JP2009166175A - Eccentric center adjusting device, eccentric center adjusting method and rotary working device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform eccentric center adjustment for a workpiece to the axis of rotation without worker's skill and long-time set-up. <P>SOLUTION: A cylindrical part 11 of a workpiece 1 sucked and held on a sucking surface 6 of a spindle to be movable in the eccentric direction is incorporated with a detecting part 8 so that a probe 8a is exposed to a working part 4 of an eccentric center adjusting device 3, and while the eccentric amount of the cylindrical part 11 is measured by the probe 8a, the cylindrical part 11 is pressed by the working part 4 to perform centering so that eccentric center of the workpiece 1 to the spindle can be eliminated. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an eccentricity adjusting device, an eccentricity adjusting method, and a rotary processing device, and for example, relates to a technique that is effective when applied to an eccentricity adjustment technology for a workpiece to be rotationally processed.

  Optical components such as lenses and prisms that are rotationally symmetric, and molds used for molding the optical components have a highly accurate shape and a predetermined eccentricity error with respect to the optical axis of the optical component. It is necessary to match with high accuracy so that it is less than the allowable value.

  In such high-precision rotation processing of optical components, so that the eccentric error of the center axis of the workpiece that is the optical axis with respect to the center of the rotation axis of the processing apparatus is below the accuracy standard value, It is necessary to adjust the eccentricity of the workpiece and grip it.

  As a centering technique corresponding to such a request, a technique disclosed in Patent Document 1 is known. That is, two working parts supported on a support plate that is rotatable around one fulcrum are brought into contact with a work adsorbed by a magnet chuck attached to a rotationally driven main shaft, and the fulcrum of the support plate is When moving toward the center of rotation of the magnet chuck, the two working parts abut the outer periphery of the workpiece and swing in response to the position-biased workpiece. Centering to match the center of rotation.

  However, in the above-described centering method of Patent Document 1, since the detection unit of the measuring instrument that measures the amount of eccentricity of the workpiece is separate from the action unit that contacts the workpiece, the detection of the measuring instrument is performed each time adjustment is performed. There is a technical problem that it is necessary to install the parts individually, the time required for the work setup becomes long, and the lead time of the whole processing becomes long.

  Also, since the two action parts press the work while swinging on the support plate, the vector of the adjustment direction of the action part and the vector of the movement direction of the work do not match, and the eccentricity adjustment amount to be given to the work and the action part Unlike the amount of movement, the skill and education of the workers are necessary to familiarize the relationship between the two values.

Further, the support plate that rotates around the fulcrum is provided with a clearance on the fulcrum shaft so as to be rotatable. Therefore, it is difficult to move the two working parts mounted on the support plate with an accuracy below this clearance, and the eccentricity adjustment by the contact of the two working parts against the workpiece, particularly with an accuracy of sub-micrometer or less. It has been difficult to adjust the eccentricity.
JP 2007-245241 A

  An object of the present invention is to provide a technique capable of adjusting the eccentricity of a workpiece with respect to a rotating shaft with high accuracy without requiring skill of an operator or long-time setup.

According to a first aspect of the present invention, an eccentric means is brought into contact with an outer peripheral portion of the workpiece while rotating a main shaft on which the workpiece is adsorbed and held movably in a direction intersecting the rotation axis. An eccentricity adjusting device for adjusting,
Provided is an eccentricity adjusting device in which a detecting unit of an eccentricity measuring device for measuring the eccentricity of the workpiece with respect to the rotating shaft is mounted inside the adjusting means.

A second aspect of the present invention is a step of rotating a spindle on which a workpiece is adsorbed and held movably in a direction intersecting the rotation axis;
Contacting the workpiece with an adjusting means including a detecting unit of an eccentricity measuring device for measuring the eccentricity of the workpiece with respect to the rotation axis;
After the adjusting means and the outer peripheral part of the workpiece are in contact with each other, the adjusting means is pressed in the direction in which the workpiece is pressed by the half of the difference between the maximum value and the minimum value of the eccentric amount obtained from the detection unit. A step of moving
An eccentricity adjustment method is provided.

According to a third aspect of the present invention, there is provided a main shaft on which a work piece is adsorbed and held movably in a direction intersecting the rotation axis;
A processing tool that contacts the workpiece rotating with the main shaft;
An eccentricity adjusting device comprising a detecting unit of an eccentricity measuring device for measuring an eccentricity amount of the workpiece with respect to the rotating shaft in an adjusting means that contacts an outer peripheral portion of the workpiece rotating with the main shaft;
The rotary processing apparatus containing is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the technique which can perform the eccentric adjustment of the to-be-processed object with respect to a rotating shaft with high precision can be provided, without requiring an operator's skill and a setup for a long time.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[Embodiment 1]
FIG. 1 is a side view showing an example of the configuration and operation of an eccentricity adjusting device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing an example of the configuration of the eccentricity adjusting device according to the present embodiment. 3 is a front view showing an example of the configuration of the eccentricity adjusting device of the present embodiment, FIG. 4 is a diagram showing an example of the operation of the eccentricity adjusting device of the present embodiment, and FIG. It is a flowchart which shows an example of an effect | action of the eccentricity adjustment apparatus of this Embodiment.

FIG. 6 is a side view showing an example of the configuration of the rotary machining apparatus provided with the eccentricity adjusting apparatus of the present embodiment.
[Constitution]
First, with reference to FIG. 6, an example of the whole structure of the rotary processing apparatus 5 of this Embodiment is demonstrated.

FIG. 6 illustrates, as an example, a rotary processing device 5 as a machining device for processing a workpiece 1 that is rotationally symmetric.
Since the workpiece 1 is gripped and processed on the base 5a of the rotary processing device 5 according to the present embodiment, a rotary device such as an AC servo motor is used as an air static pressure bearing, an oil hydrostatic bearing, or a rolling bearing. A spindle spindle 2 (main shaft) that is supported by either of them and rotates with high accuracy with respect to the main shaft rotation axis A is provided.

  The inside of the spindle spindle 2 of the rotary machining device 5 is a hollow suction hole 2a, and a plurality of suction holes 6a directly connected to the suction hole 2a are provided at the center of the suction surface 6 at the tip of the spindle spindle 2. Yes.

  Vacuum suction is performed by a vacuum suction device such as a vacuum pump 2b from the opposite side of the suction surface 6 of the spindle spindle 2 of the rotary processing device 5, and the workpiece 1 that is in close contact with the suction surface 6 through the suction hole 2a is vacuumed in the suction hole 6a. Adsorption is possible. The vacuum pump 2b is provided with an air pressure regulator 2c, and the vacuum suction force acting on the workpiece 1 from the suction hole 6a can be changed by the pressure adjusting function of the air pressure regulator 2c.

A tool rest 5b is placed on the base 5a of the rotary processing apparatus 5, and a processing tool 5c such as a cutting tool, a grinding tool, or a polishing tool is mounted on the tool rest 5b.
Then, arbitrary rotational machining such as cutting, grinding, and polishing is performed by bringing the processing tool 5c into contact with the workpiece 1 that is held by the main spindle 2 and rotates.

  In this case, on the base 5a, an eccentricity adjusting device 3 for performing centering for correcting the eccentricity of the work piece 1 held by suction on the main spindle 2 as described above with respect to the main shaft rotation axis A is further provided. (Adjustment means) is provided.

  The eccentricity adjusting device 3 and the tool rest 5b are mounted on the base 5a via a slide mechanism 5d as a feed mechanism that can move at least in the X-axis direction (extrusion direction) and the Z-axis direction.

  The Z-axis direction is the direction of the spindle rotation axis A of the spindle spindle 2 in the left-right direction of the paper surface of FIG. The X-axis direction is a direction perpendicular to the paper surface of FIG. 6 and perpendicular to the Z-axis direction, and is a relative displacement direction (extrusion direction) of the eccentricity adjusting device 3 with respect to the main spindle 2.

In this case, the movement of the eccentricity adjusting device 3 in the X-axis direction, which is the displacement direction, can be controlled with an accuracy of at least 0.1 μm or less.
FIG. 2 shows a configuration example of the eccentricity adjusting device 3 described above. Here, an action part 4 (extrusion action part) which is an end face for adjusting the eccentricity by pushing the cylindrical part 11 of the workpiece 1 of the eccentricity adjusting device 3 is parallel to the spindle rotation axis A of the spindle 2. The plane is a plane perpendicular to the plane including the X-axis and Z-axis directions.

Further, the eccentricity adjusting device 3 has a rigid structure such that the amount of deflection of the action portion 4 is 0.1 μm or less with respect to the force applied during the eccentricity adjustment, and is made of a rigid material.
Further, the surface of the action portion 4 is subjected to a surface treatment that improves the surface roughness by polishing or the like, and performs DLC (diamond-like carbon) coating or the like to improve the slipperiness and rigidity.

  In the case of the present embodiment, the eccentricity adjusting device 3 has a built-in detector 8 of the eccentricity measuring device 7 for measuring the eccentricity. As the detection unit 8, for example, a direct acting type such as an electric micrometer is used.

  The detector 8 is connected to the eccentricity measuring instrument 7 via the cable 7a, and the displacement in the axial direction (X-axis direction) of the probe 8a provided at the tip of the detector 8 is detected as an electric signal. It is input to the core amount measuring device 7 and is visualized and displayed as a numerical value or a waveform on the meter portion 7b of the eccentric amount measuring device 7.

  In other words, the eccentricity adjusting device 3 is provided with a drill hole 10 at a position where it can be measured at the same height as the main spindle rotation axis A and in a direction perpendicular to the main spindle rotation axis A and the plane of the action part 4. The part 8 is inserted, and the probe 8 a of the detection part 8 is exposed to the opening of the drill hole 10 in the action part 4.

  The mounting position of the detection unit 8 in the detection direction (in this case, the X-axis direction) with respect to the drill hole 10 is the same as the plane of the action unit 4 of the eccentricity adjusting device 3 and the tip 9 of the probe 8a of the detection unit 8. When the protrusion height is reached, the position is set within the measurement range of the eccentricity measuring device 7 and at the center of the display range of the finest range. Then, in the state of the set position, the drill hole 10 and the detection unit 8 are bonded and fixed via the bond 10a.

Alternatively, a screw hole is provided from the outer surface of the eccentricity adjusting device 3 toward the side surface of the drill hole 10, and a screw thread (a screw thread formed on the entire length that can be embedded in the screw hole) is passed through the screw hole. The structure which fixes the detection part 8 with a screw may be sufficient.
[Action]
The operation of Embodiment 1 of the present invention will be specifically described below, but these do not limit the present invention.

The operation of the first embodiment will be described with reference to FIG. 1, FIG. 3, FIG. 4, FIG.
FIG. 5 illustrates an order in which eccentricity adjustment is performed before the workpiece 1 is gripped by the rotary processing device 5 and before machining, and the description will be made along this FIG.

  First, the eccentricity is adjusted in advance so that the eccentricity error in the shift direction (X-axis direction) of the suction surface 6 becomes less than the standard with respect to the spindle rotation axis A of the spindle spindle 2 of the rotary processing device 5. Fix to the spindle 2.

In this state, cutting or grinding is performed on the suction surface 6 so that the suction surface 6 has high flatness and high perpendicularity to the spindle rotation axis A (step S201).
Next, the workpiece 1 is held on the suction surface 6 by vacuum suction. At this time, the bottom surface in contact with the suction surface 6 of the workpiece 1 is set to have a high flatness (step S202).

  After that, for example, the compressed air compressed by the compressor is applied to the pneumatic regulator 2c in the middle of the suction path between the vacuum pump 2b and the suction hole 2a to lower the air pressure. Thereby, the vacuum pressure which acts on the suction hole 2a from the vacuum pump 2b is lowered, and the vacuum suction force of the workpiece 1 on the suction surface 6 is reduced to such an extent that it can move in the planar direction of the suction surface 6, for example.

  That is, when the workpiece 1 is attracted by the suction surface 6, the force at which the workpiece 1 starts to move when the cylindrical portion 11 of the workpiece 1 is pushed in the X-axis direction, that is, the static friction force is 0, for example. The suction force of the workpiece 1 through the suction hole 6a is set (reduced) via the pneumatic regulator 2c so that it is between .01N and 20.0N (step S203).

  Next, the slide mechanism 5d moves the acting portion 4 of the eccentricity adjusting device 3 in the Z-axis direction to a position where the acting portion 4 comes into contact with the cylindrical portion 11 serving as a reference of the workpiece 1. Thereafter, the main spindle 2 is rotated in the range of 1 to 300 rpm, for example. The cylindrical part 11 of the workpiece 1 and the action part 4 of the eccentricity adjusting device 3 are moved by the slide in the X-axis direction so as to come into contact with each other. And the moving part 4 is moved to a position where the acting part 4 of the eccentricity adjusting device 3 contacts.

  At this time, the contact between the cylindrical portion 11 and the action portion 4 causes the height of the detection portion 8 to be the same as that of the spindle rotation axis A, makes the direction of the detection portion 8 parallel to the pushing direction, and further measures the detection portion 8. Since the display of the eccentricity measuring device 7 is centered when the height of the tip portion 9 of the child 8a and the plane portion of the action portion 4 coincide with each other, as shown in FIG. The amount of eccentricity with respect to A is displayed as a numerical value in a sine wave shape before the cylindrical portion 11 of the workpiece 1 and the action portion 4 come into contact with each other.

  After the cylindrical part 11 and the action part 4 are in contact with each other, a diagram representing the eccentricity of the cylindrical part 11 with respect to the spindle rotation axis A is displayed with a fixed numerical value above a certain high part from the sine wave shape. A numerical value fixed above a certain value from this sine wave indicates that the cylindrical portion 11 and the action portion 4 are in contact with each other. At this time, the maximum and minimum difference between the numerical values displayed by the eccentricity measuring device 7 becomes the eccentricity ΔC of the cylindrical portion 11 of the workpiece 1 with respect to the spindle rotation axis A (step S204).

  The eccentric amount ΔC when the cylindrical portion 11 of the workpiece 1 and the action portion 4 are in contact with each other is measured, and the eccentricity adjusting device 3 is moved in the X-axis direction by an amount that is half the eccentric amount ΔC. The eccentricity of the cylindrical portion 11 of the workpiece 1 is adjusted. After the eccentricity adjusting device 3 is moved in the X-axis direction and the eccentricity is adjusted in this way, the eccentricity measuring device 7 measures the eccentricity amount ΔC and determines whether the workpiece 1 is within the eccentricity standard. Check. If not within the standard, the half of the eccentricity at that time is further moved by the X-axis slide (step S205).

  If it is within the eccentricity standard in step S205, the eccentricity adjusting device 3 is moved in a direction opposite to the pushing direction, that is, in a direction away from the cylindrical portion 11 of the workpiece 1 so as not to contact the cylindrical portion 11. The amount of movement of the eccentricity adjusting device 3 for separating the action part 4 from the cylindrical part 11 at this time is until the display of the eccentricity measuring instrument 7 shows a sine wave shape. The eccentricity ΔC (maximum amplitude of the observed sine wave) at that time is measured by the eccentricity measuring device 7 to confirm that it is within the eccentricity standard value (step S206).

If it is not confirmed that the eccentricity standard value is entered (step S207), the process returns to step S205.
If it is confirmed in step S207 that the eccentricity standard value has been reached, the eccentricity adjustment is completed, and in this state, the pneumatic regulator 2c is returned to the maximum pressure and the vacuum suction force is also returned to the maximum. The workpiece 1 is prevented from moving during the processing by 5c (step S208).

In this state, machining such as cutting, grinding and polishing of the workpiece 1 rotating with the spindle 2 is performed by the processing tool 5c.
[effect]
According to the first embodiment described above, the work piece 1 can move smoothly by reducing the vacuum suction force of the work piece 1 with respect to the spindle 2, and the eccentricity adjusting device 3 having high rigidity can be obtained. By pressing the cylindrical portion 11 of the workpiece 1 with high-precision movement in the X-axis direction, the eccentric error of the cylindrical portion 11 of the workpiece 1 with respect to the spindle rotation axis A can be adjusted with high accuracy.

  Further, since the detecting unit 8 of the eccentricity measuring device 7 for measuring the eccentricity ΔC is built in the eccentricity adjusting device 3, the detecting unit 8 of the eccentricity measuring device 7 is provided every time eccentricity adjustment is performed. The time required for setting up the installation can be saved.

  Further, the amount of movement required for contact and eccentricity adjustment between the cylindrical part 11 of the workpiece 1 and the action part 4 of the eccentricity adjusting device 3 can be easily grasped from the display of the eccentricity measuring device 7, For eccentricity adjustment, it is only necessary to move the eccentricity adjusting device 3 by half of the eccentricity ΔC, so that the operator's skill and education are unnecessary.

That is, it is possible to adjust the eccentricity of the workpiece 1 with respect to the spindle rotation axis A with high accuracy without requiring the operator's skill or long-time setup.
As a result, it is possible to prevent an increase in the required processing time (lead time) of the workpiece 1 including the centering operation, and to improve the operating rate of the rotary processing apparatus 5.

[Embodiment 2]
[Constitution]
FIG. 7 is a cross-sectional view showing a configuration example of an eccentricity adjusting device according to another embodiment of the present invention.

  The second embodiment is different from the first embodiment in that the position of the device is made variable by screwing the detection unit 8 to the eccentricity adjusting device 3. Note that components common to those in the first embodiment are given the same reference numerals, and descriptions thereof are omitted.

  That is, in the above-described first embodiment, the example in which the detection unit 8 is inserted into the drill hole 10 and fixed at a predetermined position via the adhesive 10a is shown. However, in the case of the second embodiment, the drill hole 10 A screw hole 12 is provided in a part of the screw. Then, a screw ring 13 that is screwed into the screw hole 12 is fixed to the outer periphery of the detection unit 8 by bonding or the like. Thereby, the detection part 8 is screwed so that rotation with respect to the drill hole 10 of the eccentricity adjustment apparatus 3 is carried out, and the protrusion amount with respect to the action part 4 of the measuring element 8a of the detection part 8 is depended on the rotation amount of the detection part 8. Can be set easily and variably.

[Action]
The operation of the second embodiment will be described with reference to FIG.
When positioning the detection unit 8 in the measurement direction (in this case, the X-axis direction), if the detection unit 8 is rotated, the screw ring 13 fixed to the detection unit 8 also rotates. It moves in the axial direction of the drill hole 10 by the amount of the screw pitch. Therefore, the adjustment of the protruding position in the detection direction of the detection unit 8 can be variably set.

[effect]
According to the second embodiment, in addition to the effects of the first embodiment described above, the adjustment of the protruding position of the detection unit 8 in the detection direction can be easily performed by simply rotating the detection unit 8, and the time required for setup Can be further shortened.

  As described above, according to each of the above-described embodiments, when the workpiece 1 having the rotational axis symmetry shape is held with respect to the spindle spindle 2 of the rotary machining apparatus 5, the spindle rotation of the spindle spindle 2 is performed. The eccentric error with respect to the axis A can be adjusted with high accuracy, an increase in machining lead time can be prevented, and the operating rate of the rotary machining apparatus 5 can be improved.

Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the means for movably attracting and holding the workpiece on the main shaft is not limited to vacuum suction, and an electromagnet having a variable magnetic force may be used.
[Appendix 1]
In a work center eccentricity adjustment device that provides a mechanism for adsorbing a work piece on a main shaft, and that adjusts the eccentricity by pushing the cylindrical portion of the work piece with an adjustment device while the main shaft is rotated.
A workpiece eccentricity adjusting device, wherein a detecting portion of an eccentricity measuring device for measuring the amount of eccentricity of the workpiece with respect to the main shaft rotation axis is attached in the adjusting device.
[Appendix 2]
In the workpiece eccentricity adjusting apparatus described in appendix 1,
The pushing action point of the adjusting device is a plane perpendicular to the spindle rotation axis and the pushing direction,
The mounting position in the height direction of the detection part of the eccentricity measuring instrument is mounted at the same height position as the spindle rotation axis,
Furthermore, the detection part of the eccentricity measuring device is attached to the position of the detection part so as to be parallel to the extrusion direction,
In addition, when the tip of the probe of the detecting unit of the eccentricity measuring instrument and the flat part of the adjusting device are at the same protruding position, it is attached to the position of the detecting unit so that it is within the measuring range of the eccentricity measuring instrument. An apparatus for adjusting the eccentricity of a workpiece.
[Appendix 3]
In the workpiece eccentricity adjusting apparatus described in appendix 2,
A male screw is provided on the outer peripheral portion of the detection unit of the eccentricity measuring device, and a female screw is provided in a portion in which the detection unit of the adjustment device is incorporated. A workpiece eccentricity adjusting device characterized in that the protruding position can be adjusted.
[Appendix 4]
In the method for adjusting the eccentricity of the workpiece using the eccentricity adjusting device described in appendix 1,
The amount of movement after the adjusting device is pushed and moved by a moving slide and the working portion of the adjusting device and a part of the cylindrical portion of the workpiece are in contact is the maximum value and the minimum value indicated by the eccentricity measuring device. A method for adjusting the eccentricity of a workpiece, wherein the eccentricity adjustment is completed by setting the difference to half and moving the movement amount by the moving slide.
[Appendix 5]
In the work piece eccentricity adjusting method described in appendix 4,
The suction mechanism is vacuum suction, and during the eccentricity adjustment, the vacuum suction force is lowered so that the static friction force in the pushing direction of the workpiece is 20 N or less, and after the eccentricity adjustment is completed, the vacuum suction force is suitable for processing. A method for adjusting the eccentricity of a workpiece, wherein the workpiece is processed by returning to a vacuum suction force state.
[Appendix 6]
In the work piece eccentricity adjusting method described in appendix 4,
After the eccentricity adjustment, the adjustment device is released in the opposite direction to the extrusion, and the eccentric amount of the workpiece is measured by the eccentricity adjustment device in a state where the workpiece and the adjustment device are separated from each other. Workpiece eccentricity adjustment method.

It is a side view showing an example of composition and operation of an eccentricity adjusting device which is one embodiment of the present invention. It is a schematic sectional drawing which shows an example of a structure of the eccentricity adjustment apparatus which is one embodiment of this invention. It is a front view which shows an example of a structure of the eccentricity adjustment apparatus which is one embodiment of this invention. It is a diagram which shows an example of an effect | action of the eccentricity adjustment apparatus which is one embodiment of this invention. It is a flowchart which shows an example of an effect | action of the eccentricity adjustment apparatus which is one embodiment of this invention. It is a side view which shows an example of a structure of the rotary processing apparatus provided with the eccentricity adjustment apparatus which is one embodiment of this invention. It is sectional drawing which shows the structural example of the eccentricity adjustment apparatus which is other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Workpiece 2 Spindle spindle 2a Suction hole 2b Vacuum pump 2c Pneumatic regulator 3 Eccentricity adjustment device 4 Action part 5 Rotation processing device 5a Base 5b Tool post 5c Processing tool 5d Slide mechanism 6 Suction surface 6a Suction hole 7 Eccentricity Measuring instrument 7a Cable 7b Meter part 8 Detecting part 8a Measuring element 9 Tip part 10 Drilling hole 10a Adhesion 11 Cylindrical part 12 Screw hole 13 Screw ring A Spindle rotation axis ΔC Eccentricity

Claims (7)

An eccentricity adjustment device that performs eccentricity adjustment by bringing an adjustment means into contact with the outer peripheral portion of the workpiece while rotating the spindle on which the workpiece is attracted and held in a direction that intersects the rotation axis. And
An eccentricity adjusting apparatus, wherein a detecting unit of an eccentricity measuring device for measuring an eccentricity amount of the workpiece with respect to the rotating shaft is mounted inside the adjusting means. The eccentricity adjusting device according to claim 1,
The pushing action portion of the adjusting means that contacts the outer periphery of the workpiece is a plane perpendicular to the pushing direction with respect to the rotation axis,
The detection unit is attached to the adjusting unit at a position where the measuring element of the detecting unit is at the same height as the rotation axis, in an attitude in which the operating direction of the measuring element is parallel to the push-out direction,
The measurement range of the eccentricity measuring instrument is set so that the displacement of the probe is included in the measurement range when the tip of the probe and the push-out action part of the adjusting means are in the same protruding position. An eccentricity adjusting device characterized by comprising: The eccentricity adjusting device according to claim 2,
An eccentricity adjusting device characterized in that the protruding position of the detecting portion in the push-out direction can be adjusted by screwing the detecting portion into the adjusting means and rotating the detecting portion. Rotating a spindle on which a work piece is adsorbed and held movably in a direction intersecting the rotation axis;
Contacting the workpiece with an adjusting means including a detecting unit of an eccentricity measuring device for measuring the eccentricity of the workpiece with respect to the rotation axis;
After the adjusting means and the outer peripheral part of the workpiece are in contact with each other, the adjusting means is pressed in the direction in which the workpiece is pressed by the half of the difference between the maximum value and the minimum value of the eccentric amount obtained from the detection unit. A step of moving
The eccentricity adjustment method characterized by including. In the eccentricity adjustment method according to claim 4,
The workpiece is fixed to the main shaft by vacuum suction, and a static frictional force in the movable direction of the workpiece with respect to the main shaft is 0.01 N during the eccentricity adjustment in which the adjusting means is brought into contact with the workpiece. The vacuum suction force is lowered to 20 N or less as described above, and after the eccentricity adjustment is completed, the vacuum suction force is returned to the vacuum suction force suitable for the desired rotational processing, and the rotational processing of the workpiece is performed. An eccentricity adjustment method characterized by being performed. In the eccentricity adjustment method according to claim 4,
After the eccentricity adjustment, the eccentricity adjustment method is characterized in that the amount of eccentricity of the workpiece is measured by the detection unit in a state where the adjusting means is separated from the workpiece. A main shaft on which a workpiece is adsorbed and held movably in a direction intersecting the rotation axis;
A processing tool that contacts the workpiece rotating with the main shaft;
An eccentricity adjusting device comprising a detecting unit of an eccentricity measuring device for measuring an eccentricity amount of the workpiece with respect to the rotating shaft in an adjusting means that contacts an outer peripheral portion of the workpiece rotating with the main shaft;
A rotary machining apparatus comprising: