformed and the filling rate of the magnetic particles is improved, but in order to maintain the characteristics of low loss, the volume fraction of the amorphous alloy powder is larger than that of the crystalline metal powder. Is preferred.

  Another aspect of the present invention is a magnetic component using the magnetic core. Since the magnetic core of the present invention has a low loss, when used in a transformer, choke coil, motor, etc., a magnetic component with a small temperature rise and a low loss can be realized, which contributes to an improvement in the efficiency of the apparatus. Moreover, since it contributes also to size reduction when using it at a comparatively low frequency, it is preferable.

  According to the present invention, it is used for magnetic components such as various reactors, various choke coils / inductors, various transformers, iron cores for motors, magnetic shields, magnetic sensors, current sensors, etc., and particularly suitable for magnetic cores of reactors, choke coils and transformers. Amorphous soft magnetic alloy, amorphous soft magnetic alloy ribbon, amorphous soft magnetic alloy powder, and low-loss magnetic core using the same and suitable for mass production with excellent characteristics, good amorphous forming ability and excellent magnetic properties Therefore, the effect is remarkable.

EXAMPLES Hereinafter, although this invention is demonstrated according to an Example, this invention is not limited to these.
Example 1
An alloy ribbon having a thickness of 43 μm and a width of 50 mm having the composition shown in Table 1 was prepared by a single roll method using a roll made of Cu—Cr alloy obtained by water cooling. The produced soft magnetic alloy ribbon was subjected to X-ray diffraction and heat treatment on the roll surface side and subjected to magnetic measurements. Table 1 shows the results. The alloy of the present invention did not show a crystal peak, and as a result of X-ray diffraction, it was an amorphous single phase and showed a low coercive force Hc. On the other hand, in the soft magnetic alloy ribbon deviating from the alloy composition of the present invention, a crystal peak was observed and a crystal phase was formed. In addition, it was confirmed that the soft magnetic alloy ribbon deviating from the alloy composition of the present invention has a large Hc and inferior soft magnetic properties.

(Example 2)
Alloy powders having the compositions shown in Table 2 were produced by the gas atomization method. The produced alloy powder was subjected to X-ray diffraction. Next, this powder was spheroidized to obtain a powder having a particle size of 30 μm to 60 μm.
This alloy powder was subjected to X-ray diffraction. The alloy powder of the present invention exhibited a halo pattern unique to an amorphous alloy. On the other hand, a crystal peak was observed in the alloy powder outside the present invention, and it was confirmed that a crystal phase was formed in addition to the amorphous phase. Next, this alloy powder was heat-treated. As a result of X-ray diffraction, a halo pattern peculiar to amorphous was confirmed. The coercive force Hc of the alloy powder was measured with a vibration magnetometer (VSM) for soft magnetic materials. The obtained results are shown in Table 2. The alloy powder of the present invention did not have a crystal peak, was considered to be an amorphous single phase from the results of X-ray diffraction, and exhibited low Hc. On the other hand, in the soft magnetic alloy powder deviated from the alloy composition of the present invention, a crystal peak was observed and a crystal phase was formed. Further, it was confirmed that the soft magnetic alloy powder deviated from the alloy composition of the present invention has a large Hc and inferior in soft magnetic properties.

(Example 3)
Fe _bal. Si ₉ B ₁₂ P ₅ (atomic%) as a main component, Mn 0.12% by mass, Al 0.0009% by mass, Ti 0.003% by mass, Cu 0.15% and S 0.005% by mass A ring-shaped bulk alloy having a thickness of 150 μm was produced. As a result of X-ray diffraction, a halo pattern peculiar to amorphous alloys was shown. Next, this alloy was heat-treated, and magnetic characteristics evaluation and X-ray diffraction were performed. As a result of X-ray diffraction, a halo pattern peculiar to amorphous alloys was shown. Hc was 2.9 A / m, indicating a low value. For comparison, the main components are the same, Mn 0.16% by mass, Al 0.12% by mass, Ti 0.15% by mass, Cu 0.02%, S 0.002% by mass, 150 μm thick A ring-shaped sample outside the present invention was prepared. The sample of the soft magnetic alloy deviating from the alloy composition of the present invention had a large Hc of 19.4 A / m, and a crystal peak was confirmed as a result of X-ray diffraction.

Example 4
Fe _bal. Si ₁₀ B ₁₂ P ₄ C _0.5 (atomic%) as a main component, Mn 0.11% by mass, Al 0.0010% by mass, Ti 0.008% by mass, Cu 0.14%, S 0. The amorphous alloy ribbon of the present invention having a width of 150 mm and a thickness of 50 μm containing 006% by mass was prepared by a single roll method using a water-cooled Cu—Cr—Zr alloy roll. As a result of X-ray diffraction, a halo pattern peculiar to amorphous was confirmed. Next, a polyimide resin was applied to the surface of the alloy ribbon, and two sheets were stacked, and then heat-pressed to prepare a laminated strip. The thickness of the polyimide resin adhesive layer was about 1 μm. This amorphous laminated band was processed into a ring shape having an outer diameter of 25 mm and an inner diameter of 20 mm, and 80 sheets were laminated to produce a laminated core. The laminated core was heat-treated at 450 ° C. for 1 hour. Further, a winding was applied to the laminated core, and the core loss at 20 kHz and 0.2 T was measured. The magnetic core loss was 28 W / kg. For comparison, Fe _bal. Si ₁₀ B ₁₂ P ₄ C _0.5 (atomic%) as a main component, Mn 0.11% by mass, Al 0.154% by mass, Ti 0.15% by mass, Cu 0.02%, and S 0.0. An amorphous alloy ribbon outside the present invention containing 002% by mass was produced. As a result of producing a laminated core by the same process and measuring the magnetic core loss at 20 kHz and 0.2 T, the magnetic core loss was 112 W / kg, which was much inferior to the laminated core of the present invention. Further, a part of the magnetic path of the magnetic core of Example 4 was cut to form a gap, and winding was performed to produce a choke coil. As a result of measuring the DC superposition characteristics, it was confirmed that the DC superposition characteristics were superior to those of the ferrite choke coil.

(Example 5)
Fe _bal. Si ₁₀ B ₁₁ P ₅ Cr _0.5 (atomic%) as a main component, Mn 0.16% by mass, Al 0.0006% by mass, Ti 0.005% by mass, Cu 0.09%, and S 0.0. A soft magnetic alloy powder having a composition containing 004% by mass was produced by a water atomization method. Next, this powder was spheroidized to obtain a powder having a particle size of 30 μm to 60 μm. This alloy powder was subjected to X-ray diffraction. The alloy of the present invention exhibited a halo pattern unique to amorphous alloys. Next, an insulating binder composed of a silicone resin was added to the powder, and zinc stearate as a lubricant was further mixed and pressure-molded with a press to prepare a dust core. The dust core was heat treated at 450 ° C. for 1 hour. The core loss at 100 kHz, 0.1 T of the dust core after the heat treatment was measured. The magnetic core loss was a low value of 220 kW / m ³ . For comparison, Fe _bal. Si ₁₀ B ₁₁ P ₅ Cr _0.5 (atomic%) as a main component, Mn 0.18% by mass, Al 0.19% by mass, Ti 0.15% by mass, Cu 0.02% and S 0.0. A soft magnetic alloy powder having a composition containing 002% by mass deviating from the alloy composition of the present invention was produced by the same process, and a powder magnetic core was produced by the same process using this soft magnetic alloy powder. As a result of measuring the core loss at 100 kHz and 0.1 T of the dust core after the heat treatment, the core loss was 1500 kW / m ³ , which was a remarkably high value.

Used for magnetic parts such as various reactors, various choke coils / inductors, various transformers, motor cores, magnetic shields, magnetic sensors, current sensors, etc. Especially for mass production with characteristics suitable for magnetic cores of reactors, choke coils and transformers Amorphous soft magnetic alloy, amorphous soft magnetic alloy ribbon, amorphous soft magnetic alloy powder, low-loss magnetic core using the same, and high-performance magnetic parts using the same Can provide.

Claims (13)

Fe _100-x-y-z Si _x B _y P _z (atomic%) is the main component, and x, y, and z are 0.5 ≦ x ≦ 15, 5 ≦ y ≦ 25, z ≦ 15, and 18 ≦, respectively. x + y + z ≦ 30 is satisfied, Mn is 0.01% by mass to 0.3% by mass, Al is 0.0001% by mass to 0.01% by mass, and Ti is 0.001% by mass or more with respect to the main component. An amorphous soft magnetic alloy characterized by containing 0.03% by mass or less, Cu by 0.005% by mass to 0.2% by mass and S by 0.001% by mass to 0.05% by mass. The amorphous soft magnetic alloy according to claim 1, wherein a part of Fe is substituted with at least one element selected from Co and Ni. The amorphous soft magnetic alloy according to claim 1 or 2, wherein 5 atomic% or less of Fe is substituted by C. 4. The element according to claim 1, wherein 3 atomic% or less of Fe is substituted with at least one element selected from Cr, V, Nb, Mo, Ta, W, Zr, and Hf. The amorphous soft magnetic alloy described. The amorphous soft magnetic alloy according to any one of claims 1 to 3, wherein 1 atomic% or less of B is substituted with at least one element selected from Ge, Ga, and Sn. An amorphous soft magnetic alloy ribbon comprising the amorphous soft magnetic alloy according to any one of claims 1 to 5 and having a plate thickness in a range of 3 µm to 350 µm. The amorphous soft magnetic alloy ribbon according to claim 6, wherein the plate thickness is in the range of 40 µm to 350 µm. An amorphous soft magnetic alloy powder comprising the amorphous soft magnetic alloy according to any one of claims 1 to 5 and having a particle size of 350 µm or less. The amorphous soft magnetic alloy powder according to claim 8, wherein the powder having a particle number of 50% or more has a particle size of 30 μm or more. A magnetic core comprising the amorphous soft magnetic alloy according to any one of claims 1 to 5. A magnetic core using the amorphous soft magnetic alloy ribbon according to claim 6 or 7. A magnetic core comprising the amorphous soft magnetic alloy powder according to claim 8 or 9. A magnetic component using the magnetic core according to claim 10.