JP2007268519A - Liquid material feeding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid material feeding device in a simple structure for stably feeding the minute amount of a solution containing volatile components by an appropriate amount. <P>SOLUTION: The liquid material feeding device comprises: a container 21 for housing a liquid material containing the volatile components; a dispenser nozzle 22 whose one end is a capillary tube part; a dispenser nozzle moving means 23 capable of taking the capillary tube part of the dispenser nozzle 22 in and out of the container 21; and a pressure adjusting means 6 for turning the pressure of the dispenser nozzle 22 to a positive pressure or a negative pressure or the atmospheric pressure. The container 21 has such a depth that the capillary tube part of the dispenser nozzle 22 can be immersed in the liquid material. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a liquid material supply apparatus, and more particularly to a liquid material supply apparatus using a dispenser nozzle for supplying a liquid material containing a volatile component.

In the process of manufacturing color filters and alignment films used in liquid crystal display devices (LCDs), foreign matter (black defects), defects due to lack of color filter resist (white defects), and alignment film organic material shortages Defects may occur, and these defective portions need to be repaired in order to improve product yield.
Conventionally, in order to repair these defective portions, the defective portions are baked with laser light so that the light from the backlight is not transmitted, or the resist is supplied to the defective portions by laser irradiation or baking. The method of solidifying etc. is taken.

The above correction method (the former) has a problem that even if the screen is white, that portion becomes a black spot.
Further, in the above correction method (the latter), the resist material supply means to the defective portion is a liquid material supply device using a coating needle (for example, Patent Document 1), a dispenser (for example, Patent Document 2) or an ink jet (for example, Patent Document 3). Is used.
However, since the volatile component of the resist agent evaporates in a very short time, in the case of the application needle, the resist agent is solidified at the tip of the application needle, so that the supply amount of the resist agent is extremely low. There is a problem that becomes stable.
Further, in the dispenser device, the volatile component is vaporized, and the resist agent or the like is solidified inside the dispenser nozzle and the nozzle is clogged. There is a problem that the outer diameter of the dispenser increases and the tip of the dispenser nozzle cannot be accurately positioned at the defective portion.
In the ink jet apparatus, volatile components are vaporized, the resist agent or the like is solidified inside the ink jet nozzle, and the nozzle is blocked, and there is a problem that stable repair work cannot be performed.
JP-A-11-108849 JP-A-9-54206 Japanese Patent Laid-Open No. 11-271752

The present invention has been made in view of the above circumstances, and has an object to provide a liquid material supply device that has a simple structure and stably supplies a minute amount of a liquid containing a volatile component.

The present invention is characterized by the following points in order to solve the above problems.
That is, the liquid material supply device according to claim 1 includes a container for storing a liquid material containing a volatile component, a dispenser nozzle corresponding to the container, one end of which is a capillary part, and a capillary part of the dispenser nozzle. A liquid material supply device comprising: a dispenser nozzle moving means that allows the container to be taken in and out; and a pressure adjusting means that makes the pressure in the dispenser nozzle a positive pressure, a negative pressure or an atmospheric pressure. It has a depth that allows the capillary portion of the dispenser nozzle to be immersed in the liquid material.

A liquid material supply apparatus according to claim 2 is provided with first and second containers for storing a liquid material containing a volatile component, and a first dispenser nozzle corresponding to the first container, one end of which is a capillary part. And a second dispenser nozzle corresponding to the second container, one end of which is a capillary part,
Dispenser nozzle moving means for allowing the tip portions of the first and second dispenser nozzles to be taken in and out of the first and second containers, and the pressure in the first and second dispenser nozzles is positive or A liquid material supply device comprising a negative pressure or an atmospheric pressure adjusting means, wherein the first and second dispenser nozzles are integrally disposed between the first and second containers. It is characterized by being.

A liquid material supply device according to a third aspect is characterized in that an ultrasonic transducer is provided in a container for storing the liquid material of the liquid material supply device according to the first or second aspect.

The present invention has the following excellent effects.
According to the first aspect of the present invention, since one end of the dispenser nozzle is a capillary tube, the liquid material can be easily put into the dispenser nozzle by immersing the capillary portion in a container containing the liquid material. Even if the resist material or the like (hereinafter referred to as “solidified component”) remains in the dispenser nozzle, the volatile component contained in the sucked liquid material is again generated. Dissolved and prevented from clogging in the dispenser nozzle.

And even if the solidified component remains on the outer peripheral surface of the dispenser nozzle, the solidified component is prevented from solidifying on the outer peripheral surface of the dispenser nozzle because it is dissolved by the volatile component of the liquid material. . This makes it possible to accurately position the tip of the dispenser nozzle at the repaired location without causing a change in the outer dimension of the tip of the dispenser nozzle.

Further, since the liquid material is sucked into the dispenser nozzle by capillary action, even if the dispenser nozzle is immersed in the liquid material for a long time, a certain amount or more of the liquid material is sucked into the dispenser nozzle. The solidified component solidified inside and outside the dispenser nozzle can be sufficiently dissolved by the volatile component contained in the liquid material and absorbed into the liquid material by the above immersion for a longer time.
By allowing the air in the dispenser nozzle to communicate with the atmosphere, the liquid material can be filled into the dispenser nozzle without special control of the air pressure in the dispenser nozzle.

In addition, since the container has a depth that allows the capillary portion of the dispenser nozzle to be immersed in the liquid material, the dispenser nozzle is matched with the portion where the solidified component remains on the outer peripheral surface of the dispenser nozzle. Can be immersed in the liquid, and the outer peripheral surface of the dispenser nozzle can be dissolved and washed with the liquid material, so that the solidified component can be prevented from remaining on the outer peripheral surface of the dispenser nozzle and solidifying.

According to the second aspect of the present invention, the second dispenser can be used during discharge supply of the liquid material to a required location using one of the first and second dispenser nozzles, for example, the first dispenser nozzle. Since the capillary portion of the nozzle can be maintained immersed in the liquid material in the second container corresponding to the second dispenser nozzle, the capillary portion of the second dispenser nozzle is caused by the liquid material in the second container. And the second dispenser nozzle can be made to stand by in a state where the liquid material is sucked into the second dispenser nozzle by capillary action.

Then, when the remaining amount of the liquid material in the first dispenser nozzle that discharges and supplies the liquid material becomes equal to or less than a predetermined amount, or in the capillary portion of the first dispenser nozzle, clogging by the solidified component When this occurs, the liquid material can be continuously discharged and replaced by using the second dispenser nozzle in a standby state by replacing the first dispenser nozzle.

According to the invention of claim 3, the liquid material in the container is agitated by the vibration of the ultrasonic vibrator provided in the container of the liquid material, and the dispenser nozzle immersed in the container The inner and outer surfaces of the capillary portion can be easily cleaned.

Hereinafter, a liquid material supply device according to an embodiment of the present invention will be described with reference to the accompanying drawings.
First, FIG. 1 is a conceptual diagram showing a repair device 1 provided with a liquid material supply device 2 according to a first embodiment of the present invention.
The repair device 1 includes a liquid material supply device 2, a laser optical system 3, a photographing optical system 4, an illumination optical system 5, and the liquid material supply device 2, laser optical system 3, photographing optical system 4, and illumination optical system. 5 and a base 7 to be repaired, such as a liquid crystal substrate, is placed on the base 7, and XY (Y is perpendicular to the paper surface of FIG. 1) by a table driving mechanism (not shown). Direction), a base moving mechanism 8 that enables the base 7 to move in a direction (Z direction) perpendicular to the object 10 to be repaired, and a dispenser of the liquid material supply device 2 described later. Pressure adjusting means 6 for setting the pressure in the nozzle 22 to positive pressure, negative pressure or atmospheric pressure, a control system 9, and an external input means (external PC) 99 for inputting an external signal to the control system 9 are provided. .

A flat repair object (hereinafter referred to as “work”) 10 such as a liquid crystal substrate is, for example, a color filter or an alignment film of the liquid crystal substrate, and a missing portion (hereinafter referred to as “defect portion”). The term “white defect” or “black defect” portion of the color filter means a missing portion of the alignment film in the alignment film.

The liquid material supply device 2 includes a container 21 that stores the liquid material 21a (FIG. 3), a dispenser nozzle 22, and a first nozzle that advances and retracts the dispenser nozzle 22 in the direction of the defective portion of the workpiece 10 (arrow β in FIG. 1). The moving mechanism 23, the 1st drive motor 24 which drives the 1st moving mechanism 23, and the 1st position detection means 25 which detects the position of the arrow (beta) direction of the dispenser nozzle 22 are provided.
Then, the slider 26 to which the dispenser nozzle 22, the first moving mechanism 23, the first drive motor 24, and the first position detecting means 25 are attached can be moved in a direction parallel to the X-axis direction (arrow α). And a second drive motor 28 for driving the second movement mechanism 27, and a second position detector 29 for detecting the position of the dispenser nozzle 22 in the arrow α direction. .

The dispenser nozzle 22 (FIG. 2) includes a capillary portion 22a having one end having a predetermined length and a barrel portion 22b having the other end thicker than the capillary portion 22a. The barrel portion 22b is pressure-adjusted via a tube 61. Connected to means 6.
3, the capillary portion 22a of the dispenser nozzle 22 is immersed in the liquid material 21a in the container 21 by driving the drive motors 24 and 28 of the first and second moving mechanisms 23 and 27, respectively. The liquid material 21a can be sucked into the capillary portion 22a by capillary action during this immersion.
At this time, even if a part of the liquid material 21a remains in the capillary portion 22a due to the volatile component contained in the liquid material 21a, the residue is dissolved by the volatile component.

Further, the depth of the container 21 is such that the entire length of the capillary portion 22a can be immersed, and the immersion depth is arbitrarily determined by the first drive motor 24 and the first detection means 25. The immersion depth can be adjusted.
Furthermore, since the liquid material 21a can be introduced into the capillary portion 22a only for the immersion length regardless of the inter-capillary phenomenon, the amount of the liquid material 21a filled in the dispenser nozzle 22 can be adjusted.

As shown in FIG. 4, the pressure adjusting means 6 includes a switching valve 62, on-off valves 63A and 63B, an air compressor 60A, and a vacuum pump 60B. The switching valve 62 is in an OFF state, and the body portion 22b of the dispenser nozzle 22 is turned off. Is connected to the atmosphere, and the body 22b is connected to the air compressor 60a and the vacuum pump 60b via the on-off valves 63A and 63B in the ON state.
The on-off valves 63A and 63B are normally closed, and are opened by a signal from the control device 98.
That is, by operating this pressure adjusting means 6, the air pressure of the body portion 22b can be set to a positive pressure, a negative pressure or an atmospheric pressure, whereby the liquid material 21a in the capillary portion 22a is discharged, or the capillary portion The liquid material 21a can be sucked and discharged into the 22a.

That is, by immersing the tip 22a in the liquid material 21a of the container 21 while the switching valve 62 is OFF (the body 22b is open to the atmosphere), the dispenser nozzle 22 absorbs the liquid material 21a by capillary action. Can be raised.
Further, by turning on the switching valve 62, operating the air compressor 60A, opening the on-off valve 63A, and applying positive air pressure (pressure higher than atmospheric pressure) to the body portion 22b of the dispenser nozzle 22. The liquid material 21a can be discharged from the tip portion (capillary portion 22a) of the dispenser nozzle 22.
Further, after the switching valve 62 is turned off and the tip of the dispenser nozzle 22 is immersed in the liquid material 21a of the container 22, the vacuum pump 60B and the air compressor 60A are operated,
By alternately opening and closing the on-off valves 63A and 63B, the liquid material 21a can be sucked and discharged from the tip portion of the dispenser nozzle 22.

The amount of the liquid material 21a discharged from the tip portion of the dispenser nozzle 22 can be changed according to the pressure of the air applied to the dispenser nozzle 22, the application time, and the number of times of application.
The air pressure can be adjusted by a pressure regulating valve (not shown) in the air compressor 60A, and the application time and the number of times of application can be adjusted by the opening / closing time and the number of opening / closing of the on-off valve 63A. 63A is connected to the control device 98 and is controlled by a signal from the external PC 99 connected to the control device 98.

The laser optical system 3 includes an objective lens 33 facing the workpiece 10, a half mirror 35 b, an imaging lens 34, a half mirror 35 a, and a laser beam cross section provided in order above the optical axis (optical path L) of the objective lens 33. The shape shaping means 32 and the laser oscillator 31 are provided, and the half mirrors 35a and 35b respectively branch the optical path L into the photographing optical system 4 side and the illumination optical system 5 side.

The laser oscillator 31 is for irradiating a white defect or a black defect portion of the color filter with a laser beam to remove or trim the defect portion. For example, a pulse having a wavelength of 1064, 532, 355 nm, or the like. Laser light can be emitted.
Laser beam cross-sectional shape shaping means (hereinafter referred to as “aperture”) 32 adjusts the cross-sectional shape of the laser beam emitted from laser oscillator 31 to the shape of removal or trimming of the white defect or black defect portion. And is formed by four blades 32a, 32b, 32c, and 32d as shown in FIG. 5, and each blade is illustrated by an aperture drive mechanism (not shown). 5 can be driven in the direction of arrows A and B, and the shape of the opening can be changed.
The aperture drive mechanism (not shown) is connected to a control device 98 via an aperture controller 95, and is controlled by a signal from an external PC 99 connected to the control device 98.

Then, the laser beam shaped by the aperture 32 is condensed and irradiated to the corrected portion of the workpiece 10 by the objective lens 33, and the corrected portion is removed and trimmed in a predetermined shape.
Note that the laser oscillator 31 is stopped when the laser beam is not irradiated for repairing a missing portion of the alignment film.

The photographing optical system 4 includes a half mirror 42 and photographing means (hereinafter referred to as “CCD camera”) 41, and an optical path from the half mirror 35 a to the workpiece 10 is shared with the optical path L of the laser optical system 3. .
The half mirror 42 deflects the optical path branched from the optical path L of the laser optical system 3 by the half mirror 35a to the CCD camera 41 side.

Then, a predetermined region (FIG. 6A) including the defective portion 10 a on the workpiece 10 irradiated with light from the light source 51 of the illumination optical system 5 described later is passed through the objective lens 33 and the imaging lens 34. The CCD camera 41 can take an image.
The image data of a predetermined area including the defective portion 10a of the workpiece 10 imaged by the CCD camera 41 is connected to the control device 98 via the A / D converter 93 and the image processor 94, and the defect is detected. The image data of the unit 10 a can be displayed on the display unit 100 of the external PC 99 connected to the control device 98.

The illumination optical system 5 includes a mirror 52 on the optical path separated from the optical path L of the laser optical system 3 by the half mirror 35b, and includes the defective portion 10a of the workpiece 10 through the mirror 52, the half mirror 35b, and the objective lens 33. A light source 51 that irradiates a predetermined region with predetermined light is provided, and an optical path from the half mirror 35 b to the workpiece 10 through the objective lens 33 is common to the optical path L of the laser optical system 3.
The light source 51 includes a white light source and an ultraviolet light source (not shown), and a changeover switch (not shown) of these light sources, and is connected to the control device 98 via the light source controller 96 to switch the changeover switch. The amount of light of the white light source and the ultraviolet light source can be controlled.

The base moving mechanism 8 includes a base drive motor 81 that moves the base 7 in the Z direction, and a Z direction position detector 82 that detects the Z direction position of the base 7, and is detected by the Z direction position detector 82. Based on the Z-direction position data of the base 7 and the data of the first position detection means 25, the distance between the workpiece 10 and the tip of the capillary portion 22a of the dispenser 22 can be known.

The control system 9 was imaged by the control device 98, motor drivers 92, 97, and 91 for driving the base drive motor 81, the first drive motor 24, and the second drive motor 28, respectively, and the CCD camera 41. An A / D converter 93 that converts image data of a defective portion of the workpiece 10 into a digital signal, an image processor 94 that takes in the digital signal from the A / D converter 93 and processes the image, a light source controller 96, and an aperture A controller 95 and an external PC 99 having a display unit 100 are provided.

An aperture controller 95, motor drivers 92, 97, 91, an A / D converter 93, an image processor 94, a light source controller 96, an external PC 99, and a pressure adjusting means 6 are provided in the control device 98. It is connected.
In FIG. 1, the switching valve 62, the on-off valves 63A and 63B, the air compressor 60A, the vacuum pump 60B, and the pressure adjusting valve (not shown) and the control device 98 of the pressure adjusting means 6 are connected to one control device 98 for simplicity. They are displayed together with lines.

The image processor 94 includes image data of a predetermined area including the defective portion 10a of the work 10 (FIG. 6A), and image data of a predetermined area of the work 10 having no defective portion shown in FIG. 6B. (Reference image data) and the defect portion 10a is extracted from the difference, and the image data of the defect portion 10a is transmitted to the control device 98.

Then, the control device 98 reads the image data of the defective portion 10a of the workpiece 10 from the image processor 94, and the laser light is applied to a predetermined laser light irradiation range (FIG. 6C) including the shape of the defective portion 10a. Is transmitted to the aperture controller 95 so that the aperture 32 is actuated.

Next, the operation of the liquid material supply apparatus 1 configured as described above will be described based on an operation flowchart shown in FIG. 7 in the case of repairing a black defect of a color filter of a liquid crystal display substrate.
In step 1 (S1), the inspection result data of the workpiece 10 obtained by the inspection process (not shown) is recorded on the external PC.
Then, after the white light source of the light source 51 is activated, the table driving means receives the coordinate data of the defective portion 10a included in the inspection result data of the workpiece 10, and the table unit 11 is moved by the table driving mechanism (not shown). After controlling the movement in the X and Y directions and positioning the defective portion 10a in the optical path of the objective lens 33, the control device 98 drives the motor driver 92 of the base moving mechanism 8 to operate the base driving motor 81, and the workpiece 10 The imaging portion of the CCD camera 41 is focused on the defective portion 10a.
At that time, the air compressor 60A and the vacuum pump 60B are in an operating state, and the on-off valves 63A and 63B are both in a closed state.

Next, in step 2 (S2), the CCD camera 41 captures a predetermined area including the defective portion 10a of the workpiece 10 (FIG. 6A), and includes the defective portion 10a of the workpiece 10 obtained thereby. Image data in a predetermined area is converted into digital data by the A / D converter 93 and then sent to the image processor 94.

In step 3 (S3), the image processor 94 images the image data of a predetermined area including the defective portion 10a of the workpiece 10 (FIG. 6A) and the workpiece 10 having no defect in advance with the CCD camera 4. The image data (reference image data) of a predetermined area that does not have a defect portion as shown in FIG. The shape data of the defect portion 10a obtained by extracting the shape of 10a is transmitted to the control device 98.

In step 4 (S4), the control device 98 sends a signal to the aperture controller 95 based on the shape data of the defective portion 10a from the image processor 94 so that the region of the defective portion 10a is irradiated with the laser light. The aperture shape of the aperture 32 is set to a predetermined shape (laser beam irradiation range) including a defective portion (FIG. 6C).

In step 5 (S5), the laser beam generated by operating the pulse laser oscillator 31 is irradiated from the aperture 32 through the objective lens 33 to the portion to be corrected of the workpiece 10 (FIG. 8A), and this defective portion 10a. A predetermined region C including the surface is removed by laser light (FIG. 8B).

In step 6 (S6), the switching valve 62 is turned off in advance, the on-off valves 63A and 63B are closed, and the capillary portion is placed in the liquid material (hereinafter referred to as “repair ink”) 21a in the container 21. As shown in FIG. 3, the dispenser nozzle 22 in which 22a has been immersed is removed from the container 21 in the β1 direction by operating the first drive motor 24 and then the second drive motor 28 is operated. The dispenser nozzle 22 is moved in the α1 direction to be positioned at the standby position γ1 (FIG. 8C), and then the first driving motor 24 is operated again to move the tip of the dispenser nozzle 22 in the β2 direction. After moving and contacting or approaching the laser-processed portion via the standby position γ2, the switching valve 62 is turned on to open and close the open / close valve 63A a predetermined number of times, and a predetermined amount of repair ink. 21a is supplied to a predetermined area c (FIG. 8D).

In step 7 (S7), the first drive motor 24 is driven again, the tip of the dispenser nozzle 22 is moved (in the β3 direction in FIG. 3) to retract to the standby position γ1, and then the light source 51 The white light source is stopped, the ultraviolet light source is activated, and the portion to which the repair ink 21a is supplied is irradiated with ultraviolet light to solidify the repair ink 21a (FIG. 8E). Note that the standby position γ1 is a position where the capillary portion 22a of the dispenser nozzle 22 is not irradiated with ultraviolet light.
Thereafter, the first drive motor 24 and the second drive motor 28 are sequentially operated to move the dispenser nozzle 22 in the α2 direction and the β4 direction, so that the capillary portion 22a of the dispenser nozzle 22 is repaired in the container 21. 21a is immersed, the switching valve 62 is turned off while the on-off valves 63A and 63B are closed, the dispenser nozzle 22 is electrically connected to the atmosphere, and the repair ink 21a is capillaryized by capillary action. While being sucked up into the portion 22a, the repair ink 21a remaining inside and outside the capillary portion 22a of the dispenser nozzle 22 is dissolved by the volatile component contained in the repair ink 21a in the container 21, and the repair ink 21a in the container 21 is dissolved. Dissolve and absorb.

In step 8 (S8), whether a predetermined amount of the repair ink 21a held in the dispenser nozzle 22 has been supplied to the defective portion 10a of the workpiece 10 (of the on-off valve 63A of the pressure adjusting means 6 set by the external PC 99) When the predetermined number of operations has been reached), or even when positive air pressure is applied to the body portion 22b of the dispenser nozzle 22, the repair ink 21a is not ejected from the capillary portion 22a of the dispenser nozzle 22 to the defective portion 10a. (The operator can confirm that the ink is not ejected by observing the supply status of the repair ink 21a to the repair location displayed on the display device 100.).

The capillary tube of the dispenser nozzle 22 is set even when the predetermined number of operations of the on-off valve 63A of the pressure adjusting means 6 set by the external PC 99 is reached or even when positive air pressure is applied to the body portion 22b of the dispenser nozzle 22. If the repair ink 21a is not discharged from the portion 22a to the defective portion 10a, the first drive motor 24 and the second drive motor 28 are sequentially operated as described above, and the capillary tube of the dispenser nozzle 22 is operated. The portion 22 a is immersed in the repair ink 21 a in the container 21, and the repair ink 21 a remaining inside and outside the capillary portion 22 a of the dispenser nozzle 22 is caused by the volatile component contained in the repair ink 21 a in the container 21. It dissolves and is absorbed by the repair ink 21a in the container 21 (step 8 '(S8')).
In step 8, the capillary portion 22 a of the dispenser nozzle 22 may be reciprocated in the directions of arrows β 1 and β 4 in the repair ink 21 a in the container 21 by the first drive motor 24.

In step 9 (S9), it is checked from the data of the previous process stored in the external PC 99 whether or not there is any other defective part. 8 (S8) is repeated, and after repairing all the defective portions, the repair work of the workpiece 10 is finished.

As described above, the operation of the repair device according to the embodiment of the present invention has been described with respect to the correction of the black defect of the color filter of the liquid crystal substrate. The above step 6 (S6) to step 7 (S7) can be performed while the defect image by the CCD camera 41 displayed on the display device 100 of the external PC is visually confirmed without performing trimming or the like.

FIG. 9 is a conceptual diagram showing a repair device 1A provided with a liquid material supply device 2A according to another embodiment of the present invention. The same components as those of the repair device 1 are given the same numbers.
The configuration of the repair device 1A is the same as the configuration of the liquid material supply 2A and the pressure adjusting means 6A, except for the liquid material supply 2 and the pressure adjustment means 6 of the repair device 1, respectively.
Therefore, hereinafter, the liquid material supply device 2A and the pressure adjusting means 6A will be described.

The liquid material supply device 2A is attached to the base 7, and includes containers 21A and 21B for storing repair ink 21a, dispenser nozzles 22A and 22B corresponding to these containers 21A and 21B, and dispenser nozzles 22A and 22B. The integrally mounted slider 26B, the first moving mechanisms 23A and 23B that allow the dispenser nozzles 22A and 22B to move in predetermined directions (arrow β in FIG. 9), and the first moving mechanisms 23A and 23B, respectively. The first drive motors 24A and 24B to be driven, the first position detection means 25A and 25B for detecting the positions of the dispenser nozzles 22A and 22B in the direction of arrow β, and the slider 26A in a direction parallel to the X-axis direction (arrows) a second moving mechanism 27A that is movable to α) and a second driving motor 2 that drives the second moving mechanism 27A And a position detector 29A for detecting and A, arrows α position of the slider 26A. It has.

The positions of the dispenser nozzles 22A and 22B in the X-axis direction are calculated from the output of the position detector 29A and the outputs of the position detectors 25A and 25B.

The dispenser nozzles 22A and 22B have the same shape as the dispenser nozzle 22 of the above-described first embodiment, and each tip portion has a capillary portion 22Aa having a predetermined length like the dispenser nozzle 22 of FIG. 22Ba, and the body portions 22Ab and 22Bb are connected to the pressure adjusting means 6A via the tubes 61A and 61B.

As shown in FIG. 12, the pressure adjusting means 6A includes an air compressor 60A and a vacuum pump 60B, on-off valves 63A, 63B, 63C, 63D and switching valves 62A, 62B. The switching valves 62A, 62B are respectively dispenser nozzles 22A, It is connected to 22B trunk | drum 22Ab and 22Bb.
The body 22Ab of the dispenser nozzle 22A is electrically connected to the atmosphere when the switching valve 62A is OFF, and is electrically connected to the air compressor 60A and the vacuum pump 60B via the open / close valves 63A and 63B, respectively. It is like that.
The body 22Bb of the dispenser nozzle 22B is electrically connected to the atmosphere when the switching valve 62B is OFF, and is electrically connected to the air compressor 60a and the vacuum pump 60b via the open / close valves 63C and 63D, respectively. It has become.

By driving the first drive motor 24A, 24B and the second drive motor 28A, as shown in FIG. 11, either the capillary portion 22Aa of the dispenser nozzle 22A or the capillary portion 22Ba of the dispenser nozzle 22B is placed in a container. The ink can be immersed in the repair ink 21a in 21A or 21B, and the repair ink 21a is sucked into the respective capillary portions 22Aa or 22Ba by capillary action. (In this case, the switching valve 62A or 62B of the dispenser nozzle 22A or 22B immersed in the liquid material 21a is in an OFF state.)
At that time, even if a part of the repair ink 21a remains in the capillary portion 22Aa or 22Ba due to the volatile component contained in the repair ink 21a, the residue is the volatile component. It can be dissolved.

Further, the capillary portion 22Aa (or 22Ba) is immersed in the repair ink 21a, and the on-off valves 63A, 63B (or 63C, 63D) are opened and closed while the switching valve 62A (or 62B) is closed, thereby opening the body. By switching the pressure of the portion 22Ab (or 22Bb) between positive and negative, the repair ink 21a is sucked and discharged to the capillary portion 21Aa (or 21Ba), so that the inner surface of the capillary portion 22Aa (or 22Ba) is repaired. It can be cleaned with.

The interval between the dispenser nozzle 22A and the dispenser nozzle 22B integrally attached to the slider 26A is narrower than the interval between the containers 22A and 22B attached to the base 7, and the dispenser nozzles 22A and 22B are connected to the containers 22A and 22B. In a state where it is maintained at a position higher than the upper surface, the dispenser nozzle 22A or 22B, for example, the dispenser nozzle 22A is operated at the standby position γ1 (FIG. 11A) by operating the second drive motor 28A. Then, the dispenser nozzle 22B is positioned above the container 21B.
In the present embodiment, the distance between the container 22A and the container 22B is twice as long as the stroke of the slider 26A in the direction of the arrow α, and the optical axis (optical path L) of the objective lens 33 is the container 22A and the container 22B. It is arranged so as to be in the center of the interval.

Then, by operating the first drive motor 24A again and moving the dispenser nozzle 22A toward the workpiece 10 in the β direction, the tip end of the capillary portion 22Aa of the dispenser nozzle 22A approaches or touches the defective portion of the workpiece 10. In this case, by operating the first drive motor 24B, the capillary portion 22Ba of the dispenser nozzle 22B can be immersed in the repair ink 21a in the container 21B.

Thus, while the dispenser nozzle 22A is used for repair work, the capillary portion 22Ba of the dispenser nozzle 22B is maintained in a state of being immersed in the repair ink 21a, so that the dispenser nozzle 22B is in a standby state. The inner and outer surfaces of the capillary portion 22Ba of the dispenser nozzle 22B can be cleaned with the repair ink 21a.

When the repair ink 21a in the dispenser nozzle 22A is consumed, or when the repair ink 21a is cured on the inner and outer surfaces of the capillary portion 22Aa, the first drive motors 24A and 24B are operated, and the dispenser nozzle 22A is moved. While separating from the workpiece 10 in the β direction and pulling out the dispenser nozzle 22B from the container 21B in the β direction, the second drive motor 28A is operated so that the dispenser nozzles 22A and 22B are integrally formed as shown in FIG. After moving the dispenser nozzle 22B to the standby position γ1, the first drive motor 24B is actuated again, and the dispenser nozzle 22B is moved in the β direction. The dispenser nozzle 22B is moved to the workpiece 10 by the standby position γ2 (FIG. 9B). So that the tip of the capillary portion 22Ba can contact with or in proximity to the workpiece 10.

And after making the front-end | tip part of the dispenser nozzle 22B contact or approach the said defect part 10a, after switching ON the switching valve 62B of the pressure adjustment means 6, the on-off valve 63C is opened and closed, and positive pressure is applied to trunk | drum 22Bb. By applying air pressure, a predetermined amount of repair ink 21a can be supplied to the defective portion 10a from the dispenser nozzle 22B.
The operation of the switching valve 62B and the on-off valve 63C is operated by the control device 98 in response to a command from the external PC 99.

Next, the operation of the liquid material supply apparatus 1A configured as described above will be described based on the operation flowchart shown in FIG. 10 in the case of repairing black defects in the color filter of the liquid crystal display substrate.
In step 1 '(S1'), the inspection result data of the workpiece 10 obtained by the inspection process (not shown) is recorded on the external PC.
And after operating the white light source of the predetermined light source 51, this table drive means receives the coordinate data of the defect part 10a contained in the data of the inspection result of the workpiece | work 10, and the table unit 11 is made into the said table drive mechanism which is not shown in figure. After controlling the movement in the X and Y directions to position the defective portion 10a in the optical path L of the objective lens unit 33, the motor driver 92 of the base moving means 8 is driven by the control device 98, and the driving motor 81 is operated. The focus of imaging of the CCD camera 41 is adjusted to the ten defective portions 10a.
At that time, the air compressor 60A and the vacuum pump 60B are in an operating state, and the on-off valves 63A, 63B63C, and 63D are in a closed state.

Next, in step 2 ′ (S2 ′), the CCD camera 41 images the defective portion 10a of the workpiece 10, and the image data of a predetermined area including the defective portion 10a of the workpiece 10 obtained by the imaging is A / D. After being converted into digital data by the converter 93, it is sent to the image processor 94.

In step 3 ′ (S 3 ′), the image processor 94 detects the image data (FIG. 6A) of a predetermined area including the defective portion 10 a of the workpiece 10 and the presence of the defective portion as shown in FIG. The shape data of the defective portion 10a obtained by comparing the reference image data of the predetermined region not to be extracted and extracting the shape of the defective portion 10a of the workpiece 10 from the difference image data is transmitted to the control device 98.

In step 4 '(S4'), based on the shape data of the defective portion 10a from the image processor 94, a signal is sent from the control device 98 to the aperture controller 95, and the opening shape of the aperture 32 is changed to a predetermined value including the defective portion. The shape (laser beam irradiation range) is set (FIG. 6C).

In step 5 ′ (S5 ′), the laser beam generated by operating the pulse laser oscillator 31 is irradiated from the aperture 32 to the workpiece 10 through the objective lens 33 (FIG. 8A), and this defect portion 10a is included. A predetermined area (FIG. 6D) is removed by laser light (FIG. 8B).

In step 6 ′ (S6 ′), the switching valve 62A is turned off, the on-off valves 63A and 63B are closed, and the capillary portion 22Aa is immersed in the repair ink 21a in the container 21 in advance. The dispenser nozzle 22A is moved from the container 21A in the β direction in FIG. 11B by operating the first drive motor 24A, and then the second drive motor 28A is operated to move the dispenser nozzle 22A to the dispenser nozzle 22B. Are moved to the left side in the α direction in FIG. 9 to be positioned at the standby position γ1 (FIG. 11A). In this case, the switching valve 62B of the pressure adjusting means 6 is in an OFF state, and the on-off valves 63C and 63D are maintained in a closed state.

Then, the first drive motor 24A is actuated again to move the dispenser nozzle 22A in the direction of approaching the workpiece 10 in the β direction, so that the tip end portion of the capillary portion 22Aa abuts on the laser processed portion or After being brought close to each other (FIG. 8C), the switching valve 62A of the pressure adjusting means 6 is turned ON, and the on-off valve 63A is opened, so that a predetermined amount of the repair ink 21a is supplied from the tip of the dispenser nozzle 22A. It supplies to the area | region C removed with the laser beam (FIG. 8 d)).
At that time, the first drive motor 24B is operated to move the dispenser nozzle 22B in the β-direction container 22B direction in FIG. 11A, so that the capillary portion 22Ba is moved into the repair ink 21a in the container 22B. Immerse in.

In step 7 '(S7'), the first drive motor 24A is operated to retract the dispenser nozzle 22A to the standby position γ1, and then the ultraviolet light source is operated to operate the repair ink. The portion to which 21a is supplied is irradiated with ultraviolet rays to solidify the repair ink 21a (FIG. 8E).
The standby position γ1 is a position where the capillary portions 22Aa and 22Ba of the dispenser nozzles 22A and 22B are not irradiated with ultraviolet light.

In step 8 '(S8'), whether or not the predetermined number of actuations of the on-off valve 63C has been reached (the supply of the predetermined amount of the repair ink 12a held in the dispenser nozzle 22A to the defective portion 10a of the workpiece 10 is completed. Or whether the repairing ink 21a is not ejected from the capillary portion 22Aa of the dispenser nozzle 22A to the defective portion 10a even if a positive air pressure is applied to the body 22Ab of the dispenser nozzle 22A. to decide.

When the predetermined number of operations of the pneumatic device 6 set by the external PC 99 is reached, or even when positive air pressure is applied to the body portion 22Ab of the dispenser nozzle 22A, the capillary portion 22Aa of the dispenser nozzle 22A When the repair ink 21a is not ejected to the defective portion 10a (when the operator observes the supply status of the repair ink 21a to the repair location displayed on the display device 100, it can be confirmed that the repair ink 21a is not ejected). The first drive motor 24A is operated to move the dispenser nozzle 22A away from the workpiece 10 in the β direction to be positioned at the standby position γ1, and the first drive motor 24B is operated to move the dispenser nozzle 22B from the container 21B. Pull out and actuate the second drive motor 28A to move the dispenser nozzles 22A and 22B together as α Move to the left in FIG.

When the dispenser nozzle 22B is positioned at the standby position γ1, the capillary portion 22Aa of the dispenser nozzle 22A is positioned above the container 21A (FIG. 11B).
Then, by positioning the dispenser nozzle 22B at the standby position γ2 (FIG. 10B), the nozzle dispenser nozzle 22B is replaced with the nozzle dispenser nozzle 22A (step 8 ″ (S8 ″)).
At this time, the switching valve 62B is OFF, both the on-off valves 63C and 63D are closed, and the body portion 22Bb of the dispenser nozzle 22B is at atmospheric pressure.

Furthermore, after the first drive motor 24B is actuated again, the dispenser nozzle 22B is moved to the workpiece 10 in the β direction, and after passing through the standby position γ2, the tip of the dispenser nozzle 22B is brought close to or in contact with the workpiece ( 8 (c)), the switching valve 62B of the pressure adjusting means 6 is turned on, the on-off valve 63C is opened, and the liquid material 21a in the capillary tube 22Ba of the dispenser nozzle 22B is supplied to the defective portion (FIG. 8 (d). )) Will continue.

Further, the first drive motor 24A is driven, the dispenser nozzle 22A is moved in the β direction, the switching valve 62A is turned off, the on-off valves 63A and 63B are closed, and then the capillary portion 22Aa is moved. It is immersed in the repair ink 21a in the container 21A (FIG. 11 (b)), and the inner and outer surfaces of the capillary portion 22Aa are washed with volatile components contained in the repair ink 21a in the container 21A, and by capillary action, The repair ink 21a is sucked into the capillary portion 22Aa.
At this time, even if the solidification component remains on the outer peripheral surface of the capillary portion 22Aa of the dispenser nozzle 22A, the residual solidification component is dissolved in the volatile component, and the inside and outside of the capillary portion 22Aa of the dispenser nozzle 22A are blocked or contoured. Can prevent changes.

In step 9 '(S9'), it is checked whether there is any other defective part from the data of the previous process stored in the external PC 99. If there is another defective part, the above step 1 (S1 ') ) To Step 8 ″ (S8 ″) are repeated to repair all defective portions, and then the work for repairing the workpiece 10 is finished.

An ultrasonic vibrator may be provided on the lower surface of the containers 21A and 21B of the above embodiment, and the dispenser nozzle 22A is driven by driving the ultrasonic vibrator by a control device (not shown) connected to the ultrasonic vibrator. The inner and outer surfaces of the capillary portions 22Aa and 22Ba can be better cleaned while the capillary portions 22Aa and 22Ba of 22B are immersed in the repair ink 21a in the containers 21A and 21B.
In the above embodiment, the use of the repair device provided with the liquid supply device according to the present invention has been described for repairing white defects, black defects, etc. of the color filter. However, in the case of repairing defective portions due to alignment film defects In this case, after supplying the repairing ink to the defective portion, the predetermined region including the defective portion may be dried and cured without being irradiated with ultraviolet light.

As described above, according to the liquid supply apparatus according to the present invention, the repair ink composed of the curable solute and the solvent of the volatile component is sucked into the capillary portion of the dispenser nozzle by a capillary phenomenon, so The amount of the repair ink held in the container is small, and the capillary portion of the dispenser nozzle is immersed in the repair ink during the repair operation.
As a result, blockage due to the solute in the dispenser nozzle is unlikely to occur, and repair work can be performed stably.
Furthermore, while the repair work is being performed by one dispenser nozzle, the capillary portion of the other dispenser nozzle is immersed in the repair ink, so that the repair ink can be filled and the dispenser nozzle can be cleaned simultaneously. Repair work can be pending.

It is a conceptual diagram which shows the repair apparatus provided with the liquid material supply apparatus which concerns on one embodiment of this invention. It is a conceptual diagram of the dispenser nozzle of the liquid material supply apparatus which concerns on one embodiment of this invention. It is explanatory drawing for demonstrating a motion of a dispenser nozzle. It is explanatory drawing for demonstrating the structure of the pressure adjustment means which concerns on one embodiment of this invention. It is explanatory drawing for demonstrating the structure and motion of an aperture. It is a conceptual diagram which shows an example of the shape of a workpiece | work with a defect, and the reference | standard shape of a workpiece | work without a defect. It is a flowchart explaining operation | movement of the repair apparatus provided with the liquid material supply apparatus which concerns on one embodiment of this invention. It is explanatory drawing explaining each step of a flowchart. It is a conceptual diagram which shows the repair apparatus provided with the liquid material supply apparatus which concerns on other embodiment of this invention. It is explanatory drawing for demonstrating the motion of the dispenser nozzle of the liquid material supply apparatus which concerns on other embodiment of this invention. It is a flowchart explaining operation | movement of the repair apparatus provided with the liquid material supply apparatus which concerns on other embodiment of this invention. It is explanatory drawing for demonstrating the structure of the pressure adjustment means which concerns on other embodiment of this invention.

Explanation of symbols

1: Repair device 1A provided with liquid material supply device according to one embodiment: Repair device 2 provided with liquid material supply device according to another embodiment 2: Liquid material supply device 2A according to one embodiment: Other Liquid material supply device 3 according to the embodiment: Laser optical system 4: Observation optical system 5: Illumination optical system 6: Pressure adjusting means 7: Base 8: Base action mechanism 9: Control system 10: Work 11: Table 22: Dispenser nozzle 23: first moving mechanism 24, 24A, 24B: first driving motor 25, 25A, 25B: first position detecting means 27, 27A: second moving mechanism 28, 28A: second driving motor 29, 29A: second position detection means 31: laser oscillator 32: aperture 33: objective lens 41: CCD camera 51: predetermined light source 98: control device 99: external PC
100: Display

Claims (3)

A container containing a liquid material containing a volatile component; a dispenser nozzle having a capillary part at one end; a dispenser nozzle moving means for allowing the capillary part of the dispenser nozzle to be taken into and out of the container; and a pressure in the dispenser nozzle A liquid material supply device comprising: pressure adjusting means for setting positive pressure, negative pressure or atmospheric pressure to
The liquid material supply apparatus, wherein the container has a depth that allows the capillary portion of the dispenser nozzle to be immersed in the liquid material. A first and second container containing a liquid material containing a volatile component, a first dispenser nozzle corresponding to the first container, one end of which is a capillary portion, and a second container; A second dispenser nozzle, one end of which is a capillary portion;
A dispenser nozzle moving means for enabling the capillary portions of the first and second dispenser nozzles to be taken in and out of the first and second containers;
A liquid material supply device comprising: pressure adjusting means for setting the pressure in the first and second dispenser nozzles to positive pressure, negative pressure, or atmospheric pressure,
The liquid material supply apparatus, wherein the first and second dispenser nozzles are integrally disposed between the first and second containers. The liquid material supply device according to claim 1, wherein an ultrasonic vibrator is provided in a container that stores a liquid material containing a volatile component.