JP2009162965A5 - - Google Patents
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- Publication number
- JP2009162965A5 JP2009162965A5 JP2008000059A JP2008000059A JP2009162965A5 JP 2009162965 A5 JP2009162965 A5 JP 2009162965A5 JP 2008000059 A JP2008000059 A JP 2008000059A JP 2008000059 A JP2008000059 A JP 2008000059A JP 2009162965 A5 JP2009162965 A5 JP 2009162965A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- particles
- forming
- substrate
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000002245 particle Substances 0.000 claims 45
- 239000000463 material Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 15
- 238000005530 etching Methods 0.000 claims 14
- 238000000034 method Methods 0.000 claims 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- 238000001020 plasma etching Methods 0.000 claims 3
- 239000000377 silicon dioxide Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 229920005990 polystyrene resin Polymers 0.000 claims 2
- 230000002265 prevention Effects 0.000 claims 2
- 239000004925 Acrylic resin Substances 0.000 claims 1
- 229920000178 Acrylic resin Polymers 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000009719 polyimide resin Substances 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008000059A JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
| US12/347,187 US8361339B2 (en) | 2008-01-04 | 2008-12-31 | Antireflection structure formation method and antireflection structure |
| US13/723,374 US8840258B2 (en) | 2008-01-04 | 2012-12-21 | Antireflection structure formation method and antireflection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008000059A JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009162965A JP2009162965A (ja) | 2009-07-23 |
| JP2009162965A5 true JP2009162965A5 (https=) | 2010-12-02 |
| JP4945460B2 JP4945460B2 (ja) | 2012-06-06 |
Family
ID=40844792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008000059A Expired - Fee Related JP4945460B2 (ja) | 2008-01-04 | 2008-01-04 | 反射防止構造の形成方法および反射防止構造 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US8361339B2 (https=) |
| JP (1) | JP4945460B2 (https=) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5215833B2 (ja) * | 2008-12-11 | 2013-06-19 | 株式会社日立ハイテクノロジーズ | 微細パターン転写用スタンパ及びその製造方法 |
| KR20110110240A (ko) | 2008-12-30 | 2011-10-06 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 반사방지 용품 및 이의 제조 방법 |
| CN102325719A (zh) | 2008-12-30 | 2012-01-18 | 3M创新有限公司 | 纳米结构化制品和制备纳米结构化制品的方法 |
| US8419955B2 (en) * | 2009-01-07 | 2013-04-16 | Panasonic Corporation | Antireflection structure, lens barrel including antireflection structure, method for manufacturing antireflection structure |
| US20110085232A1 (en) * | 2009-10-08 | 2011-04-14 | The Penn State Research Foundation | Multi-spectral filters, mirrors and anti-reflective coatings with subwavelength periodic features for optical devices |
| DE102009060223A1 (de) * | 2009-12-23 | 2011-06-30 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 80539 | Konusförmige Nanostrukturen auf Substratoberflächen, insbesondere optischen Elementen, Verfahren zu deren Erzeugung sowie deren Verwendung |
| US20120281729A1 (en) * | 2010-01-29 | 2012-11-08 | Hewlett Packard Development Company, L.P. | Environment sensitive devices |
| CN102859397B (zh) | 2010-04-13 | 2015-11-25 | 旭化成电子材料株式会社 | 自支撑膜、自支撑结构体、自支撑膜的制造方法及表膜 |
| US9017566B2 (en) * | 2010-04-30 | 2015-04-28 | Corning Incorporated | Anti-glare surface treatment method and articles thereof |
| US9085484B2 (en) | 2010-04-30 | 2015-07-21 | Corning Incorporated | Anti-glare surface treatment method and articles thereof |
| JP5854397B2 (ja) * | 2011-09-05 | 2016-02-09 | 国立研究開発法人産業技術総合研究所 | ナノインプリントフィルムを用いた粒子の転写方法 |
| KR101334898B1 (ko) | 2011-11-21 | 2013-12-02 | 한국기계연구원 | 나노 돌기 패턴의 형성 방법 |
| US9108310B2 (en) * | 2012-01-13 | 2015-08-18 | The United States Of America, As Represented By The Secretary Of The Navy | Fueldraulic actuator installation and removal tool |
| CN104335078B (zh) * | 2012-03-26 | 2017-08-08 | 3M创新有限公司 | 纳米结构化材料及其制造方法 |
| JP2013218272A (ja) * | 2012-04-04 | 2013-10-24 | Nalux Co Ltd | 耐光性プラスチックシート及びその製造方法 |
| WO2013151038A1 (ja) * | 2012-04-04 | 2013-10-10 | ナルックス株式会社 | 耐光性プラスチックシート及びその製造方法 |
| WO2013154077A1 (ja) * | 2012-04-09 | 2013-10-17 | 旭硝子株式会社 | 微細パターンを表面に有する物品およびその製造方法、ならびに光学物品、その製造方法および複製モールドの製造方法 |
| WO2013181007A1 (en) * | 2012-05-29 | 2013-12-05 | Corning Incorporated | Method for texturing a glass surface |
| US9487869B2 (en) * | 2012-06-01 | 2016-11-08 | Carnegie Mellon University | Pattern transfer with self-assembled nanoparticle assemblies |
| TWI564585B (zh) | 2012-12-06 | 2017-01-01 | 大同股份有限公司 | 抗反射基板結構及其製作方法 |
| CN104781059B (zh) * | 2012-12-13 | 2017-05-10 | 王子控股株式会社 | 光学元件制作用模具及其制造方法、光学元件 |
| JP2015138179A (ja) * | 2014-01-23 | 2015-07-30 | 王子ホールディングス株式会社 | 微細構造体および微細構造体の製造方法 |
| DE102014105939B4 (de) * | 2014-04-28 | 2019-08-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer Entspiegelungsschicht auf einer Silikonoberfläche und optisches Element |
| US20180050959A1 (en) * | 2015-03-24 | 2018-02-22 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Fabrication of nanostructures in and on organic and inorganic substrates using mediating layers |
| CN106384745B (zh) * | 2016-11-16 | 2019-01-08 | 京东方科技集团股份有限公司 | 显示基板的制备方法 |
| CN107561611B (zh) * | 2017-08-04 | 2020-04-28 | 东莞市中图半导体科技有限公司 | 一种蓝宝石基板的表面图案化加工方法 |
| KR101962034B1 (ko) | 2017-10-25 | 2019-03-25 | 한국기초과학지원연구원 | 무반사 나노패턴을 포함하는 광대역 대물렌즈 및 이의 제조방법 |
| CN108037549A (zh) * | 2017-12-11 | 2018-05-15 | 中国科学院长春光学精密机械与物理研究所 | 一种接触屏及其制备方法 |
| FR3084205A1 (fr) | 2018-07-20 | 2020-01-24 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif electronique comprenant une structure antireflet |
| EP3647287B1 (en) * | 2018-10-30 | 2024-04-17 | SCHOTT Pharma AG & Co. KGaA | Container precursor having a wall of glass which is superimposed by a plurality of particles |
| EP3936906B1 (en) | 2019-04-26 | 2026-03-11 | Huawei Technologies Co., Ltd. | Reflection-reducing film, optical element, camera module and terminal |
| KR102191074B1 (ko) * | 2019-05-03 | 2020-12-15 | 공주대학교 산학협력단 | 콜로이드 입자를 이용한 표면 나노 돌기 구조 제조방법 |
| CN115373219A (zh) * | 2022-08-29 | 2022-11-22 | 歌尔光学科技有限公司 | 塑料晶圆的处理方法、塑料晶圆、光栅片及光波导器件 |
| CN116356577A (zh) * | 2023-04-07 | 2023-06-30 | 长春理工大学 | 一种自清洁碳纤维及其制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08211202A (ja) * | 1995-02-07 | 1996-08-20 | Hitachi Ltd | 撥水撥油性超微粒子を有する光透過板およびその製造方法 |
| WO2004031815A1 (ja) * | 2002-10-07 | 2004-04-15 | Nalux Co., Ltd. | 反射防止用回折格子 |
| EP1579511B1 (de) | 2002-12-30 | 2012-03-28 | OSRAM Opto Semiconductors GmbH | Verfahren zum aufrauhen einer oberfläche eines optoelektronischen halbleiterkörpers. |
| JP4050631B2 (ja) * | 2003-02-21 | 2008-02-20 | 株式会社ルネサステクノロジ | 電子デバイスの製造方法 |
| JP4505670B2 (ja) * | 2003-08-29 | 2010-07-21 | 株式会社ニコン | 透過型光学素子の製造方法 |
| JP4068578B2 (ja) * | 2004-02-18 | 2008-03-26 | 株式会社東芝 | 微細凸凹パターンの形成方法 |
| US20070144700A1 (en) * | 2004-03-25 | 2007-06-28 | Sanyo Electric Co., Ltd. | Production method of curved-surface metal mold having fine uneven structure and production method of optical element using this metal mold |
| JP2005331868A (ja) | 2004-05-21 | 2005-12-02 | Canon Inc | 反射防止構造を有する光学素子およびその製造方法 |
| EP1801892A4 (en) * | 2004-08-31 | 2008-12-17 | Univ Meijo | METHOD OF MANUFACTURING A SEMICONDUCTOR LIGHT EMISSION ELEMENT AND SEMICONDUCTOR LIGHT EMISSION ELEMENT |
| US7704402B2 (en) * | 2004-10-27 | 2010-04-27 | Nikon Corporation | Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device |
| JP4253302B2 (ja) * | 2005-01-06 | 2009-04-08 | 株式会社東芝 | 有機エレクトロルミネッセンス素子およびその製造方法 |
| US7385231B2 (en) * | 2005-08-31 | 2008-06-10 | Fujifilmcorporation | Porous thin-film-deposition substrate, electron emitting element, methods of producing them, and switching element and display element |
| JP2007087974A (ja) * | 2005-09-16 | 2007-04-05 | Fujifilm Corp | 多孔薄膜堆積基板、その製造方法及びスイッチング素子 |
| US7695999B2 (en) * | 2005-09-06 | 2010-04-13 | Canon Kabushiki Kaisha | Production method of semiconductor device |
| CN101371196B (zh) * | 2006-02-13 | 2012-07-04 | 陶氏康宁公司 | 抗反射涂料 |
| US7713768B2 (en) * | 2006-06-14 | 2010-05-11 | Kanagawa Academy Of Science And Technology | Anti-reflective film and production method thereof, and stamper for producing anti-reflective film and production method thereof |
-
2008
- 2008-01-04 JP JP2008000059A patent/JP4945460B2/ja not_active Expired - Fee Related
- 2008-12-31 US US12/347,187 patent/US8361339B2/en not_active Expired - Fee Related
-
2012
- 2012-12-21 US US13/723,374 patent/US8840258B2/en not_active Expired - Fee Related
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