JP2009154773A - Vibration control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration control device capable of reducing the output of a vibration control means, realizable by a small vibration control means, and capable of controlling even a pitch and a roll. <P>SOLUTION: This vibration control device has a load support part 10 installed in an installation part F, a counterbalance part 30 connected to the load support part 10 and applying a load balancing with a load, a vibration control part 20 having the vibration control means 21 controlling vibration to the installation part F of the load support part 10, an acceleration detecting means 81 detecting acceleration of the load support part 10, a first shaft rotation detecting means 82 detecting the rotational movement to a first shaft of the load support part 10, and a first shaft rotating means 61 rotating the load support part 10 to the first shaft, and is characterized in that the vibration control means 21 is controlled in response to a detection value of the acceleration detecting means 81, and the first shaft rotating means 61 is controlled in response to a detection value of the first shaft rotation detecting means 82. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a vibration control device that suppresses or reduces vibration applied to a riding section such as a seat, particularly a riding section such as a seat installed in a moving body.

  2. Description of the Related Art Conventionally, there is a seat vibration control device that suppresses vibration applied to a seat by controlling the operation of a direct-acting electric actuator under the seat according to vibration acceleration (see Patent Document 1).

JP-A-11-180202

  However, as shown in FIG. 15A, when the seat S is supported only by the actuator 121, the output of the actuator 121 is always required including the stop state. Further, as shown in FIG. 15B, when the seat S is supported by the actuator 121 and the torsion spring 122, the output of the actuator 121 can be set to 0 in the stop state, but the vibration of the seat S is controlled. In this case, the spring force of the torsion spring 122 becomes a reaction force, and in addition to the output for vibration control, the output for the reaction force of the spring is required for the actuator 121, and a large output is required. Further, the pitch and roll could not be controlled.

  The present invention solves the above-described problems, and can reduce the output of the vibration control means, can be realized with a small vibration control means, and can also control the pitch and roll. An object is to provide an apparatus.

  To this end, the vibration control device of the present invention includes a load support unit installed in an installation unit, a counter balance unit connected to the load support unit to provide a load that balances the load, and vibration of the load support unit with respect to the installation unit. A vibration control unit having a vibration control unit for controlling; an acceleration detection unit for detecting an acceleration of the load support unit; a first axis rotation detection unit for detecting a rotation of the load support unit with respect to a first axis; First axis rotation means for rotating the load support portion with respect to the first axis, and the vibration control means is controlled according to a detection value of the acceleration detection means, and the first axis rotation means Is controlled according to a detection value of the first shaft rotation detection means.

  A second shaft rotation detecting unit having a second shaft different from the first shaft and detecting the rotation of the load support portion with respect to the second shaft; and rotating the load support portion with respect to the second shaft. A second axis rotation means for moving the second axis rotation means, wherein the second axis rotation means is controlled in accordance with a detection value of the second axis rotation detection means.

  Moreover, it has 1st guide means to move the said load support part relatively with respect to the said installation part, It is characterized by the above-mentioned.

  Moreover, it has 2nd guide means to move the said counter balance part relatively with respect to the said installation part, It is characterized by the above-mentioned.

  Further, an urging means supported at one end by the installation part, a fulcrum is pivotally supported by the installation part, one end is connected to the first guide means, and the other end is connected to the other end of the urging means. It is characterized by comprising a balance part and adjusting means for changing the length of the balance part.

  Moreover, it has a detection means which detects the state on the said load support part, The said adjustment means is act | operated according to the state detected by the said detection means, It is characterized by the above-mentioned.

  According to the first aspect of the present invention, the load support unit installed in the installation unit, the counter balance unit connected to the load support unit and providing a load that balances the load, and the vibration of the load support unit with respect to the installation unit. A vibration control unit having a vibration control unit for controlling; an acceleration detection unit for detecting an acceleration of the load support unit; a first axis rotation detection unit for detecting a rotation of the load support unit with respect to a first axis; First axis rotation means for rotating the load support portion with respect to the first axis, and the vibration control means is controlled according to a detection value of the acceleration detection means, and the first axis rotation means Is controlled in accordance with the detection value of the first axis rotation detection means, so that the output of the vibration control means can be reduced, which can be realized by a small vibration control means, and the rotation operation with respect to the first axis Can also be controlled against It is possible to provide a dynamic control system.

  According to a second aspect of the present invention, there is provided a second shaft rotation detecting means that has a second shaft different from the first shaft and detects the rotation of the load support portion relative to the second shaft, and the load support portion. Second axis rotation means for rotating the second axis rotation means with respect to the second axis, and the second axis rotation means is controlled in accordance with a detection value of the second axis rotation detection means. It is also possible to control the rotational movement about two axes.

  According to the third aspect of the invention, since the first guide means for moving the load support portion relative to the installation portion is provided, the load support member can be prevented from moving in the horizontal direction.

  According to the fourth aspect of the present invention, since the second guide means for moving the counter balance portion relative to the load support portion is provided, it is not necessary to move the counter balance portion.

  According to the fifth aspect of the present invention, the urging means whose one end is supported by the installation portion, the fulcrum is pivotally supported by the installation portion, one end is connected to the first guide means, and the other end is urged. Since the balance portion connected to the other end of the means and the adjustment means for changing the length of the balance portion are provided, it is not necessary to apply a heavy object such as a counterweight.

  According to the invention described in claim 6, since the detecting means for detecting the state on the load supporting portion is provided and the adjusting means is operated according to the state detected by the detecting means, Can respond appropriately.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a vibration control device 1 according to this embodiment. FIG. 1A is a side view of the vibration control device 1 according to this embodiment, and FIG. 1B is a vibration control according to this embodiment. A front view of the device 1 is shown. FIG. 2 shows a block diagram of the vibration control device 1.

  In the figure, 1 is a vibration control device, 10 is a seat as an example of a load support unit, 20 is a vibration control unit, 21 is a vibration control actuator as an example of vibration control means, 30 is a counter balance unit, and 31 is a balance unit. , 32 are preload adjusting actuators as an example of adjusting means, 33 is a coil spring, 40 is a first slider as an example of first guiding means, 50 is a second slider as an example of second guiding means, and 60 is a first slider. A pitch controller as an example of an axis controller, 61 is a pitch actuator as an example of a first axis rotation means, 62 is a pitch shaft as an example of a first axis shaft, and 63 is a pitch as an example of a first axis bearing. A bearing, 64 is a pitch shaft holder as an example of a first axis shaft holder, 67 is a bracket, and 70 is a roll as an example of a second axis control unit. , 71 is a roll actuator as an example of a second axis rotation means, 72 is a roll shaft as an example of a second axis shaft, 73 is a roll bearing as an example of a second axis bearing, and 74 is a second axis shaft. A roll shaft holder as an example of a holder, 81 is an acceleration sensor, 82 is a pitch sensor as an example of first axis rotation detection means, 83 is a roll sensor as an example of second axis rotation detection means, 90 is a table, F is an installation part. In this embodiment, the coil spring 33 is used, but an elastic member such as a torsion spring may be used as long as it can be installed.

  The vibration control device 1 installs the seat 10 in the installation unit F via the vibration control unit 20 to actively control the vibration of the seat, and sets the balance of force with respect to the load by the counter balance unit 30. .

  The seat 10 is placed on the vibration control unit 20 and the counter balance unit 30 via the pitch control unit 60 and the roll control unit 70.

  The vibration control unit 20 includes a vibration control actuator 21 such as a voice coil motor. The vibration control actuator 21 has its lower part installed in the installation part F and its upper part brought into contact with the seat 10, and is controlled to be vertically extendable by a signal from the acceleration sensor 81 or the like. The acceleration sensor 81 detects the acceleration of the seat 10 and is placed on the seat 10.

The counter balance unit 30 includes a balance unit 31, a preload adjusting actuator 32, a spring 33, and the like.
The balance portion 31 has a fulcrum 31a that is rotatably connected to the support column 34, one end side 31b is connected to a pitch bearing 63 of the pitch control unit 60, and the other end side 31c is a preload adjustment actuator 32. And is pivotally connected to the spring 33. In addition, the support | pillar 34 is installed in the installation part F. FIG.

The preload adjusting actuator 32 has a variable length. One end is connected to the balance unit 31 and the other end is fixed to the spring 33. The preload adjusting actuator 32 is controlled to expand and contract by a signal from the acceleration sensor 81 or the like. . The spring 33 has one end fixed to the preload adjusting actuator 32 and the other end fixed to the installation portion F.
The pitch controller 60 controls the pitch of the seat 10 by rotating the pitch shaft 62 by the pitch actuator 61. The pitch actuator 61 gives a rotational motion to the pitch shaft 62 based on a signal from the pitch sensor 82, and is provided on the first slider 41. The pitch shaft 62 is rotatably connected to the vibration damping actuator 21 and the one end portion 31 b of the balance portion 31 via the pitch bearing 63, and is fixed to the bracket 67 via the pitch shaft holder 64. .

  The roll controller 70 controls the roll of the seat 10 by rotating the roll shaft 72 by the roll actuator 71. The roll actuator 71 gives a rotational motion to the roll shaft 72 in response to a signal from the roll sensor 83, and is placed on the bracket 67. The roll shaft 72 is rotatably connected to the bracket 67 via a roll bearing 73 and is fixed to the seat 10 via a roll shaft holder 74.

  The first slider 40 moves the seat 10 relative to the installation part F. For example, as indicated by an arrow A in FIG. 1B, the first slider 40 is movable in the vertical direction with respect to the wall portion F1 of the installation portion F. A pitch actuator 61 is installed on the first slider 40, and the load support unit 10 can be relatively moved in the vertical direction via the pitch control unit 60 and the roll control unit 70.

  The second slider 50 moves the table 90 on which the counter balance unit 30 is placed relative to the installation unit F. For example, the second slider 50 is movable with respect to the floor portion F2 of the installation portion F as indicated by an arrow B in FIG. The counter balance unit 30 is mounted on the second slider 50 via a table 90. The second slider 50 is rotated by the rotation of the balance unit 31 of the counter balance unit 30 or the expansion and contraction of the preload adjusting actuator 32. , To move.

  As shown in FIG. 2, the vibration control device 1 having such a structure inputs input signals from the acceleration sensor 81, the pitch sensor 82, the roll sensor 83, and the like to the ECU 100 as a controller, By controlling the actuator 61 and the roll actuator 71, vibration is actively controlled. Further, an input signal from the acceleration sensor 81 or the like is input to the ECU 100 to control the preload adjusting actuator 32.

  Next, preload adjustment control will be described. FIG. 3 shows a flowchart of the preload adjustment control. First, in step 1, the load on the seat 10 at the time of stopping without vibration is detected by the acceleration sensor 81 (ST1). Next, in step 2, a predetermined amount of the detected load value is read into the ECU 100 (ST2). Subsequently, in step 3, for example, an average value is calculated from the load values for a certain period of time to calculate a reference load value (ST3). Next, in step 4, the preload adjusting actuator 32 is controlled to operate in accordance with the calculated reference load value (ST4).

  FIG. 4 shows the state of the vibration control device 1 of this embodiment before and after the preload adjustment control. FIG. 4A shows the state before the preload adjustment control, and FIG. 4B shows the state after the preload adjustment control. It is. From the state before the preload adjustment control shown in FIG. 4A, for example, when the occupant P sits on the seat 10 and the load of the occupant P is added to the initial load, the balance 31 of the counter balance unit 30 is counterclockwise. It rotates and a load is applied to the spring 33. Therefore, as shown in FIG. 4B, the preload adjusting actuator 32 is operated to change the length of the balance portion 31, thereby balancing the load and the load by the spring 33.

  Thus, by operating the preload adjusting actuator 32, the load is canceled, and vibration control can be performed from that state.

Next, the vibration control of this embodiment will be described. FIG. 5 shows a flowchart of vibration control. First, in step 11, acceleration during vibration is detected by the acceleration sensor 81 (ST11).
Next, in step 12, the ECU 100 calculates the thrust of the vibration damping actuator 21 (ST12). The thrust calculation is executed, for example, by storing a calculation formula such as acceleration × friction × gain × (−1) or a value of the thrust corresponding to the acceleration in advance. Here, the gain in the calculation formula represents the control delay, and -1 represents the reversal of the direction. Subsequently, in step 13, the thrust calculated in step 12 is instructed to the vibration control actuator 21 (ST13).

  6 and 7 show the state of vibration control of this embodiment. 6 shows a state in which the vibration damping actuator 21 is contracted, FIG. 7 shows a state in which the vibration damping actuator 21 is expanded, FIGS. 6 (a) and 7 (a) are side views, and FIG. 6 (b). ) And FIG. 7B are front views.

  FIG. 6 shows a case where the load value is larger than the reference load value obtained by the preload adjustment control. When the vibration control actuator 21 is contracted to make the vibration on the seat 10 substantially zero, the second slider 70 moves backward. At the same time, the balance unit 31 of the counter balance unit 30 rotates counterclockwise. At this time, the spring 33 extends, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  FIG. 7 shows a case where the load value is smaller than the reference load value obtained by the preload adjustment control. When the vibration control actuator 21 is extended to make the vibration on the seat 10 substantially zero, the second slider 70 moves forward. At the same time, the balance unit 31 of the counter balance unit 30 rotates in the clockwise direction. At this time, the spring 33 contracts, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  FIG. 8 shows the result of comparing the case of using the vibration control device 1 of the present embodiment and the case of the prior art shown in FIG. 15 by simulation. In the simulation, an actuator for vibration suppression necessary for reducing the vibration of the load to 0 under the condition of traveling on a wavy path with an amplitude of 25 mm and a period of 750 mm at a speed of 70 km / h was obtained.

  8A shows a case where the seat is supported only by an actuator as shown in FIG. 15A, and FIG. 8B shows a case where the seat is supported by an actuator as shown in FIG. 15B. In the case of using a spring, FIG. 8C shows the case of this embodiment.

  Next, the pitch control of this embodiment will be described. FIG. 9 shows a flowchart of pitch control. First, in step 21, the angular velocity in the pitch direction is obtained by the pitch sensor 82 (ST21). Note that displacement or angular acceleration in the pitch direction may be obtained. Next, in step 22, the ECU 100 calculates the thrust of the pitch actuator 61 (ST22). The thrust calculation is executed by, for example, storing a calculation formula such as angular acceleration × friction × gain × (−1) or a thrust value corresponding to the angular acceleration in advance. Here, the gain in the calculation formula represents the control delay, and -1 represents the reversal of the direction. Subsequently, in step 23, the thrust calculated in step 22 is instructed to the pitch actuator 61 (ST23).

  FIG. 10 shows the state of pitch control of this embodiment. 10A shows a state in which the pitch actuator 61 is rotated counterclockwise with respect to the paper surface, and FIG. 10B shows a state in which the pitch actuator 61 is rotated clockwise with respect to the paper surface.

  As shown in FIG. 10A, when the pitch sensor 82 detects that the seat 10 has moved in the clockwise direction with respect to the paper surface about the pitch axis, the ECU 100 rotates the pitch actuator 61 in the counterclockwise direction. Let

  As shown in FIG. 10B, when the pitch sensor 82 detects that the seat 10 has moved in the clockwise direction with respect to the paper surface about the pitch axis, the ECU 100 rotates the pitch actuator 61 in the clockwise direction. .

  Next, the roll control of this embodiment will be described. FIG. 11 shows a flowchart of roll control. First, in step 31, the roll sensor 83 obtains the angular velocity in the roll direction (ST31). In addition, you may obtain | require the displacement or angular acceleration of a roll direction. Next, at step 32, the ECU 100 calculates the thrust of the roll actuator 71 (ST32). The thrust calculation is executed by, for example, storing a calculation formula such as angular acceleration × friction × gain × (−1) or a thrust value corresponding to the angular acceleration in advance. Here, the gain in the calculation formula represents the control delay, and -1 represents the reversal of the direction. Subsequently, in step 23, the thrust calculated in step 22 is instructed to the roll actuator 71 (ST33).

  FIG. 12 shows the state of roll control of this embodiment. 12A shows a state where the roll actuator 71 is rotated counterclockwise with respect to the paper surface, and FIG. 12B shows a state where the roll actuator 71 is rotated clockwise with respect to the paper surface. is there.

  As shown in FIG. 12A, when the roll sensor 83 detects that the seat 10 has moved clockwise with respect to the paper surface about the roll axis, the ECU 100 rotates the roll actuator 71 counterclockwise. Let

  As shown in FIG. 12B, when the roll sensor 83 detects that the seat 10 has moved in the clockwise direction with respect to the paper surface about the roll axis, the ECU 100 rotates the roll actuator 71 in the clockwise direction. .

  FIG. 13 is a diagram illustrating a case where the vibration control and the pitch control of the present embodiment are performed simultaneously. 13A shows a state where the vibration damping actuator 21 is contracted and the pitch actuator 61 is rotated counterclockwise with respect to the paper surface. FIG. The actuator 21 is extended and the pitch actuator 61 is rotated clockwise with respect to the paper surface.

  FIG. 13A shows that the pitch sensor 82 detects that the load value is larger than the reference load value obtained by the preload adjustment control and that the seat 10 has moved in the clockwise direction with respect to the paper surface about the pitch axis. In this case, when the vibration control actuator 21 is contracted by the ECU 100 so that the vibration on the seat 10 is substantially zero, the second slider 70 is moved backward, and the balance unit 31 of the counter balance unit 30 is counterclockwise. And the pitch actuator 61 rotates counterclockwise. At this time, the spring 33 extends, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  FIG. 13B shows that the pitch sensor 82 detects that the load value is smaller than the reference load value obtained by the preload adjustment control and that the seat 10 has moved in the clockwise direction with respect to the paper surface about the pitch axis. When the vibration control actuator 21 is extended to make the vibration on the seat 10 substantially zero, the second slider 70 moves forward and the balance 31 of the counter balance unit 30 rotates clockwise. And the pitch actuator 61 rotates clockwise. At this time, the spring 33 contracts, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  FIG. 14 is a diagram illustrating a case where vibration control and roll control of the present embodiment are performed simultaneously. FIG. 14A shows a state in which the vibration damping actuator 21 is contracted and the roll actuator 71 is rotated counterclockwise with respect to the paper surface. FIG. The actuator 21 is extended and the roll actuator 71 is rotated clockwise with respect to the paper surface.

  FIG. 14A shows that the roll sensor 83 detects that the load value is larger than the reference load value obtained by the preload adjustment control and that the seat 10 has moved in the clockwise direction with respect to the paper surface about the roll axis. In this case, when the vibration control actuator 21 is contracted by the ECU 100 so that the vibration on the seat 10 is substantially zero, the second slider 70 is moved backward, and the balance unit 31 of the counter balance unit 30 is counterclockwise. The roll actuator 71 rotates counterclockwise. At this time, the spring 33 extends, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  In FIG. 14B, the roll sensor 83 detects that the load value is smaller than the reference load value obtained by the preload adjustment control, and that the seat 10 has moved in the clockwise direction with respect to the paper surface about the roll axis. When the vibration control actuator 21 is extended to make the vibration on the seat 10 substantially zero, the second slider 70 moves forward and the balance 31 of the counter balance unit 30 rotates clockwise. The roll actuator 71 rotates in the clockwise direction. At this time, the spring 33 contracts, but the load and the load by the spring 33 can be kept in a substantially balanced state.

  Thus, according to the present embodiment, the seat 10 installed in the installation unit F, the counter balance unit 30 that is connected to the seat 10 and provides a load that balances the load, and the vibration of the seat 10 with respect to the installation unit F are controlled. The vibration control unit 20 having the vibration control actuator 21, the acceleration sensor 81 that detects the acceleration of the seat 10, the pitch sensor 82 that detects the rotation of the seat 10 with respect to the pitch axis P, and the seat 10 with respect to the pitch axis P The vibration control actuator 21 is controlled according to the detection value of the acceleration sensor 81, and the pitch actuator 61 is controlled according to the detection value of the pitch sensor 82. The output of the vibration control actuator 21 can be reduced, and can be realized with a small vibration control actuator 21. The vibration control apparatus 1 which can be controlled in response to a turning operation to be able to provide. “Controlled according to the detected value” means that the control corresponding to the detected value at that time is functionally performed.

  In addition, a roll sensor 83 having a roll axis R different from the pitch axis P and detecting the rotation of the seat 10 with respect to the roll axis R, and a roll actuator 71 for rotating the seat 10 with respect to the roll axis R are provided. Since the roll actuator 71 is controlled according to the detection value of the roll sensor 83, the roll actuator 71 can also be controlled with respect to the rotation operation with respect to the roll axis R.

  Moreover, since the first slider 40 that moves the seat 10 relative to the installation portion F is provided, the seat 10 can be prevented from moving in the horizontal direction.

  Moreover, since the second slider 50 that moves the counter balance unit 30 relative to the seat 10 is provided, the counter balance unit 30 can be moved with respect to the vertical movement of the seat 10.

  Further, the spring 33 supported at one end by the installation portion F, the balance portion 31 pivotally supported by the installation portion F, connected at one end to the first slider 40, and connected at the other end to the other end of the spring 33. And the preload adjusting actuator 32 for changing the length of the balance portion 31, it is not necessary to apply a heavy object such as a counterweight.

  Further, since the acceleration sensor 81 for detecting the state on the seat 10 is provided and the preload adjustment actuator 32 is operated according to the state detected by the acceleration sensor 81, it is possible to appropriately cope with a change in the initial load. .

  The present invention is not limited to the above-described embodiment, and various modifications can be made based on the spirit of the present invention. For example, the processing order of the control flowchart can be changed as appropriate. They are not excluded from the scope of the present invention.

It is a figure which shows the vibration control apparatus of 1st Embodiment. It is the block diagram which showed the system configuration | structure of the vibration control apparatus. It is a figure which shows the flowchart of preload adjustment control. It is a figure which shows the state of the vibration control apparatus at the time of preload adjustment control. It is a figure which shows the flowchart of vibration control. It is a figure which shows the state which the vibration control means at the time of vibration control contracted. It is a figure which shows the state which the vibration control means at the time of vibration control extended | stretched. It is a figure which shows the simulation which compared the vibration control apparatus of this embodiment, and the prior art. It is a figure which shows the flowchart of pitch control. It is a figure which shows the state which rotated the pitch actuator. It is a figure which shows the flowchart of roll control. It is a figure which shows the state which rotated the roll actuator. It is a figure which shows the state which act | operated the actuator for damping | damping and the pitch actuator. It is a figure which shows the state which act | operated the actuator for vibration suppression and the roll actuator. It is a figure which shows the prior art.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Vibration control apparatus, 10 ... Seat (load support part), 20 ... Vibration control part, 21 ... Damping actuator (vibration control means), 30 ... Counter balance part, 31 ... Balance part, 32 ... Preload adjustment actuator (Adjusting means), 33 ... Spring (biasing means), 40 ... First slider (first guiding means), 50 ... Second slider (second guiding means), 60 ... Pitch control section (first axis control section) 61... Pitch actuator (first axis rotating means) 62... Pitch shaft (first axis shaft) 63. Pitch bearing (first axis bearing) 64. Pitch shaft holder (first axis shaft holder) ... Bracket, 70 ... Roll controller (second axis controller), 71 ... Roll actuator (second axis rotating means), 72 ... Roll shaft (second axis shaft), 73 ... Low Bearing (second axis bearing), 74 ... roll shaft holder (second axis shaft holder), 81 ... acceleration sensor (acceleration detection means), 82 ... pitch sensor (first axis rotation detection means), 82 ... roll sensor ( Second axis rotation detection means), 90 ... stand, 100 ... ECU (controller), F ... installation section

Claims (6)

A load support section installed in the installation section;
A counter balance unit connected to the load support unit to provide a load balanced with the load;
A vibration control unit having vibration control means for controlling vibration of the load support unit with respect to the installation unit;
An acceleration detecting means for detecting an acceleration of the load supporting portion;
First axis rotation detection means for detecting rotation of the load support portion relative to the first axis;
First axis rotation means for rotating the load support portion with respect to the first axis;
With
The vibration control unit is controlled according to a detection value of the acceleration detection unit, and the first axis rotation unit is controlled according to a detection value of the first axis rotation detection unit. Vibration control device. A second axis different from the first axis;
Second axis rotation detection means for detecting rotation of the load support portion relative to the second axis;
Second axis rotation means for rotating the load support portion with respect to the second axis;
With
The vibration control apparatus according to claim 1, wherein the second axis rotation unit is controlled in accordance with a detection value of the second axis rotation detection unit.   The vibration control device according to claim 1, further comprising a first guide unit that moves the load support unit relative to the installation unit.   The vibration control apparatus according to any one of claims 1 to 3, further comprising second guide means for moving the counter balance portion relative to the installation portion.   An urging means supported at one end by the installation part, a balance part pivotally supported by the installation part, one end connected to the first guide means, and the other end connected to the other end of the urging means The vibration control device according to any one of claims 1 to 4, further comprising an adjusting unit that changes a length of the balance unit.   The vibration control apparatus according to claim 5, further comprising a detection unit that detects a state on the load support unit, and operating the adjustment unit according to a state detected by the detection unit.

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