JP2018015808A - Laser alignment adjusting method and water jet laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a water jet laser beam machine which performs a laser alignment adjusting operation also containing adjustment in the optical axis direction on a focal position of a laser beam.SOLUTION: A laser alignment adjusting method includes: a step of displaying images of a camera in which a nozzle hole and a laser spot are photographed onto a display device and, at the same time, displaying a target image onto the display device; a step of focusing the camera while looking at the image of the display device; a step of causing a center of the target image to agree with a center of the laser spot; a step of displaying a brightness distribution on straight lines which pass through the center of the display device and are extended in orthogonal two directions onto the display device while representing the brightness distribution graphically; a step of adjusting a position of focus of a laser beam in the optical axis direction such that a peak produced on each graph of the brightness distribution is turned to be acuter; and a step of adjusting the position of the focus of the laser beam in the orthogonal two directions such that the laser spot is coaxially positioned to a nozzle hole.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a water jet laser processing machine for processing a work through a laser beam in a columnar liquid flow formed by jetting liquid from a nozzle, and adjusting the alignment so that the optical axis of the laser beam coincides with the central axis of the liquid flow. The present invention relates to a method and a water jet laser processing machine having such an alignment adjustment function.

  In a laser processing machine (hereinafter referred to as a “water jet laser processing machine”) that processes a workpiece through a laser beam into a columnar liquid flow formed by jetting liquid from a nozzle, the optical axis of the laser beam is the central axis of the liquid flow. Must match. Insufficient alignment adjustment may shorten the reach of the laser beam, making it impossible to process, or may damage an expensive nozzle with the laser beam.

  Patent Document 1 discloses a water jet laser processing machine provided with such an alignment adjusting device. The alignment adjustment device of Patent Document 1 is based on the image of the inlet opening of a jet nozzle that ejects liquid to form a liquid column and the image of the laser spot, and the center of the laser spot is the center of the inlet opening of the nozzle. The jet nozzle and the optical fiber are configured to move relative to each other.

JP 2011-235347 A

  The alignment adjustment is performed after the position of the focal point of the laser beam in the optical axis direction is set to a predetermined position, usually a position in a plane including the inlet opening of the nozzle. However, the alignment adjusting device described in Patent Document 1 does not have a function of adjusting the position of the focal point of the laser beam in the optical axis direction. For this reason, the alignment adjustment device of Patent Document 1 cannot be applied to a water jet laser processing machine in which nozzle replacement is performed and the position of the focal point of the laser beam in the optical axis direction may be shifted.

  Normally, the number of nozzles used in a water jet laser processing machine is not limited to one, and the optimum nozzle is selected from those having different nozzle hole diameters according to processing requirements. When the nozzle is replaced, it is necessary to perform alignment adjustment including adjustment of the position of the focal point of the laser beam in the optical axis direction. Also, the nozzle is often held by a surrounding support structure through a rubber waterproof seal member. In such a case, for example, the nozzle acts on the nozzle when the water supply is stopped and restarted. The position of the nozzle may change due to minute fluctuations in the external force. Accordingly, it is necessary to perform alignment adjustment relatively frequently even when the nozzle is not replaced.

  The present invention has been made in view of the above circumstances, and is a laser alignment for a water jet laser processing machine capable of accurately and easily performing laser alignment adjustment work including adjustment of the focal position of a laser beam in the optical axis direction. An object is to provide an adjustment method and a water jet laser processing machine.

  In order to achieve the above-mentioned object, according to the present invention, in a laser alignment adjustment method of a water jet laser processing machine for focusing a laser beam on a nozzle hole for ejecting a water jet, the nozzle hole and the laser beam are generated. The image of the camera that captured the laser spot is displayed on the display device, the luminance distribution of the camera image is graphed and displayed on the display device together with the camera image, and the laser spot of the laser beam is the nozzle based on the luminance distribution graph A laser alignment adjustment method is provided for adjusting the position of the focal point of the laser beam so that it is positioned within the laser beam.

  Furthermore, according to the present invention, in a laser alignment adjustment method for a water jet laser processing machine that focuses a laser beam on the center of a nozzle hole for ejecting a water jet, the nozzle hole and a laser spot generated by the laser beam are provided. The captured camera image is displayed on the display device, the target image for assisting the alignment adjustment operation is displayed on the display device, the camera focus is adjusted by looking at the display device image, and the center of the target image is determined. A step of matching with the center of the laser spot, a step of graphing the luminance distribution on a straight line extending in two orthogonal directions through the center of the target image and displaying them on a display device, and a graph of the luminance distribution on a straight line extending in the two orthogonal directions Adjust the focus position of the laser beam in the direction of the optical axis so that the resulting peak becomes sharper That step, and a laser spot of the laser beam the step of adjusting the position of the focal point of the laser beam to be positioned concentrically to the nozzle hole in two orthogonal directions, the laser alignment adjustment method comprising is provided.

  Furthermore, according to the present invention, in the water jet laser processing machine capable of performing laser alignment adjustment for focusing the laser beam on the nozzle hole for ejecting the water jet, the focus of the laser beam is moved relative to the nozzle hole. Luminance created with a laser optical system, a camera that captures a laser spot of a nozzle hole and a laser beam, a luminance distribution graph creation unit that graphs luminance data of an image captured from the camera, and a camera image There is provided a water jet laser processing machine that includes a display device that displays a distribution graph, and that performs laser alignment adjustment based on the luminance distribution graph.

  According to the present invention, laser alignment adjustment can be performed quantitatively and visually using a luminance distribution graph. More specifically, the operator adjusts the focal position of the laser beam in the optical axis direction based on the degree of sharpening of the peak generated in the luminance distribution graph displayed on the display device, in other words, the width and height of the peak. It becomes possible to do. Therefore, it becomes possible to perform the adjustment more accurately and easily than the case where the focal position is adjusted based only on the image of the laser spot displayed on the display device. For this reason, variation in adjustment results when there are a plurality of operators is reduced.

1 is a perspective view of a water jet laser beam machine according to an embodiment of the present invention. It is a typical longitudinal cross-sectional view of the optical head of the said water jet laser beam machine. It is a perspective view of an alignment unit. It is a flowchart of the laser alignment adjustment which can be implemented using the said water jet laser processing machine. It is the schematic which shows an example of the screen displayed on the display apparatus of the said water jet laser beam machine. It is the schematic which shows an example of the screen displayed on the display apparatus of the said water jet laser beam machine.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
Referring to FIG. 1 showing an example of a water jet laser processing machine to which the present invention is applied, a water jet laser processing machine (hereinafter referred to as “laser processing machine”) 100 includes a table 108 for mounting a work, and the table. The optical head 10 is provided so as to be relatively linearly movable in three orthogonal directions of the X axis, the Y axis, and the Z axis with respect to 108, and the optical head 10 and the table 108 have a rectangular parallelepiped cover 102. Besieged by. The cover 102 has a safety door 106 that can slide in the left-right direction (X-axis direction). By opening the safety door 106, the operator can access the optical head 10 and the table 108 through the opening 104. . The safety door 106 includes an open / close detection unit 106a that detects that the safety door 106 is closed. Near the right end of the table 108, an alignment unit 40 used for alignment adjustment is disposed.

  An operation panel 110 for the laser processing machine 100 is attached to the front side wall of the cover 102. The operation panel 110 has a display device 112 and various operation buttons 114 for displaying parameters indicating the state and operation of the laser processing machine 100, icons for teaching operation methods to the operator, and the like. The display device 112 includes a touch panel that allows the operator to perform various operations on the laser processing machine 100 by touching an icon with a finger. The operation panel 110 incorporates a control device (not shown), and controls the laser processing machine 100 in accordance with an operator input and a program stored in the control device.

  The control device also includes an image processing unit (not shown) that captures and processes image data from the camera 32, which is a digital camera disposed in the optical head 10, and a graph creation unit (not shown) that graphs luminance data. I have.

  FIG. 2 schematically shows the optical head 10 arranged at an alignment adjustment position to be described later. The optical head 10 includes a laser irradiation head 16 that is disposed in a housing 12 and receives laser light from a laser oscillator 14 via a light guide member 14 a such as an optical fiber and irradiates the collimation lens 18. doing. The laser light from the laser irradiation head 16 is converted into parallel rays by the collimation lens 18, reflected by the first mirror 20 toward the second mirror 22, and directed toward the laser focus lens 24 by the second mirror 22. And reflected. The laser beam focused by the laser focus lens 24 is irradiated to the outside of the housing 12 through the nozzle head 26 and the nozzle hole 27a of the nozzle body 27 attached to the bottom wall thereof. At this time, the optical axis of the laser beam irradiated by the optical head 10 is substantially parallel to the Z axis. In the present embodiment, the laser oscillator 14 is an Nd: YAG laser and emits a visible light laser.

  The first and second mirrors 20 and 22 have planar reflecting surfaces, and have a first motor 20a and a second motor 22a as mirror orientation changing means. By adjusting the direction of the reflecting surface (direction perpendicular to the reflecting surface) by the first motor 20a and the second motor 22a, the focal position of the laser beam can be adjusted in the X and Y axis directions. The first and second mirrors 20 and 22, particularly the second mirror 22 that reflects the laser light toward the laser focus lens 24, are adapted to the wavelength of the laser light emitted from the laser oscillator 14, and the laser light And a dielectric multilayer film that transmits light having a wavelength other than the wavelength of the laser light. More specifically, the dielectric multilayer film is deposited on a glass plate. By forming the second mirror 22 from a dielectric multilayer film, the camera 32 can monitor the positional relationship between the laser light emitted from the nozzle hole 27a and the nozzle hole 27a. A camera focus lens 25 is disposed in the optical path on the front side of the camera 32. In order to adjust the focus of the camera 32, a third motor 25a that moves the position of the camera focus lens 25 in the Z-axis direction is provided. In the present embodiment, the focus of the camera 32 is matched with the upper end surface of the nozzle body 27 at the same level as the opening surface of the nozzle hole 27a. In the present specification, the upper end surface of the nozzle body 27 to which the camera is focused is also referred to as an “observation surface”.

  The focal point of the laser beam focused by the laser focus lens 24 must be positioned at the center of the nozzle hole 27a in the X and Y axis directions, and is also a predetermined position in the Z axis, that is, the optical axis direction. Then, it must be located at the same level as the opening surface of the nozzle hole 27a. For this reason, the optical head 10 has a fourth motor 24a as a laser beam focus adjusting means for adjusting the position of the laser focus lens 24 in the Z-axis direction. The deviation of the focal point in the optical axis direction not only lowers the irradiation power of the laser beam, but also generates a large-diameter laser spot that is not narrowed, so that the laser spot protrudes from the nozzle hole 27a and causes the nozzle body 27 to move. It may be damaged by the laser beam.

  The nozzle head 26 is a hollow member that receives supply of water from the water supply source 30 via the pipe line 28. A nozzle body 27 for ejecting a water jet is attached to a bottom wall facing the table 108 of the nozzle head 26, and a window 26a made of a transparent member such as glass is provided on the top surface facing the laser focus lens 24 on the opposite side of the bottom wall. Is provided.

  In this embodiment, the nozzle body 27 is attached to the bottom wall of the nozzle head 26 so as to be replaceable. In the present embodiment, a plurality of nozzle bodies 27 having different inner diameters of the nozzle hole 27a in the range of 25 μm to 120 μm are prepared and selected according to processing requirements. A rubber seal member (not shown) for preventing water leakage is disposed between the nozzle body 27 and the bottom wall of the nozzle head 26 to which the nozzle body 27 is attached.

  The alignment unit 40 is provided in order to facilitate the adjustment by reflecting the irradiated laser beam during the alignment adjustment. The alignment unit 40 is disposed near the right end of the table 108 in FIG. 1, and the optical head 10 moves to an alignment adjustment position above the alignment unit 40 during alignment adjustment. As shown in FIG. 3, the alignment unit 40 includes a base member 48 that is fixed to the table 108, an annular lower holding member 46 that is fixed to the upper surface of the base member 48, and a ring that is detachably attached to the lower holding member 46. The upper holding member 44, the horizontal reflecting plate 42 held between the upper and lower holding members 44, 46, and the light shielding member 34 made of an annular elastic material fixed to the upper surface of the upper holding member 44 are provided. . The reflector 42 can reflect the laser beam that has passed through the nozzle hole 27a upward during alignment adjustment.

  Further, in the laser processing machine 100, as shown in FIG. 2, a power meter 80 having a sensor unit is embedded on the optical axis of the laser beam irradiated by the optical head 10 at the alignment adjustment position on the table 108. The output of the laser beam emitted from the optical head 10 can be measured. Since the alignment unit 40 is provided with a notch (not shown) in the reflecting plate 42, the notch is a laser beam so that the laser beam reaches the power meter 80 when measuring the output of the laser beam. Are arranged on the optical axis.

Next, a basic operation mode of the laser beam machine 100 according to the present embodiment will be described.
During laser processing, water supplied from the water supply source 30 to the nozzle head 26 via the conduit 28 is ejected from the nozzle hole 27a, and a thin columnar liquid flow (water column) 60 extending in the Z-axis direction is formed. . On the other hand, the laser light from the laser oscillator 14 is focused by the laser focus lens 24 through the light guide member 14 a, the laser irradiation head 16, the collimation lens 18, the first and second mirrors 20 and 22, and the window of the nozzle head 26. 26a and the water in the nozzle head 26 are passed through, focused on the opening surface of the nozzle hole 27a, introduced into the water column 60, and repeatedly subjected to total reflection at the boundary surface between the water column 60 and the surrounding air on the table 108. Irradiated to a workpiece (not shown).

  In order to irradiate the workpiece on the table 108 with a predetermined beam diameter and output, alignment adjustment is performed to align the center of the laser beam condensed by the laser focus lens 24 and the center of the columnar liquid flow 60. It is necessary. In the alignment adjustment, the nozzle body 27 is supported by the nozzle head 26 via a waterproof rubber seal member (not shown) as in the present embodiment as well as when the nozzle body 27 is replaced. If this is the case, it will also be done when the water supply is turned off and then restarted.

  Next, an example of alignment adjustment according to the embodiment of the present invention will be described below with reference to the flowchart of FIG. By the way, in this embodiment, also in alignment adjustment, water is supplied and ejected from the nozzle hole 27a similarly to during processing. Laser light is also emitted, but in alignment adjustment, low-power laser light for adjustment is emitted.

  First, in step S10, the operator selects the alignment adjustment function on the operation panel 110 and presses the start button in the operation panel button 114. Then, in step S20, the optical head 10 is moved to the alignment adjustment position by the X-axis, Y-axis, and Z-axis feeding devices of the laser processing machine 100. At this time, the optical head 10 is disposed above the alignment unit 40, and then descends along the Z axis to a predetermined position where the bottom surface 12a of the housing 12 of the optical head 10 is in close contact with the light shielding member 34 of the alignment unit 40. .

  Next, in step S30, the control device starts supplying water and opens a shutter (not shown) provided in the laser oscillator 14. At substantially the same time, the control device reduces the amount of laser light to an output for alignment adjustment (step S40).

  At this time, as shown in FIG. 5, the main screen 200a of the display device 112 of the operation panel 110 has a target circle 208 with an X-direction cross line 208x and a Y-direction cross line 208y, a laser spot 204, a nozzle hole 202, a target. X-direction luminance distribution graph 210x and Y-direction luminance distribution graph 210y on a straight line along X and Y-direction cross lines 208x and 208y passing through the center of the circle 208, and a triangular movement icon 214a for moving the laser spot 204 and the target circle 208 , B, c, d are displayed. In the present specification, reference numeral 202 denotes an image of the nozzle hole 27a displayed on the main screen 200a.

  The control device of the operation panel 110 can capture and process the image data of the camera 32. The X-direction luminance distribution graph 210x and the Y-direction luminance distribution graph 210y are graphs of the control device based on the luminance data of the pixels located on the X and Y-direction cross lines 208x and 208y and their extension lines of the image sensor of the camera 32. The part is a graph. The laser spot 204 is visually recognized as a result of the laser beam focused by the laser focus lens 24 being reflected by the upper end surface of the nozzle body 27 that is the observation surface.

  On the auxiliary screen 200b in the area on the right side of the main screen 200a, camera focus adjustment icons 216a and b, laser focus adjustment icons 218a and b, a continuation icon 220, a target button 222, and a laser spot button 224 are displayed. By tapping the camera focus adjustment icons 216a and 216b, the third motor 25a for moving the camera focus lens 25 can be rotated forward and backward. By tapping the laser focus adjustment icons 218a and 218b, the fourth motor 24a for moving the laser focus lens 24 can be rotated forward and backward. By tapping the continuation icon 220, the alignment adjustment operation can be sequentially advanced. By selecting one of the target button 222 and the laser spot button 224, the movement icons 214a, b, c, and d can be manually switched for moving the target circle 208 and moving the laser spot 204, respectively.

  Next, in step S50, the operator adjusts the focus of the camera 32. The operator adjusts the focus of the camera 32 using the nozzle hole 202 as a subject for focusing in order to adjust the focus of the camera 32 to the upper end surface of the nozzle body 27 that is an observation surface. The operator taps the camera focus adjustment icons 216a and 216b on the auxiliary screen 200b while looking at the main screen 200a to search for a position where the nozzle hole 202 is displayed most clearly.

  When focus adjustment of the camera 32 is performed, it is preferable that the laser spot 204 is close to the nozzle hole 202 so that a part of the laser spot 204 overlaps the nozzle hole 202. This is because part of the laser beam that has passed through the nozzle holes is reflected by the reflection plate 42 of the alignment unit 40, and as a result, the nozzle holes 202 are clearly displayed brighter than the surroundings.

  Next, in step S60, the operator adjusts the focus of the laser beam. The focus adjustment in this case is to adjust the position of the focal point of the laser beam in the optical axis direction. In this step, the operator first aligns the target circle 208 with the center of the laser spot 204. The target circle 208 can be moved by tapping the movement icons 214a, b, c, d. When the center of the target circle 208 and the laser spot 204 is aligned, the luminance distribution graphs 210x and 210y in the X and Y directions extend along the straight line extending including the X direction cross line 208x and the Y direction cross line 208y passing through the center of the laser spot 204. Represents the distribution of each. The operator taps the laser focus icons 218a and 218b in order to focus the laser beam on the upper end surface of the nozzle body 27 that is the observation surface. Then, the laser focus lens 24 is moved in the optical axis direction by the fourth motor 24a. In each of the luminance distribution graphs 210x and 210y, a peak indicating the maximum luminance is formed at the center position of the laser spot 204, so that the operator can observe the X and Y direction luminance distribution graphs 210x and 210y for focus adjustment. The laser focus icons 218a and 218b are tapped so that the peak is sharpened, in other words, the peak width is minimized or the peak height is maximized.

  FIG. 6 shows the laser spot 204 and the target circle 208 so that the X-direction cross line 208x of the target circle 208 passes through the nozzle hole 202 and the center of the laser spot 204, and the Y-direction cross line 208y passes through the center of the laser spot 204. The main screen 200a in a state of being arranged with respect to the nozzle hole 202 is shown. Looking at the X-direction luminance distribution graph 210x, a peak Px having a maximum value at the center of the laser spot 204 is shown, and a gentle mountain is shown at a position corresponding to the nozzle hole 202 on the left side. On the other hand, when viewing the Y-direction luminance distribution graph 210y, only the peak Py having the maximum value at the center of the laser spot 204 is shown. The operator can set the focal position of the laser beam in the optical axis direction to an appropriate position using the width or height of these peaks as a judgment material.

  Next, in step S70, the operator determines whether the nozzle hole 202 and the laser spot 204 are clear at the same time. If not, the process returns to step S50, and if so, the process proceeds to step S80. In step S50, the focus of the laser spot 204 is slightly shifted when the nozzle hole 202 is focused, and the focus of the nozzle hole 202 is shifted slightly when the laser spot 204 is focused. That is. In step S <b> 80, the operator removes the target circle 208 from the laser spot 204 and aligns it with the nozzle hole 202.

  Next, the continuation icon 220 is tapped to proceed to step S90. Then, the function of the movement icons 214a, b, c, d is automatically switched from the movement of the target circle 218 to the movement of the laser spot 204. In step S90, the operator moves the positions of the laser spot 204 in the X and Y directions so that the laser spot 204 and the nozzle hole 202 are positioned concentrically. When the operator taps the movement icons 214a, b, c, and d, the laser spot 204 moves in the direction indicated by the icons. The laser spot 204 is moved by driving the motors 20a and 22a of the first and second mirrors 20 and 22 to change the directions of the first and second mirrors 20 and 22.

  If the laser spot 204 and the nozzle hole 202 are positioned concentrically, the operator operates the button 114 of the operation panel 110 to finish the laser alignment adjustment (step S100). Along with this, the emission of laser light is stopped. However, in the present embodiment, the supply of water is not stopped, and the optical head 10 returns to the normal processing position while jetting water from the nozzle hole 27a.

Other Embodiments In step S50 for adjusting the focus of the camera 32, the center of the target circle 208 is aligned with the center of the nozzle hole 202, and the luminance shown corresponding to the nozzle hole 202 in the X and Y direction luminance distribution graphs 210x and 210y. The focus of the camera 32 may be adjusted by adjusting the position of the camera focus lens 25 so as to minimize the width of the distribution peak.

  In step S50 for adjusting the focus of the camera 32, the laser spot 204 may be used as a subject for focusing the camera. In this case, the center of the target circle 208 is aligned with the center of the laser spot 204, and the camera focus is set so that the peak of the luminance distribution shown corresponding to the laser spot 204 in the X and Y direction luminance distribution graphs 210x and 210y becomes sharper. The focus of the camera 32 can be adjusted by adjusting the position of the lens 25.

  Embodiments in which the optical head comprises illumination that illuminates the viewing surface are also possible. In this case, the illumination is placed directly above the viewing surface, so that a third mirror is added to the optical head to move the camera sideways.

DESCRIPTION OF SYMBOLS 10 Optical head 14 Laser oscillator 18 Collimation lens 20 1st mirror 22 2nd mirror 24 Laser focus lens 25 Camera focus lens 26 Nozzle head 27 Nozzle body 27a Nozzle hole 40 Alignment unit 60 Water column 112 Display apparatus 202 Nozzle hole 204 Laser spot 208 target circle 208x X direction cross line 208y Y direction cross line 210x X direction luminance distribution graph 210y Y direction luminance distribution graph

In order to achieve the above-mentioned object, according to the present invention, in a laser alignment adjustment method of a water jet laser processing machine for focusing a laser beam on a nozzle hole for ejecting a water jet, the nozzle hole and the laser beam are generated. The image of the camera that captured the laser spot is displayed on the display device, the luminance distribution of the camera image is graphed and displayed on the display device together with the camera image, the camera image of the nozzle hole is focused, and the luminance distribution graph A laser alignment adjustment method is provided in which a laser spot of a laser beam is focused on the basis of the laser beam and a laser beam focus is adjusted so that the laser spot of the laser beam and the camera image of the nozzle hole are positioned concentrically. .

Furthermore, according to the present invention, in a water jet laser processing machine capable of performing laser alignment adjustment for focusing a laser beam on a nozzle hole that ejects a water jet, a laser that moves the focal point of the laser beam relative to the nozzle hole. Along with an image of the optical system, a camera that captures the laser spot of the nozzle hole and the laser beam, a control device having a luminance distribution graph creation unit that graphs luminance data of an image captured from the camera in two orthogonal directions, and a camera image A display device that displays the created luminance distribution graph, a camera focus button that is provided with the camera image and the luminance distribution graph on the display device, and a laser focus that adjusts the focus of the laser beam in the optical axis direction water jet laser processing machine that includes buttons and, the It is provided.

Claims (5)

In the laser alignment adjustment method of the water jet laser processing machine for focusing the laser beam on the nozzle hole for ejecting the water jet,
Display on the display device the image of the camera that captured the nozzle hole and the laser spot generated by the laser beam,
Graphing the luminance distribution of the camera image and displaying it on the display device together with the camera image,
A laser alignment adjustment method comprising: adjusting a focal position of the laser beam so that a laser spot of the laser beam is positioned in the nozzle based on a luminance distribution graph. In the laser alignment adjustment method of the water jet laser processing machine for focusing the laser beam on the center of the nozzle hole for ejecting the water jet,
Displaying on the display device an image of a camera that has captured the nozzle hole and the laser spot generated by the laser beam, and displaying a target image on the display device to assist in alignment adjustment work,
Adjusting the focus of the camera by looking at the image of the display device;
Aligning the center of the target image with the center of the laser spot;
Graphing a luminance distribution on a straight line extending in two orthogonal directions through the center of the target image and displaying the graph on the display device;
Adjusting the position of the focal point of the laser beam in the direction of the optical axis so that the peak generated in each graph of the luminance distribution on the straight line extending in the two orthogonal directions is sharpened; and the laser spot of the laser beam is the Adjusting the focal position of the laser beam in the two orthogonal directions to be positioned concentrically with the nozzle hole;
A laser alignment adjustment method comprising:   In the step of graphing the luminance distribution and displaying it on the display device, the image of the nozzle hole and the laser spot photographed by the camera is displayed on the display device simultaneously with the graph of the luminance distribution in the two orthogonal directions. The laser alignment adjustment method according to claim 2.   4. The laser according to claim 2, wherein, in the step of adjusting the focal position of the laser beam in two orthogonal directions, the laser spot positioned concentrically with the nozzle hole is contained in the nozzle hole. 5. Alignment adjustment method. In a water jet laser processing machine capable of performing laser alignment adjustment for focusing a laser beam on a nozzle hole for ejecting a water jet,
A laser optical system for moving the focal point of the laser beam with respect to the nozzle hole;
A camera that captures a laser spot of the nozzle hole and the laser beam;
A control device having a luminance distribution graph creation unit that graphs luminance data of an image captured from the camera;
A display device for displaying the created luminance distribution graph together with the image of the camera;
And a water jet laser processing machine that performs laser alignment adjustment based on the luminance distribution graph.

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