JP2011124292A5 - - Google Patents

Claims (9)

A surface plate,
A stage movable on the surface plate;
An actuator for driving the stage;
A reaction force counter having a mass body and an actuator for moving the mass body to reduce vibration generated in the surface plate due to the movement of the stage;
A projection optical system;
A structure that supports the projection optical system;
A sensor for detecting vibration provided on any one of the floor supporting the projection optical system, the structure, and the surface plate;
An exposure apparatus comprising: a control unit that controls an actuator that moves the mass body based on an output from the sensor so that vibration of the surface plate is reduced. The control means includes a reaction force counter position command value generation unit that generates a reaction force counter position command value based on a stage position command value, and a function for correcting the thrust of the reaction force counter based on an output from the sensor. The exposure apparatus according to claim 1, further comprising a thrust correction value generation unit that generates a thrust correction value. The exposure apparatus according to claim 2, wherein the control unit includes a reaction force counter thrust command value generation unit that generates a reaction force counter thrust command value based on a stage thrust command value. The exposure apparatus according to claim 1, wherein the sensor is a sensor that is provided in the structure and detects any of a relative position, a relative speed, and a relative acceleration between the structure and the surface plate. . The exposure apparatus according to claim 1, wherein the sensor is a sensor that detects acceleration of the structure. The exposure apparatus according to claim 1, wherein the sensor is a sensor that detects acceleration of the projection optical system. The exposure apparatus according to claim 1, wherein the sensor is a sensor that detects acceleration of the floor. The process of exposing a pattern to a board | substrate using the exposure apparatus of any one of Claims 1-7,
And a step of developing the exposed substrate. A surface plate,
A stage movable on the surface plate;
An actuator for driving the stage;
A reaction force counter having a mass body and an actuator for moving the mass body to reduce vibration generated in the surface plate due to the movement of the stage;
A body structure;
A sensor for detecting vibration provided on any of the main body structure and the floor supporting the surface plate;
And a control means for controlling an actuator that moves the mass body based on an output from the sensor so as to reduce vibration of the surface plate.