JP2009149389A5 - - Google Patents

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Publication number
JP2009149389A5
JP2009149389A5 JP2007326935A JP2007326935A JP2009149389A5 JP 2009149389 A5 JP2009149389 A5 JP 2009149389A5 JP 2007326935 A JP2007326935 A JP 2007326935A JP 2007326935 A JP2007326935 A JP 2007326935A JP 2009149389 A5 JP2009149389 A5 JP 2009149389A5
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JP
Japan
Prior art keywords
unit according
levitation unit
conveyance path
guide groove
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007326935A
Other languages
English (en)
Japanese (ja)
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JP2009149389A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007326935A priority Critical patent/JP2009149389A/ja
Priority claimed from JP2007326935A external-priority patent/JP2009149389A/ja
Publication of JP2009149389A publication Critical patent/JP2009149389A/ja
Publication of JP2009149389A5 publication Critical patent/JP2009149389A5/ja
Pending legal-status Critical Current

Links

JP2007326935A 2007-12-19 2007-12-19 浮上ユニット及びそれを有する装置 Pending JP2009149389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007326935A JP2009149389A (ja) 2007-12-19 2007-12-19 浮上ユニット及びそれを有する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007326935A JP2009149389A (ja) 2007-12-19 2007-12-19 浮上ユニット及びそれを有する装置

Publications (2)

Publication Number Publication Date
JP2009149389A JP2009149389A (ja) 2009-07-09
JP2009149389A5 true JP2009149389A5 (enExample) 2011-02-10

Family

ID=40919033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007326935A Pending JP2009149389A (ja) 2007-12-19 2007-12-19 浮上ユニット及びそれを有する装置

Country Status (1)

Country Link
JP (1) JP2009149389A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2388808A1 (de) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Berührungsloses Transportsystem
JP5663297B2 (ja) * 2010-12-27 2015-02-04 東京応化工業株式会社 塗布装置
EP4253334A3 (en) * 2016-09-13 2024-03-06 Corning Incorporated Apparatus and method for processing a glass substrate
TWI839413B (zh) * 2018-12-21 2024-04-21 美商凱特伊夫公司 用於控制基材之漂浮的裝置、系統及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06255775A (ja) * 1993-03-05 1994-09-13 Ochiai Nekusasu:Kk 搬送装置
JPH08293292A (ja) * 1995-04-25 1996-11-05 Matsushita Electric Ind Co Ltd 薄物電池部材の搬送装置
JP4789399B2 (ja) * 2003-05-01 2011-10-12 オリンパス株式会社 浮上ユニット
KR100665715B1 (ko) * 2005-01-27 2007-01-09 주식회사 태성기연 판유리 이송장치
JP4889275B2 (ja) * 2005-10-11 2012-03-07 株式会社日本設計工業 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

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