JP2009133643A - Inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device capable of efficiently inspecting the flaw of a flat plate-shaped inspection target. <P>SOLUTION: The inspection device 100 for inspecting the flaw of the flat plate-shaped inspection target is equipped with a first inspection part 1 having a support part 11 for supporting the inspection target so that one surface of the inspection target is exposed and a first imaging means 13 for imaging one surface of the inspection target, a second inspection part 2 having a lift means 21 for sucking one surface of the inspection target to lift the same and a second imaging means 23 for imaging the other surface of the inspection target and a determining device 3 for detecting the flaw of the inspection target on the basis of the inspection images taken by the first and second imaging means 13 and 23. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection apparatus.

  2. Description of the Related Art Conventionally, for example, an appearance inspection apparatus disclosed in Patent Document 1 is known as an apparatus for detecting defects in appearance in a flat inspection object such as a solar cell substrate or an electronic circuit board.

This apparatus includes a belt conveyor on which an inspection object is conveyed, a substrate reversal supply mechanism, and an imaging unit. In order to inspect the appearance of an inspection object, first, an image of one surface of the inspection object is detected by the imaging unit, and the presence or absence of a defect on one surface of the inspection object is inspected based on this image information (image). Is done. Thereafter, the inspection object is reversed by the substrate reversal supply mechanism, the image of the other surface of the inspection object is detected, and the presence or absence of a defect on the other surface of the inspection object is inspected based on this image.
JP 2000-97671 A

  However, when performing a visual inspection of a flat inspection object using the above-described apparatus, it is necessary to invert the inspection object and it is difficult to efficiently inspect the inspection object for defects. There was a problem.

  The present invention has been made to solve such a problem, and an object of the present invention is to provide an inspection apparatus capable of efficiently inspecting a defect in a flat inspection object.

  The object of the present invention is an inspection apparatus for inspecting defects in a flat inspection object, and a support part that supports the inspection object so that one surface of the inspection object is exposed, and the inspection A first inspection unit having a first imaging unit that images one side of the object, a lift unit that sucks and lifts one side of the inspection object, and a second imaging that images the other side of the inspection object This is achieved by an inspection apparatus comprising: a second inspection unit having means; and a determination device that detects a defect of the inspection object based on the inspection image captured by the first imaging unit and the second imaging unit.

  Further, in this inspection apparatus, the support part is formed of a transparent material, and is disposed on the opposite side of the first imaging unit across the support part, and irradiates light toward the first imaging unit. It is preferable to further include a light source.

  In addition, the support unit is disposed at an upper part of a support unit having a placement surface on which the inspection object is placed and a lower part of the upper part of the support unit, and forms a support space between the upper part of the support unit. A suction hole penetrating toward the internal space is formed in the placement surface, and at least one of the upper support portion and the lower support portion includes the internal portion. It is preferable that a suction flow path to which a suction device that sucks air in the space is connected is formed, and the upper portion of the support portion is detachably attached to the lower portion of the support portion.

  The light source preferably emits red light or infrared light.

  The first inspection unit and the second inspection unit are arranged adjacent to each other in the horizontal direction, and the first inspection unit is movable in an imaging area of the first imaging unit. A first transport unit configured to transport the support unit; and the second inspection unit includes a second transport unit configured to transport the lift unit so as to be movable in an imaging area of the second imaging unit. The first conveying means and the second conveying means are configured such that the support portion is disposed below the lift means outside the imaging area of the first imaging means and the second imaging means. Preferably it is.

  ADVANTAGE OF THE INVENTION According to this invention, the inspection apparatus which can test | inspect the defect of a flat test | inspection object efficiently can be provided.

  Hereinafter, an inspection apparatus according to the present invention will be described with reference to the accompanying drawings. 1 is a plan view of an inspection apparatus according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a cross-sectional view taken along line BB in FIG.

  The inspection apparatus 100 according to the present embodiment is an apparatus for inspecting defects in a wiring pattern in a flat inspection object 9 such as a solar cell substrate or an electronic circuit board, and cracks / chips of the substrate. A first inspection unit 1 and a second inspection unit 2 that are arranged adjacent to each other in the horizontal direction, a determination device 3, a housing body 4 that supports the first inspection unit 1 and the second inspection unit 2, and a control (not shown) Device.

  The first inspection unit 1 is an inspection unit for inspecting the presence or absence of defects or cracks in the wiring pattern on the one surface 9 a of the inspection object 9. The first inspection section 1 includes a support section 11 that supports the inspection object 9 so that the entire area of the one surface 9a of the inspection object 9 is exposed, and a first section for moving the support section 11 in the horizontal direction. One conveying means 12, a first imaging means 13 for imaging one surface 9 a of the inspection object 9, and a first illumination device 14 are provided.

  The support portion 11 is configured to be able to suck and fix the other surface 9 b of the inspection object 9 and is held by the arm portion 121 of the first transport unit 12. As shown in the enlarged view of the main part of FIG. 4, the support part 11 is a support base having a rectangular shape in a plan view having a placement surface 111 on which the inspection object 9 is placed. Is formed. A plurality of suction holes 113 penetrating toward the internal space 112 are formed in the mounting surface 111. Further, a suction channel 114 penetrating toward the internal space 112 is also formed on the side surface of the support portion 11, and a first suction pump (not shown) is connected to the suction channel 114. By driving the first suction pump, the air in the internal space 112 inside the support portion 11 is sucked, and the inspection object 9 placed on the placement surface 111 of the support portion 11 passes through the suction hole 113. It is sucked and fixed to the mounting surface 111 by suction.

  The first transport unit 12 is a device that passes through the imaging area of the first imaging unit 13 and transports the support unit 11 to the second inspection unit 2 side, and includes an arm unit 121 that holds the support unit 11 and an arm unit. A rail member 122 that supports 121, a ball screw 123 that is inserted through a part of the arm 121, and a motor 124 that rotates the ball screw 123 forward and backward. The rail member 122 and the ball screw 123 are arranged so as to be parallel to each other, and the arm portion 121 is configured to slide on the rail member 122 by the rotation of the ball screw 123. With such a configuration, by rotating the motor 124 forward and backward, the support unit 11 held by the arm unit 121 is reciprocated along the direction indicated by the arrow C in FIG. 1 and FIG. Thus, it is possible to move within the imaging area of the first imaging means 13. In FIG. 2, the rail member 122 is omitted.

  The first imaging means 13 is an apparatus that captures an image of the one surface 9a of the inspection object 9 placed on the support unit 11 and captures an inspection image, and examples thereof include a line sensor camera and a CCD camera. The first imaging means 13 is attached to a beam 42 provided between support columns 41, 41 erected on the housing body 4. Note that the inspection image data acquired by the first imaging means 13 is sent to the determination device 3.

  The first illumination device 14 is a device that irradiates light onto one surface 9 a of the inspection object 9 placed on the support unit 11, and is disposed above the inspection object 9 placed on the support unit 11. Yes. Examples of the first lighting device 14 include a fluorescent lamp and a halogen lamp. In addition, if the 1st imaging means 13 can acquire a clear test | inspection image even if there is no 1st illuminating device 14, it is not necessary to provide the 1st illuminating device 14 in particular.

  The second inspection unit 2 is an inspection unit for inspecting the presence or absence of a defect in the wiring pattern on the other surface 9b of the inspection target 9, a crack in the substrate, and the like. The second inspection unit 2 includes a lift unit 21 that sucks and lifts the one surface 9a of the inspection object 9, a second transport unit 22 for moving the lift unit 21 in the horizontal direction, and the inspection object 9 A second imaging means 23 for imaging the direction 9b and a second illumination device 24 are provided.

  The lift means 21 is configured to be able to suck and lift the one surface 9a of the inspection object 9, and as shown in the enlarged view of the main part of FIG. And a base 26 to which the device 25 is attached. The base 26 is held by the arm portion of the second transport means 22. The suction lifting device 25 includes a rod-like suction arm 251 that is inserted through a through hole 26a formed in the base 26, and a lifting device 252 that moves the suction arm 251 in the vertical direction (direction E in FIG. 5). And. The suction arm 251 is formed with a flow channel 255 penetrating from one end 253 to the other end 254 thereof. At one end 253 of the suction arm 251, there is provided a suction portion 256 for sucking the one surface 9 a of the inspection object 9, and this suction portion 256 is disposed so as to be exposed on the lower surface side of the base 26. Has been. Further, a second suction pump (not shown) is connected to the other end 254 of the suction arm 251 via a tube (not shown), and the suction portion 256 causes the suction portion 256 to be inspected by the suction action of the second suction pump. It is comprised so that the one surface 9a of 9 can be attracted | sucked and fixed.

  The second transport unit 22 is a device that transports the lift unit 21 so as to be movable in the imaging area of the second imaging unit 23. The second transport unit 22 has the same configuration as that of the first transport unit 12 described above. The arm unit 221 that holds the lift unit 21, the rail member 222 that supports the arm unit 221, and the arm unit 221. Are provided with a ball screw 223 inserted through a part of the motor and a motor 224 for rotating the ball screw 223 forward and backward. The rail member 222 and the ball screw 223 are arranged so as to be parallel to each other, and the arm portion 221 is configured to slide on the rail member 222 by the rotation of the ball screw 223. Here, the first imaging means 13 and the second imaging means 22 described above are configured so that the inspection object 9 can be exchanged between the support portion 11 and the lift means 21. The support portion 11 is configured to be disposed below the lift means 21 in a part outside the image pickup area 23. Thereby, the lift means 21 adsorbs the one surface 9a of the inspection object 9 on the support part 11 which has been conveyed to the second inspection part 2 side by the action of the first conveyance means 12, and causes the inspection object 9 to be attracted. The lift means 21 held by the arm portion 221 can be lifted in the direction indicated by the arrow D in FIGS. 1 and 2 (right and left in the figure) by being able to lift upward and rotating the motor 224 of the second transport means 22 forward and backward. It is possible to move in the imaging area of the second imaging means 23 by reciprocating along the direction. In FIG. 2, the rail member 222 is omitted.

  Moreover, in this embodiment, although the rail member 222 with which the 2nd conveyance means 22 and the rail member 122 with which the above-mentioned 1st conveyance means 12 are provided are comprised as a different body, for example, these are comprised by one. A rail member can also be used.

  The second imaging unit 23 is a device that captures an image of the other surface 9b (lower surface) of the inspection object 9 lifted by the lifting unit 21 and captures the inspection image. Examples thereof include a line sensor camera and a CCD camera. it can. The second imaging means 23 is disposed below the inspection object 9 lifted by the lifting means 21, and the other surface 9 b of the inspection object 9 is formed through an opening 43 formed on the upper surface of the housing body 4. It is configured to be able to shoot. The inspection image data acquired by the second imaging unit 23 is sent to the determination device 3.

  The second illumination device 24 is a device that irradiates light to the other surface 9 b of the inspection object 9 lifted by the lift means 21, and is disposed below the inspection object 9 lifted by the lift means 21. The second lighting device 24 can be exemplified by a fluorescent lamp, a halogen lamp, and the like, similarly to the first lighting device 14. In addition, if the 2nd imaging means 23 can acquire a clear test | inspection image even if there is no 2nd illuminating device 24, it is not necessary to provide the 2nd illuminating device 24 in particular.

  The determination device 3 is a device that detects a defect of the inspection object 9 based on the inspection image captured by the first imaging unit 13 and the second imaging unit 23. As such an apparatus, a computer in which an inspection program for detecting a defect in the inspection object 9 is installed can be exemplified. In addition, the determination device 3 includes a display device such as a display for displaying the inspection image captured by the first imaging unit 13 and the second imaging unit 23. The specific method for detecting the defect of the inspection object 9 is to output the reference image of the first surface 9a and the second surface 9b of the non-defective non-defective product stored in advance and the first imaging unit 13 and the second imaging unit 23, respectively. This is performed by comparing the inspection images of the one surface 9a and the other surface 9b. If there is a defect on one surface 9a or the other surface 9b of the inspection object 9 that is the inspection surface, and this is reflected in the inspection image, the defect is detected by comparing with a reference image in which no defect is displayed. Judged as defective. Conversely, if the inspection image matches the reference image, it is determined as a non-defective product.

  The control device includes the motors 124 and 224 of the first transport unit 12 and the second transport unit 22, the lifting device 252 of the lift unit 21, the first suction pump and the second suction pump (not shown), the first imaging unit 13, This is a device for controlling the operation of the second imaging means 23 and the like.

  Next, the operation of the inspection apparatus 100 according to this embodiment will be described. At the start of the inspection, as shown in FIG. 6, the support portion 11 of the first inspection portion 1 is disposed at a place farthest from the second inspection portion 2, and lift means of the second inspection portion 2. 21 is arrange | positioned so that it may become the 1st test | inspection part 1 side most. Further, a line sensor camera is used as the first and second imaging means 23.

  First, after an inspection operator places the inspection object 9 on a predetermined position on the support part 11 of the first inspection part 1, a first suction pump (not shown) is driven to place the inspection object 9 on the support part 11. Adsorb on top. Thereafter, the inspection object 9 is caused to pass through the imaging area of the first imaging means 13 by driving the first conveying means 12 (FIG. 7). The first imaging unit 13 acquires an inspection image of the one surface 9 a of the inspection object 9 by imaging the one surface 9 a of the inspection object 9 that has been conveyed, and sends this inspection image to the determination device 3.

  After the imaging of the one surface 9a by the first imaging unit 13 is completed, the first transport unit 12 transports the support portion 11 to the lower part of the lift unit 21 and stops as shown in FIG. Next, as shown in FIG. 9, by operating the lifting device 252 of the lift means 21, the suction arm 251 is lowered to bring the suction portion 256 into contact with the one surface 9 a of the inspection object 9, and the second The suction pump is driven to suck the inspection object 9. At this time, the drive of the 1st suction pump provided in order to attract | suck the other surface 9b of the test object 9 is stopped, and the suction of the other surface 9b of the test object 9 is cancelled | released. Then, as shown in FIGS. 10 and 11, by operating the lifting device 252, the suction arm 251 is raised and the inspection object 9 is lifted upward, and then the second conveying means 22 is driven, The inspection object 9 suspended by the lift means 21 is passed through the imaging area of the second imaging means 23. The second imaging means 23 acquires an inspection image of the other surface 9b of the inspection object 9 by imaging the other surface 9b of the inspection object 9 that has been conveyed from below the inspection object 9, and this inspection image. Is sent to the determination device 3.

  After the photographing by the second imaging means 23 is completed, the second conveying means 22 is stopped (FIG. 12). Then, the lifting device 252 is driven to lower the suction arm 251, and the driving of the second suction pump is stopped, and the inspection object 9 is detached from the suction portion 256 of the lift means 21. Thereafter, the first transport unit 12 and the second transport unit 22 are respectively driven to return the support portion 11 and the lift unit 21 to the initial positions (state shown in FIG. 6) to prepare for the next inspection of the inspection object 9.

  In the determination apparatus 3, the presence / absence of a defect on the one surface 9a and the other surface 9b to be inspected is determined based on the respective inspection images captured by the first image capturing unit 13 and the second image capturing unit 23. If there is a defect, it is determined as a defective product, and the inspection operator is notified by, for example, displaying a defective product on the display device or generating an alarm sound. On the other hand, if it is determined that the inspection object 9 is a non-defective product as a result of the inspection, for example, the display device is displayed as a non-defective product to notify the inspection operator.

  As described above, the inspection apparatus 100 according to the present embodiment images the one surface 9a of the inspection object 9 by the first imaging unit 13 and acquires the inspection image of the one surface 9a, and then Since the other surface 9b of the inspection object 9 exposed by lifting the one surface 9a upward by the lift means 21 is imaged by the second imaging means 23, an inspection image of the other surface 9b is obtained. As in the prior art, when inspecting the other surface 9b side (back surface side) of the inspection object 9, it is not necessary to invert the inspection object 9, and the one surface 9a and the other surface 9b of the inspection object 9 (table) It is possible to efficiently and smoothly inspect for defects on the back surface.

  Further, in the inspection apparatus 100 according to the present embodiment, when inspecting a defect on the other surface 9b of the inspection object 9, the lift means 21 adsorbs the one surface 9a of the inspection object 9 and moves the inspection object 9 upward. Therefore, a part of the apparatus for lifting the inspection object 9 is not interposed between the other surface 9 b of the inspection object 9 and the second imaging means 23. Therefore, for example, even in the case of inspecting the defect of the inspection object 9 in which the wiring pattern is formed in the entire front and back regions of the substrate in order to increase the power generation efficiency like the solar cell substrate, the inspection object 9 The second imaging means 23 can take an image of the entire area of the other surface 9b, and a reliable defect inspection is possible.

  Moreover, in this embodiment, the 1st test | inspection part 1 and the 2nd test | inspection part 2 are mutually arrange | positioned adjacent to the horizontal direction, and are supported so that the inside of the imaging area of the 1st imaging means 13 can be moved. A first transport unit 12 that transports the section 11, and a second transport unit 22 that transports the lift unit 21 so as to be movable within the imaging area of the second imaging unit 23. And the second transporting unit 22 is configured such that the support portion 11 is disposed below the lift unit 21 outside the imaging area of the first imaging unit 13 and the second imaging unit 23. 9 can be inspected for defects on the one surface 9a and the other surface 9b by flow work, and efficient defect inspection is possible.

  The embodiment of the inspection apparatus 100 according to the present invention has been described above, but the specific configuration of the present invention is not limited to the above embodiment. For example, the support unit 11 on which the inspection object 9 is placed is formed of a transparent material, and the first imaging unit 13 is disposed on the opposite side of the first imaging unit 13 across the support unit 11 as shown in FIG. You may comprise so that the auxiliary light source 5 which irradiates light toward may be arrange | positioned. With such a configuration, the light emitted from the auxiliary light source 5 passes through the transparent support portion 11 that moves in the imaging area of the first imaging means 13 and is applied to the inspection object 9. As a result, the entire region of the inspection object 9 is the inspection object, such as fine cracks that penetrate the front and back surfaces of the inspection object 9, internal cracks that are not exposed on the front and back surfaces, and chipping at the side edges of the inspection object 9 The first imaging means 13 can surely catch the defect, and the defect of the inspection object 9 can be inspected easily and with high accuracy. More specifically, for example, when the inspection object 9 has fine cracks penetrating the front and back surfaces, the light emitted from the auxiliary light source 5 and passing through the fine cracks appears on the inspection image. Fine cracks can be detected. Further, when there are internal cracks in the inspection object 9 that are not exposed on the front and back surfaces, an inspection image in which the difference in the density of light transmitted through the inspection object 9 is obtained is obtained, so the presence of the internal cracks is detected. Is possible. Further, when the side edge of the inspection object 9 is chipped, an inspection image in which the side edge shape of the inspection object 9 is shaded and emphasized due to light being blocked by the inspection object 9 Since it can acquire, the fine chip | tip in a side edge can be grasped | ascertained easily.

  Moreover, since the light irradiated from the auxiliary light source 5 is blocked by the inspection object 9, an inspection image in which the side edge of the inspection object 9 is emphasized as a shadow is acquired. The inclination of the inspection image of the inspection object 9 can be corrected. As a result, the formation position of the wiring pattern on the inspection object 9 can be accurately inspected.

  Here, examples of the auxiliary light source 5 include a fluorescent lamp and a halogen lamp, but it is preferable to use a light source that emits red light or infrared light. When a light source that emits red light or infrared light is employed as the auxiliary light source 5, these lights easily pass through the inspection object 9, so that the presence of internal cracks can be detected effectively.

  Moreover, when forming the support part 11 in which the test subject 9 is mounted with a transparent material, it is preferable to form the support part 11 as shown below. That is, as shown in FIG. 14, the support part 11 is disposed on the support part upper part 11a having the placement surface 111 on which the inspection object 9 is placed, and the support part upper part 11a, and the support part upper part 11a. It is preferable that the support part lower part 11b which forms the internal space 112 is provided, and the support part upper part 11a is detachably attached to the support part lower part 11b. With such a configuration, dust and dirt accumulated in the internal space 112 can be easily cleaned, and the transparency of the transparent support portion 11 can be maintained at a high level. As a result, it is possible to effectively prevent the inspection accuracy in the inspection of the defect of the inspection object 9 from being lowered. The suction channel 114 may be formed in the upper support portion 11a, or may be formed in both the upper support portion 11a and the lower support portion 11b. Further, in FIG. 14, by forming a recess 115 on the upper surface of the support portion lower portion 11b, an internal space 112 is formed between the support portion lower portion 11b and the support portion upper portion 11a disposed above the support portion lower portion 11b. However, by forming the recess 115 on the lower surface of the support portion upper portion 11a, or by forming the recess 115 on the lower surface of the support portion upper portion 11a and the upper surface of the support portion lower portion 11b, respectively. A configuration in which the internal space 112 is formed between the support portion lower portion 11b and the support portion upper portion 11a may be employed.

  In the description of the operation of the inspection apparatus 100 according to the present embodiment described above, the first inspection unit 1 first images the one surface 9a of the inspection object 9 by the first imaging unit 13, and then the second inspection unit 2 In the above description, the second surface 9b of the inspection object 9 is imaged by the second imaging unit 23 to inspect the defect of the inspection object 9. For example, first, the second inspection unit 2 inspects the inspection object 9. After the other surface 9b of 9 is imaged by the second imaging means 23, the first inspection unit 1 images the one surface 9a of the inspection object 9 by the first imaging means 13, thereby inspecting the defect of the inspection object 9 May be performed.

It is a schematic plan view which shows the inspection apparatus which concerns on one Embodiment of this invention. It is AA sectional drawing in FIG. It is BB sectional drawing in FIG. It is a schematic structure sectional view showing a support part with which an inspection device concerning the present invention is provided. It is a schematic structure sectional view showing the lift means with which the inspection device concerning the present invention is provided. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is explanatory drawing for demonstrating the action | operation of the inspection apparatus which concerns on this invention. It is a schematic sectional drawing which shows the modification of the inspection apparatus which concerns on this invention. It is schematic structure sectional drawing which shows the modification of the support part with which the inspection apparatus which concerns on this invention is provided.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Inspection apparatus 1 1st inspection part 11 Support part 12 1st conveyance means 13 1st imaging means 14 1st illumination device 2 2nd inspection part 21 Lift means 22 2nd conveyance means 23 2nd imaging means 24 2nd illumination apparatus 3 Judgment device 4 Housing body 5 Auxiliary light source 9 Inspection object

Claims (5)

An inspection apparatus for inspecting defects in a flat inspection object,
A first inspection unit having a support unit that supports the inspection object so that one surface of the inspection object is exposed, and a first imaging unit that images one surface of the inspection object;
Lift means for adsorbing and lifting one surface of the inspection object; and a second inspection unit having second imaging means for imaging the other surface of the inspection object;
An inspection apparatus comprising: a determination device that detects a defect of the inspection object based on an inspection image captured by the first imaging unit and the second imaging unit. The support portion is made of a transparent material,
The inspection apparatus according to claim 1, further comprising a light source that is disposed on the opposite side of the first imaging unit with the support portion interposed therebetween and that emits light toward the first imaging unit. The support portion has a support portion upper portion having a placement surface on which the inspection object is placed;
A lower support portion that is disposed at a lower portion of the upper support portion and forms an internal space with the upper support portion;
The placement surface is formed with a suction hole penetrating toward the internal space,
At least one of the upper part of the support part and the lower part of the support part is formed with a suction channel to which a suction device for sucking air in the internal space is connected,
The inspection apparatus according to claim 1, wherein the upper part of the support part is detachably attached to the lower part of the support part.   The inspection apparatus according to claim 2, wherein the light source emits red light or infrared light. The first inspection part and the second inspection part are arranged adjacent to each other in the horizontal direction,
The first inspection unit includes a first transport unit that transports the support unit so as to be movable in an imaging area of the first imaging unit,
The second inspection unit includes a second transport unit that transports the lift unit so as to be movable in an imaging area of the second imaging unit,
The first transport unit and the second transport unit are configured such that the support portion is disposed below the lift unit outside the imaging area of the first imaging unit and the second imaging unit. The inspection apparatus according to claim 1.

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