JP2009170533A - Conveyance chamber where conveyance robot is installed, and maintenance method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveyance chamber to/from which a conveyance robot can be easily attached and detached for maintenance etc., and to provide a method of easily detaching the conveyance robot from the conveyance chamber and a method of easily attaching the conveyance robot to the conveyance chamber. <P>SOLUTION: The conveyance chamber 10 where the conveyance robot 1 is installed and whose atmospheric pressure can be adjusted is supported on a floor surface 8 via a process chamber 2 and a work chamber as supporting bodies. A lower cover plate 12a, a side cover plate 12b and an upper cover plate 12c which cover a frame constituting the conveyance chamber 10 in an airtight state are disposed, and the base unit 6 of the conveyance robot 1 is fitted, in a suspended state, to the lower frame of the frame via an opening portion provided to the lower cover plate 12a. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a transfer chamber in which a transfer robot is installed, and more particularly, to a transfer chamber in which a transfer robot is set in and out of an airtight environment during a process such as etching of a solar cell substrate or the like.

In recent years, articulated transfer robots have been used in various fields of industry, for example, in the manufacturing site of solar cells, etc., for handling solar cell substrates.
In the process of manufacturing a solar cell, there is a process of performing an etching process, and a transfer robot is also used for putting a work (solar cell substrate) in and out of a process chamber in which the etching process is performed. For example, Patent Document 1 discloses an etching process that is performed to reduce the thickness of a transparent electrode layer on a substrate. Further, as a method for increasing the efficiency of a solar cell, Patent Document 2 discloses an etching process performed as a method for forming fine irregularities on the surface of a solar cell in order to reduce reflection of light incident on the solar cell. Yes. In any case, the etching process requires a high vacuum environment, and the process chamber in which the etching process is performed is an airtight chamber capable of adjusting the atmospheric pressure.
JP-A-8-222749 JP 2004-146700 A

  As described above, solar cells have been improved in performance. However, as environmental problems are taken up in various forms, cost reduction for meeting the demand for solar cells is also a major problem. For this reason, it is an urgent issue to increase the size of a workpiece to be processed at one time and to further reduce the processing time.

  In general, since it takes time to make a certain closed space close to a vacuum state close to a vacuum state, for example, a closed space of a separate chamber adjacent to the closed space as a process chamber is provided, and processing is performed in the process chamber. A closed space in a separate chamber is also kept at a low pressure, and workpieces are taken in and out between the two closed spaces. The transfer robot used in processes such as etching processing for solar cell fabrication is also installed in an airtight chamber that can adjust the atmospheric pressure, so that workpieces can be taken in and out of the process chamber in a high vacuum state in the same airtight chamber in a high vacuum state. Has been.

  However, it is desirable that the factory that manufactures solar cells be a clean room in which the interior is kept at a relatively high cleanness, and it is more convenient to increase the cleanliness if the interior space is not enlarged. It may be provided low. In such a factory, when a machine such as a robot is removed from the apparatus for maintenance, there is a problem that it is extremely difficult to lift the machine with a crane. In some cases, it is necessary to disassemble the entire apparatus.

  The present invention has been made paying attention to such a problem, and an object of the present invention is to provide a transfer robot for maintenance in a transfer chamber in which a transfer robot for taking in and out a workpiece in an airtight environment is installed. An object of the present invention is to provide a transfer chamber that can be easily mounted and removed. Another object of the present invention is to provide a method for easily removing the transfer robot from the transfer chamber and a method for easily attaching the transfer robot to the transfer chamber.

  In order to solve the above problem, the invention of the transfer chamber in which the transfer robot according to claim 1 is installed is provided on the floor surface via a support in the transfer chamber in which the transfer robot is installed and kept in a high vacuum state. Frame, and a lower cover plate, a side cover plate, and an upper cover plate that cover the lower portion, the side portion, and the upper portion of the frame in an airtight state, and through the opening provided in the lower cover plate Make sure that the base unit of the transfer robot is suspended from the frame, the arm device of the transfer robot is connected to the base unit, and the hand that handles the workpiece is connected to the tip of the arm of the arm device. It is a feature. As used herein, “attached in a suspended state” does not necessarily mean that it is suspended in a suspended state, but at least the base unit of the transfer robot is attached to a frame located above it. Thus, it is intended to include holding and positioning.

  According to the first aspect of the present invention, the frame constituting the transfer chamber is supported on the floor surface via the support, and the base unit of the transfer robot is attached to the lower frame of the frame in a suspended state. . Therefore, at least the lower part of the base unit of the transfer robot is a space, and the base unit removed from the suspended state with respect to the frame can be lowered onto the floor surface immediately below the transfer chamber.

  According to a second aspect of the present invention, in the transfer chamber according to the first aspect, a space for allowing the arm device to pass in the vertical direction is formed in the lower frame constituting the lower portion of the frame. A mounting portion for mounting the base unit in a suspended state is formed.

  According to the second aspect of the present invention, the arm device temporarily placed in the frame after the base unit is removed can be lowered to the floor surface below the transfer chamber through the space portion of the frame. In addition, after the maintenance-completed arm device is carried directly under the transfer chamber by a carriage or the like, it can be lifted through a space portion of the frame by a crane or the like and temporarily placed in the frame.

  According to a third aspect of the present invention, in the transfer chamber according to the first or second aspect, the base unit has the frame so that a space allowing the operation of the lifter is formed between a bottom portion and a floor surface. It is characterized by being attached in a suspended state. In addition, the "lifter" used here can be rephrased as a traveling-type jack, and it is possible to move an object placed on a pedestal up and down, and it is also possible to move while the object is placed It points to something.

According to the third aspect of the present invention, the base unit supported by the lifter can be removed from the attachment portion of the frame, and the base unit can be carried to the maintenance factory while being mounted on the lifter. In addition, the base unit that has been subjected to maintenance can be placed on the lifter, carried directly under the transfer chamber, lifted up, and attached to the attachment portion of the frame in a suspended state.

  According to a fourth aspect of the present invention, in the transfer chamber in which the transfer robot according to any one of the first to third aspects is installed, the bottom of the base unit is always supported by a lifter. It is a feature.

  According to the invention described in claim 4, since the base unit is always supported by the lifter, the base unit attached to the attachment portion of the frame can maintain the posture more reliably during the operation of the transfer robot. .

  According to a fifth aspect of the present invention, in the transfer chamber in which the transfer robot according to any one of the first to fourth aspects is installed, the transfer chamber is formed in a polygonal column shape and has at least one side portion. Is provided with a process chamber for processing workpieces, which is hermetically connected to the process chamber via an open / close door portion, and the work chamber has an open / close door portion on one side where the process chamber is not connected. It is characterized by being connected airtightly.

  According to the fifth aspect of the present invention, the transfer chamber is connected to at least one process chamber and the work chamber, and is supported on the floor surface by using the process chamber and the work chamber as a support. Therefore, since the transfer chamber is supported on the floor surface without providing a support column or the like below the transfer chamber, a work space can be secured below the transfer chamber and the base unit.

  The invention of the transfer chamber maintenance method according to claim 6 is the transfer chamber maintenance method according to any one of claims 1 to 5, wherein the crane can be operated by removing the upper cover plate. A space is secured, the connection between the arm device and the base unit is released, the arm device is temporarily placed on the frame at a predetermined distance from the base unit, and is attached to the frame in a suspended state. The base unit is removed, placed on a lifter, moved from below the transfer chamber, the lower cover plate is removed, and the arm device is suspended on a carriage to be movable. It is.

  According to the sixth aspect of the present invention, it is possible to carry out the arm device and the base unit from the transfer chamber without lifting up the transfer chamber during maintenance of the transfer robot. Therefore, even in a clean room with a low ceiling, the arm device and the base unit installed in the transfer chamber can be removed and carried out to the maintenance factory.

  The invention of the transfer chamber maintenance method according to claim 7 is the transfer chamber maintenance method according to any one of claims 1 to 5, wherein the crane can be operated by removing the upper cover plate. After securing the space and removing the lower cover plate, the connection state between the arm device and the base unit is released, and the arm device is temporarily placed on the frame at a predetermined distance from the base unit, The base unit attached in a suspended state to the frame is removed, placed on a lifter, moved from below the transfer chamber, and the arm device is suspended on a carriage to be movable. .

  According to the seventh aspect of the present invention, the arm device and the base unit can be carried out of the transfer chamber without lifting up the transfer chamber during maintenance of the transfer robot. Therefore, even in a clean room with a low ceiling, the arm device and the base unit installed in the transfer chamber can be removed and carried out to the maintenance factory.

  An invention of the maintenance method of the transfer chamber according to claim 8 is the maintenance method of the transfer chamber according to any one of claims 1 to 5, wherein the frame is lifted by the arm device carried by a carriage. Temporarily placed on, covered the lower part of the frame with the lower cover plate, lifted up the base unit carried by a lifter and attached to the frame in a suspended state, removed the arm device from the temporarily placed state and The frame is connected to a base unit, and the frame is covered with the upper cover plate.

  According to the eighth aspect of the present invention, the arm device and the base unit can be carried into the transfer chamber without being lifted above the transfer chamber. Therefore, even in a clean room with a low ceiling, the arm device and the base unit can be carried directly under the transfer chamber, and the arm device and the base unit can be set in the transfer chamber.

  According to the present invention, it is possible to provide a transfer chamber in which a transfer robot can be easily attached and detached for maintenance or the like in a transfer chamber in which a transfer robot for taking in and out a workpiece in an airtight environment is installed. Further, it is possible to provide a method for easily removing the transfer robot from the transfer chamber and a method for easily attaching the transfer robot to the transfer chamber.

(First embodiment)
Hereinafter, an embodiment of a transfer chamber embodying the present invention will be described with reference to FIGS. FIG. 1 shows a state in which the upper cover plate 12c is removed, and the process chamber 2 and the process chamber 2 located behind the transfer chamber 10 shown in FIG. 1 are shown in FIG. It is omitted.

  In the transfer chamber 10 in this embodiment, the process chamber 2 is hermetically connected to the left side and the upper side of FIG. The door of the open / close door portion 4a is opened and closed when a workpiece is carried in and out of the transfer chamber 10 so that the atmospheric pressure in the process chamber can always be kept in a high vacuum state. Further, the work chamber 3 for carrying in and out the work 3a is hermetically connected to the lower side of the transfer chamber 10 in FIG. 1 through the open / close door portion 4a, and is opposite to the surface facing the transfer chamber 10. An open / close door portion 4b is airtightly provided on the side surface of the work chamber 3 on the side. The door of the open / close door portion 4a of the work chamber 3 is opened and closed so that the air pressure in the transfer chamber 10 can be kept in a high vacuum state at all times, and the air pressure in the work chamber 3 becomes a high vacuum state. It is opened when Further, the door of the open / close door portion 4b is opened and closed when the door of the open / close door portion 4a is closed, and is opened and closed when the work 3a is carried in from another process or carried out to another process.

  In this embodiment, a portal crane 9 is provided so as to straddle the transfer chamber 10 and the process chamber 2. The portal crane 9 is of a type that can be operated even in a clean room with a low ceiling, and can move on the floor surface 8. Then, using the hook 9a of the traveling body on the portal crane 9, the arm device 5 is lifted or hung when the transfer robot 1 described later is detached or attached. Although the portal crane 9 is used in the present embodiment, an arm type crane or the like can also be used.

  Each of the two process chambers 2 is supported by a support base 2a, and the work chamber 3 is also supported by a support base (not shown). The transfer chamber 10 is supported on the floor surface 8 by four support pillars 10a at the four corners of the bottom. As described above, the transfer chamber 10 is connected to the process chamber 2 and the work chamber 3 without supporting the transfer chamber 10 by the support pillar 10a as a support, so that the transfer chamber 10 is placed on the floor surface 8 via the support base 2a. It can also be supported. In that case, the process chamber 2 and the work chamber 3 serve as a support for the transfer chamber 10. In the present embodiment, the number of support pillars 10a is four. However, the number is not limited to four, and a plurality of appropriate pillars can be used.

  As shown in FIG. 1, the lower frame 11 a in the frame 11 that is framed in a substantially rectangular parallelepiped shape using a shape steel is composed of a substantially square frame and a pair of T-shaped frames that face in opposite directions. A space 13 is formed between the T-shaped frames to allow passage of the suspended arm device 5 (described later) in the vertical direction. As shown in FIG. 2, the lower frame 11 a is provided with an attachment portion 14, and the base unit 6 of the transport robot 1 is attached to the attachment portion 14 in a suspended state with a bolt or the like (not shown). A space in which the lifter can be operated is secured between the lower portion of the base unit 6 and the floor surface 8 at this time. The lower frame 11a excluding the mounting portion 14 is airtightly covered with the lower lid plate 12a, and the side portion and the upper portion of the frame 11 are airtightly covered with the side lid plate 12b and the upper lid plate 12c, respectively. Yes. The lower cover plate 12a is provided with an opening (not shown) for attaching the base unit 6. The base unit 6 is not only mounted in a suspended state with respect to the mounting portion 14 of the lower frame 11a, but if the bottom portion 6a is always supported by the lifter 51, when the arm device 5 operates, The posture of the transfer robot 1 can be maintained more reliably.

  As shown in FIGS. 1 and 2, the arm device 5 is formed on the arm base 5 a by arranging a pair of arms in which a driving arm 5 b and a driven arm 5 c are pivotally connected in a multi-joint manner on the left and right. . Each follower arm 5c is connected to a fork-shaped hand 7 to carry the workpiece 3a. The arm device 5 is connected to the base unit 6 in the arm base 5a to form the transfer robot 1.

(How to remove the transfer robot from the transfer chamber)
Next, a method of removing the transfer robot 1 from the transfer chamber for maintenance of the transfer robot 1 and cleaning of the transfer chamber 10 will be described with reference to FIGS. 1 and 2, the arm device 5 is extended to the outside of the transfer chamber 10 after removing the side cover plate 12 b in preparation for removing the transfer robot 1 from the state in which the transfer robot 1 is installed in the transfer chamber 10. FIG. 3 shows a state in which the pair of hands 7 is removed from the arm device 5 and the upper cover plate 12c is further removed. At this time, since the upper cover plate 12c has a flat plate shape, the lifting height is sufficient to allow the upper cover plate 12c to be shifted in the horizontal direction from the upper portion of the frame 11.

  Next, as shown in FIG. 4, in the transfer chamber 10 from which the upper cover plate 12c is removed, the arm base 5a is disconnected from the base unit 6 and then the arm device 5 is lifted, and the arm device 5 and the lower frame 11a are lifted. A sleeper 41 and a pedestal 42 are placed in that order, and the arm device 5 is suspended and temporarily placed on the pedestal 42. At this time, unlike the state shown in FIG. 1, the arm device 5 is folded so that the arm can be accommodated in the minimum space. Further, as shown in FIG. 5, the sleepers 41 and the pedestals 42 are arranged such that the two sleepers 41 are placed so as to straddle the space 13 of the lower frame 11 a and are close to one end of the two sleepers 41. A pedestal 42 is placed on the top. If the arm device 5 is temporarily placed in such an arrangement, the space 13 provided at the center of the lower frame 11a is used as a work space for removing the base unit 6 from the mounting portion 14 of the lower frame 11a. Available.

  In FIG. 6, after placing the lifter 51 directly below the base unit 6, the base is raised to support the base unit 6 from below, and in this state, the base unit 6 is removed from the mounting portion 14 of the lower frame 11a. The state put on 51 pedestals is shown. At this time, the pedestal of the lifter 51 is lowered to the lowest point so that the lifter 51 can move safely. Therefore, the upper end of the base unit 6 is at a position lower than the lower surface of the lower frame 11a, and the base unit 6 can be safely moved to the maintenance factory from the bottom of the transfer chamber 10 together with the lifter 51.

  As a final step, a step of moving the arm device 5 out of the transfer chamber 10 will be described with reference to FIGS. As shown in FIG. 7, the arm device 5 is moved from the temporary placement position to the center of the lower frame 11 a and is disposed at a position where it can pass through the space 13 downward. Then, after the lower cover plate 12a is removed from the lower frame 11a, the arm device 5 is placed on a sleeper 41 rearranged on the floor surface 8 through the space 13 as shown in FIG. It is suspended and mounted on the pedestal 42. Thereafter, the arm device 5 is placed on a cart (not shown) and can be moved to a maintenance factory. In this embodiment, the lower cover plate 12a is removed from the lower frame 11a after the base unit 6 is removed from the mounting portion 14 of the lower frame 11a. However, the lower cover plate 12a is removed by removing the upper cover plate 12c. Later, it may be performed prior to disconnecting the arm base 5a and the base unit 6 in advance.

(Method of attaching the transfer robot 1 to the transfer chamber)
Next, a method for attaching the transfer robot 1 to the transfer chamber will be described. Since the process is the reverse order of the method for removing the transfer robot 1 from the transfer chamber, a brief description will be given.

  As shown in FIGS. 7 and 8, the arm device 5 arranged immediately below the center of the transfer chamber 10 is lifted and moved sideways to remove the center portion of the lower frame 11a as shown in FIG. Temporarily placed on a pedestal 42 on a sleeper 41 arranged in advance. Next, FIG. 4 shows a state in which the base unit 6 placed on the lifter 51 is disposed immediately below the center of the transfer chamber 10 and attached to the attachment portion 14 in a state where the base unit 6 is lifted up. When the arm device 5 is lifted, the sleeper 41 and the base 42 are removed, the arm base 5a of the arm device 5 is connected to the base unit 6, and the hand 7 is attached to the arm device 5, as shown in FIGS. Thus, the attachment of the transfer robot 1 to the transfer chamber 10 is completed.

According to the transfer chamber, the method for removing the transfer robot from the transfer chamber, and the method for attaching the transfer robot to the transfer chamber, the following effects can be obtained.
(1) In the above embodiment, the frame 11 constituting the transfer chamber 10 is supported on the floor surface 8 via the process chamber 2 and the work chamber 3 as supports, and the transfer robot is mounted on the lower frame 11a of the frame 11. One base unit 6 is attached in a suspended state. Therefore, a space is secured at least below the base unit 6, and the base unit 6 removed from the suspended state with respect to the lower frame 11 a can be lowered onto the floor surface 8 immediately below the transfer chamber 10. Therefore, since it is not necessary to lift the transfer robot 1 and remove it from above the transfer chamber 10, even in a clean room with a low ceiling, the transfer chamber 10 can be easily removed and attached for maintenance or the like. Can provide.

  (2) In the above embodiment, the arm device 5 temporarily placed on the lower frame 11a after the base unit 6 is removed is lowered to the floor surface 8 directly below the transfer chamber 10 through the space 13 of the lower frame 11a. be able to. Moreover, after carrying out maintenance, the arm apparatus 5 can be lifted through the space 13 of the lower frame 11a with a crane or the like and temporarily placed on the lower frame 11a after being transported directly under the transfer chamber 10 with a carriage or the like. Therefore, the transfer chamber 10 in which the arm device 5 can easily pass through the space 13 of the lower frame 11a can be provided for maintenance and the like.

  (3) In the above-described embodiment, the base unit 6 supported by the lifter 51 can be removed from the mounting portion 14 of the lower frame 11a, and the base unit 6 can be carried to the maintenance factory while being mounted on the lifter 51 as it is. . In addition, the base unit 6 that has undergone maintenance can be placed on the lifter 51, carried directly under the center of the transfer chamber 10, lifted up, and attached to the attachment portion 14 of the lower frame 11a in a suspended state. Therefore, it is possible to provide the transfer chamber 10 in which a lifter can be used for loading and unloading the base unit 6 immediately below the transfer chamber 10 for maintenance and the like.

  (4) In the above embodiment, the transfer chamber 10 is supported on the floor surface 8 by the four support pillars 10a at the four corners of the bottom. Therefore, a sufficient working space can be secured below the transfer chamber 10 and the base unit 6.

(Example of change)
In addition, you may change the said embodiment as follows.
In the above embodiment, the frame 11 is framed in a substantially rectangular parallelepiped shape. However, depending on the number of process chambers 2 and work chambers 3 connected to the transfer chamber 10, the frame 11 may have another polygonal column shape, for example. It may be a pentagon or a hexagon. In that case, it is preferable to increase the number of support pillars 10a as appropriate.
In the above embodiment, the transfer chamber 10 is connected to the process chamber 2 and the work chamber 3 so that the process chamber 2 and the work chamber 3 are supported on the floor surface 8 as a support. A plurality of support columns may be provided at positions other than the central portion of 11a to support the transfer chamber 10 on the floor surface 8.
In the above embodiment, the lifter is used for attaching and detaching the base unit 6. However, a crane may be used by passing a suspension wire through the gap or the space 13 of the lower frame 11a.

The top view which shows embodiment of this invention. The front view of the partial cross section which similarly shows embodiment. The front view of the partial cross section which shows the upper body which removes an upper cover plate from a conveyance chamber in embodiment. The front view of the partial cross section which shows the state by which the arm apparatus was temporarily placed in embodiment. Same top view The front view of the partial cross section which shows the state which removed the base unit from the attachment state in embodiment. The top view which shows the state which hangs down an arm apparatus in embodiment. The front view of the partial cross section which shows the state which suspended the arm apparatus in embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Transfer robot, 2 ... Process chamber, 3 ... Work chamber, 3a ... Work, 4a, 4b ... Opening / closing door part, 5 ... Arm apparatus, 6 ... Base unit, 7 ... Hand, 8 ... Floor surface, 10 ... Transfer chamber 11 ... Frame, 11a ... Lower frame, 12a ... Lower lid plate, 12b ... Side lid plate, 12c ... Upper lid plate, 13 ... Space portion, 14 ... Mounting portion, 51 ... Lifter.

Claims (8)

  In a transfer chamber in which a transfer robot is installed and maintained in a high vacuum state, a frame supported on the floor surface via a support, a lower lid plate that covers the lower, side and upper portions of the frame in an airtight state, side A base unit of the transfer robot is attached to the frame in a suspended state via an opening provided in the lower cover plate, and an arm device of the transfer robot is mounted on the base unit. A transfer chamber in which a transfer robot is connected, wherein a hand for handling a workpiece is connected to the tip of the arm of the arm device.   The lower frame constituting the lower part of the frame is formed with a space for allowing the arm device to pass in the vertical direction, and an attachment for attaching the base unit in a suspended state. A transfer chamber in which the transfer robot according to claim 1 is installed.   3. The base unit according to claim 1, wherein the base unit is attached to the frame in a suspended state so that a space that allows the lifter to operate is formed between a bottom portion and a floor surface of the base unit. The transfer room where the transfer robot is installed.   The transfer chamber in which the transfer robot according to any one of claims 1 to 3 is installed, wherein the base unit is always supported by a lifter at the bottom.   The transfer chamber is formed in the shape of a polygonal column, and a process chamber for processing a workpiece is provided on at least one side, and the process chamber and the open / close door are hermetically connected to each other. 5. The transfer robot according to claim 1, wherein a work chamber is hermetically connected to one side portion to which the two are not connected via an opening / closing door portion. Transport room.   It is a maintenance method of the conveyance chamber as described in any one of Claims 1 thru | or 5, Comprising: The space which can operate a crane by removing the said upper cover plate is ensured, and the connection with the said arm apparatus and the said base unit The state is released, the arm device is temporarily placed on the frame at a predetermined distance from the base unit, the base unit attached to the frame in a suspended state is removed, and the arm unit is placed on a lifter to carry the transfer. A maintenance method for a transfer chamber, wherein the transfer device is moved from the bottom of the chamber, the lower cover plate is removed, and the arm device is suspended on a carriage to be movable.   6. The transfer chamber maintenance method according to any one of claims 1 to 5, wherein a space in which a crane can be operated is secured by removing the upper cover plate, and the arm after the lower cover plate is removed. The connection between the device and the base unit is released, the arm device is temporarily placed on the frame at a predetermined distance from the base unit, and the base unit attached to the frame in a suspended state is removed. A transfer chamber maintenance method, wherein the transfer device is placed on a lifter and moved from below the transfer chamber, and the arm device is suspended on a carriage to be moved.   The maintenance method for a transfer chamber according to any one of claims 1 to 5, wherein the arm device carried by a carriage is lifted and temporarily placed on the frame, and the lower cover plate lowers the frame. The base unit carried by the lifter is lifted up and attached to the frame in a suspended state, the arm device is removed from the temporarily placed state and connected to the base unit, and the upper cover plate covers the frame. A transfer chamber maintenance method characterized by the above.

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