JP2009135263A - Optical device - Google Patents

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Publication number
JP2009135263A
JP2009135263A JP2007309985A JP2007309985A JP2009135263A JP 2009135263 A JP2009135263 A JP 2009135263A JP 2007309985 A JP2007309985 A JP 2007309985A JP 2007309985 A JP2007309985 A JP 2007309985A JP 2009135263 A JP2009135263 A JP 2009135263A
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optical device
light
translucent
light receiving
adhesive
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Japanese (ja)
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Hiroto Osaki
裕人 大崎
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Panasonic Corp
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Panasonic Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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  • Light Receiving Elements (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that there is the possibility of the flowing of a light-transmitting adhesive through an electrode section and an adhesion on the surface of the electrode section and there is the possibility of the generation of a peeling on an interface between a light-transmitting board material and a light-shielding sealer or the light-transmitting adhesive in an optical device bonding the light-transmitting board material with an optical device element through the light-transmitting adhesive. <P>SOLUTION: In the optical device, a weir section 9 is fitted between a light-receiving section 6 and the electrode section 7 on the top face of the optical device element 2. The weir section 9 inhibits an outflow to the electrode section 7 of the light-transmitting adhesive 8. The width of the upper section 19 of the weir section 9 is narrowed towards the upper sections, and the front end 19a of the upper section 19 is brought into contact with the underside of the light-transmitting board material 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、デジタルスチルカメラなどに設けられる光学デバイス装置、特に、固体撮像装置に関するものである。   The present invention relates to an optical device device provided in a digital still camera or the like, and more particularly to a solid-state imaging device.

光学デバイス装置の分野では高感度化を図る技術に関して従来から広く研究開発が行われており、パッケージ構造からの提案も近年数多くみられる。特に従来から多用されている中空パッケージ構造に代えて、光学デバイス素子の受光部に透光性接着剤を直接塗布して透光性板材を貼り付けるという直貼りパッケージ構造も提案されている。   In the field of optical device devices, research and development have been extensively conducted on techniques for achieving high sensitivity, and many proposals from package structures have been seen in recent years. In particular, instead of the conventionally used hollow package structure, a direct-bonding package structure in which a light-transmitting adhesive is directly applied to a light-receiving portion of an optical device element and a light-transmitting plate material is bonded has been proposed.

図11は従来の直貼りパッケージ構造を表す断面図である。   FIG. 11 is a cross-sectional view showing a conventional direct attachment package structure.

直貼りパッケージ構造では、光学デバイス素子32は、接着剤42を介してパッケージ基板31に接着されており、また、遮光性封止剤44により封止されている。透光性板材33は、透光性接着剤38を介して光学デバイス素子32の受光部36に接着されている。パッケージ基板31には、外部リード端子34と内部リード端子35とが互いに電気的に接続されており、内部リード端子35は金線43を介して光学デバイス素子32の電極部37に電気的に接続されている。   In the directly attached package structure, the optical device element 32 is bonded to the package substrate 31 via an adhesive 42 and is sealed with a light blocking sealant 44. The translucent plate 33 is bonded to the light receiving part 36 of the optical device element 32 through a translucent adhesive 38. External lead terminals 34 and internal lead terminals 35 are electrically connected to the package substrate 31, and the internal lead terminals 35 are electrically connected to electrode portions 37 of the optical device element 32 through gold wires 43. Has been.

図11のように直貼りパッケージ構造の利点は、透光性板材33と透光性接着剤38と光学デバイス素子32との3者間で屈折率の差が小さくなる材料を選択することで、それぞれの境界での光の反射成分を低減し、光学デバイス装置の高感度化を図ることができるというものである。   The advantage of the directly attached package structure as shown in FIG. 11 is that by selecting a material with a small difference in refractive index among the three members of the translucent plate 33, the translucent adhesive 38, and the optical device element 32, It is possible to reduce the reflection component of light at each boundary and increase the sensitivity of the optical device device.

一方で、直貼りパッケージ構造の課題の1つとしては次のことが言える。光学デバイス素子32の上面のうち受光部36よりも周縁には電極部37が設けられているが、受光部36に透光性接着剤38を塗布するとき、または、塗布された透光性接着剤38の上に透光性板材33を貼り付けるときに、前記透光性接着剤38が電極部37へ流れ出して電極部37の表面に付着し、後のワイヤーボンディング工程において電極部37と金線43との間で接触不良を引き起こす恐れがある。   On the other hand, the following can be said as one of the problems of the direct attachment package structure. An electrode part 37 is provided on the periphery of the upper surface of the optical device element 32 with respect to the light receiving part 36. However, when a light-transmitting adhesive 38 is applied to the light receiving part 36 or when the light-transmitting adhesive 38 is applied. When the translucent plate material 33 is pasted on the agent 38, the translucent adhesive 38 flows out to the electrode portion 37 and adheres to the surface of the electrode portion 37, and the electrode portion 37 and the gold in the subsequent wire bonding step. There is a risk of causing poor contact with the wire 43.

そこで、特許文献1では、図12に示すように、受光部36と電極部37の間に堰部39を設け、受光部36に塗布した透光性接着剤38が電極部37へ流れ込まないように前記堰部39で堰き止めている。また、前記堰部39に透光性板材33を当接して貼り付けることで、受光部36と透光性板材33の間隔48を一定、すなわち透光性接着剤38の厚みを一定に保持し、受光部36全面に対して均一で良好な光の透過特性を得ることを可能としている。   Therefore, in Patent Document 1, as shown in FIG. 12, a dam portion 39 is provided between the light receiving portion 36 and the electrode portion 37 so that the translucent adhesive 38 applied to the light receiving portion 36 does not flow into the electrode portion 37. The dam portion 39 is dammed up. Further, the translucent plate 33 is brought into contact with and attached to the weir 39 so that the distance 48 between the light receiving unit 36 and the translucent plate 33 is kept constant, that is, the thickness of the translucent adhesive 38 is kept constant. Thus, it is possible to obtain uniform and good light transmission characteristics over the entire surface of the light receiving section 36.

直貼りパッケージ構造の別の課題としては、構成材料の熱膨張差に起因して応力が生じ、その結果、界面で剥離し、ひどい時には破壊してしまうというものである。   Another problem with the direct-bonding package structure is that stress occurs due to the difference in thermal expansion of the constituent materials, resulting in peeling at the interface and destruction in severe cases.

そこで、特許文献2では、図13のような中空パッケージ構造において、透光性板材33と遮光性封止剤44との間に緩衝部50を設けて、緩衝部50が熱膨張差を吸収している。
特開2007−150266号公報 特開2007−141957号公報
Therefore, in Patent Document 2, in the hollow package structure as shown in FIG. 13, a buffer part 50 is provided between the translucent plate member 33 and the light-shielding sealant 44, and the buffer part 50 absorbs the thermal expansion difference. ing.
JP 2007-150266 A JP 2007-141957 A

ところで、近年、光学デバイス装置は、小型且つ薄型化、特にセルサイズの縮小化と高画素化とに伴って、1画素当たりの受光面積が減少する傾向にある。そこで、感度を上げるために特許文献1のように堰部を有する直貼りパッケージ構造を採用することは非常に有効な手段であるが、構成材料である透光性板材に比べて遮光性封止剤および透光性接着剤の熱膨張率が大きいので、その後の熱印加(例えばユーザ基板へ実装するためのリフロー工程においては260℃程度の温度に達する)により内部応力が発生し、構成材料の界面で剥離が生じ、その結果、画質異常の原因となる気泡が発生するという課題がある。   By the way, in recent years, the optical device apparatus tends to reduce the light receiving area per pixel as the size and thickness of the optical device apparatus are reduced. Thus, in order to increase sensitivity, it is very effective to adopt a directly attached package structure having a dam portion as in Patent Document 1, but it is light-shielding sealing as compared with a translucent plate material that is a constituent material. Since the thermal expansion coefficient of the adhesive and the translucent adhesive is large, internal stress is generated by the subsequent application of heat (for example, a temperature of about 260 ° C. is reached in the reflow process for mounting on the user board). There is a problem that separation occurs at the interface, and as a result, bubbles are generated that cause image quality abnormalities.

気泡が発生すると画質異常を引き起こす理由を示す。図14は、特許文献1の堰部39を有する直貼りパッケージにおいて、堰部39付近で気泡60が発生した状態を示す断面図である。受光部36では入射角αで入射する斜め光40も受光する必要があるが、前記斜め光40が受光部36に届くまでの透光性接着剤38の内部に気泡60が存在すると、気泡60で斜め光40が反射され、受光部36まで届かず画素欠陥となる。   The reason why an image quality abnormality is caused when bubbles are generated will be described. FIG. 14 is a cross-sectional view showing a state in which bubbles 60 are generated in the vicinity of the dam portion 39 in the direct bonding package having the dam portion 39 of Patent Document 1. The light receiving unit 36 needs to receive the oblique light 40 incident at the incident angle α. However, if the bubble 60 exists inside the translucent adhesive 38 until the oblique light 40 reaches the light receiving unit 36, the bubble 60 is present. As a result, the oblique light 40 is reflected and does not reach the light receiving portion 36, resulting in a pixel defect.

気泡60の発生を抑制するためには熱印可工程において内部応力の発生を抑制することが好ましい。そこで、この内部応力が発生するメカニズムについて構成材料に着目し、図11を用いて説明する。   In order to suppress the generation of the bubbles 60, it is preferable to suppress the generation of internal stress in the heat application step. Therefore, the mechanism for generating the internal stress will be described with reference to FIG.

まず、第1に、透光性板材33と遮光性封止剤44との間で応力が発生するメカニズムを示す。図11のように透光性板材33は、光学デバイス素子32の受光部36の上に透光性接着剤38を介して貼り付けられている。前記透光性板材33の周囲には遮光性封止剤44がトランスファーモールド等により形成されるが、遮光性封止剤44の熱膨張係数は透光性板材33のそれに比べて約百倍ある。   First, a mechanism in which stress is generated between the translucent plate material 33 and the light blocking sealant 44 will be described. As shown in FIG. 11, the translucent plate member 33 is attached on the light receiving portion 36 of the optical device element 32 via a translucent adhesive 38. A light-blocking sealant 44 is formed around the translucent plate 33 by transfer molding or the like. The thermal expansion coefficient of the light-blocking sealant 44 is about one hundred times that of the translucent plate 33.

すなわち、当該光学デバイス装置がユーザ等のリフロー工程において熱印加を受けると、透光性板材33および遮光性封止剤44において膨張又は収縮が起こり、その結果、透光性板材33が遮光性封止剤44に引っ張られたり又は圧縮されたりして水平方向に内部応力が発生する。これにより、透光性板材33および遮光性封止剤44が歪み限界に達し、透光性板材33と遮光性封止剤44との界面において剥離が生じたり、透光性板材33が破壊する場合もある。   That is, when the optical device apparatus is subjected to heat application in the reflow process of the user or the like, the light-transmitting plate member 33 and the light-blocking sealant 44 are expanded or contracted. As a result, the light-transmitting plate member 33 is sealed. The internal stress is generated in the horizontal direction by being pulled or compressed by the stopper 44. Thereby, the translucent plate material 33 and the light-shielding sealant 44 reach the strain limit, and peeling occurs at the interface between the translucent plate material 33 and the light-shielding sealant 44 or the translucent plate material 33 is destroyed. In some cases.

第2に、透光性板材33と透光性接着剤38との間で応力が発生するメカニズムを示す。透光性接着剤38の熱膨張係数も透光性板材33のそれに比べて約百倍あり、熱印加を受けると、透光性板材33および透光性接着剤38において膨張又は収縮が起こり、透光性板材33は透光性接着剤38に引っ張られたり又は圧縮されたりして図12のような曲げ方向51に応力が発生する。その結果、透光性板材33の端部、すなわち、透光性接着剤38が急に薄くなる堰部39付近で、透光性板材33と透光性接着剤38との界面において剥離が生じたり、応力が大きいときには透光性板材33が破壊する場合もある。   Secondly, a mechanism for generating stress between the translucent plate 33 and the translucent adhesive 38 will be described. The coefficient of thermal expansion of the translucent adhesive 38 is about 100 times that of the translucent plate 33, and when heat is applied, the translucent plate 33 and the translucent adhesive 38 are expanded or contracted. The optical plate 33 is pulled or compressed by the translucent adhesive 38, and stress is generated in the bending direction 51 as shown in FIG. As a result, peeling occurs at the interface between the translucent plate 33 and the translucent adhesive 38 at the end of the translucent plate 33, that is, in the vicinity of the dam portion 39 where the translucent adhesive 38 suddenly becomes thin. Or, when the stress is large, the translucent plate 33 may be broken.

さらに、透光性接着剤38の熱膨張係数が透光性板材33のそれに比べて非常に大きいことから、熱印加時には透光性板材33よりも透光性接着剤38の方が外方向へ伸びようとする応力が大きくなる。しかしながら、堰部39があるために透光性接着剤38は外方向へ伸びることが出来ず、堰部39付近で応力集中が起こる。   Furthermore, since the thermal expansion coefficient of the translucent adhesive 38 is much larger than that of the translucent plate 33, the translucent adhesive 38 is more outward than the translucent plate 33 when heat is applied. The stress that tends to stretch increases. However, the translucent adhesive 38 cannot extend outward because of the weir 39, and stress concentration occurs in the vicinity of the weir 39.

ここで、堰部39の高さは通常10μm程度であり、受光部36と透光性板材33との間の透光性接着剤38の厚みは当該堰部39の高さに等しい。しかしながら、堰部39上にも数百Åの薄膜の透光性接着剤38が存在しているので、透光性接着剤38の厚みはこの箇所で極端に薄くなっている。従って、透光性接着剤38の厚みが10μmから数百Åに急激に変化する箇所で局部的に応力が集中し易く、この曲げ方向51の応力集中により透光性板材33から透光性接着剤38が剥離してしまう可能性がある。   Here, the height of the dam portion 39 is usually about 10 μm, and the thickness of the translucent adhesive 38 between the light receiving portion 36 and the translucent plate member 33 is equal to the height of the dam portion 39. However, since the translucent adhesive 38 of several hundreds of thin films exists also on the weir part 39, the thickness of the translucent adhesive 38 is extremely thin at this location. Therefore, the stress is likely to be locally concentrated at the portion where the thickness of the translucent adhesive 38 changes rapidly from 10 μm to several hundreds of centimeters. The stress concentration in the bending direction 51 causes the translucent adhesive from the translucent plate 33. The agent 38 may be peeled off.

上記説明したように特許文献1に開示された光学デバイス装置では、構成材料の熱膨張差を解消することができない。そこで、特許文献2に記載された技術のように緩衝部50を用いることを考えると、透光性板材33と透光性接着剤38との間に緩衝部50を設ける必要があり、よって、緩衝部50を受光領域にも設けなければならない。従って、この緩衝部50に必要な条件としては、透光性であり、屈折率が透光性板材33および透光性接着剤38とほぼ等しく、なおかつ約0.1乃至10GPaのヤング率を有し、さらに熱膨張係数が透光性板材33および透光性接着剤38とほぼ等しい樹脂材料でなければならないが、現存する有機材料を用いても上記すべての条件を満たすことは難しい。よって、特許文献2に記載の緩衝部50を用いて構成材料の熱膨張差を解消させることは難しいと考えられる。   As described above, in the optical device device disclosed in Patent Document 1, the difference in thermal expansion of the constituent materials cannot be eliminated. Therefore, in consideration of using the buffer portion 50 as in the technique described in Patent Document 2, it is necessary to provide the buffer portion 50 between the translucent plate 33 and the translucent adhesive 38. The buffer 50 must be provided also in the light receiving area. Therefore, the necessary condition for the buffer 50 is translucency, the refractive index is almost equal to that of the translucent plate 33 and the translucent adhesive 38, and has a Young's modulus of about 0.1 to 10 GPa. In addition, the resin material must have a thermal expansion coefficient substantially equal to that of the translucent plate 33 and the translucent adhesive 38, but it is difficult to satisfy all of the above conditions using existing organic materials. Therefore, it is considered difficult to eliminate the difference in thermal expansion of the constituent materials using the buffer portion 50 described in Patent Document 2.

さらに、透光性板材33と透光性接着剤38との間に緩衝部50を新たに設けると、透光性板材33と遮光性封止剤44との間隔が大きくなるので、光学デバイス装置の遮光性が悪化し、光学性能に優れた光学デバイス装置を得ることは難しい。その上、透光性板材33と遮光性封止剤44との間隔が大きくなるので、光学デバイス装置の厚みが大きくなり、近年のニーズに応えることができないという別の課題も招来してしまう。   Further, when the buffer 50 is newly provided between the translucent plate member 33 and the translucent adhesive 38, the distance between the translucent plate member 33 and the light-shielding sealant 44 is increased. Therefore, it is difficult to obtain an optical device having excellent optical performance. In addition, since the distance between the light-transmitting plate member 33 and the light-shielding sealant 44 is increased, the thickness of the optical device device is increased, which causes another problem that the recent needs cannot be met.

さらには、透光性板材33に予め緩衝部50を均一な厚みで塗布しておく必要もあり、透光性板材33に緩衝部50を塗布するための工程が追加となる。これは、光学的デバイス装置における重大な欠陥であるダスト付着による画像欠陥が発生する危険が増えることにつながる。   Furthermore, it is necessary to apply the buffer 50 to the translucent plate 33 in advance with a uniform thickness, and an additional step for applying the buffer 50 to the translucent plate 33 is added. This leads to an increased risk of image defects due to dust adhesion, which is a serious defect in the optical device apparatus.

本発明は、かかる点に鑑みてなされたものであり、その目的とするところは、直貼りパッケージ構造において、光学デバイス装置の製造中に透光性接着剤が受光部から電極部へ流れて電極部の表面に付着することを抑制できるとともに、透光性板材と遮光性封止剤または透光性接着剤との界面において剥離の発生を防止することにある。   The present invention has been made in view of such points, and an object of the present invention is to provide an electrode in which a translucent adhesive flows from a light receiving portion to an electrode portion during manufacturing of an optical device device in a directly attached package structure. It is possible to suppress the adhesion to the surface of the part and to prevent the occurrence of peeling at the interface between the translucent plate and the light-shielding sealant or translucent adhesive.

本発明にかかる光学デバイス装置では、光学デバイス素子の上面に受光部と電極部とが設けられており、受光部には透光性接着剤を介して透光性板材が接着され、電極部にはパッケージ基板の端子が電気的に接続されている。光学デバイス素子の上面には、さらに、堰部が受光部と電極部との間に設けられており、透光性接着剤が電極部へ流出することを抑制している。この堰部は、上へ向かうにつれて幅狭となる上部を有しており、上部の先端は、透光性接着剤の下面に接している。   In the optical device device according to the present invention, a light receiving portion and an electrode portion are provided on the upper surface of the optical device element, and a light transmissive plate material is bonded to the light receiving portion via a light transmissive adhesive, Are electrically connected to terminals of the package substrate. Further, on the upper surface of the optical device element, a dam portion is provided between the light receiving portion and the electrode portion to suppress the translucent adhesive from flowing out to the electrode portion. The weir portion has an upper portion that becomes narrower as it goes upward, and the tip of the upper portion is in contact with the lower surface of the translucent adhesive.

上記構成により、光学デバイス装置の製造中に、透光性接着剤が電極部の表面に付着することを抑制することができる。   With the above configuration, it is possible to prevent the light-transmitting adhesive from adhering to the surface of the electrode part during the manufacture of the optical device device.

また、受光部から堰部へ向かうにつれて透光性接着剤は徐々に薄くなるので、溶融した透光性接着剤が固化する際に応力が一カ所に集中することを抑制することができる。   Further, since the light-transmitting adhesive gradually becomes thinner from the light receiving portion toward the weir portion, it is possible to suppress stress from being concentrated in one place when the melted light-transmitting adhesive is solidified.

なお、本願発明者らは、特許文献1および2と本願発明との差異として、以下に示すことを考えている。   The inventors of the present application consider the following as differences between Patent Documents 1 and 2 and the present invention.

特許文献1には、横断面における堰部の側面の形状が曲線であるという記載がある。しかし、特許文献1の実施例では、本発明のように透光性接着剤の厚みが急激に変化する箇所で応力が集中することを避けるために横断面における堰部の側面の形状を曲線としているのではなく、透光性接着剤の電極部への流れ込みを防止するために横断面における堰部の側面の形状を曲線としている。すなわち、特許文献1では、構成材料の熱膨張差による応力緩和を目的としておらず、また、特許文献1には、応力が集中した結果、透光性板材と透光性接着剤または遮光性封止剤との界面における剥離の発生および透光性板材の破壊に関する記載もない。   Patent Document 1 has a description that the shape of the side surface of the weir portion in the cross section is a curve. However, in the example of Patent Document 1, the shape of the side surface of the weir part in the cross section is curved in order to avoid stress concentration at the location where the thickness of the translucent adhesive changes rapidly as in the present invention. Instead, in order to prevent the translucent adhesive from flowing into the electrode part, the shape of the side surface of the weir part in the cross section is curved. That is, Patent Document 1 does not aim to relieve stress due to the difference in thermal expansion of the constituent materials, and Patent Document 1 discloses that a light-transmitting plate and a light-transmitting adhesive or light-shielding seal are formed as a result of stress concentration. There is no description regarding the occurrence of peeling at the interface with the stopper and the destruction of the translucent plate.

また、特許文献1では、堰部の断面形状は矩形に限らず、曲線でもよいという表現にとどまっていることからも、熱膨張差による応力を緩和するという直貼りパッケージ特有の課題に対する有効な解決手段を発想しえないし、単に特許文献1と特許文献2とを組み合わせる動機付けもない。   Moreover, in patent document 1, since the cross-sectional shape of a dam part is not only a rectangle but the expression that it may be a curve, it is an effective solution with respect to the problem peculiar to the direct attachment package of relieving the stress by a thermal expansion difference. No means can be conceived, and there is no motivation for simply combining Patent Document 1 and Patent Document 2.

本発明によれば、光学デバイス装置の製造中に透光性接着剤が電極部の表面に付着することを抑制でき、また、透光性板材と遮光性封止剤または透光性接着剤との界面における剥離の発生を防止することができる。   ADVANTAGE OF THE INVENTION According to this invention, it can suppress that a translucent adhesive adheres to the surface of an electrode part during manufacture of an optical device apparatus, Moreover, a translucent board | plate material, a light-shielding sealing agent, or a translucent adhesive, Generation of peeling at the interface can be prevented.

以下、本発明の実施形態を図面に基づいて詳細に説明する。なお、本発明は、以下の実施形態に限定されない。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the following embodiment.

《第1の実施形態》
本発明の実施形態に係る光学デバイス装置について、図面を参照して説明する。図1は、本発明の第1の実施形態に係る光学デバイス装置の平面図であり、図1では、光学デバイス装置の内部構造がわかりやすいように透光性板材3の一部および遮光性封止剤14の一部を破断させている。図2は図1に示すII−IIにおける断面図である。
<< First Embodiment >>
An optical device device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of an optical device device according to the first embodiment of the present invention. In FIG. 1, a part of a light-transmitting plate 3 and a light-shielding seal are provided so that the internal structure of the optical device device can be easily understood. A part of the agent 14 is broken. 2 is a cross-sectional view taken along the line II-II shown in FIG.

図1及び図2に示すように、光学デバイス装置は、パッケージ基板1と、光学デバイス素子2と、透光性板材3とを備える。パッケージ基板1は、セラミックまたはプラスチック等からなり、互いに電気的に接続された外部リード端子4および内部リード端子5を有している。光学デバイス素子2は、接着剤42を介してパッケージ基板1に固定されており、その上面には、受光部6が設けられている。受光部6の上には透光性接着剤8が設けられており、透光性接着剤8には透光性板材3が接着されている。また、光学デバイス素子2の上面のうち受光部6よりも周縁には電極部7が設けられており、電極部7は金線13を介してパッケージ基板1の内部リード端子5に電気的に接続されている。このような光学デバイス素子2は、遮光性封止剤14により封止されている。   As shown in FIGS. 1 and 2, the optical device apparatus includes a package substrate 1, an optical device element 2, and a translucent plate 3. The package substrate 1 is made of ceramic, plastic, or the like, and has external lead terminals 4 and internal lead terminals 5 that are electrically connected to each other. The optical device element 2 is fixed to the package substrate 1 via an adhesive 42, and a light receiving portion 6 is provided on the upper surface thereof. A light-transmitting adhesive 8 is provided on the light receiving portion 6, and the light-transmitting plate 8 is bonded to the light-transmitting adhesive 8. Further, an electrode portion 7 is provided on the upper surface of the optical device element 2 at the periphery of the light receiving portion 6, and the electrode portion 7 is electrically connected to the internal lead terminal 5 of the package substrate 1 through the gold wire 13. Has been. Such an optical device element 2 is sealed with a light-shielding sealant 14.

光学デバイス素子2の上面のうち受光部6と電極部7の間には堰部9が設けられており、その高さは10μm程度である。この堰部9は、光学デバイス素子2の受光部6に透光性接着剤8を塗布するとき、或いは透光性板材3を光学デバイス素子2の受光部6に貼り付けるときに、透光性接着剤8が電極部7に流れ込むことを防ぐ防波堤となっている。これにより、光学デバイス装置の製造中に透光性接着剤8が電極部7の表面に付着することを防止できるので、電極部7の表面からの金線13の剥離に起因する光学デバイス装置の性能低下を抑制することができる。なお、堰部9については後で詳述する。   A weir portion 9 is provided between the light receiving portion 6 and the electrode portion 7 on the upper surface of the optical device element 2 and has a height of about 10 μm. The weir portion 9 is translucent when the translucent adhesive 8 is applied to the light receiving portion 6 of the optical device element 2 or when the translucent plate 3 is attached to the light receiving portion 6 of the optical device element 2. It is a breakwater that prevents the adhesive 8 from flowing into the electrode portion 7. Thereby, since it can prevent that the translucent adhesive agent 8 adheres to the surface of the electrode part 7 during manufacture of an optical device apparatus, the optical device apparatus resulting from peeling of the gold | metal wire 13 from the surface of the electrode part 7 is possible. Performance degradation can be suppressed. The weir portion 9 will be described in detail later.

光学デバイス装置は、その特性上、図2に示すように、入射角αで入射する光(以下では「斜めの光」という)10も受光する必要がある。そのため、透光性板材3および透光性接着剤8のうち斜めの光が入射又は通過する入光領域11に、ダスト、気泡又はキズ等の欠陥があると、画像欠陥となる可能性があるので、これらの欠陥の発生を防止しなければならない。これらの欠陥は光学デバイス装置の製造中に発生することが多いので、光学デバイス装置の製造方法について検討した。以下では、その検討内容を説明する。   Due to the characteristics of the optical device device, it is necessary to receive light 10 (hereinafter referred to as “oblique light”) 10 incident at an incident angle α as shown in FIG. Therefore, if there is a defect such as dust, bubbles or scratches in the light incident region 11 where the oblique light enters or passes through the light transmissive plate 3 and the light transmissive adhesive 8, there is a possibility that an image defect is caused. Therefore, the occurrence of these defects must be prevented. Since these defects often occur during the manufacturing of the optical device apparatus, the manufacturing method of the optical device apparatus was examined. Below, the content of the examination is explained.

図3と図4とは本発明の実施形態に係る光学デバイス装置の製造フローを示したものであり、図3と図4とでは透光性板材3を光学デバイス素子2に貼り付ける際の光学デバイス素子2の形態が相異なる。   FIGS. 3 and 4 show the manufacturing flow of the optical device device according to the embodiment of the present invention. FIGS. 3 and 4 show the optical when the translucent plate 3 is attached to the optical device element 2. The form of the device element 2 is different.

すなわち、図3では光学デバイス素子2が繋がっている形態(ウエハー)で、透光性板材3の貼付け作業を行っておき、その後、ダイシング工程において光学デバイスの個片化を実施し、個片化された光学デバイスをパッケージ基板1へダイボンドする。一方、図4では、ダイシング工程においてウエハー状態から個片化された後、個片化された光学デバイス素子2がパッケージ基板1上にダイボンディングされてから、透光性板材3の貼付け作業を行う。ここで、図3のようにウエハーに透光性板材3を貼り付ける場合には、ウエハーの拡散処理という非常にクリーン度の高い環境下で透光性板材3の貼付け作業を実施することができるため、透光性接着剤8へのダスト侵入を非常に効果的に防止することができる。   That is, in FIG. 3, the optical device element 2 is connected to the optical device element 2 (wafer), and the translucent plate 3 is attached, and then the optical device is separated into individual pieces in the dicing process. The obtained optical device is die-bonded to the package substrate 1. On the other hand, in FIG. 4, after being separated from the wafer state in the dicing step, the separated optical device element 2 is die-bonded on the package substrate 1, and then the translucent plate 3 is attached. . Here, when the translucent plate 3 is attached to the wafer as shown in FIG. 3, the translucent plate 3 can be applied in a very clean environment such as a wafer diffusion process. Therefore, dust intrusion into the translucent adhesive 8 can be prevented very effectively.

各ステップを具体的に示すと、光学デバイス素子2の形成工程(ステップS301およびS401)では、光学デバイス素子2の上面の中央に受光部6を形成し、受光部6よりも周縁に電極部7を形成し、受光部6と電極部7との間に堰部9を形成する。   Specifically, in each step of forming the optical device element 2 (steps S301 and S401), the light receiving portion 6 is formed at the center of the upper surface of the optical device element 2, and the electrode portion 7 is provided at the periphery of the light receiving portion 6. And a dam portion 9 is formed between the light receiving portion 6 and the electrode portion 7.

透光性接着剤8の塗布工程(ステップS302およびS404)では、光学デバイス素子2の受光部6に透光性接着剤8を塗布する。このとき、透光性接着剤8が受光部6の外側に流れ出たとしても、堰部9が透光性接着剤8の流出をせき止めるので電極部7の表面に透光性接着剤8が付着することを抑制できる。   In the application process (steps S302 and S404) of the translucent adhesive 8, the translucent adhesive 8 is applied to the light receiving unit 6 of the optical device element 2. At this time, even if the translucent adhesive 8 flows out of the light receiving unit 6, the weir unit 9 blocks the outflow of the translucent adhesive 8, so that the translucent adhesive 8 adheres to the surface of the electrode unit 7. Can be suppressed.

透光性板材3の貼り付け工程(ステップS303およびS405)では、透光性接着剤8に透光性板材3を貼り付ける。透光性板材3を貼り付けたことにより透光性接着剤8が受光部6の外側に流れ出たとしても、流れ出た透光性接着剤8は堰部9にせき止められるので、電極部7の表面に透光性接着剤8が付着することを抑制できる。   In the step of attaching the translucent plate 3 (steps S303 and S405), the translucent plate 3 is attached to the translucent adhesive 8. Even if the translucent adhesive 8 flows out to the outside of the light receiving unit 6 by attaching the translucent plate material 3, the translucent adhesive 8 that has flowed out is blocked by the weir unit 9. It can suppress that translucent adhesive agent 8 adheres to the surface.

ダイシング工程(ステップS304およびS402)では、ウエハーを個片化する。このとき、ステップS304では透光性板材3が貼り付けられた状態でウエハーを個片化するので、ウエハーとともに透光性板材3も個片化される。   In the dicing process (steps S304 and S402), the wafer is singulated. At this time, in step S304, the wafer is singulated with the translucent plate 3 attached, so that the translucent plate 3 is also singulated together with the wafer.

ダイボンディング工程(ステップS305およびS403)では、接着剤12を介して光学デバイス素子2をパッケージ基板1に固定する。図2などに示すようにパッケージ基板1が凹部を有している場合には、凹部内に光学デバイス素子2を収容させることが好ましい。   In the die bonding process (steps S305 and S403), the optical device element 2 is fixed to the package substrate 1 via the adhesive 12. When the package substrate 1 has a recess as shown in FIG. 2 and the like, it is preferable to accommodate the optical device element 2 in the recess.

ワイヤーボンディング工程(ステップS306およびS406)では、金線13を用いて光学デバイス素子2の電極部7とパッケージ基板1の内部リード端子5とをボンディングする。このとき、パッケージ基板1では、内部リード端子5と外部リード端子4とが互いに電気的に接続されているので、光学デバイス素子2の電極部7とパッケージ基板1の外部リード端子4とを電気的に接続することができる。   In the wire bonding process (steps S306 and S406), the gold wire 13 is used to bond the electrode portion 7 of the optical device element 2 and the internal lead terminal 5 of the package substrate 1. At this time, since the internal lead terminal 5 and the external lead terminal 4 are electrically connected to each other in the package substrate 1, the electrode portion 7 of the optical device element 2 and the external lead terminal 4 of the package substrate 1 are electrically connected. Can be connected to.

遮光性封止剤14の充填工程(ステップS307およびS404)では、ポッティングなどの方法を用いて遮光性封止剤14をパッケージ基板1に充填させる。これにより、金線13および光学デバイス素子2を保護できるとともに、透光性板材3の側面からの光(受光部6で受光すべきでない光)の侵入を防止することができる。以下では、遮光性封止剤14の充填工程について、図5を用いて説明する。   In the filling process of the light-shielding sealant 14 (steps S307 and S404), the package substrate 1 is filled with the light-shielding sealant 14 using a method such as potting. Thereby, while being able to protect the gold | metal wire 13 and the optical device element 2, the penetration | invasion of the light from the side surface of the translucent board | plate material 3 (light which should not be light-received by the light-receiving part 6) can be prevented. Below, the filling process of the light-shielding sealant 14 will be described with reference to FIG.

図5(a)のように、パッケージ基板1に充填された遮光性封止剤14は、透光性板材3の側面を覆い、透光性板材3の上面よりも上となるように盛り上がる。しかしながら、その後、硬化炉等により熱を印加して遮光性封止剤14を硬化させると、エポキシ系樹脂特有の硬化収縮が起こり、図5(b)のように遮光性封止剤14の表面が凹み、透光性板材3の周囲にフィレット部15が形成される。   As shown in FIG. 5A, the light-shielding sealant 14 filled in the package substrate 1 covers the side surface of the translucent plate 3 and rises above the upper surface of the translucent plate 3. However, after that, when the light-shielding sealant 14 is cured by applying heat in a curing furnace or the like, curing shrinkage unique to the epoxy resin occurs, and the surface of the light-shielding sealant 14 as shown in FIG. The fillet portion 15 is formed around the translucent plate 3.

本明細書において、フィレット部15とは、受光部6から電極部7へ向かうにつれて遮光性封止剤14が薄くなることである。言い換えると、透光性板材3の外周では、遮光性封止剤14の上面は、透光性板材3の上面よりも低く、透光性板材3から離れるにつれて低くなっている。   In this specification, the fillet part 15 is that the light-shielding sealant 14 becomes thinner from the light receiving part 6 toward the electrode part 7. In other words, on the outer periphery of the translucent plate member 3, the upper surface of the light-shielding sealant 14 is lower than the upper surface of the translucent plate member 3 and becomes lower as the distance from the translucent plate member 3 increases.

以上のように、透光性板材3の周囲の遮光性封止剤14がフィレット部15を形成している。よって、熱印加を受けたとき、フィレット部15における遮光性封止剤14が薄いために、フィレット部15を構成する遮光性封止剤14が透光性板材3に及ぼす応力を小さくすることができる。また、フィレット部15における遮光性封止剤14は薄いので、応力が発生した場合であってもその応力を緩和することができる。   As described above, the light-shielding sealant 14 around the translucent plate 3 forms the fillet portion 15. Therefore, when the heat application is applied, the light shielding sealant 14 in the fillet portion 15 is thin, so that the stress exerted on the light transmissive plate 3 by the light shielding sealant 14 constituting the fillet portion 15 can be reduced. it can. Moreover, since the light-shielding sealant 14 in the fillet portion 15 is thin, the stress can be relaxed even when a stress is generated.

以下では、堰部9を説明する。   Below, the dam part 9 is demonstrated.

本発明の堰部9は、図6に示すように、上へ向かうにつれて(透光性板材3の下面へ向かうにつれて)幅狭となる上部19を有している。堰部9の横断面における上部19の側面19bの形状は曲線であり、上部19の先端19aは平坦面であり透光性板材3の下面に当接している。堰部9がこのような上部19を有していると、堰部9において透光性接着剤8の厚みが徐々に減少するので、透光性接着剤8からの応力が集中することを抑制することができる。また、受光部6と透光性板材3との距離18は堰部9の高さを変更すれば調整することができ、さらに、堰部9の高さを均一にすれば距離18を一定にすることができるので、光学デバイス装置の光学的性能を高めることができる。   As shown in FIG. 6, the weir portion 9 of the present invention has an upper portion 19 that becomes narrower as it goes upward (toward the lower surface of the translucent plate 3). The shape of the side surface 19 b of the upper portion 19 in the cross section of the dam portion 9 is a curve, and the tip 19 a of the upper portion 19 is a flat surface and is in contact with the lower surface of the translucent plate 3. When the dam portion 9 has such an upper portion 19, the thickness of the translucent adhesive 8 gradually decreases in the dam portion 9, thereby suppressing the concentration of stress from the translucent adhesive 8. can do. Further, the distance 18 between the light receiving portion 6 and the translucent plate 3 can be adjusted by changing the height of the dam portion 9, and further, the distance 18 can be made constant by making the height of the dam portion 9 uniform. Therefore, the optical performance of the optical device apparatus can be improved.

このような堰部9を製造する方法としては、以下の2つの方法が考えられる。   The following two methods can be considered as a method of manufacturing such a dam part 9.

一つめの方法では、堰部9を感光性樹脂から構成する。具体的には、感光性樹脂を用いて樹脂層を形成し、フォトリソグラフィにより堰部9となる部分を硬化させるとともに不要部分を剥離する。このとき、樹脂層を形成したときには樹脂層の上部に角部が存在しているが、不要部分を剥離させるときにプリベーク時間を数分増加させると、角部から丸みを帯びた形状へと変化させることができる。   In the first method, the dam portion 9 is made of a photosensitive resin. Specifically, a resin layer is formed using a photosensitive resin, a portion that becomes the weir portion 9 is cured by photolithography, and an unnecessary portion is peeled off. At this time, when the resin layer is formed, there is a corner at the top of the resin layer, but when the pre-bake time is increased by several minutes when peeling the unnecessary part, the corner changes to a rounded shape. Can be made.

図7はプリベーク時間をかけすぎたときの堰部109の断面の拡大図を示したものである。図7のようにプリベーク時間をかけすぎると、露光が進行し、堰部109の上部119の先端119aには平坦な部分がなくなり、堰部109の横断面では堰部109の上部119の表面すべてが曲線となる。その結果、受光部6と透光性板材3との距離118が短くなってしまう虞がある。   FIG. 7 shows an enlarged view of the cross section of the weir 109 when the pre-bake time is excessive. If the pre-bake time is excessive as shown in FIG. 7, the exposure proceeds, and there is no flat portion at the tip 119 a of the upper portion 119 of the dam portion 109. Becomes a curve. As a result, the distance 118 between the light receiving unit 6 and the translucent plate 3 may be shortened.

従って、図6のように堰部9の横断面において上部19の側面19bが丸みを帯びており、且つ、上部19の先端19aには平坦面が残存するようにプリベーク時間を制御すれば、最も効果的な堰部9を得ることができる。   Therefore, as shown in FIG. 6, when the pre-bake time is controlled so that the side surface 19b of the upper portion 19 is rounded in the cross section of the dam portion 9 and a flat surface remains at the tip 19a of the upper portion 19, An effective weir portion 9 can be obtained.

二つめの方法では、堰部9をエッチング可能な樹脂から構成する。具体的には、エッチング可能な樹脂を用いて樹脂層を形成し、堰部9となる部分を覆う一方それ以外の部分を開口させたマスクを樹脂層の上に形成し、エッチングを行って堰部9となる部分を残留させるとともに不要部分を除去する。このとき、一つめの方法と同じく、樹脂層を形成したときには樹脂層の上部に角部が存在しているが、エッチングを行うときにエッチング時間を数分増加させると、エッチングが進行して角部から丸みを帯びた形状へと変化させることができる。   In the second method, the weir portion 9 is made of an etchable resin. Specifically, a resin layer is formed using an etchable resin, and a mask that covers a portion that becomes the weir portion 9 and is opened on the other portion is formed on the resin layer, and is etched to form a weir. The portion that becomes the portion 9 is left and unnecessary portions are removed. At this time, as in the first method, when the resin layer is formed, corners exist at the top of the resin layer. However, if the etching time is increased by several minutes when etching is performed, the etching progresses and the corners are increased. It can be changed from a part to a rounded shape.

図8は、堰部周囲に気泡が発生した場合の堰部109周囲の断面図である。上述のように、堰部9の横断面において、上部19の側面19bは丸みを帯びているので、透光性接着剤8の厚みは急激に変化することなく堰部9へ近づくにつれ徐々に薄くなる。よって、透光性接着剤8からの応力が集中することを抑制することができる。   FIG. 8 is a cross-sectional view around the dam portion 109 when bubbles are generated around the dam portion. As described above, since the side surface 19b of the upper portion 19 is rounded in the cross section of the dam portion 9, the thickness of the translucent adhesive 8 is gradually reduced as it approaches the dam portion 9 without abrupt change. Become. Therefore, it can suppress that the stress from the translucent adhesive agent 8 concentrates.

また、万一応力が発生し、透光性接着剤8と堰部9との界面において剥離が発生したとしても、剥離に起因して生じる気泡20は堰部9の側面19bの上に存在する。よって、入射角度αで受光部6に入射する斜めの光10の入光領域11に、気泡20が存在することを抑制することができる。そのため、画像欠陥を抑制することができる。   Even if stress occurs and peeling occurs at the interface between the translucent adhesive 8 and the weir 9, the bubbles 20 generated due to the peeling are present on the side surface 19 b of the weir 9. . Therefore, it is possible to suppress the presence of the bubbles 20 in the light incident region 11 of the oblique light 10 incident on the light receiving unit 6 at the incident angle α. Therefore, image defects can be suppressed.

《第2の実施形態》
図9には、本発明の第2の実施形態に係る光学デバイス装置の断面図を示す。本実施形態と上記第1の実施形態とでは、堰部9の形状が相異なる。具体的には、上記第1の実施形態では堰部9の横断面において上部19の側面19bの形状は曲線であったが、本実施形態のように堰部9の横断面において上部19の側面19bの形状は直線であってもよい。このような場合であっても、上記第1の実施形態と同じく、堰部9の周囲では、光学デバイス素子2の周縁へ向かうにつれて透光性接着剤8の厚みを徐々に薄くすることができるので、透光性接着剤8からの応力が集中することを抑制することができる。
<< Second Embodiment >>
In FIG. 9, sectional drawing of the optical device apparatus which concerns on the 2nd Embodiment of this invention is shown. The shape of the dam portion 9 is different between the present embodiment and the first embodiment. Specifically, in the first embodiment, the shape of the side surface 19b of the upper portion 19 is curved in the cross section of the dam portion 9, but the side surface of the upper portion 19 in the cross section of the dam portion 9 as in this embodiment. The shape of 19b may be a straight line. Even in such a case, as in the first embodiment, the thickness of the translucent adhesive 8 can be gradually reduced toward the periphery of the optical device element 2 around the dam portion 9. Therefore, it can suppress that the stress from the translucent adhesive agent 8 concentrates.

《第3の実施形態》
図10(a)および(b)には、それぞれ、本発明の第3の実施形態に係る光学デバイス装置の断面図を示す。本実施形態と上記第1の実施形態とでは、堰部9の形状が相異なる。具体的には、上記第1の実施形態では、上部19の側面19bのうち先端19aよりも受光部6側および先端19aよりも電極部7側の両方が堰部9の幅を狭くするように形成されている。しかし、本実施形態のように、上部19の側面19bのうち先端19aよりも受光部6側のみが堰部9の幅を狭くするように形成されており、先端19aよりも電極部7側では先端19aに対して略垂直となるように形成されていてもよい。言い換えると、堰部9の横断面において、上記第1および第2の実施形態のように上部19の角部の両方が面取りされていても良く、本実施形態のように上部19の角部の一方(好ましくは、上部19の角部のうち受光部6側)が面取りされていてもよい。その面取り加工の方法としては、上記第1の実施形態のようにR加工されていても良く、上記第2の実施形態のようにC加工されていても良い。
<< Third Embodiment >>
FIGS. 10A and 10B are sectional views of an optical device device according to the third embodiment of the present invention, respectively. The shape of the dam portion 9 is different between the present embodiment and the first embodiment. Specifically, in the first embodiment, the width of the dam portion 9 is made narrower on both the light receiving portion 6 side than the tip 19a and the electrode portion 7 side than the tip 19a of the side surface 19b of the upper portion 19. Is formed. However, as in the present embodiment, only the light receiving portion 6 side of the side surface 19b of the upper portion 19 is formed so as to narrow the width of the weir portion 9, and the electrode portion 7 side is closer to the tip portion 19a. You may form so that it may become substantially perpendicular | vertical with respect to the front-end | tip 19a. In other words, in the cross section of the dam part 9, both corners of the upper part 19 may be chamfered as in the first and second embodiments, and the corners of the upper part 19 as in the present embodiment. One (preferably, the light receiving part 6 side of the corners of the upper part 19) may be chamfered. As the chamfering method, R processing may be performed as in the first embodiment, or C processing may be performed as in the second embodiment.

以上説明したように、本発明は、例えば、デジタルスチルカメラに利用可能である。   As described above, the present invention can be used for a digital still camera, for example.

本発明の第1の実施形態に係る光学デバイス装置の平面図The top view of the optical device apparatus which concerns on the 1st Embodiment of this invention 図1に示すII−II線における断面図Sectional view taken along line II-II shown in FIG. 本発明の第1の実施形態に係る光学デバイス装置の製造方法の一例を示すフローチャート図The flowchart figure which shows an example of the manufacturing method of the optical device apparatus which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係る光学デバイス装置の製造方法の別の一例を示すフローチャート図The flowchart figure which shows another example of the manufacturing method of the optical device apparatus which concerns on the 1st Embodiment of this invention. (a)および(b)は本発明の第1の実施形態に係る光学デバイス装置の製造方法のうちポッティングによる樹脂充填工程を示す断面図(A) And (b) is sectional drawing which shows the resin filling process by potting among the manufacturing methods of the optical device apparatus which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係る光学デバイス装置のうち堰部の周囲を拡大した断面図Sectional drawing which expanded the circumference | surroundings of the dam part among the optical device apparatuses which concern on the 1st Embodiment of this invention 本発明の第1の実施形態に係る光学デバイス装置の製造方法のうち堰部を製造する工程においてプリベーク時間またはエッチング時間が長すぎたときの断面図Sectional drawing when prebaking time or etching time is too long in the process of manufacturing a dam part among the manufacturing methods of the optical device apparatus which concerns on the 1st Embodiment of this invention 本発明の第1の実施形態に係る光学デバイス装置において堰部周囲に気泡が発生した場合の断面図Sectional drawing when bubbles are generated around the weir in the optical device device according to the first embodiment of the present invention. 本発明の第2の実施形態に係る光学デバイス装置の断面図Sectional drawing of the optical device apparatus which concerns on the 2nd Embodiment of this invention. 本発明の第3の実施形態に係る光学デバイス装置の断面図Sectional drawing of the optical device apparatus which concerns on the 3rd Embodiment of this invention. 従来の直貼りパッケージ構造に係る光学デバイス装置の断面図Sectional drawing of the optical device apparatus which concerns on the conventional direct pasting package structure 従来の直貼りパッケージ構造に係る光学デバイス装置の断面図Sectional drawing of the optical device apparatus which concerns on the conventional direct pasting package structure 従来の光学デバイス装置の断面図Sectional view of a conventional optical device device 従来の直貼りパッケージ構造における問題点を説明するための断面図Sectional drawing for demonstrating the problem in the conventional direct pasting package structure

符号の説明Explanation of symbols

1 パッケージ基板
2 光学デバイス素子
3 透光性板材
6 受光部
7 電極部
8 透光性接着剤
9 堰部
14 遮光性封止剤
15 フィレット部
19 上部
19a 先端
19b 側面
1 Package substrate
2 Optical device elements
3 Translucent plate material
6 Light receiving part
7 electrodes
8 Translucent adhesive
9 Weir
14 Shading sealant
15 Fillet
19 Top
19a tip
19b side view

Claims (6)

上面に設けられた受光部と、前記上面のうち前記受光部よりも周縁に設けられた電極部とを有する光学デバイス素子と、
前記受光部を覆う透光性板材と、
前記受光部の上に設けられ、前記透光性板材と前記光学デバイス素子とを互いに接着させる透光性接着剤と、
前記電極部と電気的に接続する端子を有し、前記光学デバイス素子を固定するパッケージ基板と、
前記光学デバイス素子を封止する遮光性封止剤とを備え、
前記光学デバイス素子の前記上面のうち前記受光部と前記電極部との間には、前記透光性接着剤が前記光学デバイス素子の前記電極部へ流れることを防止する堰部が設けられ、
前記透光性板材は、前記堰部を覆っており、
前記堰部の上部では、前記透光性板材の下面に向かうにつれて幅狭であり、前記上部の先端は、前記透光性板材の前記下面に接している、光学デバイス装置。
An optical device element having a light receiving portion provided on an upper surface, and an electrode portion provided on the periphery of the light receiving portion of the upper surface;
A translucent plate covering the light receiving portion;
A translucent adhesive that is provided on the light receiving unit and adheres the translucent plate and the optical device element;
A package substrate having a terminal electrically connected to the electrode portion, and fixing the optical device element;
A light-shielding sealant for sealing the optical device element,
Between the light receiving portion and the electrode portion of the upper surface of the optical device element, a dam portion for preventing the translucent adhesive from flowing to the electrode portion of the optical device element is provided,
The translucent plate material covers the weir part,
The optical device apparatus, wherein the upper portion of the dam portion is narrower toward the lower surface of the translucent plate material, and the tip of the upper portion is in contact with the lower surface of the translucent plate material.
請求項1に記載の光学デバイス装置において、
前記堰部の横断面では、前記上部のうち前記先端よりも前記受光部寄りに配置された部分と前記先端よりも前記電極部寄りに配置された部分との少なくとも一方の形状は、曲線である、光学デバイス装置。
The optical device apparatus according to claim 1,
In the cross section of the dam portion, at least one of a portion of the upper portion disposed closer to the light receiving portion than the tip and a portion disposed closer to the electrode portion than the tip is a curve. Optical device apparatus.
請求項2に記載の光学デバイス装置において、
前記上部の側面のうち前記先端よりも前記受光部寄りに配置された部分と前記先端よりも前記電極部寄りに配置された部分との両方の形状は、曲面である、光学デバイス装置。
The optical device apparatus according to claim 2,
The optical device apparatus, wherein both of the upper side surface and the portion disposed closer to the light receiving portion than the tip and the portion disposed closer to the electrode portion than the tip are curved surfaces.
請求項1から3の何れか1つに記載の光学デバイス装置において、
前記堰部の前記上部の前記先端は、前記透光性板材の前記下面に当接する平坦面である、光学デバイス装置。
In the optical device device according to any one of claims 1 to 3,
The optical device apparatus, wherein the tip of the upper portion of the dam portion is a flat surface that comes into contact with the lower surface of the translucent plate.
請求項1から4の何れか1つに記載の光学デバイス装置において、
前記遮光性封止剤は、熱硬化性の接着剤であり、前記透光性板材の側面を覆う一方前記透光性板材の上面を露出するように設けられており、前記透光性板材の前記側面を覆う部分にフィレット部を有する、光学デバイス装置。
In the optical device device according to any one of claims 1 to 4,
The light-shielding sealant is a thermosetting adhesive, and is provided so as to cover a side surface of the light-transmitting plate member and to expose an upper surface of the light-transmitting plate member. The optical device apparatus which has a fillet part in the part which covers the said side surface.
請求項1から4の何れか1つに記載の光学デバイス装置において、
前記遮光性封止剤は、熱硬化性の接着剤であり、前記透光性板材の側面を覆う一方前記透光性板材の上面を露出するように設けられており、
前記遮光性封止剤のうち前記透光性板材の前記側面を覆う部分は、前記透光性板材から遠ざかるにつれて薄くなっている、光学デバイス装置。
In the optical device device according to any one of claims 1 to 4,
The light-shielding sealant is a thermosetting adhesive, and is provided so as to cover the side surface of the light-transmitting plate material while exposing the upper surface of the light-transmitting plate material,
The optical device apparatus in which the part which covers the said side surface of the said translucent board | plate material among the said light-shielding sealing agents becomes thin as it distances from the said translucent board | plate material.
JP2007309985A 2007-11-30 2007-11-30 Optical device Pending JP2009135263A (en)

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