JP2009123858A - Heating type x-ray observation apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heating type X-ray observation apparatus which can perform real-time and accurate observation of the behavior of a workpiece under actual heating condition by X-ray irradiation at a position nearest to a workpiece such as electronic components or the like housed in a heating furnace. <P>SOLUTION: The heating type X-ray observation apparatus includes a heating furnace 12 which houses and heats a workpiece 20 as an object for soldering and an X-ray inspection unit 13 which inspects a state of soldering after applying an X ray to the workpiece 20. The X-ray inspection unit 13 includes an X-ray irradiation tube 30 which is projected into the heating furnace 12 under heating treatment and of which X-ray target part 40 at its tip end gives an X ray at a position close to the inspection region of the workpiece 20. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a heating X-ray observation apparatus that observes a state of a printed circuit board during reflow processing and an electronic component mounted on the printed circuit board by X-ray transmission.

  A reflow process is performed in order to mount a plurality of various electronic components, for example, surface-mounted semiconductor elements and connectors, on a printed circuit board on which a circuit pattern is formed via solder. A reflow apparatus for performing this reflow process includes a heating furnace that accommodates an object (workpiece) such as a printed circuit board on which electronic components to be soldered are arranged, and the temperature of the heating furnace and the workpiece. Observation and measurement means for measuring, and control means for performing temperature control based on the measurement means.

  The heating temperature or the like of the heating furnace or the workpiece is output as numerical data to the outside through a temperature measuring member installed in the heating furnace or introduced together with the workpiece. On the other hand, warping and deformation of the printed circuit board due to heating, or behavior such as the melting state and bonding state of the solder with respect to the printed circuit board of the electronic component are observed visually or with a camera from a peep window provided in a part of the heating furnace. There are many cases (see Patent Document 1).

  In order to perform normal reflow processing, the temperature in the heating furnace is maintained at a high temperature of about room temperature to about 300 ° C. Under such a high temperature environment, a large stress is applied to the workpiece. For this reason, by controlling and managing the heating temperature and the heating time by visual observation or observation using a camera or the like while the workpiece is being heated, it is possible to prevent deformation of the workpiece or bonding failure due to solder. . From the viewpoint of environmental problems, the solder is being replaced with a lead-free solder alloy (lead-free solder) that does not contain lead. Since such a lead-free solder has a melting point as high as about 20 to 30 ° C. compared to a lead-based solder alloy that has been generally used conventionally, in order to cope with this lead-free solder, There is an increasing need to observe the workpiece in more detail.

In addition, electronic devices such as ICs and LSIs have been further miniaturized due to recent advances in microfabrication technology. It is difficult to grasp enough. In order to solve such a problem, there has been proposed an apparatus for observing in detail a work being reflowed using X-rays (see Patent Documents 2 and 3).
Japanese Patent Laid-Open No. 10-51127 JP 2005-274194 A JP 2005-353712 A

  The X-ray observation apparatus disclosed in Patent Document 2 includes a first heat source that surrounds an electronic component that is a workpiece, and a second heat source that warms a part of the electronic component in a spot manner. The X-rays are transmitted through the electronic component heated by the heat source 2 and observed. However, the heating state by the first and second heat sources is different from the heating state accompanied by hot air convection in an actual reflow furnace (heating furnace). For this reason, the internal behavior of an electronic component when it reaches a predetermined temperature can be observed, but the internal behavior of the electronic component changes corresponding to how the temperature is transmitted due to the change in convection of hot air in the heating furnace. Is difficult to observe in real time.

  On the other hand, the X-ray observation apparatus shown in Patent Document 3 heats a workpiece such as an electronic component housed in an actual heating furnace and observes the state at this time by X-ray. Although it can be observed under conditions, an X-ray irradiation tube for irradiating the workpiece with X-rays is provided outside the heating furnace. For this reason, the irradiation distance of the X-ray with respect to the said workpiece | work becomes long, it becomes difficult to obtain effective observation magnification, and it is not easy to focus on an observation site | part correctly. In particular, since IC, LSI, and the like are finely processed, an observation means capable of more effective observation magnification and accurate focus adjustment is desired.

  Therefore, the object of the present invention is to perform real-time and detailed observation of the behavior of the workpiece under actual heating conditions by performing X-ray irradiation at a position closest to the workpiece such as an electronic component housed in the heating furnace. It is providing the heating type X-ray observation apparatus which can do.

  In order to solve the above-described problems, a heating X-ray observation apparatus according to the present invention includes a heating furnace that accommodates an object to be soldered and performs heat treatment, and a state of soldering by irradiating the object with X-rays. In the heating type X-ray observation apparatus provided with the X-ray inspection unit for inspecting the object, the X-ray inspection unit protrudes into the heating furnace during the heat treatment, and the tip is close to the inspection site of the object. An X-ray irradiation tube for irradiating X-rays is provided.

  According to the heating X-ray observation apparatus according to the present invention, the X-ray irradiation tube is irradiated with X-rays in a state where the tip of the X-ray irradiation tube protrudes into the heating furnace being heated and is closest to the inspection site of the object. Therefore, the observation magnification of the examination site by X-ray transmission can be further improved. As a result, it is possible to observe the details of a workpiece made of a substrate on which a wiring pattern and electronic components corresponding to high integration and fine processing such as LSI are mounted faithfully and clearly.

  Hereinafter, an embodiment of a heating X-ray observation apparatus according to the present invention will be described in detail with reference to the accompanying drawings. 1 and 2 show the overall configuration of the heating X-ray observation apparatus 10 of the present invention. FIG. 1 shows the internal configuration when viewed from the front direction, and FIG. 2 shows the internal configuration when viewed from the side direction. It is. In the heating X-ray observation apparatus 10, various electronic components such as an electronic element and a connector arranged via a printed board 21 as shown in FIG. 3 and solder 22 printed in a cream form on the printed board 21 are provided. A workpiece 20 consisting of 23 is the main inspection object. An example of the workpiece 20 is a printed circuit board 21 made of an insulating plate such as an epoxy resin having a thickness of 1 to 2 mm or a bakelite, and having a wiring pattern made of copper foil having a thickness of about 30 to 40 μm on the surface. In addition to conventional eutectic solder using tin-lead, lead-free solder using tin-silver-copper containing no lead can also be used. Further, the electronic component 23 reflow-mounted on the printed circuit board 21 via the solder 22 is compatible with fine processing and multi-pin LSIs.

  As shown in FIGS. 1 and 2, the heating X-ray observation apparatus 10 is disposed in a vertical direction with a heating furnace 12 containing a work 20 and performing a heat treatment, with the heating furnace 12 interposed therebetween. The X-ray inspection unit 13 is provided in the center, and the X-ray inspection unit 13 is accommodated in a housing 11 that seals the periphery. In the housing 11, a power supply device 25 for controlling the heating furnace 12 and the X-ray inspection unit 13, a control device 26, an observation camera 24, and the like are disposed. In addition, a power source unit, a control panel, a compressed air pipe and the like (not shown) are provided outside the housing 11.

  The casing 11 is formed in a box shape in which four sides are sealed with a metal panel in order to prevent X-ray leakage, and is housed in a lower side that is largely partitioned in the vertical direction by a pedestal portion (XY table) 17. A space 11a and an upper accommodation space 11b are provided. An X-ray generator 31, which is one of the components of the X-ray inspection unit 13, is disposed in the lower storage space 11 a, and an X facing the heating furnace 12 and the X-ray generator 31 is disposed in the upper storage space 11 b. A line detector 32 is arranged. Further, the housing 11 is provided with an observation window 14 in which a transmission glass 14a is inserted into a part of a metal panel to look into the upper accommodation space 11b. This observation window 14 is attached so that the heating furnace 12 can slide up and down with reference to the arrangement.

  As shown in FIG. 4, the heating furnace 12 includes a furnace main body 15 that houses the workpiece 20 and performs heat treatment, hot air supply parts 16 provided on both left and right sides of the furnace main body 15, and the furnace main body. A movable table 18 having an open portion at the bottom of the portion 15 and capable of moving on the XY table 17 is provided. In addition, the X-ray irradiation tube 30 is disposed through a hole portion 19 provided at a substantially central portion of the XY table 17 as shown in FIGS. 1, 2, and 4. The casing 11 includes a temperature adjustment unit for adjusting the temperature of the heater unit provided in the hot air supply unit 16 and a control display panel for displaying the control and status of the entire heating X-ray observation apparatus 10. Provided.

  The X-ray inspection unit 13 includes an X-ray generator 31 and an X-ray detector 32 for detecting the X-rays irradiated from the X-ray generator 31 through the work 20 in the heating furnace 12. And is configured. The X-ray detector 32 is provided with an X-ray detection surface 33 for detecting X-rays transmitted through the workpiece 20, and an X-ray irradiation tube 30 provided in the X-ray detection surface 33 and the X-ray generator 31. The inspection site of the work 20 is enlarged and displayed at an enlargement magnification determined based on the positional relationship with the work 20.

  As shown in FIG. 5, the X-ray generator 31 includes a cathode 35 that generates an energy beam (electron beam) 34, an anode 36 that accelerates the electron beam 34 generated by the cathode 35, and an anode 36. A condenser lens 37 for converging the accelerated electron beam 34, an objective lens 38 provided opposite to the condenser lens 37, and an electron beam 34 focused by the objective lens 38 are irradiated to generate an X-ray 39. And an X-ray target unit 40.

  As shown in FIG. 6, the X-ray target portion 40 is welded and fixed to a distal end portion of an elongated stainless steel tube 41 having a hollow portion 42 inside. The X-ray target portion 40 includes a disc-shaped target substrate 43 made of beryllium, and a target film 44 made of tungsten that is bonded to the surface of the target substrate 43 and generates an X-ray 39 when irradiated with an electron beam 34. It consists of.

  The target substrate 43 is fitted into a groove provided at the tip of the stainless steel tube 41, and the hollow portion 42 is held in a vacuum state by being fixed by low temperature welding.

  As shown in FIG. 6, the target film 44 is irradiated with a focused electron beam 34, thereby causing the X-ray source 46 corresponding to the focal position to have a predetermined spread angle X. Line 39 is generated. The hollow portion 42 that is the passage of the electron beam 34 in the X-ray generator 31 is sealed and kept in a vacuum state by a vacuum pump (not shown) or the like. The spread angle of the X-ray 39 is not particularly limited, but for example within a range of 45 degrees to 150 degrees, preferably about 100 degrees to 140 degrees.

  As shown in FIGS. 1 and 2, the X-ray detector 32 provided to face the X-ray generator 31 is disposed above the heating furnace 12 so as to be vertically movable. The X-ray detector 32 includes an X-ray detection surface 33 at a position facing the X-ray irradiation tube 30, and the distance between the X-ray detection surface 33 and the X-ray irradiation tube 30 above the heating furnace 12. An elevating mechanism 48 for shortening or lengthening the frame is provided on the top plate 47 of the housing 11. The elevating mechanism portion 48 is provided with a rotation shaft 49, and the rotation shaft 49 extends the X-ray detector 32 from a position close to the top surface of the heating furnace 12 to a position away from the top plate portion 47. It is possible to move with. As described above, by allowing the X-ray detector 32 to move in the vertical direction, the transmission magnification due to the X-rays emitted from the X-ray irradiation tube 30 can be varied.

  As shown in FIG. 4, the heating furnace 12 includes an upper surface portion 51, a front side surface (front surface portion) 52, a lower surface portion 53, a back surface portion 54, and a pair of side wall portions 55 and 56 facing in the left-right direction. The work 20 made of the printed circuit board 21 up to an A4 size plate as shown in FIG. 3 is arranged in a state of being floated at a substantially central part via the work support part 58. The work support portion 58 supports a pair of substantially L-shaped guide rails 59 on which the left and right edge portions of the work 20 are placed, and supports the guide rails 59 at the height of the intermediate position of the heating space 57. It has a pair of support legs 60 slidably arranged so as to be able to be separated and approached. By sliding the support leg 60, it is possible to cope with a workpiece of A4 size or smaller such as B5 or A5 size. This sliding movement is operated by a dial knob 61 provided on the front side of the heating furnace 12. Note that the sliding movement of the support leg 60 is configured so that the movement amount in the left-right direction is symmetric, so that it is positioned at a substantially central portion in the heating space 57 even for a workpiece of a size such as B5 or A5. It is supposed to be.

  As shown in FIG. 7, the X-ray irradiation tube 30 has an X-ray generator so that the X-ray target unit 40 has a height close to the lower surface of the workpiece 20 placed in the furnace body 15. It extends from the tip of 31. The X-ray irradiation tube 30 is desirably formed as thin as possible so as not to disturb the convection of hot air in the heating furnace 12, but the diameter of the X-ray target portion 40 that can be actually manufactured is 5 to 5. It is about 10 mm. In addition, the X-ray irradiation tube 30 can adjust the height of protrusion of the workpiece 20 by driving the X-ray generator 31 up and down according to the position where the workpiece 20 is placed. Observation is performed by irradiating X-rays in a state where the X-ray target unit 40 is in contact with a predetermined inspection site. Thus, since the X-ray target unit 40 can be irradiated with X-rays in contact with the examination site, an X-ray transmission image of the examination site can be detected with high magnification by the X-ray detector 32, Inspection accuracy can be dramatically improved. When the workpiece 20 is moved and the X-ray irradiation position by the X-ray target unit 40 is adjusted to another inspection site, the protruding amount of the X-ray irradiation tube 30 is adjusted to be low so as not to contact the workpiece 20. The

  In addition, since the X-ray irradiation tube 30 is configured independently of the X-ray generator 31, a plurality of X-ray irradiation tubes having different heights are prepared and supported in the heating furnace 12. It can also be replaced as appropriate according to the height position of 20. The X-ray irradiation tube 30 is fixed through a hole 19 provided in the XY table 17, and the heating furnace 12 is moved so as to slide on the XY table 17, so that an X-ray is applied to an arbitrary inspection site of the workpiece 20. The aim of the target unit 40 is adjusted.

  FIG. 8 shows the structure of the XY table 17. On the XY table 17, a pair of X-axis rails 62 extending opposite to the front side surface and the rear side surface, and a pair of Y-axis rails 63 bridged between the X-axis rails 62 are provided. The X-axis rail 62 is fixed on the XY table 17, and the Y-axis rail 63 is attached so that both ends can slide on the X-axis rail 62. The movable table 18 that supports the bottom of the heating furnace 12 is attached so as to be slidable on the pair of Y-axis rails 63. The heating furnace 12 can move in the Y-axis direction by sliding on the Y-axis rail 63, and further, the X-axis direction can be moved by sliding the Y-axis rail 63 along the X-axis rail 62. It can be moved. Therefore, the heating furnace 12 can be moved to an arbitrary position on the XY table 17 by the movement of the movable table 18 on the Y-axis rail 63 and the movement of the Y-axis rail 63 on the X-axis rail 62. .

  As shown in FIG. 9, the moving range of the heating furnace 12 is such that the X-ray target portion 40 of the X-ray irradiation tube 30 that is fixedly protruded from the substantially central portion of the XY table 17 is located at the bottom of the furnace body portion 15. The X-ray irradiation opening 64 is set to be in a scannable range. The X-ray irradiation opening 64 is an inspection area from which the X-ray irradiation tube 30 can protrude. In this embodiment, the X-ray inspection can be performed on the workpiece 20 up to A4 size (300 × 210 mm). The size of the beam irradiation opening 64 was set to 355 × 255 mm.

  The workpiece 20 can be closely observed by the X-ray inspection unit 13 in a minute inspection site that cannot be visually confirmed in an environment heated to a temperature at which reflow processing is possible. Further, as shown in FIG. 4, the heating furnace 12 is provided with window portions 71 a and 71 b on the upper surface portion 51 and the front surface portion 52, respectively. Therefore, an observation window provided on the front surface of the housing 11. 14 (see FIG. 1), the state of the workpiece 20 being heated from the outside can also be observed visually. In addition, it is possible to observe also from the lower surface side of the workpiece | work 20 by providing a window part also in the lower surface part 53 of the said heating furnace 12. FIG.

  Next, the structure of the heating furnace 12 that accommodates the workpiece 20 and performs the reflow process will be described in detail with reference to FIG. The heating furnace 12 has a structure for heating the entire workpiece 20 evenly by generating convection by hot air. The heating space 57 in the furnace body 15 is a space of about 40 mm on the upper surface side and the lower surface side of the workpiece 20 placed via the workpiece support portion 58 shown in FIG. 4 in consideration of convection of hot air. Space is reserved. The side wall portions 55 and 56 and the back surface portion 54 of the furnace main body portion 15 are formed of a heat-resistant metal surface, and the upper surface portion 51, the front surface portion 52, and the lower surface portion 53 are transparent to allow the state of the heating space 57 to be visually recognized. The window parts 71a and 71b having the properties are provided. The window portions 71a and 71b have a double structure of synthetic quartz glass having heat resistance, and are formed to have a wide enough view of both the front and back planes and the front side surface of the workpiece 20. By providing such window portions 71a and 71b, the mounting state of the electronic component 23 arranged on the front surface side and the back surface side of the workpiece 20 being heated and the warp and deformation of the printed circuit board 21 are observed from three directions. can do. The upper surface of the furnace main body 15 provided with the window 71a can be opened and closed in order to allow the workpiece 20 to be taken in and out.

  As shown in FIG. 4, on the side walls 55 and 56 in the heating furnace 12, jet parts 72 and 73 for blowing hot air on the front and back surfaces of the work 20 supported by the work support part 58, A discharge portion 74 for discharging the hot air after spraying to the outside is provided. As shown in FIG. 7, the ejection parts 72 and 73 are provided along the upper and lower sides of the side walls 55 and 56, and the discharge part 74 is provided for each of the ejections provided on the upper and lower sides. Provided in an intermediate portion between the portions 72 and 73. The discharge portion 74 is set at a height position substantially the same as the height of the workpiece 20 supported by the workpiece support portion 58. Further, the ejection parts 72 and 73 and the discharge part 74 are formed through the side wall parts 55 and 56 in a round hole shape and arranged in a line at equal intervals. It is desirable to form it more densely than the parts 72 and 73. The hot air jetted from the jetting portions 72 and 73 is convected from the respective end portions of the front and back surfaces of the work 20 toward the central portion, and thereafter, is discharged to the left and right side wall portions 55 and 56. Is naturally discharged to the outside of the heating furnace 12 so as to circulate in the heating space 57 at a constant flow rate.

  Each hot air supply section 16 provided on the left and right sides of the furnace body section 15 is provided with a heating chamber 75 and a pressurizing chamber 76 at the upper and lower stages with the discharge section 74 interposed therebetween. The heating chamber 75 includes an air stirring path 77 that leads to the ejection sections 72 and 73, and a heater section 78 that supplies heated air to each of the stirring paths 77. The heater section 78 includes a plurality of elongated heat generating tubes extending along the longitudinal direction of the side wall portions 55 and 56, and a controller (not shown) for setting and adjusting the heat generating tubes to a predetermined temperature. Further, in the pressurizing chamber 76, compressed air for jetting hot air into the furnace body 15 through the heating chamber 75 is generated. A valve and an air flow controller (not shown) are attached to an air pipe (not shown) that communicates with each of the pressurizing chambers 76, and the flow rate of the air fed into the pressurizing chambers 76 is appropriately adjusted. In the heating furnace 12 of the present embodiment, the air flow rate is controlled by an air flow controller provided corresponding to each of the four pressurizing chambers 76 disposed with the furnace main body 15 interposed therebetween. Thereby, the amount of hot air jetted from the four jetting portions 72 and 73 in the furnace main body 15 can be made uniform, and the workpiece 20 can be heated evenly (see FIG. 7).

  Next, actual operation by the heating X-ray observation apparatus 10 will be described. First, after opening the observation window 14 of the housing 11, the upper surface portion 51 of the heating furnace 12 is slid open (FIG. 4), and a workpiece 20 composed of a printed circuit board 21 on which various electronic components and connectors are arranged. Place on the support 58. The arrangement height of the workpiece 20 is set so as to be positioned approximately in the middle of the heating space 57. After setting the workpiece 20 at a predetermined position, the upper surface 51 is slid forward to seal the inside of the furnace body 15. This sealing is for preventing heat from leaking to the outside when the inside of the heating furnace is heated, and the inside during heating is also placed in a normal atmospheric pressure state. Finally, the observation window 14 is closed to completely seal the inside of the housing 11.

  After the work 20 is set, the temperature in the heating furnace 12 is set by a temperature adjustment unit (not shown) provided in the housing 11. This temperature is set up to a maximum of 300 ° C. and set in increments of 1 ° C. when lead-free mounting is performed. The temperature set here is sensed by a temperature sensor (not shown) provided in the furnace body 15 and is automatically controlled so as to maintain the set temperature.

  FIG. 10 is a sectional view showing a circulation state of hot air flowing in the heating furnace 12 by the above operation. As shown here, hot air is discharged from each of the ejection portions 72 and 73 toward the center of the workpiece 20. After the hot air reaches the center of the workpiece 20, the hot air is naturally exhausted from the discharge portion 74 provided at substantially the same height as the workpiece 20 to convect the inside of the furnace body 15. In the present embodiment, since the ejection portions 72 and 73 are provided at a total of four locations on the left and right side surfaces with the workpiece 20 as the center, the upper and lower surfaces of the workpiece 20 are heated to a predetermined temperature. The heated hot air can be heated evenly.

  When X-ray inspection is performed on the workpiece 20 being heated by the hot air, the X-ray target portion 40 of the X-ray irradiation tube 30 protruding from the XY table 17 is brought close to the inspection location, and the X-ray target portion 40 passes through the X-ray target portion 40. X-rays are irradiated. As shown in FIGS. 8 and 9, the X-ray irradiation to the inspection site of the work 20 slides the heating furnace 12 placed through the movable table 18 in the plane direction on the XY table 17. In this case, the X-ray target unit 40 of the X-ray irradiation tube 30 is brought close to an arbitrary inspection site of the workpiece 20. X-rays irradiated from the lower surface side of the workpiece 20 pass through the upper window portion 71a of the furnace main body portion 15, and are detected by the X-ray detector 32 disposed above the window portion 71a, and transmitted at that time. The image is displayed on a monitor or the like (not shown) installed outside. The state of the workpiece 20 moving around the X-ray irradiation tube 30 can also be observed by the camera 24 installed in the housing 11 (see FIGS. 1 and 2).

  The camera 24 is installed outside the heating furnace 12 within a radius of rotation about the X-ray irradiation tube 30. The camera 24 includes an image pickup device composed of a CCD capable of capturing a still image or a moving image, a lens unit, and an automatic or manual focus adjustment unit. The lens unit has a performance of 8 to 64 times as a standard and 32 to 256 times at a high magnification so that it can shoot from the entire workpiece 20 to each of the electronic components 23 as shown in FIG. What has is preferable. The inspection part of the workpiece 20 can be photographed with an arbitrary angle and magnification by the camera 24 and can be displayed on an external monitor or the like.

  As described above, in the heating type X-ray observation apparatus of the present embodiment, the X-ray target portion 40 of the X-ray irradiation tube 30 is inserted into the furnace main body portion 15 being heated, and the most in the inspection site of the workpiece 20. Since X-rays can be irradiated in a close state, the observation magnification by X-ray transmission can be further improved. In particular, since the X-ray irradiation tube 30 including the X-ray target unit 40 is formed very thin, it is a case where the X-ray irradiation tube 30 is inserted into a heating furnace of a type that heats the workpiece with hot air as in this embodiment. However, the convection of the hot air is not disturbed or disturbed. For this reason, it is possible to faithfully and clearly observe the details of a workpiece made of a substrate on which electronic components and wiring patterns corresponding to high integration and fine processing such as LSI are miniaturized without affecting the reflow process.

  In addition, since the heating furnace is provided with a window portion through which the workpiece being heated can be observed with the naked eye and a camera that can move around the window portion, the details of the workpiece due to the X-ray transmission and the entire workpiece Observation can be performed simultaneously.

  In the above-described embodiment, the X-ray inspection unit 13 including the X-ray generator 31 and the X-ray detector 32 is fixed, and the heating furnace 12 is moved so that an X-ray is applied to an arbitrary inspection site of the workpiece 20. Is configured to irradiate. On the other hand, the heating furnace 12 is fixed, and the X-ray inspection unit 13 is moved to an arbitrary inspection site of the workpiece 20 placed in the heating furnace 12. Is also possible.

It is an internal block diagram seen from the front side of the heating type X-ray observation apparatus which concerns on this invention. It is an internal block diagram seen from the side surface side of the said heating type X-ray observation apparatus. It is a perspective view which shows an example of a workpiece | work. It is a perspective view which shows the structure of a heating furnace. It is principal part sectional drawing which shows the structure of a X-ray generator. It is principal part sectional drawing which shows the structure of a X-ray irradiation tube. It is sectional drawing which shows the internal structure of a heating furnace. It is a perspective view which shows the structure of an XY table. It is a top view of the said XY table. It is explanatory drawing which shows the convection of the hot air in the said heating furnace.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Heating type X-ray observation apparatus 11 Housing | casing 11a Lower accommodation space 11b Upper accommodation space 12 Heating furnace 13 X-ray inspection unit 14 Observation window 14a Transmission glass 15 Furnace main-body part 16 Hot-air supply part 17 XY table (pedestal part)
18 Movable table 19 Hole 20 Workpiece (object)
DESCRIPTION OF SYMBOLS 21 Printed circuit board 22 Solder 23 Electronic component 24 Camera 25 Power supply device 26 Control apparatus 30 X-ray irradiation tube 31 X-ray generator 32 X-ray detector 33 X-ray detection surface 34 Electron beam 35 Cathode 36 Anode 37 Condenser lens 38 Objective lens 39 X-ray 40 X-ray target portion 41 Stainless steel tube 42 Hollow portion 43 Target substrate 44 Target film 46 X-ray source 47 Top plate portion 48 Lifting mechanism portion 49 Rotating shaft 51 Upper surface portion 52 Front portion 53 Lower surface portion 54 Back surface portion 55, 56 Side wall Section 57 Heating space 58 Work support section 59 Guide rail 60 Support leg 61 Dial knob 62 X-axis rail 63 Y-axis rail 64 X-ray irradiation opening 71a, 71b Window section 72, 73 Ejection section 74 Discharge section 75 Heating chamber 76 Addition Pressure chamber 77 Stirring path 78 Heater section

Claims (10)

In a heating type X-ray observation apparatus comprising a heating furnace that accommodates a soldering target and heat-treats, and an X-ray inspection unit that inspects the soldering state by irradiating the target with X-rays,
The X-ray inspection unit includes an X-ray irradiation tube that protrudes into a heating furnace during heat treatment and that radiates X-rays at a position where a tip portion is close to an inspection site of the object. Type X-ray observation device. The heating X-ray observation apparatus according to claim 1, wherein the X-ray irradiation tube is provided to protrude upward from a substantially central portion of a pedestal portion on which the heating furnace is placed. The heating furnace includes a sealed heating space that supports the object in a floating state and is slidable in the X-axis direction and the Y-axis direction about the X-ray irradiation tube. Item 3. The heating X-ray observation apparatus according to Item 1 or 2. The heating X-ray according to claim 1 or 2, wherein the X-ray irradiation tube is arranged so as to be vertically movable so that a tip portion thereof is close to an arbitrary inspection site of an object supported in the heating furnace. Observation device. The X-ray irradiation tube is an X-ray composed of a target substrate formed of beryllium and a target film formed on tungsten that is provided on the surface of the target substrate and generates X-rays when irradiated with an electron beam. The heating X-ray observation apparatus according to claim 1, further comprising a target unit. The heating X-ray observation apparatus according to claim 5, wherein the X-ray target unit is welded to a distal end portion of an elongated stainless steel tube having a hollow portion formed therein. The heating furnace has a pair of side walls facing each other with the object sandwiched in the left-right direction, and hot air is blown out by compressed air passing through the pressurizing chamber and the heating chamber on the upper side and the lower side of each side wall. A hot air discharge part is provided between the upper side part and the lower side part, and the hot air is convected in the heating space on the upper surface side and the lower surface side of the target object, thereby The heating type X-ray observation apparatus according to claim 1, wherein heating is performed uniformly. The heating X-ray observation apparatus according to claim 1, wherein the heating furnace includes a transmission window portion for observing the object from the outside. The heating X-ray observation apparatus according to claim 8, wherein a camera for photographing an object in the heating furnace is movably disposed on the outer periphery of the transmission window portion through the transmission window portion. The heating X-ray observation apparatus according to claim 1, wherein the object is a printed circuit board on which electronic components are arranged via solder.

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