JP2002139461A - High-temperature observation furnace of radiolucent device - Google Patents
High-temperature observation furnace of radiolucent deviceInfo
- Publication number
- JP2002139461A JP2002139461A JP2000336983A JP2000336983A JP2002139461A JP 2002139461 A JP2002139461 A JP 2002139461A JP 2000336983 A JP2000336983 A JP 2000336983A JP 2000336983 A JP2000336983 A JP 2000336983A JP 2002139461 A JP2002139461 A JP 2002139461A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- furnace
- furnace tube
- temperature
- test sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、Ｘ線透視検査装置
に関し、詳しくは、炉管内で加熱された被検試料にＸ線
を照射して、Ｘ線透視検査を行うためのＸ線透視検査装
置の高温観察炉に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluoroscope, and more particularly, to an X-ray fluoroscope for irradiating a test sample heated in a furnace tube with X-rays to perform an X-ray fluoroscope. The present invention relates to a high-temperature observation furnace for an apparatus.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】近年、
環境保護の見地から、電子部品の実装工程において、鉛
を含まない無鉛はんだが広く用いられるに至っている。
しかし、無鉛はんだを用いて電子部品の実装を行う場
合、Ｐｂ−Ｓｎ系はんだなどを用いる場合に比べて、は
んだ付け温度が高くなるなど、過酷な条件下で実装を行
うことが必要となる。2. Description of the Related Art In recent years,
From the viewpoint of environmental protection, lead-free solder containing no lead has been widely used in electronic component mounting processes.
However, when mounting electronic components using lead-free solder, it is necessary to perform mounting under severe conditions such as a higher soldering temperature than when using Pb-Sn-based solder or the like.
【０００３】そのため、例えば、無鉛はんだを用いて積
層セラミックコンデンサを基板に実装するような場合、
積層セラミックコンデンサが無鉛はんだに対して十分な
はんだ濡れ性を有していることが重要となり、実装環境
下におけるはんだのぬれ状態を観察して、はんだ付け性
などの実装信頼性を評価することが必要となる。Therefore, for example, when a multilayer ceramic capacitor is mounted on a substrate using lead-free solder,
It is important that the multilayer ceramic capacitor has sufficient solder wettability to lead-free solder, and it is important to observe the solder wetting state in the mounting environment and evaluate the mounting reliability such as solderability. Required.
【０００４】そして、従来は、実装環境下におけるはん
だのぬれ状態を観察する方法として、高温顕微鏡を用い
て観察を行う方法が用いられている。[0004] Conventionally, as a method of observing the wetting state of solder in a mounting environment, a method of observing with a high-temperature microscope has been used.
【０００５】しかし、この方法は、外部からの観察であ
ることから、電子部品に形成された電極と実装基板上の
はんだ金属との界面の状態などを観察することができ
ず、はんだ付け性などの実装信頼性を明確に評価した
り、界面の状態を究明したりすることが困難であるのが
実情である。However, since this method is an external observation, it is not possible to observe the state of the interface between the electrode formed on the electronic component and the solder metal on the mounting board, and it is difficult to observe the solderability. It is a fact that it is difficult to clearly evaluate the mounting reliability and to determine the state of the interface.
【０００６】また、例えば、熱ストレスにより電子部品
に加わる応力や衝撃の程度を調べたりする場合において
も、外部からの観察だけでは、状況を正確に把握するこ
とは困難であるのが実情である。In addition, for example, when examining the degree of stress or impact applied to an electronic component due to thermal stress, it is difficult to accurately grasp the situation only by external observation. .
【０００７】本発明は、上述のような実情に鑑みてなさ
れたものであり、高温の被検試料についてＸ線透視検査
を行うことが可能なＸ線透視検査装置の高温観察炉を提
供することを目的としている。The present invention has been made in view of the above circumstances, and provides a high-temperature observation furnace for an X-ray fluoroscopic inspection apparatus capable of performing an X-ray fluoroscopic inspection on a high-temperature test sample. It is an object.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に、本発明（請求項１）のＸ線透視検査装置の高温観察
炉は、炉管内で加熱された被検試料にＸ線を照射してＸ
線透視検査を行うためのＸ線透視検査装置の高温観察炉
において、Ｘ線を放射するＸ線源と、被検試料を透過し
たＸ線を検出するＸ線検出手段と、少なくとも要部がＸ
線透過材料からなり、内部の所定の位置に被検試料が挿
入される炉管と、前記炉管の、被検試料が挿入される位
置の近傍で、かつ、Ｘ線の照射及び透過を妨げない位置
に配設され、炉管内に挿入された被検試料を所定の温度
に加熱するヒータと、炉管の開口部を封止する蓋部材で
あって、(a)炉管内の被検試料近傍の温度を検出する温
度検出手段を導入するための温度検出手段導入構造部及
び、(b)炉管内に所望のガスを導入するためのガス導入
構造部の少なくとも一方を備えた蓋部材とを具備するこ
とを特徴としている。In order to achieve the above object, a high-temperature observation furnace of an X-ray fluoroscope according to the present invention (claim 1) irradiates a test sample heated in a furnace tube with X-rays. Then X
In a high temperature observation furnace of an X-ray inspection apparatus for performing an X-ray inspection, an X-ray source that emits X-rays, an X-ray detection unit that detects X-rays transmitted through a test sample, and at least a main part of the X-ray inspection apparatus.
A furnace tube in which a test sample is inserted into a predetermined position inside the furnace tube, and a vicinity of a position where the test sample is inserted in the furnace tube and hinders irradiation and transmission of X-rays; A heater for heating the test sample inserted into the furnace tube to a predetermined temperature, and a lid member for sealing the opening of the furnace tube, wherein (a) the test sample in the furnace tube A temperature detection means introduction structure for introducing a temperature detection means for detecting a temperature in the vicinity, and (b) a lid member provided with at least one of a gas introduction structure for introducing a desired gas into the furnace tube. It is characterized by having.
【０００９】本発明（請求項１）のＸ線透視検査装置の
高温観察炉は、Ｘ線源と、Ｘ線検出手段と、内部に被検
試料が挿入される炉管と、被検試料を所定の温度に加熱
するヒータと、温度検出手段導入構造部及びガス導入構
造部の少なくとも一方を備えた蓋部材とを備えていると
ともに、ヒータを、炉管の被検試料が挿入される位置
（試料挿入位置）の近傍の、Ｘ線の照射及び透過を妨げ
ない位置に配設するようにしているので、例えば、実装
時の電子部品の電極とはんだの界面におけるぬれ現象
や、熱ストレスによる電子部品への衝撃や起点観察、は
んだ溶融時のフラックスとはんだ金属との挙動観察など
をＸ線透視像で観察することが可能になる。The high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to the present invention (claim 1) includes an X-ray source, X-ray detection means, a furnace tube into which a test sample is inserted, and a test tube. A heater for heating to a predetermined temperature and a lid member provided with at least one of a temperature detecting means introducing structure and a gas introducing structure are provided. Since it is arranged in a position that does not hinder X-ray irradiation and transmission in the vicinity of the sample insertion position), for example, wetting phenomena at the interface between the electrode and the solder of the electronic component at the time of mounting, and electrons due to thermal stress. It is possible to observe the impact and the starting point of the component, the behavior of the flux and the solder metal at the time of solder melting, and the like with the X-ray fluoroscopic image.
【００１０】また、請求項２のＸ線透視検査装置の高温
観察炉は、前記ヒータの主要部が２つに分割され、前記
炉管の、被検試料が挿入される位置の、軸方向両側の外
周部に配設されていることを特徴としている。Further, in the high-temperature observation furnace of the X-ray fluoroscope, the main part of the heater is divided into two parts, and both sides of the furnace tube in the axial direction of the position where the test sample is inserted. Is provided on the outer peripheral portion of.
【００１１】ヒータの主要部を２つに分割し、炉管の試
料挿入位置の、軸方向両側の外周部に配設することによ
り、Ｘ線の照射及び透過を妨げることなく、被検試料の
加熱を十分に行うことが可能になり、本発明を実効あら
しめることができる。The main part of the heater is divided into two parts, which are arranged on the outer peripheral parts on both sides in the axial direction at the sample insertion position of the furnace tube, so that the irradiation and transmission of X-rays are not hindered. Heating can be sufficiently performed, and the present invention can be made effective.
【００１２】また、請求項３のＸ線透視検査装置の高温
観察炉は、前記ヒータが、高抵抗線材を前記炉管の外周
に巻回することにより形成されているとともに、前記高
抵抗線材が、少なくとも被検試料が挿入される位置にお
いては、Ｘ線の照射及び透過を妨げないような巻回ピッ
チで巻回されていることを特徴としている。Further, in the high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to claim 3, the heater is formed by winding a high resistance wire around the outer periphery of the furnace tube. At least at the position where the test sample is inserted, the sample is wound at a winding pitch that does not hinder the irradiation and transmission of X-rays.
【００１３】ニクロム線、タンタル線などの高抵抗線材
（発熱線）を炉管の外周に巻回することによりヒータを
形成するとともに、高抵抗線材を、少なくとも被検試料
が挿入される位置においては、Ｘ線の照射及び透過を妨
げないような巻回ピッチで巻回することにより、特殊な
ヒータや、構造の複雑なヒータを用いることなく、実装
時の電子部品の電極とはんだの界面におけるぬれ現象
や、熱ストレスによる電子部品への衝撃や起点観察、は
んだ溶融時のフラックスとはんだ金属との挙動観察など
を、リアルタイムにＸ線透視像で観察することが可能に
なる。A heater is formed by winding a high-resistance wire (heating wire) such as a nichrome wire or a tantalum wire around the outer periphery of a furnace tube, and the high-resistance wire is placed at least at a position where a test sample is inserted. By winding at a winding pitch that does not hinder X-ray irradiation and transmission, wetting at the interface between the electrodes of the electronic components and the solder during mounting can be performed without using a special heater or a heater having a complicated structure. Observation of phenomena, impacts and starting points on electronic components due to thermal stress, observation of the behavior of flux and solder metal at the time of solder melting, and the like can be observed in real-time X-ray fluoroscopic images.
【００１４】また、請求項４のＸ線透視検査装置の高温
観察炉は、前記炉管は、一端側のみが開口部となってお
り、他端側は開口していないことを特徴としている。According to a fourth aspect of the present invention, there is provided a high-temperature observation furnace for an X-ray inspection apparatus, wherein the furnace tube has an opening at only one end and no opening at the other end.
【００１５】炉管として、一端側のみが開口部となって
いるものを用いることにより、蓋部材で一端側の開口部
を閉じるだけで、炉管を密閉にすることが可能になる。
その結果、昇温などの温度コントロールの容易化、被検
試料全体の温度の均一化、昇温により溶解する試料や液
体試料に対する観察の容易化、雰囲気制御のためのガス
（Ｈ2，Ｏ2，Ｎ2など）の使用量の低減などを実現する
ことができるようになる。By using a furnace tube having an opening only at one end, the furnace tube can be hermetically sealed only by closing the opening at one end with a cover member.
As a result, temperature control such as heating can be facilitated, the temperature of the entire test sample can be made uniform, observation of a sample or liquid sample dissolved by heating can be facilitated, and gas (H 2 , O 2 , it is possible to realize such reduction of the amount of N 2, etc.).
【００１６】また、請求項５のＸ線透視検査装置の高温
観察炉は、前記炉管の、軸方向に直交する方向の断面形
状が多角形であることを特徴としている。The high-temperature observation furnace of the X-ray inspection apparatus according to claim 5 is characterized in that the cross section of the furnace tube in a direction perpendicular to the axial direction is polygonal.
【００１７】本発明においては、炉管の形状に特別の制
約はないが、炉管の形状を、断面多角形状とした場合に
は、円筒状の炉管を用いる場合よりもＸ線源に近接して
被検試料をセットすることが可能になるとともに、画像
の拡大率を大きくすることが可能になり、細部まで精密
な観察を行うことができるようになる。In the present invention, there is no particular limitation on the shape of the furnace tube, but when the shape of the furnace tube is a polygonal cross section, it is closer to the X-ray source than when a cylindrical furnace tube is used. As a result, the test sample can be set, and the magnification of the image can be increased, so that precise observation can be performed in detail.
【００１８】また、請求項６のＸ線透視検査装置の高温
観察炉は、Ｘ線透視検査時に、前記Ｘ線源と前記炉管と
の間に挿入される、Ｘ線透過材料からなる放熱部材を備
えていることを特徴としている。In the high-temperature observation furnace of the X-ray inspection apparatus according to claim 6, a heat radiation member made of an X-ray transmission material inserted between the X-ray source and the furnace tube at the time of X-ray inspection. It is characterized by having.
【００１９】Ｘ線透視検査時に、Ｘ線源と炉管との間に
挿入される、Ｘ線透過材料からなる放熱部材を備えた構
成とした場合、例えば、２００℃以上に加熱した被検試
料を観察するような場合に、Ｘ線源と炉管の間に放熱部
材を挿入することにより、炉管の温度がＸ線源に直接熱
伝導して、Ｘ線源のシール部材を劣化させたりすること
を防止することが可能になり、設備の信頼性や耐用性を
向上させることができるようになる。なお、放熱部材に
用いることが可能なＸ線透過材料としては、カーボン、
ガラス、ポリイミド、カプトンフィルムなどが例示され
るが、その他の材料からなる放熱部材を用いることも可
能である。また、放熱部材は、Ｘ線源や炉管の形状、構
造、配設態様などに応じて、種々の形状とすることが可
能である。In the case of a configuration having a heat radiating member made of an X-ray transparent material inserted between the X-ray source and the furnace tube during the X-ray fluoroscopic inspection, for example, the test sample heated to 200 ° C. or more In the case of observing, by inserting a heat radiating member between the X-ray source and the furnace tube, the temperature of the furnace tube directly conducts heat to the X-ray source, thereby deteriorating the seal member of the X-ray source. Can be prevented, and the reliability and durability of the equipment can be improved. The X-ray transmitting materials that can be used for the heat radiation member include carbon,
Glass, polyimide, Kapton film and the like are exemplified, but a heat dissipating member made of other materials can also be used. Further, the heat dissipating member can be formed in various shapes according to the shape, structure, arrangement mode, and the like of the X-ray source and the furnace tube.
【００２０】[0020]
【発明の実施の形態】以下、本発明の実施の形態を示し
て、その特徴とするところをさらに詳しく説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described, and features thereof will be described in more detail.
【００２１】［実施形態１］図１は本発明の一実施形態
にかかるＸ線透視検査装置の高温観察炉を示す平面図、
図２は正面図である。[Embodiment 1] FIG. 1 is a plan view showing a high-temperature observation furnace of an X-ray fluoroscope according to an embodiment of the present invention.
FIG. 2 is a front view.
【００２２】この実施形態１のＸ線透視検査装置の高温
観察炉は、被検試料２にＸ線を照射してＸ線透視検査を
行うためのＸ線透視検査装置に取り付けられて用いられ
る高温観察炉であり、被検試料２が挿入、設置される炉
管１と、Ｘ線を放射するＸ線源３と、炉管１及び被検試
料２を透過したＸ線を検出するＸ線検出手段４と、炉管
１の、被検試料２が挿入される位置（試料挿入位置）Ｐ
の両側に、Ｘ線の照射及び透過を妨げないように配設さ
れ、炉管１内に設置された被検試料２を所定の温度に加
熱するヒータ６と、炉管１内の温度を検出する温度検出
手段（この実施形態では熱電対）７と、蓋部材８とを備
えている。なお、この実施形態１の高温観察炉において
は、被検試料２が、Ｘ線透過材料からなる試料台１１上
に支持されるように構成されている。The high-temperature observation furnace of the X-ray inspection apparatus according to the first embodiment is a high-temperature observation furnace used by being attached to an X-ray inspection apparatus for irradiating the sample 2 with X-rays and performing X-ray inspection. An observation furnace, which is a furnace tube 1 into which a test sample 2 is inserted and installed, an X-ray source 3 that emits X-rays, and an X-ray detector that detects X-rays transmitted through the furnace tube 1 and the test sample 2 Means 4 and a position (sample insertion position) P of the furnace tube 1 where the test sample 2 is inserted.
A heater 6 disposed on both sides of the furnace tube 1 so as not to hinder X-ray irradiation and transmission, and heats the test sample 2 installed in the furnace tube 1 to a predetermined temperature, and detects a temperature in the furnace tube 1 Temperature detecting means (thermocouple in this embodiment) 7 and a lid member 8. In the high-temperature observation furnace according to the first embodiment, the test sample 2 is configured to be supported on a sample stage 11 made of an X-ray transmitting material.
【００２３】炉管１は、ガラスなどのＸ線透過材料から
なる円筒状の管で、水平に配置されており、一端側が開
口し、他端側は密閉されている。なお、この実施形態１
では、炉管１として、直径１６mm、長さ１５０mmのガラ
ス製の試験管を使用している。The furnace tube 1 is a cylindrical tube made of an X-ray transmissive material such as glass, and is disposed horizontally, has one end open and the other end closed. The first embodiment
In this example, a glass test tube having a diameter of 16 mm and a length of 150 mm is used as the furnace tube 1.
【００２４】炉管１の一端側の開口部１ａは、被検試料
２の挿入口となっており、蓋部材８を取り付けることに
より密閉することができるように構成されている。な
お、炉管１は、スタンドにより支持したり、クランプに
より挟持したりすることによって、所定の姿勢に保持す
ることが可能であり、炉管１を所定の姿勢に保持するた
めの方法に特別の制約はない。An opening 1a at one end of the furnace tube 1 serves as an insertion port for the sample 2 to be tested, and is configured to be hermetically sealed by attaching a cover member 8. The furnace tube 1 can be held in a predetermined position by being supported by a stand or being clamped by a clamp. A special method for holding the furnace tube 1 in a predetermined position is used. There are no restrictions.
【００２５】また、蓋部材８は、水平に配置された炉管
１の一端側の開口部１ａを封止する部材であり、炉管１
内の被検試料２の近傍の温度を検出する温度検出手段
（熱電対）７を導入するための温度検出手段導入構造部
９と、雰囲気ガスを炉管１内に導入するためのガス導入
構造部１０（図２）を備えている。The cover member 8 is a member for sealing the opening 1a at one end of the furnace tube 1 disposed horizontally.
Temperature detecting means introducing structure 9 for introducing a temperature detecting means (thermocouple) 7 for detecting the temperature in the vicinity of the test sample 2 in the chamber, and a gas introducing structure for introducing the atmospheric gas into the furnace tube 1 A part 10 (FIG. 2) is provided.
【００２６】なお、この実施形態１において、蓋部材８
は、耐熱性に優れたシリコーンゴムから形成されてい
る。また、雰囲気ガスを炉管１に導入するためのガス導
入構造部１０として、内径が２mmのガラス管１０ａが取
り付けられているとともに、雰囲気ガスを系外に排出す
るために用いられるガラス管１０ｂ（内径２mm）が取り
付けられている。なお、雰囲気ガスは、流量計を介し
て、所定量を供給することができるように構成されてい
る。In the first embodiment, the lid member 8
Is made of silicone rubber having excellent heat resistance. Further, a glass tube 10a having an inner diameter of 2 mm is attached as a gas introduction structure 10 for introducing an atmosphere gas into the furnace tube 1, and a glass tube 10b ( (2 mm inside diameter) is attached. The atmosphere gas is configured to be able to supply a predetermined amount via a flow meter.
【００２７】また、雰囲気ガスを系外に排出するための
ガラス管１０ｂは、温度検出手段（熱電対）７を炉管１
内に導入するための温度検出手段導入構造部９として機
能するように構成されている。The glass tube 10b for discharging the atmospheric gas to the outside of the system includes a temperature detecting means (thermocouple) 7 and a furnace tube 1b.
It is configured so as to function as a temperature detecting means introducing structure 9 for introducing into the inside.
【００２８】また、ヒータ６は、ニクロム線、タンタル
線などの高抵抗線材（発熱線）１６を、炉管１の外周に
巻回することにより形成されており、Ｘ線の照射及び透
過を妨げないように、主要部（発熱帯）６ａが２つに分
割され、炉管１の、被検試料２が挿入される位置（試料
挿入位置）Ｐの、軸方向両側の外周部に配設されてい
る。より具体的には、高抵抗線材１６を炉管１の外周
に、一定間隔（例えば、１．５〜２．０mm）に巻回し、
例えばアルミナセメントなどの耐熱性固定剤（図示せ
ず）を用いて、高抵抗線材１６を緩まないように固定す
ることにより、試料挿入位置Ｐの両側の所定の位置に２
つの発熱帯６ａが形成されている。The heater 6 is formed by winding a high-resistance wire (heating wire) 16 such as a nichrome wire or a tantalum wire around the outer periphery of the furnace tube 1 to prevent irradiation and transmission of X-rays. The main part (tropical tropism) 6a is divided into two parts, and is disposed on the outer peripheral parts on both axial sides of the furnace tube 1 at the position (sample insertion position) P where the test sample 2 is inserted. ing. More specifically, the high resistance wire 16 is wound around the outer periphery of the furnace tube 1 at a constant interval (for example, 1.5 to 2.0 mm),
By fixing the high-resistance wire 16 so as not to be loosened using a heat-resistant fixing agent (not shown) such as alumina cement, for example, the high-resistance wire 16 is fixed at a predetermined position on both sides of the sample insertion position P.
One tropical zone 6a is formed.
【００２９】また、この実施形態１のＸ線透視検査装置
の高温観察炉においては、図２に示すように、炉管１中
の試料台１１の下側に配設された熱電対７からの温度検
出データに基づき、制御手段１２により、ヒータ（発熱
線）６への電圧を制御して、被検試料２の温度（被検試
料２の近傍の温度）を任意に設定することができるよう
に構成されている。In the high-temperature observation furnace of the X-ray fluoroscope according to the first embodiment, as shown in FIG. 2, the temperature of the thermocouple 7 disposed below the sample stage 11 in the furnace tube 1 is increased. Based on the temperature detection data, the control means 12 controls the voltage to the heater (heating wire) 6 so that the temperature of the test sample 2 (the temperature near the test sample 2) can be set arbitrarily. Is configured.
【００３０】なお、炉管１内への被検試料の導入は、蓋
部材８を開口部１ａから取り外した状態で、例えば、試
料台１１上に載置された被検試料２を、棒状のプッシャ
ーを用いてヒータ６の２つの発熱帯６ａ，６ａの間の試
料挿入位置Ｐまで押し込むことにより行われる。The test sample is introduced into the furnace tube 1 with the cover member 8 removed from the opening 1a and the test sample 2 placed on the sample table 11 for example. This is performed by pushing the heater 6 to the sample insertion position P between the two tropical zones 6a, 6a using a pusher.
【００３１】そして、所定の昇温速度で炉管１内の温度
を上昇させ、昇温工程における被検試料の状態、及び所
定の温度にまで昇温した後の被検試料の状態をＸ線透視
像により観察する。なお、被検試料の状態を観察するに
あたっては、例えば、Ｘ線透視装置のＸ線検出手段４に
ＣＣＤカメラを取り付け、これをビデオに接続してリア
ルタイムにＸ線透視像（観察像）を取り込むなどの方法
により、精密な観察を行うことが可能になる。Then, the temperature in the furnace tube 1 is raised at a predetermined temperature rising rate, and the state of the test sample in the temperature raising step and the state of the test sample after the temperature is raised to the predetermined temperature are changed by X-ray. Observe with a perspective image. When observing the state of the test sample, for example, a CCD camera is attached to the X-ray detection means 4 of the X-ray fluoroscope, and this is connected to a video to capture an X-ray fluoroscopic image (observation image) in real time. Such a method enables precise observation.
【００３２】この実施形態１のＸ線透視検査装置の高温
観察炉においては、Ｘ線源３と、Ｘ線検出手段４と、被
検試料２が挿入される一端側のみが開口した炉管１と、
被検試料２を所定の温度に加熱するヒータ６と、炉管１
内の温度を検出する温度検出手段７と、温度検出手段導
入構造部９及びガス導入構造部１０（図２）を備えた蓋
部材８とを備えているとともに、ヒータ６の主要部（発
熱帯）６ａを２つに分割して炉管１の試料挿入位置Ｐの
両側に配設するようにしているので、Ｘ線の照射及び透
過を妨げることなく、被検試料２の近傍の温度を均一に
制御するとともに、炉管１内の雰囲気を所望の雰囲気に
制御して、被検試料２の状態を精度よくしかもリアルタ
イムに観察することができる。In the high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to the first embodiment, the X-ray source 3, the X-ray detection means 4, and the furnace tube 1 open only at one end into which the test sample 2 is inserted. When,
A heater 6 for heating the test sample 2 to a predetermined temperature;
A temperature detecting means 7 for detecting the temperature in the inside, a lid member 8 provided with a temperature detecting means introducing structure 9 and a gas introducing structure 10 (FIG. 2), and a main part of the heater 6 (tropical region) 6) Since 6a is divided into two parts and arranged on both sides of the sample insertion position P of the furnace tube 1, the temperature near the test sample 2 can be made uniform without hindering the irradiation and transmission of X-rays. And the atmosphere in the furnace tube 1 is controlled to a desired atmosphere, so that the state of the test sample 2 can be observed accurately and in real time.
【００３３】なお、上記実施形態１では、ヒータ６の主
要部（発熱体）６ａを２つに分割するようにした場合を
例にとって説明したが、図３に示すように、ニクロム線
などの高抵抗線材１６を、炉管１の試料挿入位置Ｐの近
傍においては、巻回ピッチを大きくして（すなわち、高
抵抗線材の間隔を大きくして）、Ｘ線の照射及び透過を
妨げないような構成とすることも可能である。In the first embodiment, the case where the main part (heating element) 6a of the heater 6 is divided into two parts has been described as an example. However, as shown in FIG. In the vicinity of the sample insertion position P of the furnace tube 1, the resistance wire 16 is set so that the winding pitch is increased (that is, the interval between the high resistance wires is increased) so that irradiation and transmission of X-rays are not hindered. A configuration is also possible.
【００３４】なお、上記実施形態１では、Ｘ線の照射方
向が水平である場合を例にとって説明したが、本発明に
おいては、Ｘ線の照射方向を垂直方向とすることも可能
である。また、Ｘ線の照射方向を、水平方向及び垂直方
向以外の方向とすることも可能である。In the first embodiment, the case where the X-ray irradiation direction is horizontal has been described as an example. However, in the present invention, the X-ray irradiation direction can be vertical. Further, the X-ray irradiation direction may be a direction other than the horizontal direction and the vertical direction.
【００３５】［実施形態２］図４は、本発明の他の実施
形態（実施形態２）にかかるＸ線透視検査装置の高温観
察炉を示す側面図である。Second Embodiment FIG. 4 is a side view showing a high-temperature observation furnace of an X-ray inspection apparatus according to another embodiment (second embodiment) of the present invention.
【００３６】この実施形態２のＸ線透視検査装置の高温
観察炉は、Ｘ線透視検査時に、Ｘ線源３と炉管１の間に
挿入される、例えば、カーボン、ガラス、ポリイミド、
カプトンフィルムなどのＸ線透過材料からなる板状の放
熱部材２１を備えている。なお、その他の構成は、上記
実施形態１の場合と同様であることから、重複を避ける
ため、説明を省略する。なお、図４において、図１及び
２と同一符号を付した部分は、同一又は相当部分を示し
ている。The high-temperature observation furnace of the X-ray inspection apparatus according to the second embodiment is inserted between the X-ray source 3 and the furnace tube 1 at the time of X-ray inspection, for example, carbon, glass, polyimide,
A plate-shaped heat dissipating member 21 made of an X-ray transmitting material such as a Kapton film is provided. The other configuration is the same as that of the first embodiment, and therefore, the description is omitted to avoid duplication. In FIG. 4, portions denoted by the same reference numerals as those in FIGS. 1 and 2 indicate the same or corresponding portions.
【００３７】Ｘ線透視検査時に、Ｘ線源３と炉管１の間
に放熱部材２１を挿入することにより、例えば、２００
℃以上に加熱した被検試料２を観察するような場合に、
炉管１の熱がＸ線源３に直接に伝わって、Ｘ線源３にダ
メージを与える（例えば、熱によりシール部材が劣化し
たりする）ことを防止することが可能になり、設備の信
頼性や耐用性を向上させることができる。At the time of X-ray fluoroscopic inspection, by inserting a heat radiating member 21 between the X-ray source 3 and the furnace tube 1, for example, 200 mm
When observing the test sample 2 heated to at least
It is possible to prevent the heat of the furnace tube 1 from being directly transmitted to the X-ray source 3 and causing damage to the X-ray source 3 (for example, deterioration of the sealing member due to the heat). Properties and durability can be improved.
【００３８】［実施形態３］上記実施形態１及び２で
は、炉管１として、円筒状（断面形状が円形）の炉管を
用いているが、この実施形態３のように、多角筒状（断
面形状が多角形）の炉管１を用いることも可能である
（図５(ａ)，(ｂ)，(ｃ)参照）。[Third Embodiment] In the first and second embodiments, a furnace tube having a cylindrical shape (circular in cross section) is used as the furnace tube 1. However, as in the third embodiment, a polygonal tube ( It is also possible to use a furnace tube 1 having a polygonal cross section (see FIGS. 5 (a), 5 (b) and 5 (c)).
【００３９】なお、その他の構成は、上記実施形態１の
場合と同様であることから、重複を避けるため、説明を
省略する。なお、図５(ａ)，(ｂ)，(ｃ)において、図１
及び２と同一符号を付した部分は、同一又は相当部分を
示している。The other configuration is the same as that of the first embodiment, so that the description will be omitted to avoid duplication. 5A, 5B, and 5C, FIG.
2 and 2 have the same or corresponding parts.
【００４０】この実施形態３のように、炉管１として、
断面多角形状の炉管を用いることにより、実施形態１及
び２のように、円筒状の炉管１を用いた場合よりも、Ｘ
線源３に近接して被検試料２をセットすることが可能に
なり、画像の拡大率を大きくすることが可能になり、細
部まで精密な観察を行うことができるようになる。As in Embodiment 3, the furnace tube 1 is
By using a furnace tube having a polygonal cross-section, X is larger than when using a cylindrical furnace tube 1 as in Embodiments 1 and 2.
The test sample 2 can be set close to the radiation source 3, the magnification of the image can be increased, and precise observation can be performed in detail.
【００４１】［実施形態４］図６(ａ)は本発明のさらに
他の実施形態にかかるＸ線透視検査装置の高温観察炉の
要部を示す平面図、図６(ｂ)は側面図である。[Embodiment 4] FIG. 6A is a plan view showing a main part of a high-temperature observation furnace of an X-ray fluoroscopic inspection apparatus according to still another embodiment of the present invention, and FIG. 6B is a side view. is there.
【００４２】この実施形態４においては、Ｘ線を放射す
るＸ線源３と、透過したＸ線を検出するＸ線検出手段４
を、ＣＴ（Computed Tomography；コンピュータ断層撮
影）装置２２に取り付けている。なお、その他の構成
は、上記実施形態１の場合と同様であることから、重複
を避けるため、説明を省略する。なお、図６(ａ)，(ｂ)
において、図１及び２と同一符号を付した部分は、同一
又は相当部分を示している。In the fourth embodiment, an X-ray source 3 for radiating X-rays and an X-ray detector 4 for detecting transmitted X-rays
Is attached to a CT (Computed Tomography) device 22. The other configuration is the same as that of the first embodiment, and therefore, the description is omitted to avoid duplication. 6 (a) and 6 (b)
In FIG. 1, the portions denoted by the same reference numerals as those in FIGS. 1 and 2 indicate the same or corresponding portions.
【００４３】この実施形態４のように、Ｘ線を放射する
Ｘ線源３と、透過したＸ線を検出するＸ線検出手段４
を、ＣＴ（Computed Tomography；コンピュータ断層撮
影）装置２２に取り付けることにより、被検試料２につ
いて３６０゜の方向からの観察を行うことが可能にな
る。As in the fourth embodiment, an X-ray source 3 that emits X-rays, and an X-ray detector 4 that detects transmitted X-rays
Is attached to a CT (Computed Tomography) apparatus 22, so that the test sample 2 can be observed from a 360 ° direction.
【００４４】なお、上記実施形態１〜４においては、ヒ
ータとして、高抵抗線材（発熱線）を炉管の外周に巻回
することにより形成されたヒータを用いているが、ヒー
タの種類はこのような高抵抗線材（発熱線）を用いたも
のに限らず、他の形態の抵抗体などをヒータとして用い
ることも可能である。In the first to fourth embodiments, a heater formed by winding a high-resistance wire (heating wire) around the outer periphery of the furnace tube is used as the heater. The heater is not limited to the one using such a high-resistance wire (heat-generating wire), and another type of resistor or the like can be used as the heater.
【００４５】また、上記実施形態１〜４では、炉管とし
て、一端側が密閉された炉管を用いているが、場合によ
っては、両端が開口した炉管を用い、雰囲気ガスを一端
側から他端側に流すように構成することも可能である。In the first to fourth embodiments, the furnace tube having one end closed is used as the furnace tube. However, in some cases, a furnace tube having both ends opened is used, and the atmosphere gas is supplied from one end to another. It is also possible to make it flow to the end side.
【００４６】本発明は、さらにその他の点においても上
記実施形態に限定されるものではなく、Ｘ線源、Ｘ線検
出手段、温度検出手段などの構成や、放熱部材の形状な
どに関し、発明の要旨の範囲内において、種々の応用、
変形を加えることが可能である。The present invention is not limited to the above-described embodiment in other respects. The present invention relates to the structure of an X-ray source, X-ray detecting means, temperature detecting means, etc., and the shape of a heat radiation member. Various applications within the scope of the abstract,
Deformations can be made.
【００４７】[0047]
【発明の効果】上述のように、本発明（請求項１）のＸ
線透視検査装置の高温観察炉は、Ｘ線源と、Ｘ線検出手
段と、内部に被検試料が挿入される炉管と、被検試料を
所定の温度に加熱するヒータと、温度検出手段導入構造
部及びガス導入構造部の少なくとも一方を備えた蓋部材
とを備えているとともに、ヒータを、炉管の被検試料が
挿入される位置（試料挿入位置）の近傍の、Ｘ線の照射
及び透過を妨げない位置に配設するようにしているの
で、例えば、実装時の電子部品の電極とはんだの界面に
おけるぬれ現象や、熱ストレスによる電子部品への衝撃
や起点観察、はんだ溶融時のフラックスとはんだ金属と
の挙動観察などをＸ線透視像で観察することが可能にな
る。As described above, X of the present invention (claim 1)
The high-temperature observation furnace of the fluoroscopic inspection apparatus includes an X-ray source, X-ray detection means, a furnace tube into which a test sample is inserted, a heater for heating the test sample to a predetermined temperature, and a temperature detection means. A lid member provided with at least one of the introduction structure and the gas introduction structure, and irradiating the heater with X-rays near a position (sample insertion position) of the furnace tube where the test sample is inserted. Since it is arranged in a position that does not hinder the transmission, for example, the wetting phenomenon at the interface between the electrode and the solder of the electronic component at the time of mounting, the impact on the electronic component due to thermal stress and the observation of the starting point, It becomes possible to observe the behavior of the flux and the solder metal with an X-ray fluoroscopic image.
【００４８】また、請求項２のＸ線透視検査装置の高温
観察炉のように、ヒータの主要部を２つに分割し、炉管
の試料挿入位置の、軸方向両側の外周部に配設するよう
にした場合、Ｘ線の照射及び透過を妨げることなく、被
検試料の加熱を十分に行うことが可能になり、本発明を
実効あらしめることができる。Further, as in the high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to the second aspect, the main part of the heater is divided into two parts and the two parts are arranged on the outer peripheral parts on both axial sides of the furnace tube at the sample insertion position. In this case, the test sample can be sufficiently heated without hindering the irradiation and transmission of the X-ray, and the present invention can be made effective.
【００４９】また、請求項３のＸ線透視検査装置の高温
観察炉のように、ニクロム線、タンタル線などの高抵抗
線材（発熱線）を炉管の外周に巻回することによりヒー
タを形成するとともに、高抵抗線材を、少なくとも被検
試料が挿入される位置においては、Ｘ線の照射及び透過
を妨げないような巻回ピッチで巻回するようにした場
合、特殊なヒータや、構造の複雑なヒータを用いること
なく、実装時の電子部品の電極とはんだの界面における
ぬれ現象や、熱ストレスによる電子部品への衝撃や起点
観察、はんだ溶融時のフラックスとはんだ金属との挙動
観察などを、リアルタイムにＸ線透視像で観察すること
ができるようになり、本願発明をさらに実効あらしめる
ことができる。Further, as in the high-temperature observation furnace of the X-ray fluoroscope, a heater is formed by winding a high-resistance wire (heating wire) such as a nichrome wire or a tantalum wire around the outer periphery of the furnace tube. In addition, when the high-resistance wire is wound at a winding pitch that does not hinder X-ray irradiation and transmission at least at the position where the test sample is inserted, a special heater or structural Without using a complicated heater, wetting phenomena at the interface between the electrodes and solder of electronic components during mounting, impact and starting points on electronic components due to thermal stress, observation of flux and solder metal behavior during solder melting, etc. Thus, observation can be performed in real time with an X-ray fluoroscopic image, so that the present invention can be made more effective.
【００５０】また、請求項４のＸ線透視検査装置の高温
観察炉のように、炉管として、一端側のみが開口部とな
っているものを用いるようにした場合、蓋部材で一端側
の開口部を閉じるだけで、炉管を密閉にすることが可能
になる。その結果、昇温などの温度コントロールの容易
化、被検試料全体の温度の均一化、昇温により溶解する
試料や液体試料に対する観察の容易化、雰囲気制御のた
めのガス（Ｈ2，Ｏ2，Ｎ2など）の使用量の低減などを
実現することができる。Further, when a furnace tube having only one opening side is used as the furnace tube as in the high temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to the fourth aspect of the present invention, the one end side of the lid member may be used. Just closing the opening allows the furnace tube to be sealed. As a result, temperature control such as heating can be facilitated, the temperature of the entire test sample can be made uniform, observation of a sample or liquid sample dissolved by heating can be facilitated, and gas (H 2 , O 2 , and the like can be realized reduction of the amount of N 2, etc.).
【００５１】また、請求項５のＸ線透視検査装置の高温
観察炉のように、炉管の形状を、断面多角形状とした場
合には、円筒状の炉管を用いる場合よりもＸ線源に近接
して被検試料をセットすることが可能になるとともに、
画像の拡大率を大きくすることが可能になり、細部まで
精密な観察を行うことができる。Further, when the shape of the furnace tube is polygonal in cross section as in the high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to the fifth aspect, the X-ray source is larger than when a cylindrical furnace tube is used. It is possible to set the test sample close to
It is possible to increase the magnification of the image, and it is possible to perform a precise observation to the details.
【００５２】また、請求項６のＸ線透視検査装置の高温
観察炉のように、Ｘ線透視検査時に、Ｘ線源と炉管との
間に挿入される、Ｘ線透過材料からなる放熱部材を備え
た構成とした場合、例えば、２００℃以上に加熱した被
検試料を観察するような場合に、Ｘ線源と炉管の間に放
熱部材を挿入することにより、炉管の温度がＸ線源に直
接熱伝導して、Ｘ線源のシール部材を劣化させたりする
ことを防止することが可能になり、設備の信頼性や耐用
性を向上させることができる。Further, as in the high-temperature observation furnace of the X-ray inspection apparatus according to claim 6, a radiation member made of an X-ray transmission material inserted between the X-ray source and the furnace tube during the X-ray inspection. For example, when observing a test sample heated to 200 ° C. or more, a heat radiating member is inserted between the X-ray source and the furnace tube to reduce the temperature of the furnace tube to X. It is possible to prevent the heat from being directly transmitted to the radiation source and to prevent the seal member of the X-ray source from deteriorating, thereby improving the reliability and durability of the equipment.
【図１】本発明の一実施形態（実施形態１）にかかるＸ
線透視検査装置の高温観察炉を示す平面図である。FIG. 1 shows X according to an embodiment (Embodiment 1) of the present invention.
It is a top view which shows the high temperature observation furnace of a fluoroscope.
【図２】本発明の一実施形態（実施形態１）にかかるＸ
線透視検査装置の高温観察炉を示す正面図である。FIG. 2 shows X according to an embodiment (Embodiment 1) of the present invention.
It is a front view which shows the high temperature observation furnace of a fluoroscopy inspection apparatus.
【図３】本発明の一実施形態（実施形態１）にかかるＸ
線透視検査装置の高温観察炉の要部を示す正面図であ
る。FIG. 3 shows X according to an embodiment (Embodiment 1) of the present invention.
It is a front view which shows the principal part of the high temperature observation furnace of a fluoroscope.
【図４】本発明の他の実施形態（実施形態２）にかかる
Ｘ線透視検査装置の高温観察炉の変形例を示す側面図で
ある。FIG. 4 is a side view showing a modification of the high-temperature observation furnace of the X-ray fluoroscopic inspection apparatus according to another embodiment (Embodiment 2) of the present invention.
【図５】(ａ)，(ｂ)，(ｃ)は本発明のさらに他の実施形
態（実施形態３）にかかるＸ線透視検査装置の高温観察
炉の要部を示す図である。FIGS. 5 (a), (b) and (c) are diagrams showing a main part of a high-temperature observation furnace of an X-ray inspection apparatus according to still another embodiment (Embodiment 3) of the present invention.
【図６】本発明のさらに他の実施形態（実施形態４）に
かかるＸ線透視検査装置の高温観察炉の要部を示す図で
あり、(ａ)は平面図、(ｂ)は側面図である。FIG. 6 is a view showing a main part of a high-temperature observation furnace of an X-ray fluoroscopic inspection apparatus according to still another embodiment (Embodiment 4) of the present invention, wherein (a) is a plan view and (b) is a side view. It is.
【符号の説明】 １ 炉管 １ａ 炉管の一端側の開口部 ２ 被検試料 ３ Ｘ線源 ４ Ｘ線検出手段 ６ ヒータ ６ａ ヒータの主要部（発熱帯） ７ 温度検出手段（熱電対） ８ 蓋部材 ９ 温度検出手段導入構造部 １０ ガス導入構造部 １０ａ，１０ｂ ガラス管 １１ 試料台 １２ 制御手段 １６ 高抵抗線材（発熱線） ２１ 放熱部材 ２２ ＣＴ装置 Ｐ 試料挿入位置[Description of Signs] 1 Furnace tube 1a Opening on one end side of furnace tube 2 Sample to be tested 3 X-ray source 4 X-ray detecting means 6 Heater 6a Main part of heater (tropical tropism) 7 Temperature detecting means (thermocouple) 8 Lid member 9 Temperature detection means introduction structure 10 Gas introduction structure 10a, 10b Glass tube 11 Sample stand 12 Control means 16 High resistance wire (heating wire) 21 Heat radiating member 22 CT device P Sample insertion position
Claims (6)
してＸ線透視検査を行うためのＸ線透視検査装置の高温
観察炉において、 Ｘ線を放射するＸ線源と、 被検試料を透過したＸ線を検出するＸ線検出手段と、 少なくとも要部がＸ線透過材料からなり、内部の所定の
位置に被検試料が挿入される炉管と、 前記炉管の、被検試料が挿入される位置の近傍で、か
つ、Ｘ線の照射及び透過を妨げない位置に配設され、炉
管内に挿入された被検試料を所定の温度に加熱するヒー
タと、 炉管の開口部を封止する蓋部材であって、(a)炉管内の
被検試料近傍の温度を検出する温度検出手段を導入する
ための温度検出手段導入構造部及び、(b)炉管内に所望
のガスを導入するためのガス導入構造部の少なくとも一
方を備えた蓋部材とを具備することを特徴とするＸ線透
視検査装置の高温観察炉。An X-ray source for radiating X-rays in a high-temperature observation furnace of an X-ray fluoroscope for performing X-ray fluoroscopic inspection by irradiating a test sample heated in a furnace tube with X-rays; X-ray detection means for detecting X-rays transmitted through the test sample, a furnace tube in which at least a main part is made of an X-ray transparent material, and a test sample is inserted into a predetermined position inside, a furnace tube, A heater disposed near the position where the test sample is inserted and at a position where the irradiation and transmission of X-rays are not hindered and heating the test sample inserted into the furnace tube to a predetermined temperature; A lid member for sealing the opening of (a) a temperature detecting means introducing structure for introducing a temperature detecting means for detecting a temperature near the test sample in the furnace tube, and (b) inside the furnace tube And a lid member provided with at least one of a gas introduction structure for introducing a desired gas. Hot observation furnace that X-ray fluoroscopy apparatus.
記炉管の、被検試料が挿入される位置の、軸方向両側の
外周部に配設されていることを特徴とする請求項１記載
のＸ線透視検査装置の高温観察炉。2. A heater according to claim 1, wherein a main part of said heater is divided into two parts, and said heater is disposed on outer peripheral parts on both axial sides of said furnace tube at positions where test samples are inserted. Item 2. A high-temperature observation furnace for the X-ray fluoroscopic inspection apparatus according to Item 1.
周に巻回することにより形成されているとともに、前記
高抵抗線材が、少なくとも被検試料が挿入される位置に
おいては、Ｘ線の照射及び透過を妨げないような巻回ピ
ッチで巻回されていることを特徴とする請求項１又は２
記載のＸ線透視検査装置の高温観察炉。3. The heater is formed by winding a high-resistance wire around the outer periphery of the furnace tube, and the high-resistance wire is X-ray at least at a position where a test sample is inserted. 3. Winding is performed at a winding pitch that does not hinder irradiation and transmission of light.
A high-temperature observation furnace for the X-ray fluoroscope according to the above.
おり、他端側は開口していないことを特徴とする請求項
１〜３のいずれかに記載のＸ線透視検査装置の高温観察
炉。4. The X-ray fluoroscopic inspection apparatus according to claim 1, wherein only one end of the furnace tube has an opening, and the other end has no opening. High temperature observation furnace.
形状が多角形であることを特徴とする請求項１〜４のい
ずれかに記載のＸ線透視検査装置の高温観察炉。5. The high-temperature observation furnace for an X-ray inspection apparatus according to claim 1, wherein a cross-sectional shape of said furnace tube in a direction orthogonal to an axial direction is a polygon.
との間に挿入される、Ｘ線透過材料からなる放熱部材を
備えていることを特徴とする請求項１〜５のいずれかに
記載のＸ線透視検査装置の高温観察炉。6. A heat radiation member comprising an X-ray transparent material inserted between said X-ray source and said furnace tube during an X-ray fluoroscopic inspection. A high-temperature observation furnace for the X-ray fluoroscope according to any one of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000336983A JP4581224B2 (en) | 2000-11-06 | 2000-11-06 | High-temperature observation furnace for X-ray fluoroscopic inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000336983A JP4581224B2 (en) | 2000-11-06 | 2000-11-06 | High-temperature observation furnace for X-ray fluoroscopic inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002139461A true JP2002139461A (en) | 2002-05-17 |
| JP4581224B2 JP4581224B2 (en) | 2010-11-17 |
Family
ID=18812439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000336983A Expired - Fee Related JP4581224B2 (en) | 2000-11-06 | 2000-11-06 | High-temperature observation furnace for X-ray fluoroscopic inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4581224B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10225899A1 (en) * | 2002-06-11 | 2004-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for the visualization of temperature-dependent processes and portable device for carrying out the process |
| JP2004340973A (en) * | 2003-05-15 | 2004-12-02 | Samsung Electronics Co Ltd | Real-time monitoring system in jointing process, and method therefor |
| JP2005353712A (en) * | 2004-06-09 | 2005-12-22 | Okuhara Electric Inc | Soldering equipment including radioscopy camera |
| JP2009123858A (en) * | 2007-11-14 | 2009-06-04 | Cores:Kk | Heating type x-ray observation apparatus |
| CN107885253A (en) * | 2017-11-21 | 2018-04-06 | 中国工程物理研究院电子工程研究所 | A kind of precise temperature control device for the experiment of semiconductor devices dose rate effect |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000131247A (en) * | 1998-10-29 | 2000-05-12 | Kawasaki Steel Corp | Method for observing directly inside of coal-packed bed under carbonization |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5776445A (en) * | 1980-10-31 | 1982-05-13 | Nippon Steel Corp | Method for analysis of reducing condition of oxide |
| JPS5814034A (en) * | 1981-07-17 | 1983-01-26 | Nippon Steel Corp | Method and device for x-ray transmission analysis on hot material |
| JPH0675041B2 (en) * | 1985-04-10 | 1994-09-21 | 新日本製鐵株式会社 | Direct observation equipment for carbonization process of coal |
| JPH0623684B2 (en) * | 1985-08-21 | 1994-03-30 | 新日本製鐵株式会社 | Method for measuring bulk density distribution of coal, coke, etc. |
| JPH0252245A (en) * | 1988-08-15 | 1990-02-21 | Tokyo Electron Ltd | X-ray inspection device |
-
2000
- 2000-11-06 JP JP2000336983A patent/JP4581224B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000131247A (en) * | 1998-10-29 | 2000-05-12 | Kawasaki Steel Corp | Method for observing directly inside of coal-packed bed under carbonization |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10225899A1 (en) * | 2002-06-11 | 2004-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for the visualization of temperature-dependent processes and portable device for carrying out the process |
| DE10225899B4 (en) * | 2002-06-11 | 2004-12-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Portable device for the visualization of temperature-dependent processes |
| JP2004340973A (en) * | 2003-05-15 | 2004-12-02 | Samsung Electronics Co Ltd | Real-time monitoring system in jointing process, and method therefor |
| JP2005353712A (en) * | 2004-06-09 | 2005-12-22 | Okuhara Electric Inc | Soldering equipment including radioscopy camera |
| JP2009123858A (en) * | 2007-11-14 | 2009-06-04 | Cores:Kk | Heating type x-ray observation apparatus |
| CN107885253A (en) * | 2017-11-21 | 2018-04-06 | 中国工程物理研究院电子工程研究所 | A kind of precise temperature control device for the experiment of semiconductor devices dose rate effect |
| CN107885253B (en) * | 2017-11-21 | 2024-05-03 | 中国工程物理研究院电子工程研究所 | Precise temperature control device for semiconductor device dose rate effect experiment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4581224B2 (en) | 2010-11-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI592656B (en) | Thermogravimetric device | |
| JP2015108540A5 (en) | ||
| JP4581224B2 (en) | High-temperature observation furnace for X-ray fluoroscopic inspection equipment | |
| JPS59500688A (en) | Low temperature stage for trace analysis | |
| JP2007158106A (en) | Observation apparatus | |
| GB2044453A (en) | Device for measuring the thermal conductivity of liquids | |
| US11460425B2 (en) | Thermal analyzer | |
| JP2005353712A (en) | Soldering equipment including radioscopy camera | |
| JP2013076688A (en) | Solder ball inspection device | |
| JP2008187085A (en) | Inspecting device and inspecting method for substrate for temperature monitoring | |
| JP2017072516A (en) | Defect inspection method | |
| JP2006242574A (en) | Pad type thermocouple | |
| JP5147305B2 (en) | Die bonder equipment | |
| US20200376580A1 (en) | Soldering Device | |
| JP2015076303A (en) | Electron microscope | |
| JP6469616B2 (en) | X-ray transparent soldering equipment | |
| JP4959844B2 (en) | X-ray inspection heating device | |
| JP7464827B2 (en) | Heating device and test specimen for X-ray CT device | |
| RU2202747C2 (en) | Laboratory furnace for optical investigations | |
| JPH0252245A (en) | X-ray inspection device | |
| JP2820089B2 (en) | Soaking heater | |
| JP2004340973A (en) | Real-time monitoring system in jointing process, and method therefor | |
| JP4818245B2 (en) | Heating X-ray observation device | |
| JP2957046B2 (en) | How to fix the thermocouple to the measured object | |
| JP7151017B2 (en) | temperature measuring instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070905 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100409 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100420 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100618 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100803 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100816 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4581224 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130910 Year of fee payment: 3 |
|
| LAPS | Cancellation because of no payment of annual fees |