JP2009145723A - Method for manufacturing liquid crystal display device and inspecting system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten an inspection time in an inspection process of a liquid crystal display panel. <P>SOLUTION: Each inspection unit includes a main position 100, an inspection position 70, a sub-position 200, inspection tables 30, 40, 50 and a sub-inspection table 60. The sub-inspection table 60 is set in the main position 100 during the time when the liquid crystal display panel 10 is inspected in the inspection position 70. The sub-inspection table 60 set in the main position 100 is moved and another liquid crystal display panel 10 is set in another inspection position. Inspection conditions of one liquid crystal display panel 10 are set during the time when another liquid crystal display panel 10 is inspected, so that the time required in the inspection process of the liquid crystal display panel 10 is shortened. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a liquid crystal display device, and more particularly to a method and an inspection apparatus for a liquid crystal display panel.

  The demand for liquid crystal display devices is expanding from computer displays, mobile phone terminals, etc. to large-sized TVs because the display devices can be made thin and the weight does not increase. The liquid crystal display device includes a liquid crystal display panel and a driving IC for driving the liquid crystal mounted on the liquid crystal display panel, a flexible wiring board for supplying power, electric signals, etc. to the liquid crystal display panel, and light from the back of the liquid crystal display panel. It consists of a backlight to be supplied.

  In a liquid crystal display panel, a TFT substrate in which pixels consisting of thin film transistors (TFTs) and pixel electrodes are formed in a matrix and a color filter substrate on which color filters and the like are formed face each other through a sealing material, and liquid crystal is enclosed inside In addition, a polarizing plate is attached on the TFT substrate and the color filter substrate.

  A liquid crystal display device used for a TV or the like is enlarged to a size of 32 inches or more, and transportation of a liquid crystal display panel for processing or inspection is an important problem. There are "Patent Document 1", "Patent Document 2", "Patent Document 3", "Patent Document 4", and the like that describe such a transfer line system.

JP-A-6-48545 JP 7-199138 A JP-A-10-54967 JP-A-10-132706

  If the defect of the liquid crystal display panel 10 can be found before the liquid crystal display panel 10 with the polarizing plate attached is advanced to a subsequent process, it is not necessary to process a defective product in the subsequent process, and wasteful manufacturing costs are required. You don't have to. Therefore, during the manufacturing process, there is a process of inspecting the liquid crystal display panel 10 in a completed state. FIG. 9 shows a conventional inspection method in this process.

  In FIG. 9, the liquid crystal display panel 10 with the polarizing plate attached from the upstream process is stocked on the pre-inspection liquid crystal display panel mounting table 410. The pre-inspection liquid crystal display panel stand 410 in which the liquid crystal display panel 10 is stocked moves to the inspection operator. A fixed inspection table 400 in FIG. 9 has a fixed backlight 430. The liquid crystal display panel 10 is set on the fixed backlight 430. The backlight is turned on, and the liquid crystal display panel 10 is inspected for defects by the transmitted light from the backlight. The backlight of the actual product is used as the backlight. For example, in the case of a liquid crystal display device for 32-inch TV, a backlight for 32-inch TV is used. Therefore, if the size of the liquid crystal display panel 10 to be inspected is different, the backlight is replaced every time, but the inspection table for the product size is used.

  One worker is attached to the inspection table and performs a predetermined defect inspection. When the inspection of the liquid crystal display panel 10 is finished, the liquid crystal display panel 10 is moved to the post-inspection liquid crystal display panel mounting table 420, and the inspected liquid crystal display panel 10 is stocked. When the post-inspection liquid crystal display panel table 420 is filled with the liquid crystal display panel 10, the post-inspection liquid crystal display panel table 420 is moved to a subsequent process. Thus, since the movement and defect inspection of the liquid crystal display panel 10 are performed by one worker, the worker is limited to inspecting the liquid crystal display panels 10 one by one. The object of the present invention is to devise a transport system for the liquid crystal display panel 10 in this inspection process, to enable the inspection process for a plurality of panels to be performed by one worker, and to improve the throughput of the inspection process. is there.

  The present invention solves the above-mentioned problems, and mechanically performs a preparatory process for inspection including transportation of a liquid crystal display panel while a human is performing substantial inspection work. It has a configuration that enables it. Specific means are as follows.

The present invention is a liquid crystal display panel inspection system in which liquid crystal is sandwiched between two substrates, and a polarizing plate is attached to each of the two substrates. Each of the inspection areas has an inspection position, a main position, and a sub-position, and each of the inspection areas has an inspection table and a sub-inspection table, The inspection table is configured to be movable between the inspection position and the main position, and the sub-inspection table is configured to be movable between the main position and the sub position,
The liquid crystal display panel to be inspected passes through the inspection table or sub-inspection table on the main position and is transported to a target inspection area.

  Furthermore, a liquid crystal display device having a liquid crystal display panel in which liquid crystal is sandwiched between two substrates, and a polarizing plate is attached to each of the two substrates, wherein the liquid crystal display panel includes: , Inspected in at least one of the plurality of inspection areas arranged side by side at the time of inspection, each of the inspection areas has an inspection position, a main position, a sub-position, and further each of the inspection areas Has an inspection table and a sub-inspection table, the inspection table is movable between the inspection position and the main position, and the sub-inspection table is configured to be movable between the main position and the sub-line. The liquid crystal display panel to be inspected passes over the inspection table or the sub-inspection table on the main position, and performs a target inspection. Characterized in that it is conveyed to pass.

  According to the present invention, since the liquid crystal display panel can be efficiently transported in the liquid crystal display panel inspection process, the time required for the liquid crystal display panel inspection process can be shortened, and the manufacturing cost can be reduced. . In addition, since the substantial inspection time is not shortened, the throughput of the inspection process can be increased without degrading the inspection quality.

  The detailed contents of the present invention will be disclosed according to the embodiments.

  FIG. 1 is a schematic view of a liquid crystal display panel 10 inspection system according to the present invention, which is an example of a system in which three inspection units are connected. In this system, the liquid crystal display panel 10 is placed on the pallet 11, and the pallet 11 moves on a roller conveyor installed on an inspection table described later. In FIG. 1, a carry-in tilt table 80, a first inspection table 30, a second inspection table 40, a third inspection table 50, and a carry-out tilt table 90 are arranged side by side. The inspection table is set up at a predetermined angle so that a person who is an inspector can easily see. The carry-in tilt base 80 has a mechanism for setting the pallet 11 that has been placed horizontally and moved at a predetermined angle. The carry-out tilt base 90 has a mechanism for horizontally setting the pallet 11 set at a predetermined angle.

  The positions of the carry-in tilt table 80, the first inspection table 30, the second inspection table 40, the third inspection table 50, and the carry-out tilt table 90 in the state of FIG. The carry-in tilt table 80, the first inspection table 30, the second inspection table 40, the third inspection table 50, and the carry-out tilt table 90 are provided with roller conveyors described later, and the pallet 11 on which the liquid crystal display panel 10 is placed. Is moved on the main position 100 by the roller conveyor.

  First, the movement of the pallet 11 on which the liquid crystal display panel 10 is set will be described. In FIG. 1, the pallet 11 is circulating. The pallet 11 returned from the return line 300 is moved to the liquid crystal display panel insertion position 130 by the carry-in elevator UELV. At the liquid crystal display panel loading position 130, the pallet 11 is set horizontally, and the liquid crystal display panel 10 is set on the pallet 11. The pallet 11 on which the liquid crystal display panel 10 is set is set at a predetermined angle in the carry-in tilt table 80, moves in the main position 100, and the liquid crystal display panel 10 is inspected in the first inspection table 30 to the third inspection table 50. The The operation at the time of inspection will be described later.

  The pallet 11 on which the liquid crystal display panel 10 that has been inspected is placed moves to the carry-out tilt table 90, where it is set horizontally. Thereafter, the liquid crystal display panel is moved to the carry-out position 140, and the liquid crystal display panel 10 is carried out to the next step. On the other hand, the empty pallet 11 from which the liquid crystal display panel 10 has been separated moves to the return line 300 by the carry-out elevator DELV. When the pallet 11 moves along the return line 300 to below the liquid crystal display panel carry-in position 130, the pallet 11 moves again to the liquid crystal display panel throw-in position 130 by the carry-in elevator UELV, and moves to the main position 100.

  In FIG. 1, the positions where humans actually inspect are the first inspection table 30 to the third inspection table 50. In such a system, the time required for the inspection process includes the inspection time t1 at which each inspection table is actually inspected and the transport time (including standby time) until the liquid crystal display panel to be inspected is transported to the target inspection table. ) The total time t3 of t2.

  In FIG. 1, when the plurality of liquid crystal display panels 10 are continuously inspected with only the main position 100, it is necessary to wait until the liquid crystal display panel 10 under inspection is conveyed to the next process. Time occurs. Therefore, the total time t3 for inspecting m panels is t3 = m × (t1 + t2). Since this inspection process is incorporated in the manufacturing process of the liquid crystal display device, the cycle in which the liquid crystal display panel 10 moves directly affects the production efficiency of the liquid crystal display device.

  In the present invention, by eliminating the transport time t2, the period of movement of the liquid crystal display panel 10 in the inspection process is brought closer to the time t1 when a human actually inspects, thereby improving the productivity of the liquid crystal display device.

  For this purpose, each inspection unit of the present invention installs a sub inspection table 60 behind the first inspection table 30 to the third inspection table 50 in the main position 100 as shown in FIG. In FIG. 1, it is assumed that the pallet 11 on which the liquid crystal display panel 10 is placed has moved from the carry-in tilt table 80 to the first inspection table 30. FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1 in this state.

  In FIG. 2, a first inspection table 30 is installed on the main position 100. The first inspection table 30 is provided with a liquid crystal display panel 10 to be inspected. The liquid crystal display panel 10 is on a roller conveyor 22 described later on the first inspection table 30. A sub-inspection table 60 having the same shape as that of the first inspection table 30 is installed behind the first inspection table 30. The position of the sub-inspection table 60 in this state is referred to as a sub-position 200. Since the sub-inspection table 60 does not perform actual inspection, the sub-inspection table 60 has only the role of moving the pallet 11 and the inspection backlight 21 is not installed.

  In FIG. 2, a return line 300 exists below the main position 100 and the sub position 200, and the empty pallet 11 moves along the return line 300 to the liquid crystal display panel loading position 130. The moving mechanism of the pallet 11 in the return line 300 may be a belt conveyor or a roller conveyor.

  The 1st inspection stand 30 in FIG. 2 has shown the state which does not test | inspect. The first inspection table 30 in the state of FIG. 2 has a role as a line for moving the pallet 11 because it is located on the main position 100.

  FIG. 3 is a cross-sectional view taken along the line BB of FIG. 1. When the pallet 11 on which the liquid crystal display panel 10 is placed comes to the second inspection table 40, the second inspection table 40 moves forward, and a human being A position that can be inspected, that is, a state set in the inspection position 70 is shown. As shown in FIG. 3, when the pallet 11 on which the liquid crystal display panel 10 is mounted is set on the second inspection table 40 on the main position 100, the second inspection table 40 is located at the inspection position 70 indicated by the one-dot chain line in FIG. Moving. Then, at the same time as the second inspection table 40 moves, the sub inspection table 60 moves from the sub position 200 to the position of the main position 100.

  FIG. 4 shows a state where the second inspection table 40 is installed at a position to be inspected by humans, that is, an inspection position 70 and the sub-inspection table 60 is set at the position of the main position 100. FIG. 4 also corresponds to the BB cross-sectional view of FIG. As with the second inspection table 40, the roller conveyor 22 is installed on the sub inspection table 60, and the other pallets 11 can move on the roller conveyor 22 of the sub inspection table 60.

  In this state, a human inspects the liquid crystal display panel 10 installed on the second inspection table 40. While the human is inspecting the liquid crystal display panel 10, the roller conveyor 22 of the sub inspection table 60 behind the second inspection table 40 continues to operate, and the pallet 11 on which the next liquid crystal display panel 10 is placed is moved to the second. 3 Send to inspection table 50.

  When the transported liquid crystal display panel 10 is set on the third inspection table 50 in the third inspection table 50, the same state as in FIG. In this state, the third inspection table 50 moves to a position (inspection position 70) that is easy for humans to see. This operation is the same as in FIG. At this time, the sub-inspection table 60 also moves, and the sub-inspection table 60 is set at the position of the main position 100. This state is the same as in FIG. Therefore, while a person inspects the liquid crystal display panel 10 on the second inspection table 40, the other liquid crystal display panel 10 set on the third inspection table 50 is set in a state where it can be inspected. Then, a human can inspect the liquid crystal display panel 10 set on the third inspection table 50 immediately after the inspection of the liquid crystal display panel 10 on the second inspection table 40 is finished. Therefore, the inspection cycle of the liquid crystal display panel 10 is almost free from the waiting time t2 described above, and is substantially only the inspection time t1, thereby increasing the production efficiency.

  When the inspection of the liquid crystal display panel 10 on which a person is set is completed on the second inspection table 40, the second inspection table 40 moves backward and returns to the main position 100. The sub inspection table 60 returns to the sub position 200. Then, the pallet 11 on which the liquid crystal display panel 10 that has been inspected is placed moves at the main position 100 on the third inspection table 50 or the sub-inspection table 60 of the third inspection table 50 to carry out the liquid crystal display panel. Move to position 140.

  The liquid crystal display panel 10 that has been inspected is unloaded from the second inspection table 40 by the roller conveyor 22, and the pallet 11 on which the next liquid crystal display panel 10 is placed is set on the second inspection table 40. This is the state shown in FIG. If it does so, the 2nd inspection stand 40 will advance to the position (inspection position 70) where a human being is easy to inspect. At the same time, as shown in FIG. 4, the sub-inspection table 60 behind the second inspection table 40 also moves, and the sub-inspection table 60 is set at the main position 100. This operation is performed while a human is inspecting the liquid crystal display panel 10 on the third inspection table 50. When a person finishes the inspection of the liquid crystal display panel 10 on the third inspection table 50, the liquid crystal display panel 10 set on the second inspection table 40 can be inspected immediately. This operation is repeated.

  FIG. 5 summarizes the operation of the present invention described above in a table. In the table of FIG. 5, the conveyance flow 1 shows a state where the pallet 11 on which the liquid crystal display panel 10 is mounted is installed on the first inspection table 30 at the main position 100. The transport flow 2 shows a state where the pallet 11 on which the liquid crystal display panel 10 is mounted is moved to the second inspection table 40. The transport flow 3 shows a state in which the second inspection table 40 on which the pallet 11 on which the liquid crystal display panel 10 is mounted is advanced and set at a position (inspection position 70) where human inspection is possible. Further, the transport flow 3 shows a state in which the sub-inspection table 60 moves forward simultaneously with the second inspection table 40 and is set at the main position 100.

  The transport flow 4 shows a state where the pallet 11 on which another liquid crystal display panel 10 is mounted has moved on the main position 100. In this state, the sub-inspection table 60 installed behind the second inspection table 40 is installed at the main position 100. Therefore, as shown in the transport flow 5, the pallet 11 on which the liquid crystal display panel 10 is mounted can pass through the back of the second inspection table 40 and reach the third inspection table 50.

  When the pallet 11 on which the liquid crystal display panel 10 is mounted reaches the third inspection table 50, the third inspection table 50 moves forward to a position where the human can inspect (inspection position 70). The sub-inspection table 60 installed behind the third inspection table 50 also moves forward and is installed on the main position 100. This state is shown in the conveyance flow 6. In this way, while the third inspection table 50 on which the pallet 11 on which the liquid crystal display panel 10 is mounted is performing the operation of being installed at a position (inspection position 70) where human inspection is possible, The liquid crystal display panel 10 mounted on the liquid crystal display panel 10 is inspected.

  Thus, in the present invention, the inspection time of the liquid crystal display panel 10 can be shortened. The important point of the present invention is that the entire inspection time can be shortened without reducing the human inspection time and hence without reducing the quality of the inspection.

  The above flow has been described on the assumption that humans are inspecting only the second inspection table 40 and the third inspection table 50, but this is for the purpose of explaining the present invention, and also in the first inspection table 30. Needless to say, the inspection can be performed.

  FIG. 6 is a detailed side view of the second inspection table 40 and the sub-inspection table 60. FIG. 7 is a view of the second inspection table 40 as viewed from the direction A in FIG. Although the second inspection table 40 will be described here as an example, the basic structure is the same for the first inspection table 30 and the third inspection table 50. Each of the first inspection table 30 to the third inspection table 50 has a sub-inspection table 60 having the same structure.

  In FIG. 6, the second inspection table 40 and the sub-inspection table 60 move simultaneously, so that they are set on the same inspection stage 25. The second examination table 40 is inclined at a predetermined angle so that it can be easily seen by humans. This angle is the same as the angle at which the carry-in tilt base 80 tilts the pallet 11. A roller conveyor 22 is installed below the second inspection table 40, and the pallet 11 is installed in a groove portion of the roller conveyor 22, and the pallet 11 is conveyed by the rotation of the rollers. Further, in order to make the movement of the pallet 11 smooth, a plurality of conveyance auxiliary rollers 23 are attached to the second inspection table 40. A plurality of roller conveyors 22 are installed on one second inspection table 40. For example, in FIG. 7, seven are installed. FIG. 7 shows that the pallet 11 on which the liquid crystal display panel 10 is placed moves in the B direction when the seven roller conveyors 22 installed on the second inspection table 40 rotate.

  In the second inspection table 40, the liquid crystal display panel 10 is supported by a stopper 111 formed on the pallet 11. As shown in FIG. 7, three stoppers 111 are formed on each of the three sides of the liquid crystal display panel 10. The liquid crystal display panel 10 is supported on the pallet 11 only by the stopper 111. Still, since the second inspection table 40 has a predetermined inclination, the liquid crystal display panel 10 is stably installed.

  FIG. 7 shows a state where three first inspection tables 30, second inspection tables 40, and third inspection tables 50 are arranged on the main position 100. In the state of FIG. 7, the pallet 11 on which the liquid crystal display panel 10 is placed is mounted only on the second inspection table 40, and the pallet 11 is rotated by the roller conveyor 22 formed on the second inspection table 40. Move in direction B. Since the first inspection table 30, the second inspection table 40, and the third inspection table 50 are continuously arranged at the same angle of inclination, the pallet 11 on which the liquid crystal display panel 10 is mounted can move smoothly. Here, when the second inspection table 40 moves forward for inspection and leaves the main position 100, the sub-inspection table 60 supplements the following.

  FIG. 8 is a detailed perspective view of the pallet 11 on which the liquid crystal display panel 10 is mounted. In FIG. 8, the pallet 11 is made of Al (aluminum). A rectangular opening is formed at the center of the pallet 11. This opening is for supplying light from the inspection backlight 21 to the liquid crystal display panel 10 during inspection. A light shielding plate 113 is formed around the opening. The light shielding plate 113 is used to prevent light from the inspection backlight 21 from leaking in the horizontal direction during inspection and hindering the inspection of the liquid crystal display panel 10.

  Three stoppers 111 for supporting the liquid crystal display panel 10 are formed on each of the lower and left and right sides of the light shielding plate 113. The position of the stopper 111 is set at a reasonable position in order to place and support the liquid crystal display panel 10 obliquely. Further, the height of the stopper 11 is formed higher than that of the light shielding plate 113. A support block 114 that is used when the liquid crystal display panel 10 is placed on the pallet 11 is formed on the upper side of the light shielding plate 113. The liquid crystal display panel 10 covers the opening of the pallet 11 and is installed on the pallet 11. After the liquid crystal display panel 10 is installed on the pallet 11, the liquid crystal display panel 10 is transported integrally with the pallet 11.

  Returning to FIG. 6, an inspection backlight 21 is installed behind the second inspection table 40. The inspection backlight 21 is turned on when the liquid crystal display panel 10 is inspected, and inspects the screen of the liquid crystal display panel 10 to detect defects in the same state as when the liquid crystal display device is completed. The inspection backlight 21 attached to the second inspection table 40 has a size that can accommodate the maximum size of the liquid crystal display panel 10 to be inspected by the inspection line, and can cope with a variety of inspections. For example, when inspecting the liquid crystal display panel 10 having a small size, the opening of the pallet 11 shown in FIG.

  In FIG. 6, a sub-inspection table 60 is installed behind the second inspection table 40. The configuration of the sub inspection table 60 is the same as that of the second inspection table 40 except that the inspection backlight 21 is not provided. In FIG. 6, the sub-inspection table 60 shows a state in which the liquid crystal display panel 10 next to the liquid crystal display panel 10 installed on the second inspection table 40 is installed and moved. That is, while the liquid crystal display panel 10 set on the second inspection table 40 is moved to the inspection position 70, the sub inspection table 60 is installed at the main position 100 and the roller conveyor 22 formed on the sub inspection table 60. The liquid crystal display panel 10 moves on the top.

  As described above, according to the present invention, the waiting time for inspecting the liquid crystal display panel 10 can be eliminated, so that the efficiency of the inspection process can be improved and the production efficiency can be improved.

  In the above description, the liquid crystal display panel 10 at the inspection position 70 has been described as being performed by a human. However, the inspection of the liquid crystal display panel 10 can be automated using a camera such as a CCD. Needless to say, the present invention can also be applied to such a case. Further, FIG. 1 shows an example in which three inspection units are connected, but among these inspection units, a specific inspection unit is automatically inspected by a camera, and human inspection is performed by other inspection units. You can also

  Furthermore, the number of inspection units can be increased or decreased as necessary. Even if the number of inspection units changes, the present invention can be applied.

  In the above description, the present invention has been described as inspecting the liquid crystal display panel 10 in a state where a polarizing plate is attached. However, the present invention is not limited to this, and can be applied to, for example, inspection of the liquid crystal display panel 10 in a state where a driving IC chip or a flexible wiring board is attached to the liquid crystal display device.

It is a schematic diagram which shows the test | inspection flow of the liquid crystal display panel of this invention. It is AA sectional drawing of FIG. It is a schematic diagram which shows the state which the inspection table is moving. It is BB sectional drawing of FIG. It is explanatory drawing of the test | inspection flow of the liquid crystal display panel of this invention. It is a side view of a test table and a sub test table. It is the figure which looked at the inspection stand of FIG. 6 from the A direction. It is a perspective view of a pallet. It is a conventional example of an inspection process.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Liquid crystal display panel, 11 ... Pallet, 21 ... Back light, 22 ... Roller conveyor, 23 ... Conveyance auxiliary roller, 25 ... Inspection stage, 30 ... First inspection table, 40 ... Second inspection table, 50 ... Third inspection 60: Sub-inspection table, 70: Inspection position, 80: Carry-in tilt table, 90: Carry-out tilt table, 100 ... Main position, 111 ... Stopper, 113 ... Shading plate, 114 ... Support block, 130 ... LCD panel insertion Position: 140 ... Liquid crystal display panel unloading position, 200 ... Sub position, 300 ... Return line, 400 ... Fixed inspection table, 410 ... Pre-inspection liquid crystal display panel table, 420 ... Post-inspection liquid crystal display panel table, 430 ... Fixed back Light.

Claims (12)

A liquid crystal display panel inspection system in which a liquid crystal is sandwiched between two substrates, and a polarizing plate is attached to each of the two substrates.
The liquid crystal display panel inspection system has a plurality of inspection regions arranged side by side,
Each of the inspection areas has an inspection position, a main position, and a sub-position,
Further, each of the inspection areas has an inspection table and a sub inspection table, the inspection table is movable between the inspection position and the main position, and the sub inspection table has the main position and the sub position. Configured to be movable,
An inspection system for a liquid crystal display panel, wherein a liquid crystal display panel to be inspected passes through the inspection table or sub-inspection table on the main position and is transported to a target inspection region.   The liquid crystal display panel inspection system according to claim 1, wherein the liquid crystal display panel is installed on a pallet.   The liquid crystal display panel inspection system according to claim 2, wherein the inspection table and the sub inspection table are inclined at a predetermined angle.   The entrance of the main position has a carry-in tilt mechanism having a mechanism for tilting the pallet by a predetermined angle, and the exit of the main position has a carry-out tilt mechanism for setting the pallet horizontally. Item 4. The liquid crystal display panel inspection system according to Item 3.   5. The liquid crystal display panel inspection system according to claim 4, further comprising a return line for returning the pallet unloaded from the carry-out tilt mechanism to the carry-in tilt mechanism again.   The liquid crystal display panel inspection system according to claim 1, wherein the inspection table includes an inspection backlight. A method of manufacturing a liquid crystal display device having a liquid crystal display panel in which liquid crystal is sandwiched between two substrates, and a polarizing plate is attached to each of the two substrates.
The liquid crystal display panel is inspected in at least one inspection region among a plurality of inspection regions arranged side by side during inspection,
Each of the inspection areas has an inspection position, a main position, and a sub-position,
Further, each of the inspection areas has an inspection table and a sub inspection table, the inspection table is movable between the inspection position and the main position, and the sub inspection table has the main position and the sub position. Configured to be movable,
A method of manufacturing a liquid crystal display device, wherein a liquid crystal display panel to be inspected passes through the inspection table or sub-inspection table on the main position and is conveyed to a target inspection region.   The method of manufacturing a liquid crystal display device according to claim 7, wherein the liquid crystal display panel is installed on a pallet and moves.   9. The method of manufacturing a liquid crystal display device according to claim 8, wherein the inspection table and the sub inspection table are inclined at a predetermined angle.   An entrance tilt mechanism having a mechanism for tilting the pallet at the predetermined angle is provided at an entrance of the main position, and an exit tilt mechanism for horizontally setting the pallet is provided at an exit of the main position. A method for manufacturing a liquid crystal display device according to claim 9.   11. The method of manufacturing a liquid crystal display device according to claim 10, further comprising a return line for returning the pallet unloaded from the unloading tilt mechanism to the loading tilt mechanism.   The method for manufacturing a liquid crystal display device according to claim 7, wherein the inspection table has a backlight for inspection.

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